Vacuum breaking device for coating equipment and coating equipment

By designing variable diameter and bending structures in the gas transmission pipeline of the coating equipment, the problems of fast air flow velocity and high impact force were solved, stable coating of the battery cells was achieved, and product quality and output were improved.

CN116463591BActive Publication Date: 2025-09-16ZHUZHOU SANY SILICON ENERGY TECH CO LTD
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Patent Information

Application Number
CN202310164161.3
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2023-02-24
Publication Date
2025-09-16
Estimated Expiration
2043-02-24

AI Technical Summary

Technical Problem

During the vacuum breaking process of existing coating equipment, the air flow is fast and has a strong impact, which causes the battery cells to be easily blown off course and broken, affecting the coating quality and output, and causing waste of raw materials and increased costs.

Method used

A vacuum breaking device for coating equipment is designed. By setting a first pipeline segment in the gas transmission pipeline, the cross-sectional area of ​​the air inlet end is made smaller than that of the air outlet end. The airflow diffuses in the pipeline, reducing the flow velocity and impact force. The device is combined with bent pipe segments and baffles for diversion, reducing the impact of the airflow on the battery cells.

Benefits of technology

It effectively reduces the impact of airflow on battery cells, improves coating quality, reduces the breakage rate, and improves product output and quality.

✦ Generated by Eureka AI based on patent content.

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Abstract

The present invention relates to the field of film coating technology, and provides a vacuum breaking device for film coating equipment and film coating equipment, including a gas pipeline connected to a gas supply device, the gas pipeline being used to deliver gas to a second chamber of the film coating equipment; wherein the gas pipeline at least includes a first pipeline segment, the gas inlet end of the first pipeline segment is smaller than the cross-sectional area of ​​its gas outlet end, the gas inlet end of the first pipeline segment is connected to the gas supply device, and the gas outlet end is used to be connected to the second chamber. When performing a vacuum breaking operation, the gas supply device delivers the airflow to the second chamber through the gas pipeline. When the airflow passes through the first pipeline segment in the gas pipeline, since the cross-sectional area of ​​the gas inlet end is smaller than the cross-sectional area of ​​the gas outlet end, the cross-sectional area of ​​the gas outlet end becomes larger, which reduces the flow rate of the airflow, greatly reduces the impact of the airflow on the second chamber, solves the defect that the battery cells are easily blown off or blown to pieces, and reduces the breakage rate of the battery cells.
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Description

Technical Field

[0001] The present invention relates to the field of film coating technology, and in particular to a vacuum breaking device for film coating equipment and the film coating equipment. Background Art

[0002] During the coating process, existing coating equipment requires the chamber responsible for discharging solar cells to be evacuated and restored to atmospheric pressure once per production cycle to complete continuous production. To shorten this time and increase production, existing vacuum breakers typically enlarge the diameter of the air pipe, allowing for a large amount of airflow in a short period of time.

[0003] However, when the air flow is directly charged into the battery cell discharge chamber of the coating equipment through the inflation pipe, the air flow velocity is fast and the impact force is large, which can easily blow the battery cells placed on the coating carrier in the chamber off-center or break them. Therefore, the air flow is currently diverted by setting a baffle at the air outlet end of the pipe. However, the diverted air flow still has the problems of fast velocity and large impact force, which will still affect the battery cells placed on the coating carrier, thereby resulting in poor battery cell coating quality and a high breakage rate, seriously affecting product output and quality, and causing huge waste of raw materials and increased production costs. Summary of the Invention

[0004] The present invention provides a vacuum breaking device and coating equipment for coating equipment, which are used to solve the defect in the prior art that the battery cells placed on the coating carrier are easily blown off course and broken due to the fast flow rate and strong impact force of the vacuum breaking airflow, thereby avoiding the impact of the airflow on the battery cells in the discharge cavity and reducing the breakage rate of the battery cells.

[0005] The present invention provides a vacuum breaking device for a coating device, comprising a gas pipeline connected to a gas supply device, wherein the gas pipeline is used to transport gas to a second chamber of the coating device; wherein the gas pipeline comprises at least a first pipeline segment, the gas inlet end of the first pipeline segment is smaller than the cross-sectional area of ​​the gas outlet end thereof, the gas inlet end of the first pipeline segment is connected to the gas supply device, and the gas outlet end is used to be connected to the second chamber.

[0006] According to a vacuum breaking device for coating equipment provided by the present invention, the gas supply pipeline also includes a second pipeline segment connected to the gas outlet end of the first pipeline segment, and there is an angle between the second pipeline segment and the first pipeline segment, and the second pipeline segment is used to connect to the second chamber.

[0007] According to a vacuum breaking device for coating equipment provided by the present invention, the gas supply pipeline also includes a third pipeline segment connected to the air inlet end of the first pipeline segment, there is an angle between the first pipeline segment and the third pipeline segment, and the third pipeline segment is connected to the gas supply equipment.

[0008] The present invention also provides a coating device, comprising:

[0009] Second chamber;

[0010] A coating carrier is arranged in the second chamber; and the above-mentioned vacuum breaking device for the coating equipment.

[0011] According to a coating device provided by the present invention, it also includes a first chamber arranged inside the second chamber, and the first chamber is provided with a plurality of air flow channels connected to the interior of the first chamber, and the air flow channels are connected to the second chamber.

[0012] According to a coating device provided by the present invention, two first chambers are symmetrically arranged in the second chamber, and the coating carrier is located between the two first chambers.

[0013] According to a coating device provided by the present invention, a baffle is provided at the gas outlet end of the gas pipeline, a gap is provided between the gas outlet end of the gas pipeline and the baffle, and the baffle is located in the first chamber.

[0014] According to a coating device provided by the present invention, the second chamber includes a first cavity and a second cavity that are connected, the first cavity and the coating carrier are both located in the first cavity, and a filling material is provided in the second cavity.

[0015] According to a coating device provided by the present invention, the first chamber includes a plurality of baffles arranged on the inner wall of the second chamber, the plurality of baffles enclose the internal space of the first chamber, and a sealing plate is provided between the plurality of baffles, and the airflow channel is provided on the sealing plate.

[0016] According to a coating device provided by the present invention, the sealing plate is connected to the inner wall of the second chamber through a plurality of supporting members.

[0017] The present invention provides a vacuum breaking device for coating equipment and coating equipment, wherein the second chamber serves as a chamber for discharging battery cells in the coating equipment, and the coating carrier in the second chamber is used to carry the battery cells. When performing the vacuum breaking operation, the gas supply equipment conveys the airflow to the second chamber through the gas pipeline. When the airflow passes through the first pipeline segment in the gas pipeline, since the cross-sectional area of ​​the air inlet end is smaller than that of the air outlet end, the cross-sectional area of ​​the air outlet end becomes large, which reduces the flow rate of the airflow, greatly reduces the impact of the airflow on the second chamber, and thus avoids the airflow from impacting the battery cells carried on the coating carrier when entering the second chamber, solves the defect that the battery cells are easily blown off or blown to pieces, thereby improving the coating quality of the battery cells, reducing the breakage rate of the battery cells, and improving the overall output and quality of the product. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions in the present invention or the prior art, a brief introduction will be given below to the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0019] Figure 1 is a cross-sectional view of the coating equipment provided by the present invention;

[0020] Figure 2 This is a front view of the coating equipment provided by the present invention;

[0021] Figure 3 is a side view of the coating equipment provided by the present invention;

[0022] Figure 4 is a structural schematic diagram of the first chamber provided by the present invention;

[0023] Figure 5 It is a structural schematic diagram of the sealing plate provided by the present invention.

[0024] Reference numerals:

[0025] 1: gas transmission pipeline; 101: first pipeline segment; 102: second pipeline segment; 103: third pipeline segment; 2: first chamber; 201: baffle; 202: sealing plate; 3: second chamber; 301: first cavity; 302: second cavity; 4: air flow channel; 5: baffle; 6: filling material; 7: support member. DETAILED DESCRIPTION

[0026] To make the objectives, technical solutions, and advantages of the present invention more clear, the technical solutions of the present invention will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the embodiments described are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts shall fall within the scope of protection of the present invention.

[0027] In the description of the embodiments of the present invention, it should be noted that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing the embodiments of the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore should not be understood as limiting the embodiments of the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and should not be understood as indicating or implying relative importance.

[0028] In the description of the embodiments of the present invention, it should be noted that, unless otherwise specified or limited, the terms "connected" and "connection" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections; and direct connections or indirect connections through an intermediary. Those skilled in the art will understand the specific meanings of the above terms in the embodiments of the present invention based on the specific circumstances.

[0029] In the description of this specification, the description with reference to the terms "one embodiment", "first aspect embodiment", "some embodiments", "example", "specific example", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the embodiment of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in an appropriate manner in any one or more embodiments or examples. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, unless they are contradictory.

[0030] In the related art, during the coating production process of the existing coating equipment, the chamber responsible for discharging the battery cells needs to be evacuated once and the vacuum is broken and restored to atmospheric pressure once for each production cycle to complete continuous production. The vacuum breaking operation refers to the introduction of vacuum-breaking gas into the chamber. In order to shorten the time of breaking the vacuum and restoring the atmospheric pressure to increase the output, the existing vacuum breaking device generally enlarges the diameter of the inflation pipe, so that a large amount of airflow can be filled in a short time. However, when the airflow is directly charged into the battery cell discharge chamber of the coating equipment through the inflation pipe, the airflow velocity is fast and the impact force is large, which is easy to blow off or break the battery cells placed on the coating carrier in the chamber. Therefore, the airflow is currently diverted by setting a baffle at the outlet end of the pipe. However, the diverted airflow still has the problems of fast velocity and high impact force, which will still affect the battery cells placed on the coating carrier, thereby resulting in poor coating quality of the battery cells and a high breakage rate, which seriously affects the output and quality of the product, and causes huge waste of raw materials and increased production costs. Therefore, the present invention provides a vacuum breaking device and coating equipment for coating equipment to solve the defect in the prior art that the battery cells placed on the coating carrier are easily blown off course and broken due to the fast flow rate and strong impact force of the vacuum breaking airflow, thereby avoiding the impact of the airflow on the battery cells in the discharge cavity and reducing the breakage rate of the battery cells.

[0031] The following combination Figure 1-Figure 5 The present invention describes a vacuum breaking device for film coating equipment and the film coating equipment.

[0032] Example 1

[0033] The present embodiment provides a vacuum breaking device for a coating device, comprising a gas pipeline 1 connected to a gas supply device, the gas pipeline 1 being used to deliver gas to the second chamber 3 of the coating device, the gas supply device being able to deliver vacuum-breaking gases such as CDA to the second chamber 3 of the coating device through the gas pipeline 1, the second chamber 3 of the coating device being the chamber responsible for discharging battery cells, and each production cycle of the chamber requires evacuation once and vacuum breaking once to restore atmospheric pressure to complete continuous production, and the present embodiment implements improvement measures for the vacuum breaking operation.

[0034] Furthermore, the gas transmission pipeline 1 includes at least a first pipeline segment 101. The gas transmission pipeline 1 can be composed only of the first pipeline segment 101, or it can be a pipeline structure with the first pipeline segment 101. The air inlet end of the first pipeline segment 101 is smaller than the cross-sectional area of ​​its air outlet end. When the air flow passes through the first pipeline segment 101, the cross-sectional area of ​​the air outlet end of the first pipeline segment 101 becomes larger, and the air flow is diffused when it is sent out from the air outlet end. The diffusion effect reduces the flow rate of the air flow. The impact force of the air flow with a reduced flow rate is also greatly reduced, thereby reducing the impact disturbance of the air flow on the interior of the second chamber 3 after rushing into it, thereby preventing the air flow from blowing the battery cells off or breaking them.

[0035] Among them, the air inlet end of the first pipeline segment 101 corresponds to the air supply equipment, and the air outlet end of the first pipeline segment 101 corresponds to the second chamber 3, ensuring that when the air supply equipment supplies air to the second chamber 3, the air flow enters along the small end of the first pipeline segment 101 and exits from the large end.

[0036] Furthermore, when performing the vacuum breaking operation, the gas supply equipment conveys the airflow to the second chamber 3 through the gas pipeline 1. When the airflow passes through the first pipeline segment 101 in the gas pipeline 1, since the cross-sectional area of ​​the air inlet end is smaller than the cross-sectional area of ​​the air outlet end, the cross-sectional area of ​​the air outlet end becomes larger, which reduces the flow rate of the airflow, greatly reducing the impact of the airflow on the second chamber 3, thereby avoiding the airflow from impacting the battery cells carried on the coating carrier when entering the second chamber 3, solving the defect that the battery cells are easily blown off or broken, thereby improving the coating quality of the battery cells, reducing the breakage rate of the battery cells, and improving the overall output and quality of the product.

[0037] As an optional embodiment, the gas pipeline 1 also includes a second pipeline segment 102 connected to the gas outlet end of the first pipeline segment 101. The second pipeline segment 102 is used to connect to the second chamber 3, so that the gas pipeline 1 can have the first pipeline segment 101 and the second pipeline segment 102 at the same time, and the air flow from the first pipeline segment 101 passes through the second pipeline segment 102.

[0038] Among them, there is an angle between the second pipeline segment 102 and the first pipeline segment 101, so that a bent pipe segment is formed between the second pipeline segment 102 and the first pipeline segment 101. When the airflow passes through this bent pipe segment, the direction of the airflow is changed. During the direction change process in the pipeline, the flow rate of the airflow is further reduced, thereby increasing the breaking speed while reducing the impact of the airflow on the second chamber 3.

[0039] As an optional embodiment, the gas pipeline 1 further includes a third pipeline segment 103 connected to the gas inlet end of the first pipeline segment 101. The third pipeline segment 103 is connected to the gas supply device, so that the gas pipeline 1 can include both the first pipeline segment 101 and the third pipeline segment 103, or the first pipeline segment 101, the second pipeline segment 102, and the third pipeline segment 103. The gas supply device supplies gas to the third pipeline segment 103, and the gas flow can flow into the second chamber 3 through the first pipeline segment 101 or through the first pipeline segment 101 and the second pipeline segment 102 in sequence.

[0040] Among them, there is an angle between the first pipeline segment 101 and the third pipeline segment 103, so that the third pipeline segment 103 and the first pipeline segment 101 form a bent pipe segment together. When the airflow passes through this bent pipe segment, the direction of the airflow is changed. During the direction change process in the pipeline, the flow rate of the airflow is further reduced, thereby increasing the air-breaking speed while reducing the impact of the airflow on the second chamber 3.

[0041] Furthermore, when the gas pipeline 1 has a first pipeline segment 101, a second pipeline segment 102 and a third pipeline segment 103 at the same time, the gas pipeline 1 can have two bent pipe segments, so that the airflow can diffuse through the variable cross-section pipeline structure and change direction twice when passing through the gas pipeline 1, thereby greatly reducing the flow rate of the airflow and preventing the airflow from impacting the battery cell when rushing into the second chamber 3.

[0042] Example 2

[0043] This embodiment further provides a coating device, comprising a second chamber 3, a coating carrier, and the vacuum breaker for the coating device provided in the above embodiment, wherein the coating carrier is used to carry the solar cells and is disposed in the second chamber 3. It should be understood that the coating device provided in this embodiment has all the advantages of the vacuum breaker for the coating device provided in the above embodiment.

[0044] Furthermore, when the vacuum breaking device for the coating equipment provided in the above embodiment is combined with the coating equipment provided in this embodiment, the coating equipment at least includes a second chamber 3, a coating carrier and a gas pipeline 1 connected to the gas supply equipment. The gas pipeline 1 is used to transport gas to the second chamber 3 of the coating equipment. The gas supply equipment can deliver vacuum-breaking gases such as CDA to the second chamber 3 of the coating equipment through the gas pipeline 1. The air inlet end of the first pipeline segment 101 corresponds to the air supply equipment, and the air outlet end of the first pipeline segment 101 corresponds to the second chamber 3, ensuring that when the gas supply equipment supplies air to the second chamber 3, the air flow enters along the small end of the first pipeline segment 101 and exits from the large end.

[0045] As an optional embodiment, the gas pipeline 1 in the coating equipment provided in this embodiment can also have the second pipeline segment 102 and / or the third pipeline segment 103 provided in the above embodiment, so that the gas pipeline 1 can also have one or two bent pipe segments on the basis of the first pipeline segment 101 with a variable diameter portion, so that the airflow can diffuse through the variable cross-section pipeline structure and change direction once or twice when passing through the gas pipeline 1, thereby greatly reducing the flow rate of the airflow and preventing the airflow from impacting the battery cell when rushing into the second chamber 3.

[0046] Example 3

[0047] The difference between this embodiment and the above-mentioned embodiments 1 and 2 is that it further includes a first chamber 2, which is connected to the gas pipeline 1, so that the vacuum breaking device for the coating equipment provided in the above-mentioned embodiments can also be integrated with this first chamber 2.

[0048] Furthermore, when using the gas pipeline 1 to transport the vacuum-breaking gas, the first chamber 2 can be placed inside the second chamber 3, and the first chamber 2 is provided with a plurality of air flow channels 4 connected to the interior of the first chamber 2, and the air flow channels 4 are connected to the second chamber 3. It can be understood that when the gas pipeline 1 transports the vacuum-breaking airflow to the interior of the first chamber 2 and then diffuses, it can be diverted to the second chamber 3 through each air flow channel 4.

[0049] Among them, when the gas pipeline 1 transports and diffuses the airflow inside the first chamber 2, the flow rate of the airflow decreases, and after being diverted through each airflow channel 4, the flow rate of the airflow further decreases, which can prevent the airflow from impacting the battery cells on the coating carrier.

[0050] As an optional embodiment, the gas pipeline 1 can have the second pipeline segment 102 and / or the third pipeline segment 103 provided in the above embodiment, so that the gas pipeline 1 can have one or two bent pipe segments on the basis of the first pipeline segment 101 with a variable diameter portion, so that the airflow can diffuse through the variable cross-section pipeline structure and change direction once or twice when passing through the gas pipeline 1, thereby greatly reducing the flow rate of the airflow. At the same time, the airflow with a reduced flow rate after experiencing variable diameter diffusion and change of flow direction is diffused when entering the first chamber 2, and the flow rate is reduced again. After being diverted through each airflow channel 4, the flow rate of the airflow is further reduced, which can prevent the airflow from impacting the battery cells on the coating carrier.

[0051] As an optional embodiment, two first chambers 2 are symmetrically provided in the second chamber 3, and the coating carrier is located between the two first chambers 2. The two first chambers 2 are arranged in pairs in correspondence with each other up and down, thereby improving the air intake efficiency and reducing the instantaneous air pressure difference in the second chamber 3, thereby improving the smoothness and uniformity of the air intake, and when the coating carrier is located between the two first chambers 2, the air flow rate that disturbs the edge of the coating carrier is reduced, thereby further preventing the defect that the battery cell is easily blown off or blown apart.

[0052] As an optional embodiment, a baffle 5 is provided at the outlet end of the gas pipeline 1. There is a gap between the outlet end of the gas pipeline 1 and the baffle 5. The baffle 5 is located in the first chamber 2. When the gas pipeline 1 outputs airflow, the airflow directly hits the baffle 5 and is diverted to the surrounding side. This resistance can further reduce the flow rate of the airflow when it enters the first chamber 2.

[0053] As an optional embodiment, the baffle 5 may have a circle of edges connected to the inner wall of the second chamber 3, and the edge needs to have multiple channels for gas to flow out and into the interior of the first chamber 2.

[0054] As an optional embodiment, the baffle 5 can be connected to the inner wall of the second chamber 3 through multiple connecting parts, so that a gap can be left between the baffle 5 and the gas outlet end of the gas pipeline 1. The connecting parts can be a detachable connection structure such as bolts, or they can be an integrated structure that is cast or welded to match the baffle 5.

[0055] In this embodiment, the first chamber 2 includes a plurality of baffles 201 arranged on the inner wall of the second chamber 3, and the plurality of baffles 201 surround the internal space of the first chamber 2, and a sealing plate 202 is provided between the plurality of baffles 201. The peripheral side of the first chamber 2 is closed by each baffle, one of the two openings is closed by the inner wall of the second chamber 3, and the other opening is closed by the sealing plate 202. The air flow channel 4 is arranged on the sealing plate 202 to realize the communication between the first chamber 2 and the second chamber 3.

[0056] Furthermore, the air flow channel 4 can be small holes evenly distributed on the sealing plate 202, ensuring that the total area of ​​the small holes on the sealing plate 202 is larger than the cross-sectional area of ​​the outlet end of the gas pipeline 1. The incoming air flow will be further decelerated, which makes the amount of gas after diversion through the small holes on the sealing plate 202 able to meet the requirements of rapid vacuum breaking, and there will be no problem of insufficient airflow.

[0057] Furthermore, the sealing plate 202 is connected to the inner wall of the second chamber 3 through a plurality of support members 7 , thereby improving the support stability of the sealing plate 202 .

[0058] Optionally, the support member 7 can be a vent bolt, which on the one hand can improve the support stability of the sealing plate 202, and on the other hand, the air flow in the first chamber 2 can be introduced through the side hole of the vent bolt and output from its outlet end to the second chamber 3, thereby increasing the number of outlet points of the first chamber 2 and improving the diversion effect.

[0059] Example 4

[0060] The difference between this embodiment and the above embodiments 1-3 is that the second chamber 3 includes a first cavity 301 and a second cavity 302 that are connected to each other, the first chamber 2 and the coating carrier are both located in the first cavity 301, and a filling material 6 is provided in the second cavity 302.

[0061] Furthermore, the first chamber 2 and the coating carrier are integrated inside the first cavity 301, which serves as the main body of vacuum coating in the coating equipment. The second cavity 302 is the remaining part of the cavity. In order to reduce the flow of airflow to the second cavity 302, filling material is set in the second cavity 302 to avoid filling airflow in the invalid area, further reducing the internal space volume of the second cavity 3, reducing the volume of gas required to break the vacuum in the second cavity 3, and reducing the time of breaking the vacuum from the source.

[0062] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the present invention.

Claims

1. A coating device, characterized in that: include: Second chamber; a film-coating carrier, disposed in the second chamber; A vacuum breaking device, comprising a gas pipeline connected to a gas supply device, the gas pipeline being used to deliver gas into the second chamber; wherein the gas pipeline comprises at least a first pipeline segment, the gas inlet end of the first pipeline segment having a smaller cross-sectional area than the gas outlet end thereof, the gas inlet end of the first pipeline segment being connected to the gas supply device, and the gas outlet end being used to connect to the second chamber; The invention also includes a first chamber disposed inside the second chamber, wherein the first chamber is provided with a plurality of air flow channels communicating with the interior of the first chamber, and the air flow channels are communicated with the second chamber; A baffle is provided at the gas outlet end of the gas pipeline, a gap is formed between the gas outlet end of the gas pipeline and the baffle, and the baffle is located in the first chamber; The second chamber includes a first cavity and a second cavity that are connected to each other. The first cavity and the coating carrier are both located in the first cavity. Filling material is provided in the second cavity.

2. The coating equipment according to claim 1, characterized in that: The gas transmission pipeline further includes a second pipeline segment connected to the gas outlet end of the first pipeline segment, the second pipeline segment and the first pipeline segment have an included angle, and the second pipeline segment is used to connect to the second chamber.

3. The coating device according to any one of claims 1 to 2, characterized in that: The gas transmission pipeline further includes a third pipeline segment connected to the gas inlet end of the first pipeline segment, an angle is formed between the first pipeline segment and the third pipeline segment, and the third pipeline segment is connected to the gas supply equipment.

4. The coating equipment according to claim 1, characterized in that: Two first chambers are symmetrically arranged in the second chamber, and the coating carrier is located between the two first chambers.

5. The coating device according to any one of claims 1 or 4, characterized in that: The first chamber includes a plurality of baffles arranged on the inner wall of the second chamber, the plurality of baffles enclose an internal space of the first chamber, and a sealing plate is provided between the plurality of baffles, and the air flow channel is provided on the sealing plate.

6. The coating equipment according to claim 5, characterized in that: The sealing plate is connected to the inner side wall of the second chamber through a plurality of supporting members.

Citation Information

Patent Citations

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