High-stability two-dimensional angle inspection device and method based on SA-BP neural network

Abstract

The present invention provides a high-stability two-dimensional angle inspection device and method based on an SA-BP neural network. The device consists of an angle generating device, a base, an angle measuring device, a drive module circuit board, an environmental compensation module circuit board, a main control module circuit board, a display, an input module circuit board, temperature, humidity, air pressure sensors, and a metering frame; the method uses two sets of drive devices and two autocollimators to extend the angle generating ability and angle measuring ability of the small angle inspection instrument to the roll angle and pitch angle directions respectively, so that the small angle inspection instrument has the ability to generate two-dimensional standard angles; moreover, the present invention realizes rough positioning within a large stroke range and precise compensation within a small range, overcomes the contradictory relationship between the stroke and the resolution, and at the same time uses an autocollimator as the angle measuring device, so that both the angle generating device and the angle measuring device have the advantage of a resolution reaching the micro-nano arcsecond level.

Description

Technical Field

[0001] The present invention belongs to the technical field of precision measurement, and particularly relates to a high-stability two-dimensional angle inspection device and method based on an SA-BP neural network. Background Art

[0002] Precision small-angle measuring instruments play an important role in the fields of precision measurement technology, optical engineering, cutting-edge scientific experiments, and high-end precision equipment manufacturing. However, due to error accumulation during use, the measurement accuracy of the instruments will continuously decrease. Therefore, it is necessary to regularly calibrate and verify the instruments to meet the requirements of small-angle measurement in the above fields.

[0003] Professional metrology institutions are capable of calibrating and verifying precision small-angle measuring instruments, but sending the instruments for inspection incurs time costs, reducing the usage efficiency of the instruments and unable to meet the requirements of high-frequency calibration and verification in specific scenarios.

[0004] Small-angle inspection instruments have the advantages of a large measuring range, high resolution, and simple operation, with outstanding comprehensive performance. They can instantaneously complete calibration and verification work for various precision small-angle measuring instruments, and thus have been widely used.

[0005] Traditional small-angle inspection instruments, such as Figure 1 shown, the device includes a ribbed workbench 1, a workbench rotating shaft 2, a workbench support 3, a driving device 4, a first positioning indicator 5, a second positioning indicator 6, and a base 7; the ribbed workbench 1 contacts the workbench support 3 through the workbench rotating shaft 2 and undergoes a one-dimensional angle in the pitching direction under the push of the driving device 4. The workbench support 3 and the driving device 4 are both located on the base 7; through the indication difference between the first positioning indicator 5 and the second positioning indicator 6 and the distance between the central axes, the angle value of the deflection of the ribbed workbench 1 can be calculated. In this structure, the driving device 4 and the positioning indicators 5 and 6 can only measure a one-dimensional angle, and the small-angle inspection instrument cannot inspect two-dimensional angles; the driving device 4 is usually a single motor, and improving the displacement resolution will reduce the stroke. To meet the stroke requirements, the motor resolution is limited to the micron level; there are large measurement errors in the positioning indicators 5 and 6, resulting in difficulties in breaking through the bottleneck of the resolution of the angle generating device and the angle measuring device of the small-angle inspection instrument at the micro-nano radian level. At the same time, traditional small-angle inspection instruments do not include any means to reduce environmental interference, and the system device is extremely vulnerable to environmental factors such as temperature, humidity, and pressure, thus limiting the improvement of stability.

[0006] In summary, the system has the following three problems:

[0007] First, the traditional small angle inspection instrument only uses a set of driving devices to push the ribbed worktable, and the positioning indicator is only distributed in one direction. It does not have the ability to generate and measure two-dimensional angles, so it can only inspect one-dimensional angles;

[0008] Second, there is a contradiction between the stroke and resolution of the angle generating device of the traditional small angle inspection instrument. The angle measurement method used has limited resolution, making it difficult to achieve micro-nano arc level angle generation and measurement resolution.

[0009] Third, traditional small angle inspection instruments are easily disturbed by environmental factors, and it is difficult to achieve high stability in the generation and measurement of angles;

[0010] Therefore, traditional small-angle inspection instruments are unable to inspect two-dimensional angles, have difficulty in producing standard angles at the micro-nano arc level, and also have the problem of lacking high stability. Summary of the invention

[0011] The purpose of the present invention is to propose a high-stability two-dimensional angle inspection device and method based on SA-BP neural network to address the problems that traditional small-angle inspection instruments can only inspect one-dimensional angles, and the angle generation and measurement devices do not have high resolution and high stability.

[0012] This method uses two sets of drive devices to form the angle generating device of the small angle inspection instrument, expanding the freedom of motion of the ribbed worktable to the roll and pitch directions. The two rotation axis vertical axis directions are both detected by angle measuring devices in real time, and the angle generating device is controlled by closed-loop feedback to ensure the accuracy of the angle generation of the ribbed worktable. Experimental verification shows that this method can generate two-dimensional standard angles, solving the problem that the small angle inspection instrument cannot detect two-dimensional angles.

[0013] This method uses a micro-nano arc-level angle generation method based on macro-micro joint drive, combining a lead screw motor with a large stroke and low displacement resolution with a piezoelectric ceramic with a small stroke and high displacement resolution, respectively achieving coarse positioning within a large stroke range and precise compensation within a small range, solving the problem that the stroke and resolution of the angle generation device cannot be taken into account at the same time; at the same time, using an autocollimator as an angle measurement device effectively improves the resolution of the angle measurement device. Experimental verification shows that the small angle inspection instrument can generate and measure tiny angles at the micro-nano arc level, solving the problem that the angle generation and measurement device does not have high resolution;

[0014] Meanwhile, this method uses environmental compensation and a metrology framework construction method. Five sensors are used to respectively feedback environmental factors such as temperature, humidity, and pressure, and the small-angle inspection instrument is feedback-compensated according to the measured environmental drift amount. At the same time, the angle generating device and the angle measuring device are placed on an invar metrology framework with less thermal deformation, reducing the influence of environmental temperature, thereby reducing the environmental drift amount and solving the problem that the angle inspection device does not have high stability.

[0015] Therefore, compared with traditional small-angle inspection instruments, this invention has the technical advantages of being able to inspect two-dimensional angles, generate standard angles at the micro-nano radian level, and improve the stability of the angle generating and measuring devices.

[0016] This invention is realized through the following technical solutions. The invention proposes a high-stability two-dimensional angle inspection device based on the SA-BP neural network, including a ribbed workbench, a workbench rotating shaft, workbench supports, a driving device (the first piezoelectric ceramic, the first lead screw motor, the second piezoelectric ceramic, the second lead screw motor), a base, a first plane mirror, a second plane mirror, a first autocollimator, a second autocollimator, a driving module circuit board, an environmental compensation module circuit board, a main control module circuit board, a display, an input module circuit board, a first temperature sensor, a second temperature sensor, a third temperature sensor, a humidity sensor, a barometric pressure sensor, and a metrology framework. After receiving the angle verification requirement, the display and input module circuit board sends the angle generation requirement to the driving module circuit board through the main control module circuit board to control the angle generating device, causing the ribbed workbench to deflect in the roll or pitch direction. The angle measuring device real-time detects the deflection angle of the ribbed workbench in the two-dimensional direction and sends the measurement result back to the main control module circuit board. The main control module circuit board corrects the measurement result using the SA-BP neural network according to the environmental parameters collected by the environmental compensation module circuit board. The main control module circuit board finally controls the angle generating device according to the corrected angle measurement result to achieve closed-loop feedback compensation, so that the system device can generate standard angles in two dimensions.

[0017] The angle generating device consists of a ribbed workbench, a workbench rotating shaft, workbench supports, and a driving device (the first piezoelectric ceramic, the first lead screw motor, the second piezoelectric ceramic, the second lead screw motor). The workbench rotating shaft and the workbench supports are coaxial, the first piezoelectric ceramic and the first lead screw motor are coaxial, and the second piezoelectric ceramic and the second lead screw motor are coaxial. The positions of the workbench supports and the first lead screw motor on the base are both on the same straight line parallel to the roll angle rotation axis, and the positions of the workbench supports and the second lead screw motor on the base are both on the same straight line parallel to the pitch angle rotation axis. The ribbed workbench is connected to the workbench supports through the workbench rotating shaft and can deflect by a small angle in both the roll and pitch directions under the push of the driving device.

[0018] The angle measuring device consists of a first plane mirror, a second plane mirror, a first autocollimator, and a second autocollimator; after the ribbed workbench deflects in two dimensions, the first autocollimator measures the roll angle through the first plane mirror, and the second autocollimator measures the pitch angle through the second plane mirror, thereby improving the angle measurement resolution of the system device to the micro-nano arcsecond level;

[0019] The first piezoelectric ceramic and the first lead screw motor, and the second piezoelectric ceramic and the second lead screw motor respectively form two sets of macro-micro combined drive devices; after the first lead screw motor and the second lead screw motor with lower displacement resolution and larger stroke achieve rough positioning within a large stroke range, the first piezoelectric ceramic and the second piezoelectric ceramic with higher displacement resolution and smaller stroke perform precise compensation under the closed-loop feedback of the angle measuring device, so that the system device can have an angle of micro-nano arcsecond level within a large stroke range;

[0020] Both the angle generating device and the angle measuring device are located on the metrology frame. The first temperature sensor, the second temperature sensor, the third temperature sensor, the humidity sensor, and the air pressure sensor respectively collect the temperature, humidity, and pressure data of the environment, and send the data to the main control module circuit board through the environmental compensation module circuit board, and then realize the real-time environmental compensation for the angle generating device and the angle measuring device through the SA-BP neural network, thereby reducing the influence of the environment on the system device and improving the stability of the small angle checker;

[0021] The present invention also proposes a high-stability two-dimensional angle inspection method based on the SA-BP neural network implemented on the above high-stability two-dimensional angle inspection device based on the SA-BP neural network, including the following steps:

[0022] Step a: Use a standard instrument as the output value of the SA-BP neural network, that is, the calibrated measurement results X and Y. Use the measured temperature values a, b, c, the humidity value d, the air pressure value e of the first temperature sensor, the second temperature sensor, the third temperature sensor, the humidity sensor, and the air pressure sensor, and the angle measurement results x and y of the first autocollimator and the second autocollimator as the input values of the SA-BP neural network, and use these data to train the SA-BP neural network of the two-dimensional angle inspection device;

[0023] Step b: The first temperature sensor, the second temperature sensor, the third temperature sensor, the humidity sensor, and the air pressure sensor start to collect data, and send the data to the main control module circuit board through the environmental compensation module circuit board. The main control module circuit board calculates the calibrated measurement results using the SA-BP neural network according to the data to achieve real-time compensation; the main control module circuit board sends a zeroing instruction to the display and input module circuit board, so that the ribbed workbench is in the zero position in both the roll angle direction and the pitch angle direction, place the instrument to be calibrated on the ribbed workbench and zero the reading;

[0024] Step c: Send the roll angle generation instruction to the display and input module circuit board. After the main control module circuit board receives the instruction, under the feedback of the calibrated measurement result, the drive module circuit board controls the second piezoelectric ceramic and the second lead screw motor to generate a total displacement h1, so that the ribbed workbench generates the standard angle required for the instrument under test in the roll angle direction. Record the roll angle reading of the system device as s1, and at the same time record the roll angle display value of the instrument under test as α1. α1 - s1 is the roll angle indication error of the instrument under test at the inspection point. Among them, s1 = f1(h1), where f1 represents a function.

[0025] Step d: Repeat step c to complete the indication error verification of all inspection points of the instrument under test in the roll angle direction.

[0026] Step e: Send the zero adjustment instruction to the display and input module circuit board to make the ribbed workbench in the roll angle direction and the pitch angle direction return to the zero position again, and zero adjust the indication of the instrument under test.

[0027] Step f: Send the pitch angle generation instruction to the display and input module circuit board. After the main control module circuit board receives the instruction, under the feedback of the measurement value of the second autocollimator, the drive module circuit board controls the first piezoelectric ceramic and the first lead screw motor to generate a total displacement h2, so that the ribbed workbench generates the standard angle required for the instrument under test in the pitch angle direction. Record the pitch angle reading of the system device as s2, and at the same time record the pitch angle display value of the instrument under test as α2. α2 - s2 is the pitch angle indication error of the instrument under test at the inspection point. Among them, s2 = f2(h2), where f2 represents a function.

[0028] Step g: Repeat step f to complete the indication error verification of all inspection points of the instrument under test in the pitch angle direction.

[0029] The beneficial effects of the present invention are as follows:

[0030] 1. Aiming at the problem that the traditional small angle checker can only check one-dimensional angles, the present invention proposes a two-dimensional angle checking method. The angle generation device composed of two sets of drive devices extends the degrees of freedom of movement of the ribbed workbench to the roll and pitch directions. Angle measuring devices are installed in the directions perpendicular to the two rotation axes to detect in real time, and a closed-loop feedback control is performed on the angle generation device to ensure the accuracy of the angle generation of the ribbed workbench. Through experimental verification, this method can generate two-dimensional standard angles, solving the problem that the small angle checker cannot check two-dimensional angles.

[0031] 2. In view of the problem that traditional small-angle inspection instruments do not have high stability, the present invention uses environmental compensation based on SA-BP neural network and a method for building a metrology framework. This method uses five sensors to feedback environmental factors such as temperature, humidity, and pressure, and trains the SA-BP neural network based on the measured environmental drift and the measurement value of the standard instrument to provide feedback compensation for angle generation and measurement; at the same time, the metrology framework is built with Yin steel with small thermal deformation, and the angle generation device and the angle measurement device are placed on the metrology framework, which reduces the influence of ambient temperature, thereby reducing the environmental drift, solving the problem that environmental factors reduce the resolution of the angle inspection device, and improving the stability of the angle inspection device.

[0032] 3. In view of the problem that the angle generation and measurement device of the traditional small angle inspection instrument has low resolution, the present invention uses a micro-nano arc-level angle generation method based on macro-micro joint drive, and combines a screw motor with a large stroke and low displacement resolution with a piezoelectric ceramic with a small stroke and high displacement resolution to respectively achieve coarse positioning within a large stroke range and precise compensation within a small range, solving the problem that the stroke and resolution of the angle generation device cannot be taken into account at the same time; at the same time, the autocollimator is used as an angle measurement device, which effectively improves the resolution of the angle measurement device and expands the range. It has been verified experimentally that the small angle inspection instrument can generate standard angles of micro-nano arc levels, solving the problem that the angle generation and measurement device does not have high resolution.

[0033] In addition, the present invention also has the following technical advantages:

[0034] First, the two sets of driving devices and the workbench shaft and the ribbed workbench form a stable plane with three-point contact, which improves the position reproducibility of the ribbed workbench;

[0035] Second, when the macro-micro combined driving device of the present invention uses piezoelectric ceramics for precise angle compensation, due to the high displacement resolution and small step size of the piezoelectric ceramics, it can drive the ribbed workbench to perform quasi-static motion, meeting the requirement of the small angle inspection instrument to slowly generate an angle. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] Figure 1 It is a schematic diagram of the structure of a traditional small angle inspection instrument.

[0037] Figure 2a It is a top view of the structure of the specific embodiment 1 of the high stability two-dimensional angle inspection device based on the SA-BP neural network of the present invention.

[0038] Figure 2b It is a side view structural diagram of a specific embodiment 1 of a high-stability two-dimensional angle inspection device based on a SA-BP neural network of the present invention.

[0039] Figure 3aIt is the top view structure diagram of the second specific embodiment of the high-stability two-dimensional angle inspection device based on the SA-BP neural network of the present invention.

[0040] Figure 3b It is the side view structure diagram of the second specific embodiment of the high-stability two-dimensional angle inspection device based on the SA-BP neural network of the present invention.

[0041] Figure 4a It is the top view structure diagram of the third specific embodiment of the high-stability two-dimensional angle inspection device based on the SA-BP neural network of the present invention.

[0042] Figure 4b It is the side view structure diagram of the third specific embodiment of the high-stability two-dimensional angle inspection device based on the SA-BP neural network of the present invention.

[0043] Figure 5a It is the top view structure diagram of the fourth specific embodiment of the high-stability two-dimensional angle inspection device based on the SA-BP neural network of the present invention.

[0044] Figure 5b It is the side view structure diagram of the fourth specific embodiment of the high-stability two-dimensional angle inspection device based on the SA-BP neural network of the present invention.

[0045] Figure 6 It is the layout schematic diagram of the workbench rotating shaft 2 and the driving device 4 in the fourth specific embodiment.

[0046] Figure 7 It is the SA-BP neural network schematic diagram of the two-dimensional angle inspection device.

[0047] In the figure: 1 ribbed workbench, 2 workbench rotating shaft, 3 workbench support, 4 driving device (41 first piezoelectric ceramic, 42 first lead screw motor, 43 second piezoelectric ceramic, 44 second lead screw motor), 5 first positioning indicator, 6 second positioning indicator, 7 base, 8 first plane mirror, 9 second plane mirror, 10 first autocollimator, 11 second autocollimator, 12 drive module circuit board, 13 environmental compensation module circuit board, 14 main control module circuit board, 15 display, input module circuit board, 16 first temperature sensor, 17 second temperature sensor, 18 third temperature sensor, 19 humidity sensor, 20 air pressure sensor, 21 metering frame. Detailed implementation manners

[0048] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention. Specific Embodiment 1

[0050] This embodiment is an embodiment of a high-stability two-dimensional angle inspection device based on an SA-BP neural network.

[0051] The structural schematic diagram of the high-stability two-dimensional angle inspection device based on the SA-BP neural network in this embodiment is as shown in Figure 2a and Figure 2b shown. The angle inspection device includes a ribbed workbench 1, a workbench rotating shaft 2, a workbench support 3, a driving device 4 (a first piezoelectric ceramic 41, a first lead screw motor 42, a second piezoelectric ceramic 43, a second lead screw motor 44), a base 7, a first plane mirror 8, a second plane mirror 9, a first autocollimator 10, a second autocollimator 11, a driving module circuit board 12, an environmental compensation module circuit board 13, a main control module circuit board 14, a display and input module circuit board 15, a first temperature sensor 16, a second temperature sensor 17, a third temperature sensor 18, a humidity sensor 19, a pressure sensor 20, and a metering frame 21;

[0052] After the display and input module circuit board 15 receives an angle verification requirement, it sends an angle generation requirement to the driving module circuit board 12 through the main control module circuit board 14 to control the angle generation device, so that the ribbed workbench 1 deflects in the roll or pitch direction; the angle measurement device real-time detects the deflection angle of the ribbed workbench 1 in the two-dimensional direction and sends the measurement result back to the main control module circuit board 14; the main control module circuit board 14 corrects the measurement result by using the SA-BP neural network according to the environmental parameters collected by the environmental compensation module circuit board 13; the main control module circuit board 14 finally controls the angle generation device according to the corrected angle measurement result to achieve closed-loop feedback compensation;

[0053] The angle generation device is composed of a ribbed workbench 1, a workbench rotating shaft 2, a workbench support 3, and a driving device 4 (a first piezoelectric ceramic 41, a first lead screw motor 42, a second piezoelectric ceramic 43, a second lead screw motor 44). The workbench rotating shaft 2 and the workbench support 3 are coaxial, the first piezoelectric ceramic 41 and the first lead screw motor 42 are coaxial, and the second piezoelectric ceramic 43 and the second lead screw motor 44 are coaxial; the positions of the workbench support 3 and the first lead screw motor 42 on the base 7 are both located on the same straight line parallel to the roll angle rotation axis, and the positions of the workbench support 3 and the second lead screw motor 44 on the base 7 are both located on the same straight line parallel to the pitch angle rotation axis; the ribbed workbench 1 is connected to the workbench support 3 through the workbench rotating shaft 2 and can deflect by a small angle in both the roll and pitch directions under the push of the driving device 4;

[0054] The angle measuring device consists of a first plane mirror 8, a second plane mirror 9, a first autocollimator 10, and a second autocollimator 11. After the ribbed workbench 1 deflects in two-dimensional directions, the first autocollimator 10 measures the roll angle through the first plane mirror 8, and the second autocollimator 11 measures the pitch angle through the second plane mirror 9.

[0055] The first piezoelectric ceramic 41 and the first lead screw motor 42, and the second piezoelectric ceramic 43 and the second lead screw motor 44 respectively form two sets of macro-micro combined drive devices. After the first lead screw motor 42 and the second lead screw motor 44 with lower displacement resolution and larger stroke achieve rough positioning within a large stroke range, the first piezoelectric ceramic 41 and the second piezoelectric ceramic 43 with higher displacement resolution and smaller stroke perform precise compensation under the closed-loop feedback of the angle measuring device.

[0056] Both the angle generating device and the angle measuring device are located on the metering frame 21. The first temperature sensor 16, the second temperature sensor 17, the third temperature sensor 18, the humidity sensor 19, and the air pressure sensor 20 respectively collect the temperature, humidity, and pressure data of the environment, and send the data to the main control module circuit board 14 through the environment compensation module circuit board 13, and then realize the real-time environment compensation for the angle generating device and the angle measuring device through the SA-BP neural network, so as to reduce the influence of the environment on the system device and improve the stability of the small angle checker.

[0057] The inspection principle is as follows:

[0058] After the small angle checker is powered on, the first temperature sensor 16, the second temperature sensor 17, the third temperature sensor 18, the humidity sensor 19, and the air pressure sensor 20 start to collect data, and send the data to the main control module circuit board 14 through the environment compensation module circuit board 13. The main control module circuit board 14 compensates the angle generating device and the angle measuring device in real time to reduce the interference of environmental factors on angle generation and measurement.

[0059] When the instrument under test is being calibrated for the roll angle, the main control module circuit board 14 sends an instruction to the drive module circuit board 12 to generate a standard angle s1 in the roll angle direction. The drive module circuit board 12 controls the second lead screw motor 44 to move within a large stroke range, causing the ribbed workbench 1 to have a roll angle close to s1.

[0060] Since the ribbed workbench 1 will cause the first plane mirror 8 to deflect in the pitch angle direction, the first autocollimator 10 can measure the roll angle of the ribbed workbench 1 in real time. The main control module circuit board 14 calculates the deviation value between the angle of the ribbed workbench 1 and the standard angle s1 based on the measured value, and sends the deviation value to the drive module circuit board 12.

[0061] The driving module circuit board 12 controls the second piezoelectric ceramic 43 to perform precise compensation, so that the total displacement of the second piezoelectric ceramic 43 and the second lead screw motor 44 is h1. Since there is a relationship s1 = f1(h1), the angle of the ribbed workbench 1 in the rolling angle direction at this time is the standard angle s1. Denote the rolling angle display value of the instrument to be calibrated as α1, and α1 - s1 is the rolling angle indication error of the instrument to be calibrated at the inspection point.

[0062] When calibrating the pitch angle of the instrument under test, the main control module circuit board 14 sends an instruction to the driving module circuit board 12 to generate a standard angle s2 in the pitch angle direction. The driving module circuit board 12 controls the first lead screw motor 42 to move within a large stroke range, so that the ribbed workbench 1 generates a pitch angle close to s2.

[0063] Since the ribbed workbench 1 will deflect the second plane mirror 9 in the pitch angle direction, the second autocollimator 11 can measure the pitch angle of the ribbed workbench 1 in real time. The main control module circuit board 14 calculates the deviation value between the angle of the ribbed workbench 1 and the standard angle s2 according to the measured value, and sends the deviation value to the driving module circuit board 12.

[0064] The driving module circuit board 12 controls the first piezoelectric ceramic 41 to perform precise compensation, so that the total displacement of the first piezoelectric ceramic 41 and the first lead screw motor 42 is h2. Since there is a relationship s2 = f2(h2), the angle of the ribbed workbench 1 in the pitch angle direction at this time is the standard angle s2. Denote the pitch angle display value of the instrument to be calibrated as α2, and α2 - s2 is the pitch angle indication error of the instrument to be calibrated at the inspection point.

[0065] The embodiment of the high-stability micro-nano arc-minute level two-dimensional angle inspection method of this embodiment includes the following steps:

[0066] Step a: Use the standard instrument as the output values of the SA-BP neural network, that is, the calibrated measurement results X, Y. Use the measured temperature values a, b, c of the first temperature sensor 16, the second temperature sensor 17, the third temperature sensor 18, the humidity sensor 19, and the air pressure sensor 20, the humidity value d, the air pressure value e, and the angle measurement results x, y of the first autocollimator 10 and the second autocollimator 11 as the input values of the SA-BP neural network, and use these data to train the SA-BP neural network of the two-dimensional angle inspection device; as Figure 7 shown.

[0067] Step b: The first temperature sensor 16, the second temperature sensor 17, the third temperature sensor 18, the humidity sensor 19, and the air pressure sensor 20 start collecting data, and send the data to the main control module circuit board 14 through the environmental compensation module circuit board 13. The main control module circuit board 14 calculates the calibrated measurement result using the SA-BP neural network based on the data to achieve real-time compensation. The main control module circuit board 14 sends a zeroing instruction to the display and input module circuit board 15 to make the ribbed workbench 1 in both the roll angle direction and the pitch angle direction at the zero position. Place the instrument to be calibrated on the ribbed workbench 1 and zero the reading;

[0068] Step c: Send a roll angle generation instruction to the display and input module circuit board 15. After receiving the instruction, the main control module circuit board 14 controls the second piezoelectric ceramic 43 and the second lead screw motor 44 to generate a total displacement h1 under the feedback of the measurement value of the first autocollimator 10 by the drive module circuit board 12, so that the ribbed workbench 1 generates the standard angle required for the instrument to be calibrated in the roll angle direction. Record the roll angle reading of the system device as s1, and at the same time record the roll angle display value of the instrument to be calibrated as α1. α1 - s1 is the roll angle indication error of the instrument to be calibrated at the inspection point. Among them, s1 = f1(h1), and f1 represents a function;

[0069] Step d: Repeat step c to complete the indication error verification of all inspection points of the instrument to be calibrated in the roll angle direction;

[0070] Step e: Send a zeroing instruction to the display and input module circuit board 15 to make the ribbed workbench 1 in both the roll angle direction and the pitch angle direction at the zero position again, and zero the reading of the instrument to be calibrated;

[0071] Step f: Send a pitch angle generation instruction to the display and input module circuit board 15. After receiving the instruction, the main control module circuit board 14 controls the first piezoelectric ceramic 41 and the first lead screw motor 42 to generate a total displacement h2 under the feedback of the measurement value of the second autocollimator 11 by the drive module circuit board 12, so that the ribbed workbench 1 generates the standard angle required for the instrument to be calibrated in the pitch angle direction. Record the pitch angle reading of the system device as s2, and at the same time record the pitch angle display value of the instrument to be calibrated as α2. α2 - s2 is the pitch angle indication error of the instrument to be calibrated at the inspection point. Among them, s2 = f2(h2), and f2 represents a function;

[0072] Step g: Repeat step f to complete the indication error verification of all inspection points of the instrument to be calibrated in the pitch angle direction;

[0073] The innovation of the present invention lies in using two sets of driving devices, namely the first piezoelectric ceramic 41, the first lead screw motor 42 and the second piezoelectric ceramic 43, the second lead screw motor 44, to form an angle generating device of the system device, expanding the degrees of freedom of movement of the ribbed workbench 1 to the roll and pitch directions. Angle measuring devices are arranged in real time in the vertical axis directions of the two rotating shafts to perform closed-loop feedback control on the angle generating device, ensuring the accuracy of the angle generation of the ribbed workbench 1. Through experimental verification, this method can generate two-dimensional standard angles and solve the problem that the system device cannot check two-dimensional angles;

[0074] The present invention uses the first plane mirror 8, the second plane mirror 9, the first autocollimator 10, and the second autocollimator 11 as angle measuring devices, effectively improving the resolution of the angle measuring devices. Through experimental verification, the angle resolution of the first autocollimator 10 and the second autocollimator 11 can reach the micro-nano arc degree level, solving the problem that the angle measuring device cannot detect tiny angles;

[0075] The present invention uses a micro-nano arc degree level angle generating method based on macro-micro combined drive. The first lead screw motor 42, the second lead screw motor 44 with large stroke and low displacement resolution are combined with the first piezoelectric ceramic 41, the second piezoelectric ceramic 43 with small stroke and high displacement resolution, respectively realizing rough positioning within a large stroke range and precise compensation within a small range, enabling the angle generating device to generate tiny angles at the micro-nano arc degree level throughout the full stroke and solving the problem that the angle generating device cannot balance large stroke and high resolution;

[0076] At the same time, the present invention places the angle generating device and the angle measuring device on the metrology frame 21, and performs real-time compensation on the angle generating device and the angle measuring device through the ambient temperature, humidity, and pressure data collected by the first temperature sensor 16, the second temperature sensor 17, the third temperature sensor 18, the humidity sensor 19, and the pressure sensor 20, reducing the influence of the environment on the system device and solving the problem that the small angle checker does not have high stability;

[0077] Therefore, compared with the traditional system device, the present invention has the technical advantages of being able to check two-dimensional angles, the resolution of the angle generating device and the angle measuring device can reach the micro-nano arc degree level, and the system device has high stability. Specific Embodiment 2

[0079] This embodiment is an embodiment of a high-stability two-dimensional angle checker based on the SA-BP neural network.

[0080] The high-stability two-dimensional angle checker based on the SA-BP neural network in this embodiment has a structural schematic diagram as shown in Figure 3a and Figure 3b shown.

[0081] On the basis of the first specific embodiment, in this embodiment, the positions of the first lead screw motor 42 and the second lead screw motor 44 on the base 7 are both located on the same straight line parallel to the pitch angle rotation axis, and the position of the workbench support 3 on the base 7 is located on the perpendicular bisector of the line connecting the positions of the first lead screw motor 42 and the second lead screw motor 44, as Figure 3a and Figure 3b shown.

[0082] The embodiment of the high-stability micro-nano arc-degree two-dimensional angle inspection method of this embodiment includes the following steps:

[0083] Step a: Use a standard instrument as the output value of the SA-BP neural network, that is, the calibrated measurement results X and Y. Use the measured temperature values a, b, c of the first temperature sensor 16, the second temperature sensor 17, the third temperature sensor 18, the humidity sensor 19, and the air pressure sensor 20, the humidity value d, the air pressure value e, and the angle measurement results x, y of the first autocollimator 10 and the second autocollimator 11 as the input values of the SA-BP neural network, and use these data to train the SA-BP neural network of the two-dimensional angle inspection device;

[0084] Step b: The first temperature sensor 16, the second temperature sensor 17, the third temperature sensor 18, the humidity sensor 19, and the air pressure sensor 20 start to collect data, and send the data to the main control module circuit board 14 through the environmental compensation module circuit board 13. The main control module circuit board 14 uses the SA-BP neural network to calculate the calibrated measurement results according to the data to achieve real-time compensation; the main control module circuit board 14 sends a zeroing instruction to the display and input module circuit board 15 to make the ribbed workbench 1 in both the roll angle direction and the pitch angle direction in the zero position, place the instrument to be calibrated on the ribbed workbench 1 and zero the reading;

[0085] Step c: Send a roll angle generation instruction to the display and input module circuit board 15. After receiving the instruction, the main control module circuit board 14 controls the first piezoelectric ceramic 41 and the first lead screw motor 42 to generate a total displacement amount h1 under the feedback of the measurement value of the first autocollimator 10 by the drive module circuit board 12, and controls the second piezoelectric ceramic 43 and the second lead screw motor 44 to generate a total displacement amount h2, so that the ribbed workbench 1 generates the standard angle required for the instrument to be calibrated in the roll angle direction. Record the roll angle reading of the system device as s1, and at the same time record the roll angle display value of the instrument to be calibrated as α1. α1 - s1 is the roll angle indication error of the instrument to be calibrated at the inspection point; where s1 = f1(h1, h2), h1 = f2(h2), and f1 and f2 represent two functions;

[0086] Step d: Repeat step c to complete the indication error verification of all inspection points of the instrument to be calibrated in the roll angle direction;

[0087] Step e: Send a zeroing instruction to the display and input module circuit board 15 to make the ribbed workbench 1 in the roll angle direction and pitch angle direction at zero again, and zero the reading of the instrument to be calibrated.

[0088] Step f: Send a pitch angle generation instruction to the display and input module circuit board 15. After the main control module circuit board 14 receives the instruction, the drive module circuit board 12 controls the first piezoelectric ceramic 41, the first lead screw motor 42, the second piezoelectric ceramic 43, and the second lead screw motor 44 to all generate a total displacement of h3 under the feedback of the measurement value of the second autocollimator 11, so that the ribbed workbench 1 generates the standard angle required for the instrument to be calibrated in the pitch angle direction. Record the pitch angle reading of the system device as s2, and at the same time record the pitch angle display value of the instrument to be calibrated as α2. α2 - s2 is the pitch angle indication error of the instrument to be calibrated at the inspection point. Among them, s2 = f3(h3), and f3 represents a function.

[0089] Step g: Repeat step f to complete the indication error calibration of all inspection points of the instrument to be calibrated in the pitch angle direction; Specific Example Three

[0090] This embodiment is an embodiment of a high-stability two-dimensional angle inspection device based on the SA-BP neural network.

[0091] The high-stability two-dimensional angle inspection device based on the SA-BP neural network in this embodiment has a structural schematic diagram as Figure 4a and Figure 4b shown.

[0092] On the basis of Specific Example One, the positions of the workbench support 3 and the first lead screw motor 42 on the base 7 are both on the same straight line parallel to the roll angle rotation axis, and the position of the second lead screw motor 44 on the base 7 is on the perpendicular bisector of the line connecting the positions of the workbench support 3 and the first lead screw motor 42, as Figure 4a and Figure 4b shown.

[0093] This embodiment of the high-stability micro-nano arc-minute level two-dimensional angle inspection method includes the following steps:

[0094] Step a: Use a standard instrument as the output value of the SA-BP neural network, that is, the calibrated measurement results X and Y. Use the measured temperature values a, b, c of the first temperature sensor 16, the second temperature sensor 17, the third temperature sensor 18, the humidity sensor 19, and the pressure sensor 20, the humidity value d, the pressure value e, and the angle measurement results x, y of the first autocollimator 10 and the second autocollimator 11 as the input values of the SA-BP neural network, and use these data to train the SA-BP neural network of the two-dimensional angle inspection device.

[0095] Step b: The first temperature sensor 16, the second temperature sensor 17, the third temperature sensor 18, the humidity sensor 19, and the air pressure sensor 20 start to collect data, and send the data to the main control module circuit board 14 through the environmental compensation module circuit board 13. The main control module circuit board 14 calculates the calibrated measurement result using the SA-BP neural network based on the data to achieve real-time compensation. The main control module circuit board 14 sends a zero adjustment instruction to the display and input module circuit board 15 to make the ribbed workbench 1 in both the roll angle direction and the pitch angle direction at the zero position. Place the instrument to be calibrated on the ribbed workbench 1 and zero the reading;

[0096] Step c: Send a roll angle generation instruction to the display and input module circuit board 15. After receiving the instruction, the main control module circuit board 14 controls the second piezoelectric ceramic 43 and the second lead screw motor 44 to generate a total displacement h1 under the feedback of the measurement value of the first autocollimator 10 by the drive module circuit board 12, so that the ribbed workbench 1 generates the standard angle required for the instrument under test in the roll angle direction. Record the roll angle reading of the system device as s1, and at the same time record the roll angle display value of the instrument under test as α1. α1 - s1 is the roll angle indication error of the instrument under test at the test point. Among them, s1 = f1(h1), and f1 represents a function;

[0097] Step d: Repeat step c to complete the indication error verification of all test points of the instrument under test in the roll angle direction;

[0098] Step e: Send a zero adjustment instruction to the display and input module circuit board 15 to make the ribbed workbench 1 in both the roll angle direction and the pitch angle direction at the zero position again, and zero the reading of the instrument under test;

[0099] Step f: Send a pitch angle generation instruction to the display and input module circuit board 15. After receiving the instruction, the main control module circuit board 14 controls the first piezoelectric ceramic 41 and the first lead screw motor 42 to generate a total displacement h2, and controls the second piezoelectric ceramic 43 and the second lead screw motor 44 to generate a total displacement h3 under the feedback of the measurement value of the second autocollimator 11 by the drive module circuit board 12, so that the ribbed workbench 1 generates the standard angle required for the instrument under test in the pitch angle direction. Record the pitch angle reading of the system device as s2, and at the same time record the pitch angle display value of the instrument under test as α2. α2 - s2 is the pitch angle indication error of the instrument under test at the test point. Among them, s2 = f2(h2, h3), h2 = f3(h3), and f2 and f3 represent two functions;

[0100] Step g: Repeat step f to complete the indication error verification of all test points of the instrument under test in the pitch angle direction; Specific Example Four

[0101] This embodiment is an embodiment of a high-stability two-dimensional angle inspection device based on the SA-BP neural network.

[0102] The high-stability two-dimensional angle inspection device based on the SA-BP neural network in this embodiment is shown in the structural schematic diagrams such as Figure 5a , Figure 5b and Figure 6 .

[0103] Based on the specific first embodiment, the positions of the workbench support 3 and the first lead screw motor 42 on the base 7 are both located on the same straight line parallel to the roll angle rotation axis, and the positions of the first lead screw motor 42 and the second lead screw motor 44 on the base 7 are both located on the same straight line parallel to the pitch angle rotation axis, as shown in Figure 5a , Figure 5b and Figure 6 .

[0104] Or

[0105] Based on the specific first embodiment, the positions of the first lead screw motor 42 and the second lead screw motor 44 on the base 7 are both located on the same straight line parallel to the roll angle rotation axis, and the positions of the workbench support 3 and the second lead screw motor 44 on the base 7 are both located on the same straight line parallel to the pitch angle rotation axis, as shown in Figure 5a , Figure 5b and Figure 6 .

[0106] The embodiment of the high-stability micro-nano arc magnitude two-dimensional angle inspection method in this embodiment includes the following steps:

[0107] Step a: Using a standard instrument as the output value of the SA-BP neural network, that is, the calibrated measurement results X and Y, using the measured temperature values a, b, c of the first temperature sensor 16, the second temperature sensor 17, the third temperature sensor 18, the humidity sensor 19, and the air pressure sensor 20, the humidity value d, the air pressure value e, and the angle measurement results x, y of the first autocollimator 10 and the second autocollimator 11 as the input values of the SA-BP neural network, and training the SA-BP neural network of the two-dimensional angle inspection device using these data;

[0108] Step b: The first temperature sensor 16, the second temperature sensor 17, the third temperature sensor 18, the humidity sensor 19, and the air pressure sensor 20 start to collect data, and send the data to the main control module circuit board 14 through the environmental compensation module circuit board 13. The main control module circuit board 14 calculates the calibrated measurement results using the SA-BP neural network according to the data to achieve real-time compensation; the main control module circuit board 14 sends a zeroing instruction to the display and input module circuit board 15 to make the ribbed workbench 1 in both the roll angle direction and the pitch angle direction at the zero position, place the instrument to be calibrated on the ribbed workbench 1 and zero the reading;

[0109] Step c: Send a roll angle generation command to the display and input module circuit board 15. After the main control module circuit board 14 receives the command, the drive module circuit board 12 controls the second piezoelectric ceramic 43 and the second lead screw motor 44 to generate a total displacement h1 under the feedback of the measurement value of the first autocollimator 10, so that the ribbed workbench 1 generates the standard angle required for the instrument under test in the roll angle direction. Record the roll angle reading of the system device as s1, and at the same time record the roll angle display value of the instrument under test as α1. α1 - s1 is the roll angle indication error of the instrument under test at the test point. Among them, s1 = f1(h1), and f1 represents a function;

[0110] Or

[0111] Send a roll angle generation command to the display and input module circuit board 15. After the main control module circuit board 14 receives the command, the drive module circuit board 12 controls both the first piezoelectric ceramic 41, the first lead screw motor 42, the second piezoelectric ceramic 43, and the second lead screw motor 44 to generate a total displacement h1 under the feedback of the measurement value of the first autocollimator 10, so that the ribbed workbench 1 generates the standard angle required for the instrument under test in the roll angle direction. Record the roll angle reading of the system device as s1, and at the same time record the roll angle display value of the instrument under test as α1. α1 - s1 is the roll angle indication error of the instrument under test at the test point. Among them, s1 = f1(h1), and f1 represents a function;

[0112] Step d: Repeat step c to complete the indication error verification of all test points of the instrument under test in the roll angle direction;

[0113] Step e: Send a zeroing command to the display and input module circuit board 15 to make the ribbed workbench 1 in the roll angle direction and the pitch angle direction return to the zero position again, and zero the indication of the instrument under test;

[0114] Step f: Send a pitch angle generation command to the display and input module circuit board 15. After the main control module circuit board 14 receives the command, the drive module circuit board 12 controls both the first piezoelectric ceramic 41, the first lead screw motor 42, the second piezoelectric ceramic 43, and the second lead screw motor 44 to generate a total displacement h2 under the feedback of the measurement value of the second autocollimator 11, so that the ribbed workbench 1 generates the standard angle required for the instrument under test in the pitch angle direction. Record the pitch angle reading of the system device as s2, and at the same time record the pitch angle display value of the instrument under test as α2. α2 - s2 is the pitch angle indication error of the instrument under test at the test point. Among them, s2 = f2(h2), and f2 represents a function;

[0115] Or

[0116] Send a pitch angle generation instruction to the display and input module circuit board 15. After the main control module circuit board 14 receives the instruction, the drive module circuit board 12 controls the first piezoelectric ceramic 41 and the first lead screw motor 42 to generate a total displacement h2 under the feedback of the measurement value of the second autocollimator 11, so that the ribbed workbench 1 generates the standard angle required for the instrument under test in the pitch angle direction. Record the pitch angle reading of the system device as s2, and at the same time record the pitch angle display value of the instrument under test as α2. α2 - s2 is the pitch angle indication error of the instrument under test at the inspection point. Among them, s2 = f2(h2), and f2 represents a function;

[0117] Step g: Repeat step f to complete the indication error verification of all inspection points of the instrument under test in the pitch angle direction.

[0118] The above has introduced in detail the high-stability two-dimensional angle inspection device and method based on the SA-BP neural network proposed by the present invention. Specific examples are used in this article to elaborate on the principle and implementation manner of the present invention. The description of the above embodiments is only used to help understand the method and its core idea of the present invention; at the same time, for those of ordinary skill in the art, according to the idea of the present invention, there will be changes in the specific implementation manner and application scope. In summary, the content of this specification should not be construed as a limitation to the present invention.

Claims

1. A high-stability two-dimensional angle inspection device based on SA-BP neural network, characterized in that, It includes a ribbed workbench (1), a workbench rotating shaft (2), a workbench support (3), a driving device (4), a base (7), a first plane mirror (8), a second plane mirror (9), a first autocollimator (10), a second autocollimator (11), a driving module circuit board (12), an environmental compensation module circuit board (13), a main control module circuit board (14), a display and input module circuit board (15), a first temperature sensor (16), a second temperature sensor (17), a third temperature sensor (18), a humidity sensor (19), a barometric pressure sensor (20), and a metering frame (21); the driving device (4) includes a first piezoelectric ceramic (41), a first lead screw motor (42), a second piezoelectric ceramic (43), and a second lead screw motor (44); after the display and input module circuit board (15) receives an angle verification requirement, it sends an angle generation requirement to the driving module circuit board (12) through the main control module circuit board (14) to control the angle generation device, so that the ribbed workbench (1) deflects in the roll or pitch direction; the angle measuring device real-time detects the deflection angle of the ribbed workbench (1) in the two-dimensional direction and sends the measurement result back to the main control module circuit board (14); the main control module circuit board (14) corrects the measurement result by using the SA-BP neural network according to the environmental parameters collected by the environmental compensation module circuit board (13); the main control module circuit board (14) finally controls the angle generation device according to the corrected angle measurement result to achieve closed-loop feedback compensation; The angle generation device is composed of a ribbed workbench (1), a workbench rotating shaft (2), a workbench support (3), and a driving device (4). The workbench rotating shaft (2) and the workbench support (3) are coaxial. The first piezoelectric ceramic (41) and the first lead screw motor (42) are coaxial. The second piezoelectric ceramic (43) and the second lead screw motor (44) are coaxial. The positions of the workbench support (3) and the first lead screw motor (42) on the base (7) are both located on the same straight line parallel to the roll angle rotation axis. The positions of the workbench support (3) and the second lead screw motor (44) on the base (7) are both located on the same straight line parallel to the pitch angle rotation axis. The ribbed workbench (1) is connected to the workbench support (3) through the workbench rotating shaft (2) and can deflect by a small angle in both the roll and pitch directions under the push of the driving device (4); The angle measuring device is composed of a first plane mirror (8), a second plane mirror (9), a first autocollimator (10), and a second autocollimator (11). After the ribbed workbench (1) deflects in the two-dimensional direction, the first autocollimator (10) measures the roll angle through the first plane mirror (8), and the second autocollimator (11) measures the pitch angle through the second plane mirror (9); The first piezoelectric ceramic (41) and the first lead screw motor (42), and the second piezoelectric ceramic (43) and the second lead screw motor (44) respectively form two sets of macro-micro combined drive devices; after the first lead screw motor (42) and the second lead screw motor (44) achieve rough positioning within a large stroke range, the first piezoelectric ceramic (41) and the second piezoelectric ceramic (43) perform precise compensation under the closed-loop feedback of the angle measuring device. Both the angle generating device and the angle measuring device are located on the metering frame (21). The first temperature sensor (16), the second temperature sensor (17), the third temperature sensor (18), the humidity sensor (19), and the air pressure sensor (20) respectively collect the temperature, humidity, and pressure data of the environment, and send the data to the main control module circuit board (14) through the environmental compensation module circuit board (13), and then realize the real-time environmental compensation for the angle generating device and the angle measuring device through the SA-BP neural network, so as to reduce the influence of the environment on the system device and improve the stability of the small angle checker.

2. The high-stability two-dimensional angle inspection device based on SA-BP neural network according to claim 1, characterized in that, The positions of the first lead screw motor (42) and the second lead screw motor (44) on the base (7) are both on the same straight line parallel to the pitch angle rotation axis, and the position of the workbench support (3) on the base (7) is on the perpendicular bisector of the line connecting the positions of the first lead screw motor (42) and the second lead screw motor (44).

3. The high-stability two-dimensional angle inspection device based on SA-BP neural network according to claim 1, characterized in that, The positions of the workbench support (3) and the first lead screw motor (42) on the base (7) are both on the same straight line parallel to the roll angle rotation axis, and the position of the second lead screw motor (44) on the base (7) is on the perpendicular bisector of the line connecting the positions of the workbench support (3) and the first lead screw motor (42).

4. The high-stability two-dimensional angle inspection device based on SA-BP neural network according to claim 1, characterized in that, The positions of the workbench support (3) and the first lead screw motor (42) on the base (7) are both on the same straight line parallel to the roll angle rotation axis, and the positions of the first lead screw motor (42) and the second lead screw motor (44) on the base (7) are both on the same straight line parallel to the pitch angle rotation axis. Or The positions of the first lead screw motor (42) and the second lead screw motor (44) on the base (7) are both on the same straight line parallel to the roll angle rotation axis, and the positions of the workbench support (3) and the second lead screw motor (44) on the base (7) are both on the same straight line parallel to the pitch angle rotation axis.

5. A high-stability micro-nano arc-minute level two-dimensional angle inspection method implemented on the high-stability two-dimensional angle inspection device based on SA-BP neural network according to claim 1, characterized in that, It includes the following steps: Step a: Use the standard instrument as the output value of the SA-BP neural network, that is, the calibrated measurement results X and Y. Use the measured temperature values a, b, c, the humidity value d, the air pressure value e of the first temperature sensor (16), the second temperature sensor (17), the third temperature sensor (18), the humidity sensor (19), and the air pressure sensor (20) and the angle measurement results x, y of the first autocollimator (10) and the second autocollimator (11) as the input values of the SA-BP neural network, and use these data to train the SA-BP neural network of the two-dimensional angle inspection device. Step b: The first temperature sensor (16), the second temperature sensor (17), the third temperature sensor (18), the humidity sensor (19), and the air pressure sensor (20) start to collect data, and send the data to the main control module circuit board (14) through the environmental compensation module circuit board (13). The main control module circuit board (14) calculates the calibrated measurement results using the SA-BP neural network based on the data to achieve real-time compensation. The main control module circuit board (14) sends a zeroing instruction to the display and input module circuit board (15) to make the ribbed workbench (1) in the roll angle direction and the pitch angle direction both at zero position, place the instrument to be calibrated on the ribbed workbench (1) and zero the reading; Step c: Send a roll angle generation instruction to the display and input module circuit board (15). After receiving the instruction, the main control module circuit board (14) controls the second piezoelectric ceramic (43) and the second lead screw motor (44) to generate a total displacement h1 under the feedback of the measurement value of the first autocollimator (10) by the drive module circuit board (12), so that the ribbed workbench (1) generates the standard angle required for the instrument under test in the roll angle direction. Record the roll angle reading of the system device as s1, and at the same time record the roll angle display value of the instrument under test as α1. α1 - s1 is the roll angle indication error of the instrument under test at the test point. Among them, s1 = f1(h1), and f1 represents a function; Step d: Repeat Step c to complete the indication error verification of all test points of the instrument under test in the roll angle direction; Step e: Send a zeroing instruction to the display and input module circuit board (15) to make the ribbed workbench (1) in the roll angle direction and the pitch angle direction at zero position again, and zero the reading of the instrument under test; Step f: Send a pitch angle generation instruction to the display and input module circuit board (15). After receiving the instruction, the main control module circuit board (14) controls the first piezoelectric ceramic (41) and the first lead screw motor (42) to generate a total displacement h2 under the feedback of the measurement value of the second autocollimator (11) by the drive module circuit board (12), so that the ribbed workbench (1) generates the standard angle required for the instrument under test in the pitch angle direction. Record the pitch angle reading of the system device as s2, and at the same time record the pitch angle display value of the instrument under test as α2. α2 - s2 is the pitch angle indication error of the instrument under test at the test point. Among them, s2 = f2(h2), and f2 represents a function; Step g: Repeat Step f to complete the indication error verification of all test points of the instrument under test in the pitch angle direction.

6. A high-stability micro-nano arc-minute level two-dimensional angle inspection method implemented on the high-stability two-dimensional angle inspection device based on SA-BP neural network according to claim 2, characterized in that, Including the following steps: Step a: Use a standard instrument as the output value of the SA-BP neural network, i.e., the calibrated measurement results X and Y. Use the measured temperature values a, b, c of the first temperature sensor (16), the second temperature sensor (17), the third temperature sensor (18), the humidity value d of the humidity sensor (19), the air pressure value e of the air pressure sensor (20), and the angle measurement results x, y of the first autocollimator (10) and the second autocollimator (11) as the input values of the SA-BP neural network. Use these data to train the SA-BP neural network of the two-dimensional angle inspection device; Step b: The first temperature sensor (16), the second temperature sensor (17), the third temperature sensor (18), the humidity sensor (19), and the air pressure sensor (20) start to collect data. The data is sent to the main control module circuit board (14) through the environmental compensation module circuit board (13). The main control module circuit board (14) calculates the calibrated measurement results using the SA-BP neural network according to the data to achieve real-time compensation. The main control module circuit board (14) sends a zeroing instruction to the display and input module circuit board (15) to make the ribbed workbench (1) in the roll angle direction and the pitch angle direction both at zero position. Place the instrument to be calibrated on the ribbed workbench (1) and zero the reading; Step c: Send a roll angle generation instruction to the display and input module circuit board (15). After receiving the instruction, the main control module circuit board (14) controls the first piezoelectric ceramic (41) and the first lead screw motor (42) to generate a total displacement h1 and the second piezoelectric ceramic (43) and the second lead screw motor (44) to generate a total displacement h2 under the feedback of the measurement value of the first autocollimator (10) by the drive module circuit board (12), so that the ribbed workbench (1) generates the standard angle required for the instrument to be calibrated in the roll angle direction. Record the roll angle reading of the system device as s1, and at the same time record the roll angle display value of the instrument to be calibrated as α1. α1 - s1 is the roll angle indication error of the instrument to be calibrated at the inspection point. Among them, s1 = f1(h1, h2), h1 = f2(h2), and f1 and f2 represent two functions; Step d: Repeat step c to complete the indication error verification of all inspection points of the instrument to be calibrated in the roll angle direction; Step e: Send a zeroing instruction to the display and input module circuit board (15) to make the ribbed workbench (1) in the roll angle direction and the pitch angle direction at zero position again, and zero the reading of the instrument to be calibrated; Step f: Send the pitch angle generation instruction to the display and input module circuit board (15). After receiving the instruction, the main control module circuit board (14) controls the first piezoelectric ceramic (41), the first lead screw motor (42), the second piezoelectric ceramic (43), and the second lead screw motor (44) to all generate a total displacement of h3 under the feedback of the measurement value of the second autocollimator (11), so that the ribbed workbench (1) generates the standard angle required for the instrument under test in the pitch angle direction. Record the pitch angle reading of the system device as s2, and at the same time record the pitch angle display value of the instrument under test as α2. α2 - s2 is the pitch angle indication error of the instrument under test at the inspection point. Among them, s2 = f3(h3), and f3 represents a function; Step g: Repeat step f to complete the indication error verification of all inspection points of the instrument under test in the pitch angle direction.

7. A high-stability micro-nano arc-second level two-dimensional angle inspection method implemented on the high-stability two-dimensional angle inspection device based on the SA-BP neural network according to claim 3, characterized in that It includes the following steps: Step a: Use the standard instrument as the output value of the SA-BP neural network, that is, the calibrated measurement results X and Y. Use the measured temperature values a, b, c of the first temperature sensor (16), the second temperature sensor (17), the third temperature sensor (18), the humidity sensor (19), and the pressure sensor (20), the humidity value d, the pressure value e, and the angle measurement results x, y of the first autocollimator (10) and the second autocollimator (11) as the input values of the SA-BP neural network, and use these data to train the SA-BP neural network of the two-dimensional angle inspection device; Step b: The first temperature sensor (16), the second temperature sensor (17), the third temperature sensor (18), the humidity sensor (19), and the pressure sensor (20) start to collect data, and send the data to the main control module circuit board (14) through the environmental compensation module circuit board (13). The main control module circuit board (14) calculates the calibrated measurement results using the SA-BP neural network based on the data to achieve real-time compensation. The main control module circuit board (14) sends a zeroing instruction to the display and input module circuit board (15) to make the ribbed workbench (1) in the roll angle direction and the pitch angle direction both at the zero position, place the instrument under test on the ribbed workbench (1) and zero the reading; Step c: Send the roll angle generation instruction to the display and input module circuit board (15). After receiving the instruction, the main control module circuit board (14) controls the second piezoelectric ceramic (43) and the second lead screw motor (44) to generate a total displacement of h1 under the feedback of the measurement value of the first autocollimator (10), so that the ribbed workbench (1) generates the standard angle required for the instrument under test in the roll angle direction. Record the roll angle reading of the system device as s1, and at the same time record the roll angle display value of the instrument under test as α1. α1 - s1 is the roll angle indication error of the instrument under test at the inspection point. Among them, s1 = f1(h1), and f1 represents a function; Step d: Repeat step c to complete the indication error verification of all inspection points of the instrument under test in the roll angle direction; Step e: Send a zeroing instruction to the display and input module circuit board (15) to make the ribbed workbench (1) in the roll angle direction and pitch angle direction return to the zero position again, and zero the reading of the instrument to be calibrated. Step f: Send a pitch angle generation instruction to the display and input module circuit board (15). After receiving the instruction, the main control module circuit board (14) controls the first piezoelectric ceramic (41) and the first lead screw motor (42) to generate a total displacement h2, and controls the second piezoelectric ceramic (43) and the second lead screw motor (44) to generate a total displacement h3 under the feedback of the measurement value of the second autocollimator (11) by the drive module circuit board (12), so that the ribbed workbench (1) generates the standard angle required for the instrument to be calibrated in the pitch angle direction. Record the pitch angle reading of the system device as s2, and at the same time record the pitch angle display value of the instrument to be calibrated as α2. α2 - s2 is the pitch angle indication error of the instrument to be calibrated at the inspection point. Wherein, s2 = f2(h2, h3), h2 = f3(h3), and f2 and f3 represent two functions. Step g: Repeat step f to complete the indication error calibration of all inspection points of the instrument to be calibrated in the pitch angle direction.

8. A high-stability micro-nano arc-second level two-dimensional angle inspection method implemented on the high-stability two-dimensional angle inspection device based on the SA-BP neural network according to claim 4, characterized in that It includes the following steps: Step a: Use the standard instrument as the output value of the SA - BP neural network, that is, the calibrated measurement results X and Y. Use the measured temperature values a, b, c of the first temperature sensor (16), the second temperature sensor (17), the third temperature sensor (18), the humidity sensor (19), and the pressure sensor (20), the humidity value d, the pressure value e, and the angle measurement results x, y of the first autocollimator (10) and the second autocollimator (11) as the input values of the SA - BP neural network, and use these data to train the SA - BP neural network of the two - dimensional angle inspection device. Step b: The first temperature sensor (16), the second temperature sensor (17), the third temperature sensor (18), the humidity sensor (19), and the pressure sensor (20) start to collect data, and send the data to the main control module circuit board (14) through the environmental compensation module circuit board (13). The main control module circuit board (14) calculates the calibrated measurement results using the SA - BP neural network according to the data to achieve real - time compensation. The main control module circuit board (14) sends a zeroing instruction to the display and input module circuit board (15) to make the ribbed workbench (1) in both the roll angle direction and the pitch angle direction at the zero position, place the instrument to be calibrated on the ribbed workbench (1) and zero the reading. Step c: Send a roll angle generation command to the display and input module circuit board (15). After the main control module circuit board (14) receives the command, the drive module circuit board (12) controls the second piezoelectric ceramic (43) and the second lead screw motor (44) to generate a total displacement h1 under the feedback of the measurement value of the first autocollimator (10), so that the ribbed workbench (1) generates the standard angle required for the instrument under test in the roll angle direction. Record the roll angle reading of the system device as s1, and at the same time record the roll angle display value of the instrument under test as α1. α1 - s1 is the roll angle indication error of the instrument under test at the inspection point. Wherein, s1 = f1(h1), and f1 represents a function; Or Send a roll angle generation command to the display and input module circuit board (15). After the main control module circuit board (14) receives the command, the drive module circuit board (12) controls both the first piezoelectric ceramic (41), the first lead screw motor (42), the second piezoelectric ceramic (43), and the second lead screw motor (44) to generate a total displacement h1 under the feedback of the measurement value of the first autocollimator (10), so that the ribbed workbench (1) generates the standard angle required for the instrument under test in the roll angle direction. Record the roll angle reading of the system device as s1, and at the same time record the roll angle display value of the instrument under test as α1. α1 - s1 is the roll angle indication error of the instrument under test at the inspection point. Wherein, s1 = f1(h1), and f1 represents a function; Step d: Repeat step c to complete the indication error verification of all inspection points of the instrument under test in the roll angle direction; Step e: Send a zero adjustment command to the display and input module circuit board (15) to make the ribbed workbench (1) in the roll angle direction and the pitch angle direction return to the zero position again, and zero adjust the indication of the instrument under test; Step f: Send a pitch angle generation command to the display and input module circuit board (15). After the main control module circuit board (14) receives the command, the drive module circuit board (12) controls both the first piezoelectric ceramic (41), the first lead screw motor (42), the second piezoelectric ceramic (43), and the second lead screw motor (44) to generate a total displacement h2 under the feedback of the measurement value of the second autocollimator (11), so that the ribbed workbench (1) generates the standard angle required for the instrument under test in the pitch angle direction. Record the pitch angle reading of the system device as s2, and at the same time record the pitch angle display value of the instrument under test as α2. α2 - s2 is the pitch angle indication error of the instrument under test at the inspection point. Wherein, s2 = f2(h2), and f2 represents a function; Or Send a pitch angle generation instruction to the display and input module circuit board (15). After the main control module circuit board (14) receives the instruction, the drive module circuit board (12) controls the first piezoelectric ceramic (41) and the first lead screw motor (42) to generate a total displacement h2 under the feedback of the measurement value of the second autocollimator (11), so that the ribbed workbench (1) generates the standard angle required for the instrument under test in the pitch angle direction. Record the pitch angle reading of the system device as s2, and at the same time record the pitch angle display value of the instrument under test as α2. α2 - s2 is the pitch angle indication error of the instrument under test at the test point. Among them, s2 = f2(h2), and f2 represents a function; Step g: Repeat step f to complete the indication error verification of all test points of the instrument under test in the pitch angle direction.

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