A vacuum chamber product leak detection device and leak detection method

Abstract

The present invention belongs to the field of vacuum chamber product production technology. The device cavity wall (1) is connected to a vacuum pump (8) through a first pipeline (11), and the device cavity wall (1) is connected to the first pipeline (11) through a second pipeline (12). A molecular pump (5) is provided on the second pipeline (12). The device cavity wall (1) is connected to a helium mass spectrometer leak detector (10) through a third pipeline (13). The vacuum pump (8) is connected to a tail exhaust pipeline (9) through a fifth pipeline (15), and the helium mass spectrometer leak detector (10) is connected to the tail exhaust pipeline (9) through a sixth pipeline (16). The vacuum chamber product leak detection device of the present invention can be flexibly moved to the site to detect leaks of vacuum chamber products, solves the problem that the machine that is inconvenient to move can only detect leaks after vacuuming, ensures the reliability of leak detection, is applicable to leak detection of various vacuum chamber products, prevents toxic polluting gases from contaminating the site, and protects the site working environment.

Description

Technical Field

[0001] The present invention belongs to the technical field of leak detection of various chambers or chamber additional materials, and more specifically, relates to a leak detection device for vacuum chamber products. Background Art

[0002] For leak detection of various chambers or chamber additional materials (such as vacuum chamber products, Cds refers to cadmium sulfide), vacuum leak detection equipment is required. A search of the prior art shows that:

[0003] Search 1: Patent CN201320423199.X discloses a leak detection device for detecting the leakage rate of insulated gas cylinders, comprising a leak detector, a first group of insulated gas cylinders, a second group of insulated gas cylinders, a leak detection circuit connected to the leak detector, a pre-extraction unit, and a diversion unit. A first pipeline connects one group of insulated gas cylinders to the leak detection circuit, and a second pipeline connects the second group of insulated gas cylinders to the leak detection circuit. A third pipeline connects the pre-extraction unit to the leak detection circuit, and the diversion unit is connected to both the first pipeline and the second pipeline via a fourth pipeline. Several vacuum valves are provided on the leak detection circuit. During leak detection, while diverting and extracting gas from a certain group of insulated gas cylinders for leak detection, the other group of insulated gas cylinders is simultaneously exhausted, and the cycle continues in sequence. The beneficial effects of this utility model are: it can greatly save time, manpower, and energy costs, and improve efficiency. In addition, by setting an appropriate diversion ratio, the actual leakage rate of the insulated gas cylinders can be accurately detected.

[0004] Search 2: Patent CN201510077300.4 relates to a vacuum leak detection and sealing device, which includes a movable rod, a mounting bracket, a sealing cover, a first exhaust pipe, an air filling pipe, a second exhaust pipe, a laser and a gas detection unit, wherein the movable rod is used to move the mounting bracket, one end of the movable rod is connected to the mounting bracket and the other end is connected to a power source, the mounting bracket is used to install a cup body to be tested, the sealing cover is used to cover the cup body to be tested and cooperate with a vacuum device to vacuumize and cooperate with a gas detection unit to detect the cup body to be tested, the laser is used to seal the cup body to be tested, and the laser is arranged above the sealing cover. The present invention also relates to a vacuum leak detection and sealing method using the above-mentioned vacuum leak detection and sealing device.

[0005] Search 3: Patent CN201720310375.7 provides a vacuum coating chamber leak detection system, comprising: a vacuum chamber to be inspected, a leak detection device, and an electronic control system. The leak detection device is connected to the lower side of the vacuum chamber to be inspected, and the electronic control system is connected to control the leak detection device. The side wall of the vacuum chamber to be inspected is equipped with a rupture device I and a vacuum detection element I. The leak detection device includes a high vacuum pump, a fore-stage pump group I, a fore-stage pump group II, a vacuum detection element, a rupture device, a helium mass spectrometer leak detector, and a helium injection system. The high vacuum pump is directly mounted on the side wall of the vacuum chamber to be inspected via a flange. The fore-stage pump group I and the fore-stage pump group II are connected in series via a vacuum pipe and then connected in series to the high vacuum pump via a high vacuum butterfly valve I. The utility model adopts an automatic control system with a one-button operation function for electrical components. The utility model has the advantages of high leak detection sensitivity, the ability to accurately locate the leak hole position, and the ability to quantitatively evaluate the size of the leak point. At the same time, the utility model has the advantages of simple structure and easy operation.

[0006] Search 4: Patent CN201020653927.2 discloses a vacuum leak detection system with a multi-box function, including a vacuum box, a box door, a guide rail, a guide rail vehicle, a cylinder, a motor, a workpiece platform, and a quick connector. The workpiece platform and the box door are two, and the box doors are respectively installed with a quick connector. One end of each workpiece platform is hinged to the corresponding box door, and the other end of the workpiece platform is supported by a cylinder at the bottom. Horizontal guide rails are provided on both sides of the workpiece platform, and a vertical guide rail is provided at the rear end of the workpiece platform. The vacuum box moves forward and backward on the horizontal guide rails, and the vacuum box moves left and right on the vertical guide rails via the guide rail vehicle. The utility model has a simple overall structure, reduces the requirements for processing accuracy, improves work efficiency, and is easy to install and maintain, reducing costs, and is economical and practical.

[0007] However, the existing technology for vacuum leak detection mainly uses a combined cavity to use a vacuum pump to achieve medium to high vacuum, and then uses a mass spectrometer to perform leak detection on the vacuum chamber in all directions. This method is not applicable to large equipment or equipment with too many vacuum sealing parts, because such equipment has many vacuum components, and it is very likely that the entire vacuum chamber will not be able to achieve medium to high vacuum due to excessive leakage rate, and there is no question of leak detection under vacuum conditions. In the existing technology, specific leak detection methods are required for specific equipment to compensate for the possibility that a small link may cause a large vacuum anomaly on the production line, and it is difficult to identify the specific location. Therefore, after the preventive maintenance of a single component or functional structure is completed, an independent vacuum leak detection can be performed, and when each component is under normal conditions, the online cavity can be combined to perform leak detection on the entire machine. Summary of the Invention

[0008] The technical problem to be solved by the present invention is: in view of the shortcomings of the existing technology, a vacuum chamber product leak detection device is provided which can be flexibly moved to the site to detect leaks, thereby solving the problem that the machine that is inconvenient to move needs to be evacuated before leak detection can be performed. At the same time, the reliability of leak detection is guaranteed, and the leak detection device is suitable for leak detection of various vacuum chamber products. The leak detection device prevents toxic polluting gases from contaminating the site and protects the site environment.

[0009] To solve the above-mentioned technical problems, the technical solution adopted by the present invention is:

[0010] The present invention provides a leak detection device for a vacuum chamber product, comprising a device cavity wall, a first recessed cavity being provided on one side of the device cavity wall, a first edge fitting portion being provided on one side of the device cavity wall where the first recessed cavity is provided, the device cavity wall being connected to a vacuum pump through a first pipeline, the device cavity wall being connected to the first pipeline through a second pipeline at the same time, a molecular pump being provided on the second pipeline, the device cavity wall being connected to a helium mass spectrometer leak detector through a third pipeline at the same time, the vacuum pump being connected to a tail exhaust pipeline through a fifth pipeline, the helium mass spectrometer leak detector being connected to the tail exhaust pipeline through a sixth pipeline, a first valve being provided on the first pipeline, a second valve being provided on the second pipeline between the molecular pump and the first pipeline, a plate valve being provided between the molecular pump on the second pipeline and the device cavity wall, and a third valve being provided on the third pipeline, the vacuum chamber product to be leak detected comprising a cavity wall of the chamber product, a second recessed cavity being provided on one side of the cavity wall of the chamber product where the second recessed cavity is provided, a second edge fitting portion being provided on one side of the cavity wall of the chamber product where the second recessed cavity is provided, a sealing member being provided at the position of the second edge fitting portion, and the cavity wall of the device being connected to a fourth valve through a fourth pipeline at the same time.

[0011] The vacuum chamber product leak detection device comprises a device frame, a device chamber wall and a vacuum pump are both mounted on the device frame, and a plurality of moving wheels are mounted on the bottom of the device frame.

[0012] The helium mass spectrometer leak detector is installed on a mobile vehicle, or the helium mass spectrometer leak detector is installed on a device frame.

[0013] Two lifting components are provided on the device frame, each lifting component includes a lifting component fixing component and a lifting component movable component, each lifting component fixing component and a corresponding lifting component movable component are connected through a lifting cylinder, one lifting component movable component is connected to one side of the device cavity wall, and the other lifting component movable component is connected to the other side of the device cavity wall.

[0014] The cavity wall of the device is simultaneously connected to the position between the vacuum pump of the first pipeline and the first valve through the second pipeline.

[0015] A vacuum gauge is arranged on the cavity wall of the device.

[0016] The vacuum pump and molecular pump are connected to control components respectively.

[0017] The plate valve, first valve, second valve, third valve and fourth valve are manual valves or electric valves. When the plate valve, first valve, second valve, third valve and fourth valve are electric valves, the plate valve, first valve, second valve, third valve and fourth valve are connected to the control components respectively.

[0018] The present invention also relates to a method for leak detection of vacuum chamber products that can be flexibly moved to the site, solving the problem of requiring a machine to be evacuated for leak detection, which is inconvenient to move. The method also ensures leak detection reliability and is applicable to leak detection of various vacuum chamber products. The method also prevents toxic polluting gases from contaminating the site and protects the on-site environment. The leak detection steps of the vacuum chamber product leak detection method are as follows:

[0019] S1. Move the vacuum chamber product leak detection device close to the vacuum chamber product to be leak-tested. Spray helium gas onto the seal at the second edge of the chamber product wall. Then, connect the device wall to the chamber product wall. The first recessed cavity of the device wall and the second recessed cavity of the chamber product wall form a hollow cavity.

[0020] S2. Open the first valve and start the vacuum pump. The vacuum pump draws vacuum into the hollow cavity. When the vacuum gauge reading reaches 5×10 1 When the reading is Pa or below, open the plate valve and the second valve, start the molecular pump, and when the molecular pump speed reaches the molecular pump set speed standard value and the vacuum gauge 2 reading reaches 9.9×10 -1 When the reading is Pa or below, start the helium mass spectrometer leak detector;

[0021] S3. Wait until the helium mass spectrometer leak detector interface shows that the pressure at the P port is lower than 9.9×10 -1 When the pressure drops below Pa, open the third valve and simultaneously spray all the connection parts on the cavity wall of the chamber product with low-flow helium at close range to ensure that the helium can cover all the connection gaps on the cavity wall of the chamber product. During this process, the helium mass spectrometer leak detector also performs a leak test.

[0022] S4. If the amount of helium detected by the helium mass spectrometer leak detector is higher than the set standard value, it indicates that there is a leak in the seal at the second edge of the chamber wall, indicating that the vacuum chamber product to be leaked has a leak. If the amount of helium detected by the helium mass spectrometer leak detector is lower than the set standard value, it indicates that there is no leak in the seal at the second edge of the chamber wall, indicating that the vacuum chamber product to be leaked has no leak.

[0023] S5. After the leak detection is completed, the vacuum in the hollow cavity is discharged through the fourth valve, and then the chamber product wall and the device chamber wall of the leak detection vacuum chamber product are removed to complete the leak detection of a vacuum chamber product.

[0024] When the plate valve, the first valve, the second valve, the third valve and the fourth valve are electric valves, the plate valve, the first valve, the second valve, the third valve and the fourth valve are respectively controlled to open and close by the control component.

[0025] The technical solution of the present invention is adopted, and the working principle and beneficial effects are as follows:

[0026] The vacuum chamber product leak detection device described in the present invention offers reliable performance and is primarily targeted at large equipment or equipment with numerous vacuum-sealed areas. It can perform leak detection on multiple areas simultaneously, offering high efficiency and accuracy. Furthermore, the device is simple to operate and has low investment costs. It can be moved and used according to the location of the vacuum chamber product to be tested. First, the mobile leak detection device can be moved to a location close to the vacuum chamber product to perform leak detection. This eliminates the need for vacuuming the machine, which is difficult to move, as in the prior art. Second, the device's sidewalls are symmetrically structured with the chamber product's walls, allowing for easy and reliable connection, thus forming a hollow cavity that facilitates subsequent vacuuming and leak detection with a helium mass spectrometer. Third, harmful gases drawn into the vacuum pump or helium mass spectrometer during the leak detection process are not discharged externally but are instead recovered through the tailpipe, avoiding on-site contamination. Finally, the device has a simple structure and is easy to operate, allowing two people to complete the entire operation, improving leak detection efficiency and accuracy while reducing labor intensity. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] The following is a brief description of the contents and symbols in the drawings of this specification:

[0028] Figure 1 This is a schematic structural diagram of the vacuum chamber product leak detection device of the present invention;

[0029] Figure 2 This is a schematic structural diagram of the vacuum chamber product leak detection device of the present invention when performing leak detection on a vacuum chamber product;

[0030] Figure 3 This is a schematic structural diagram of a plate valve of a vacuum chamber product leak detection device according to the present invention;

[0031] Figure 4 This is a schematic structural diagram of the lifting component of the vacuum chamber product leak detection device of the present invention;

[0032] Figure 5 This is a schematic diagram of the connection principle of the vacuum chamber product leak detection device of the present invention;

[0033] Figure 6 This is a schematic structural diagram of a vacuum chamber product to be leak-tested in the vacuum chamber product leak detection device of the present invention;

[0034] The following are marked as follows: 1. Device cavity wall; 2. Vacuum gauge; 3. Lifting component; 4. Plate valve; 5. Molecular pump; 6. Power supply; 7. Rack; 8. Vacuum pump; 9. Tail exhaust pipe; 10. Helium mass spectrometer leak detector; 11. First pipeline; 12. Second pipeline; 13. Third pipeline; 14. Fourth pipeline; 17. Chamber product cavity wall; 18. Second edge fitting part; 21. First valve; 22. Second valve; 23. Third valve; 24. Fourth valve; 25. Lifting component fixing part; 26. Lifting component movable part; 28. Lifting cylinder. DETAILED DESCRIPTION

[0035] The following describes the embodiments with reference to the accompanying drawings to further explain in detail the specific embodiments of the present invention, such as the shapes, structures, mutual positions and connection relationships between the various components involved, the functions and working principles of the various components.

[0036] As attached Figure 1 -Attached Figure 6As shown, the present invention is a vacuum chamber product leak detection device, including a device cavity wall 1, a first recessed cavity is provided on one side of the device cavity wall 1, and a first edge fitting portion is provided on one side of the device cavity wall 1 provided with the first recessed cavity. The device cavity wall 1 is connected to a vacuum pump 8 through a first pipeline 11, and the device cavity wall 1 is connected to the first pipeline 11 through a second pipeline 12 at the same time. A molecular pump 5 is provided on the second pipeline 12, and the device cavity wall 1 is connected to a helium mass spectrometer leak detector 10 through a third pipeline 13 at the same time. The vacuum pump 8 is connected to a tail exhaust pipeline 9 through a fifth pipeline, and the helium mass spectrometer leak detector 10 is connected to the tail exhaust pipeline 9 through a sixth pipeline. A first valve 21 is provided on a first pipeline 11, a second valve 22 is provided on a second pipeline 12 between the molecular pump 5 and the first pipeline 11, a plate valve 4 is provided between the molecular pump 5 and the device chamber wall 1 on the second pipeline 12, and a third valve 23 is provided on a third pipeline 13. The vacuum chamber product to be leak-tested includes a chamber product wall 17, a second recessed cavity provided on one side of the chamber product wall 17, a second edge fitting portion 18 provided on one side of the chamber product wall 17 where the second recessed cavity is provided, and a sealing member is provided at the position of the second edge fitting portion 18. The device chamber wall 1 is also connected to a fourth valve 24 via a fourth pipeline 14. The above structure addresses the shortcomings of the existing technology and provides an improved technical solution. The entire device has reliable performance and can be moved and used according to the location of the vacuum chamber product to be leak-tested. During use, the mobile leak detection device can first be moved to a location close to the vacuum chamber product to be leak-tested, enabling local leak detection. In this way, unlike the prior art, leak detection can only be performed after the machine is evacuated, and the machine cannot be easily moved; secondly, the side wall of the device and the cavity wall 17 of the chamber product are symmetrical in structure and can be easily and reliably connected to form a hollow cavity, which is convenient for subsequent vacuuming and leak detection by the helium mass spectrometer leak detector 10; thirdly, the harmful gas sucked into the vacuum pump or the helium mass spectrometer leak detector 10 during the leak detection process will not be discharged to the outside, but will be recovered by the tail exhaust pipeline 9 to avoid contamination of the site; thirdly, the structure is simple and the operation is convenient, and two people can complete all operations, thereby improving efficiency and reducing labor intensity. When leak detection is performed, the vacuum chamber product leak detection device is moved close to the position of the vacuum chamber product to be leak detected, and helium is sprayed at the sealing position of the second edge fitting portion 18 of the chamber product wall 17. Then, the device chamber wall 1 is connected to the chamber product wall 17. The first recessed cavity of the device chamber wall 1 and the second recessed cavity of the chamber product wall 17 form a hollow cavity; the first valve 11 is opened, and the vacuum pump 8 is started. The vacuum pump 8 draws vacuum into the hollow cavity. When the reading of the vacuum gauge 2 reaches 5×10 1 When the reading is Pa or below, open the plate valve 4 and the second valve 22, start the molecular pump 5, and when the speed of the molecular pump 5 reaches the standard value of the molecular pump speed setting, the vacuum gauge 2 reading reaches 9.9×10 -1 When the reading is Pa or below, start the helium mass spectrometer leak detector 10; wait until the helium mass spectrometer leak detector 10 interface displays that the pressure at the P port is lower than 9.9×10 -1When the pressure is below Pa, the third valve 23 is opened, and at the same time, all connection parts on the cavity wall 17 of the chamber product are sprayed with low-flow helium at close range to ensure that the helium can cover all connection gaps on the cavity wall 17 of the chamber product. During this process, the helium mass spectrometer leak detector 10 also performs a leak test; when the amount of helium detected by the helium mass spectrometer leak detector 10 is higher than the set standard value, it indicates that there is a leak at the sealing position of the second edge fitting portion 18 of the cavity wall 17 of the chamber product, that is, there is a leak in the vacuum chamber product to be leaked; when the amount of helium detected by the helium mass spectrometer leak detector 10 is lower than the set standard value, it indicates that there is no leak at the sealing position of the second edge fitting portion 18 of the cavity wall 17 of the chamber product, that is, there is no leak in the vacuum chamber product to be leaked; after the leak test is completed, the vacuum in the hollow cavity is discharged through the fourth valve 24, and then the cavity wall 17 of the vacuum chamber product and the device cavity wall 1 of the leak-tested vacuum chamber product are removed to complete the leak test of a vacuum chamber product. The vacuum chamber product leak detection device of the present invention can be flexibly moved to the site to detect leaks in vacuum chamber products, thereby solving the problem of requiring a machine that is inconvenient to move to evacuate for leak detection. This ensures leak detection reliability and is applicable to leak detection of various vacuum chamber products. It prevents toxic polluting gases from contaminating the site and protects the on-site working environment.

[0037] The vacuum chamber product leak detection device includes a device frame 7, on which the device chamber wall 1 and vacuum pump 8 are mounted. Multiple movable wheels are mounted at the bottom of the device frame 7. The above structure, with the frame being a frame structure and the multiple movable wheels at the bottom being universal wheels, facilitates the installation of various components of the leak detection device and enables flexible and convenient movement of the leak detection device.

[0038] The helium mass spectrometer leak detector 10 is mounted on a mobile trolley, or the helium mass spectrometer leak detector 10 is mounted on the device frame 7. In the above structure, the helium mass spectrometer leak detector 10 can be set up separately and moved by a separate mobile trolley, or it can be set on the frame and fixed.

[0039] Two lifting components 3 are mounted on the device frame 7. Each lifting component 3 includes a fixed lifting component 25 and a movable lifting component 26. Each fixed lifting component 25 is connected to its corresponding movable lifting component 26 via a lifting cylinder 28. One movable lifting component 26 is connected to one side of the device chamber wall 1, and the other movable lifting component 26 is connected to the other side of the device chamber wall 1. In this structure, the lifting cylinders are controlled by a control unit to extend and retract, driving the movable lifting components 26 to move up and down relative to the fixed lifting component 25, which is fixed to the frame. This allows the lifting cylinders to adjust the height of the device chamber wall as they rise and fall, thereby accommodating vacuum chamber products of varying heights.

[0040] A vacuum gauge 2 is mounted on the device cavity wall 1. In this structure, the vacuum gauge is used to monitor the pressure of the hollow cavity formed by the device cavity wall and the cavity product wall. The vacuum gauge is connected to the control unit and provides real-time feedback of the vacuum cavity pressure to the control unit, facilitating leak detection.

[0041] The device cavity wall 1 is also connected to the position between the vacuum pump 8 and the first valve 11 of the first pipeline 11 through the second pipeline 12. The vacuum pump 8 and molecular pump 5 are respectively connected to the control component. In the above structure, the control component controls the start and stop of the vacuum pump and molecular pump.

[0042] The plate valve 4, the first valve 21, the second valve 22, the third valve 23, and the fourth valve 24 are manual valves or electric valves. When the plate valve 4, the first valve 21, the second valve 22, the third valve 23, and the fourth valve 24 are electric valves, the plate valve 4, the first valve 21, the second valve 22, the third valve 23, and the fourth valve 24 are respectively connected to the control components.

[0043] The present invention also relates to a method for leak detection of vacuum chamber products that can be flexibly moved to the site, solving the problem of requiring a machine to be evacuated for leak detection, which is inconvenient to move. The method also ensures leak detection reliability and is applicable to leak detection of various vacuum chamber products. The method also prevents toxic polluting gases from contaminating the site and protects the on-site environment. The leak detection steps of the vacuum chamber product leak detection method are as follows:

[0044] S1. Move the vacuum chamber product leak detection device close to the vacuum chamber product to be leak-tested, spray helium at the seal position of the second edge of the chamber product wall 17, and then connect the device wall 1 to the chamber product wall 17. The first recessed cavity of the device wall 1 and the second recessed cavity of the chamber product wall 17 form a hollow cavity;

[0045] S2. Open the first valve 21 and start the vacuum pump 8. The vacuum pump 8 draws a vacuum from the hollow cavity. When the vacuum gauge 2 reading reaches 5E+1Pa or less, open the plate valve 4 and the second valve 22 and start the molecular pump 5. When the speed of the molecular pump 5 reaches the molecular pump set speed standard value and the vacuum gauge 2 reading reaches 9.9E-1Pa or less, start the helium mass spectrometer leak detector 10.

[0046] S3. When the helium mass spectrometer leak detector 10 displays a pressure of less than 0.99 Pa at the P port, open the third valve 23 and simultaneously spray all connections on the chamber wall 17 with low-flow helium gas at close range to ensure that the helium gas covers all gaps in the chamber wall 17. During this process, the helium mass spectrometer leak detector 10 performs a leak test.

[0047] S4. If the amount of helium detected by the helium mass spectrometer leak detector 10 is higher than the set standard value, it indicates that there is a leak in the seal at the second edge joint portion 18 of the chamber wall 17 of the product, that is, the vacuum chamber product to be leaked has a leak. If the amount of helium detected by the helium mass spectrometer leak detector 10 is lower than the set standard value, it indicates that there is no leak in the seal at the second edge joint portion 18 of the chamber wall 17 of the product, that is, the vacuum chamber product to be leaked has no leak.

[0048] S5. After the leak detection is completed, the vacuum in the hollow cavity is discharged through the fourth valve 24, and then the chamber wall 17 and the device chamber wall 1 of the leak detection vacuum chamber product are removed to complete the leak detection of a vacuum chamber product.

[0049] When the plate valve 4, the first valve 21, the second valve 22, the third valve 23 and the fourth valve 24 are electric valves, the plate valve 4, the first valve 21, the second valve 22, the third valve 23 and the fourth valve 24 are respectively controlled to open and close by the control component.

[0050] In the structure of the vacuum chamber product leak detection device described in the present invention, the device chamber wall 1 is made of a metal material with low density but good sealing properties, such as aluminum, aluminum alloy, or stainless steel. The vacuum gauge 2 can be one or more of a picosecond resistance gauge, an ion gauge, a thin film gauge, or a composite gauge. The lifting mechanism 3 is a structure that enables the vacuum to rise or fall. The valve 4 is a vacuum-sealed valve, such as a swing valve or a gate valve. Preferably, a gate valve is used in the present invention.

[0051] In the structure of the device described in the present invention, a mass spectrometer, also known as a mass spectrometer, is an instrument that separates and detects different isotopes. This instrument uses the principle that charged particles can be deflected in an electromagnetic field to separate and detect the composition of substances based on the mass differences of atoms, molecules, or molecular fragments. Mass spectrometers are categorized by application into isotope mass spectrometers, inorganic mass spectrometers, and organic mass spectrometers. They are classified by resolution into high-resolution, medium-resolution, and low-resolution mass spectrometers; and by their operating principle, they are classified into static and dynamic instruments. Molecular pumps achieve air extraction through the interaction of high-speed rotating rotor blades and stationary stator blades. These pumps typically operate in a molecular flow state. A vacuum pump is a fore-stage vacuum pump, used to maintain the fore-stage pressure of a vacuum pump below its critical fore-stage pressure. A vacuum gauge, also known as a vacuum gauge, is an instrument that measures vacuum or air pressure. Air pressure is generally measured by utilizing changes in certain physical effects of gas at different pressures. Leak detection - Vacuum equipment needs to work under vacuum conditions. It is required that air cannot leak into the working cavity during operation, otherwise production cannot be carried out or defective products will be produced.

[0052] The vacuum chamber product leak detection device described in the present invention offers reliable performance and is primarily targeted at large equipment or equipment with numerous vacuum-sealed areas. It can perform leak detection on multiple areas simultaneously, offering high efficiency and accuracy. Furthermore, the device is simple to operate and has low investment costs. It can be moved and used according to the location of the vacuum chamber product to be tested. First, the mobile leak detection device can be moved to a location close to the vacuum chamber product to perform leak detection. This eliminates the need for vacuuming the machine, which is difficult to move, as in the prior art. Second, the device's sidewalls are symmetrically structured with the chamber product's walls, allowing for easy and reliable connection, thus forming a hollow cavity that facilitates subsequent vacuuming and leak detection with a helium mass spectrometer. Third, harmful gases drawn into the vacuum pump or helium mass spectrometer during the leak detection process are not discharged externally but are instead recovered through the tailpipe, avoiding on-site contamination. Finally, the device has a simple structure and is easy to operate, allowing two people to complete the entire operation, improving leak detection efficiency and accuracy while reducing labor intensity.

[0053] The present invention is described above by way of example in conjunction with the accompanying drawings. It is obvious that the specific implementation of the present invention is not limited to the above-mentioned method. As long as various improvements are made using the method concept and technical solution of the present invention, or the concept and technical solution of the present invention are directly applied to other occasions without improvement, they are all within the scope of protection of the present invention.

Claims

1. A vacuum chamber product leak detection device, characterized in that: The invention comprises a device cavity wall (1), wherein a first recessed cavity is provided on one side of the device cavity wall (1), and a first edge fitting portion is provided on one side of the device cavity wall (1) provided with the first recessed cavity. The device cavity wall (1) is connected to a vacuum pump (8) through a first pipeline (11), and the device cavity wall (1) is connected to the first pipeline (11) through a second pipeline (12). A molecular pump (5) is provided on the second pipeline (12). The device cavity wall (1) is connected to a helium mass spectrometer leak detector (10) through a third pipeline (13). The vacuum pump (8) is connected to a tail exhaust pipeline (9) through a fifth pipeline. The helium mass spectrometer leak detector (10) is connected to the tail exhaust pipeline (9) through a sixth pipeline. The first pipeline (11) is provided with a first A valve (21) is provided on the second pipeline (12) between the molecular pump (5) and the first pipeline (11); a plate valve (4) is provided between the molecular pump (5) on the second pipeline (12) and the device cavity wall (1); a third valve (23) is provided on the third pipeline (13); the vacuum chamber product to be leak-tested comprises a chamber product cavity wall (17); a second recessed cavity is provided on one side of the chamber product cavity wall (17); a second edge fitting portion (18) is provided on one side of the chamber product cavity wall (17) provided with the second recessed cavity; a sealing member is provided at the position of the second edge fitting portion (18); and the device cavity wall (1) is connected to the fourth valve (24) through the fourth pipeline (14).

2. The vacuum chamber product leak detection device according to claim 1, characterized in that: The vacuum chamber product leak detection device comprises a device frame (7), a device chamber wall (1) and a vacuum pump (8) are both mounted on the device frame (7), and a plurality of moving wheels are mounted on the bottom of the device frame (7).

3. The vacuum chamber product leak detection device according to claim 2, characterized in that: The helium mass spectrometer leak detector (10) is installed on a mobile vehicle, or the helium mass spectrometer leak detector (10) is installed on a device frame (7).

4. The vacuum chamber product leak detection device according to claim 2 or 3, characterized in that: Two lifting components (3) are provided on the device frame (7), each lifting component (3) comprises a lifting component fixing component (25) and a lifting component movable component (26), each lifting component fixing component (25) and a corresponding lifting component movable component (26) are connected via a lifting cylinder (28), one side of the device cavity wall (1) is connected to one lifting component movable component (26), and the other side of the device cavity wall (1) is connected to another lifting component movable component (26).

5. The vacuum chamber product leak detection device according to claim 1 or 2, characterized in that: The cavity wall (1) of the device is simultaneously connected to the position between the vacuum pump (8) of the first pipeline (11) and the first valve (21) through the second pipeline (12).

6. The vacuum chamber product leak detection device according to claim 1 or 2, characterized in that: A vacuum gauge (2) is provided on the cavity wall (1) of the device.

7. The vacuum chamber product leak detection device according to claim 1 or 2, characterized in that: The vacuum pump (8) and molecular pump (5) are respectively connected to control components.

8. The vacuum chamber product leak detection device according to claim 7, characterized in that: The plate valve (4), the first valve (21), the second valve (22), the third valve (23), and the fourth valve (24) are manual valves or electric valves. When the plate valve (4), the first valve (21), the second valve (22), the third valve (23), and the fourth valve (24) are electric valves, the plate valve (4), the first valve (21), the second valve (22), the third valve (23), and the fourth valve (24) are connected to the control component respectively.

9. The leak detection method for a vacuum chamber product leak detection device according to any one of claims 1 to 8, characterized in that: The leak detection steps of the vacuum chamber product leak detection method are as follows: S1. Move the vacuum chamber product leak detection device to a position close to the vacuum chamber product to be leak-tested, spray helium at the sealing position of the second edge fitting portion (18) of the chamber product wall (17), and then connect the device wall (1) with the chamber product wall (17), so that the first recessed cavity of the device wall (1) and the second recessed cavity of the chamber product wall (17) form a hollow cavity; S2. Open the first valve (21) and start the vacuum pump (8). The vacuum pump (8) draws vacuum from the hollow cavity. When the vacuum gauge (2) reading reaches 5×10 1 When the reading is Pa or below, open the plate valve (4) and the second valve (22), start the molecular pump (5), and when the speed of the molecular pump (5) reaches the standard value of the molecular pump speed setting, and the reading of the vacuum gauge (2) reaches 9.9×10 -1 When the reading is Pa or below, start the helium mass spectrometer leak detector (10); S3. Wait for the helium mass spectrometer leak detector (10) to display that the pressure at the P port is lower than 9.9×10 -1 When the pressure is below Pa, the third valve (23) is opened, and all connection parts on the chamber product wall (17) are sprayed with low-flow helium at close range to ensure that the helium can cover all connection gaps on the chamber product wall (17). During this process, the helium mass spectrometer leak detector (10) is also used to perform a leak test; S4. When the amount of helium detected by the helium mass spectrometer leak detector (10) is higher than the set standard value, it indicates that there is a leak at the sealing position of the second edge fitting portion (18) of the chamber wall (17) of the chamber product, that is, there is a leak in the vacuum chamber product to be leaked; when the amount of helium detected by the helium mass spectrometer leak detector (10) is lower than the set standard value, it indicates that there is no leak at the sealing position of the second edge fitting portion (18) of the chamber wall (17) of the chamber product, that is, there is no leak in the vacuum chamber product to be leaked; S5. After the leak detection is completed, the vacuum in the hollow cavity is discharged through the fourth valve (24), and then the chamber product wall (17) and the device chamber wall (1) of the leak detection vacuum chamber product are removed to complete the leak detection of a vacuum chamber product.

10. The leak detection method of the vacuum chamber product leak detection device according to claim 9, characterized in that: When the plate valve (4), the first valve (21), the second valve (22), the third valve (23) and the fourth valve (24) are electric valves, the plate valve (4), the first valve (21), the second valve (22), the third valve (23) and the fourth valve (24) are respectively controlled to open and close by a control component.

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