A device for storing photoresist

Abstract

The application discloses a device for storing photoresist, which comprises a conveying frame and a supporting frame, the inner side of the conveying frame is provided with a conveying belt, the supporting frame is fixedly installed on the outer surface of the lower end of the conveying frame, the upper part of the conveying frame is provided with a plurality of groups of fixing brackets for placing photoresist containers, the inner side of one end of the conveying frame is provided with a photoelectric sensor for detecting the position of the fixing bracket, the outer surface of the upper end of the conveying frame is provided with side baffles on the two sides of the fixing bracket, the outer surfaces of the two sides of the fixing bracket are both provided with limiting clamping grooves, and the side edges of the side baffles are fixedly installed with limiting clamping plates matched with the limiting clamping grooves; the device has multiple access limiting structures, so that the use of the photoresist effectively follows the principle of first-in first-out, the material is intelligently managed instead of artificially managed, the use of the material without warming is effectively avoided, the machine alarm or the abnormal consumption of the material is avoided, and the storage of the material is intuitive.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of the semiconductor industry, and more specifically to a device for storing photoresist. BACKGROUND

[0002] After the THB-126N (negative photoresist) is taken from the warehouse (stored in the refrigerator at 0-10°C) in the BUMPING production line, it is temporarily placed in the explosion-proof cabinet. When the machine table requires a photoresist replacement, the production line operator takes the photoresist from the explosion-proof cabinet and places it in the machine table. Often, the photoresist is not warmed up or the photoresist is taken recently, which causes material errors (the material serial number in MES is different from the actual one) or causes the photoresist to not be evenly coated on the wafer surface, resulting in machine abnormalities such as machine pipeline blockage.

[0003] The patent file with the patent number CN214987206U discloses a novel storage device for photoresist production, which comprises a storage cylinder. The top left end of the storage cylinder is fixedly provided with a feeding device. The top of the feeding device is hingedly connected with a feeding cover plate. The inside of the feeding device is provided with a feeding filter device. The top ends of the feeding filter device are fixedly welded with pull devices. The inside ends of the feeding device are fixedly welded with limit blocks. The feeding filter device is arranged on the top of the limit blocks. The inside wall of the storage cylinder is fixedly provided with an inner steel plate. The storage cylinder and the inner steel plate are filled with rock wool boards, which can directly and accurately store photoresist, filter impurities in the photoresist, and avoid the problem of hardening caused by excessively high temperature of the photoresist.

[0004] The conventional photoresist storage device has certain deficiencies in use. The conventional device cannot limit the taking sequence and time of the photoresist, so that the user often takes the photoresist that is not warmed up or the photoresist that is taken recently, which causes material errors, makes the material serial number in MES different from the actual one, or causes the photoresist to not be evenly coated on the wafer surface, resulting in machine abnormalities such as machine pipeline blockage. In addition, the conventional device cannot be flexibly applied to photoresist containers of different sizes in use, so that the photoresist containers of different sizes are prone to shaking during transportation, cannot be arbitrarily adjusted according to the size of the bottle body, and reduce the application range. At the same time, the conventional device does not have a feeding calibration structure. When the photoresist storage device is loaded, the position of the fixed bracket needs to be adjusted manually, which is prone to material jamming during the loading process, and has single functionality. SUMMARY

[0005] The purpose of the present application is to provide a photoresist storage device that can solve the existing problems.

[0006] The problem solved by the present application is:

[0007] 1. The conventional device cannot limit the taking order and time of photoresist, so that the user often takes the photoresist which is not warmed or the photoresist which is taken recently, thereby causing material mistake, making the material serial number in MES different from the actual one, or causing the photoresist not to be evenly coated on the wafer surface, thereby causing machine abnormality such as machine pipeline blockage;

[0008] 2. The conventional device cannot be flexibly applied to different sizes of photoresist containers when in use, so that different sizes of photoresist containers are prone to shaking during transportation, which cannot be arbitrarily adjusted according to the size of the bottle body, thereby reducing the application range;

[0009] 3. The conventional device does not have a feeding calibration structure, so that the position adjustment of the fixed bracket needs to be manually performed when the device for storing photoresist is loaded, so that the material is prone to be stuck during the loading process, and the functionality is single.

[0010] The purpose of the application can be achieved by the following technical solutions:

[0011] A device for storing photoresist, comprising a conveying frame and a supporting frame, the inner side of the conveying frame is provided with a conveying belt, the supporting frame is fixedly installed on the outer surface of the lower end of the conveying frame, the upper part of the conveying frame is provided with a plurality of groups of fixed brackets for placing photoresist containers, the inner side of one end of the conveying frame is provided with a photoelectric sensor for detecting the position of the fixed bracket, the outer surface of the upper end of the conveying frame is provided with side baffles on both sides of the fixed bracket, the outer surfaces of both sides of the fixed bracket are provided with limiting clamping grooves, the side edges of the side baffles are fixedly installed with limiting clamping plates matched with the limiting clamping grooves, the outer surface of the other end of the conveying frame is fixedly installed with a feeding clamping seat, and the inner side of the fixed bracket is spliced with two groups of pull clamping frames.

[0012] As a further technical solution of the application, the two groups of pull clamping frames are arranged in an upper and lower side-by-side manner, two first sliding rods and two second sliding rods are movably installed on the inner side of the pull clamping frame, the two first sliding rods and the two second sliding rods are arranged in a cross shape, and the two second sliding rods are arranged below the two first sliding rods. By arranging the two groups of pull clamping frames, different sizes of photoresist containers can be placed in the fixed bracket, the user adjusts the size of the slot between the two first sliding rods and the two second sliding rods by moving the two first sliding rods and the two second sliding rods, and the upper part and the lower part of the photoresist container are fixed by the two groups of pull clamping frames.

[0013] As a further technical scheme of the present application, the inner side of the pull-out card frame is provided with a sliding groove matched with the two first sliding rods and the two second sliding rods, both sides of the pull-out card frame are provided with a butt joint slot, the first sliding rod and the second sliding rod are locked and fixed through the fixed clamping piece, one end of the pull-out card frame is provided with two groups of fixed clamping heads, and the first sliding rod and the second sliding rod can be locked and fixed through the fixed clamping piece after the two first sliding rods and the two second sliding rods complete position adjustment.

[0014] As a further technical scheme of the present application, the fixed clamping piece comprises a first clamping sleeve and a second clamping sleeve, the first clamping sleeve is fixedly installed on the outer surface of the lower end of the second clamping sleeve, the first clamping sleeve and the second clamping sleeve are arranged in a cross shape, the first clamping sleeve is fixedly installed on the lower end of the second clamping sleeve, the first clamping sleeve and the second clamping sleeve are respectively sleeved on the outer surfaces of the first sliding rod and the second sliding rod, and the first sliding rod and the second sliding rod can be respectively locked and fixed by using the first clamping sleeve and the second clamping sleeve.

[0015] As a further technical scheme of the present application, the middle parts of the first clamping sleeve and the second clamping sleeve are respectively provided with a cylindrical notch, and the outer surfaces of the first clamping sleeve and the second clamping sleeve are respectively sleeved with a fastening cap, the fastening cap is clamped on the outer surfaces of the first sliding rod and the second sliding rod by rotating the fastening cap, so that the first sliding rod and the second sliding rod are fixed on the first clamping sleeve and the second clamping sleeve.

[0016] As a further technical scheme of the present application, the length of the side baffle is greater than the length of the limiting clamping plate, and the length difference between the side baffle and the limiting clamping plate is equal to the length of the fixed bracket, the limiting clamping plate of the side baffle can limit the access of the fixed bracket, because the length of the limiting clamping plate is less than the length of the side baffle, when the fixed bracket moves between the two groups of side baffles, the fixed bracket can be removed only when the fixed bracket moves to the discharging end of the conveying frame, and the limiting clamping plate is clamped in the limiting clamping groove of the fixed bracket during movement of the fixed bracket, thereby avoiding that the user mistakenly takes the fixed bracket.

[0017] As a further technical scheme of the present application, the butt joint clamping strip is fixedly installed on the outer surface of the lower end of the side baffle, and a plurality of groups of rolling shafts are movably installed on the side edges of the limiting clamping plate, the rolling shafts can reduce the friction between the limiting clamping plate and the fixed bracket, so that the movement operation of the fixed bracket is more smooth.

[0018] As a further technical scheme of the present application, the inner side of the feeding clamping base is movably provided with a first top plate and a second top plate, the first top plate and the second top plate are symmetrically arranged, the first top plate, the second top plate and the feeding clamping base are driven by pneumatic push rods, the first top plate, the second top plate and one end of the pneumatic push rod are connected by a sliding groove, and the upper surface of the feeding clamping base is movably provided with a plurality of groups of feeding roller rods. By using the first top plate and the second top plate on the feeding clamping base, the fixed bracket can be adjusted and corrected when the fixed bracket is placed and operated, so that the fixed bracket is prevented from being in an inclined state.

[0019] As a further technical scheme of the present application, the lower part of the conveying frame is provided with an electric control cabinet and a driving member, the driving member is arranged on one side of the outer surface of the electric control cabinet, the driving member comprises a motor, a belt and a tension pulley, the inner side of one end of the conveying frame is provided with a blocking plate, the side of the conveying frame is provided with an electric control box, and the upper part of the fixed bracket is provided with a circular notch.

[0020] The present application has the following beneficial effects:

[0021] 1. By setting photoelectric sensor and side baffle, when the device for storing photoresist is used, it has multiple access restriction structure, so that the use of photoresist effectively follows the principle of first in first out, and the material is intelligently managed instead of artificial management, effectively avoiding the use of material without warming, avoiding the machine alarm or abnormal material consumption, and directly storing the material. When the amount is less than a certain amount, the alarm reminds the material, when the operation, the photoresist taken by the production line is placed in the fixed bracket of the device, which plays a role in storage and fixation of the bottle body containing photoresist, which is convenient for moving on the conveyor belt. Every time a bottle of photoresist material is placed, the sensing probe of the conveying frame senses the number of fixed brackets, so that the time and number are displayed on the display screen. At this time, the indicator light is red, and the indicator light shows green after the photoresist is warmed for 24 hours. Place the fixed bracket containing photoresist container on the upper part of the conveying frame, start the motor in the driving part, so that the motor drives the conveyor belt to move with the rotating rod, so as to drive the photoresist container to move at the upper end of the conveying frame. When the user takes out a group of fixed brackets and photoresist containers from the discharge end of the conveying frame, the photoelectric sensor will sense the hole position at the discharge end of the conveying frame, so as to start the conveyor belt and make the fixed bracket move forward, so as to fill the hole position. When the empty position of the discharge end of the conveying frame is filled, the fixed bracket blocks the photoelectric sensor, so that the conveying belt of the conveying frame stops running. In addition, the limiting clamping plate of the side baffle forms a limiting material taking structure with the limiting clamping groove on the side of the fixed bracket. When the fixed bracket is placed on the conveying frame, only when the fixed bracket is located at the discharge end position, the fixed bracket can be taken down. Because the length of the limiting clamping plate is less than the length of the side baffle, when the fixed bracket moves between the two side baffles, only when the fixed bracket moves to the discharge end of the conveying frame, the fixed bracket can be taken down. The limiting clamping plate is clamped in the limiting clamping groove of the fixed bracket when the fixed bracket moves, avoiding the user taking the photoresist without warming, avoiding taking the wrong material and violating the first in first out principle, effectively controlling the warming time.

[0022] 2. By setting up pull-out clips, the fixed bracket on the conveyor can accommodate photoresist containers of different sizes when the photoresist storage device is in use, thus expanding the applicability of the device. During operation, the user pulls out the upper and lower sets of pull-out clips from the inside of the fixed bracket. According to the size of the photoresist container, the user adjusts the position of the first and second slide rods. By moving the two first and two second slide rods, the user adjusts the size of the slots between the two first and two second slide rods. The two sets of pull-out clips fix the upper and lower parts of the photoresist container respectively. The first and second clips are respectively fitted onto the outer surfaces of the first and second slide rods. The fastening caps of the first and second clips can lock and fix the first and second slide rods respectively, thereby fixing the first and second slide rods inside the fixed bracket. This gives the photoresist storage device a fixed and adjustable structure, expanding its applicability.

[0023] 3. By setting up a feeding bracket, when using the photoresist storage device, the first and second top plates on the feeding bracket can be used to correct and adjust the fixed bracket during placement, preventing the fixed bracket from tilting. In use, the fixed bracket is placed on the upper part of the feeding bracket, and the first and second top plates are rotated by a pneumatic push rod, so that the first and second top plates contact the side of the fixed bracket. The angle of the fixed bracket is adjusted by the first and second top plates, so that the fixed bracket enters the conveyor frame at the correct angle, preventing the fixed bracket from tilting and getting stuck in the conveyor frame, thus improving the stability of the photoresist storage device during use. Attached Figure Description

[0024] The invention will now be further described with reference to the accompanying drawings.

[0025] Figure 1 This is a schematic diagram of the overall structure of a device for storing photoresist according to the present invention;

[0026] Figure 2 This is an overall structural diagram of the fixing bracket in a device for storing photoresist according to the present invention;

[0027] Figure 3 This is an overall structural diagram of the pull-out card frame in a photoresist storage device of the present invention;

[0028] Figure 4 This is an overall structural diagram of the fixing clip in a device for storing photoresist according to the present invention;

[0029] Figure 5 This is a partial structural diagram of the side baffle in a device for storing photoresist according to the present invention;

[0030] Figure 6 This is a planar structural diagram of the feed chuck in a photoresist storage device according to the present invention.

[0031] In the diagram: 1. Electrical control cabinet; 2. Drive unit; 3. Conveyor frame; 4. Feeding bracket; 5. Fixed bracket; 6. Side baffle; 7. Blocking plate; 8. Electrical control box; 9. Support frame; 10. Pull-out frame; 11. Limiting slot; 12. Circular slot; 13. Fixing clip; 14. Docking slot; 15. First slide rod; 16. Second slide rod; 17. Fastening cap; 18. First sleeve; 19. Second sleeve; 20. Docking strip; 21. Roller; 22. Limiting plate; 23. First top plate; 24. Second top plate; 25. Feeding roller; 26. Pneumatic push rod; 27. Fixed clamp head. Detailed Implementation

[0032] To further illustrate the technical means and effects of the present invention in achieving its intended purpose, the following detailed description of the specific implementation methods, structures, features, and effects of the present invention, in conjunction with the accompanying drawings and preferred embodiments, is provided below.

[0033] like Figures 1-6 As shown, a device for storing photoresist includes a conveyor frame 3 and a support frame 9. The inner side of the conveyor frame 3 is provided with a conveyor belt. The support frame 9 is fixedly installed on the lower outer surface of the conveyor frame 3. The upper part of the conveyor frame 3 is provided with several sets of fixed brackets 5 for placing photoresist containers. One end of the conveyor frame 3 is provided with a photoelectric sensor for detecting the position of the fixed bracket 5. The upper outer surface of the conveyor frame 3 is provided with side baffles 6 on both sides of the fixed bracket 5. The outer surfaces of both sides of the fixed bracket 5 are provided with limiting slots 11. The side baffles 6 are fixedly installed with limiting plates 22 for use with the limiting slots 11. The other end of the conveyor frame 3 is fixedly installed with a feeding bracket 4. The inner side of the fixed bracket 5 is spliced ​​with two sets of pull-out frames 10. The photoelectric sensor is model BX-442.

[0034] Two sets of pull-out frames 10 are arranged side-by-side, one above the other. Two first slide rods 15 and two second slide rods 16 are movably installed on the inner side of each pull-out frame 10. The two first slide rods 15 and two second slide rods 16 are arranged in a grid pattern. The two second slide rods 16 are located below the two first slide rods 15. By using the two sets of pull-out frames 10, photoresist containers of different sizes can be placed in the fixing bracket 5. The user can adjust the size of the slots between the two first slide rods 15 and two second slide rods 16 by moving the two first slide rods 15 and two second slide rods 16, and use the two sets of pull-out frames 10 to fix the upper and lower parts of the photoresist containers respectively.

[0035] The inner side of the pull-out card frame 10 is provided with a sliding groove matched with two first sliding rods 15 and two second sliding rods 16, both sides of the pull-out card frame 10 are provided with a butt joint slot 14, the first sliding rod 15 and the second sliding rod 16 are locked and fixed through the fixed clamping piece 13, one end of the pull-out card frame 10 is provided with two groups of fixed clamping heads 27, when the two first sliding rods 15 and the two second sliding rods 16 complete position adjustment, the first sliding rod 15 and the second sliding rod 16 can be locked and fixed through the fixed clamping piece 13.

[0036] The fixed clamping piece 13 includes a first clamping sleeve 18 and a second clamping sleeve 19, the first clamping sleeve 18 is fixedly installed on the outer surface of the lower end of the second clamping sleeve 19, the first clamping sleeve 18 and the second clamping sleeve 19 are arranged in a cross shape, the first clamping sleeve 18 is fixedly installed on the lower end of the second clamping sleeve 19, the first clamping sleeve 18 and the second clamping sleeve 19 are respectively sleeved on the outer surfaces of the first sliding rod 15 and the second sliding rod 16, and the first sliding rod 15 and the second sliding rod 16 can be respectively locked and fixed by the first clamping sleeve 18 and the second clamping sleeve 19.

[0037] The middle parts of the first clamping sleeve 18 and the second clamping sleeve 19 are provided with cylindrical notches, and the outer surfaces of the first clamping sleeve 18 and the second clamping sleeve 19 are sleeved with fastening caps 17, the user rotates the fastening cap 17, so that the fastening cap 17 is clamped on the outer surfaces of the first sliding rod 15 and the second sliding rod 16, thereby fixing the first sliding rod 15 and the second sliding rod 16 on the first clamping sleeve 18 and the second clamping sleeve 19.

[0038] The length of the side baffle 6 is greater than that of the limiting clamping plate 22, and the length difference between the side baffle 6 and the limiting clamping plate 22 is equal to the length of the fixed bracket 5, the limiting clamping plate 22 of the side baffle 6 can limit the access of the fixed bracket 5, because the length of the limiting clamping plate 22 is less than that of the side baffle 6, when the fixed bracket 5 moves between the two groups of side baffles 6, the fixed bracket 5 can only be removed when it moves to the discharging end of the conveying frame 3, and the limiting clamping plate 22 is clamped in the limiting clamping groove 11 of the fixed bracket 5 when the fixed bracket 5 moves, thereby avoiding the user from mistakenly taking the fixed bracket 5.

[0039] The butt joint clamping strip 20 is fixedly installed on the outer surface of the lower end of the side baffle 6, and a plurality of groups of rolling shafts 21 are movably installed on the side edges of the limiting clamping plate 22, the setting of the rolling shafts 21 can reduce the friction between the limiting clamping plate 22 and the fixed bracket 5, so that the moving operation of the fixed bracket 5 is more smooth.

[0040] The inner side of the feeding card seat 4 movably installs a first top plate 23 and a second top plate 24, the first top plate 23 and the second top plate 24 are symmetrically arranged, the first top plate 23, the second top plate 24 and the feeding card seat 4 are all driven by a pneumatic push rod 26, the first top plate 23, the second top plate 24 and one end of the pneumatic push rod 26 are connected by a sliding groove, and the upper surface of the feeding card seat 4 movably installs a plurality of groups of material conveying rollers 25; by using the first top plate 23 and the second top plate 24 on the feeding card seat 4, the fixed bracket 5 can be adjusted and corrected when the fixed bracket 5 is placed and operated, so that the fixed bracket 5 is prevented from being in an inclined state.

[0041] The lower part of the conveying frame 3 is provided with an electric control cabinet 1 and a driving part 2, the driving part 2 is arranged on one side of the outer surface of the electric control cabinet 1, the driving part 2 comprises a motor, a belt and a tension pulley, the inner side of one end of the conveying frame 3 is provided with a blocking plate 7, the side of the conveying frame 3 is provided with an electric control box 8, and the upper part of the fixed bracket 5 is provided with a circular notch 12.

[0042] The device for storing photoresist, by setting up photoelectric sensor and side baffle 6, when the device for storing photoresist is used, make it have multiple access limit structure, make the use of photoresist effectively follow the principle of first in first out, change from original artificial management to intelligent control material, effectively avoid material not back to temperature is used, avoid causing machine alarm or material consumption is unusual, intuitive material safe, when the safe is less than a certain number, alarm timely and remind to take material, when operating, the photoresist taken by production line is in the fixed bracket 5 of the device, the fixed bracket 5 plays the role of storage and fixation to the bottle body with photoresist, which is convenient for moving on the conveying belt, the inductive probe of conveying frame 3 senses the number of fixed bracket 5, so that it displays time and quantity on the display screen, at this time, the indicator light is red, the indicator light shows green after the photoresist is back to temperature for 24 hours, place the fixed bracket 5 with photoresist container on the upper part of conveying frame 3 in turn, start the motor in driving part 2, so that the motor drives the conveying belt to move with the rotating rod, so as to drive the photoresist container, so that the photoresist container moves at the upper end of conveying frame 3, when the user takes out a group of fixed bracket 5 and photoresist container from the discharge end of conveying frame 3, the photoelectric sensor will sense the hole position at the discharge end of conveying frame 3, so as to start the conveying belt, so that the fixed bracket 5 moves forward, so as to fill the hole position, when the empty position of the discharge end of conveying frame 3 is filled, the fixed bracket 5 blocks the photoelectric sensor, so that the conveying belt of conveying frame 3 stops running, the limiting clamping plate 22 of side baffle 6 forms a limiting material taking structure with the limiting clamping groove 11 at the side of fixed bracket 5, when the fixed bracket 5 is placed on the conveying frame 3, only when the fixed bracket 5 is located at the discharge end position, the fixed bracket 5 can be taken down, because the length of limiting clamping plate 22 is less than the length of side baffle 6, so that the fixed bracket 5 moves between the two groups of side baffle 6, only when the fixed bracket 5 moves to the discharge end of conveying frame 3, the fixed bracket 5 can be taken down, the limiting clamping plate 22 is clamped in the limiting clamping groove 11 of fixed bracket 5 when the fixed bracket 5 moves, avoid the user to take the photoresist which is not back to temperature, avoid material mistake, violate the principle of first in first out, effectively control the back to temperature time;

[0043] By setting the pull-out clamping frame 10, when the device for storing photoresist is used, the fixed bracket 5 on the conveying frame 3 can install and accommodate photoresist containers of different sizes, thereby improving the application range of the device. When operating, the user pulls out the upper and lower two groups of pull-out clamping frames 10 from the inner side of the fixed bracket 5, adjusts the positions of the first slide rod 15 and the second slide rod 16 according to the size of the photoresist container, adjusts the size of the slot between the two first slide rods 15 and the two second slide rods 16 by moving the two first slide rods 15 and the two second slide rods 16, and fixes the upper and lower parts of the photoresist container by using the two groups of pull-out clamping frames 10. The first clamping sleeve 18 and the second clamping sleeve 19 are respectively sleeved on the outer surfaces of the first slide rod 15 and the second slide rod 16, and the fastening cap 17 of the first clamping sleeve 18 and the second clamping sleeve 19 can respectively lock and fix the first slide rod 15 and the second slide rod 16, so that the first slide rod 15 and the second slide rod 16 are fixed on the inner side of the fixed bracket 5. The device for storing photoresist has a fixing and adjusting structure, thereby improving its application range.

[0044] By setting the feeding clamping seat 4, when the device for storing photoresist is used, the first top plate 23 and the second top plate 24 on the feeding clamping seat 4 can be used to adjust and correct the fixed bracket 5 during placement operation, so as to avoid the inclination of the fixed bracket 5. When used, the fixed bracket 5 is placed on the upper part of the feeding clamping seat 4, the first top plate 23 and the second top plate 24 are driven to rotate by the pneumatic push rod 26, so that the first top plate 23 and the second top plate 24 contact the side edges of the fixed bracket 5. The angle of the fixed bracket 5 is adjusted by the first top plate 23 and the second top plate 24, so that the fixed bracket 5 enters the conveying frame 3 at the correct angle, thereby avoiding the inclination of the fixed bracket 5 in the conveying frame 3 and improving the stability of the device for storing photoresist during use.

[0045] The above is only a preferred embodiment of the present application, and does not limit the present application in any form. Although the preferred embodiment of the present application has been disclosed as above, it is not intended to limit the present application. Any person skilled in the art can make some changes or modifications to the above disclosed technical content without departing from the scope of the technical solution of the present application, and any equivalent embodiments with equivalent changes and modifications are still within the scope of the technical solution of the present application.

Claims

1. A device for storing photoresist, comprising a conveyor frame (3) and a support frame (9), wherein a conveyor belt is provided on the inner side of the conveyor frame (3), and the support frame (9) is fixedly installed on the lower outer surface of the conveyor frame (3), characterized in that, The upper part of the conveyor (3) is provided with several sets of fixed brackets (5) for placing photoresist containers. One end of the conveyor (3) is provided with a photoelectric sensor for detecting the position of the fixed bracket (5). The upper outer surface of the conveyor (3) is provided with side baffles (6) on both sides of the fixed bracket (5). The two outer surfaces of the fixed bracket (5) are provided with limiting slots (11). The side of the side baffle (6) is fixedly installed with a limiting plate (22) for use with the limiting slot (11). The other end of the conveyor (3) is fixedly installed with a feeding card seat (4). The inner side of the fixed bracket (5) is spliced ​​with two sets of pull-out card frames (10). Two sets of pull-out card frames (10) are arranged side by side, one above the other. Two first slide rods (15) and two second slide rods (16) are movably installed on the inner side of the pull-out card frame (10). The two first slide rods (15) and the two second slide rods (16) are arranged in a grid pattern. The two second slide rods (16) are located at the lower part of the two first slide rods (15). The inner side of the pull-out card frame (10) is provided with a sliding groove for use with two first sliding rods (15) and two second sliding rods (16). Both sides of the pull-out card frame (10) are provided with docking slots (14). The first sliding rods (15) and the second sliding rods (16) are locked together by a fixing clip (13). One end of the pull-out card frame (10) is provided with two sets of fixing clips (27). The fixing clip (13) includes a first clip (18) and a second clip (19). The first clip (18) is fixedly installed on the lower outer surface of the second clip (19). The first clip (18) and the second clip (19) are arranged in a cross shape. The first clip (18) is fixedly installed on the lower end of the second clip (19).

2. The device for storing photoresist according to claim 1, characterized in that, The first sleeve (18) and the second sleeve (19) are both provided with cylindrical slots in the middle, and fastening caps (17) are fitted onto the outer surfaces of the first sleeve (18) and the second sleeve (19).

3. The apparatus for storing photoresist according to claim 1, characterized in that, The length of the side baffle (6) is greater than the length of the limiting plate (22), and the length difference between the side baffle (6) and the limiting plate (22) is equal to the length of the fixed bracket (5).

4. The apparatus for storing photoresist according to claim 1, characterized in that, A docking strip (20) is fixedly installed on the lower outer surface of the side baffle (6), and several sets of rollers (21) are movably installed on the side of the limiting plate (22).

5. The apparatus for storing photoresist according to claim 1, characterized in that, The inner side of the feed chuck (4) is movably installed with a first top plate (23) and a second top plate (24). The first top plate (23) and the second top plate (24) are symmetrically arranged. The first top plate (23), the second top plate (24) and the feed chuck (4) are all driven by a pneumatic push rod (26). One end of the first top plate (23), the second top plate (24) and the pneumatic push rod (26) are connected by a sliding groove. Several sets of conveying rollers (25) are movably installed on the upper surface of the feed chuck (4).

6. The apparatus for storing photoresist according to claim 1, characterized in that, The lower part of the conveyor frame (3) is provided with an electrical control cabinet (1) and a drive component (2). The drive component (2) is located on the outer surface of one side of the electrical control cabinet (1). The drive component (2) includes a motor, a belt and a tensioning wheel. A baffle plate (7) is provided on the inner side of one end of the conveyor frame (3). An electrical control box (8) is installed on the side of the conveyor frame (3). A circular slot (12) is provided on the upper part of the fixed bracket (5).

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