An apparatus for improving the repeatability of electrodeposition

Abstract

The utility model provides an apparatus for improving the repeatability of electrodeposition, comprising a support column, a moving mechanism provided at the upper part of the support column, the moving mechanism comprising a translation member and a rotary telescopic member, the rotary telescopic member being connected to the connecting end of a clamping arm below, the clamping end of the clamping arm being respectively provided with upper and lower clamping plates that are parallel to each other, the bottom surface of the upper clamping plate being provided with a first mounting groove, an anode built-in metal sheet being arranged in the groove, the anode built-in metal sheet being provided with anode fixing clamps on both sides, the top surface of the lower clamping plate being provided with a second mounting groove, a weak acid-resistant silica gel plate being arranged in the groove, a cathode built-in metal sheet being arranged on the weak acid-resistant silica gel plate, the cathode built-in metal sheet being provided with cathode fixing clamps on both sides, the clamping arm being moved leftward and rightward, upward and downward and rotated through the moving mechanism, the electrolyte being refreshed, the anode fixing clamps and the cathode fixing clamps being able to ensure that the copper sheet is attached to the anode built-in metal sheet, the deposited sample being attached to the cathode built-in metal sheet, the electrolyte being prevented from penetrating in, the surface area of electrodeposition being unchanged, and the consistency of current density being improved.

Description

TECHNICAL FIELD

[0001] The application relates to a device for modifying the surface of a copper substrate by electrodeposition, in particular to a device for improving the repeatability of electrodeposition. BACKGROUND

[0002] During the operation of electronic components, excessive temperature is one of the main reasons for the failure of electronic components, so higher requirements are put forward for heat dissipation. Researchers improve various technologies to modify the heat dissipation surface to improve the heat dissipation efficiency, and gradually pay attention to the use of electrodeposition to modify the surface.

[0003] In the electrodeposition process, the electrolyte concentration and the current density have a significant impact on the electrodeposition effect. First, because the heat dissipation surface is complex and variable, there is a flow dead zone, so the electrolyte near the heat dissipation surface cannot be updated in time, and as the electrodeposition proceeds, the electrolyte concentration on the heat dissipation surface gradually decreases, thereby making the electrodeposition effect worse. In the past, magnetic sub-stirring was mostly used to stir the electrolyte to make the electrolyte flow and update, but the effect was limited, especially when the electrolytic tank was large, the effect was worse. Second, in the electrodeposition process, to ensure that the set current density meets the actual electrodeposition requirements, the surface area participating in electrodeposition needs to be unchanged and the surface needs to be in good contact with the electrode. In the past, threaded sealing tape was used to make the excess and unnecessary heat dissipation surface not participate in electrodeposition, but the effect was not good, and the tape was easy to peel off during stirring, causing the current density to be inconsistent with the actual needs, resulting in a high failure rate.

[0004] In the electrodeposition process, there are problems that the electrolyte cannot be updated in time and the required current density cannot be guaranteed to be consistent, which makes the electrodeposition failure rate high and the repeatability low.

[0005] Patent application CN213203253U discloses an electrodeposition device for preparing 63Ni beta source, which comprises an electrodeposition tank body, an anode wire, a base, a cathode lead-out gasket, a rubber gasket, a spring and an electrodeposition tank support. The electrodeposition device of the present application has a structure in which the electrodeposition tank body and the base are connected to each other, which is very convenient to use and disassemble. The electrodeposition tank body and the base connected together are then installed as a whole in the electrodeposition tank support for corresponding electrodeposition operation. The whole device is convenient and fast to use, and has high working efficiency. However, it still does not solve the problems of poor electrolyte updating efficiency and inconsistent current density. SUMMARY

[0006] In order to overcome the defects of the prior art, the purpose of the present application is to provide a device for improving the repeatability of electrodeposition, which can adjust the up-down and left-right directions of the clamping arm during the electrodeposition process through a moving mechanism and rotate the stirring, so that the electrolyte can be updated in time when the heat dissipation surface (copper sheet and sample) is electrodeposited in the electrolytic cell, thereby improving the repeatability of electrodeposition and ensuring the stable movement of the clamping arm. Meanwhile, the copper sheet is fixed with the anode built-in metal sheet by the anode fixed clamp, so that the heat dissipation surface (copper sheet and sample to be deposited) is fixed. On the one hand, the cathode fixed clamp and the weak acid resistant silica gel cooperate to ensure good contact between the sample and the cathode built-in metal sheet and prevent the electrolyte from penetrating. On the other hand, the electrolyte can be updated in time and the set current density can be consistent with the actual required current density.

[0007] In order to achieve the above purpose, the technical scheme adopted by the present application is:

[0008] A device for improving the repeatability of electrodeposition, comprising a support column 11, a moving mechanism provided on the upper part of the support column 11, the moving mechanism comprising a translation member and a rotary telescopic member below the translation member, the rotary telescopic member being connected to the connecting end of a clamping arm 1, the clamping end of the clamping arm 1 being provided with upper and lower clamping plates 1-1 and 1-2 which are parallel to each other, the bottom surface of the upper clamping plate 1-1 being provided with a first mounting groove 1-3, the first mounting groove 1-3 being provided with an anode built-in metal sheet 3, the two sides of the anode built-in metal sheet 3 being provided with an anode fixed clamp 6, the top surface of the lower clamping plate 1-2 being provided with a second mounting groove 1-4, the second mounting groove 1-4 being provided with a weak acid resistant silica gel plate 5, the weak acid resistant silica gel plate 5 being provided with a cathode built-in metal sheet 4, the two sides of the cathode built-in metal sheet 4 being provided with a cathode fixed clamp 7.

[0009] The anode wire 2-1 connected to the anode built-in metal sheet 3 and the cathode wire 2-2 connected to the cathode built-in metal sheet 4 respectively penetrate from the inside of the clamping arm 1 to the outside.

[0010] The translation member comprises a sliding bar 10 and a sliding block 9 which are arranged between the support columns 11, one end of the sliding bar 10 being connected to the output shaft of a first motor 12 arranged on the support column through a coupling, and the sliding bar 10 adopting a lead screw, the sliding block 9 being provided with a lead screw nut which is matched with the sliding bar 10.

[0011] The rotary telescopic member comprises a second motor 9-1 arranged below the sliding block 9, the power output shaft of the second motor 9-1 being fixedly connected to the top end of a sleeve 9-2 through a coupling, the inside of the sleeve 9-2 being sleeved with the upper part of the clamping arm 1, the side wall of the sleeve being provided with a threaded hole 9-3, a screw 8-1 at one end of a clamping arm fixer 8 being matched with the threaded hole 9-3, the other end of the clamping arm fixer 8 being provided with a handle 8-2.

[0012] The two ends of the anode fixed clamp 6 and the cathode fixed clamp 7 are respectively provided with a first butterfly nut bolt pair 13 and a second butterfly nut bolt pair 14.

[0013] Compared with the prior art, the present application has the following advantages:

[0014] 1. By tightening the anode fixing clamp 6 and the cathode fixing clamp 7, the heat dissipation surface (copper sheet and sample to be deposited) can be in close contact with the electrode, and the cathode-embedded metal sheet 4 is wrapped around the cathode-embedded metal sheet 4, and when the sample is pressed down, the sample base is wrapped around the cathode-embedded metal sheet 4, preventing the electrolyte solution from entering, so that the excess surface does not participate in electrodeposition, ensuring that the current density remains consistent with the actual needs.

[0015] 2. The clamping arm 1 can be moved according to the sample surface structure under the action of the moving mechanism, which is more flexible, and the translation member can ensure smooth horizontal movement of the clamping arm to avoid manual translation from causing vibration to the sample.

[0016] 3. The telescopic rotating member first determines the height of the clamping arm 1 according to the needs, and then manually fixes the position, and the rotating action is completed by the second motor, ensuring the stability during work and easy adjustment.

[0017] 4. The translation member and the telescopic rotating member work together to improve the electrolyte renewal effect and improve the repeatability of electrodeposition.

[0018] 5. The anode and cathode wires are built-in with the clamping arm 1, which can prevent the wires from being tangled during the movement of the clamping arm 1. BRIEF DESCRIPTION OF DRAWINGS

[0019] Figure 1 is a structural schematic diagram of the present application.

[0020] Figure 2 is a sectional structure schematic diagram of the clamping arm 1 of the present application.

[0021] Figure 3 is a sleeve 9-2 structure schematic diagram of the present application.

[0022] In the figure: 1, clamping arm, 1-1, upper clamping plate, 1-2, lower clamping plate, 1-3, first installation slot, 1-4, second installation slot, 2, wire, 2-1, anode wire, 2-2, cathode wire, 3, anode-embedded metal sheet, 4, cathode-embedded metal sheet, 5, weak acid-resistant silica gel, 6, anode fixing clamp, 7, cathode fixing clamp, 8, clamping arm holder, 8-1, screw, 8-2, handle, 9, sliding block, 9-1, second motor, 9-2, sleeve, 9-3, threaded hole, 10, slide bar, 11, support column, 12, first motor, 13, first butterfly nut bolt pair, 14, second butterfly nut bolt pair. DETAILED DESCRIPTION

[0023] The present application will be described in detail below in conjunction with the drawings and examples.

[0024] Example 1

[0025] like Figure 1 As shown, an apparatus for improving electrodeposition repeatability includes a support column 11. A moving mechanism is provided on the upper part of the support column 11. The moving mechanism includes a translation component and a rotating telescopic component below the translation component. The rotating telescopic component is connected to the connecting end of a clamping arm 1. The clamping ends of the clamping arm 1 are respectively provided with an upper clamping plate 1-1 and a lower clamping plate 1-2 that are parallel to each other. The bottom surface of the upper clamping plate 1-1 is provided with a first mounting groove 1-3, in which an anode-embedded metal sheet 3 is disposed. Anode fixing clips 6 are provided on both sides of the anode-embedded metal sheet 3. The top surface of the lower clamping plate 1-2 is provided with a second mounting groove 1-4, in which a weak acid-resistant silicone plate 5 is disposed. A cathode-embedded metal sheet 4 is disposed on the weak acid-resistant silicone plate 5, in which cathode fixing clips 7 are provided on both sides. The anode fixing clips 6 and cathode fixing clips 7 ensure good contact between the copper sheet, the sample, and the electrode.

[0026] The anode wire 2-1 connected to the anode built-in metal plate 3 and the cathode wire 2-2 connected to the cathode built-in metal plate 4 pass through the inside of the clamping arm 1 and are connected to the outside, which can ensure that the wires will not get tangled during the movement of the clamping arm 1.

[0027] The translation component includes a slide bar 10 and a slider 9 disposed between the support columns 11. One end of the slide bar 10 is connected to the output shaft of the first motor 12 disposed on the support column via a coupling to ensure that the clamping arm moves smoothly and horizontally, so as to avoid vibration of the sample caused by manual translation. The slide bar 10 is a lead screw, and the slider 9 is provided with a lead screw nut that is compatible with the slide bar 10.

[0028] The slide bar 10 is a lead screw, and the slider 9 is provided with a lead screw nut that is compatible with the slide bar 10.

[0029] The rotating telescopic component includes a second motor 9-1 located below the slider 9. The power output shaft of the second motor 9-1 is fixedly connected to the top of the sleeve 9-2 via a coupling. The inside of the sleeve 9-2 is fitted with the upper part of the clamping arm 1. The side wall of the sleeve is provided with a threaded hole 9-3. The screw 8-1 at one end of the clamping arm retainer 8 is adapted to the threaded hole 9-3. The other end of the clamping arm retainer 8 is provided with a handle 8-2. The rotating telescopic component first determines the height of the clamping arm 1 as needed, then manually fixes its position. The rotation is completed by the second motor, ensuring stability during operation.

[0030] The sleeve 9-2 can be replaced by an electric telescopic rod.

[0031] The anode fixing clamp 6 and the cathode fixing clamp 7 are respectively provided with a first butterfly nut bolt pair 13 and a second butterfly nut bolt pair 14 at both ends, which are used to tighten and fix the copper sheet and the sample to be deposited.

[0032] Embodiment 2

[0033] Replace the sleeve 9-2 with an electric telescopic rod, the clamping arm 1 is connected with the bottom end of the electric telescopic rod, and the device can automatically adjust the height of the clamping arm after being turned on.

[0034] The working principle of the present application is:

[0035] The copper sheet and the sample to be deposited are fixed on the clamping arm 1 through the anode fixing clamp 6 and the cathode fixing clamp 7 respectively, and the copper sheet is attached to the built-in metal sheet 3 of the anode, and the sample to be deposited is attached to the built-in metal sheet 4 of the cathode, then the height of the clamping arm 1 is adjusted through the sleeve 9-2 in the rotary telescopic piece, so that the lower section of the clamping arm 1 and the upper clamping plate 1-1 and the lower clamping plate 1-2 are completely immersed in the electrolyte in the electrolytic cell, the device is started, the translation piece drives the clamping arm 1 to translate left and right, and the rotary telescopic piece drives the clamping arm 1 to rotate, so that the electrolyte flows on the surface of the sample to be deposited to make the electrolyte fully updated; in addition, the anode fixing clamp 6 and the cathode fixing clamp 7 can ensure that the copper sheet is attached to the built-in metal sheet 3 of the anode, and the sample to be deposited is attached to the built-in metal sheet 4 of the cathode, and prevent the electrolyte from seeping in, and also can ensure that the surface area of the electrodeposition is unchanged, and improve the consistency of current density.

[0036] In the description of the present application, the orientation description such as "up", "down", "left", "right", "horizontal plane" and the like is based on the common placement manner of the present application, and is only for the convenience of description, and does not mean that the present application needs to be placed in a fixed manner, and is not a limitation on the present application. In addition, "built-in" or other words with the meaning of inclusion also include other elements that are explicitly listed, that is, the elements for realizing the method, object or device.

[0037] The device for improving the repeatability of electrodeposition provided by the present application is described in detail above, and its use scene, principle and method are described. For those skilled in the art, modifications, changes and modifications of the present application without departing from the principles and premises of the present application are also within the protection scope.

[0038] Obviously, the embodiments in the above specific embodiments are only used to illustrate the technical solutions of the present application but not limit the present application, although the present application has been described in detail with reference to the above specific embodiments, it should be understood by those skilled in the art that the specific embodiments of the present application can be modified or replaced equivalently without departing from the spirit and scope of the present application, any modification or equivalent replacement without departing from the spirit and scope of the present application should be covered in the scope of claims.

Claims

1. An apparatus for improving the repeatability of electrodeposition, comprising a support column (11), the upper part of the support column (11) being provided with a moving mechanism, the moving mechanism comprising a translation member and a rotary telescopic member below the translation member, the rotary telescopic member being connected to a connecting end of a clamping arm (1), the clamping end of the clamping arm (1) being respectively provided with an upper clamping plate (1-1) and a lower clamping plate (1-2) which are parallel to each other, characterized in that: The upper clamping plate (1-1) bottom surface is provided with a first installation groove (1-3), the first installation groove (1-3) is provided with an anode built-in metal sheet (3), the anode built-in metal sheet (3) is provided with an anode fixing clamp (6) on both sides; The top surface of the lower clamping plate (1-2) is provided with a second installation groove (1-4), the second installation groove (1-4) is provided with a weak acid resistant silica gel plate (5), the weak acid resistant silica gel plate (5) is provided with a cathode built-in metal sheet (4), the cathode built-in metal sheet (4) is provided with a cathode fixing clamp (7) on both sides.

2. The apparatus of claim 1, wherein: The anode wire (2-1) connected with the anode built-in metal sheet (3) and the cathode wire (2-2) connected with the cathode built-in metal sheet (4) are respectively penetrated from the inside of the clamping arm (1) and externally connected.

3. The apparatus of claim 1, wherein: The translation part includes a sliding bar (10) and a sliding block (9) arranged between the support columns (11), one end of the sliding bar (10) is connected with the output shaft of the first motor (12) arranged on the support column (11) through a shaft coupling; The sliding bar (10) adopts a lead screw, and the sliding block (9) is provided with a lead screw nut matched with the sliding bar (10) inside.

4. The apparatus of claim 1, wherein: The rotating telescopic part includes a second motor (9-1) arranged below the sliding block (9), the power output shaft of the second motor (9-1) is fixedly connected with the top end of a sleeve (9-2) through a shaft coupling, the sleeve (9-2) is sleeved with the upper part of the clamping arm (1) inside, the sleeve side wall is provided with a threaded hole (9-3), the screw (8-1) of one end of the clamping arm fixer (8) is matched with the threaded hole (9-3), the other end of the clamping arm fixer (8) is provided with a handle (8-2).

5. The apparatus of claim 4, wherein: The sleeve (9-2) can be replaced by an electric telescopic rod.

6. The apparatus of claim 1, wherein: The anode fixing clamp (6) and the cathode fixing clamp (7) are respectively provided with a first butterfly nut bolt pair (13) and a second butterfly nut bolt pair (14) at both ends.

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