Method for manufacturing a vapor chamber and vapor chamber

Abstract

The embodiment of the application relates to the technical field of heat plate, and provides a manufacturing method of a heat plate and the heat plate, which utilizes a forming die to mold a polymer fluid into a heat plate body with openings, utilizes elastic plugs to seal the openings to seal cavities, and performs vacuum extraction and liquid filling operations on the cavities by piercing the elastic plugs to obtain a complete heat plate; wherein the polymer fluid is formed by uniformly mixing a polymer matrix fluid and modified powder, and the flexibility of the heat plate body molded can be adjusted by regulating the mixing ratio of the modified powder in the polymer matrix fluid; in the manufacturing method of the heat plate provided by the application, the vacuum extraction operation and the liquid filling operation can be realized only by piercing the elastic plugs, and after the piercing operation of the extraction needle is completed, the elastic plugs can be elastically restored to extrude and seal the piercing holes of the plugs, so that the vacuum extraction process and the liquid filling process are more simple and reliable.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of heat plate, and particularly provides a heat plate manufacturing method and heat plate. BACKGROUND

[0002] With the rapid development of microelectronic technology and information industry, high performance, miniaturization and integration of electronic devices have become the mainstream trend of modern electronic equipment development. The high integration, high power consumption and small size of electronic chips result in a significant increase in chip heat flux, and the heat transfer and dissipation problem is becoming increasingly severe.

[0003] Polymer heat plates are considered to be the most potential heat transfer elements for semiconductor electronic devices and microelectronic systems due to their light weight, good flexibility, and good high temperature resistance and chemical resistance. However, the current production method of polymer heat plates is to first injection mold multiple parts, then fix them by welding, and finally seal the filling pipe after vacuumizing the cavity inside the heat plate and filling the working fluid, that is, the vacuumizing and liquid filling process of the heat plate is complicated and cannot meet the current production needs. SUMMARY

[0004] The purpose of the embodiments of the present application is to provide a heat plate manufacturing method and heat plate, which aims to solve the problem that the existing heat plate vacuumizing and liquid filling process is complicated and cannot meet the current production needs.

[0005] To achieve the above purpose, the technical solutions adopted by the embodiments of the present application are as follows:

[0006] In a first aspect, the embodiments of the present application provide a heat plate manufacturing method, comprising:

[0007] Manufacturing a forming mold;

[0008] Manufacturing a heat plate body, preparing a polymer fluid, injecting the polymer fluid into the forming mold, and obtaining the heat plate body after solidification, the heat plate body having a cavity, the heat plate body being formed with an opening, the opening being configured to communicate the cavity to the outside;

[0009] Manufacturing a heat plate, plugging the opening of the heat plate body with an elastic plug, puncturing the elastic plug to vacuumize the cavity of the heat plate body, and then puncturing the elastic plug to inject working fluid into the cavity to form the heat plate; the elastic plug can be elastically restored after the puncturing operation to continuously plug the opening.

[0010] The method for manufacturing the heat plate provided by the embodiment of the present application uses a forming mold to mold a polymer fluid into a heat plate body with openings, and then uses an elastic plug to seal the openings to seal the cavities, and the cavities are vacuumed and injected with working liquid by penetrating the elastic plug, so that a complete heat plate is obtained. That is, the vacuuming operation and the liquid filling operation only need to be realized by penetrating the elastic plug, and after the penetration operation is completed, the elastic plug is elastically restored to extrude and seal the penetration hole according to the elastic force of the elastic plug, so that the vacuuming process and the liquid filling process are more simple and reliable.

[0011] In one embodiment, the polymer fluid comprises a polymer base fluid and modified powder, and the modified powder comprises heat-conductive powder and / or heat-conductive insulating powder.

[0012] In one embodiment, the heat-conductive powder comprises copper powder and / or aluminum powder, and the heat-conductive insulating powder comprises one or more of silicon carbide powder, insulating ceramic powder, diamond powder and graphite powder.

[0013] In one embodiment, the polymer base fluid comprises silica gel fluid and / or nylon thermal fluid.

[0014] In one embodiment, in the step of manufacturing the forming mold, the forming mold comprises a mold body, a first core, a second core and a support core, the mold body is provided with a cavity, the first core is provided with a first groove, and the second core is provided with a second groove; the first core, the second core and the support core are configured to be partially inserted into the cavity, and the first groove and the second groove are combined to form an avoiding cavity.

[0015] In one embodiment, in the step of manufacturing the heat plate body, the method further comprises:

[0016] The polymer fluid forms a support part in the avoiding cavity, the support part is located in the cavity, and two ends of the support part are formed on the heat plate body.

[0017] In one embodiment, the inner wall of the first groove is provided with one or more first grooves, and the inner wall of the second groove is provided with a second groove, and the second groove is configured to match the number and position of the first grooves.

[0018] In the step of manufacturing the heat plate body, the polymer fluid forms a support part in the avoiding cavity, and the support part is provided with one or more annular grooves.

[0019] In one embodiment, after the step of manufacturing the heat plate body, the method further comprises:

[0020] The heat plate body is taken out, the support core is first extracted from the cavity, then the first core and the second core are moved away from each other, then the first core and the second core are extracted from the cavity, and finally the heat plate body is taken out.

[0021] In one embodiment, the step of manufacturing the vapor chamber body further comprises:

[0022] The polymer fluid forms a support portion in the cavity, the support portion is configured to be shaped at one end to the vapor chamber body and disposed at the other end towards the opening; and one or more annular grooves are formed on the support portion.

[0023] In a second aspect, the embodiments of the present application further provide a vapor chamber, which is molded by the manufacturing method of the vapor chamber as described above.

[0024] The vapor chamber provided by the embodiments of the present application has the advantages that the vacuumizing process and the liquid filling process of the manufacturing method of the vapor chamber are simpler and more reliable, and thus the production cost of the vapor chamber is lower. BRIEF DESCRIPTION OF DRAWINGS

[0025] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the embodiments or the prior art description will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without any creative effort on the basis of these drawings.

[0026] Figure 1 A schematic diagram of the manufacturing method of the vapor chamber provided by the embodiments of the present application;

[0027] Figure 2 A structural schematic diagram of the vapor chamber body provided by the embodiments of the present application;

[0028] Figure 3 An internal structural schematic diagram of the vapor chamber body provided by the embodiments of the present application;

[0029] Figure 4 A structural schematic diagram of the vapor chamber provided by the embodiments of the present application;

[0030] Figure 5 A structural schematic diagram of the molding die provided by the embodiments of the present application;

[0031] Figure 6 An internal structural schematic diagram of the molding die provided by the embodiments of the present application;

[0032] Figure 7 A structural schematic diagram of the first core and the second core provided by the embodiments of the present application;

[0033] Figure 8 A partial enlarged schematic diagram of A of the vapor chamber provided by the embodiments of the present application; Figure 7

[0034] Figure 9 ​Another structure schematic view of another vapor chamber body made by another forming die provided by the embodiment of the present application.

[0035] In the drawings, various reference numbers refer to the same or similar elements throughout the drawings.

[0036] 10, forming die; 11, die body; 111, cavity; 112, avoiding cavity; 12, first core; 121, first groove; 122, first channel; 132, second channel; 13, second core; 131, second groove; 14, supporting core; 20, vapor chamber; 21, vapor chamber body; 211, cavity; 212, opening; 22, elastic plug; 23, supporting part; 231, ring groove. DETAILED DESCRIPTION

[0037] The embodiments of the present application are described in detail below with reference to the accompanying drawings. Examples of the embodiments are shown in the drawings, in which the same or similar notations refer to the same or similar elements or elements having the same or similar functions throughout the drawings. The embodiments described below by reference to the drawings are exemplary and are intended to explain the present application, and cannot be understood as limiting the present application.

[0038] In the description of the embodiments of the present application, it should be understood that the terms "length", "width", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the purpose of facilitating the description of the embodiments of the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the embodiments of the present application.

[0039] In addition, the terms "first", "second" are only for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features defined with "first", "second" can explicitly or implicitly include one or more of the features. In the description of the embodiments of the present application, the meaning of "multiple" is two or more, unless otherwise explicitly specified and limited.

[0040] In the embodiments of the present application, unless otherwise explicitly specified and limited, the terms "mounting", "connection", "connection", "fixing" and the like should be understood in a broad sense, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the internal communication of two elements or the interaction relationship between two elements. For those skilled in the art, the specific meaning of the above terms in the embodiments of the present application can be understood according to the specific circumstances.

[0041] At present, the production mode of the polymer vapor chamber is to first injection mold multiple components, then fix them by welding, and finally seal the filling pipe after vacuumizing the cavity of the vapor chamber and filling the working medium.

[0042] Therefore, the application provides a manufacturing method of a vapor chamber, which uses a molding process to obtain the vapor chamber, and performs vacuumization and liquid filling on the cavity of the vapor chamber by piercing the elastic plug. After the piercing operation, the elastic plug elastically restores to block the pinhole and continuously seal the cavity, so that the vacuumization process and the liquid filling process are simpler and more reliable.

[0043] Please refer to Figure 1 , Figure 2 , Figure 4 and Figure 5 , in the first aspect, the application embodiment provides a manufacturing method of a vapor chamber, which comprises the following steps:

[0044] S001, a molding mold 10 is manufactured;

[0045] The molding mold 10 is used for molding a vapor chamber body 21, and the shape and structure of the molding mold 10 are not limited. For example, the molding mold 10 comprises a mold body and a core member, a polymer fluid is injected into the mold body to mold the vapor chamber body 21, and the core member is used to form a cavity structure of the vapor chamber body 21.

[0046] S002, the vapor chamber body 21 is manufactured, a polymer fluid is prepared, the polymer fluid is injected into the molding mold 10, and the vapor chamber body 21 is obtained after solidification. The vapor chamber body 21 has a cavity 211, and the vapor chamber body 21 is formed with an opening 212 configured to communicate the cavity 211 to the outside;

[0047] The polymer fluid refers to a fluid in which one or more polymer matrix fluids are uniformly stirred with modified powders, for example, a silica gel fluid is uniformly stirred with copper powder and silicon carbide powder to form a polymer fluid. The solidification method can be injection molding, casting molding, hot pressing molding and other processes, so that the polymer fluid is solidified to form the vapor chamber body 21.

[0048] S003, the vapor chamber 20 is manufactured, the opening 212 of the vapor chamber body 21 is blocked by the elastic plug 22, the cavity 211 of the vapor chamber body 21 is vacuumized by piercing the elastic plug 22, and then the working liquid is injected into the cavity 211 by piercing the elastic plug 22 to form the vapor chamber 20. The elastic plug 22 can elastically restore to continuously block the opening 212 after the piercing operation.

[0049] The heat spreader 20 with the cavity 211 is obtained by first forming the heat spreader body 21 and then plugging the elastic plug 22. The cavity 211 of the heat spreader body 21 is used for vacuumizing and injecting working liquid, so that the working liquid circulates in the cavity 211 to realize heat absorption, evaporation, convection and condensation, thereby realizing the heat dissipation effect of the heat spreader 20. It can be understood that the heat spreader 20 is suitable for electronic products that require small volume or rapid heat dissipation, and is mainly used in products such as servers and high-end graphics cards. When heat is conducted from the heat source to the heat spreader 20, the working liquid in the cavity 211 begins to vaporize after being heated in a low vacuum environment. At this time, the heat energy is absorbed and the volume expands rapidly. The gas-phase working liquid rapidly fills the entire cavity. When the gas-phase working liquid contacts a relatively cold area, condensation occurs. The condensation releases the heat accumulated during evaporation. The condensed working liquid returns to the evaporation heat source through the structure inside the heat spreader body 21. This operation is repeated in the cavity 211. Specifically, the above-mentioned working liquid can be a high specific heat capacity liquid, such as pure water or deionized water.

[0050] The elastic plug 22 can be formed by solidifying the above-mentioned polymer fluid, or the elastic plug 22 can also be formed by mixing silicon carbide powder and silica gel in a silica gel solution at a volume ratio of 1:1, stirring uniformly, and then injection molding. The average diameter of the silicon carbide powder is about 10 um.

[0051] In a specific embodiment, the step of plugging the elastic plug 22 into the opening 212 can be as follows: after obtaining the heat spreader body 21, the opening 212 of the heat spreader body 21 is inserted into the above-mentioned mixed powder silica gel solution, and after solidification, the elastic plug 22 is formed at the opening 212 and the opening 212 is plugged, so that the cavity 211 of the heat spreader body 21 is sealed. The high-elasticity plug 22 is integrally formed with the heat spreader body 21.

[0052] The manufacturing method of the heat spreader provided by the embodiment of the present application can vacuumize and inject working liquid into the cavity of the heat spreader body 21 by piercing the elastic plug 22. After the piercing operation is completed, the elastic plug 22 returns to the state of extruding and plugging the piercing hole due to its elastic force, so that the vacuumizing process and the liquid filling process are more simple and reliable. The piercing operation of the elastic plug 22 can be realized by using a needle, for example, the needle of a syringe is used to pierce the elastic plug 22 to vacuumize and fill the cavity 211.

[0053] Please refer to Figure 2 and Figure 4In one embodiment, the polymer fluid includes a polymer base fluid and a modified powder, and the modified powder includes a heat-conductive powder and / or a heat-conductive insulating powder. It can be understood that the polymer base fluid is a kind of viscoelastic fluid, such as a silicone fluid, a nylon thermal fluid, a plastic fluid, etc. This kind of polymer base fluid has high flexibility and high elasticity, but has poor heat conductivity and slow thermal response. Therefore, the heat dissipation of the heat plate body formed by the polymer base fluid alone is poor.

[0054] Therefore, by mixing the modified powder into the polymer base fluid, the high flexibility and high elasticity of the polymer base fluid can be retained, and other properties can be improved by the modified powder.

[0055] Specifically, the modified powder is a powder-like substance for improving a certain property of the polymer base fluid. For example, in order to improve the heat conductivity and thermal response of the polymer base fluid, a highly heat-conductive material powder, such as a metal heat-conductive powder, can be used. For example, the metal heat-conductive powder can be copper powder, aluminum powder, etc. Alternatively, in order to improve the heat conductivity of the polymer base fluid while maintaining the insulation, an insulating heat-conductive material powder, such as silicon carbide powder, ceramic powder, mica powder, etc. can be used.

[0056] When the polymer fluid formed by mixing the heat-conductive powder and the heat-conductive insulating powder is solidified, the heat conductivity of the heat plate body 21 formed thereby can be significantly improved, and the heat plate body 21 will also maintain an insulating state. The heat-conductive powder and the heat-conductive insulating powder described above are both fine powders.

[0057] In one embodiment, the heat-conductive powder includes copper powder and / or aluminum powder, and the heat-conductive insulating powder includes one or more of silicon carbide powder, insulating ceramic powder, diamond powder, and graphite powder. It can be understood that, after the polymer base fluid is mixed with the metal powder, such as copper powder and aluminum powder, which has high heat conductivity and is uniformly mixed, the heat conductivity of the polymer fluid can be effectively improved. After the polymer base fluid is mixed with the silicon carbide powder and the insulating ceramic powder, the heat conductivity of the polymer fluid can be improved while maintaining the insulation.

[0058] In one embodiment, the polymer base fluid includes a silicone fluid and / or a nylon thermal fluid. By using a fluid that can form a highly elastic polymer, such as a silicone fluid and a nylon thermal fluid, and by adjusting the proportion of the modified powder, such as the heat-conductive powder and the heat-conductive insulating powder, mixed therein, the flexibility of the heat plate body 21 formed by molding can be adjusted. The greater the content of the silicone fluid and the nylon thermal fluid, the greater the flexibility of the heat plate body 21 formed by molding.

[0059] In one specific embodiment, the method of preparing the polymer fluid can be: preparing a nylon granular material, then mixing the silicon carbide powder with an average diameter of 10 μm with the nylon granular material at a volume ratio of 1:1, stirring uniformly, and then adding to the injection molding machine to be plasticized into a molten fluid to obtain the polymer fluid.

[0060] In another specific embodiment, the method of preparing the polymer fluid can be: preparing a silica gel solution, then mixing the diamond powder with an average diameter of 10 μm with the silica gel particles at a volume ratio of 1:1 into the silica gel solution, and stirring uniformly to obtain the polymer fluid.

[0061] In another specific embodiment, the method of preparing the polymer fluid can be: preparing a silica gel solution, then mixing the aluminum powder with an average diameter of 2 μm with the silica gel particles at a volume ratio of 1:1 into the silica gel solution, and stirring uniformly to obtain the polymer fluid.

[0062] Please refer to Figure 3 , Figure 5 to Figure 7 In one embodiment, in the step of manufacturing the forming mold 10, the forming mold 10 includes a mold body 11, a first core 12, a second core 13, and a support core 14, the mold body 11 is provided with a cavity 111, the first core 12 is provided with a first groove 121, and the second core 13 is provided with a second groove 131; the first core 12, the second core 13, and the support core 14 are configured to be partially inserted into the cavity 111, and the first groove 121 and the second groove 131 combine to form an avoiding cavity 112. It can be understood that the first core 12, the second core 13, and the support core 14 are partially inserted into the cavity 111, so that the first groove 121 and the second groove 131 combine to form the avoiding cavity 112 in the cavity 111.

[0063] Please refer to Figure 3 and Figure 6 In one embodiment, the step of manufacturing the vapor chamber body 21 further includes:

[0064] The polymer fluid is solidified in the avoiding cavity 112 to form a support portion 23, the support portion 23 is located in the cavity 211, and the two ends of the support portion 23 are formed on the vapor chamber body 21. The polymer fluid is injected into the cavity 111 of the mold body 11, the polymer fluid fills the cavity 111 and covers the portions of the first core 12, the second core 13, and the support core 14 located in the cavity 111, so that the polymer fluid is solidified to form the vapor chamber body 21 having an opening 212 and a cavity 211, the first core 12, the second core 13, and the support core 14 are located in the cavity 211, and the first core 12, the second core 13, and the support core 14 extend out of the opening 212 to the outside. At the same time, the polymer fluid fills the avoiding cavity 112, and is solidified to form the support portion 23, the opposite ends of the support portion 23 are integrally formed with the vapor chamber body 21.

[0065] Due to the flexibility of the traditional polymer vapor chamber, when deformation occurs, the working gas-liquid channel is easily blocked due to the lack of effective structural support, resulting in the failure of the vapor chamber. The embodiments of the present application form a support part 23 in the cavity 211 of the vapor chamber body 21 to play a supporting role, preventing the vapor chamber 20 from deforming too much and causing blockage.

[0066] The support part 23 can be a cylindrical, prismatic support column, or any other shape of support structure. The number of support parts 23 can be customized according to actual needs.

[0067] Please refer to Figure 3 , Figure 7 and Figure 8 In one embodiment, one or more first grooves 122 are formed on the inner wall of the first groove 121, and a second groove 132 is formed on the inner wall of the second groove 131, which is configured to match the number and position of the first groove 122; during the step of manufacturing the vapor chamber body 21, the polymer fluid forms a support part 23 in the avoiding cavity 112, and one or more annular grooves 231 are formed on the support part 23. By providing the annular groove 231 on the support part 23, the support part 23 can act as a wick to absorb the condensed working fluid when the vapor chamber 20 is cooling. Specifically, the number of annular grooves 231 can be selected according to actual conditions.

[0068] In some specific embodiments, the support columns should be densely distributed inside the cavity 211, so that the working fluid in the grooves on adjacent support columns can attract and flow through each other.

[0069] Please refer to Figure 3 , Figure 6 and Figure 7 In one embodiment, after the step of manufacturing the vapor chamber body 21, the manufacturing method further comprises:

[0070] The vapor chamber body 21 is removed, the support core 14 is first extracted from the cavity 211, then the first core 12 and the second core 13 are moved away from each other, then the first core 12 and the second core 13 are extracted from the cavity 211, and finally the vapor chamber body 21 is removed.

[0071] It can be understood that after the vapor chamber body 21 is formed, the vapor chamber body 21 needs to be removed for the next operation; at this time, the core extraction operation needs to be performed first, that is, the first core 12, the second core 13 and the support core 14 are extracted, and then the vapor chamber body 21 is removed.

[0072] The forming and demolding (i.e. core pulling) process of the vapor chamber body 21 is described as follows; taking four support portions 23 as an example, the number of first cores 12 is two, the number of second cores 13 is two, the number of support cores 14 is three, and two first grooves 121 are formed on the first core 12, and two second grooves 131 are formed on the second core 13. One of the first cores 12 and one of the second cores 13 are placed adjacent to each other and inserted into the cavity 111, so that the first grooves 121 and the second grooves 131 combine to form two avoidance cavities 112 in the cavity 111; another first core 12 and another second core 13 are placed adjacent to each other and inserted into the cavity 111, so that the first grooves 121 and the second grooves 131 combine to form an avoidance cavity 112 in the cavity 111; finally, three support cores 14 are inserted into the cavity 111, the first support core 14 is located on the side of one of the first cores 12 away from the adjacent second core 13, the second support core 14 is located between the second core 13 and the other first core 12, and the third support core is located between the other second core 13 and the other first core 12. It can be understood that the first core 12, the second core 13 and the support core 14 are tightly connected to each other, and when the polymer fluid is injected into the cavity 111 of the mold body 11, the polymer fluid will fill the cavity 111 and the four avoidance cavities 112, and wrap around the first core 12, the second core 13 and the support core 14 in the cavity 111; after the polymer fluid solidifies, the vapor chamber body 21 is formed, which wraps around the first core 12, the second core 13 and the support core 14 to form a cavity 211, and forms a support portion 23 in each of the four avoidance cavities 112, so that the opposite ends of the support portion 23 are integrally formed with the vapor chamber body 21, and the support portion 23 plays a supporting role in the vapor chamber body 21.

[0073] Please refer to Figure 9 In one embodiment, the step of manufacturing the vapor chamber body 21 further includes:

[0074] The polymer fluid is injected into the forming mold (the forming mold in this embodiment is not shown in the figure), and the polymer fluid forms the vapor chamber body 21 in the cavity 111, and at the same time, the polymer fluid forms the support portion 23 in the cavity 211, and the support portion 23 is configured to be formed at one end of the vapor chamber body 21 and disposed at the other end towards the opening 212; the support portion 23 has one or more annular grooves 231 formed thereon.

[0075] In this embodiment, the support portion 23 is only formed at one end of the vapor chamber body 21, so that the vapor chamber body 21 and the support portion 23 can be directly taken out of the forming mold without core pulling operation, thereby simplifying the forming mold.

[0076] The annular groove 231 on the support part 23 can be formed by wrapping the water absorption layer around the support part 23. The water absorption layer can be a sponge tape, a nylon wire mesh, or the like. Taking the sponge tape as an example, the sponge tape is stacked and pasted to form a plurality of annular grooves 231, and then a through hole is formed in the stacked sponge tape along the axial direction. The stacked sponge sleeve is sleeved on the corresponding support part 23.

[0077] In one specific embodiment, the vapor chamber body 21 can be cast formed. Diamond powder with an average diameter of 10 μm and silica gel particles are mixed in a silica gel solution at a volume ratio of 1:1, stirred uniformly to form a polymer fluid, and then the polymer fluid is injected into a forming mold of the embodiment to mold the vapor chamber body 21 and the support part 23. After the vapor chamber body 21 is formed and the annular groove 231 is provided on the support part 23, the polymer fluid is prepared again, the opening 212 of the vapor chamber body 21 is inserted into the polymer fluid, and after solidification, the elastic plug 22 is formed at the opening 212 of the vapor chamber body 21, and the cavity 211 of the vapor chamber body 21 is sealed. The needle of the syringe is inserted into the cavity 211 from the elastic plug 22, and the cavity 211 is vacuumized. Then the needle of the syringe is inserted into the cavity 211 from the elastic plug 22, and the working liquid is injected to obtain a complete vapor chamber 20.

[0078] In another specific embodiment, the vapor chamber body 21 can be hot-pressed. Aluminum powder with an average diameter of 2 μm and silica gel particles are mixed in a silica gel solution at a volume ratio of 1:1, stirred uniformly to form a polymer fluid, and then the polymer fluid is injected into a rectangular cavity mold to form a mixed powder silica gel foil. Then the mixed powder silica gel foil is placed on the bottom layer of the forming mold of the embodiment, and the polymer fluid is injected into the forming mold to obtain the vapor chamber body 21 and the support part 23 integrally formed on the vapor chamber body by hot-pressing molding. Then the mixed powder silica gel foil is prepared again by the rectangular cavity mold, and the mixed powder silica gel foil is used to cover the opening position of the vapor chamber body 21. The opening 212 at the top of the vapor chamber body 21 is closed by heating and pressing to form a reliable elastic plug 22. The needle of the syringe is inserted into the cavity 211 from the elastic plug 22, and the cavity 211 is vacuumized. Then the needle of the syringe is inserted into the cavity 211 from the elastic plug 22, and the working liquid is injected to obtain a complete vapor chamber 20.

[0079] Please refer to Figure 2 to Figure 4 In the second aspect, the embodiment of the present application further provides a vapor chamber 20 which is molded by the method for manufacturing the vapor chamber as described above. The vapor chamber 20 provided by the embodiment of the present application has a simpler and more reliable vacuumizing process and liquid filling process in the method for manufacturing the vapor chamber, and thus the production cost of the vapor chamber 20 is lower.

[0080] The above merely preferred embodiments of the present application and are not intended to limit the embodiments of the present application. Any modification, equivalent replacement and improvement made within the spirit and principle of the embodiments of the present application shall be included in the protection scope of the embodiments of the present application.

Claims

1. A method of manufacturing a vapor chamber, characterized by, The method comprises the following steps: manufacturing a forming mold, the forming mold comprising a mold body, a first core, a second core and a support core, the mold body being provided with a cavity, the first core being provided with a first groove, and the second core being provided with a second groove; the first core, the second core and the support core are configured to be partially inserted into the cavity, and the first groove and the second groove are combined to form an avoiding cavity; manufacturing a vapor chamber body, preparing a polymer fluid, injecting the polymer fluid into the forming mold, and obtaining the vapor chamber body after solidification, the vapor chamber body being provided with a cavity, the vapor chamber body being formed with an opening configured to communicate the cavity to the outside; the polymer fluid forms a support part in the avoiding cavity, the support part being located in the cavity, and both ends of the support part are formed on the vapor chamber body; manufacturing a vapor chamber, preparing a mixed powder silica gel solution, the mixed powder silica gel solution being obtained by mixing silica powder and silica gel in a volume ratio of 1:1 into the silica gel solution and stirring uniformly; inserting the opening of the vapor chamber body into the mixed powder silica gel solution, and forming an elastic plug at the opening after solidification; the elastic plug is integrally formed with the vapor chamber body, the elastic plug seals the opening to seal the cavity of the vapor chamber body; the cavity of the vapor chamber body is vacuumized by piercing the elastic plug, and then the cavity is injected with working fluid by piercing the elastic plug again to form the vapor chamber; the elastic plug can be elastically restored after piercing to continuously seal the opening.

2. The method of manufacturing a vapor chamber according to claim 1, wherein: The polymer fluid comprises a polymer base fluid and modified powder, and the modified powder comprises heat-conductive powder and / or heat-conductive insulating powder.

3. The method of manufacturing a vapor chamber according to claim 2, wherein: The heat-conductive powder comprises copper powder and / or aluminum powder; and the heat-conductive insulating powder comprises one or more of silicon carbide powder, insulating ceramic powder, diamond powder and graphite powder.

4. The method of manufacturing a vapor chamber according to claim 2, wherein: The polymer base fluid comprises silica gel fluid and / or nylon thermal fluid.

5. The method of claim 1, wherein: The inner wall of the first groove is provided with one or more first grooves, and the inner wall of the second groove is provided with a second groove, which is configured to match the number and position of the first grooves. In the step of manufacturing the vapor chamber body, the polymer fluid forms a support part in the avoiding cavity, and the support part is provided with one or more ring grooves.

6. The method of manufacturing a vapor chamber according to claim 1, wherein After the step of manufacturing the vapor chamber body, the method further comprises: taking out the vapor chamber body, first extracting the support core from the cavity, then moving the first core and the second core away from each other, then extracting the first core and the second core from the cavity, and finally taking out the vapor chamber body.

7. The method of manufacturing a vapor chamber according to any one of claims 1 to 4, wherein In the step of manufacturing the vapor chamber body, the method further comprises: the polymer fluid forms a support part in the cavity, and the support part is configured to be formed on one end of the vapor chamber body and arranged towards the opening on the other end; the support part is provided with one or more ring grooves.

8. A vapor chamber, characterized by: The vapor chamber is molded by the method of manufacturing the vapor chamber according to any one of claims 1 to 7.

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