Micro Raman microscope

Abstract

The present application discloses a micro Raman microscope device, comprising: an imaging component defining a first direction, the first direction being the direction of light incident on the imaging device when imaging; a first dichroic mirror, comprising a first surface and a second surface, with the imaging component facing the first surface; the first dichroic mirror defining a second direction, with light incident on the first surface along the second direction being emitted along the first direction; a laser, defining a third direction, with the laser emitting laser light along the third direction; a second dichroic mirror, comprising a third surface and a fourth surface, with the laser facing the third surface; the laser light is incident on the third surface along the third direction and is emitted in a direction opposite to the second direction; and a Raman spectroscopy component, with light incident on the Raman spectroscopy component along the second direction, with the first dichroic mirror and the second dichroic mirror both located on the side of the Raman spectroscopy component opposite to the second direction. The present application combines a micro imaging optical path with a Raman spectroscopy detection optical path, reducing the volume of the micro Raman microscope device and simplifying the debugging difficulty of the optical path coupling.

Description

Technical Field

[0001] The present application relates to the technical field of material detection, and in particular to a micro Raman microscope. Background Art

[0002] A Raman spectrometer is a device that detects the Raman scattering spectrum of a substance, and a microscope is used to image the substance being tested during the detection process. During the detection process of certain samples, such as powder samples mixed with different components, trace samples, biological samples, and samples with uneven distribution of components, it is necessary to observe the Raman spectrum and image of the sample simultaneously. When in use, the sample is first imaged and the laser spot is positioned using a microscope in order to detect the target area. Since tooling is required to combine the probe of the Raman spectrometer with the microscope system, the microscope usually uses a laboratory-grade desktop or portable device, which is large in size and limits its application in many on-site rapid detection scenarios. In addition, the laser of the Raman spectrometer must be coupled to the internal optical path of the microscope through an inclined dichroic mirror, and certain optical path adjustment operations are required during the test, which brings many inconveniences to the user's detection operation. Summary of the Invention

[0003] The embodiment of the present application provides a micro Raman microscope device that can simultaneously perform microscopic imaging and Raman spectroscopy detection.

[0004] On the one hand, an embodiment of the present application provides a micro-Raman microscope device, including: an imaging component, which defines a first direction, where the first direction is the incident direction of light when the imaging device is imaging; a first dichroic mirror, which includes a first surface and a second surface, the imaging component faces the first surface, the first dichroic mirror defines a second direction, and light incident on the first surface along the second direction is emitted along the first direction; a laser, which defines a third direction, and the laser emits laser light along the third direction; a second dichroic mirror, which includes a third surface and a fourth surface, the laser faces the third surface; the laser light is incident on the third surface along the third direction, and the laser light is emitted in a direction opposite to the second direction; the second dichroic mirror is located on one side of the first dichroic mirror along the second direction; and a Raman spectroscopy component, where light is incident on the Raman spectroscopy component along the second direction, and the first dichroic mirror and the second dichroic mirror are both located on one side of the Raman spectroscopy component in a direction opposite to the second direction.

[0005] According to one aspect of an embodiment of the present application, a first optical component is further included for collecting light, and the first optical component is located between the second dichroic mirror and the Raman spectrum component; the optical axis of the first optical component coincides with the second direction.

[0006] According to one aspect of an embodiment of the present application, a filter is further included, and the first optical component includes a first lens, which is located between the filter and the Raman spectrum component; the optical axis of the first lens coincides with the second direction.

[0007] According to one aspect of an embodiment of the present application, a second optical component is further included for converging light. The second optical component is located on the side of the Raman spectroscopy component in the opposite direction along the second direction. The first dichroic mirror and the second dichroic mirror are both located between the second optical component and the Raman spectroscopy component. The optical axis of the second optical component coincides with the second direction.

[0008] According to one aspect of an embodiment of the present application, a third optical component is further included for converging light. The third optical component is located between the imaging component and the first dichroic mirror, and the optical axis of the third optical component coincides with the first direction.

[0009] According to one aspect of the embodiment of the present application, the first direction is parallel to the third direction; the first direction is perpendicular to the second direction, and the first dichroic mirror is parallel to the second dichroic mirror.

[0010] According to one aspect of an embodiment of the present application, the first dichroic mirror includes a first characteristic wavelength, the first dichroic mirror reflects light with a wavelength less than the first characteristic wavelength, and the first dichroic mirror transmits light with a wavelength greater than or equal to the first characteristic wavelength; the second dichroic mirror includes a second characteristic wavelength, the second dichroic mirror reflects light with a wavelength less than the second characteristic wavelength, and the second dichroic mirror transmits light with a wavelength greater than or equal to the second characteristic wavelength.

[0011] According to one aspect of an embodiment of the present application, a Raman spectroscopy component includes a first reflector, a second reflector, a reflection grating, and an image sensor; the incident direction of the first reflector coincides with the second direction, the reflection grating is located in the exit direction of the first reflector, the second reflector is located in the exit direction of the grating, and the image sensor is located in the exit direction of the second reflector.

[0012] According to one aspect of an embodiment of the present application, the line between the center of the first reflector and the center of the reflective grating defines a first line segment, and the line between the center of the second reflector and the center of the image sensor defines a second line segment, and the first line segment and the second line segment intersect or separate.

[0013] According to one aspect of an embodiment of the present application, the first reflecting mirror and the second reflecting mirror are both concave reflecting mirrors.

[0014] The micro-Raman microscope provided in the embodiment of the present application combines the incident light path of the imaging component and the output light path of the laser into the incident light path of the Raman spectroscopy component through a first dichroic mirror and a second dichroic mirror, so that the micro-imaging light path and the Raman spectroscopy detection light path partially overlap, thereby achieving the combination of the micro-imaging light path and the Raman spectroscopy detection light path, reducing the volume of the micro-Raman microscope and facilitating the miniaturization and portability of the micro-Raman microscope. In addition, the micro-imaging light path and the Raman spectroscopy detection light path partially overlap, and both the micro-imaging light path and the Raman spectroscopy detection light path use the first dichroic mirror. Under the premise that the position of the first dichroic mirror is determined, the difficulty of debugging the coupling of the micro-imaging light path and the Raman spectroscopy detection light path can be simplified. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following briefly introduces the drawings required for use in the embodiments of the present application. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0016] Figure 1 A schematic structural diagram of a micro-Raman microscope device according to an embodiment of the present application;

[0017] Figure 2 An optical path diagram of a micro-Raman microscope device according to an embodiment of the present application;

[0018] Figure 3 Another schematic structural diagram of the micro-Raman microscope device according to an embodiment of the present application;

[0019] Figure 4 Another optical path diagram of the micro-Raman microscope device according to an embodiment of the present application;

[0020] Figure 5 A schematic diagram of the internal structure of a Raman spectroscopy component of a micro-Raman microscope device according to an embodiment of the present application;

[0021] Figure 6 An internal optical path diagram of a Raman spectroscopy component of a micro-Raman microscope device according to an embodiment of the present application;

[0022] Figure 7 Schematic diagram of another internal structure of the Raman spectroscopy component of the micro-Raman microscope device according to an embodiment of the present application;

[0023] Figure 8 Another internal optical path diagram of the Raman spectroscopy component of the micro-Raman microscope device according to an embodiment of the present application.

[0024] Reference numerals:

[0025] 1. Imaging components;

[0026] 2. First dichroic mirror; 21. First surface; 22. Second surface;

[0027] 3. Laser;

[0028] 4. Second dichroic mirror; 41. Third surface; 42. Fourth surface;

[0029] 5. Raman spectroscopy component; 51. First reflector; 52. Second reflector; 53. Reflection grating; 54. Image sensor; 55. First line segment; 56. Second line segment;

[0030] 6. First optical component; 61. First lens; 62. Filter;

[0031] 7. Second optical component; 71. Second lens;

[0032] 8. Third optical component; 81. Third convex lens;

[0033] 9. The object being tested;

[0034] A. First direction; B. Second direction; C. Third direction. DETAILED DESCRIPTION

[0035] The features and exemplary embodiments of various aspects of the present application will be described in detail below. In the detailed description below, many specific details are proposed to provide a comprehensive understanding of the present application. However, it will be apparent to those skilled in the art that the present application can be implemented without the need for some of these specific details. The following description of the embodiments is merely intended to provide a better understanding of the present application by illustrating the examples of the present application.

[0036] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present application can be combined with each other. The embodiments will be described in detail below with reference to the accompanying drawings.

[0037] Relational terms such as first and second, etc., are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "comprises," "comprising," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that includes a list of elements includes not only those elements but also other elements not explicitly listed, or elements inherent to such process, method, article, or apparatus. In the absence of further limitations, an element defined by the phrase "comprising..." does not preclude the presence of additional identical elements in the process, method, article, or apparatus that includes the element.

[0038] It should be understood that when describing the structure of a component, when a layer or a region is referred to as being "on" or "over" another layer or region, it may mean that it is directly on the other layer or region, or that other layers or regions are included between it and the other layer or region. Furthermore, if the component is turned over, the layer or region will be "below" or "beneath" the other layer or region.

[0039] In this document, the term "and / or" simply describes a relationship between related objects, indicating that three possible relationships exist. For example, "A and / or B" can represent: A exists alone, A and B exist simultaneously, or B exists alone. Furthermore, the character " / " in this document generally indicates that the related objects are in an "or" relationship.

[0040] It should be understood that in the embodiments of the present application, "B corresponding to A" means that B is associated with A and B can be determined based on A. However, it should also be understood that determining B based on A does not mean determining B based solely on A, but B can also be determined based on A and / or other information.

[0041] Figure 1 A schematic structural diagram of a micro-Raman microscope device according to an embodiment of the present application; Figure 2 This is an optical path diagram of the micro-Raman microscope device according to an embodiment of the present application.

[0042] refer to Figure 1 and Figure 2 An embodiment of the present application provides a micro-Raman microscope device, including: an imaging component 1, which defines a first direction A, where the first direction A is the incident direction of light when the imaging device is imaging; a first dichroic mirror 2, which includes a first surface 21 and a second surface 22, and the imaging component 1 faces the first surface 21. The first dichroic mirror 2 defines a second direction B, and light incident on the first surface 21 along the second direction B is emitted along the first direction A; a laser 3, which defines a third direction C, and the laser 3 emits laser light along the third direction C; a second dichroic mirror 4, which includes a third surface 41 and a fourth surface 42, and the laser 3 faces the third surface 41; the laser light is incident on the third surface 41 along the third direction C, and the laser light is emitted in the opposite direction of the second direction B; a Raman spectrum component 5, where light is incident on the Raman spectrum component 5 along the second direction B, and the first dichroic mirror 2 and the second dichroic mirror 4 are both located on the side of the Raman spectrum component 5 in the opposite direction of the second direction B.

[0043] It should be noted that the reference Figure 2When using the micro-Raman microscope apparatus according to an embodiment of the present application, the object 9 is placed opposite the first dichroic mirror 2 in the direction of the second direction B. The optical axis of the first imaging assembly 1 is the first direction A. The optical axis of the first dichroic mirror 2 is the second direction B. The optical axis of the laser 3 is the third direction C.

[0044] Continue to refer Figure 1 and Figure 2 The imaging component 1, the first dichroic mirror 2, and the object to be detected 9 form a microscopic imaging optical path. The first surface 21 of the first dichroic mirror 2 can reflect some light of specific wavelengths and transmit light of other specific wavelengths, and the second surface 22 of the first dichroic mirror 2 can transmit light. When the object to be detected 9 emits or reflects light emitted along the second direction B, the light at this time will be reflected by the first surface 21 of the first dichroic mirror 2 and emitted along the first direction A toward the imaging component 1, thereby realizing microscopic imaging of the object to be detected 9. Exemplarily, the imaging component 1 can be a CMOS (Complementary Metal-Oxide-Semiconductor) sensor.

[0045] Continue to refer Figure 1 and Figure 2 , the laser 3, the second dichroic mirror 4, the object to be detected 9 and the Raman spectrum component 5 form a Raman spectrum detection optical path. The third surface 41 of the second dichroic mirror 4 can reflect some light of specific wavelengths and transmit light of other specific wavelengths, and the fourth surface 42 of the second dichroic mirror 4 can transmit light. The laser 3 emits laser light along the third direction C. The laser light is reflected by the third surface 41 of the second dichroic mirror 4, transmits the second surface 22 of the first dichroic mirror 2 along the first direction A, and irradiates the object to be detected 9. When the laser light irradiates the object to be detected 9, in addition to directly reflecting the laser light, Raman scattered light is also generated. The directly reflected light will be reflected by the first surface 21 of the first dichroic mirror 2, and the imaging component 1 along the first direction A to realize microscopic imaging during the Raman spectrum detection process. The Raman scattered light passes through the first surface 21 of the first dichroic mirror 2 along the second direction B, and passes through the third surface 41 of the second dichroic mirror 4, and then is emitted along the second direction B toward the Raman spectroscopy component 5, so that the Raman spectroscopy component 5 obtains a spectral image of the detected object 9. The micro-micro Raman microscope device of the embodiment of the present application can combine the Raman spectroscopy detection optical path and the microscopic imaging optical path. In addition, because the first dichroic mirror 2 is shared, the coupling and debugging process of the Raman spectroscopy detection optical path and the microscopic imaging optical path is simplified under the premise that the position of the first dichroic mirror 2 is fixed, reducing the volume of the entire micro-micro Raman microscope and facilitating miniaturization and portability.

[0046] The first dichroic mirror 2 includes a first characteristic wavelength, and reflects light with a wavelength less than the first characteristic wavelength, while transmitting light with a wavelength greater than or equal to the first characteristic wavelength. The second dichroic mirror 4 includes a second characteristic wavelength, and reflects light with a wavelength less than the second characteristic wavelength, while transmitting light with a wavelength greater than or equal to the second characteristic wavelength. Considering that light after Raman scattering typically has a longer wavelength than other stray light, the first dichroic mirror 2 transmits light with a wavelength greater than or equal to the first characteristic wavelength, while the second dichroic mirror 4 transmits light with a wavelength slightly greater than or equal to the second characteristic wavelength. This allows Raman scattered light to pass through the first and second dichroic mirrors 2 and 4, while normally reflected laser light is reflected by the first dichroic mirror 2. For example, if the laser wavelength is 785 nm, the first characteristic wavelength may be 700 nm, and the second characteristic wavelength may be 790 nm. Figure 3 Another schematic structural diagram of the micro-Raman microscope device according to an embodiment of the present application; Figure 4 Another optical path diagram of the micro-Raman microscope device according to an embodiment of the present application.

[0047] refer to Figure 3 and Figure 4 The micro-Raman microscope device of the embodiment of the present application further includes a first optical component 6 for collecting light. The first optical component 6 is located between the second dichroic mirror 4 and the Raman spectroscopy component 5; the optical axis of the first optical component 6 coincides with the second direction B. The first optical component 6 is used to collect Raman scattered light transmitted from the second dichroic mirror 4 to the Raman spectroscopy component 5, so that the Raman spectroscopy component 5 obtains a Raman spectrum of the detected object 9. It should be noted that the first optical component 6 can include at least one optical element, wherein the optical element includes one or more of a convex lens, a concave lens, a plane reflector, and a curved reflector.

[0048] Further, continue to refer to Figure 3 and Figure 4The micro-Raman microscope device also includes a filter 62. The first optical component 6 includes a first lens 61. The first lens 61 is used to converge light and is located between the filter 62 and the Raman spectroscopy component 5. The optical axis of the first lens 61 coincides with the second direction B. The first optical component 6 utilizes a single convex lens to converge light. The filter 62 is used to filter out any stray light that may be present. Considering that Raman scattered light typically has a longer wavelength than other stray light, a long-pass filter 62 can be used as the filter 62. On the one hand, the first lens 61 focuses the laser onto the sample. On the other hand, the reverse Raman signal excited by the object 9 being inspected and the optical image signal on the surface of the object 9 are collected by the first lens 61. These two signals have different spectral bands. The optical image signal is transmitted to the imaging component 1 via the first dichroic mirror 2, while the Raman signal passes through the first dichroic mirror 2 and the second dichroic mirror 4 and is converged into the Raman spectroscopy component 5 by the first lens 61.

[0049] Continue to refer Figure 3 and Figure 4 The micro-Raman microscope device also includes a second optical component 7 for converging light and transmitting the optical image signal collected by the second optical component 7 to the imaging component 1. The second optical component 7 is located on the side opposite to the Raman spectroscopy component 5 along the second direction B. The first dichroic mirror 2 and the second dichroic mirror 4 are both located between the second optical component 7 and the Raman spectroscopy component 5; the optical axis of the second optical component 7 coincides with the second direction B. The object 9 to be detected is located on the side opposite to the second direction B of the second optical component 7. The second optical component 7 is used to converge light emitted or reflected from the object 9 to be detected. The light emitted or reflected by the object 9 is converged by the second optical component 7 and emitted along the second direction B in the form of nearly parallel light, thereby improving light utilization and enhancing the accuracy of Raman spectroscopy detection and microscopic imaging. The second optical component 7 may include at least one optical element, wherein the optical element includes one or more of a convex lens, a concave lens, a plane reflector, and a curved reflector. Exemplarily, the second optical component 7 is in the form of a single convex lens, that is, the second optical component 7 includes a second lens 71.

[0050] Continue to refer Figure 3 and Figure 4The micro-Raman microscope device also includes a third optical component 8 for converging light. The third optical component 8 is located between the imaging component 1 and the first dichroic mirror 2, and the optical axis of the third optical component 8 coincides with the first direction A. The third optical component 8 is used to converge the light reflected from the first dichroic mirror 2 to the imaging component 1, so that the imaging component 1 obtains an image of the object to be detected 9. The third optical component 8 may include at least one optical element, wherein the optical element includes one or more of a convex lens, a concave lens, a plane reflector, and a curved reflector. Exemplarily, the third optical component 8 is in the form of a single convex lens, that is, the third optical component 8 includes a third convex lens 81. It should be noted that since the Raman spectroscopy component 5 will split the incident light, the light needs to be incident from the slit of the Raman spectroscopy component 5, and the converged light can be more easily incident on the Raman spectroscopy component 5.

[0051] Further, continue to refer to Figure 3 and Figure 4 , the first direction A is parallel to the third direction C; the first direction A is perpendicular to the second direction B, and the first dichroic mirror 2 is parallel to the second dichroic mirror 4. It should be noted that the first direction A and the third direction C can be parallel or intersecting. When the first direction A and the third direction C are parallel, the space occupied by the optical path between the imaging assembly 1 and the first dichroic mirror 2 and the optical path between the laser 3 and the second dichroic mirror 4 can be reduced, thereby further reducing the size of the micro-Raman microscope apparatus of the embodiment of the present application.

[0052] Figure 5 A schematic diagram of the internal structure of a Raman spectroscopy component of a micro-Raman microscope device according to an embodiment of the present application; Figure 6 An internal optical path diagram of a Raman spectroscopy component of a micro-Raman microscope device according to an embodiment of the present application; Figure 7 Schematic diagram of another internal structure of the Raman spectroscopy component of the micro-Raman microscope device according to an embodiment of the present application; Figure 8 Another internal optical path diagram of the Raman spectroscopy component of the micro-Raman microscope device according to an embodiment of the present application.

[0053] Further, refer to Figures 5 to 8 The Raman spectrometer assembly 5 includes a first reflector 51, a second reflector 52, a reflective grating 53, and an image sensor 54. The incident direction of the first reflector 51 coincides with the second direction B. The reflective grating 53 is located in the outgoing direction of the first reflector 51, the second reflector 52 is located in the outgoing direction of the grating, and the image sensor 54 is located in the outgoing direction of the second reflector 52. Light entering the Raman spectrometer assembly 5 is first reflected by the first reflector 51 toward the reflective grating 53. The reflective grating 53 then emits light, diffracting and splitting light of different wavelengths. The split light is then reflected by the second reflector 52 toward the image sensor 54, which obtains a Raman spectrum of the object 9 being detected.

[0054] Optionally, continue to refer to Figure 5 and Figure 7 The line connecting the center of the first reflector 51 and the center of the reflective grating 53 defines a first line segment 55, and the line connecting the center of the second reflector 52 and the center of the image sensor 54 defines a second line segment 56. The first line segment 55 and the second line segment 56 intersect or separate. When the first line segment 55 and the second line segment 56 are separated, the Raman spectrometer assembly 5 corresponds to a symmetrical spectral optical path, and the light paths within the Raman spectrometer assembly 5 do not have any obvious intersections. When the first line segment 55 and the second line segment 56 intersect, the Raman spectrometer assembly 5 corresponds to a crossed spectral optical path, and the light paths within the Raman spectrometer assembly 5 do have obvious intersections.

[0055] Further, continue to refer to Figure 6 and Figure 8 The first reflector 51 and the second reflector 52 are both concave reflectors. Considering that light is in a convergent state when entering the Raman spectrometer component 5 and becomes divergent after entering the Raman spectrometer component 5, the concave reflector can effectively converge the light and use it for spectral imaging of the image sensor 54, thereby improving the accuracy and reliability of Raman spectrometer detection.

[0056] In summary, the micro-Raman microscope device provided in the embodiment of the present application combines the incident light path of the imaging component and the output light path of the laser into the incident light path of the Raman spectroscopy component through the first dichroic mirror and the second dichroic mirror, so that the micro-imaging light path and the Raman spectroscopy detection light path partially overlap, thereby realizing the combination of the micro-imaging light path and the Raman spectroscopy detection light path, reducing the volume of the micro-Raman microscope device, and facilitating the miniaturization and portability of the micro-Raman microscope device. In addition, the micro-imaging light path and the Raman spectroscopy detection light path partially overlap, and both the micro-imaging light path and the Raman spectroscopy detection light path use the first dichroic mirror. Under the premise that the position of the first dichroic mirror is determined, the difficulty of debugging the coupling of the micro-imaging light path and the Raman spectroscopy detection light path can be simplified.

[0057] The above description is merely a specific embodiment of the present application, but the scope of protection of the present application is not limited thereto. Any person skilled in the art can easily conceive of various equivalent modifications or substitutions within the technical scope disclosed in the present application, and such modifications or substitutions should be included in the scope of protection of the present application. Therefore, the scope of protection of the present application should be based on the scope of protection of the claims.

Claims

1. A micro Raman microscope, characterized in that: include: An imaging component defines a first direction, where the first direction is the incident direction of light when the imaging component forms an image; A first dichroic mirror, comprising a first surface and a second surface, the imaging assembly facing the first surface, the first dichroic mirror defining a second direction, and light incident on the first surface along the second direction being emitted along the first direction; a laser, defining a third direction, wherein the laser emits laser light along the third direction; a second dichroic mirror, comprising a third surface and a fourth surface, the laser facing the third surface; the laser entering the third surface along the third direction and being emitted in a direction opposite to the second direction; the second dichroic mirror being located on one side of the first dichroic mirror along the second direction; a Raman spectroscopy component, wherein light is incident on the Raman spectroscopy component along a second direction, and the first dichroic mirror and the second dichroic mirror are both located on a side of the Raman spectroscopy component opposite to the second direction; The first dichroic mirror includes a first characteristic wavelength, the first dichroic mirror reflects light with a wavelength less than the first characteristic wavelength, and the first dichroic mirror transmits light with a wavelength greater than or equal to the first characteristic wavelength; the second dichroic mirror includes a second characteristic wavelength, the second dichroic mirror reflects light with a wavelength less than the second characteristic wavelength, and the second dichroic mirror transmits light with a wavelength greater than or equal to the second characteristic wavelength; The Raman spectroscopy assembly includes a first reflector, a second reflector, a reflective grating, and an image sensor; the incident direction of the first reflector coincides with the second direction, the reflective grating is located in the outgoing direction of the first reflector, the second reflector is located in the outgoing direction of the grating, and the image sensor is located in the outgoing direction of the second reflector; A line connecting the center of the first reflector and the center of the reflective grating defines a first line segment, a line connecting the center of the second reflector and the center of the image sensor defines a second line segment, and the first line segment and the second line segment intersect or separate.

2. The micro-Raman microscope according to claim 1, characterized in that: It also includes a first optical component for collecting light, wherein the first optical component is located between the second dichroic mirror and the Raman spectrum component; the optical axis of the first optical component coincides with the second direction.

3. The micro-Raman microscope according to claim 2, characterized in that: It also includes a filter, the first optical component includes a first lens, and the first lens is located between the filter and the Raman spectrum component; the optical axis of the first lens coincides with the second direction.

4. The micro-Raman microscope according to claim 1, characterized in that: The invention also includes a second optical component for converging light, wherein the second optical component is located on a side of the Raman spectroscopy component in a direction opposite to the second direction, and the first dichroic mirror and the second dichroic mirror are both located between the second optical component and the Raman spectroscopy component; and the optical axis of the second optical component coincides with the second direction.

5. The micro-Raman microscope according to claim 1, characterized in that: It also includes a third optical component for converging light. The third optical component is located between the imaging component and the first dichroic mirror, and the optical axis of the third optical component coincides with the first direction.

6. The micro-Raman microscope according to claim 1, characterized in that: The first direction is parallel to the third direction; the first direction is perpendicular to the second direction, and the first dichroic mirror is parallel to the second dichroic mirror.

7. The micro-Raman microscope according to claim 1, characterized in that: The first reflecting mirror and the second reflecting mirror are both concave reflecting mirrors.

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