Plasma surface treatment equipment

Abstract

The present invention relates to a plasma surface treatment device, comprising an electrode plate and a base, wherein the base is provided with a groove, an ion injection zone is provided on the bottom surface of the groove, the electrode plate is provided on the ion injection zone, and a supporting mechanism for placing a workpiece is provided on the electrode plate; the device also comprises a movable cover for sealing the electrode plate in the groove; an air intake expansion cavity and a diffusion plate for sealing the air intake expansion cavity are provided on the lower surface of the movable cover; a plurality of air outlet holes are evenly distributed on the diffusion plate corresponding to the ion injection zone, and the axes of the air outlet holes are perpendicular to the plane where the ion injection zone is located; a first air intake channel is provided on the side wall of the movable cover in contact with the base, the first air intake channel is connected to the inner side wall of the air intake expansion cavity, a second air intake channel connected to the first air intake channel is provided on the base, and an exhaust hole penetrating the base is provided on the ion injection zone; the present invention can ensure that ionized gas can be evenly injected onto the upper surface of the workpiece through the air intake expansion cavity and the air outlet holes on the diffusion plate, a large one-time processing area and a simple overall structure.

Description

Technical Field

[0001] The present invention relates to the technical field of plasma cleaning, and in particular to a plasma surface treatment device. Background Art

[0002] Plasma is an electrically neutral mass composed of ions, electrons, and neutral particles. During plasma surface treatment, when plasma collides with a material's surface, it transfers its energy to the molecules and atoms on the surface, triggering a series of physical and chemical reactions. Injecting particles or gases into the material surface can also cause collisions, scattering, excitation, rearrangement, isomerization, defects, crystallization, and amorphization, thereby altering the material's surface properties.

[0003] Existing plasma surface treatment machines all use plasma spray guns to treat the surface. This method has a small treatment area and low treatment efficiency. If workpieces are to be processed in batches, the number of spray guns needs to be increased. This method not only makes the equipment structure complex and the volume larger, but also is not conducive to controlling equipment costs. Summary of the Invention

[0004] The purpose of the present invention is to provide a plasma surface treatment device to address the deficiencies of the prior art, which can well solve the above problems.

[0005] In order to achieve the above requirements, the technical solution adopted by the present invention to solve the technical problem is:

[0006] A plasma surface treatment device is provided, which includes an electrode plate and a base, wherein the base is provided with a groove, an ion injection zone is provided on the bottom surface of the groove, the electrode plate is provided on the ion injection zone, and a supporting mechanism for placing a workpiece is provided on the electrode plate; the device also includes a movable cover for sealing the electrode plate in the groove; an air intake expansion cavity and a diffusion plate for sealing the air intake expansion cavity are provided on the lower surface of the movable cover; a plurality of air outlet holes are evenly distributed on the diffusion plate corresponding to the ion injection zone, and the axes of the air outlet holes are perpendicular to the plane where the ion injection zone is located; a first air intake channel is provided on the side wall of the movable cover that is in contact with the base, the first air intake channel is connected to the inner side wall of the air intake expansion cavity, a second air intake channel connected to the first air intake channel is provided on the base, and an exhaust hole that passes through the base is provided on the ion injection zone.

[0007] In the plasma surface treatment equipment of the present invention, the air intake expansion cavity and the ion injection zone are both square, and the area of ​​the ion injection zone is smaller than the projected area of ​​the air intake expansion cavity on the bottom surface of the groove.

[0008] The plasma surface treatment equipment of the present invention is characterized in that an insulating base for mounting the electrode plate is provided on the ion spraying area.

[0009] The plasma surface treatment equipment of the present invention further comprises a cover-opening and lifting mechanism for driving the movable cover to rise and fall, a mounting seat is provided on the movable terminal of the cover-opening and lifting mechanism, and the movable cover is longitudinally rotatably arranged on the mounting seat.

[0010] The plasma surface treatment equipment described in the present invention is characterized in that a connecting arm is provided on the movable cover, and the movable cover is rotatably connected to the mounting seat through the connecting arm. The mounting seat is provided with a stop platform for the connecting arm to rest, and when the movable cover is closed, the connecting arm rests on the upper surface of the stop platform.

[0011] The plasma surface treatment equipment of the present invention further comprises a loading mechanism for transferring the workpiece onto the supporting mechanism, wherein the loading mechanism is arranged side by side with the base.

[0012] The plasma surface treatment equipment described in the present invention, wherein the loading mechanism includes a magazine for storing workpieces, a pushing module that extends into the rear end of the magazine and pushes the workpiece out of the magazine, a clamping module that extends into the front end of the magazine and clamps the workpiece, and a transfer module that drives the picking module to move toward the supporting mechanism.

[0013] The plasma surface treatment equipment of the present invention, wherein the clamping module includes two clamping blocks arranged opposite to each other up and down, and a clamping drive unit driving the two clamping blocks to move relative to each other up and down.

[0014] The plasma surface treatment equipment described in the present invention, wherein the pushing module includes a pushing arm arranged corresponding to the magazine, and a reciprocating drive unit driving the pushing arm to move horizontally toward or away from the magazine.

[0015] The plasma surface treatment equipment described in the present invention, wherein the supporting mechanism includes a support bar and a support platform; two support platforms are provided and are arranged oppositely on the base, and the two ends of the support bar can be slidably set on the support platform respectively, and two support bars are provided and are arranged horizontally opposite to each other, and the opposite ends of the upper surfaces of the two support bars are recessed to form positioning steps for positioning the workpiece, and when assembled in place, a gap is provided between the positioning step and the electrode plate.

[0016] The beneficial effect of the present invention is that compared with the traditional method of using multiple spray guns to increase the surface treatment of workpieces, this solution only needs to use the air intake expansion cavity and multiple outlet holes on the diffusion plate to allow the ionized gas to be sprayed on the ion spray area. At the same time, the electrode plate is connected to the external ionization high-voltage source, so that the gas ionization generates ions that collide vertically on the upper surface of the workpiece, and the workpiece can be surface treated in batches. The overall structure is simple, the ion spray is uniform, and the one-time processing area is large. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the present invention will be further described below with reference to the accompanying drawings and embodiments. The drawings described below are only some embodiments of the present invention. Those skilled in the art can also derive other drawings based on these drawings without inventive efforts.

[0018] Figure 1 It is a bird's-eye view of the overall structure of the plasma surface treatment equipment of the present invention.

[0019] Figure 2 It is a top view of the overall structure of the plasma surface treatment equipment of the present invention.

[0020] Figure 3 yes Figure 2 AA section view.

[0021] Figure 4 yes Figure 3 Enlarged view of point A in the middle.

[0022] Figure 5 This is the test intention when the movable cover of the plasma surface treatment equipment of the present invention is rotated and opened.

[0023] Figure 6 This is a position relationship diagram of the clamping modules of the plasma surface treatment equipment of the present invention.

[0024] Figure 7 yes Figure 6 Enlarged view of point B in the middle. DETAILED DESCRIPTION

[0025] The terms "first," "second," "third," and "fourth," etc., in the specification, claims, and accompanying drawings of the present invention are used to distinguish between different items, not to describe a specific order. Furthermore, the terms "including," "having," and any variations thereof, are intended to cover non-exclusive inclusions. For example, a process, method, system, product, or apparatus comprising a series of steps or elements is not limited to the listed steps or elements, but may optionally include steps or elements not listed, or may optionally include other steps or elements inherent to the process, method, product, or apparatus.

[0026] References herein to "embodiments" mean that a particular feature, structure, or characteristic described in connection with the embodiments may be included in at least one embodiment of the present invention. The appearance of this phrase in various places in the specification does not necessarily refer to the same embodiment, nor does it constitute a separate or alternative embodiment that is mutually exclusive of other embodiments. It is understood, both explicitly and implicitly, by those skilled in the art that the embodiments described herein may be combined with other embodiments.

[0027] "Multiple" refers to two or more. "And / or" describes the relationship between associated objects, indicating that three possible relationships exist. For example, "A and / or B" can mean: A exists alone, A and B exist simultaneously, or B exists alone. The character " / " generally indicates that the associated objects are in an "or" relationship.

[0028] Moreover, the terms "up, down, left, right, upper end, lower end, longitudinal" and the like indicating directions are all based on the posture and position of the device or apparatus described in this solution during normal use.

[0029] To make the purpose, technical solutions, and advantages of the embodiments of the present invention more clear, the following will be a clear and complete description of the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work shall fall within the scope of protection of the present invention.

[0030] The plasma surface treatment equipment of the preferred embodiment of the present invention is as follows Figure 1-7As shown, the device includes an electrode plate 1 and a base 2, a groove 3 is provided on the base 2, an ion injection area 4 is provided at the center of the bottom surface of the groove 3, the electrode plate 1 is provided on the ion injection area 4, and the electrode plate 1 is provided with a carrying mechanism 5 for holding the workpiece 100; further, the device also includes a movable cover 6 for sealing the electrode plate 1 in the groove 3, an air intake expansion cavity 7 and a diffusion plate 8 for sealing the air intake expansion cavity 7 are provided on the lower surface of the movable cover 6, specifically, a workpiece avoidance cavity is provided on the lower surface of the movable cover 6 The avoidance groove 61 and the air intake expansion cavity 7 are arranged on the bottom surface of the avoidance groove 61; a plurality of air outlet holes 9 are evenly distributed on the diffusion plate 8 corresponding to the ion injection area 4, and the axis of the air outlet hole 9 is perpendicular to the plane where the ion injection area 4 is located, so as to ensure that the ionized ions directly hit the surface of the workpiece at a vertical angle; a first air intake channel 10 is provided on the side wall where the movable cover 6 and the base 2 are attached, and the first air intake channel 10 is connected to the inner side wall of the air intake expansion cavity 7 to ensure that the gas is fully mixed and then evenly mixed after entering the air intake expansion cavity. The gas is sprayed out from the air outlet 9 to avoid the situation where the amount of gas in the air outlet 9 close to the first air inlet 10 is large and the amount of gas in the air outlet 9 away from the first air inlet 10 is small, which leads to uneven surface treatment of the workpiece. A second air inlet 11 connected to the first air inlet 10 is provided on the base 2. Specifically, two first air inlet 10 and second air inlet 11 are provided and arranged horizontally side by side to facilitate the passage of different gases into the air inlet expansion cavity 7. An exhaust hole 12 that passes through the base 2 is provided on the ion injection zone 4. Compared with the traditional method of using multiple spray guns to increase the surface treatment of the workpiece, this scheme only needs to use the air inlet expansion cavity 7 and the multiple air outlet holes 9 on the diffuser 8 to allow the ionized gas to be sprayed on the ion injection zone 4. At the same time, it is connected to the external ionization high-voltage source through the electrode plate 1, so that the gas ionization generates ions that collide vertically on the upper surface of the workpiece, which not only greatly improves the surface treatment effect of the workpiece, but also can perform surface treatment on the workpiece in batches. The overall structure is simple, the ion spraying is uniform, and the one-time processing area is large.

[0031] Preferably, the air intake expansion chamber and the ion injection zone 4 are both square to facilitate the arrangement of multiple workpieces. The area of ​​the ion injection zone 4 is smaller than the projected area of ​​the air intake expansion chamber on the bottom surface of the groove 3 to ensure that the upper surfaces of the side-by-side workpieces are perpendicular to the movement direction of the ions.

[0032] Preferably, an insulating base 13 for mounting an electrode plate 1 is provided on the ion injection zone 4, wherein the upper surface area of ​​the electrode plate 1 is larger than the projected area of ​​the air intake expansion cavity 7 on the bottom surface of the groove 3, the insulating base 13 is smaller than the electrode plate 1, and the exhaust hole 12 is located below the electrode plate 1, so that the gas is vertically injected onto the upper surface of the workpiece and then moves horizontally, thereby ensuring that the ions are perpendicular to the upper surface of the workpiece while also blowing the stains on the surface of the workpiece out of the workpiece surface. Furthermore, since the insulating base 13 is smaller than the electrode plate 1 and the exhaust hole 12 is located below the motor plate, a buffer chamber 14 can be formed below the electrode plate 1 to balance the airflow and prevent the airflow from forming turbulence on the upper surface of the workpiece 100 due to the reaction of the side walls of the groove 3, thereby affecting cleaning and surface treatment. In addition, the buffer chamber 14 can also temporarily accommodate stains discharged from the workpiece surface to prevent the stains from being again affected by the reaction of the side walls of the groove 3 and returning to the upper surface of the workpiece together with the airflow to cause secondary pollution.

[0033] Preferably, the present device further comprises a cover opening and lifting mechanism 15 for driving the movable cover 6 to rise and fall. A mounting seat 16 is provided on the movable terminal 151 of the cover opening and lifting mechanism 15. The movable cover 6 is longitudinally rotatably arranged on the mounting seat 16. Specifically, the cover opening and lifting mechanism 15 can be a cylinder or a screw motor or a linear motor. The present device preferably adopts a cylinder. The movable cover 6 can be automatically opened or closed by the cover opening and lifting mechanism, which is convenient for loading and unloading.

[0034] Preferably, a connecting arm 17 is provided on the movable cover 6, and the movable cover 6 is rotatably connected to the mounting seat 16 through the connecting arm 17. The mounting seat 16 is provided with a stop platform 161 for the connecting arm 17 to rest. When the movable cover 6 is closed, the connecting arm 17 rests on the upper surface of the stop platform 161, so that the movable cover 6 always remains horizontal when it is opened to feed.

[0035] Preferably, the device further comprises a loading mechanism 18 for transferring the workpiece to the carrier mechanism 5, the loading mechanism 18 being arranged side by side with the base 2, wherein the loading mechanism 18 comprises a magazine 181 for storing the workpiece, a pushing module 182 which extends into the rear end of the magazine 181 and pushes the workpiece out of the magazine 181, a clamping module 183 which extends into the front end of the magazine 181 and clamps the workpiece, and a transfer module 184 which drives the picking module to move toward the carrier mechanism 5; wherein the transfer module 184 The movable terminal is provided with a mounting frame 1a for mounting the clamping module 3, and the clamping module 3 is slid left and right on the mounting frame. When loading, the lifting mechanism lifts the movable cover 6 horizontally, and the clamping module 183 holding the workpiece is sent to the carrying mechanism 5 through the transfer module 184. When the processing is completed, the workpiece can be removed by directly rotating it open from the free end of the movable cover 6. The lifting mechanism can facilitate loading, and loading can be completed without completely flipping the movable cover 6 open, which is convenient, fast and efficient.

[0036] Preferably, the clamping module 183 includes two clamping blocks 8a arranged opposite to each other in an upper and lower direction, and a clamping drive unit 8b that drives the two clamping blocks 8a to move relative to each other in an upper and lower direction; the pushing module 182 includes a pushing support arm 8c arranged corresponding to the magazine, and a reciprocating drive unit 8d that drives the pushing support arm 8c to move horizontally toward or away from the magazine; wherein, the transverse movement module is a screw motor, the clamping drive unit 8b is a finger cylinder, and the reciprocating drive unit 8d is a screw motor, and it can also be realized by a linear motor or a cylinder guide module. Through the cooperation of the pushing module 182 and the clamping module 183, the workpiece in the magazine magazine 181 is simultaneously pushed and pulled forward, which can ensure that the workpiece is subjected to balanced force and avoid excessive force in local positions.

[0037] Preferably, the carrying mechanism 5 includes a support bar 51 and a support platform 52; there are two support platforms 52 and they are relatively arranged on the base 2, and the two ends of the support bar 51 can be slidably set on the support platform 52 respectively, and there are two support bars 51 and they are horizontally arranged opposite to each other. The opposite ends of the upper surfaces of the two support bars 51 are recessed to form positioning steps 19 for positioning the workpiece 100. The two support bars 51 form a unit, and the unit is provided with multiple units and arranged side by side on the support platform 52. Among them, the magazine bin 181 is also provided with multiple units corresponding to the multiple units, thereby realizing the purpose of automatic loading of batch workpieces, and the sliding connection relationship between the support bar 51 and the support platform 52 can facilitate adjustment of the position of the magazine bin 181. When assembled in place, a gap 20 is provided between the positioning step 19 and the electrode plate 1 to form an ionization chamber, and it also serves as a buffer chamber with the same function as the above.

[0038] It should be understood that those skilled in the art can make improvements or changes based on the above description, and all such improvements and changes should fall within the scope of protection of the appended claims of the present invention.

Claims

1. A plasma surface treatment device, comprising an electrode plate, characterized in that: The device also includes a base, a groove is provided on the base, an ion injection area is provided on the bottom surface of the groove, the electrode plate is provided on the ion injection area, and a supporting mechanism for holding a workpiece is provided on the electrode plate; the device also includes a movable cover for sealing the electrode plate in the groove; an air intake expansion cavity and a diffusion plate for sealing the air intake expansion cavity are provided on the lower surface of the movable cover; a plurality of air outlet holes are evenly distributed on the diffusion plate corresponding to the ion injection area, and the axis of the air outlet hole is perpendicular to the plane where the ion injection area is located; a first air intake channel is provided on the side wall of the movable cover that is in contact with the base, the first air intake channel is connected to the inner side wall of the air intake expansion cavity, a second air intake channel connected to the first air intake channel is provided on the base, and an exhaust hole that passes through the base is provided on the ion injection area; The device also includes a loading mechanism for transferring the workpiece to the carrying mechanism, and the loading mechanism is arranged side by side with the base; the loading mechanism includes a magazine for storing the workpiece, a pushing module that extends into the rear end of the magazine and pushes the workpiece out of the magazine, a clamping module that extends into the front end of the magazine to clamp the workpiece, and a transfer module that drives the clamping module to move toward the carrying mechanism; the clamping module includes two clamping blocks arranged opposite to each other up and down, and a clamping drive unit that drives the two clamping blocks to move relative to each other up and down; the pushing module includes a pushing support arm arranged corresponding to the magazine, and a reciprocating drive unit that drives the pushing support arm to move horizontally toward or away from the magazine; The carrying mechanism includes a support bar and a support platform; two support platforms are provided and are arranged opposite to each other on the base, and the two ends of the support bar can be slidably arranged on the support platform respectively, and the two support bars are arranged horizontally opposite to each other to form a unit, and the opposite ends of the upper surfaces of the two support bars are recessed to form positioning steps for positioning the workpiece, and there are multiple units and they are arranged side by side on the support platform, and there are multiple magazine bins corresponding to the multiple units; when assembled in place, a gap is provided between the positioning step and the electrode plate to form an ionization chamber.

2. The plasma surface treatment equipment according to claim 1, characterized in that The air intake expansion cavity and the ion ejection area are both square, and the area of ​​the ion ejection area is smaller than the projected area of ​​the air intake expansion cavity on the bottom surface of the groove.

3. The plasma surface treatment equipment according to claim 2, characterized in that: An insulating base for mounting the electrode plate is provided on the ion spraying area.

4. The plasma surface treatment equipment according to claim 1, characterized in that The device further comprises a cover-opening and lifting mechanism for driving the movable cover to rise and fall. A mounting seat is provided on the movable terminal of the cover-opening and lifting mechanism, and the movable cover is longitudinally rotated and arranged on the mounting seat.

5. The plasma surface treatment equipment according to claim 4, characterized in that: The movable cover is provided with a connecting arm, and the movable cover is rotatably connected to the mounting seat through the connecting arm. The mounting seat is provided with a stop platform for the connecting arm to rest. When the movable cover is closed, the connecting arm rests on the upper surface of the stop platform.

Images