Damping mechanism and lapping and polishing machine tool

Abstract

The present application relates to a kind of damping mechanism and grinding polishing machine tool, damping mechanism includes fixed seat, connecting disc and at least two piston cylinders, piston cylinder includes piston rod, fixed seat is used to connect, at least two piston cylinders are arranged in pairs on connecting disc, closed fluid circuit is arranged between each pair of piston cylinders, fixed seat is movably connected with connecting disc by piston cylinder, piston cylinder is arranged to damp the movement of fixed seat.Grounding, grinding disc will be lifted by the part of workpiece thickness, will produce floating and drive fixed seat floating in rotation process, piston cylinder is provided with throttle orifice at the connection of the side of fluid circuit away from fixed seat, due to the throttle effect of small hole, pressure difference can be generated on both sides of throttle orifice, and then pressure difference is generated between each pair of piston cylinders, so that the part of workpiece thickness bears larger pressure from grinding disc.Each two piston cylinders are arranged in pairs on connecting disc, and pressure is applied to each part of workpiece, so as to improve grinding efficiency.

Description

Technical Field

[0001] This invention relates to the field of grinding machine tool technology, and in particular to a damping mechanism and a grinding and polishing machine tool. Background Technology

[0002] Grinding machines grind abrasives or workpieces by applying pressure to a rotating grinding disc. Typical grinding machines use a drive device to control the movement of the grinding disc as a whole, thus applying pressure and grinding to the workpiece. However, when there are large differences in thickness across different parts of the workpiece, such grinding equipment cannot apply pressure to different parts of the workpiece surface in a targeted manner. This results in the need for long grinding times and multiple grinding operations to achieve the required surface quality, leading to low grinding efficiency. Summary of the Invention

[0003] Therefore, it is necessary to provide a damping mechanism that can apply different pressures to different parts of the surface of the workpiece to be ground, in order to address the problem that grinding machines cannot apply pressure to different parts of the surface of the workpiece to be ground.

[0004] A damping mechanism, the damping mechanism comprising:

[0005] A mounting base is used to connect the grinding disc;

[0006] The connecting plate and at least two piston cylinders, each piston cylinder including a piston rod, are arranged in pairs on the connecting plate. A closed fluid circuit is provided between each pair of piston cylinders. A throttling orifice is provided at the connection point of the piston cylinder with the fluid circuit on the side away from the fixed seat. The fixed seat is movably connected to the connecting plate through the piston cylinder. The piston cylinder is configured to dampen the movement of the fixed seat.

[0007] In one embodiment, the piston cylinder further includes a cylinder body, a rodless chamber, and a rod chamber. The cylinder body is connected to the connecting plate, and the piston rod is configured to move linearly relative to the cylinder body. The rodless chambers and rod chambers of each pair of piston cylinders are connected to each other, and one end of the piston rod that extends out of the rod chamber is connected to the fixed seat.

[0008] In one embodiment, the damping mechanism further includes a first connecting pipe and a second connecting pipe, wherein the rodless chambers of each pair of piston cylinders are connected through the first connecting pipe, and the rod chambers of each pair of piston cylinders are connected through the second connecting pipe.

[0009] In one embodiment, the piston cylinder further includes a throttling element disposed at the connection between the first connecting pipe and the rodless chamber of the piston cylinder, and a throttling orifice disposed axially on the throttling element and communicating with the first connecting pipe, the orifice having a diameter of 0.1 to 1 mm.

[0010] In one embodiment, the piston cylinder is a hydraulic cylinder, the rodless chamber and the rod chamber are used to fill hydraulic oil, the cylinder body further includes an end cap, the end cap is disposed at one end of the cylinder body near the rodless chamber, the first connecting pipe is connected to the end cap, the end cap has an oil return port, the oil return port is used to allow oil to overflow when filling the rodless chamber, to determine whether it is full of oil; and / or,

[0011] The piston cylinder further includes a first connection port and a second connection port. The second connecting pipe communicates with the rod chamber through the first connection port. The second connection port is used to overflow oil when filling the rod chamber with oil, so as to determine whether it is full of oil.

[0012] In one embodiment, the damping mechanism further includes a grinding disc connected to the side of the fixed seat away from the piston cylinder. The end of the grinding disc away from the fixed seat is provided with a grinding surface, and the grinding surface is provided with evenly distributed fine grooves for guiding the grinding fluid to be evenly distributed on the grinding surface.

[0013] In one embodiment, the piston cylinder further includes a piston sleeve fitted onto the piston rod. One end of the piston sleeve has a countersunk hole that abuts against the head of the piston rod, and the other end of the piston sleeve abuts against the fixed seat.

[0014] In one embodiment, the rodless chamber and the rod chamber, the piston rod and the fixed seat, and the piston rod and the cylinder are all sealed.

[0015] In one embodiment, both the fixing base and the connecting plate have through holes at their axes, and the through holes are used to place auxiliary equipment.

[0016] A grinding and polishing machine tool, the grinding and polishing machine tool including the damping mechanism as described above, and

[0017] A platform is provided, which is positioned opposite to the fixed base of the damping mechanism.

[0018] The aforementioned damping mechanism connects the grinding disc to a fixed base, which moves together with the grinding disc during grinding. When there are thickness differences in various parts of the workpiece to be ground, the grinding disc is lifted by the thicker parts of the workpiece, causing it to float during rotation and causing the fixed base to float as well. Floating refers to the movement of the grinding disc and the fixed base towards the connecting disc when lifted by the thicker parts of the workpiece. The fixed base and the connecting disc are movably connected by a piston cylinder, which includes a piston rod. A closed fluid circuit is provided between every two piston cylinders. The piston cylinder has a throttling orifice at the connection point with the fluid circuit on the side furthest from the fixed base. According to the throttling effect of the orifice, when the fluid continuously passes through the throttling orifice, the flow velocity increases sharply, increasing fluid friction loss and reducing fluid potential energy. This creates a pressure difference on both sides of the throttling orifice, which in turn creates a pressure difference between each pair of piston cylinders connected by the fluid circuit, causing the thicker parts of the workpiece to bear greater pressure from the grinding disc. By pairing two piston cylinders on the connecting plate, pressure can be applied to various parts of the surface of the workpiece to be ground, reducing the number of grinding cycles and grinding time, and improving grinding efficiency. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the overall structure of the damping mechanism in one embodiment;

[0020] Figure 2 This is a top view of the damping mechanism in one embodiment;

[0021] Figure 3 This is a cross-sectional view of the damping mechanism in one embodiment;

[0022] Figure 4 This is a cross-sectional view of a hydraulic cylinder in one embodiment;

[0023] Figure 5 This is a top view of a hydraulic cylinder in one embodiment.

[0024] Label Explanation:

[0025] 10. Hydraulic cylinder; 20. Connecting plate; 30. Fixed base; 40. First connecting pipe; 50. Second connecting pipe; 60. Grinding plate;

[0026] 11. Piston rod; 12. Piston sleeve; 13. Cylinder body; 131. Rodless chamber; 132. Rod chamber; 133. First connection port; 134. Second connection port; 135. End cap; 1351. Cap body connection hole; 1352. Oil return port; 14. Throttling element; 15. Seal. Detailed Implementation

[0027] To make the above-mentioned objects, features, and advantages of the present invention more apparent and understandable, specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of the present invention. However, the present invention can be practiced in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0028] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0029] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this invention, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0030] In this invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0031] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "over," and "on top" of the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0032] It should be noted that when an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. When an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementation.

[0033] See Figures 1 to 3 , Figure 1 A schematic diagram of the overall structure of the damping mechanism in one embodiment of the present invention is shown. Figure 2 This is a top view of the damping mechanism in one embodiment. Figure 3 This is a cross-sectional view of a damping mechanism in one embodiment. An embodiment of the present invention provides a damping mechanism including a fixed base 30, a connecting plate 20, and at least two piston cylinders. A grinding plate 60 is connected and mounted via the fixed base 30, and the fixed base 30 moves together with the grinding plate 60 during grinding. When there are thickness differences in various parts of the workpiece to be ground, the grinding disc 60 will be lifted by the thicker parts of the workpiece. During rotation, it will float, causing the fixed seat 30 to float as well. Floating refers to the movement of the grinding disc and the fixed seat towards the connecting disc when lifted by the thicker parts of the workpiece. The fixed seat 30 and the connecting disc 20 are movably connected by a piston cylinder. The piston cylinder includes a piston rod, and a closed fluid circuit is provided between every two piston cylinders. The piston cylinder has a throttling orifice at the connection point with the fluid circuit on the side away from the fixed seat. According to the throttling effect of the orifice, when the fluid continuously passes through the throttling orifice, the flow velocity increases sharply, increasing fluid friction loss and reducing fluid potential energy. This creates a pressure difference on both sides of the throttling orifice, and further creates a pressure difference between each pair of piston cylinders connected by the fluid circuit, causing the thicker parts of the workpiece to bear greater pressure from the grinding disc 60. By arranging every two piston cylinders in pairs on the connecting disc 20, pressure can be applied to various parts of the surface of the workpiece to be ground, reducing the number of grinding passes and grinding time, and improving grinding efficiency.

[0034] Specifically, such as Figures 1 to 4As shown, in one embodiment, the piston cylinder of the damping mechanism is provided with a cylinder body 13, a piston rod 11, a rodless chamber 131, and a rod chamber 132. The cylinder body 13 is connected to the connecting plate 20, fixing the cylinder body 13 to the connecting plate 20. The piston rod 11 is configured to move linearly relative to the cylinder body 13. The rodless chamber 131 and the rod chamber 132 of each pair of piston cylinders are connected to each other, realizing a closed fluid circuit between each pair of piston cylinders. One end of the piston rod 11 that passes through the rod chamber 132 is connected to the fixed seat 30. During grinding, the grinding disc 60 drives the fixed seat 30 to float. Since the fixed seat 30 is connected to the piston rod 11, the motion is transmitted to the piston rod 11, causing the piston rod 11 to produce a linear displacement relative to the cylinder body 13. At the same time, the piston rod 11 pushes the fluid in the rodless chamber 131 to flow to the rodless chamber 131 of the opposite piston cylinder that is connected to the piston cylinder. Meanwhile, in the opposite piston cylinder, the fluid in its rodless chamber continues to push the piston rod towards the rod chamber, causing the fluid in the rod chamber to flow into the rod chamber 132 of the piston cylinder connected to it, thus creating a closed fluid circuit between each pair of piston cylinders. Due to the throttling effect of the orifice, a pressure difference is generated on both sides of the orifice as the fluid continuously passes through it. This pressure difference then exists between each pair of piston cylinders connected by the fluid circuit, causing the workpiece pressed between the stage and the grinding disc 60 to experience greater pressure from the grinding disc 60 in its thicker areas. Simultaneously, the movement of the piston rod, the fixed seat, and the grinding disc 60 is not completely fixed but has room for variation, thus preventing the workpiece from being crushed. Multiple hydraulic cylinders 10 are distributed in pairs along the circumference of the connecting disc 20, enabling the grinding disc 60 to apply targeted pressure to various parts of the workpiece, improving grinding efficiency.

[0035] Optionally, at least two piston cylinders are evenly distributed circumferentially on the connecting plate 20. The number of piston cylinders is not limited, as long as the structural strength and rigidity of the connecting plate 20 can meet the operational requirements while being installed with it. Optionally, the number of piston cylinders can be two, four, six, eight, or ten, which facilitates the assembly and arrangement of fluid pipelines.

[0036] To allow fluid to flow between the two piston cylinders, in one embodiment, the damping mechanism further includes a first connecting pipe 40 and a second connecting pipe 50. The rodless chambers 131 of each pair of piston cylinders are connected by the first connecting pipe 40, and the rod chambers 132 of each pair of piston cylinders are connected by the second connecting pipe 50. Specifically, the number of first connecting pipes 40 and second connecting pipes 50 depends on the number of piston cylinders. One first connecting pipe 40 and one second connecting pipe 50 are provided between each pair of piston cylinders. Multiple first connecting pipes 40 and second connecting pipes 50 are stacked in the height direction of the piston cylinders to avoid interference between the pipes.

[0037] The first connecting pipe 40 and the second connecting pipe 50 can be made of rigid oil pipe or hydraulic hose, as long as they can withstand the pressure of the conveying medium. Optionally, the first connecting pipe 40 and the second connecting pipe 50 can be made of copper pipe, steel pipe, rubber pipe or nylon pipe.

[0038] To enhance the damping effect of the damping mechanism and improve the pressure feedback effect on the workpiece to be ground, in one embodiment, the piston cylinder further includes a throttling element 14. The throttling element 14 is located at the connection between the first connecting pipe 40 and the rodless chamber 131 of the piston cylinder. The throttling element has a throttling orifice with a diameter of 0.1 to 1 mm. During grinding, when the grinding disc, fixed seat, and piston rod are lifted by the thicker part of the workpiece, the throttling element 14 restricts the flow rate of fluid out of the rodless chamber, increasing the pressure in the rodless chamber 131. This increases the resistance to the piston rod 11 moving into the rodless chamber, thereby reducing the floating of the fixed seat 30 and the grinding disc 60. This allows the thicker part of the workpiece to be ground to experience greater pressure when the grinding disc 60 rotates, further improving grinding efficiency and saving processing time. Optionally, the throttling element 14 can be a throttling valve, facilitating the adjustment of the size of the throttling orifice to regulate the flow rate and pressure of the fluid. Optionally, under certain working conditions, such as when grinding semiconductor wafers, when the thickness differences at various points on the surface of the workpiece to be ground are 0.02mm, 0.04mm, 0.06mm, 0.08mm, and 0.1mm, the throttling orifice of the throttling device is set to 0.6mm, 0.7mm, 0.8mm, 0.8mm, and 0.9mm, respectively, to ensure that the damping mechanism provides an appropriate force for the grinding high point, thereby improving grinding efficiency while ensuring grinding quality.

[0039] like Figures 1 to 5As shown, optionally, the piston cylinder can be a pneumatic cylinder or a hydraulic cylinder 10 to form a closed fluid circuit between the two cylinder bodies 13. To enhance the smoothness of the damping mechanism's operation, in one embodiment, the piston cylinder is a hydraulic cylinder 10, with the rodless chamber 131 and the rod chamber 132 filled with hydraulic oil. The cylinder body 13 also includes an end cap 135, which covers the end of the cylinder body 13 near the rodless chamber 131. A first connecting pipe 40 is connected to the end cap 135, and the end cap 135 has a return port 1352. The return port 1352 is used to overflow oil when filling the rodless chamber 131 to determine whether it is full of oil. It is understood that air will also be discharged from the return port 1352 at the same time as the overflowing oil. Specifically, before filling the rodless chamber 131 with oil, the piston rod 11 is moved to the bottom of the rod chamber 132. An oil pipe is connected to the end cap 135, and a tee connector is connected to the first connecting pipe 40. One of the tee connectors is connected to the pressure oil inlet, and the other two connectors are connected to the oil pipe on the end cap 135 and the first connecting pipe 40, respectively. Another oil pipe is connected to the oil return port 1352 of the end cap 135 for oil return. When filling with oil, the pressure oil inlet switch is opened to fill the rodless chamber 131 with oil until there is overflow from the oil return port 1352, which is considered to be full of oil. At this time, the pressure oil inlet switch is closed to stop filling with oil. Optionally, the piston cylinder also includes a first connecting port 133 and a second connecting port 134. The second connecting pipe 50 is connected to the rod chamber 132 through the first connecting port 133, and the second connecting port 134 is used to overflow oil when filling the rod chamber 132 to determine whether it is full of oil. Similarly, when filling the rod chamber 132 with oil, oil is supplied to the rod chamber 132 through the first connection port 133 and returned through the second connection port 134. When the piston rod 11 is observed to be lifted and oil overflows from the second connection port 134, it is considered that the rod chamber 132 is full of oil. At this time, the pressure oil inlet switch is closed to stop the oil filling. Afterwards, the return port 1352 of the upper oil chamber is plugged with a threaded plug, and then the cylinder body 13 is placed horizontally with the second connection port 134 facing upwards and plugged with a threaded plug. Finally, the hydraulic cylinder 10 is installed with the connecting plate 20, and then the pressure oil inlet switch is opened to adjust the oil pressure in the chamber to the calculated value, completing the oil filling. The oil pressure in the rodless chamber 131 of the hydraulic cylinder 10 is related to the rotation speed of the grinding disc 60, the orifice size of the throttling device 14, and the thickness difference of the workpiece to be ground. The faster the rotation speed of the grinding disc 60, the smaller the orifice size of the throttling device, and the greater the thickness difference of the workpiece to be ground, the greater the pressure in the rodless chamber 131. The fixed seat 30 and the grinding disc 60 connected to the piston rod 11 will then exert greater pressure on the workpiece, resulting in a greater grinding force on the workpiece and improving the grinding efficiency.

[0040] In one embodiment, the connecting plate 20 includes a cylinder body connecting portion, a web plate, and a center seat. The cylinder body connecting portion is annular, and the cylinder bodies 13 of the hydraulic cylinders 10 are evenly arranged on the cylinder body connecting portion. The center seat and the cylinder body connecting portion are connected by the web plate. At least two web plates are evenly arranged between the cylinder body connecting portion and the center seat, ensuring connection stability while saving material for the connecting plate 20 and reducing the overall weight of the damping mechanism. Optionally, the web plate is a plate structure with a triangular, rectangular, or trapezoidal cross-section.

[0041] Optionally, the fixing seat 30 is provided with a rod connecting part and a reinforcing rib. The piston rod 11 is connected to the rod connecting part, and at least two reinforcing ribs are evenly distributed on the outer side wall of the rod connecting part of the fixing seat 30 to protect the stability and reliability of the fixing seat 30.

[0042] Optionally, the end cap 135 is provided with a cap connecting hole 1351, which is a threaded hole, and the end cap 135 is connected to the cylinder body 13 by bolts. The end of the piston rod 11 is provided with a connecting thread, and the piston rod 11 is threadedly connected to the fixed seat 30, so that the piston rod 11 and the fixed seat 30 are connected and fixed. Optionally, the piston rod 11 is a bolt. The end cap 135 is also provided with a pipe threaded hole, through which the first connecting pipe 40 is threadedly connected to the end cap 135. The fixed seat 30 and the grinding disc 60 are threadedly connected. The threaded connection improves the convenience of assembly and disassembly and operability.

[0043] Optionally, in one embodiment, the damping mechanism further includes a grinding disc 60, which is connected to the side of the fixed seat 30 away from the piston cylinder. The end of the grinding disc 60 away from the fixed seat 30 is provided with a grinding surface, which has evenly distributed fine grooves. These grooves guide the grinding fluid to be evenly distributed on the grinding surface. Specifically, the fine grooves can be multiple concentric rings evenly distributed on the grinding surface, or a grid-like groove evenly distributed on the grinding surface, to evenly guide the grinding fluid to all parts of the grinding surface during grinding, thereby improving the grinding effect.

[0044] In one embodiment, the piston cylinder further includes a piston sleeve 12, which is fitted onto the piston rod 11. One end of the piston sleeve 12 has a countersunk hole that abuts against the head of the piston rod 11, and the other end of the piston sleeve 12 abuts against the fixed seat 30, thereby achieving end-positioning of the piston sleeve 12 and enabling synchronous movement of the piston rod 11 and the piston sleeve 12. Optionally, the piston rod 11 and the piston sleeve 12 are fixed by welding. The piston sleeve 12 is made of steel with a chrome-plated layer on its surface, which improves the surface hardness, smoothness, and corrosion resistance of the piston sleeve 12, reduces wear on the cylinder body 13 and the seal 15, and improves the overall service life of the hydraulic cylinder 10.

[0045] To ensure oil sealing, in one embodiment, the rodless chamber 131 and the rod chamber 132, the piston rod 11 and the fixed seat 30, and the piston rod 11 and the cylinder body 13 are all sealed. Specifically, sealing elements 15 are provided between the piston sleeve 12 and the piston rod 11, between the piston sleeve 12 and the cylinder body 13, between the piston rod 11 and the fixed seat 30, and between the end cap 135 and the cylinder body 13. The sealing elements 15 can be sealing rings. Optionally, multiple sealing rings can be provided between the piston sleeve 12 and the piston rod 11, between the piston sleeve 12 and the cylinder body 13, between the piston rod 11 and the fixed seat 30, and between the end cap 135 and the cylinder body 13 to further ensure the sealing effect.

[0046] To facilitate the assembly, disassembly, and maintenance of the damping mechanism, in one embodiment, through holes are provided at the axes of both the fixed base 30 and the connecting plate 20. These through holes are used to house auxiliary equipment, which can be equipment required for the operation of a grinding and polishing machine. The auxiliary lifting device can be a hydraulic cylinder. By controlling the extension and retraction of the hydraulic cylinder, the fixed base 30 and the connecting plate 20 are lifted, facilitating assembly, disassembly, maintenance, and replacement. The hydraulic circuit control is existing technology and will not be described in detail here.

[0047] The aforementioned damping mechanism connects the grinding disc 60 to the fixed base 30. During grinding, the fixed base 30 moves together with the grinding disc 60. When there are thickness differences in various parts of the workpiece to be ground, the grinding disc 60 will be lifted by the thicker part of the workpiece. During rotation, it will float, causing the fixed base 30 to float as well. Floating refers to the movement of the grinding disc and the fixed base towards the connecting plate when lifted by the thicker part of the workpiece. The fixed base 30 and the connecting plate 20 are movably connected by a piston cylinder. The piston cylinder includes a piston rod, and a closed fluid circuit is provided between each pair of piston cylinders. The piston cylinder has a throttling orifice at the connection point with the fluid circuit on the side away from the fixed base. According to the throttling effect of the orifice, when the fluid continuously passes through the throttling orifice, the flow velocity increases sharply, increasing fluid friction loss and reducing fluid potential energy. This generates a pressure difference on both sides of the throttling orifice, which in turn generates a pressure difference between each pair of piston cylinders connected by the fluid circuit, causing the thicker part of the workpiece to bear greater pressure from the grinding disc 60. By pairing two piston cylinders on the connecting plate 20, pressure can be applied to various parts of the surface of the workpiece to be ground, reducing the number of grinding cycles and grinding time, and improving grinding efficiency.

[0048] Furthermore, the present invention also provides a grinding and polishing machine tool, including a stage and a damping mechanism as described above, wherein the stage and the fixed seat 30 of the damping mechanism are arranged opposite to each other. The workpiece to be ground is placed on the stage, and the grinding disc 60 abuts against the workpiece to achieve grinding. Through the damping effect of the damping mechanism, pressure is applied to various parts of the surface of the workpiece to be ground, reducing the number of grinding passes and grinding time, and improving grinding efficiency.

[0049] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0050] The above embodiments merely illustrate several implementation methods of the present invention, and their descriptions are relatively specific and detailed, but they should not be construed as limiting the scope of the invention patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of the present invention, and these all fall within the protection scope of the present invention. Therefore, the protection scope of this invention patent should be determined by the appended claims.

Claims

1. A damping mechanism, characterized in that, The damping mechanism includes: A mounting base is used to connect the grinding disc; A connecting plate and at least two piston cylinders, each piston cylinder including a piston rod, the at least two piston cylinders being arranged in pairs on the connecting plate, a closed fluid circuit being provided between each pair of piston cylinders, the piston cylinder having a throttling orifice at the connection point with the fluid circuit on the side away from the fixed seat, the fixed seat being movably connected to the connecting plate through the piston cylinder, and the piston cylinder being configured to dampen the movement of the fixed seat; The piston cylinder further includes a cylinder body, a rodless chamber, and a rod chamber. The cylinder body is connected to the connecting plate. The piston rod is configured to move linearly relative to the cylinder body. The rodless chamber and the rod chamber of each pair of piston cylinders are connected to each other. One end of the piston rod that protrudes from the rod chamber is connected to the fixed seat. The damping mechanism further includes a first connecting pipe and a second connecting pipe, wherein the rodless chambers of each pair of piston cylinders are connected through the first connecting pipe, and the rod chambers of each pair of piston cylinders are connected through the second connecting pipe.

2. The damping mechanism according to claim 1, characterized in that, The piston cylinder further includes a throttling element, which is disposed at the connection between the first connecting pipe and the rodless chamber of the piston cylinder. The throttling orifice is disposed axially on the throttling element and communicates with the first connecting pipe. The orifice diameter is 0.1 to 1 mm.

3. The damping mechanism according to claim 1, characterized in that, The piston cylinder is a hydraulic cylinder. The rodless chamber and the rod chamber are filled with hydraulic oil. The cylinder body also includes an end cap, which is located at one end of the cylinder body near the rodless chamber. The first connecting pipe is connected to the end cap. The end cap has an oil return port, which is used to allow oil to overflow when filling the rodless chamber, to determine whether it is full of oil; and / or, The piston cylinder further includes a first connection port and a second connection port. The second connecting pipe communicates with the rod chamber through the first connection port. The second connection port is used to overflow oil when filling the rod chamber with oil, so as to determine whether it is full of oil.

4. The damping mechanism according to claim 1, characterized in that, The damping mechanism also includes a grinding disc, which is connected to the side of the fixed seat away from the piston cylinder. The end of the grinding disc away from the fixed seat is provided with a grinding surface, and the grinding surface is provided with evenly distributed fine grooves, which are used to guide the grinding fluid to be evenly distributed on the grinding surface.

5. The damping mechanism according to claim 1, characterized in that, The piston cylinder also includes a piston sleeve, which is fitted onto the piston rod. One end of the piston sleeve has a countersunk hole that abuts against the head of the piston rod, and the other end of the piston sleeve abuts against the fixed seat.

6. The damping mechanism according to claim 1, characterized in that, The rodless chamber and the rod chamber, the piston rod and the fixed seat, and the piston rod and the cylinder are all sealed.

7. The damping mechanism according to claim 1, characterized in that, Both the fixed base and the connecting plate have through holes at their axes, which are used to place auxiliary equipment.

8. A grinding and polishing machine tool, characterized in that, The grinding and polishing machine tool includes the damping mechanism as described in any one of claims 1 to 7, and A platform is provided, which is positioned opposite to the fixed base of the damping mechanism.

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