A vacuum annealing furnace capable of rapid cooling

Abstract

The present application relates to the technical field of heat treatment equipment for additive manufacturing, and particularly relates to a vacuum annealing furnace capable of rapid cooling, which comprises a rack, a furnace pot unit and a heating unit; a mounting platform is fixedly installed on the rack, guide rods are installed on the four corners of the mounting platform, not less than one substrate support unit is installed on the mounting platform, and the top ends of the guide rods are fixedly connected with the top end of the rack; cooling fans are installed on the two sides of the rack, and a lower sealing flange connected with the mounting platform is arranged on the bottom end of the substrate support unit, the present application provides a closed inner tube which is not affected by the gravity of workpieces, can be suitable for various types of workpieces, can be cooled in batches, and the overall cooling effect is greatly improved, the inner tube creep damage is reduced while rapid cooling is realized, the service life is improved, and the production efficiency is improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of heat treatment equipment for additive manufacturing, in particular to a vacuum annealing furnace capable of rapid cooling. BACKGROUND

[0002] After the metal powder laying 3D printer is completed, in order to change the organization performance of the printed part and eliminate stress and reduce deformation, vacuum annealing treatment is required. The workpiece is heated and cooled according to the process requirements. When the temperature drops to a certain temperature, rapid cooling can be performed to reduce process time, reduce equipment energy consumption, and improve equipment utilization.

[0003] A rapid cooling mechanism for a tubular annealing furnace is introduced in CN208815087U. The quartz reaction chamber is placed horizontally, and the heating furnace body and the quartz reaction chamber can be combined and separated. However, the quartz reaction chamber can only be fixed at the chamber opening side, and the other end is suspended. If heavy workpieces are loaded into the quartz reaction chamber, or if it is used for a long time at high temperature, the suspended end will sag or the quartz reaction chamber will be damaged. A rapid cooling structure for a dental 3D printing vacuum annealing furnace is introduced in CN214977759U. The closed inner tube is placed horizontally. When the temperature cools to a certain temperature, the furnace body is opened, and the closed inner tube is blown by a fan for rapid cooling. However, the horizontal inner tube also has the problem of inner tube creep deformation under the action of high temperature for a long time and the gravity pressure of the workpiece. Moreover, the workpiece needs to be pushed forward, and it is only suitable for long rod-shaped workpieces, which is not convenient to use and operate. SUMMARY

[0004] In view of the above shortcomings, the present application provides a vacuum annealing furnace capable of rapid cooling.

[0005] The present application provides the following technical solution: a vacuum annealing furnace capable of rapid cooling, comprising: a rack, a furnace pot unit and a heating unit;

[0006] A mounting platform is fixedly installed on the rack. Guide rods are installed on the corners of the mounting platform. Not less than one substrate support unit is installed on the mounting platform. The top ends of the guide rods are fixedly connected with the top end of the rack.

[0007] Cooling fans are installed on both sides of the rack. A lower sealing flange connected with the mounting platform is arranged on the outside of the bottom end of the substrate support unit. A sealing ring is arranged between the lower sealing flange and the substrate support unit. A substrate placement platform is arranged on the top end of the substrate support unit, and the substrate placement platform is used to place workpieces requiring heat treatment. The same number of furnace pot units as the substrate support units are arranged above the substrate support units. The same number of heating units as the furnace pot units are arranged above the furnace pot units.

[0008] As a preferred technical scheme of the vacuum annealing furnace capable of rapid cooling, the number of the substrate support units is two or four, the two end surfaces of the mounting table plate are provided with buffer mechanisms, the buffer mechanisms include support rods and support plates, the support plates are provided with buffer plates above, and buffer springs are arranged between the support plates and the buffer plates.

[0009] As a preferred technical scheme of the vacuum annealing furnace capable of rapid cooling, a plurality of air holes are formed in the surface of the substrate support unit, the air holes are provided with suction pipes inside, the other ends of the suction pipes are provided with vacuum units outside, and fixed temperature measuring sensors are arranged at the bottom end of the substrate placing table and inside the substrate support unit.

[0010] As a preferred technical scheme of the vacuum annealing furnace capable of rapid cooling, the furnace pot unit includes a furnace pot and a furnace pot mounting plate, the top end of the furnace pot is closed, and the bottom end of the furnace pot is open, the furnace pot is connected with the furnace pot mounting plate in a penetrating mode, a furnace opening sealing ring is arranged between the furnace pot and the furnace pot mounting plate, furnace pot guide sleeves are arranged at the four corners of the furnace pot mounting plate, the furnace pot guide sleeves are connected with guide rods in a penetrating mode, the furnace pot unit can move along the outside of the guide rods, a furnace pot connecting flange is connected to the outside of the open end of the furnace pot, and the size of the furnace pot connecting flange is the same as that of the lower sealing flange.

[0011] As a preferred technical scheme of the vacuum annealing furnace capable of rapid cooling, the heating unit includes a furnace chamber mounting plate and a furnace chamber, furnace chamber guide sleeves are arranged at the four corners of the furnace chamber mounting plate, the furnace chamber guide sleeves are connected with guide rods in a sliding mode, the heating unit can move along the outside of the guide rods, the furnace opening of the furnace chamber is downward, heating elements are arranged inside the furnace chamber, a furnace chamber top temperature measuring sensor is arranged on the inner wall of the furnace chamber, a furnace chamber outer protective cover is arranged outside the furnace chamber, a heating unit drag chain is arranged outside the furnace chamber outer protective cover, the furnace chamber is connected with the furnace chamber mounting plate through a lower flange of the furnace chamber outer protective cover, and the axial lines of each of the furnace chamber, the furnace pot and the substrate placing table are coincident.

[0012] As a preferred technical scheme of the vacuum annealing furnace capable of rapid cooling,

[0013] The turnover furnace door unit is arranged at the front end position of the furnace chamber mounting plate, the turnover furnace door unit includes a furnace door mounting plate and a turnover driving cylinder, one end of the furnace door mounting plate is fixedly connected with one end of a turnover shaft, and the other end of the turnover shaft is rotatably connected with the furnace chamber mounting plate.

[0014] A gear is fixedly installed at the upper middle position of the rotating shaft. A connecting hole is provided at the middle position of one end of the furnace door mounting plate near the rotating shaft. The connecting hole is used to facilitate the rotation of the furnace door mounting plate. A rack is provided on the output end surface of the rotating drive cylinder. The rack meshes with the gear for transmission.

[0015] As a preferred technical solution for a vacuum annealing furnace capable of rapid cooling, a furnace door cover is installed on one side of the furnace door mounting plate, and a furnace door back cooling fan is installed on the other side of the furnace door mounting plate.

[0016] As a preferred technical solution for a vacuum annealing furnace capable of rapid cooling, the bottom end of the frame is equipped with a furnace tank unit lifting drive motor and a heating unit lifting drive motor, the top end of the frame is equipped with a driven sprocket shaft seat, the output ends of the furnace tank unit lifting drive motor and the heating unit lifting drive motor are equipped with transmission chains, the transmission chains are connected to the driven sprocket shaft seat, and the back of the frame is equipped with an electrical control box, which provides power to the furnace tank unit lifting drive motor, the heating unit lifting drive motor and the vacuum unit.

[0017] As a preferred technical solution for a vacuum annealing furnace capable of rapid cooling, the guide rod, furnace tank mounting plate, furnace tank guide sleeve, furnace chamber mounting plate, and furnace chamber guide sleeve can be respectively a linear guide rail, a guide rail type furnace tank mounting plate, a guide rail type furnace tank guide sleeve, a guide rail type furnace chamber mounting plate, and a guide rail type furnace chamber guide sleeve.

[0018] As a preferred technical solution for a vacuum annealing furnace capable of rapid cooling, the usage steps are as follows:

[0019] A: Place the substrate workpiece on top of the substrate placement platform. During heating, control the lifting drive motor of the furnace tank unit. Through the cooperation of the transmission chain and the driven sprocket shaft seat, the furnace tank unit is lowered until the furnace tank connecting flange and the lower sealing flange are connected and sealed. The vacuum unit is then operated. The vacuum unit uses the suction pipe to vacuum the gas inside the furnace tank.

[0020] B: When the vacuum level inside the furnace reaches the required level, the lifting drive motor of the heating unit is activated. With the cooperation of the transmission chain and the driven sprocket shaft seat, the heating unit is lowered. Through the setting of the guide rod, the furnace guide sleeve and the furnace chamber guide sleeve, the furnace unit and the heating unit are more stable when moving. The heating element starts to heat the furnace chamber, reaches the process temperature, is kept at the temperature, and then the heating is stopped for cooling.

[0021] C: Upon reaching a certain temperature, the heating unit is raised to the top by the lifting drive motor, which controls the output end of the tilting drive cylinder to extend. Since the rack and pinion are meshed and the gear is fixedly connected to the furnace door mounting plate, the furnace door mounting plate is moved from a vertical plane to a horizontal plane. The furnace opening is then sealed by the furnace door cover. At this time, the cooling fan on the back of the furnace door is at the top of the furnace tank, causing it to blow cold air downwards to cool the furnace tank. This is combined with the cooling fans on both sides to accelerate cooling. Once the temperature is reached, the tilting drive cylinder is reset, causing the furnace door mounting plate to reset synchronously. The furnace tank connecting flange is then disconnected from the lower sealing flange, and the furnace tank unit is raised by the lifting drive motor. At this point, the heat-treated substrate can be removed.

[0022] The beneficial effects of the present invention are: the present invention provides a sealed inner tube that is not affected by the gravity of the workpiece, can be applied to a variety of workpieces, can be cooled in batches, thus greatly improving the overall cooling effect. While achieving rapid cooling, it reduces creep damage to the inner tube, is easy to use and operate, and at the same time improves its service life and increases production efficiency. Attached Figure Description

[0023] The accompanying drawings are provided to further illustrate the invention and form part of the specification. They are used in conjunction with embodiments of the invention to explain the invention and do not constitute a limitation thereof. In the drawings:

[0024] Figure 1 This is a schematic diagram of the cooling state of a vacuum annealing furnace;

[0025] Figure 2 This is a schematic diagram of the furnace tank unit of the vacuum annealing furnace in use;

[0026] Figure 3 This is a schematic diagram of the vacuum annealing furnace in its unused state;

[0027] Figure 4 This is a schematic diagram showing all operating states of the vacuum annealing furnace;

[0028] Figure 5 This is a left-side sectional view of the substrate support unit, furnace tank unit, and heating unit of the vacuum annealing furnace;

[0029] Figure 6 It is a vacuum annealing furnace. Figure 1 Diagram showing the view from below;

[0030] Figure 7 This is a front view sectional view of a vacuum annealing furnace;

[0031] Figure 8 This is a schematic diagram of a half-section of the left side of a vacuum annealing furnace;

[0032] Figure 9 This is a schematic diagram of the buffer structure of a vacuum annealing furnace;

[0033] Figure 10 This is a schematic diagram of the linear guide rail replacement guide rod structure for a vacuum annealing furnace.

[0034] The components in the diagram are labeled as follows: 1. Frame; 11. Guide rod; 110. Linear guide rail; 12. Electrical control box; 13. Mounting platform; 14. Vacuum unit; 15. Furnace unit lifting drive motor; 16. Heating unit lifting drive motor; 17. Transmission chain; 18. Driven sprocket shaft seat; 19. Cooling fan; 2. Substrate support unit; 21. Lower sealing flange; 22. Sealing ring; 23. Substrate placement platform; 24. Evacuation pipe; 25. Fixed temperature sensor; 4. Furnace unit; 41. Furnace; 42. Furnace opening sealing ring; 43. Furnace mounting plate; 430. Guide rail type furnace mounting plate; 44. Furnace guide sleeve; 440. Guide rail type furnace guide sleeve. 45. Furnace-tank connecting flange; 5. Heating unit; 51. Furnace mounting plate; 510. Guide rail type furnace mounting plate; 52. Furnace guide sleeve; 520. Guide rail type furnace guide sleeve; 53. Furnace; 54. Furnace top temperature sensor; 55. Furnace outer cover; 56. Heating element; 57. Furnace outer cover lower flange; 58. Heating unit drag chain; 6. Tilting furnace door unit; 61. Furnace door mounting plate; 62. Furnace door cover; 63. Gear; 64. Tilting shaft; 65. Tilting drive cylinder; 66. Rack; 67. Furnace door back cooling fan; 7. Buffer mechanism; 71. Support rod; 72. Support plate; 73. Buffer spring; 74. Buffer plate. Detailed Implementation

[0035] The following description, in conjunction with embodiments and accompanying drawings, clearly and completely illustrates the concept, specific structure, and technical effects of the present invention, so as to fully understand the purpose, solution, and effects of the present invention. It should be noted that, unless otherwise specified, the embodiments and features in the embodiments of this application can be combined with each other. It should also be noted that, unless otherwise specified, when a feature is referred to as "fixed" or "connected" to another feature, it can be directly fixed or connected to the other feature, or indirectly fixed or connected to the other feature. Furthermore, the descriptions of "up," "down," "left," and "right" used in this invention are only relative to the relative positional relationships of the various components of the present invention in the accompanying drawings.

[0036] Reference Figure 3As shown, a vacuum annealing furnace capable of rapid cooling includes: a frame 1, a furnace tank unit 4, and a heating unit 5; a mounting plate 13, fixedly mounted on the frame 1, with guide rods 11 installed at the four corners of the mounting plate 13, and at least one substrate support unit 2 also mounted on the mounting plate 13, the top of the guide rods 11 being fixedly connected to the top of the frame 1; a cooling fan 19, mounted on both sides of the frame 1; a lower sealing flange 21 connected to the mounting plate 13 is provided on the outer side of the bottom end of the substrate support unit 2, with a sealing ring 22 between the lower sealing flange 21 and the substrate support unit 2; a substrate placement platform 23 is provided at the top of the substrate support unit 2, and the substrate placement platform 23 is used to place the substrate workpiece to be heat-treated; the same number of furnace tank units 4 are provided above the substrate support unit 2, and the same number of heating units 5 are provided above the furnace tank units 4;

[0037] By setting up the substrate support unit 2 and the substrate placement stage 23, the workpiece can be either a large cylindrical shape or a small plate, thus solving its limitations. By aligning the centerlines of each substrate support unit 2, furnace unit 4 and heating unit 5, the sealing and precise docking performance of the workpiece during annealing can be greatly improved.

[0038] Reference Figure 1 , 2 As shown in Figures 3 and 9, a vacuum annealing furnace capable of rapid cooling is provided. The number of substrate support units 2 is set to two or four. The two ends of the mounting plate 13 are provided with buffer mechanisms 7. The buffer mechanism 7 includes a support rod 71 and a support plate 72. A buffer plate 74 is provided above the support plate 72. A buffer spring 73 is provided between the support plate 72 and the buffer plate 74.

[0039] By setting up the buffer spring 73 and the buffer plate 74, the furnace tank unit 4 can achieve the effect of buffering and shock absorption when it descends to the lowest position.

[0040] Reference Figure 3 and 5 As shown, a vacuum annealing furnace with rapid cooling is provided. The surface of the substrate support unit 2 is provided with multiple air holes. An air extraction pipe 24 is provided inside the air holes. The other end of the air extraction pipe 24 is connected to a vacuum unit 14. A fixed temperature sensor 25 is provided at the bottom of the substrate placement stage 23 and inside the substrate support unit 2.

[0041] By setting up the exhaust pipe 24 and the vacuum unit 14, the gas inside the furnace tank 41 can be extracted when it covers the workpiece, thereby improving the heating effect. It can also achieve oxidation-free, decarburization-free, and carburization-free processes, remove phosphorus scale from the workpiece surface, and has degreasing and degassing effects, thereby achieving a bright and clean surface.

[0042] Reference Figure 1 ,2 As shown in Figures 5 and 7, a vacuum annealing furnace capable of rapid cooling is provided. The furnace tank unit 4 includes a furnace tank 41 and a furnace tank mounting plate 43. The top of the furnace tank 41 is sealed, and the bottom of the furnace tank 41 is open. The furnace tank 41 is connected to the furnace tank mounting plate 43 through the furnace tank. A furnace opening sealing ring 42 is provided between the furnace tank 41 and the furnace tank mounting plate 43. Furnace tank guide sleeves 44 are provided at all four corners of the furnace tank mounting plate 43. The furnace tank guide sleeves 44 are connected to the guide rod 11 through the furnace tank. The furnace tank unit 4 can move along the outside of the guide rod 11. A furnace tank connecting flange 45 is connected to the outside of the open end of the furnace tank 41. The size of the furnace tank connecting flange 45 is the same as the size of the lower sealing flange 21.

[0043] The furnace unit 4, which can move up and down, reduces the number of steps required when placing and removing workpieces, thereby reducing the chance of workpieces being damaged and preventing them from falling downwards due to their own weight.

[0044] Reference Figure 2 , 5 As shown in Figures 7 and 8, a vacuum annealing furnace capable of rapid cooling is provided. The heating unit 5 includes a furnace mounting plate 51 and a furnace 53. The four corners of the furnace mounting plate 51 are provided with furnace guide sleeves 52. The furnace guide sleeves 52 are slidably connected to the guide rods 11, and the heating unit 5 can move along the outside of the guide rods 11. The furnace opening of the furnace 53 faces downward. The furnace 53 is provided with a heating element 56. The furnace top temperature sensor 54 is installed on the upper inner wall of the furnace 53. The furnace outer cover 55 is provided on the outside of the furnace 53. The heating unit drag chain 58 is provided on the outside of the furnace outer cover 55. The furnace 53 is connected to the furnace mounting plate 51 through the lower flange 57 of the furnace outer cover. The centerlines of each furnace 53, furnace tank 41, and substrate placement platform 23 are coincident.

[0045] By separating the heating unit 5 from the furnace tank unit 4, the entire unit can be cooled in stages during cooling, thereby achieving a better cooling effect.

[0046] Reference Figure 2 , 4 As shown in Figure 6, a vacuum annealing furnace capable of rapid cooling includes a tilting furnace door unit 6, which is located at the front end of the furnace mounting plate 51. The tilting furnace door unit 6 includes a furnace door mounting plate 61 and a tilting drive cylinder 65. One end of the furnace door mounting plate 61 is fixedly connected to one end of a tilting shaft 64, and the other end of the tilting shaft 64 is rotatably connected to the furnace mounting plate 51. A gear 63 is fixedly located at the upper middle position of the tilting shaft 64. A connecting hole is provided at the middle position of the furnace door mounting plate 61 near the tilting shaft 64 to facilitate the rotation of the furnace door mounting plate 61. A rack 66 is provided on the output end surface of the tilting drive cylinder 65, and the rack 66 meshes with the gear 63 for transmission.

[0047] The furnace door mounting plate 61 allows the cooling fan 67 on the back of the furnace door to be stored when not in use and to be quickly opened when in use.

[0048] Reference Figure 2 , 3 As shown in Figures 4 and 6, a vacuum annealing furnace capable of rapid cooling is provided, wherein a furnace door cover 62 is installed on one side of the furnace door mounting plate 61, and a furnace door back cooling fan 67 is installed on the other side of the furnace door mounting plate 61.

[0049] By setting the furnace door cover 62, the opening of the furnace chamber 53 can be blocked, making it difficult for the heat inside to continue heating the furnace tank 41. By cooperating with the cooling fan 67 on the back of the furnace door and the cooling fan 19, the cooling effect of the workpiece and the device can be greatly improved.

[0050] Reference Figure 3 , 5 As shown in Figure 8, a vacuum annealing furnace capable of rapid cooling has a furnace tank unit lifting drive motor 15 and a heating unit lifting drive motor 16 installed inside the bottom end of the frame 1. A driven sprocket shaft seat 18 is installed at the top end of the frame 1. Both the furnace tank unit lifting drive motor 15 and the heating unit lifting drive motor 16 are equipped with a transmission chain 17, which is connected to the driven sprocket shaft seat 18. An electrical control box 12 is installed at the back of the frame 1, which provides power to the furnace tank unit lifting drive motor 15, the heating unit lifting drive motor 16, and the vacuum unit 14.

[0051] The lifting drive motor 15 for the furnace unit and the lifting drive motor 16 for the heating unit enable the furnace unit 4 and the heating unit 5 to be lifted and lowered independently. The heating unit drag chain 58 enables the transmission chain 17 to move the heating unit 5. Similarly, the furnace unit 4 is equipped with the same components as the heating unit drag chain 58 for lifting and lowering the furnace unit 4.

[0052] Reference Figure 10 As shown, a vacuum annealing furnace capable of rapid cooling is described, wherein the guide rod 11, furnace tank mounting plate 43, furnace tank guide sleeve 44, furnace chamber mounting plate 51, and furnace chamber guide sleeve 52 can be respectively a linear guide rail 110, a guide rail type furnace tank mounting plate 430, a guide rail type furnace tank guide sleeve 440, a guide rail type furnace chamber mounting plate 510, and a guide rail type furnace chamber guide sleeve 520;

[0053] The lifting and lowering of the furnace unit 4 and heating unit 5 using linear guide rail 110, guide rail furnace tank mounting plate 430, guide rail furnace tank guide sleeve 440, guide rail furnace chamber mounting plate 510 and guide rail furnace chamber guide sleeve 520 is consistent with the lifting and lowering performance of the furnace unit 4 and heating unit 5 using guide rod 11, furnace tank mounting plate 43, furnace tank guide sleeve 44 and furnace chamber mounting plate 51.

[0054] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A vacuum annealing furnace capable of rapid cooling, characterized in that, include: The frame (1), the furnace unit (4), and the heating unit (5); Mounting platform (13) is fixedly mounted on the frame (1). Guide rods (11) are installed on the four corners of the mounting platform (13). At least one base plate support unit (2) is also installed on the mounting platform (13). The top end of the guide rod (11) is fixedly connected to the top end of the frame (1). Cooling fans (19) are installed on both sides of the frame (1). The bottom outer side of the substrate support unit (2) is provided with a lower sealing flange (21) connected to the mounting plate (13). A sealing ring (22) is provided between the lower sealing flange (21) and the substrate support unit (2). The top of the substrate support unit (2) is provided with a substrate placement platform (23), which is used to place the substrate workpiece to be heat treated. The substrate support unit (2) is provided with a furnace tank unit (4) of the same number above it. The furnace tank unit (4) is provided with a heating unit (5) of the same number above it. The furnace tank unit (4) includes a furnace tank (41) and a furnace tank mounting plate (43). The top of the furnace tank (41) is sealed, and the bottom of the furnace tank (41) is open. The furnace tank (41) and the furnace tank mounting plate (43) are connected through. A furnace opening sealing ring (42) is provided between the furnace tank (41) and the furnace tank mounting plate (43). Furnace tank guide sleeves (44) are provided at all four corners of the furnace tank mounting plate (43). The furnace tank guide sleeves (44) are connected through to the guide rod (11), and the furnace tank unit (4) can move along the outside of the guide rod (11). A furnace tank connecting flange (45) is connected to the outside of the open end of the furnace tank (41). The size of the furnace tank connecting flange (45) is the same as the size of the lower sealing flange (21). The heating unit (5) includes a furnace mounting plate (51) and a furnace (53). The four corners of the furnace mounting plate (51) are provided with furnace guide sleeves (52). The furnace guide sleeves (52) are slidably connected to the guide rod (11), and the heating unit (5) can move along the outside of the guide rod (11). The furnace opening of the furnace (53) faces downward. The furnace (53) is provided with a heating element (56). The furnace top temperature sensor (54) is installed on the upper wall of the furnace (53). The furnace (53) is provided with an outer furnace cover (55). The furnace outer cover (55) is provided with a heating unit drag chain (58). The furnace (53) is connected to the furnace mounting plate (51) through the lower flange (57) of the outer furnace cover. The center lines of each furnace (53), furnace tank (41), and substrate placement platform (23) are coincident.

2. The rapidly cooling vacuum annealing furnace according to claim 1, characterized in that, The number of the substrate support unit (2) is set to two or four. The mounting plate (13) is provided with a buffer mechanism (7) on both ends. The buffer mechanism (7) includes a support rod (71) and a support plate (72). A buffer plate (74) is provided above the support plate (72). A buffer spring (73) is provided between the support plate (72) and the buffer plate (74).

3. The rapidly cooling vacuum annealing furnace according to claim 2, characterized in that, The substrate support unit (2) has multiple air holes on its surface. An air extraction pipe (24) is installed inside the air holes. A vacuum unit (14) is connected to the other end of the air extraction pipe (24). A fixed temperature sensor (25) is installed at the bottom of the substrate placement stage (23) and inside the substrate support unit (2).

4. The rapidly cooling vacuum annealing furnace according to claim 3, characterized in that, The tilting furnace door unit (6) is located at the front end of the furnace mounting plate (51). The tilting furnace door unit (6) includes a furnace door mounting plate (61) and a tilting drive cylinder (65). One end of the furnace door mounting plate (61) is fixedly connected to one end of the tilting shaft (64), and the other end of the tilting shaft (64) is rotatably connected to the furnace mounting plate (51). The gear (63) is fixedly set at the upper middle position of the rotating shaft (64). A connecting hole is provided at the middle position of one end of the furnace door mounting plate (61) near the rotating shaft (64). The connecting hole is used to facilitate the rotation of the furnace door mounting plate (61). A rack (66) is provided on the output end surface of the rotating drive cylinder (65). The rack (66) meshes with the gear (63) for transmission.

5. The rapidly cooling vacuum annealing furnace according to claim 4, characterized in that, A furnace door cover (62) is installed on one side of the furnace door mounting plate (61), and a furnace door back cooling fan (67) is installed on the other side of the furnace door mounting plate (61).

6. The rapidly cooling vacuum annealing furnace according to claim 5, characterized in that, The bottom end of the frame (1) is equipped with a furnace unit lifting drive motor (15) and a heating unit lifting drive motor (16). The top end of the frame (1) is equipped with a driven sprocket shaft seat (18). The output ends of the furnace unit lifting drive motor (15) and the heating unit lifting drive motor (16) are equipped with transmission chains (17). The transmission chains (17) are connected to the driven sprocket shaft seat (18). The back of the frame (1) is equipped with an electrical control box (12). The electrical control box (12) provides power to the furnace unit lifting drive motor (15), the heating unit lifting drive motor (16), and the vacuum unit (14).

7. The rapidly cooling vacuum annealing furnace according to claim 6, characterized in that, The guide rod (11), furnace tank mounting plate (43), furnace tank guide sleeve (44), furnace mounting plate (51) and furnace guide sleeve (52) are respectively linear guide rail (110), guide rail type furnace tank mounting plate (430), guide rail type furnace tank guide sleeve (440), guide rail type furnace mounting plate (510) and guide rail type furnace guide sleeve (520).

8. The rapidly cooling vacuum annealing furnace according to claim 7, characterized in that, The usage steps are as follows: A: Place the substrate workpiece on top of the substrate placement platform (23). When heating, control the lifting drive motor (15) of the furnace tank unit. Through the cooperation of the transmission chain (17) and the driven sprocket shaft seat (18), the furnace tank unit (4) is lowered until the furnace tank connecting flange (45) and the lower sealing flange (21) are connected and sealed. The vacuum unit (14) is run. The vacuum unit (14) vacuums the gas inside the furnace tank (41) through the suction pipe (24). B: When the vacuum inside the furnace tank (41) reaches the required level, the heating unit lifting drive motor (16) is activated. With the cooperation of the transmission chain (17) and the driven sprocket shaft seat (18), the heating unit (5) is lowered. Through the setting of the guide rod (11), the furnace tank guide sleeve (44), and the furnace chamber guide sleeve (52), the furnace tank unit (4) and the heating unit (5) are more stable when moving. The furnace chamber (53) is heated by the heating element (56) until the process temperature is reached. The furnace is then kept warm and then the heating is stopped for cooling. C: When a certain temperature is reached, the heating unit (5) is raised to the top by the lifting drive motor (16) of the heating unit, and the output end of the tilting drive cylinder (65) is extended. Since the rack (66) and the gear (63) are meshed and driven, and the gear (63) is fixedly connected to the furnace door mounting plate (61), the furnace door mounting plate (61) is driven to change from a vertical horizontal plane to a parallel horizontal plane. The furnace opening of the furnace chamber (53) is sealed by the furnace door cover (62). At this time, the cooling fan (67) on the back of the furnace door is activated. Located at the top of the furnace tank (41), the cooling fan (67) on the back of the furnace door blows cold air downwards to cool the furnace tank (41), and the cooling fans (19) on both sides blow air to accelerate the cooling. When the temperature is cooled to a suitable level, the flip drive cylinder (65) is reset, so that the furnace door mounting plate (61) is reset synchronously, the furnace tank connecting flange (45) is disconnected from the lower sealing flange (21), and the furnace tank unit (4) is lifted by the furnace tank unit lifting drive motor (15). At this time, the heat-treated substrate can be taken out.

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