High-stability three-dimensional angle inspection device and method based on active control compensation

Abstract

The present invention provides a high-stability three-dimensional angle inspection device and method based on active control compensation. The device consists of a ribbed workbench, piezoelectric ceramics, a lead screw motor, a base, a plane mirror, an autocollimator, a circuit board, temperature, humidity, and air pressure sensors, a metrology frame, and a rotary table; the method uses an angle generating device composed of a driving device and a rotary table to enable the workbench to rotate in three directions of roll, pitch, and yaw, and uses two two-dimensional angle metrology devices placed orthogonally to detect the angle of the workbench in real time, forming a closed-loop control, so that the workbench can generate standard three-dimensional angles; using a high-resolution autocollimator as the angle metrology device and driving with piezoelectric ceramics, the angle generated by the workbench can achieve high-precision closed-loop feedback control within the measurement range, so that an angle of the standard micro-nano arcsecond level can be generated, solving the problem that the angle inspection instrument cannot achieve a high angle resolution of the micro-nano arcsecond level within the traditional measurement range.

Description

Technical Field

[0001] The present invention belongs to the technical field of precision measurement, and particularly relates to a high-stability three-dimensional angle inspection device and method based on active control compensation. Background Art

[0002] In the technical fields of precision measurement, optical engineering, cutting-edge scientific experiments, and high-end precision equipment manufacturing, there is an urgent need for angle inspection technologies with high resolution, high precision, and high stability over a large working range. It supports the development of technologies and instrumentations in the above fields.

[0003] In the fields of precision measurement technology and instruments, cutting-edge scientific experiment devices, and high-end precision equipment manufacturing, small angle inspectors can be used to calibrate angle measuring instruments.

[0004] In the fields of optical engineering and cutting-edge scientific experiments, small angle inspectors can be used to generate standard small angles, and the standard angle range generated by them is from a few minutes to forty minutes.

[0005] Traditional angle inspectors such as Figure 1 As shown, the device includes a ribbed workbench 1, a workbench rotating shaft 2, a workbench support 3, a driving device 4, a first positioning indicator 5, a second positioning indicator 6, and a base 7; the driving device 4 moves up and down, driving the ribbed workbench 1 to change the angle in the pitching direction; the first positioning indicator 5 and the first positioning indicator 6 are used as angle measuring devices to measure the angle of the workbench, forming a closed-loop control to make the angle generating device generate a standard angle. In this structure, the angle inspection device can only inspect one-dimensional angles; at the same time, the resolution and accuracy of the driving device and the angle measuring device are relatively low, resulting in a relatively low resolution of the angle inspection device; moreover, environmental drift quantities such as temperature, humidity, and pressure have a greater impact on the stability of the angle inspection device, and the instability of the measurement seriously affects the ultimate resolution of the measurement. The above conditions limit make it difficult for this device to break through the bottleneck of high stability, high resolution, and high dimensions.

[0006] In summary, the system has the following three problems:

[0007] First, traditional angle inspection devices cannot inspect three-dimensional angles, and even most can only inspect one-dimensional angles. Since traditional devices mostly use one-dimensional angle generating devices and one-dimensional angle measuring devices, traditional small angle inspectors can only inspect one-dimensional angles; moreover, the volume of the angle inspection device also limits its inspection dimensions;

[0008] Second, traditional angular inspection techniques cannot achieve high angular resolution at the micro-nano arcsecond level within the measurement range. Since traditional angular inspection devices mostly use measuring instruments with relatively low resolution, such as spirit levels, as angular measurement devices, and the drive module design of the angular generating device is relatively simple and cannot generate small angles with high precision, the ultimate resolution of the angular inspection device is limited and cannot reach the micro-nano arcsecond level.

[0009] Third, due to the large impact of environmental drift on the angular inspection device, traditional devices have the problem of lacking high measurement stability. Changes in environmental temperature can cause non-uniform changes in the volume of the workbench, resulting in the optical axes of the angular generating device and the angular measurement device not being on the same horizontal line, generating measurement errors. Factors such as environmental humidity and pressure can also cause instability of the angular measurement device and the drive device, also generating measurement errors and reducing the ultimate resolution of the angular inspection device. Therefore, it is difficult for traditional technologies to solve the problem of lacking high measurement stability.

[0010] Therefore, traditional angular inspection techniques not only cannot inspect three-dimensional angles but also have problems of not being able to achieve high angular resolution at the micro-nano arcsecond level within the traditional measurement range and lacking high measurement stability. Summary of the Invention

[0011] The object of the present invention is to address the problems of traditional angular inspection devices, namely, their inability to measure three-dimensional angles, their inability to achieve high angular resolution at the micro-nano arcsecond level within the traditional measurement range, and their lack of high measurement stability. The present invention proposes a high-stability three-dimensional angular inspection device and method based on active control compensation.

[0012] This method uses an angular generating device and a rotating table composed of three sets of drive devices to enable the workbench to rotate in three directions: roll, pitch, and yaw. Two orthogonally placed two-dimensional angular measurement devices are used to detect the angle of the workbench in real time, forming a closed-loop control to enable the workbench to generate standard three-dimensional angles. Through experimental verification, this method can inspect three-dimensional angles at the micro-nano arcsecond level and solve the problem that the angular inspection device cannot inspect three-dimensional angles.

[0013] This method uses a high-resolution micro-nano arcsecond-level autocollimator as the angular measurement device and piezoelectric ceramic drive to enable the workbench to generate angles and achieve high-precision closed-loop feedback control within the measurement range, thereby being able to generate standard micro-nano arcsecond-level angles. Experiments show that this method can achieve angular resolution at the micro-nano arcsecond level and solve the problem that the angular inspection instrument cannot achieve high angular resolution at the micro-nano arcsecond level within the traditional measurement range.

[0014] This method uses an environmental compensation module to detect the environmental drift amount in real time and perform high-precision closed-loop feedback compensation. At the same time, an invar metering frame is designed, and the autocollimator and the workbench are placed on the metering frame to reduce the uneven volume change of the workbench caused by temperature changes, which may lead to measurement errors of the autocollimator, thereby improving the measurement stability of the device, reducing the environmental drift amount, and solving the problem that the angle inspection device does not have high measurement stability due to environmental factors.

[0015] Therefore, compared with traditional angle inspection devices, this invention has the technical advantages of three-dimensional angle inspection ability, high angle resolution at the micro-nano arcsecond level, and high measurement stability under the condition of the same measurement range.

[0016] This invention is realized through the following technical solutions. A high-stability three-dimensional angle inspection device based on active control compensation is proposed, which includes a ribbed workbench, a workbench rotating shaft, a workbench support, a driving device, a base, a first plane mirror, a second plane mirror, a first autocollimator, a second autocollimator, a driving module circuit board, an environmental compensation module circuit board, a main control module circuit board, a display, an input module circuit board, a first temperature sensor, a second temperature sensor, a third temperature sensor, a humidity sensor, a pressure sensor, a metering frame, and a rotating table. The driving device consists of a first piezoelectric ceramic, a first lead screw motor, a second piezoelectric ceramic, and a second lead screw motor. The display and input module circuit board set the angle generation data and transfer it to the main control module circuit board. The main control module circuit board sends a driving signal to the driving module circuit board to control the driving of the first piezoelectric ceramic and the first lead screw motor to make the ribbed workbench generate a large-range and high-precision angle in the pitching direction; control the driving of the second piezoelectric ceramic and the second lead screw motor to make the ribbed workbench generate a large-range and high-precision angle in the rolling direction; control the driving of the rotating table to make the ribbed workbench generate an angle in the yaw direction. The first autocollimator and the second autocollimator measure the angles generated by the ribbed workbench and upload the measurement data to the main control module circuit board, and then upload it to the display and input module circuit board. At the same time, the main control module circuit board actively controls the driving device for three-dimensional angle compensation in real time according to the environmental data measured by the environmental compensation module circuit board.

[0017] The metering frame is placed on the base, the workbench support is placed on the metering frame, and the rotating table is placed on the ribbed workbench. The first piezoelectric ceramic, the first lead screw motor, the second piezoelectric ceramic, the second lead screw motor, the first autocollimator, and the second autocollimator are placed on the base. The first piezoelectric ceramic and the first lead screw motor constitute the first set of macro-micro combined driving devices. The first lead screw motor generates a large-range displacement for rough positioning, and the first piezoelectric ceramic generates a small displacement with high sensitivity for precise positioning. The second piezoelectric ceramic and the second lead screw motor constitute the second set of macro-micro combined driving devices.

[0018] The first autocollimator and the second autocollimator are high-resolution two-dimensional autocollimators. The first plane mirror is installed on the ribbed workbench, and its center coincides with the optical axis of the first autocollimator; the second plane mirror is orthogonally placed with the first plane mirror and installed on the rotary table, and its center coincides with the optical axis of the second autocollimator;

[0019] The first temperature sensor, the second temperature sensor, and the third temperature sensor are respectively installed in the first autocollimator, the ribbed workbench, and the second autocollimator, and the humidity sensor and the air pressure sensor are installed in the angle inspection device.

[0020] The present invention also proposes a high-stability three-dimensional angle inspection method based on active control compensation implemented on the above high-stability three-dimensional angle inspection device based on active control compensation, including the following steps:

[0021] Step a: The main control module circuit board uses the roll angle active control compensation algorithm to compensate the roll angle of the ribbed workbench according to the measured temperature values a, b, humidity value d, and air pressure value e of the first temperature sensor, the second temperature sensor, the humidity sensor, and the air pressure sensor in the environmental compensation module, where the compensation value Qc1 of the second lead screw motor = G1(a, b, d, e), and the piezoelectric ceramic compensation value Qc2 of the second lead screw motor = G2(a, b, d, e), and G1 and G2 respectively represent a function; send an instruction to the display and input module circuit board, so that the ribbed workbench is in the zero position in both the roll angle direction and the pitch angle direction, and the rotary table is in the zero position in the yaw angle direction. Place the instrument to be calibrated on the rotary table and zero the reading;

[0022] Step b: Send an instruction to the display and input module circuit board, the first piezoelectric ceramic and the first lead screw motor are stationary, and the second piezoelectric ceramic and the second lead screw motor drive the ribbed workbench to generate the standard angle required for the instrument to be calibrated in the roll angle direction. Record the roll angle reading of the system device as ɑ0, and at the same time record the roll angle display value of the instrument to be calibrated as ɑ. ɑ - ɑ0 is the roll angle indication error of the instrument to be calibrated at the inspection point.

[0023] Step c: Repeat step b to complete the indication error calibration of all inspection points of the instrument to be calibrated in the roll angle direction.

[0024] Step d: The main control module circuit board compensates the pitch angle of the ribbed workbench according to the measured temperature values b, c, humidity value d, and air pressure value e of the second temperature sensor, third temperature sensor, humidity sensor, and air pressure sensor in the environmental compensation module, using the pitch angle active control compensation algorithm. Among them, the first lead screw motor compensation value Qa1 = F1(b, c, d, e), and the first lead screw motor piezoelectric ceramic compensation value Qa2 = F2(b, c, d, e), where F1 and F2 respectively represent a function. Send an instruction to the display and input module circuit board to make the ribbed workbench and the rotary table return to zero in the roll angle direction, pitch angle direction, and yaw angle direction again, and zero the reading of the instrument to be calibrated.

[0025] Step e: At this time, send an instruction to the display and input module circuit board. The second piezoelectric ceramic and the second lead screw motor are stationary. The first piezoelectric ceramic and the first lead screw motor drive the ribbed workbench to generate the standard angle required for the instrument to be calibrated in the pitch angle direction. Record the pitch angle reading of the system device as β0, and at the same time record the pitch angle display value of the instrument to be calibrated as β. β - β0 is the pitch angle indication error of the instrument to be calibrated at the inspection point.

[0026] Step f: Repeat step e to complete the indication error calibration of all inspection points of the instrument to be calibrated in the pitch angle direction.

[0027] Step g: The main control module circuit board compensates the yaw angle of the rotary table according to the measured temperature values a, b, c, humidity value d, and air pressure value e of the first temperature sensor, second temperature sensor, third temperature sensor, humidity sensor, and air pressure sensor in the environmental compensation module, using the yaw angle active control compensation algorithm. Among them, the rotary table compensation value Qb = H(a, b, c, d, e), where H represents a function. Send an instruction to the display and input module circuit board to make the ribbed workbench and the rotary table return to zero in the roll angle direction, pitch angle direction, and yaw angle direction again, and zero the reading of the instrument to be calibrated.

[0028] Step h: At this time, send an instruction to the display and input module circuit board. The first piezoelectric ceramic, the first lead screw motor, the second piezoelectric ceramic, and the second lead screw motor are stationary. Drive the rotary table to generate the standard angle required for the instrument to be calibrated in the yaw angle direction. Record the yaw angle reading of the system device as γ0, and at the same time record the yaw angle display value of the instrument to be calibrated as γ. γ - γ0 is the yaw angle indication error of the instrument to be calibrated at the inspection point.

[0029] Step i: Repeat step h to complete the indication error calibration of all inspection points of the instrument to be calibrated in the yaw angle direction. Thus, the calibration of all three-dimensional angles of the instrument to be calibrated is completed.

[0030] The beneficial effects of the present invention are:

[0031] 1. Aiming at the problem that traditional small-angle inspection instruments cannot perform three-dimensional angle inspection, a three-dimensional angle inspection method with high stability at the micro-nano arc-minute level is proposed. This method uses three sets of driving devices to control the workbench equipped with a turntable to generate angular deflections in the pitch, roll, and yaw directions respectively; two sets of two-dimensional angle measurement devices distributed orthogonally monitor the angle of the workbench in real time and perform real-time closed-loop control according to the measured angles, so as to make the workbench generate standard three-dimensional angles; through experimental verification, the workbench can generate standard three-dimensional angular deflections, solving the problem that traditional small-angle inspection instruments cannot perform three-dimensional angle inspection.

[0032] 2. Aiming at the problem that traditional angle inspection devices cannot reach the micro-nano arc-minute level within the measurement range, a high-resolution micro-nano arc-minute level autocollimator is used as the angle measurement device and the method of piezoelectric ceramic drive is adopted. This method uses a micro-nano arc-minute level angle measurement device to detect the workbench in real time, enabling the workbench to achieve high-precision closed-loop feedback control of the angle within the measurement range; at the same time, piezoelectric ceramics are used for precise small-angle drive, enabling the workbench to generate standard micro-nano arc-minute level small angles, thereby improving the resolution of the angle inspection device and finally achieving high resolution at the micro-nano arc-minute level, solving the problem that the resolution of existing angle inspection devices cannot reach the micro-nano arc-minute level.

[0033] 3. Aiming at the problem that traditional angle inspection devices do not have high stability, a high-stability measurement method based on active control compensation and adding a metrology frame is adopted. This method uses five sensors to feedback environmental factors such as temperature, humidity, and pressure respectively, and uses the measured environmental drift amount to control the driving device to perform three-dimensional angle compensation on the ribbed workbench and the rotating table; at the same time, an invar metrology frame is built, and the autocollimator and the workbench are placed on the metrology frame to reduce the influence of temperature on the workbench and the autocollimator, thereby directly improving the stability of the angle inspection device and reducing the influence caused by environmental drift; solving the problem that the resolution of the angle inspection device is reduced due to environmental factors such as temperature, humidity, and pressure.

[0034] In addition, the present invention also has the following technical advantages:

[0035] First, there are three contact points between the three sets of driving devices, the workbench rotation shaft and the workbench, forming a stable plane, which improves the position repeatability of the workbench.

[0036] Second, a lead screw motor with a large stroke and low displacement resolution is combined with a piezoelectric ceramic with a small stroke and high displacement resolution. After the lead screw motor realizes rough positioning within a large stroke range, the piezoelectric ceramic makes precise compensation under the closed-loop feedback of the angle measurement device, enabling the driving device to achieve both a large stroke and high resolution at the same time. Brief Description of the Drawings

[0037] Figure 1 It is a schematic structural diagram of a traditional small-angle checker.

[0038] Figure 2a It is a schematic side view structure diagram of the first specific embodiment of the high-stability three-dimensional angle checker based on active control compensation of the present invention.

[0039] Figure 2b It is a schematic top view structure diagram of the first specific embodiment of the high-stability three-dimensional angle checker based on active control compensation of the present invention.

[0040] Figure 3a It is a schematic side view structure diagram of the second specific embodiment of the high-stability three-dimensional angle checker based on active control compensation of the present invention.

[0041] Figure 3b It is a schematic top view structure diagram of the second specific embodiment of the high-stability three-dimensional angle checker based on active control compensation of the present invention.

[0042] Figure 4a It is a schematic side view structure diagram of the third specific embodiment of the high-stability three-dimensional angle checker based on active control compensation of the present invention.

[0043] Figure 4b It is a schematic top view structure diagram of the third specific embodiment of the high-stability three-dimensional angle checker based on active control compensation of the present invention.

[0044] Figure 5a It is a schematic side view structure diagram of the fourth specific embodiment of the high-stability three-dimensional angle checker based on active control compensation of the present invention.

[0045] Figure 5b It is a schematic top view structure diagram of the fourth specific embodiment of the high-stability three-dimensional angle checker based on active control compensation of the present invention.

[0046] Figure 6 It is a layout diagram of the angle generating device of another configuration of the fourth specific embodiment.

[0047] Figure 7 It is a flow chart of the active control compensation algorithm.

[0048] Figure 8 It is a flow chart of the pitch angle compensation method for the ribbed workbench.

[0049] Figure 9 It is a flow chart of the roll angle compensation method for the ribbed workbench.

[0050] Figure 10 It is a flow chart of the yaw angle compensation method for the rotating table.

[0051] In the figure: 1 is a ribbed workbench, 2 is a workbench rotating shaft, 3 is a workbench support, 4 is a driving device, 41 is a first piezoelectric ceramic, 42 is a first lead screw motor, 43 is a second piezoelectric ceramic, 44 is a second lead screw motor, 5 is a first positioning indicator, 6 is a second positioning indicator, 7 is a base, 8 is a first plane mirror, 9 is a second plane mirror, 10 is a first autocollimator, 11 is a second autocollimator, 12 is a driving module circuit board, 13 is an environmental compensation module circuit board, 14 is a main control module circuit board, 15 is a display and input module circuit board, 16 is a first temperature sensor, 17 is a second temperature sensor, 18 is a third temperature sensor, 19 is a humidity sensor, 20 is a barometric pressure sensor, 21 is a metering frame, and 22 is a rotating table. Detailed implementation mode

[0052] The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention. Specific embodiment 1

[0054] This embodiment is an embodiment of a high-stability three-dimensional angle inspection device based on active control compensation.

[0055] The structural schematic diagram of the high-stability three-dimensional angle inspection device based on active control compensation in this embodiment is as shown in Figure 2a and Figure 2b shown. The angle measuring device includes 1 ribbed workbench, 2 workbench rotating shaft, 3 workbench support, 41 first piezoelectric ceramic, 42 first lead screw motor, 43 second piezoelectric ceramic, 44 second lead screw motor, 7 base, 8 first plane mirror, 9 second plane mirror, 10 first autocollimator, 11 second autocollimator, 12 driving module circuit board, 13 environmental compensation module circuit board, 14 main control module circuit board, 15 display and input module circuit board, 16 first temperature sensor, 17 second temperature sensor, 18 third temperature sensor, 19 humidity sensor, 20 barometric pressure sensor, 21 metering frame and 22 rotating table.

[0056] The set angle occurrence data of the display and input module circuit board 15 is transmitted to the main control module circuit board 14. The main control module circuit board 14 sends a driving signal to the driving module circuit board 12 to control the first piezoelectric ceramic 41 and the first lead screw motor 42, so that the ribbed workbench 1 generates a large-range and high-precision angle in the pitching direction; control the second piezoelectric ceramic 43 and the second lead screw motor 44, so that the ribbed workbench 1 generates a large-range and high-precision angle in the rolling direction; control the driving turntable 22 to make the ribbed workbench 1 generate an angle in the yaw direction. Thus, the ribbed workbench 1 can generate three-dimensional angles. The first autocollimator 10 and the second autocollimator 11 measure the angles generated by the ribbed workbench 1, and upload the measurement data to the main control module circuit board 14, and then upload it to the display and input module circuit board 15. At the same time, the main control module circuit board actively controls the driving device for three-dimensional angle compensation in real time according to the environmental data measured by the environmental compensation module circuit board.

[0057] The measuring frame 21 is placed on the base 7, the workbench support 3 is placed on the measuring frame 21, and the turntable 22 is placed on the ribbed workbench 1; the first piezoelectric ceramic 41, the first lead screw motor 42, the second piezoelectric ceramic 43, the second lead screw motor 44, the first autocollimator 10, and the second autocollimator 11 are placed on the base 7. The first piezoelectric ceramic 41 and the first lead screw motor 42 constitute the first set of macro-micro combined driving devices. The first lead screw motor 42 generates a large-range displacement for rough positioning, and the first piezoelectric ceramic 41 generates a small displacement with high sensitivity for precise positioning; the second piezoelectric ceramic 43 and the second lead screw motor 44 constitute the second set of macro-micro combined driving devices;

[0058] The first autocollimator 10 and the second autocollimator 11 are micro-nano arc-minute-level high-resolution two-dimensional autocollimators. The first plane mirror 8 is installed on the ribbed workbench 1, and its center coincides with the optical axis of the first autocollimator 10; the second plane mirror 9 is orthogonally placed with the first plane mirror 8 and installed on the turntable 22, and its center coincides with the optical axis of the second autocollimator 11;

[0059] The first temperature sensor 16, the second temperature sensor 17, and the third temperature sensor 18 are respectively installed in the first autocollimator 10, the ribbed workbench 1, and the second autocollimator 11. The humidity sensor 19 and the air pressure sensor 20 are installed in the angle inspection device.

[0060] The measurement principle is as follows:

[0061] When the ribbed workbench 1 undergoes angular changes in roll angle ɑ, pitch angle β, and yaw angle γ, the first plane mirror 8 undergoes an angular change in roll angle ɑ, and the second plane mirror 9 undergoes angular changes in pitch angle β and yaw angle γ. For the two measurement light beams incident on the first plane mirror 8 and the second plane mirror 9, due to the rotation of the first plane mirror 8 and the second plane mirror 9 with the measured object in roll angle, pitch angle, and yaw angle, the light beams reflected by the first plane mirror 8 and the second plane mirror 9 are deflected by angles of 2ɑ, 2β, and 2γ with respect to the original light beams.

[0062] The first autocollimator 10 and the second autocollimator 11 respectively measure the roll angle ɑ, pitch angle β, and yaw angle γ of the ribbed workbench 1, and upload the measured data to the main control module circuit board 14. The data is compared with the given data ɑ, β, γ. If the results are different, the main control module circuit board 14 issues a command to the drive module circuit board 12 to control the drive device 4 to make the ribbed workbench 1 have standard angular values of ɑ, β, γ.

[0063] The first temperature sensor 16, the second temperature sensor 17, and the third temperature sensor 18 respectively measure the temperature changes of the first autocollimator 10, the ribbed workbench 1, and the second autocollimator 11 in real time. The humidity sensor 19 and the air pressure sensor 20 measure the humidity and air pressure changes of the small angle inspection instrument in real time, and upload the data to the environmental compensation module circuit board 13. After data processing by the environmental compensation module circuit board 13, the compensation value is transmitted to the main control module circuit board 14, and the main control module circuit board 14 sends a command to the drive module circuit board 12 to control the ribbed workbench 1 to have standard angles of ɑ, β, γ.

[0064] Combined Figures 7 - 10 , the embodiment of the high-stability three-dimensional angle inspection method based on active control compensation in this embodiment includes the following steps:

[0065] Step a: The main control module circuit board, according to the measured temperature values a, b, humidity value d, and air pressure value e of the first temperature sensor, the second temperature sensor, the humidity sensor, and the air pressure sensor in the environmental compensation module, uses the roll angle active control compensation algorithm to compensate the roll angle of the ribbed workbench. Among them, the compensation value Qc1 of the second lead screw motor = G1(a, b, d, e), and the piezoelectric ceramic compensation value Qc2 of the second lead screw motor = G2(a, b, d, e), where G1 and G2 respectively represent a function; send an instruction to the display and input module circuit board 15, so that the ribbed workbench 1 is in the zero position in both the roll angle direction and the pitch angle direction, and the rotary table is in the zero position in the yaw angle direction. Place the instrument to be calibrated on the rotary table and zero the reading.

[0066] Step b: Send an instruction to the display and input module circuit board 15. The first piezoelectric ceramic 41 and the first lead screw motor 42 are stationary, and the second piezoelectric ceramic 43 and the second lead screw motor 44 drive the ribbed workbench 1 to generate the standard angle required for the instrument under test in the roll angle direction. Record the roll angle reading of the system device as ɑ0, and at the same time record the roll angle display value of the instrument under test as ɑ. ɑ - ɑ0 is the roll angle indication error of the instrument under test at the test point.

[0067] Step c: Repeat step b to complete the indication error verification of all test points of the instrument under test in the roll angle direction.

[0068] Step d: According to the measured temperature values b, c, humidity value d, and air pressure value e of the second temperature sensor, the third temperature sensor, the humidity sensor, and the air pressure sensor in the environmental compensation module, the main control module circuit board uses the pitch angle active control compensation algorithm to compensate the pitch angle of the ribbed workbench. Among them, the compensation value Qa1 of the first lead screw motor = F1(b, c, d, e), and the compensation value Qa2 of the piezoelectric ceramic of the first lead screw motor = F2(b, c, d, e), where F1 and F2 respectively represent a function. Send an instruction to the display and input module circuit board 15 to make the ribbed workbench 1 and the rotating table 22 return to the zero position again in the roll angle direction, pitch angle direction, and yaw angle direction, and zero the indication of the instrument under test.

[0069] Step e: Send an instruction to the display and input module circuit board 15. The second piezoelectric ceramic 43 and the second lead screw motor 44 are stationary, and the first piezoelectric ceramic 41 and the first lead screw motor 42 drive the ribbed workbench 1 to generate the standard angle required for the instrument under test in the pitch angle direction. Record the pitch angle reading of the system device as β0, and at the same time record the pitch angle display value of the instrument under test as β. β - β0 is the pitch angle indication error of the instrument under test at the test point.

[0070] Step f: Repeat step e to complete the indication error verification of all test points of the instrument under test in the pitch angle direction.

[0071] Step g: According to the measured temperature values a, b, c, humidity value d, and air pressure value e of the first temperature sensor, the second temperature sensor, the third temperature sensor, the humidity sensor, and the air pressure sensor in the environmental compensation module, the main control module circuit board uses the yaw angle active control compensation algorithm to compensate the yaw angle of the rotating table. Among them, the compensation value Qb of the rotating table = H(a, b, c, d, e), where H represents a function. Send an instruction to the display and input module circuit board 15 to make the ribbed workbench 1 and the rotating table 22 return to the zero position again in the roll angle direction, pitch angle direction, and yaw angle direction, and zero the indication of the instrument under test.

[0072] Step h: Send an instruction to the display and input module circuit board 15. The first piezoelectric ceramic 41, the first lead screw motor 42, the second piezoelectric ceramic 43, and the second lead screw motor 44 are all stationary. Drive the rotating table 22 to generate the standard angle required for the instrument under test in the yaw angle direction. Record the yaw angle reading of the system device as γ0, and at the same time record the yaw angle display value of the instrument under test as γ. γ - γ0 is the yaw angle indication error of the instrument under test at the test point.

[0073] Step i: Repeat step h to complete the indication error verification of all test points of the instrument under test in the yaw angle direction. Thus, the verification of all three-dimensional angles of the instrument under test is completed.

[0074] The innovation of the present invention lies in that the degree of freedom of the ribbed workbench 1 is improved by using the first piezoelectric ceramic 41, the first lead screw motor 42, the second piezoelectric ceramic 43, the second lead screw motor 44, and the rotating table 22, enabling it to generate angles in the pitch, yaw, and roll directions. At the same time, the two-dimensional angle measuring device, the first-dimensional autocollimator 10 and the second autocollimator 11 placed orthogonally, are used to measure the three-dimensional angles generated by the ribbed workbench 1, and closed-loop control is carried out to enable the angle checker to check the standard three-dimensional angles.

[0075] The present invention uses the first autocollimator 10 and the second autocollimator 11 with a micro-nano arc-minute level as the angle measuring device to detect the actual angle generation value of the ribbed workbench 1 in real time with high precision; uses the first temperature sensor 16, the second temperature sensor 17, the third temperature sensor 18, the humidity sensor 19, and the air pressure sensor 20 as the environmental feedback detection module to monitor the environmental drift amount in real time with high precision; uses the first piezoelectric ceramic 41 and the second piezoelectric ceramic 43 as the high-resolution feedback execution module to perform closed-loop feedback control according to the measured actual angle generation value and environmental drift amount, enabling the small angle checker to check the standard angles at the micro-nano arc-minute level, improving the high stability and ultimate resolution of the small angle checker; uses the invar measurement frame 21 to isolate the problem of uneven volume change on the surface of the underlying ribbed workbench 1 caused by temperature changes, ensuring the relative positions of the upper first autocollimator 10, the second autocollimator 11, the first plane mirror 8, and the second plane mirror 9 remain unchanged, further alleviating the problem of the device not having high stability caused by environmental temperature drift, and improving the stability of the small angle checker.

[0076] When the angle generation device of the present invention rotates separately in the roll angle direction and the pitch angle direction, only one set of macro-micro drive devices among the first piezoelectric ceramic 41, the first lead screw motor 42 or the second piezoelectric ceramic 43, the second lead screw motor 44 needs to move, ensuring the stability of the angle generation device.

[0077] Therefore, compared with traditional small-angle inspection devices, the present invention has the technical advantages of being able to measure three-dimensional angles at the micro-nano radian level and high measurement stability. Specific Embodiment Two

[0079] This embodiment is an embodiment of a high-stability three-dimensional angle inspection device based on active control compensation.

[0080] The structural schematic diagram of the high-stability three-dimensional angle inspection device based on active control compensation in this embodiment is as shown in Figure 3a and Figure 3b shown. On the basis of Specific Embodiment One, the centers of the first piezoelectric ceramic 41 and the first lead screw motor 42 in this embodiment are on the same straight line as the centers of the second piezoelectric ceramic 43 and the second lead screw motor 44, and the center of the workbench rotating shaft 2 is located on the perpendicular bisector of this straight line.

[0081] The embodiment of the high-stability three-dimensional angle inspection method based on active control compensation in this embodiment includes the following steps:

[0082] Step a: The main control module circuit board uses the roll angle active control compensation algorithm to compensate the roll angle of the ribbed workbench according to the measured temperature values a, b, humidity value d, and air pressure value e of the first temperature sensor, second temperature sensor, humidity sensor, and air pressure sensor in the environmental compensation module, where the compensation value Qc1 of the second lead screw motor = G1(a, b, d, e), and the compensation value Qc2 of the second lead screw motor piezoelectric ceramic = G2(a, b, d, e), and G1 and G2 respectively represent a function; send an instruction to the display and input module circuit board 15, so that the ribbed workbench 1 is in the zero position in both the roll angle direction and the pitch angle direction, and the turntable 22 is in the zero position in the yaw angle direction. Place the instrument to be calibrated on the turntable and zero the reading.

[0083] Step b: Send an instruction to the display and input module circuit board 15, so that the first piezoelectric ceramic 41, the first lead screw motor 42, the second piezoelectric ceramic 43, and the second lead screw motor 44 generate displacements with opposite directions and equal magnitudes, driving the ribbed workbench 1 to have the standard angle required for the instrument under test in the roll angle direction. Record the roll angle reading of the system device as ɑ0, and at the same time record the roll angle display value of the instrument under test as ɑ. ɑ - ɑ0 is the roll angle indication error of the instrument under test at the inspection point.

[0084] Step c: Repeat Step b to complete the indication error calibration of all inspection points of the instrument under test in the roll angle direction.

[0085] Step d: Based on the measured temperature values b, c, humidity value d, and air pressure value e of the second temperature sensor, third temperature sensor, humidity sensor, and air pressure sensor in the environmental compensation module, the main control module circuit board uses the pitch angle active control compensation algorithm to compensate the pitch angle of the ribbed workbench. Among them, the compensation value Qa1 of the first lead screw motor = F1(b, c, d, e), and the piezoelectric ceramic compensation value Qa2 of the first lead screw motor = F2(b, c, d, e), where F1 and F2 respectively represent a function. Send an instruction to the display and input module circuit board 15 to make the ribbed workbench 1 and the rotary table 22 return to the zero position again in the roll angle direction, pitch angle direction, and yaw angle direction, and zero the reading of the instrument to be calibrated.

[0086] Step e: Send an instruction to the display and input module circuit board 15. The first piezoelectric ceramic 41, the first lead screw motor 42, the second piezoelectric ceramic 43, and the second lead screw motor 44 have the same direction and equal magnitude of displacement, driving the ribbed workbench 1 to generate the standard angle required for the instrument to be calibrated in the pitch angle direction. Record the pitch angle reading of the system device as β0, and at the same time record the pitch angle display value of the instrument to be calibrated as β. β - β0 is the pitch angle indication error of the instrument to be calibrated at the inspection point.

[0087] Step f: Repeat step e to complete the indication error calibration of all inspection points of the instrument to be calibrated in the pitch angle direction.

[0088] Step g: Based on the measured temperature values a, b, c, humidity value d, and air pressure value e of the first temperature sensor, second temperature sensor, third temperature sensor, humidity sensor, and air pressure sensor in the environmental compensation module, the main control module circuit board uses the yaw angle active control compensation algorithm to compensate the yaw angle of the rotary table. Among them, the compensation value Qb of the rotary table = H(a, b, c, d, e), where H represents a function. Send an instruction to the display and input module circuit board 15 to make the ribbed workbench 1 and the rotary table 22 return to the zero position again in the roll angle direction, pitch angle direction, and yaw angle direction, and zero the reading of the instrument to be calibrated.

[0089] Step h: Send an instruction to the display and input module circuit board 15. The first piezoelectric ceramic 41, the first lead screw motor 42, the second piezoelectric ceramic 43, and the second lead screw motor 44 are stationary, driving the rotary table 22 to generate the standard angle required for the instrument to be calibrated in the yaw angle direction. Record the yaw angle reading of the system device as γ0, and at the same time record the yaw angle display value of the instrument to be calibrated as γ. γ - γ0 is the yaw angle indication error of the instrument to be calibrated at the inspection point.

[0090] Step i: Repeat step h to complete the indication error calibration of all inspection points of the instrument to be calibrated in the yaw angle direction. Thus, the calibration of all three-dimensional angles of the instrument to be calibrated is completed.

[0091] The innovation of the present invention lies in placing two sets of macro-micro drive devices, namely the first piezoelectric ceramic 41, the first lead screw motor 42, the second piezoelectric ceramic 43, and the second lead screw motor 44, on a straight line parallel to the normal line of the first plane mirror 8. When the ribbed workbench 1 rotates independently in the roll angle direction or the pitch angle direction, both sets of macro-micro drive devices need to act jointly and produce displacements of equal magnitude, which can effectively eliminate the common-mode components and differential-mode components of the two sets of drive devices. Specific Embodiment Three

[0093] This embodiment is an embodiment of a high-stability three-dimensional angle inspection device based on active control compensation.

[0094] For the high-stability three-dimensional angle inspection device based on active control compensation in this embodiment, the structural schematic diagram is as Figure 4a and Figure 4b shown. On the basis of Specific Embodiment One, the center of the workbench rotating shaft 2 in this embodiment is on the same straight line as the centers of the first piezoelectric ceramic 41 and the first lead screw motor 42, and the centers of the second piezoelectric ceramic 43 and the second lead screw motor 44 are located on the perpendicular bisector of this straight line.

[0095] The embodiment of the high-stability three-dimensional angle inspection method based on active control compensation in this embodiment includes the following steps:

[0096] Step a: The main control module circuit board, according to the measured temperature values a, b of the first temperature sensor, the second temperature sensor, the humidity sensor, and the air pressure sensor in the environmental compensation module, the humidity value d, and the air pressure value e, uses the roll angle active control compensation algorithm to compensate the roll angle of the ribbed workbench. Among them, the compensation value Qc1 of the second lead screw motor = G1(a, b, d, e), and the compensation value Qc2 of the piezoelectric ceramic of the second lead screw motor = G2(a, b, d, e), where G1 and G2 respectively represent a function; send an instruction to the display and input module circuit board 15, so that the ribbed workbench 1 is in the zero position in both the roll angle direction and the pitch angle direction, and the rotating table is in the zero position in the yaw angle direction. Place the instrument to be calibrated on the rotating table and zero the reading.

[0097] Step b: Send an instruction to the display and input module circuit board 15, keep the first piezoelectric ceramic 41 and the first lead screw motor 42 stationary, and drive the ribbed workbench 1 by the second piezoelectric ceramic 43 and the second lead screw motor 44 to rotate the standard angle required for the instrument to be calibrated in the roll angle direction. Record the roll angle reading of the system device as ɑ0, and at the same time record the roll angle display value of the instrument to be calibrated as ɑ. ɑ - ɑ0 is the roll angle indication error of the instrument to be calibrated at the inspection point.

[0098] Step c: Repeat Step b to complete the indication error calibration of all inspection points of the instrument to be calibrated in the roll angle direction.

[0099] Step d: Based on the measured temperature values b, c, humidity value d, and air pressure value e of the second temperature sensor, third temperature sensor, humidity sensor, and air pressure sensor in the environmental compensation module, the main control module circuit board compensates the pitch angle of the ribbed workbench using the pitch angle active control compensation algorithm. Among them, the first lead screw motor compensation value Qa1 = F1(b, c, d, e), and the first lead screw motor piezoelectric ceramic compensation value Qa2 = F2(b, c, d, e), where F1 and F2 respectively represent a function. Send an instruction to the display and input module circuit board 15 to make the ribbed workbench 1 and the rotary table 22 return to the zero position again in the roll angle direction, pitch angle direction, and yaw angle direction, and zero the reading of the instrument to be calibrated;

[0100] Step e: Send an instruction to the display and input module circuit board 15. The first piezoelectric ceramic 41 and the first lead screw motor 42 have the same displacement direction as the second piezoelectric ceramic 43 and the second lead screw motor 44, and the displacement magnitude of the first piezoelectric ceramic 41 and the first lead screw motor 42 is twice that of the second piezoelectric ceramic 43 and the second lead screw motor 44. Drive the ribbed workbench 1 to generate the standard angle required for the instrument to be calibrated in the pitch angle direction. Record the pitch angle reading of the system device as β0, and at the same time record the pitch angle display value of the instrument to be calibrated as β. β - β0 is the pitch angle indication error of the instrument to be calibrated at the inspection point;

[0101] Step f: Repeat step e to complete the indication error calibration of all inspection points of the instrument to be calibrated in the pitch angle direction;

[0102] Step g: Based on the measured temperature values a, b, c, humidity value d, and air pressure value e of the first temperature sensor, second temperature sensor, third temperature sensor, humidity sensor, and air pressure sensor in the environmental compensation module, the main control module circuit board compensates the yaw angle of the rotary table using the yaw angle active control compensation algorithm. Among them, the rotary table compensation value Qb = H(a, b, c, d, e), where H represents a function. Send an instruction to the display and input module circuit board 15 to make the ribbed workbench 1 and the rotary table 22 return to the zero position again in the roll angle direction, pitch angle direction, and yaw angle direction, and zero the reading of the instrument to be calibrated;

[0103] Step h: Send an instruction to the display and input module circuit board 15. The first piezoelectric ceramic 41, the first lead screw motor 42, the second piezoelectric ceramic 43, and the second lead screw motor 44 are all stationary. Drive the rotary table 22 to generate the standard angle required for the instrument to be calibrated in the yaw angle direction. Record the yaw angle reading of the system device as γ0, and at the same time record the yaw angle display value of the instrument to be calibrated as γ. γ - γ0 is the yaw angle indication error of the instrument to be calibrated at the inspection point;

[0104] Step i. Repeat step h to complete the indication error verification of all the inspected points of the instrument to be verified in the yaw angle direction. Thus, the verification of all three-dimensional angles of the instrument to be verified is completed.

[0105] The innovation of the present invention lies in placing the second piezoelectric ceramic 43 and the second lead screw motor 44 on the perpendicular bisector of the first piezoelectric ceramic 41, the first lead screw motor 42 and the workbench rotating shaft 2. When the second piezoelectric ceramic 43 and the second lead screw motor 44 drive the ribbed workbench 1 to rotate in the roll angle direction, the stability of the angle generating device can be improved. Specific Embodiment 4

[0107] This embodiment is an embodiment of a high-stability three-dimensional angle inspection device based on active control compensation.

[0108] For the high-stability three-dimensional angle inspection device based on active control compensation in this embodiment, the structural schematic diagram is as shown in Figure 5a and Figure 5b shown. On the basis of Specific Embodiment 1, in this embodiment, the centers of the first piezoelectric ceramic 41 and the first lead screw motor 42 are on the same straight line as the center of the workbench rotating shaft 2, and are on another straight line with the centers of the second piezoelectric ceramic 43 and the second lead screw motor 44, and the two straight lines are vertically distributed;

[0109] or

[0110] the centers of the second piezoelectric ceramic 43 and the second lead screw motor 44 are on the same straight line as the center of the workbench rotating shaft 2, and are on another straight line with the centers of the first piezoelectric ceramic 41 and the first lead screw motor 42, and the two straight lines are vertically distributed, as shown in Figure 6 shown.

[0111] The embodiment of the high-stability three-dimensional angle inspection method based on active control compensation in this embodiment includes the following steps:

[0112] Step a. The main control module circuit board uses the roll angle active control compensation algorithm to compensate the roll angle of the ribbed workbench according to the measured temperature values a, b, the humidity value d, and the air pressure value e of the first temperature sensor, the second temperature sensor, the humidity sensor, and the air pressure sensor in the environmental compensation module. Among them, the compensation value Qc1 of the second lead screw motor = G1(a, b, d, e), and the compensation value Qc2 of the second lead screw motor piezoelectric ceramic = G2(a, b, d, e), where G1 and G2 respectively represent a function; send an instruction to the display and input module circuit board 15, so that the ribbed workbench 1 is in the zero position in both the roll angle direction and the pitch angle direction, and the rotating table is in the zero position in the yaw angle direction. Place the instrument to be verified on the rotating table and zero the indication;

[0113] Step b: Send an instruction to the display and input module circuit board 15. The first piezoelectric ceramic 41 and the first lead screw motor 42 are stationary. The second piezoelectric ceramic 43 and the second lead screw motor 44 drive the ribbed workbench 1 to rotate in the roll angle direction by the standard angle required for the instrument under test. Record the roll angle reading of the system device as ɑ0. At the same time, record the roll angle display value of the instrument under test as ɑ. ɑ - ɑ0 is the roll angle indication error of the instrument under test at the test point.

[0114] Or

[0115] Send an instruction to the display and input module circuit board 15. The first piezoelectric ceramic 41 and the first lead screw motor 42 and the second piezoelectric ceramic 43 and the second lead screw motor 44 generate displacements with the same direction and equal magnitude, driving the ribbed workbench 1 to rotate in the roll angle direction by the standard angle required for the instrument under test. Record the roll angle reading of the system device as ɑ0. At the same time, record the roll angle display value of the instrument under test as ɑ. ɑ - ɑ0 is the roll angle indication error of the instrument under test at the test point.

[0116] Step c: Repeat step b to complete the indication error verification of all test points of the instrument under test in the roll angle direction.

[0117] Step d: According to the measured temperature values b, c, humidity value d, and air pressure value e of the second temperature sensor, the third temperature sensor, the humidity sensor, and the air pressure sensor in the environmental compensation module, the main control module circuit board uses the pitch angle active control compensation algorithm to compensate the pitch angle of the ribbed workbench. Among them, the compensation value Qa1 of the first lead screw motor = F1(b, c, d, e), and the compensation value Qa2 of the piezoelectric ceramic of the first lead screw motor = F2(b, c, d, e). F1 and F2 respectively represent a function. Send an instruction to the display and input module circuit board 15 to make the ribbed workbench 1 and the rotating table 22 return to the zero position again in the roll angle direction, pitch angle direction, and yaw angle direction, and zero the indication of the instrument under test.

[0118] Step e: Send an instruction to the display and input module circuit board 15. The first piezoelectric ceramic 41 and the first lead screw motor 42 and the second piezoelectric ceramic 43 and the second lead screw motor 44 generate displacements with the same direction and equal magnitude, driving the ribbed workbench 1 to rotate in the pitch angle direction by the standard angle required for the instrument under test. Record the pitch angle reading of the system device as β0. At the same time, record the pitch angle display value of the instrument under test as β. β - β0 is the pitch angle indication error of the instrument under test at the test point.

[0119] Or

[0120] Send an instruction to the display and input module circuit board 15. The second piezoelectric ceramic 43 and the second lead screw motor 44 are stationary. The first piezoelectric ceramic 41 and the first lead screw motor 42 drive the ribbed workbench 1 to generate the standard angle required for the instrument under test in the pitch angle direction. Record the roll angle reading of the system device as β0, and at the same time record the roll angle display value of the instrument under test as β. β - β0 is the roll angle indication error of the instrument under test at the test point.

[0121] Step f: Repeat step e to complete the indication error verification of all test points of the instrument under test in the pitch angle direction.

[0122] Step g: The main control module circuit board uses the measured temperature values a, b, c of the first temperature sensor, the second temperature sensor, the third temperature sensor, the humidity sensor, and the air pressure sensor in the environmental compensation module, the humidity value d, and the air pressure value e, and uses the yaw angle active control compensation algorithm to compensate the yaw angle of the rotary table. Among them, the rotary table compensation value Qb = H(a, b, c, d, e), where H represents a function. Send an instruction to the display and input module circuit board 15 to make the ribbed workbench 1 and the rotary table 22 return to the zero position again in the roll angle direction, the pitch angle direction, and the yaw angle direction, and zero the indication of the instrument under test.

[0123] Step h: Send an instruction to the display and input module circuit board 15. The first piezoelectric ceramic 41, the first lead screw motor 42, the second piezoelectric ceramic 43, and the second lead screw motor 44 are all stationary. Drive the rotary table 22 to generate the standard angle required for the instrument under test in the yaw angle direction. Record the yaw angle reading of the system device as γ0, and at the same time record the yaw angle display value of the instrument under test as γ. γ - γ0 is the yaw angle indication error of the instrument under test at the test point.

[0124] Step i: Repeat step h to complete the indication error verification of all test points of the instrument under test in the yaw angle direction. Thus, the verification of all three-dimensional angles of the instrument under test is completed.

[0125] The innovation of the present invention lies in placing two sets of macro-micro drive devices, namely the first piezoelectric ceramic 41, the first lead screw motor 42 and the second piezoelectric ceramic 43, the second lead screw motor 44, on a straight line parallel to the normal line of the first plane mirror 8.

[0126] Or

[0127] Place two sets of macro-micro drive devices, namely the first piezoelectric ceramic 41, the first lead screw motor 42 and the second piezoelectric ceramic 43, the second lead screw motor 44, on a straight line perpendicular to the normal line of the first plane mirror 8.

[0128] When the ribbed workbench 1 driven by the belt rotates independently in the roll angle direction or the pitch angle direction, two sets of macro-micro drive devices need to act jointly and have equal displacements, which can effectively eliminate the common-mode components of the two sets of drive devices.

[0129] The above has introduced in detail the high-stability three-dimensional angle inspection device and method based on active control compensation proposed by the present invention. Specific examples are used in this article to elaborate on the principle and implementation manner of the present invention. The description of the above embodiments is only used to help understand the method and its core idea of the present invention; at the same time, for those of ordinary skill in the art, according to the idea of the present invention, there will be changes in the specific implementation manner and application scope. In summary, the content of this specification should not be construed as a limitation to the present invention.

Claims

1. A high-stability three-dimensional angle inspection device based on active control compensation, characterized in that It includes a ribbed workbench (1), a workbench rotating shaft (2), a workbench support (3), a driving device (4), a base (7), a first plane mirror (8), a second plane mirror (9), a first autocollimator (10), a second autocollimator (11), a driving module circuit board (12), an environmental compensation module circuit board (13), a main control module circuit board (14), a display and input module circuit board (15), a first temperature sensor (16), a second temperature sensor (17), a third temperature sensor (18), a humidity sensor (19), a barometric pressure sensor (20), a metering frame (21) and a rotary table (22); the driving device (4) is composed of a first piezoelectric ceramic (41), a first lead screw motor (42), a second piezoelectric ceramic (43) and a second lead screw motor (44); the display and input module circuit board (15) sets the angle generation data and transfers it to the main control module circuit board (14), and the main control module circuit board (14) sends a driving signal to the driving module circuit board (12) to control the first piezoelectric ceramic (41) and the first lead screw motor (42) to make the ribbed workbench (1) generate a large-range and high-precision angle in the pitching direction; control the second piezoelectric ceramic (43) and the second lead screw motor (44) to make the ribbed workbench (1) generate a large-range and high-precision angle in the rolling direction; control the driving rotary table (22) to make the ribbed workbench (1) generate an angle in the yaw direction; thus, the ribbed workbench (1) can generate three-dimensional angles; the first autocollimator (10) and the second autocollimator (11) measure the angles generated by the ribbed workbench (1) and upload the measurement data to the main control module circuit board (14), and then upload it to the display and input module circuit board (15); at the same time, the main control module circuit board (14) actively controls the driving device (4) to perform three-dimensional angle compensation in real time according to the environmental data measured by the environmental compensation module circuit board (13). The metering frame (21) is placed on the base (7), the workbench support (3) is placed on the metering frame (21), and the rotary table (22) is placed on the ribbed workbench (1); the first piezoelectric ceramic (41), the first lead screw motor (42), the second piezoelectric ceramic (43), the second lead screw motor (44), the first autocollimator (10) and the second autocollimator (11) are placed on the base (7); the first piezoelectric ceramic (41) and the first lead screw motor (42) constitute a first set of macro-micro combined driving devices, the first lead screw motor (42) generates a large-range displacement for rough positioning, and the first piezoelectric ceramic (41) generates a small displacement with high sensitivity for precise positioning; the second piezoelectric ceramic (43) and the second lead screw motor (44) constitute a second set of macro-micro combined driving devices. The first autocollimator (10) and the second autocollimator (11) are micro-nano arc-minute level high-resolution two-dimensional autocollimators; the first plane mirror (8) is installed on the ribbed workbench (1), and its center coincides with the optical axis of the first autocollimator (10). The second planar mirror (9) is placed orthogonally to the first planar mirror (8) and installed on the rotary table (22), and its center coincides with the optical axis of the second autocollimator (11); The first temperature sensor (16), the second temperature sensor (17), and the third temperature sensor (18) are respectively installed in the first autocollimator (10), the ribbed workbench (1), and the second autocollimator (11), and the humidity sensor (19) and the air pressure sensor (20) are installed in the angle inspection device.

2. The high-stability three-dimensional angle inspection device based on active control compensation according to claim 1, characterized in that The centers of the first piezoelectric ceramic (41) and the first lead screw motor (42) are on the same straight line as the centers of the second piezoelectric ceramic (43) and the second lead screw motor (44), and the center of the workbench rotating shaft (2) is located on the perpendicular bisector of this straight line.

3. The high-stability three-dimensional angle inspection device based on active control compensation according to claim 1, characterized in that The center of the workbench rotating shaft (2) is on the same straight line as the centers of the first piezoelectric ceramic (41) and the first lead screw motor (42), and the centers of the second piezoelectric ceramic (43) and the second lead screw motor (44) are located on the perpendicular bisector of this straight line.

4. The high-stability three-dimensional angle inspection device based on active control compensation according to claim 1, characterized in that The centers of the first piezoelectric ceramic (41) and the first lead screw motor (42) are on the same straight line as the center of the workbench rotating shaft (2), and are on another straight line with the centers of the second piezoelectric ceramic (43) and the second lead screw motor (44), and the two straight lines are perpendicularly distributed; Or The centers of the second piezoelectric ceramic (43) and the second lead screw motor (44) are on the same straight line as the center of the workbench rotating shaft (2), and are on another straight line with the centers of the first piezoelectric ceramic (41) and the first lead screw motor (42), and the two straight lines are perpendicularly distributed.

5. A high-stability three-dimensional angle inspection method based on active control compensation implemented on the high-stability three-dimensional angle inspection device based on active control compensation according to claim 1, characterized in that It includes the following steps: Step a: The main control module circuit board (14) uses the measured temperature values a, b, humidity value d, and air pressure value e of the first temperature sensor (16), the second temperature sensor (17), the humidity sensor (18), and the air pressure sensor (20) in the environmental compensation module, and uses the roll angle active control compensation algorithm to compensate the roll angle of the ribbed workbench (1). Among them, the compensation value Qc1 of the second lead screw motor = G1(a, b, d, e), and the compensation value Qc2 of the second lead screw motor piezoelectric ceramic = G2(a, b, d, e), where G1 and G2 respectively represent a function; send an instruction to the display and input module circuit board (15). The ribbed workbench (1) is in the zero position in both the roll angle direction and the pitch angle direction, and the rotary table is in the zero position in the yaw angle direction. Place the instrument to be calibrated on the rotary table and zero the reading; Step b: Send an instruction to the display and input module circuit board (15). The first piezoelectric ceramic (41) and the first lead screw motor (42) are stationary, and the second piezoelectric ceramic (43) and the second lead screw motor (44) drive the ribbed workbench (1) to generate the standard angle required for the instrument to be calibrated in the roll angle direction. Record the roll angle reading of the system device as ɑ0, and at the same time record the roll angle display value of the instrument to be calibrated as ɑ. ɑ - ɑ0 is the roll angle indication error of the instrument to be calibrated at the inspection point; Step c: Repeat step b to complete the indication error calibration of all inspection points of the instrument to be calibrated in the roll angle direction. Step d: The main control module circuit board (14) compensates the pitch angle of the ribbed workbench (1) using the pitch angle active control compensation algorithm according to the measured temperature values b, c, humidity value d, and air pressure value e of the second temperature sensor (17), third temperature sensor (18), humidity sensor (19), and air pressure sensor (20) in the environmental compensation module. Among them, the first lead screw motor compensation value Qa1 = F1(b, c, d, e), and the first lead screw motor piezoelectric ceramic compensation value Qa2 = F2(b, c, d, e), where F1 and F2 respectively represent a function; send an instruction to the display and input module circuit board (15) to make the ribbed workbench (1) and the rotary table (22) return to the zero position again in the roll angle direction, pitch angle direction, and yaw angle direction, and zero the reading of the instrument to be calibrated; Step e: Send an instruction to the display and input module circuit board (15). The second piezoelectric ceramic (43) and the second lead screw motor (44) are stationary. The first piezoelectric ceramic (41) and the first lead screw motor (42) drive the ribbed workbench (1) to generate the standard angle required for the instrument to be calibrated in the pitch angle direction. Record the pitch angle reading of the system device as β0, and at the same time record the pitch angle display value of the instrument to be calibrated as β. β - β0 is the pitch angle indication error of the instrument to be calibrated at the inspection point; Step f: Repeat step e to complete the indication error calibration of all inspection points of the instrument to be calibrated in the pitch angle direction; Step g: The main control module circuit board (14) compensates the yaw angle of the rotary table (22) using the yaw angle active control compensation algorithm according to the measured temperature values a, b, c, humidity value d, and air pressure value e of the first temperature sensor (16), second temperature sensor (17), third temperature sensor (18), humidity sensor (19), and air pressure sensor (20) in the environmental compensation module. Among them, the rotary table compensation value Qb = H(a, b, c, d, e), where H represents a function; send an instruction to the display and input module circuit board (15) to make the ribbed workbench (1) and the rotary table (22) return to the zero position again in the roll angle direction, pitch angle direction, and yaw angle direction, and zero the reading of the instrument to be calibrated; Step h: Send an instruction to the display and input module circuit board (15). The first piezoelectric ceramic (41), the first lead screw motor (42), the second piezoelectric ceramic (43), and the second lead screw motor (44) are all stationary. Drive the rotary table (22) to generate the standard angle required for the instrument to be calibrated in the yaw angle direction. Record the yaw angle reading of the system device as γ0, and at the same time record the yaw angle display value of the instrument to be calibrated as γ. γ - γ0 is the yaw angle indication error of the instrument to be calibrated at the inspection point; Step i: Repeat step h to complete the indication error calibration of all inspection points of the instrument to be calibrated in the yaw angle direction. Thus, the calibration of all three-dimensional angles of the instrument to be calibrated is completed.

6. A high-stability three-dimensional angle inspection method based on active control compensation implemented on the high-stability three-dimensional angle inspection device based on active control compensation according to claim 2, characterized in that It includes the following steps: Step a: The main control module circuit board (14) compensates the roll angle of the ribbed workbench (1) according to the measured temperature values a, b, humidity value d, and air pressure value e of the first temperature sensor (16), second temperature sensor (17), humidity sensor (18), and air pressure sensor (20) in the environmental compensation module, using the active control compensation algorithm for roll angle. Among them, the compensation value Qc1 of the second lead screw motor = G1(a, b, d, e), and the compensation value Qc2 of the piezoelectric ceramic of the second lead screw motor = G2(a, b, d, e), where G1 and G2 respectively represent a function; send an instruction to the display and input module circuit board (15), so that the ribbed workbench (1) is in the zero position in both the roll angle direction and the pitch angle direction, and the turntable (22) is in the zero position in the yaw angle direction. Place the instrument to be calibrated on the turntable and zero the reading; Step b: Send an instruction to the display and input module circuit board (15), so that the first piezoelectric ceramic (41), the first lead screw motor (42), the second piezoelectric ceramic (43), and the second lead screw motor (44) have displacements with opposite directions and equal magnitudes, driving the ribbed workbench (1) to have the standard angle required for the instrument under test in the roll angle direction. Record the roll angle reading of the system device as ɑ0, and at the same time record the roll angle display value of the instrument under test as ɑ. ɑ - ɑ0 is the roll angle indication error of the instrument under test at the test point; Step c: Repeat step b to complete the indication error calibration of all test points of the instrument under test in the roll angle direction; Step d: The main control module circuit board (14) compensates the pitch angle of the ribbed workbench (1) according to the measured temperature values b, c, humidity value d, and air pressure value e of the second temperature sensor (17), third temperature sensor (18), humidity sensor (19), and air pressure sensor (20) in the environmental compensation module, using the active control compensation algorithm for pitch angle. Among them, the compensation value Qa1 of the first lead screw motor = F1(b, c, d, e), and the compensation value Qa2 of the piezoelectric ceramic of the first lead screw motor = F2(b, c, d, e), where F1 and F2 respectively represent a function; send an instruction to the display and input module circuit board (15) to make the ribbed workbench (1) and the turntable (22) be in the zero position again in the roll angle direction, pitch angle direction, and yaw angle direction, and zero the reading of the instrument under test; Step e: Send an instruction to the display and input module circuit board (15), so that the first piezoelectric ceramic (41), the first lead screw motor (42), the second piezoelectric ceramic (43), and the second lead screw motor (44) have displacements with the same direction and equal magnitudes, driving the ribbed workbench (1) to have the standard angle required for the instrument under test in the pitch angle direction. Record the pitch angle reading of the system device as β0, and at the same time record the pitch angle display value of the instrument under test as β. β - β0 is the pitch angle indication error of the instrument under test at the test point; Step f: Repeat step e to complete the indication error calibration of all test points of the instrument under test in the pitch angle direction; Step g: The main control module circuit board (14) compensates the yaw angle of the rotating table (22) according to the measured temperature values a, b, c, humidity value d, and air pressure value e of the first temperature sensor (16), second temperature sensor (17), third temperature sensor (18), humidity sensor (19), and air pressure sensor (20) in the environmental compensation module by using the active yaw angle control compensation algorithm. The yaw angle compensation value Qb of the rotating table is H(a, b, c, d, e), where H represents a function. Send an instruction to the display and input module circuit board (15) to make the ribbed workbench (1) and the rotating table (22) return to the zero position again in the roll angle direction, pitch angle direction, and yaw angle direction, and zero the reading of the instrument to be calibrated. Step h: Send an instruction to the display and input module circuit board (15) to make the first piezoelectric ceramic (41), first lead screw motor (42), second piezoelectric ceramic (43), and second lead screw motor (44) stationary, and drive the rotating table (22) to rotate by the standard angle required for the instrument to be calibrated in the yaw angle direction. Record the yaw angle reading of the system device as γ0, and at the same time record the yaw angle display value of the instrument to be calibrated as γ. γ - γ0 is the yaw angle indication error of the instrument to be calibrated at the inspection point. Step i: Repeat step h to complete the indication error calibration of all inspection points of the instrument to be calibrated in the yaw angle direction. Thus, the calibration of all three-dimensional angles of the instrument to be calibrated is completed.

7. A high-stability three-dimensional angle inspection method based on active control compensation implemented on the high-stability three-dimensional angle inspection device described in claim 3, characterized in that, It includes the following steps: Step a: The main control module circuit board (14) compensates the roll angle of the ribbed workbench (1) according to the measured temperature values a, b, humidity value d, and air pressure value e of the first temperature sensor (16), second temperature sensor (17), humidity sensor (18), and air pressure sensor (20) in the environmental compensation module by using the active roll angle control compensation algorithm. The compensation value Qc1 of the second lead screw motor is G1(a, b, d, e), and the compensation value Qc2 of the second lead screw motor piezoelectric ceramic is G2(a, b, d, e), where G1 and G2 respectively represent a function. Send an instruction to the display and input module circuit board (15) to make the ribbed workbench (1) at the zero position in both the roll angle direction and the pitch angle direction, and the rotating table (22) at the zero position in the yaw angle direction. Place the instrument to be calibrated on the rotating table and zero the reading. Step b: Send an instruction to the display and input module circuit board (15) to make the first piezoelectric ceramic (41) and first lead screw motor (42) stationary, and the second piezoelectric ceramic (43) and second lead screw motor (44) drive the ribbed workbench (1) to rotate by the standard angle required for the instrument to be calibrated in the roll angle direction. Record the roll angle reading of the system device as ɑ0, and at the same time record the roll angle display value of the instrument to be calibrated as ɑ. ɑ - ɑ0 is the roll angle indication error of the instrument to be calibrated at the inspection point. Step c: Repeat step b to complete the indication error calibration of all inspection points of the instrument to be calibrated in the roll angle direction. Step d: The main control module circuit board (14) uses the pitch angle active control compensation algorithm to compensate the pitch angle of the ribbed workbench (1) according to the measured temperature values b, c, humidity value d, and air pressure value e of the second temperature sensor (17), third temperature sensor (18), humidity sensor (19), and air pressure sensor (20) in the environmental compensation module. Among them, the first lead screw motor compensation value Qa1 = F1(b, c, d, e), and the first lead screw motor piezoelectric ceramic compensation value Qa2 = F2(b, c, d, e), where F1 and F2 respectively represent a function. Send an instruction to the display and input module circuit board (15) to make the ribbed workbench (1) and the rotary table (22) return to the zero position again in the roll angle direction, pitch angle direction, and yaw angle direction, and zero the reading of the instrument to be calibrated. Step e: Send an instruction to the display and input module circuit board (15). The first piezoelectric ceramic (41) and the first lead screw motor (42) and the second piezoelectric ceramic (43) and the second lead screw motor (44) have displacements in the same direction, and the displacement magnitude of the first piezoelectric ceramic (41) and the first lead screw motor (42) is twice that of the second piezoelectric ceramic (43) and the second lead screw motor (44). Drive the ribbed workbench (1) to generate the standard angle required for the instrument to be calibrated in the pitch angle direction. Record the pitch angle reading of the system device as β0, and at the same time record the pitch angle display value of the instrument to be calibrated as β. β - β0 is the pitch angle indication error of the instrument to be calibrated at the inspection point. Step f: Repeat Step e to complete the indication error calibration of all inspection points of the instrument to be calibrated in the pitch angle direction. Step g: The main control module circuit board (14) uses the yaw angle active control compensation algorithm to compensate the yaw angle of the rotary table (22) according to the measured temperature values a, b, c, humidity value d, and air pressure value e of the first temperature sensor (16), second temperature sensor (17), third temperature sensor (18), humidity sensor (19), and air pressure sensor (20) in the environmental compensation module. Among them, the rotary table compensation value Qb = H(a, b, c, d, e), where H represents a function. Send an instruction to the display and input module circuit board (15) to make the ribbed workbench (1) and the rotary table (22) return to the zero position again in the roll angle direction, pitch angle direction, and yaw angle direction, and zero the reading of the instrument to be calibrated. Step h: Send an instruction to the display and input module circuit board (15). The first piezoelectric ceramic (41), the first lead screw motor (42), the second piezoelectric ceramic (43), and the second lead screw motor (44) are stationary. Drive the rotary table (22) to generate the standard angle required for the instrument to be calibrated in the yaw angle direction. Record the yaw angle reading of the system device as γ0, and at the same time record the yaw angle display value of the instrument to be calibrated as γ. γ - γ0 is the yaw angle indication error of the instrument to be calibrated at the inspection point.

8. A high-stability three-dimensional angle inspection method based on active control compensation implemented on the high-stability three-dimensional angle inspection device described in claim 4, characterized in that, It includes the following steps: Step a: The main control module circuit board (14) compensates the roll angle of the ribbed workbench (1) by using the active roll angle control compensation algorithm according to the measured temperature values a, b of the first temperature sensor (16), the second temperature sensor (17), the humidity sensor (18), and the pressure sensor (20) in the environmental compensation module, the humidity value d, and the pressure value e. Among them, the compensation value Qc1 of the second lead screw motor = G1(a, b, d, e), and the compensation value Qc2 of the second lead screw motor piezoelectric ceramic = G2(a, b, d, e), where G1 and G2 respectively represent a function; send an instruction to the display and input module circuit board (15), so that the ribbed workbench (1) is in the zero position in both the roll angle direction and the pitch angle direction, and the rotary table (22) is in the zero position in the yaw angle direction. Place the instrument to be calibrated on the rotary table and zero the reading; Step b: Send an instruction to the display and input module circuit board (15), the first piezoelectric ceramic (41) and the first lead screw motor (42) are stationary, and the second piezoelectric ceramic (43) and the second lead screw motor (44) drive the ribbed workbench (1) to generate the standard angle required for the instrument under test in the roll angle direction. Record the roll angle reading of the system device as ɑ0, and at the same time record the roll angle display value of the instrument under test as ɑ. ɑ - ɑ0 is the roll angle indication error of the instrument under test at the test point; Or Send an instruction to the display and input module circuit board (15), the first piezoelectric ceramic (41), the first lead screw motor (42), the second piezoelectric ceramic (43), and the second lead screw motor (44) generate displacements with the same direction and equal magnitude, drive the ribbed workbench (1) to generate the standard angle required for the instrument under test in the roll angle direction. Record the roll angle reading of the system device as ɑ0, and at the same time record the roll angle display value of the instrument under test as ɑ. ɑ - ɑ0 is the roll angle indication error of the instrument under test at the test point; Step c: Repeat step b to complete the indication error calibration of all test points of the instrument under test in the roll angle direction; Step d: The main control module circuit board (14) compensates the pitch angle of the ribbed workbench (1) by using the active pitch angle control compensation algorithm according to the measured temperature values b, c of the second temperature sensor (17), the third temperature sensor (18), the humidity sensor (19), and the pressure sensor (20) in the environmental compensation module, the humidity value d, and the pressure value e. Among them, the compensation value Qa1 of the first lead screw motor = F1(b, c, d, e), and the compensation value Qa2 of the first lead screw motor piezoelectric ceramic = F2(b, c, d, e), where F1 and F2 respectively represent a function; send an instruction to the display and input module circuit board (15) to make the ribbed workbench (1) and the rotary table (22) be in the zero position again in the roll angle direction, the pitch angle direction, and the yaw angle direction, and zero the reading of the instrument under test; Step e: Send an instruction to the display and input module circuit board (15). The first piezoelectric ceramic (41) and the first lead screw motor (42), and the second piezoelectric ceramic (43) and the second lead screw motor (44) generate displacements with the same direction and equal magnitude, driving the ribbed workbench (1) to have the standard angle required for the instrument under test in the pitch angle direction. Record the pitch angle reading of the system device as β0, and at the same time record the pitch angle display value of the instrument under test as β. β - β0 is the pitch angle indication error of the instrument under test at the test point. Or Send an instruction to the display and input module circuit board (15). The second piezoelectric ceramic (43) and the second lead screw motor (44) are stationary, and the first piezoelectric ceramic (41) and the first lead screw motor (42) drive the ribbed workbench (1) to have the standard angle required for the instrument under test in the pitch angle direction. Record the roll angle reading of the system device as β0, and at the same time record the roll angle display value of the instrument under test as β. β - β0 is the roll angle indication error of the instrument under test at the test point. Step f: Repeat step e to complete the indication error verification of all test points of the instrument under test in the pitch angle direction. Step g: The main control module circuit board (14) uses the measured temperature values a, b, c of the first temperature sensor (16), the second temperature sensor (17), the third temperature sensor (18), the humidity value d, and the air pressure value e of the humidity sensor (19) and the air pressure sensor (20) in the environmental compensation module, and uses the yaw angle active control compensation algorithm to compensate the yaw angle of the rotating table (22). Among them, the rotating table compensation value Qb = H(a, b, c, d, e), and H represents a function. Send an instruction to the display and input module circuit board (15) to make the ribbed workbench (1) and the rotating table (22) return to the zero position again in the roll angle direction, pitch angle direction, and yaw angle direction, and zero the indication of the instrument under test. Step h: Send an instruction to the display and input module circuit board (15). The first piezoelectric ceramic (41), the first lead screw motor (42), the second piezoelectric ceramic (43), and the second lead screw motor (44) are stationary, and drive the rotating table (22) to have the standard angle required for the instrument under test in the yaw angle direction. Record the yaw angle reading of the system device as γ0, and at the same time record the yaw angle display value of the instrument under test as γ. γ - γ0 is the yaw angle indication error of the instrument under test at the test point.

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