A compact fiber array homogenizing emission device

By using a compact fiber array homogenizing emitter and employing a fiber fine-tuning mechanism and controller to precisely control the laser beam, the problem of uneven laser energy distribution is solved, achieving a low-cost and efficient laser beam homogenization effect, which is applicable to fields such as photolithography and welding.

CN116500797BActive Publication Date: 2026-03-20INST OF OPTICS & ELECTRONICS CHINESE ACAD OF SCI
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2023-04-04
Publication Date
2026-03-20

AI Technical Summary

Technical Problem

In existing technologies, non-uniform laser energy distribution affects the actual application effect of lasers, especially in photolithography and welding, where existing homogenization technologies are costly and difficult to scale.

Method used

A compact fiber array homogenization emission device is adopted. Through the combination of fiber constraint end, emission module and controller, the laser beam is precisely controlled by fiber fine adjustment mechanism and orthogonal series flexible hinge. Combined with CCD or four-quadrant detector to adjust the light intensity distribution, uniform emission of laser fiber is achieved.

Benefits of technology

It achieves uniform distribution of laser beams, reduces costs, and improves the application flexibility and scalability of lasers, making it suitable for large-area, high-intensity beam homogenization applications.

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Abstract

The application discloses a compact optical fiber array homogenization emitting device which is composed of an optical fiber constraint end (1), an emitting module (2) and a controller (3), wherein the emitting module comprises a laser optical fiber (202) and an optical fiber fine adjustment mechanism (201). The device can accurately control the light beam irradiation area by controlling the emitting angle of the laser optical fiber (202) through the optical fiber fine adjustment mechanism (201), and can realize the simultaneous emission or scanning emission of multiple laser optical fibers (202) through the controller (3), so as to realize the full light beam coverage or the polling light beam coverage of the irradiation area, thereby balancing the scanning speed of the irradiation area and the power consumption of the emitting device.
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Description

TECHNICAL FIELD

[0001] The present application relates to homogenization emitting device, in particular to a compact fiber array homogenization emitting device. BACKGROUND

[0002] With the wide application of laser equipment, the non-uniform energy laser will affect the actual application effect, for example, in photolithography, welding, the non-homogenized laser will make the processing effect different at different points of the light spot, therefore, the homogenization technology of the light beam and the light spot has more and more needs. At present, the homogenization technology is mainly realized by two ways of compound eye lens array and aspherical lens, the realization effect of the two ways depends on mirror surface processing, in the case of large area of light spot energy, the engineering application cost will rise exponentially. SUMMARY

[0003] The technical problem of the present application is to realize the homogenization of the light beam and the light spot by the way of fiber array, the method realizes the light intensity homogenization by the way of module design, the structure is compact, the realization cost is low and the expansibility is strong.

[0004] The technical scheme adopted by the present application is: a compact fiber array homogenization emitting device, which is composed of a fiber constraint end 1, an emitting module 2 and a controller 3, wherein the emitting module 2 is arranged in a two-dimensional array, the fiber constraint end 1 is used to realize the rough positioning of the emitting angle of the emitting module 2, the emitting module 2 is composed of a fiber fine adjustment mechanism 201 and a laser fiber 202, the emitting module 2 can accurately adjust the emitting angle of the laser, the controller 3 controls the light emission of the laser fiber 202 of the array emitting module 2 according to a specific logic, the working principle of the device is: the light beam irradiation area can be accurately controlled by controlling the direction of the fiber laser beam, the homogenization area of the specified area intensity can be realized by controlling the light emission sequence of the multiple laser fibers 202, wherein the adjustment method of the fiber fine adjustment mechanism 201 is as follows: an intensity detector is placed at the array light beam focusing position of the emitting module 2, a CCD or a single light intensity detector or a four-quadrant detector is selected, the fiber fine adjustment mechanism 201 is adjusted in turn to ensure the consistency of the intensity distribution of all the laser fibers 202 at the detector position, so as to achieve the consistency of the emitting direction of the laser fiber and the uniformity of the irradiation.

[0005] Further, the fiber constraint end 1 completes the two-dimensional array arrangement of the fiber by the way of module combination, the homogenization area or the light intensity can be increased by the way of module expansion, the accuracy requirement of the incident angle of the fiber constraint end 1 is better than 1°.

[0006] Further, the emitting module 2 accurately adjusts the emitting angle by the fiber fine adjustment mechanism 201, the fiber fine adjustment mechanism 201 is composed of a flexible hinge in series connection, and cooperates with a high-precision jack, the adjustment accuracy is better than 10 microradians.

[0007] Further, the controller 3 drives the laser mode of the emission module 2 can be: all drivers are synchronously driven, or sequentially driven in turn, or each time specifies N of them (N is a positive integer greater than zero and less than the number of all drivers), or randomly specifies N to drive.

[0008] The principle of the present application is:

[0009] The compact fiber array homogenization emission device is composed of a fiber constraint end, a fiber fine adjustment mechanism and a laser fiber, wherein the laser fiber and the fiber fine adjustment mechanism form an emission module.

[0010] The compact fiber array homogenization emission device is characterized in that the emission module is composed of two orthogonal gratings or two orthogonal wedge mirrors.

[0011] a. The fiber constraint end and the fiber fine adjustment mechanism cooperate to accurately control the emission angle of a single laser fiber, and the irradiation area of a single laser is controlled by controlling the emission angle, and one laser fiber cooperates with the fiber fine adjustment mechanism to form one emission module.

[0012] b. The irradiation area of a single fiber laser is in a Gaussian distribution, and a certain area with a specific light intensity can be obtained by accurately controlling the superposition of multiple high-speed distributed irradiation areas, and a large-area high-intensity homogenization area can be obtained by array arrangement and expansion of the emission module.

[0013] c. The working mode of the emission module can be: all drivers are synchronously driven, or sequentially driven in turn, or each time specifies N of them (N is a positive integer greater than zero and less than the number of all drivers), or randomly specifies N to drive.

[0014] Compared with the prior art, the present application has the following advantages:

[0015] (1) The present application can obtain a high-quality homogenization light intensity area by expanding the emission module, and can realize homogenization application by combining multiple small-volume and low-cost laser fibers, and has a compact structure and low cost compared with other implementation methods in the field of large-area high-intensity beam homogenization application.

[0016] (2) The present application realizes light intensity homogenization application by combining emission modules, and can change the area and intensity of light intensity homogenization by adjusting the module combination, which is more flexible in engineering application. BRIEF DESCRIPTION OF DRAWINGS

[0017] Figure 1Fig. 1 is a schematic diagram of the working principle of the uniform emission device for the compact fiber array;

[0018] Figure 2 Fig. 2 is a structural diagram of the emission module;

[0019] Figure 3 Fig. 3 is a structural schematic diagram of the emission device, wherein (a) is a structural schematic diagram of the emission device before assembly, and (b) is a structural schematic diagram of the emission device after assembly;

[0020] Figure 4 Fig. 4 is a schematic diagram of the light intensity area of a single laser fiber and the light intensity area of the uniform emission device, wherein (a) is a schematic diagram of the light intensity area of a single laser fiber, and (b) is a schematic diagram of the light intensity area of 36 laser fibers.

[0021] In the figure, 1 is a fiber constraint end, 2 is an emission module, 201 is a fiber fine adjustment mechanism, 202 is a laser fiber, and 3 is a controller. DETAILED DESCRIPTION

[0022] The application will be further described below in combination with specific embodiments.

[0023] This invention discloses a compact fiber array homogenization emission device, comprising a fiber constraint end 1, an emission module 2, and a controller 3. The emission module 2 is arranged in a two-dimensional array. The fiber constraint end 1 is used to coarsely position the emission angle of the emission module 2. The emission module 2 consists of a fiber fine-tuning mechanism 201 and a laser fiber 202. The emission module 2 can precisely adjust the emission angle of the laser. The controller 3 controls whether the laser fiber 202 of the array emission module 2 emits light according to specific logic. The working principle of this device is as follows: the beam irradiation area can be precisely controlled by controlling the beam direction of the fiber laser. By controlling the emission sequence of multiple laser fibers 202, a homogenization area of ​​intensity in a specified region can be achieved. The adjustment method of the fiber fine-tuning mechanism 201 is as follows: an intensity detector is placed at the beam focusing position of the array of the emission module 2. A CCD, a single-intensity detector, or a four-quadrant detector can be selected. By adjusting the fiber fine-tuning mechanism 201 in sequence, the consistency of the intensity distribution of all laser fibers 202 at the detector position is ensured, thereby achieving the consistency of the laser fiber emission direction and the uniformity of irradiation. The fiber confinement end 1 completes the two-dimensional array arrangement of optical fibers through modular combination. The homogenization area or light intensity can be increased by expanding the modules. The incident angle accuracy of the fiber confinement end 1 is better than 1°. The transmitting module 2 precisely adjusts the emission angle through the fiber fine-tuning mechanism 201. The fiber fine-tuning mechanism 201 consists of orthogonally connected flexible hinges, combined with high-precision set wires, and the adjustment accuracy is better than 10 microradians. The controller 3 drives the laser of the transmitting module 2 in the following modes: all drivers drive synchronously, or drive sequentially in turn, or specify N drivers each time, where N is a positive integer greater than zero and less than the total number of drivers, or randomly specify N drivers for driving.

[0024] Example

[0025] like Figure 2 As shown, the compact fiber array homogenization and transmitting device of the present invention consists of a fiber confinement end 1 and a transmitting module 2. This example completes a 6×6 fiber array, and the volume of the transmitting end is less than 2500 cm³. 3 The fiber optic cable's constrained end is equipped with mounting holes at a specific angle. By positioning the transmitting module through these holes, the transmission angle can be coarsely adjusted. For example... Figure 3 As shown, the transmitting module 2 consists of an optical fiber fine-tuning mechanism 201 and a laser fiber 202. The transmitting module 2 precisely adjusts the emission angle through the optical fiber fine-tuning mechanism 201. The optical fiber fine-tuning mechanism 201 is composed of orthogonally connected flexible hinges, and with the help of high-precision set screws, the adjustment accuracy can reach more than 10 microradians. By precisely controlling the emission angle, the beam irradiation area of ​​a single laser fiber 202 can be precisely adjusted. Figure 4 As shown, by precisely controlling the irradiation area of ​​6×6 laser fibers 202, a compact fiber array homogenization emission device can achieve a 0.1km irradiation range. 2 The homogenized region.

Claims

1. A compact fiber array homogenization and transmission device, characterized in that: The device consists of an optical fiber constraint end (1), a transmitting module (2), and a controller (3). The transmitting module (2) is arranged in a two-dimensional array. The optical fiber constraint end (1) is used to coarsely position the emission angle of the transmitting module (2). The transmitting module (2) consists of an optical fiber fine-tuning mechanism (201) and a laser fiber (202). The transmitting module (2) can precisely adjust the emission angle of the laser. The controller (3) controls whether the laser fiber (202) of the array transmitting module (2) emits light according to specific logic. The working principle of this device is: the beam irradiation area can be precisely controlled by controlling the beam direction of the fiber laser. In a region, the intensity homogenization of a specified area can be achieved by controlling the output sequence of multiple laser optical fibers (202). The adjustment method of the fiber fine-tuning mechanism (201) is as follows: an intensity detector is placed at the beam focusing position of the array in the transmitting module (2). A CCD, a single-intensity detector, or a four-quadrant detector is selected. By adjusting the fiber fine-tuning mechanism (201) in sequence, the consistency of the intensity distribution of all laser optical fibers (202) at the detector position is ensured, thereby achieving the consistency of the laser optical fiber emission direction and the uniformity of irradiation. The transmitting module is composed of two orthogonal gratings or two orthogonal wedge mirrors. a. The fiber constraint end and the fiber fine-tuning mechanism work together to precisely control the emission angle of a single laser fiber. By controlling the emission angle, the irradiation area of ​​a single laser can be controlled. One laser fiber and the fiber fine-tuning mechanism together constitute a emission module. b. The irradiation area of ​​a single fiber laser is Gaussian distributed. By precisely controlling and superimposing multiple high-speed distributed irradiation areas, a specific light intensity can be obtained in a certain area. By arraying and expanding the emission modules, a large area of ​​high-intensity homogenized area can be obtained. c. The operating mode of the transmitter module can be: all drivers drive synchronously, or drive in turn in turn, or specify N of them each time, where N is a positive integer greater than zero and less than the total number of drivers, or randomly specify N to drive.

2. The compact fiber array homogenization and transmission device according to claim 1, characterized in that: The fiber constrained end (1) completes the two-dimensional array arrangement of the fiber through module combination. The area of ​​the homogenized region or the light intensity can be increased by module expansion. The fiber constrained end (1) requires an incident angle accuracy better than 1°.

3. The compact fiber array homogenization and transmission device according to claim 1, characterized in that: The transmitting module (2) precisely adjusts the emission angle through the fiber optic fine-tuning mechanism (201). The fiber optic fine-tuning mechanism (201) is composed of orthogonally connected flexible hinges and is equipped with a high-precision set wire, with an adjustment accuracy better than 10 micro-radians.

4. The compact fiber array homogenization and transmission device according to claim 1, characterized in that: The controller (3) drives the emission module (2). The laser mode can be: all drivers drive synchronously, or drive in turn, or specify N of them each time, where N is a positive integer greater than zero and less than the number of all drivers, or randomly specify N to drive.

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