A precision detection control system for UVW mobile platform

Abstract

This invention discloses a precision detection and control system for a UVW (UVW moving platform), relating to the field of UVW moving platform control technology. It includes a UVW moving platform status information acquisition unit, a workpiece status information acquisition unit, a workpiece adjustment unit, a motion control platform, a comparison unit, an alignment accuracy detection unit, and a correction unit. The UVW moving platform status information acquisition unit collects information about the UVW moving platform's status and establishes a fixed coordinate system. The workpiece status information acquisition unit collects the workpiece's position information and generates a workpiece adjustment plan. The workpiece adjustment unit adjusts the workpiece's current position to a target position. The comparison unit compares the adjusted workpiece position with the target workpiece position. This invention improves the workpiece position adjustment accuracy of the UVW moving platform, reduces the occurrence of defective workpieces, and enables timely analysis and adjustment when defective workpieces appear.

Description

Technical Field

[0001] This invention relates to the field of UVW mobile platform control technology, and more specifically to a precision detection and control system for UVW mobile platforms. Background Technology

[0002] The application of UVW alignment platforms is mainly concentrated in high-speed and high-precision industries such as wafer dicing and packaging inspection in the semiconductor industry, exposure machines, screen printing machines, laminators, presses, PCB board cutting in the PCB manufacturing industry, mobile phone manufacturing, and LCD / LED panel manufacturing. UVW moving platforms are also widely used in industrial processing, such as silver wire printing on solar panels.

[0003] The existing technology has the following shortcomings: during the process of adjusting and aligning the workpiece, machine adjustment deviations may occur, making it difficult to monitor the deviations and correct the position adjustment parameters in a timely manner. This can easily lead to serious deviations in subsequent workpiece adjustment and alignment, making it difficult to determine whether the workpiece adjustment is qualified. Summary of the Invention

[0004] The purpose of this invention is to provide a precision detection and control system for a UVW mobile platform to address the shortcomings in the prior art.

[0005] To achieve the above objectives, the present invention provides the following technical solution: a precision detection and control system for a UVW mobile platform, comprising a UVW mobile platform status information acquisition unit, a workpiece status information acquisition unit, a workpiece adjustment unit, a motion control platform, a comparison unit, an alignment precision detection unit, and a correction unit.

[0006] The UVW mobile platform status information acquisition unit is used to acquire information on the status of the UVW mobile platform and to construct a fixed coordinate system.

[0007] The workpiece status information acquisition unit is used to acquire the position information of the workpiece and form a workpiece adjustment plan;

[0008] The workpiece adjustment unit is used to adjust the current position of the workpiece to the target position and to establish a path overlap.

[0009] The comparison unit is used to compare the adjusted position of the workpiece with the position of the target workpiece to determine whether the adjustment process of the UVW moving platform is qualified.

[0010] The alignment accuracy detection unit is used to detect the accuracy of the position of the workpiece after adjustment.

[0011] The correction unit is used to provide prompts for unqualified workpieces based on their position and to correct the workpiece adjustment plan.

[0012] In a preferred embodiment, the process for collecting the status of the UVW mobile platform includes:

[0013] The image of the current position of the UVW mobile platform (the origin position of the UVW mobile platform after returning to zero) is acquired using machine vision.

[0014] A twin of the UVW mobile platform is created based on the current location image of the UVW mobile platform, and a fixed coordinate system is constructed based on the UVW mobile platform twin.

[0015] The coordinates are marked according to the fixed coordinate system and the current position of the UVW mobile platform. The current position of the UVW mobile platform is used as the origin to form the UVW mobile platform status information and store it in the motion control platform.

[0016] In a preferred embodiment, the process by which the workpiece status information acquisition unit acquires workpiece information items is as follows:

[0017] Machine vision is used to acquire images of the shape of the workpiece and its position on the UVW mobile platform to form workpiece information;

[0018] Obtain the UVW mobile platform status information, map the workpiece information to the UVW mobile platform status information, and mark the workpiece position parameters in the UVW mobile platform twin in the corresponding fixed coordinate system to form the current workpiece position.

[0019] Obtain the position of the workpiece after adjustment and annotate the parameters in the UVW moving platform twin to form the target workpiece position;

[0020] The current workpiece position is compared with the target workpiece position to form a workpiece adjustment plan. The offset between the current workpiece position and the target workpiece position in the fixed coordinate system (x, y, θ) is obtained, and then the feed amount required by the UVW moving platform is obtained to form a simulation route, and then the workpiece adjustment plan is formed.

[0021] The workpiece adjustment plan is matched to the UVW mobile platform twin to simulate the workpiece adjustment process. Once the workpiece is confirmed to be adjusted to the target workpiece position, the implementation of the workpiece adjustment plan can be confirmed, and the workpiece adjustment plan can be stored in the motion control platform.

[0022] In a preferred embodiment, the route overlap is obtained as follows:

[0023] Obtain the workpiece adjustment plan, and adjust the current workpiece position to the target workpiece position according to the feed amount of the UVW moving platform in the workpiece adjustment plan;

[0024] Set the rotation center to (0, 0) in the fixed coordinate system, input the θ offset, and set the feed amount (a, b, c) of the motor in the UVW moving platform according to the workpiece adjustment scheme. Adjust the UVW moving platform according to the offset and feed amount to form the adjustment route.

[0025] The adjustment path of the workpiece during the machine vision acquisition process is overlapped with the simulated path of the workpiece adjustment by the UVW mobile platform twin to form the path overlap degree.

[0026] In a preferred embodiment, route overlap information is obtained and the route overlap is analyzed to obtain difference data. The difference data is obtained in the following way:

[0027] Define a line connecting the adjusted workpiece position and the target workpiece position. The route during workpiece adjustment, the simulated route of the UVW moving platform twin adjusting the workpiece, and the line connecting the adjusted workpiece position and the target workpiece position form a closed range. Obtain the area S of the closed range. Where S > S... y At that time, S y The area difference threshold represents a failure in the adjustment process of the UVW mobile platform, where S≤S y When the UVW moving platform is in operation, it indicates that the adjustment process is qualified. It can determine the alignment quality deviation of the workpiece position adjustment and processing, and judge whether the workpiece position is qualified. It has a fast response capability.

[0028] In a preferred embodiment, the feed amount of the UVW moving platform is obtained, and the distance between the adjusted position of the workpiece and the target workpiece position is obtained.

[0029] The accuracy inspection pass coefficient is obtained by acquiring the area S of the closed region, and its calculation formula is as follows:

[0030] Where ω is the accuracy inspection pass coefficient, L is the line distance between the adjusted position of the workpiece and the target workpiece position, α is the UVW moving platform performance evaluation coefficient, and the accuracy inspection pass coefficient ω for workpiece position adjustment is set. j , when ω≥ω j At this time, the current performance of the UVW moving platform cannot meet the position adjustment accuracy requirements of the workpiece, which means that the workpiece adjustment information is unqualified.

[0031] When ω < ω j At this time, if the current performance of the UVW moving platform meets the position adjustment accuracy requirements of the workpiece, it represents qualified workpiece adjustment information.

[0032] In a preferred embodiment, the UVW moving platform can improve the adjustment accuracy of the workpiece position, reduce the occurrence of defective workpieces, and enable timely analysis and adjustment when defective workpieces occur. The correction unit corrects the workpiece adjustment scheme in the following way:

[0033] Obtain adjustment information for defective workpieces. When the position of a defective workpiece is adjusted, immediately provide a prompt for the current defective workpiece and obtain route overlap information. Analyze the route overlap to obtain the trend of accuracy deviation.

[0034] It can be divided into two trends: a downward trend and a upward trend.

[0035] In a preferred embodiment, the lower tendency is that the adjustment path feed during the workpiece adjustment process is below the simulated path feed of the UVW moving platform twin adjusting the workpiece.

[0036] The trend of being too high is that the feed rate of the adjustment path during the workpiece adjustment process is above the simulated feed rate of the workpiece adjustment path of the UVW moving platform twin.

[0037] When the feed rate is low, the feed rate is automatically adjusted to a high level, and the simulated path of the workpiece is adjusted to coincide with or approach the UVW moving platform twin.

[0038] When the feed rate is too high, the automatic adjustment of the feed rate to coincide with or approach the UVW moving platform twin adjusts the simulated path of the workpiece.

[0039] The technical effects and advantages provided by the present invention in the above technical solution are as follows:

[0040] 1. This invention can determine whether the UVW moving platform's position adjustment for the current workpiece meets the accuracy requirements, can determine the alignment quality deviation of the workpiece position adjustment processing, and can determine whether the workpiece position is qualified, with a fast response capability.

[0041] 2. This invention can correct the actual workpiece adjustment process according to the simulated route, and can adaptively adjust the feed amount according to the deviation characteristics of the route. It can improve the adjustment accuracy of the UVW moving platform for the workpiece position, reduce the occurrence of defective workpieces, and perform timely analysis and adjustment when defective workpieces occur. Attached Figure Description

[0042] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this invention. For those skilled in the art, other drawings can be obtained based on these drawings.

[0043] Figure 1 This is a system block diagram of the present invention. Detailed Implementation

[0044] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0045] Example 1, please refer to Figure 1 As shown in this embodiment, a precision detection and control system for a UVW mobile platform includes a UVW mobile platform status information acquisition unit, a workpiece status information acquisition unit, a workpiece adjustment unit, a motion control platform, a comparison unit, an alignment precision detection unit, and a correction unit.

[0046] The UVW mobile platform status information acquisition unit is used to acquire information on the status of the UVW mobile platform and to construct a fixed coordinate system.

[0047] The process for collecting the status of the UVW mobile platform includes:

[0048] The image of the current position of the UVW mobile platform (the origin position of the UVW mobile platform after returning to zero) is acquired using machine vision.

[0049] A twin of the UVW mobile platform is created based on the current location image of the UVW mobile platform, and a fixed coordinate system is constructed based on the UVW mobile platform twin.

[0050] The coordinates are marked according to the fixed coordinate system and the current position of the UVW mobile platform. The current position of the UVW mobile platform is used as the origin to form the UVW mobile platform status information and store it in the motion control platform.

[0051] The workpiece status information acquisition unit is used to acquire the position information of the workpiece and form a workpiece adjustment plan;

[0052] The process for the workpiece status information acquisition unit to acquire workpiece information items is as follows:

[0053] Machine vision is used to acquire images of the shape of the workpiece and its position on the UVW mobile platform to form workpiece information;

[0054] Obtain the UVW mobile platform status information, map the workpiece information to the UVW mobile platform status information, and mark the workpiece position parameters in the UVW mobile platform twin in the corresponding fixed coordinate system to form the current workpiece position.

[0055] Obtain the position of the workpiece after adjustment and annotate the parameters in the UVW moving platform twin to form the target workpiece position;

[0056] The current workpiece position is compared with the target workpiece position to form a workpiece adjustment plan. The offset between the current workpiece position and the target workpiece position in the fixed coordinate system (x, y, θ) is obtained, and then the feed amount required by the UVW moving platform (the feed amount of the drive motor in the UVW moving platform) is obtained, forming a simulation route, and thus forming a workpiece adjustment plan.

[0057] The workpiece adjustment scheme is matched to the UVW mobile platform twin to simulate the workpiece adjustment process. When the workpiece is confirmed to be adjusted to the target workpiece position, the implementation of the workpiece adjustment scheme can be confirmed and the workpiece adjustment scheme can be stored in the motion control platform.

[0058] The workpiece adjustment unit is used to adjust the current position of the workpiece to the target position and to establish a path overlap.

[0059] Obtain the workpiece adjustment plan, and adjust the current workpiece position to the target workpiece position according to the feed amount of the UVW moving platform in the workpiece adjustment plan;

[0060] Set the rotation center to (0, 0) in the fixed coordinate system, input the θ offset, and set the feed amount (a, b, c) of the motor in the UVW moving platform according to the workpiece adjustment scheme. Adjust the UVW moving platform according to the offset and feed amount to form the adjustment route.

[0061] The adjustment path of the workpiece during the machine vision acquisition process is overlapped with the simulated path of the workpiece adjustment by the UVW mobile platform twin to form the path overlap degree.

[0062] The comparison unit is used to compare the adjusted position of the workpiece with the position of the target workpiece to determine whether the adjustment process of the UVW moving platform is qualified.

[0063] Obtain route overlap information and analyze the route overlap to obtain difference data. The method for obtaining difference data is as follows:

[0064] Define a line connecting the adjusted workpiece position and the target workpiece position. The route during workpiece adjustment, the simulated route of the UVW moving platform twin adjusting the workpiece, and the line connecting the adjusted workpiece position and the target workpiece position form a closed range. Obtain the area S of the closed range. Where S > S...y At that time, S y The area difference threshold represents the acceptable threshold. A larger difference in the adjustment of the UVW moving platform indicates greater instability, meaning the adjustment process of the UVW moving platform is unacceptable. (S≤S) y At this point, it indicates that the adjustment process of the UVW mobile platform is qualified;

[0065] The alignment accuracy detection unit is used to detect the accuracy of the position of the workpiece after adjustment.

[0066] Obtain the feed amount of the UVW moving platform and the distance between the adjusted position of the workpiece and the target workpiece position.

[0067] The accuracy inspection pass coefficient is obtained by acquiring the area S of the closed region, and its calculation formula is as follows:

[0068] Where ω is the accuracy inspection pass coefficient, L is the line distance between the adjusted workpiece position and the target workpiece position, and α is the UVW moving platform performance evaluation coefficient. The larger the values ​​of L and S, the larger the value of ω, indicating a greater difference in alignment accuracy and poorer adjustment performance of the UVW moving platform. The accuracy inspection pass coefficient ω for workpiece position adjustment is set as follows. j When ω≥ω j At this time, the current performance of the UVW moving platform cannot meet the position adjustment accuracy requirements of the workpiece, which means that the workpiece adjustment information is unqualified.

[0069] When ω < ω j At this time, the current performance of the UVW moving platform meets the position adjustment accuracy requirements of the workpiece, which means that the workpiece adjustment information is qualified.

[0070] It can determine whether the UVW moving platform's position adjustment for the current workpiece meets the accuracy requirements, can determine the alignment quality deviation of the workpiece position adjustment processing, and can judge whether the workpiece position is qualified, with a fast response capability.

[0071] Example 2, please refer to Figure 1 As shown, the correction unit is used to prompt and correct the workpiece adjustment plan based on the position of the non-conforming workpiece.

[0072] Obtain adjustment information for defective workpieces. When the position of a defective workpiece is adjusted, immediately provide a prompt for the current defective workpiece and obtain route overlap information. Analyze the route overlap to obtain the trend of accuracy deviation.

[0073] It can be divided into a downward trend and an upward trend;

[0074] The trend is that the feed rate of the adjustment path during the workpiece adjustment process is below the simulated feed rate of the workpiece adjustment path of the UVW moving platform twin.

[0075] The trend of being too high is that the feed rate of the adjustment path during the workpiece adjustment process is above the simulated feed rate of the workpiece adjustment path of the UVW moving platform twin.

[0076] When the feed rate is low, the feed rate is automatically adjusted to a high level, and the simulated path of the workpiece is adjusted to coincide with or approach the UVW moving platform twin.

[0077] When the feed rate is too high, the automatic feed rate is adjusted to a low state to coincide with or approach the UVW moving platform twin to adjust the simulated path of the workpiece.

[0078] It can correct the actual workpiece adjustment process based on the simulated route, and can adaptively adjust the feed amount according to the deviation characteristics of the route. It can improve the adjustment accuracy of the UVW moving platform for the workpiece position, reduce the occurrence of defective workpieces, and perform timely analysis and adjustment when defective workpieces occur.

[0079] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A precision detection and control system for a UVW mobile platform, characterized in that: It includes a UVW mobile platform status information acquisition unit, a workpiece status information acquisition unit, a workpiece adjustment unit, a motion control platform, a comparison unit, an alignment accuracy detection unit, and a correction unit; The UVW mobile platform status information acquisition unit is used to acquire information on the status of the UVW mobile platform and to construct a fixed coordinate system. The workpiece status information acquisition unit is used to acquire the position information of the workpiece and form a workpiece adjustment plan; The workpiece adjustment unit is used to adjust the current position of the workpiece to the target position and to establish a path overlap. The comparison unit is used to compare the adjusted position of the workpiece with the position of the target workpiece to determine whether the adjustment process of the UVW moving platform is qualified. The alignment accuracy detection unit is used to detect the accuracy of the position of the workpiece after adjustment. The correction unit is used to prompt and correct the workpiece adjustment plan based on the position of the non-conforming workpiece. The process for collecting the status of the UVW mobile platform includes: The current location image of the UVW mobile platform is acquired using machine vision. A twin of the UVW mobile platform is created based on the current location image of the UVW mobile platform, and a fixed coordinate system is constructed based on the UVW mobile platform twin. The coordinates are marked according to the fixed coordinate system and the current position of the UVW mobile platform. The current position of the UVW mobile platform is used as the origin to form the UVW mobile platform status information and store it in the motion control platform. The process for the workpiece status information acquisition unit to acquire workpiece information items is as follows; Machine vision is used to acquire images of the shape of the workpiece and its position on the UVW mobile platform to form workpiece information; Obtain the UVW mobile platform status information, map the workpiece information to the UVW mobile platform status information, and mark the workpiece position parameters in the UVW mobile platform twin in the corresponding fixed coordinate system to form the current workpiece position. Obtain the position of the workpiece after adjustment and annotate the parameters in the UVW moving platform twin to form the target workpiece position; The current workpiece position is compared with the target workpiece position to form a workpiece adjustment plan. The offset between the current workpiece position and the target workpiece position in the fixed coordinate system (x, y, θ) is obtained, and then the feed amount required by the UVW moving platform is obtained to form a simulation route, and then the workpiece adjustment plan is formed. The workpiece adjustment scheme is matched to the UVW mobile platform twin to simulate the workpiece adjustment process. When the workpiece is confirmed to be adjusted to the target workpiece position, the implementation of the workpiece adjustment scheme can be confirmed and the workpiece adjustment scheme can be stored in the motion control platform. The route overlap is obtained as follows: Obtain the workpiece adjustment plan, and adjust the current workpiece position to the target workpiece position according to the feed amount of the UVW moving platform in the workpiece adjustment plan; Set the rotation center to (0, 0) in the fixed coordinate system, input the θ offset, and set the feed amount of the motor in the UVW moving platform according to the workpiece adjustment scheme. Adjust the UVW moving platform according to the offset and feed amount to form the adjustment route. The adjustment path of the workpiece during the machine vision acquisition process is overlapped with the simulated path of the workpiece adjustment by the UVW mobile platform twin to form the path overlap degree. Obtain route overlap information and analyze the route overlap to obtain difference data. The method for obtaining difference data is as follows: Define a line connecting the adjusted workpiece position and the target workpiece position. The route during workpiece adjustment, the simulated route of the UVW moving platform twin adjusting the workpiece, and the line connecting the adjusted workpiece position and the target workpiece position form a closed range. Obtain the area S of this closed range. hour, The area difference threshold indicates that the adjustment process of the UVW mobile platform is unqualified. This indicates that the adjustment process of the UVW mobile platform is successful.

2. The precision detection and control system for a UVW mobile platform according to claim 1, characterized in that: Obtain the feed amount of the UVW moving platform and the distance between the adjusted position of the workpiece and the target workpiece position. The accuracy inspection pass coefficient is obtained by acquiring the area S of the closed region, and its calculation formula is as follows: ;in, The accuracy test pass coefficient. This is the distance between the adjusted position of the workpiece and the target workpiece position. To evaluate the performance of the UVW moving platform, a pass / fail coefficient for the accuracy of workpiece position adjustment is set. ,exist At this time, the current performance of the UVW moving platform cannot meet the position adjustment accuracy requirements of the workpiece, which means that the workpiece adjustment information is unqualified. exist At this time, if the current performance of the UVW moving platform meets the position adjustment accuracy requirements of the workpiece, it represents qualified workpiece adjustment information.

3. The precision detection and control system for a UVW mobile platform according to claim 2, characterized in that: The correction unit corrects the workpiece adjustment scheme in the following way: Obtain adjustment information for defective workpieces. When the position of a defective workpiece is adjusted, immediately provide a prompt for the current defective workpiece and obtain route overlap information. Analyze the route overlap to obtain the trend of accuracy deviation. It can be divided into two trends: a downward trend and a upward trend.

4. The precision detection and control system for a UVW mobile platform according to claim 3, characterized in that: The trend is that the feed rate of the adjustment path during the workpiece adjustment process is below the simulated feed rate of the workpiece adjustment path of the UVW moving platform twin. The trend of being too high is that the feed rate of the adjustment path during the workpiece adjustment process is above the simulated feed rate of the workpiece adjustment path of the UVW moving platform twin. When the feed rate is low, the automatic feed rate is adjusted to a high level, and the simulated path of the workpiece is adjusted to coincide with or approach the UVW moving platform twin. When the feed rate is too high, the automatic adjustment of the feed rate to coincide with or approach the UVW moving platform twin adjusts the simulated path of the workpiece.

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