Flow sensor module and flow meter

Abstract

The application relates to a flow sensor module and a flow meter, the flow sensor module comprising a main body, a sensor unit and a detection electrode, the detection electrode comprising a first electrode structure and a second electrode structure, and a gap structure being formed between the first electrode structure and the second electrode structure. In use, impurities will be accumulated on the detection electrode and a sensing area of the sensor unit at the same time. As the impurities are accumulated on the detection electrode, the gap structure between the first electrode structure and the second electrode structure will be changed, so that the electrical parameters such as resistance or capacitance of the detection electrode are changed. Therefore, by detecting the electrical parameters of the detection electrode, the accumulation degree of the impurities on the detection electrode and the sensing area of the sensor unit can be obtained, so that when the accumulation degree of the impurities on the sensing area of the sensor unit affects the measurement accuracy, the sensor unit can be cleaned or replaced in time, so that the high measurement accuracy can be maintained.

Description

Technical Field

[0001] This invention relates to the field of flow detection technology, and in particular to a flow sensor module and a flow meter. Background Technology

[0002] Flow meters can be used to detect the flow rate of gases or liquids and have been widely used in various fields, such as environmental monitoring, medical and health care, and safety protection.

[0003] However, with increased usage time, dust and other impurities in the fluid tend to accumulate on the sensing area of ​​the flow meter's sensor unit, leading to a decrease in the sensor unit's sensitivity. If the sensor unit is not cleaned or replaced in a timely manner, the flow meter's measurement accuracy will decrease. Summary of the Invention

[0004] Therefore, it is necessary to provide a flow sensor module and flow meter that are easy to maintain and can maintain high measurement accuracy in order to address the above problems.

[0005] A flow sensor module includes a main body with a fluid channel formed therein for fluid to pass through. A sensor unit and a detection electrode are disposed within the main body. The sensing area of ​​the sensor unit is at least partially exposed to the fluid channel or forms part of the inner wall of the fluid channel. The detection electrode is exposed within the fluid channel and is located upstream and / or downstream of the sensor unit. The detection electrode includes a first electrode structure and a second electrode structure, with a gap structure formed between the first electrode structure and the second electrode structure.

[0006] In one embodiment, the sensor unit includes a heating unit, a first temperature sensing unit located upstream of the heating unit, and a second temperature sensing unit located downstream of the heating unit.

[0007] In one embodiment, a detection groove communicating with the fluid flow channel is formed within the main body, and the detection electrode is located within the detection groove.

[0008] In one embodiment, the detection slot has an installation area and a dust collection area. The installation area is located on the side of the detection slot closer to the sensor unit, and the dust collection area is located on the side of the detection slot away from the sensor unit. The detection electrodes are distributed in the installation area.

[0009] In one embodiment, the gap structure includes a plurality of slits that are parallel to each other and extend along a predetermined direction.

[0010] In one embodiment, the first electrode structure includes a plurality of first toothed electrodes extending along the preset direction, and the second electrode structure includes a plurality of second toothed electrodes extending along the preset direction. The plurality of first toothed electrodes and the plurality of second toothed electrodes are staggered and spaced apart to form the slit between adjacent first toothed electrodes and second toothed electrodes.

[0011] In one embodiment, a dust collection tank communicating with the fluid flow channel is formed within the body, and the dust collection tank is located upstream of the detection electrode.

[0012] In one embodiment, an adsorption electrode is provided at the bottom of the dust collection tank, and the adsorption electrode is capable of generating static electricity when energized.

[0013] In one embodiment, the main body is provided with a first channel and a second channel, which are respectively connected to both ends of the fluid flow channel and are perpendicular to the fluid flow channel. The dust collection tank is located at the connection between the first channel and / or the second channel and the fluid flow channel.

[0014] In one embodiment, a cavity adjacent to the fluid flow channel is formed within the main body, and the sensor unit is disposed between the fluid flow channel and the cavity.

[0015] A flow meter includes a flow sensor module and a packaging structure as described in any of the preferred embodiments above, wherein the packaging structure is used to encapsulate the flow sensor module.

[0016] In the aforementioned flow sensor module and flow meter, when detecting fluid characteristics, the fluid flows along the fluid channel and is detected by the sensor unit. During use, impurities accumulate simultaneously on the detection electrode and the sensing area of ​​the sensor unit. As impurities accumulate on the detection electrode, the gap structure between the first and second electrode structures changes, resulting in changes in the electrical parameters of the detection electrode, such as resistance or capacitance. Therefore, by detecting the electrical parameters of the detection electrode, the degree of impurity accumulation on the detection electrode can be obtained, thereby determining the degree of impurity accumulation in the sensing area of ​​the sensor unit. This allows for timely alerts to clean or replace the sensor unit when the degree of impurity accumulation in the sensing area affects measurement accuracy, maintaining high measurement accuracy. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a schematic diagram of the flow sensor module in the first embodiment of the present invention;

[0019] Figure 2 for Figure 1 The diagram shows the structure of the detection electrode in the flow sensor module.

[0020] Figure 3 This is a schematic diagram of the flow sensor module in the second embodiment of the present invention;

[0021] Figure 4 This is a schematic diagram of the flow sensor module in the third embodiment of the present invention;

[0022] Figure 5 This is a schematic diagram of the flow sensor module in the fourth embodiment of the present invention. Detailed Implementation

[0023] To make the above-mentioned objects, features, and advantages of the present invention more apparent and understandable, specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of the present invention. However, the present invention can be practiced in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0024] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0025] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this invention, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0026] In this invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0027] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "over," and "on top" of the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0028] It should be noted that when an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. When an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementation.

[0029] Please see Figures 1 to 5 The present invention provides a flow sensor module 100 and a flow meter (not shown). The flow meter includes the flow sensor module 100 and a packaging structure (not shown) for encapsulating the flow sensor module 100.

[0030] Furthermore, the flow meter in this embodiment also includes a processing module (not shown), which is communicatively connected to the flow sensor module 100. The flow sensor module 100 and the processing module can be integrated onto a substrate (not shown), and the flow sensor module 100 can be plugged into the substrate for easy assembly and disassembly. It is understood that the flow meter may also omit the processing module, instead allowing the flow sensor module 100 to communicate with an electronic device equipped with a processing module, through which the processing module of the electronic device processes the data detected by the flow meter.

[0031] Please see Figure 1 The flow sensor module 100 in the first embodiment of the present invention includes a main body 110, a sensor unit 120 and a detection electrode 130.

[0032] A fluid flow channel (not shown) is formed within the main body 110 to allow fluid to flow. The fluid can be a gas or a liquid. In this embodiment, the main body 110 is constructed by stacking and bonding two silicon wafers (not shown), and the gap between the two silicon wafers forms the aforementioned fluid flow channel. By stacking and bonding the two silicon wafers, the fluid flow channel is formed at the wafer level, which helps reduce manufacturing costs and subsequent packaging size, resulting in a smaller finished size for the flow meter, which is beneficial for its application in small electronic devices (e.g., electronic cigarettes). The two silicon wafers can be bonded using any of the following methods: Si-Si bonding, Si-O-Si bonding, eutectic bonding, and glass paste bonding. Either of the two silicon wafers can have an opening slot (not shown) relative to the other to increase the gap between the two silicon wafers, thereby increasing the radial dimension of the fluid flow channel, i.e., increasing the cross-sectional area of ​​the fluid flow channel.

[0033] In this embodiment, the main body 110 is further provided with a first channel 1011 and a second channel 1012, which are respectively connected to both ends of the fluid flow channel. Furthermore, both the first channel 1011 and the second channel 1012 are also connected to the surrounding or external environment. That is, one of the first channel 1011 and the second channel 1012 serves as an inflow channel to guide fluid into the fluid flow channel, while the other serves as an outflow channel to guide fluid out of the fluid flow channel.

[0034] The extension directions of the first channel 1011 and the second channel 1012 are perpendicular to the fluid flow channel. The first channel 1011 and the second channel 1012 can be disposed on the same silicon wafer, or they can be disposed on two separate silicon wafers; that is, the first channel 1011 is disposed on one silicon wafer, and the second channel 1012 is disposed on the other. When the first channel 1011 and the second channel 1012 are disposed on the same silicon wafer, their extension directions are the same. When the first channel 1011 and the second channel 1012 are disposed on two separate silicon wafers, their extension directions are opposite.

[0035] by Figure 1 As shown in the example, the upper silicon wafer is the first silicon wafer, and the lower silicon wafer is the second silicon wafer. The fluid flow channel extends horizontally, and the first channel 1011 and the second channel 1012 both extend vertically. The extension directions of the first channel 1011 and the second channel 1012 are opposite. The first channel 1011 is disposed on the first silicon wafer and extends upward vertically, while the second channel 1012 is disposed on the second silicon wafer and extends downward vertically.

[0036] Sensor unit 120 is disposed within main body 110. The sensing area (not shown) of sensor unit 120 is at least partially exposed within the fluid flow channel or constitutes part of the inner wall of the fluid flow channel. Fluid flowing through the fluid flow channel passes through sensor unit 120. Specifically, sensor unit 120 is communicatively connected to processing module. Sensor unit 120 can convert the detected fluid characteristics into electrical signals and transmit them to processing module. Processing module then processes the electrical signals and converts them into fluid characteristic information that can be read intuitively, or generates control information based on the fluid characteristic information.

[0037] In this embodiment, the sensor unit 120 includes a first temperature sensing unit 121, a second temperature sensing unit 122, and a heating unit 123. The first temperature sensing unit 121 is located upstream of the heating unit 123, and the second temperature sensing unit 122 is located downstream of the heating unit 123. The upstream side of the heating unit 123 refers to the side of the heating unit 123 adjacent to the first channel 1011, and the downstream side of the heating unit 123 refers to the side of the heating unit 123 adjacent to the second channel 1012. It should be noted that the upstream and downstream sides of the heating unit 123 are only used to indicate the relative positional relationship between the opposite sides of the heating unit 123 and the first and second channels 1011 and 1012, and are not used to indicate the upstream and downstream flow of fluid. That is, the direction of fluid flow can be from the first temperature sensing unit 121 to the second temperature sensing unit 122, or from the second temperature sensing unit 122 to the first temperature sensing unit 121.

[0038] The heating unit 123 can heat the surrounding environment, while the first temperature sensing unit 121 and the second temperature sensing unit 122 can sense the temperature and generate corresponding electrical signals. Specifically, the heating unit 123 can be a heating wire, a PN junction heater, or heavily doped poly(mono)silicon capable of heating, etc., and the first temperature sensing unit 121 and the second temperature sensing unit 122 can be thermistors. The first temperature sensing unit 121, the second temperature sensing unit 122, and the heating unit 123 are all communicatively connected to the processing module. The processing module can control the heating unit 123 to start or stop heating and receive the electrical signals generated by the first temperature sensing unit 121 and the second temperature sensing unit 122.

[0039] The distances between the first temperature sensing unit 121 and the second temperature sensing unit 122 and the heating unit 123 are equal or approximately equal. After the heating unit 123 starts heating, the ambient temperature rises. When there is no fluid flow in the fluid channel, the temperature around the heating unit 123 is symmetrically distributed, and the temperature difference sensed by the first temperature sensing unit 121 and the second temperature sensing unit 122 is 0°C. When fluid flows along the fluid channel through the sensor unit 120, the fluid carries away heat, so the temperature difference sensed by the first temperature sensing unit 121 and the second temperature sensing unit 122 is not 0°C. At this time, the processing module can obtain fluid characteristic information based on the temperature difference change sensed by the two units or generate control information based on the fluid characteristic information.

[0040] Specifically, the fluid characteristic information includes whether fluid exists in the fluid flow channel, the direction of fluid flow, and the fluid flow rate and velocity. When the temperature difference sensed by the first temperature sensing unit 121 and the second temperature sensing unit 122 changes from zero to non-zero, it indicates that fluid exists in the fluid flow channel. During fluid flow, the temperature detected by the temperature sensing unit upstream of the flow path is lower than the temperature detected by the temperature sensing unit downstream of the flow path. Therefore, when the temperature detected by the first temperature sensing unit 121 is lower than the temperature detected by the second temperature sensing unit 122, the fluid flow direction is from the first temperature sensing unit 121 to the second temperature sensing unit 122. When the temperature detected by the second temperature sensing unit 121 is lower than the temperature detected by the first temperature sensing unit 121, the fluid flow direction is from the second temperature sensing unit 122 to the first temperature sensing unit 121. Furthermore, the fluid flow rate and / or velocity are directly proportional to the magnitude of the temperature difference, and the flow rate (velocity) or the trend of flow rate (velocity) changes can be obtained based on the magnitude of the temperature difference. Control information is generated based on fluid characteristic information. This can include controlling the controlled module to work or stop working, controlling the operating voltage (operating current) of the controlled module, and controlling the controlled module to generate alarm information, etc.

[0041] For example, the controlled module could be the heating module of an e-cigarette. When fluid is present in the fluid channel, it indicates a user is inhaling, triggering the heating module to activate. Furthermore, the direction of fluid flow can determine whether the user is inhaling or exhaling through the e-cigarette mouthpiece, precisely differentiating the user's inhalation action and only activating the heating module when the user is inhaling. Even further, the inhalation strength can be determined based on the flow rate (velocity), thereby adjusting the operating voltage (current) of the heating module. The controlled module could also include an alarm module for the e-cigarette. If the system determines that the user is exhaling through the mouthpiece, it indicates an improper user action, triggering an alarm.

[0042] In this embodiment, a cavity 1013 adjacent to the fluid flow channel is formed in the main body 110, and the sensor unit 120 is disposed between the fluid flow channel and the cavity 1013.

[0043] Specifically, a partition wall (not shown) exists between the cavity 1013 and the fluid flow channel, and the sensor unit 120 is mounted on this partition wall. The cavity 1013 is filled with air, and the thermal conductivity of air is lower than that of the main body 110 itself. Therefore, when the heating unit 123 starts heating, the heat dissipated outward through the main body 110 is smaller due to the obstruction of the cavity 1013, thereby reducing heat loss and improving the sensing accuracy of the sensor unit 120. In addition, an opening is provided on one side of the cavity 1013 facing the outside or surrounding environment. The air inside the cavity 1013 expands when heated, and the opening allows the cavity 1013 to communicate with the outside or surrounding environment, thereby preventing pressure differences from forming between the fluid channel and the cavity 1013 due to heating by the heating unit 123.

[0044] Specifically, the cavity 1013 is disposed on the second silicon wafer and extends vertically through the surface of the second silicon wafer away from the fluid flow channel. The portion of the second silicon wafer located between the cavity 1013 and the fluid flow channel constitutes a partition wall, and the sensor unit 120 is disposed on the partition wall.

[0045] The detection electrode 130 is disposed within the body 110 and exposed within the fluid flow channel, and is located upstream of the sensor unit 120. Obviously, in other embodiments, the detection electrode 130 may also be distributed simultaneously on both the upstream and downstream sides of the sensor unit 120, or only on the downstream side of the sensor unit 120. For example, in... Figure 3 The second embodiment shown and Figure 4In the third embodiment shown, detection electrodes 130 are provided on both the upstream and downstream sides of the sensor unit 120. The upstream side of the sensor unit 120 refers to the side of the sensor unit 120 adjacent to the first channel 1011, and the downstream side of the sensor unit 120 refers to the side of the sensor unit 120 adjacent to the second channel 1012. It should be noted that the upstream and downstream sides of the sensor unit 120 are only used to indicate the relative positional relationship between the opposite sides of the sensor unit 120 and the first and second channels 1011, and are not used to indicate the upstream and downstream flow paths of the fluid.

[0046] The sensor unit 120 has detection electrodes 130 on both its upstream and downstream sides, which is advantageous for bidirectional flow. For example, when applied to an electronic cigarette, air flows forward when the user performs a correct inhalation action, and when the user finishes inhaling, air containing an aerosol-forming matrix (e.g., e-liquid) flows backward. When the forward flow is along the second channel 1012, the fluid channel, and the first channel 1011, the reverse flow is along the first channel 1011, the fluid channel, and the second channel 1012.

[0047] Please refer to the following: Figure 2 The detection electrode 130 includes a first electrode structure 131 and a second electrode structure 132, and a gap structure 1301 is formed between the first electrode structure 131 and the second electrode structure 132. The detection electrode 130 is communicatively connected to the processing module, specifically, the pads (not shown in the figure) of the first electrode structure 131 and the second electrode structure 132 are communicatively connected to the processing module.

[0048] In other words, in the initial state, due to the formation of the gap structure 1301, the first electrode structure 131 and the second electrode structure 132 are not in contact. As the fluid flows along the fluid channel, impurities in the fluid will be deposited on both the detection electrode 130 and the sensing area of ​​the sensor unit 120. Therefore, the degree of impurity accumulation on the detection electrode 130 can reflect the degree of impurity accumulation on the sensing area of ​​the sensor unit 120.

[0049] As impurities accumulate on the detection electrode 130, the gap structure 1301 becomes filled with them. Since these impurities also possess a certain degree of conductivity (they may be solid, such as dust, or liquid, such as e-cigarette oil), the electrical parameters of the detection electrode 130, such as resistance or capacitance, change. Initially, there is no impurity accumulation on the detection electrode 130, and the first electrode structure 131 and the second electrode structure 132 are not conductive, resulting in a very high resistance value for the detection electrode 130. However, when impurities fill the gap structure 1301, the resistance value of the detection electrode 130 decreases, and within a certain range, the more impurities accumulate, the lower the resistance value becomes. Initially, because the first electrode structure 131 and the second electrode structure 132 are separated by air, the dielectric constant and capacitance value of the detection electrode 130 are relatively small. However, when impurities fill the gap structure 1301, the dielectric constant of the detection electrode 130 increases, and within a certain range, the more impurities accumulate, the larger the dielectric constant becomes, and the corresponding capacitance value also increases.

[0050] The processing module detects the electrical parameters of the detection electrode 130 to determine the degree of impurity accumulation on the electrode, and thus the corresponding degree of impurity accumulation in the sensing area of ​​the sensor unit 120. Therefore, when the degree of impurity accumulation in the sensing area of ​​the sensor unit 120 affects the measurement accuracy, it can promptly prompt for cleaning or replacement of the sensor unit 120, facilitating maintenance and maintaining high measurement accuracy. It is understood that replacing the sensor unit 120 can be done by replacing only the sensor unit 120, replacing the flow sensor module 100, or replacing the entire flow meter; the user can choose the appropriate method based on the specific circumstances.

[0051] In this embodiment, the gap structure 1301 includes a plurality of slits that are parallel to each other and extend along a preset direction.

[0052] This preset direction can be the flow direction of the fluid within the fluid channel, i.e. Figure 1 The left-right direction shown can also be a direction perpendicular to the flow direction of the fluid in the fluid channel within the horizontal plane. Preferably, it is a direction perpendicular to the flow direction of the fluid in the fluid channel within the horizontal plane. In this way, the fluid will be obstructed by the detection electrode 130 when flowing in the fluid channel, which is conducive to the deposition of impurities in the fluid in the area where the detection electrode 130 is located, reducing the contamination of the sensing area of ​​the sensor unit 120 by impurities.

[0053] It should be noted that in other embodiments, the gap structure 1301 may also be an irregularly distributed hole, slit, or other structure.

[0054] Furthermore, in this embodiment, the first electrode structure 131 includes a plurality of first toothed electrodes 1311 extending along a preset direction, and the second electrode structure 132 includes a plurality of second toothed electrodes 1321 extending along a preset direction. The plurality of first toothed electrodes 1311 and the plurality of second toothed electrodes 1321 are staggered and spaced apart to form a slit between adjacent first toothed electrodes 1311 and second toothed electrodes 1321, that is, a gap structure 1301 is formed between adjacent first toothed electrodes 1311 and second toothed electrodes 1321.

[0055] As can be seen, both the first electrode structure 131 and the second electrode structure 132 are comb-shaped, which can improve the uniformity of the distribution of the gap structure 1301 on the detection electrode 130.

[0056] In this embodiment, a detection groove 102 communicating with a fluid flow channel is formed within the main body 110, and the detection electrode 130 is located within the detection groove 102. The detection groove 102 is an opening groove formed on the first silicon wafer and / or the second silicon wafer with its opening facing the fluid flow channel.

[0057] During use, the flow sensor module 100 serves two purposes: First, the detection groove 102 provides installation space for the detection electrode 130, preventing it from occupying the fluid flow channel and thus avoiding blockage. Second, the detection groove 102 also provides space to accommodate impurities. Impurities in the fluid can be deposited and collected within the detection groove 102, thereby reducing the impurity content in the fluid flowing through the sensor unit 120. This slows down the accumulation rate of impurities in the sensing area of ​​the sensor unit 120, contributing to a longer service life for the flow sensor module 100.

[0058] Furthermore, in this embodiment, the detection tank 102 is located at the connection between the first channel 1011 and the fluid channel, and / or at the connection between the second channel 1012 and the fluid channel. Since the extending directions of the first channel 1011 and the second channel 1012 are perpendicular to the fluid channel, the fluid changes direction at the connection between the first channel 1011 and the fluid channel, and at the connection between the second channel 1012 and the fluid channel, thus slowing down the flow rate. This facilitates the deposition of impurities in the fluid within the detection tank 102, further reducing the impurity content in the fluid flowing through the sensor unit 120.

[0059] In addition, by setting the detection tank 102 at the connection between the first channel 1011 and the fluid flow channel, and / or the connection between the second channel 1012 and the fluid flow channel, after the detection tank 102 collects impurities, the flow sensor module 100 can be inverted relative to the first channel 1011 or relative to the second channel 1012, and with a certain amount of shaking, the detection tank 102 can be cleaned.

[0060] It should be noted that, in other embodiments, the detection electrode 130 may also be directly disposed in the fluid channel and fixed to the inner wall of the fluid channel.

[0061] Please refer to it again. Figure 4 In the third embodiment of the present invention, the detection tank 102 has a dust collection area and an installation area. The installation area is located on the side of the detection tank 102 close to the sensor unit 120, and the dust collection area is located on the side of the detection tank 102 away from the sensor unit 120. The detection electrodes 130 are distributed in the installation area.

[0062] by Figure 4 Taking the detection tank 102 located on the left side of the sensor unit 120 as an example, the detection electrode 130 is distributed on the right side of the detection tank 102, while the left side of the detection tank 102 is left blank as a dust collection area. It can be seen that the bottom of the detection tank 102 is not completely covered by the detection electrode 130, and the dust collection area has a large capacity, capable of collecting most of the impurities in the fluid. Therefore, only a small portion of the impurities are deposited on the detection electrode 130 and the sensing area of ​​the sensor unit 120, thereby improving the accuracy of detection. In other words, by setting the dust collection area on the side of the detection tank 102 away from the sensor unit 120, after the fluid enters the fluid channel, impurities in the fluid preferentially deposit in the dust collection area, which helps to improve the dust collection efficiency of the detection tank 102, reduces the probability of impurities depositing on the detection electrode 130 and the sensing area of ​​the sensor unit 120, and avoids excessive impurities on the detection electrode 130 exceeding the detection range, thus preventing changes in electrical parameters. Furthermore, it can improve the synchronization of the degree of contamination on the sensing area of ​​the detection electrode 130 and the sensor unit 120, thereby improving the accuracy of detection.

[0063] Please refer to it again. Figure 5 In a fourth embodiment of the present invention, a dust collection groove 103 communicating with a fluid flow channel is formed within the main body 110, and the dust collection groove 103 is located upstream of the detection electrode 130. The upstream side of the detection electrode 130 refers to the upstream side of the detection electrode 130 along the fluid flow path. For example, as... Figure 5 As shown, if the fluid flow path is first channel 1011, fluid channel, and second channel 1012, then the dust collection tank 103 is disposed between the first channel 1011 and the detection electrode 130, located upstream of the detection electrode 130 in the fluid flow path. Alternatively, if the detection electrode 130 is located downstream of the sensor unit 120, and the fluid flow path is second channel 1012, fluid channel, and first channel 1011, then the dust collection tank 103 is disposed between the second channel 1012 and the detection electrode 130, located upstream of the detection electrode 130 in the fluid flow path. Understandably, the number of dust collection tanks 103 is set to be greater than or equal to the number of detection electrodes 130.

[0064] The structure of the dust collection tank 103 is largely the same as that of the detection tank 102, being an open tank formed on the first silicon wafer and / or the second silicon wafer with its opening facing the fluid flow channel. The fluid flowing along the fluid flow channel first passes through the dust collection tank 103, thus impurities in the fluid are deposited there first, reducing the impurity content in the fluid flowing through the detection electrode 130 and the sensor unit 120. This further slows down the accumulation rate of impurities in the sensing area of ​​the sensor unit 120, thereby extending the service life of the flow sensor module 100.

[0065] Furthermore, in this embodiment, an adsorption electrode 140 is provided at the bottom of the dust collection tank 103. The adsorption electrode 140 can generate static electricity when energized. The adsorption electrode 140 can be a metal layer formed on the bottom of the dust collection tank 103 by means of metal plating or the like, and can be connected to DC or AC power. Since impurities in the fluid are more or less charged, the adsorption electrode 140 can enhance its adsorption capacity for impurities after being energized, thereby allowing as many impurities in the fluid as possible to be deposited in the dust collection tank 103, further extending the service life of the flow sensor module 100. In addition, impurities in the fluid preferentially deposit in the dust collection tank 103, reducing the probability of impurities depositing on the detection electrode 130 and the sensing area of ​​the sensor unit 120, avoiding excessive impurities on the detection electrode 130 that exceed the detection range, thus preventing changes in electrical parameters. Moreover, it can also improve the synchronization of the degree of contamination on the sensing areas of the detection electrode 130 and the sensor unit 120, thereby improving the accuracy of detection.

[0066] Furthermore, in this embodiment, the dust collection tank 103 is preferentially located at the connection between the first channel 1011 and the fluid flow channel, and / or at the connection between the second channel 1012 and the fluid flow channel, relative to the detection tank 102. Since the extending directions of the first channel 1011 and the second channel 1012 are perpendicular to the fluid flow channel, the fluid changes direction at the connection between the first channel 1011 and the fluid flow channel, and at the connection between the second channel 1012 and the fluid flow channel, thus slowing down the flow rate and facilitating the deposition of impurities in the fluid within the dust collection tank 103.

[0067] In the aforementioned flow sensor module 100 and flow meter, when detecting fluid characteristics, the fluid flows along the fluid channel and is detected by the sensor unit 120. During use, impurities accumulate simultaneously on the detection electrode 130 and the sensing area of ​​the sensor unit 120. As impurities accumulate on the detection electrode 130, the gap structure 1301 between the first electrode structure 131 and the second electrode structure 132 changes, resulting in changes in the electrical parameters of the detection electrode 130, such as resistance or capacitance. Therefore, by detecting the electrical parameters of the detection electrode 130, the degree of impurity accumulation on the detection electrode 130 can be obtained, thereby determining the degree of impurity accumulation in the sensing area of ​​the sensor unit 120. When the degree of impurity accumulation in the sensing area of ​​the sensor unit 120 affects the measurement accuracy, it can promptly prompt the cleaning or replacement of the sensor unit 120 to maintain high measurement accuracy.

[0068] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0069] The embodiments described above are merely illustrative of several implementations of the present invention, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the invention patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of the present invention, and these all fall within the protection scope of the present invention. Therefore, the protection scope of this invention patent should be determined by the appended claims.

Claims

1. A flow sensor module characterized by, The device includes a main body, within which a fluid channel for fluid passage is formed. A sensor unit and a detection electrode are disposed within the main body. The sensing area of ​​the sensor unit is at least partially exposed to the fluid channel or constitutes a portion of the inner wall of the fluid channel. The detection electrode is exposed within the fluid channel and located upstream and / or downstream of the sensor unit. The detection electrode includes a first electrode structure and a second electrode structure, with a gap structure formed between the first electrode structure and the second electrode structure. A detection groove communicating with the fluid channel is formed within the main body, and the detection electrode is located within the detection groove.

2. The flow sensor module of claim 1, wherein, The sensor unit includes a heating unit, a first temperature sensing unit located upstream of the heating unit, and a second temperature sensing unit located downstream of the heating unit.

3. The flow sensor module of claim 1, wherein, The detection tank has an installation area and a dust collection area. The installation area is located on the side of the detection tank closer to the sensor unit, and the dust collection area is located on the side of the detection tank away from the sensor unit. The detection electrodes are distributed in the installation area.

4. The flow sensor module of claim 1, wherein, The gap structure includes multiple parallel slits that extend along a predetermined direction.

5. The flow sensor module of claim 4, wherein, The first electrode structure includes a plurality of first toothed electrodes extending along the preset direction, and the second electrode structure includes a plurality of second toothed electrodes extending along the preset direction. The plurality of first toothed electrodes and the plurality of second toothed electrodes are staggered and spaced apart to form the slit between adjacent first toothed electrodes and second toothed electrodes.

6. The flow sensor module of claim 1, wherein, A dust collection tank is formed within the main body and communicates with the fluid flow channel. The dust collection tank is located upstream of the detection electrode.

7. The flow sensor module of claim 6, wherein, The bottom of the dust collection tank is equipped with an adsorption electrode, which can generate static electricity when energized.

8. The flow sensor module according to claim 6, characterized in that, The main body is provided with a first channel and a second channel, which are respectively connected to both ends of the fluid flow channel and are perpendicular to the fluid flow channel. The dust collection tank is located at the connection between the first channel and / or the second channel and the fluid flow channel.

9. The flow sensor module according to any one of claims 1 to 8, characterized in that, A cavity adjacent to the fluid flow channel is formed within the main body, and the sensor unit is disposed between the fluid flow channel and the cavity.

10. A flow meter, characterized in that, The invention includes a flow sensor module and a packaging structure as described in any one of claims 1 to 9, wherein the packaging structure is used to encapsulate the flow sensor module.

Images