Pneumatic brake device, control method thereof and motion platform

Abstract

The application provides a kind of pneumatic brake device and its control method and motion platform.The pneumatic brake device includes: base, being configured to be connectable with mobile station;Resilient member;And pneumatic structure, with floating state and brake state, pneumatic structure includes air cushion, the first surface of air cushion is configured to be able to align fixed station, resilient member is arranged between the second surface of air cushion and base, air cushion is provided with mutually communicating positive pressure interface and positive pressure outlet, and positive pressure outlet is opened inward along the first surface of air cushion, and positive pressure interface is configured to be able to communicate positive pressure gas source;In brake state, positive pressure gas source is closed, and resilient member will the first surface of air cushion be pressed against fixed station under the action of its elastic force.The technical scheme of the application can solve the problem that existing mobile station and fixed station cannot be fixed relatively when precision equipment stops.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of precision equipment, in particular to a pneumatic brake device, a control method thereof and a motion platform. BACKGROUND

[0002] In a semiconductor precision equipment, a moving table and a fixed table are included in a sliding fit, the moving table can move relative to the fixed table, when the precision equipment stops, no fixing structure is arranged between the moving table and the fixed table, when the moving table is subjected to an external force, the moving table is prone to shaking and deviation, resulting in a change in the relative position of the moving table and the fixed table, since the moving table and the fixed table are applied to the precision equipment, the positional relationship therebetween requires high precision, and a slight deviation has a great influence on subsequent use. SUMMARY

[0003] The main purpose of the present application is to provide a pneumatic brake device, a control method thereof and a motion platform, which can solve the problem that the moving table and the fixed table cannot be fixed relative to each other when the precision equipment stops.

[0004] In order to achieve the above-mentioned purpose, according to one aspect of the present application, a pneumatic brake device is provided, comprising: a base configured to be connectable with a moving table; an elastic member; and a pneumatic structure having a floating state and a braking state, the pneumatic structure comprising an air cushion, a first surface of the air cushion being configured to be alignable with a fixed table, the elastic member being arranged between a second surface of the air cushion and the base, the air cushion being provided with a positive pressure interface and a positive pressure outlet hole in communication with each other, the positive pressure outlet hole being inwardly provided along the first surface of the air cushion, the positive pressure interface being configured to be connectable with a positive pressure gas source; in the floating state, the positive pressure gas source is opened, the gas of the positive pressure gas source enters along the positive pressure interface and is output from the positive pressure outlet hole, forming an air film between the first surface of the air cushion and the fixed table, so as to form an air gap between the air cushion and the fixed table, and the moving table can move relative to the fixed table; in the braking state, the positive pressure gas source is closed, and the elastic member abuts against the fixed table with the first surface of the air cushion under the action of the elastic force of the elastic member.

[0005] Further, an equalizing groove is further provided on the air cushion, the equalizing groove is inwardly provided along the first surface of the air cushion, the positive pressure outlet hole is in communication with the equalizing groove, and the equalizing groove is in communication with the positive pressure interface through the positive pressure outlet hole.

[0006] Further, the region where the positive pressure outlet hole and the equalizing groove are located is a positive pressure region, the positive pressure outlet hole and the equalizing groove are both provided as at least two, the positive pressure outlet hole and the equalizing groove are in one-to-one correspondence, and the positive pressure outlet hole and the equalizing groove are uniformly arranged along the circumference of the positive pressure region.

[0007] Further, the air cushion is further provided with a negative pressure groove, a negative pressure air hole and a negative pressure interface, the negative pressure groove is inwardly formed along the first surface of the air cushion, the negative pressure air hole is inwardly formed along the groove bottom of the negative pressure groove, the negative pressure groove forms a negative pressure area, the negative pressure area is concave to the positive pressure area, the negative pressure interface is communicated with the negative pressure air hole, and the negative pressure interface can be communicated with a negative pressure air source.

[0008] Further, the air cushion is further provided with a negative pressure groove, a negative pressure air hole and a negative pressure interface, the negative pressure groove is inwardly formed along the first surface of the air cushion, the negative pressure air hole is inwardly formed along the groove bottom of the negative pressure groove, the negative pressure groove forms a negative pressure area, the negative pressure area is concave to the positive pressure area, the negative pressure interface is communicated with the negative pressure air hole, and the negative pressure interface can be communicated with a negative pressure air source.

[0009] Further, the pneumatic structure further comprises a negative pressure sensor and a negative pressure flow sensor, and the negative pressure sensor and the negative pressure flow sensor are arranged on the communication path between the negative pressure interface and the negative pressure air source.

[0010] Further, the pneumatic structure further comprises a positive pressure sensor and a positive pressure flow sensor, and the positive pressure sensor and the positive pressure flow sensor are arranged on the communication path between the positive pressure interface and the positive pressure air source.

[0011] Further, the pneumatic structure further comprises a positive pressure valve, a negative pressure valve and a controller, the positive pressure valve is arranged on the communication path between the positive pressure interface and the positive pressure air source, the negative pressure valve is arranged on the communication path between the negative pressure interface and the negative pressure air source, and the positive pressure sensor, the positive pressure flow sensor, the positive pressure valve, the negative pressure sensor, the negative pressure flow sensor and the negative pressure valve are in communication connection with the controller.

[0012] Further, the pneumatic structure further comprises a positive pressure valve, a negative pressure valve and a controller, the positive pressure valve is arranged on the communication path between the positive pressure interface and the positive pressure air source, the negative pressure valve is arranged on the communication path between the negative pressure interface and the negative pressure air source, and the positive pressure sensor, the positive pressure flow sensor, the positive pressure valve, the negative pressure sensor, the negative pressure flow sensor and the negative pressure valve are in communication connection with the controller.

[0013] The pneumatic structure further comprises a negative pressure valve, and the negative pressure valve is arranged on the communication path between the negative pressure interface and the negative pressure air source.

[0014] Further, the base is provided with a containing hole and an adjusting hole which are in communication with each other, the elastic member is located in the containing hole, and the pneumatic brake device further comprises an adjusting rod, and a first end of the adjusting rod passes through the adjusting hole and abuts against the elastic member.

[0015] Further, the pneumatic brake device further comprises a decoupling member, and the decoupling member is arranged between the air cushion and the base, and the air cushion and the base are connected with the decoupling member.

[0016] Further, the decoupling member comprises a first decoupling piece and a second decoupling piece, the first decoupling piece is connected with the air cushion, at least two deformation holes are formed in the first decoupling piece, a first decoupling area is formed between the deformation holes, the first decoupling piece and the base are both connected with the second decoupling piece, and a second decoupling area is formed at the connection position between the first decoupling piece and the second decoupling piece.

[0017] Further, the pneumatic brake device further comprises a mounting block and a connecting rod, the first surface of the mounting block faces the decoupling piece, the second surface of the mounting block abuts against the elastic piece, the connecting rod passes through the mounting block and the decoupling piece in sequence and is connected with the air cushion, the deformation hole and the first decoupling area enclose a floating area, and the second surface of the mounting block is entirely located in the floating area.

[0018] In order to achieve the above-mentioned purpose, according to an aspect of the present application, a motion platform is further provided, comprising: a fixed table; a moving table in sliding cooperation with the fixed table; and the above-mentioned pneumatic brake device, the base is connected with the moving table, the first surface of the air cushion faces the fixed table, in the brake state, the first surface of the air cushion abuts against the fixed table, the moving table can be fixed relative to the fixed table, and in the floating state of the pneumatic structure, an air gap is formed between the air cushion and the fixed table, and the moving table can move relative to the fixed table.

[0019] In order to achieve the above-mentioned purpose, according to an aspect of the present application, a control method of the pneumatic brake device is further provided, the method is realized by using the above-mentioned pneumatic brake device, and the method comprises a floating step and a brake step, when a starting instruction is received, the floating step is implemented, the floating step comprises: making the gas of the positive pressure gas source enter the positive pressure interface and output from the positive pressure outlet hole, the gas overcomes the elastic force of the elastic piece, forms an air film between the first surface of the air cushion and the fixed table, and forms an air gap between the air cushion and the fixed table; and when a stopping instruction is received, the brake step is implemented, the brake step comprises: stopping the gas from entering the positive pressure interface, the elastic piece is elongated under the action of its own elastic force, and drives the air cushion to abut against the fixed table.

[0020] By applying the technical scheme of the present application, the pneumatic brake device is added between the moving table and the fixed table, when the precision equipment stops, the pneumatic structure is in the brake state, the first surface of the air cushion abuts against the fixed table, the relative fixation between the moving table and the fixed table is realized, when the moving table is subjected to an external force, the moving table cannot shake and deviate due to the action of the pneumatic brake device, the positional relationship between the moving table and the fixed table does not change, and thus the influence on the use of the precision equipment is avoided; when the precision equipment operates, the gas enters the positive pressure interface from the positive pressure gas source and is output to the fixed table from the positive pressure outlet hole, an opposite force is generated and acts on the elastic piece, the elastic piece is compressed, an air gap is generated between the air cushion and the fixed table, at this time, the fixed relationship between the moving table and the fixed table is released, and the moving table can move relative to the fixed table, so that the normal use of the precision equipment is ensured. BRIEF DESCRIPTION OF DRAWINGS

[0021] The drawings constituting a part of the specification of the present application are used to provide further understanding of the present application, the illustrative embodiments of the present application and the description thereof are used to explain the present application, and do not constitute improper limitations on the present application. In the drawings:

[0022] Figure 1 An explosion structure schematic view of the pneumatic brake device of the embodiment of the present application is shown.

[0023] Figure 2 a schematic diagram of the pneumatic structure of the pneumatic brake device of the present application is shown. Figure 1

[0024] Figure 3 a schematic diagram of the decoupling piece of the pneumatic brake device of the present application is shown. Figure 1

[0025] Figure 4 a schematic diagram of the controller cooperating with other components of the pneumatic brake device of the present application is shown. Figure 1

[0026] Figure 5 a schematic diagram of the moving table of the embodiment of the present application is shown.

[0027] In the above drawings, the following reference signs are used:

[0028] 10, pneumatic brake device; 11, base; 111, adjusting hole; 12, elastic piece; 13, pneumatic structure; 131, air cushion; 1311, positive pressure air outlet hole; 1312, equalizing groove; 1313, negative pressure groove; 1314, negative pressure air suction hole; 1315, isolation groove; 1316, air return hole; 1317, negative pressure sensor; 1318, negative pressure flow sensor; 1319, positive pressure sensor; 1320, positive pressure flow sensor; 1321, positive pressure valve; 1322, negative pressure valve; 1323, controller; 132, positive pressure connector; 133, negative pressure connector; 14, adjusting rod; 15, decoupling piece; 151, first decoupling piece; 1511, deformation hole; 1512, first connecting hole; 152, second decoupling piece; 1521, second connecting hole; 16, mounting block; 161, connecting rod; 20, positive pressure air source; 30, negative pressure air source; 40, fixed table; 50, moving table. DETAILED DESCRIPTION

[0029] It should be noted that the embodiments in the present application and the features in the embodiments can be combined with each other without conflict. The present application will be described in detail below with reference to the drawings and in combination with the embodiments.

[0030] Reference should be made to Figures 1 to 3 ​​​As shown, the application provides a kind of pneumatic brake device 10, comprising: base 11, it is configured to be able to connect with mobile station 50;Resilient member 12;And pneumatic structure 13, with floating state and brake state, pneumatic structure 13 includes air cushion 131, the first face of air cushion 131 is configured to be able to align fixed platform 40, resilient member 12 is arranged between the second face of air cushion 131 and base 11, air cushion 131 is opened with mutually communicating positive pressure interface and positive pressure outlet hole 1311, positive pressure outlet hole 1311 is opened along the first face of air cushion 131 inward, positive pressure interface is configured to be able to communicate positive pressure gas source 20;In floating state, positive pressure gas source 20 opens, the gas of positive pressure gas source 20 enters along positive pressure interface and is exported from positive pressure outlet hole 1311, forms gas film between the first face of air cushion 131 and fixed platform 40, to make air gap between air cushion 131 and fixed platform 40, mobile station 50 can be moved relative to fixed platform 40;In brake state, positive pressure gas source 20 is closed, resilient member 12 is under the action of self elastic force and the first face of air cushion 131 is tightly fixed to fixed platform 40.

[0031] In the embodiment, when the mobile station 50 and the fixed station 40 work, the pneumatic structure 13 is in a floating state, which is achieved by opening the positive pressure gas source 20, gas of the positive pressure gas source 20 enters the positive pressure gas passage inside the air cushion 131 from the positive pressure interface, and is output to the first surface of the air cushion 131 and the fixed station 40 from the positive pressure gas outlet hole 1311, the gas is output to the fixed station 40 and generates a reaction force, which overcomes the elastic force of the elastic member 12 and compresses the elastic member 12, at the same time, the gas forms an air film between the first surface of the air cushion 131 and the fixed station 40, the friction of the gas is very small, so that the mobile station 50 can move relative to the fixed station 40, the abutting relationship between the pneumatic brake device 10 and the fixed station 40 is released, and the pneumatic brake device 10 is connected with the mobile station 50 only through the base 11, at this time, the pneumatic brake device 10 does not affect the relative movement of the mobile station 50 and the fixed station 40, so that the mobile station 50 and the fixed station 40 can work normally. When the mobile station 50 and the fixed station 40 stop relative movement, the pneumatic structure 13 is in a braking state, which is achieved by closing the positive pressure gas source 20, the air film formed between the first surface of the air cushion 131 and the fixed station 40 disappears, at the same time, the reaction force of the gas on the elastic member 12 disappears, the elastic member 12 is elongated in the direction of restoring the original length under the action of its own elasticity, drives the air cushion 131 to move away from the elastic member 12, and makes the first surface of the air cushion 131 abut against the fixed station 40, the relative fixation of the mobile station 50 and the fixed station 40 is realized through the action of the elastic force, at this time, when the mobile station 50 is subjected to an external force, the mobile station 50 cannot move relative to the fixed station 40 due to the fixation of the pneumatic brake device 10, and further cannot shake and deviate, so that the mobile station 50 can stay at the current position relative to the fixed station 40, that is, the relative positional relationship between the mobile station 50 and the fixed station 40 does not change, thereby avoiding the influence on the normal work of the precision equipment.

[0032] Specifically, the positive pressure gas source 20 can be a gas storage tank with a gas blowing function, or a gas blower. The positive pressure interface is communicated with the positive pressure connector 132, so as to facilitate the access of the positive pressure gas source 20.

[0033] Referring to Figures 1 to 3 As shown in the drawings, in an embodiment of the present application, the air cushion 131 is further provided with an equalizing groove 1312, the equalizing groove 1312 is inwardly formed along the first surface of the air cushion 131, the positive pressure gas outlet hole 1311 is communicated with the equalizing groove 1312, and the equalizing groove 1312 is communicated with the positive pressure interface through the positive pressure gas outlet hole 1311.

[0034] In the embodiment, the positive pressure interface, the positive pressure outlet hole 1311 and the equalizing groove 1312 are sequentially communicated, and the gas of the positive pressure gas source 20 enters the positive pressure gas passage inside the air cushion 131 from the positive pressure interface, is then output to the equalizing groove 1312 from the positive pressure outlet hole 1311, and is uniformly output to the space between the first surface of the air cushion 131 and the fixed table 40 from the equalizing groove 1312. The equalizing groove 1312 is used for providing a flow path for the gas, expanding the output space of the gas, and enabling the air film to be quickly formed between the first surface of the air cushion 131 and the fixed table 40, thereby improving the efficiency of switching the air cushion 131 from the braking state to the floating state.

[0035] With reference to Figures 1 to 3 As shown in the drawings, in one embodiment of the present application, the area where the positive pressure outlet hole 1311 and the equalizing groove 1312 are located is a positive pressure area, the positive pressure outlet hole 1311 and the equalizing groove 1312 are both provided as at least two, the positive pressure outlet hole 1311 and the equalizing groove 1312 correspond to each other in one-to-one manner, and the positive pressure outlet hole 1311 and the equalizing groove 1312 are uniformly arranged along the circumference of the positive pressure area.

[0036] In the embodiment, the gas of the positive pressure gas source 20 enters the positive pressure gas passage inside the air cushion 131 from the positive pressure interface, and is then output from each positive pressure outlet hole 1311. The gas output from each positive pressure outlet hole 1311 is output to the space between the first surface of the air cushion 131 and the fixed table 40 along the equalizing groove 1312 corresponding to the positive pressure outlet hole 1311. On the one hand, the arrangement of the plurality of positive pressure outlet holes 1311 and the plurality of equalizing grooves 1312 enables the gas to be quickly and massively output to the space between the first surface of the air cushion 131 and the fixed table 40, so as to quickly form the air film. On the other hand, the uniform arrangement of the positive pressure outlet hole 1311 and the equalizing groove 1312 along the circumference of the positive pressure area ensures the uniformity of the air film, so as to ensure that the first surface of the air cushion 131 and the surface of the fixed table 40 directly opposite to the first surface always maintain a parallel state, thereby ensuring that the elastic member 12 can always stretch and contract along the length direction thereof, and avoiding the offset stretching and contraction of the elastic member 12 to affect the elastic force thereof.

[0037] Specifically, the positive pressure area is located at the edge of the first surface of the air cushion 131. The first surface of the air cushion 131 is circular in shape, the equalizing groove 1312 is an arc-shaped groove, and the curvature of the equalizing groove 1312 is matched with the curvature of the first surface of the air cushion 131. The positive pressure outlet hole 1311 and the equalizing groove 1312 are both three, and the positive pressure outlet hole 1311 is arranged at the central position of the equalizing groove 1312.

[0038] With reference to Figures 1 to 3As shown, in one embodiment of the present application, the air cushion 131 is further provided with a negative pressure groove 1313, a negative pressure suction hole 1314 and a negative pressure interface. The negative pressure groove 1313 is inwardly formed along the first surface of the air cushion 131. The negative pressure suction hole 1314 is inwardly formed along the groove bottom of the negative pressure groove 1313. The negative pressure groove 1313 forms a negative pressure area. The negative pressure area is concave to the positive pressure area. The negative pressure interface is in communication with the negative pressure suction hole 1314. The negative pressure interface can be connected with the negative pressure source 30.

[0039] It should be noted that, in order to quickly switch the pneumatic structure 13 from the floating state to the braking state, the negative pressure source 30 is continuously opened. When the pneumatic structure 13 needs to be switched from the braking state to the floating state, the positive pressure generated by the positive pressure source 20 can overcome the elastic force of the elastic member 12 and also overcome the negative pressure generated by the negative pressure source 30.

[0040] In the embodiment, when the pneumatic structure 13 needs to be switched from the floating state to the braking state, in addition to the elastic force of the elastic member 12, the negative pressure can also be used to switch the pneumatic structure 13 to the braking state. Specifically, the positive pressure source 20 is closed. The gas between the first surface of the air cushion 131 and the fixed table 40 is continuously sucked into the negative pressure gas channel inside the air cushion 131 by the negative pressure source 30, so that the gas film between the first surface of the air cushion 131 and the fixed table 40 disappears, and a negative pressure state is formed between the two, so that the first surface of the air cushion 131 is tightly pressed against the fixed table 40. The negative pressure groove 1313, the negative pressure suction hole 1314 and the negative pressure interface can cooperate with the elastic member 12 to smoothly switch the pneumatic structure 13 from the floating state to the braking state.

[0041] When the pneumatic structure 13 is in the floating state, the first surface of the air cushion 131 is in the state of being attached to the fixed table 40. In order to smoothly perform the suction of the negative pressure suction hole 1314, the negative pressure groove 1313 is arranged, and the negative pressure area is concave to the positive pressure area. At this time, a cavity is formed between the negative pressure groove 1313 and the fixed table 40. When the negative pressure source 30 is started, the gas in the cavity can enter the negative pressure gas channel inside the air cushion 131 through the negative pressure suction hole 1314 and be discharged from the negative pressure interface. That is, the arrangement of the negative pressure groove 1313 can ensure the normal use of the negative pressure suction hole 1314, and further ensure the smooth formation of the negative pressure.

[0042] Specifically, the negative pressure source 30 can be a vacuum machine. The negative pressure groove 1313 is a circular groove and is located at the center of the first surface of the air cushion 131. The negative pressure suction hole 1314 is located at the center of the negative pressure groove 1313. The negative pressure interface is connected with a negative pressure connector 133, which is convenient for the connection of the negative pressure source 30.

[0043] For reference Figures 1 to 3As shown, in one embodiment of the present application, the air cushion 131 is further provided with an isolation groove 1315 and a return hole 1316. The isolation groove 1315 is inwardly formed along the first surface of the air cushion 131, and forms an isolation area between the positive pressure area and the negative pressure area. The return hole 1316 is inwardly formed along the groove bottom of the isolation groove 1315.

[0044] In the present embodiment, the negative pressure area is separated from the positive pressure area, and the return hole 1316 is in communication with the negative pressure gas passage inside the air cushion 131. When the pneumatic structure 13 needs to be switched from the floating state to the braking state, the gas in the negative pressure area first enters the negative pressure gas passage inside the air cushion 131 from the negative pressure suction hole 1314, and forms a negative pressure area between the negative pressure groove 1313 and the fixed table 40. At this time, the gas between the positive pressure area and the fixed table 40 can enter the negative pressure gas passage inside the air cushion 131 through the return hole 1316, so that the gas between the first surface of the air cushion 131 and the fixed table 40 can be quickly discharged, and thus the first surface of the air cushion 131 can quickly abut against the fixed table 40, so as to quickly form the braking state of the pneumatic structure 13.

[0045] In another embodiment, the return hole 1316 is in communication with the external atmosphere, and the negative pressure gas passage inside the air cushion 131 is only in communication with the negative pressure suction hole 1314.

[0046] Specifically, the isolation groove 1315 is an annular groove, and the return hole 1316 is provided as a plurality of return holes which are uniformly arranged along the circumference of the isolation groove 1315, so as to increase the efficiency of discharging the gas in the positive pressure area.

[0047] For reference Figures 1 to 4 As shown, in one embodiment of the present application, the pneumatic structure 13 further comprises a negative pressure sensor 1317 and a negative pressure flow sensor 1318, both of which are arranged on the communication path between the negative pressure interface and the negative pressure gas source 30.

[0048] In the present embodiment, when the negative pressure gas source 30 is started, the negative pressure sensor 1317 can detect the air pressure state between the first surface of the air cushion 131 and the fixed table 40, and the negative pressure flow sensor 1318 can detect the flow of the gas entering the negative pressure suction hole 1314 and the return hole 1316. On the one hand, it can be determined whether the first surface of the air cushion 131 abuts against the fixed table 40, so as to determine whether the pneumatic structure 13 is in the braking state. On the other hand, it can monitor the degree of switching the pneumatic structure 13 from the floating state to the braking state in real time while performing the suction, so as to make corresponding processing in time. On the other hand, it can determine whether the pipeline between the negative pressure gas source 30 and the negative pressure interface and the negative pressure connector 133 have air leakage, so as to replace or repair in time.

[0049] For reference Figures 1 to 4As shown, in one embodiment of the present application, the pneumatic structure 13 further comprises a positive pressure sensor 1319 and a positive pressure flow sensor 1320, both of which are arranged on the communication path between the positive pressure interface and the positive pressure source 20.

[0050] In this embodiment, when the positive pressure source 20 is started, the positive pressure sensor 1319 can detect the pressure of the gas entering the positive pressure gas channel inside the air cushion 131, and the positive pressure flow sensor 1320 can detect the flow of the gas entering the positive pressure gas channel inside the air cushion 131, on the one hand, the speed of the pneumatic structure 13 switching from the braking state to the floating state can be controlled by controlling the pressure and flow of the gas; on the other hand, whether the pipeline between the positive pressure source 20 and the positive pressure interface and the positive pressure connector 132 have a gas leakage can be determined, so as to replace or repair in time.

[0051] For reference Figures 1 to 4 As shown, in one embodiment of the present application, the pneumatic structure 13 further comprises a positive pressure valve 1321, a negative pressure valve 1322 and a controller 1323, the positive pressure valve 1321 is arranged on the communication path between the positive pressure interface and the positive pressure source 20, the negative pressure valve 1322 is arranged on the communication path between the negative pressure interface and the negative pressure source 30, and the positive pressure sensor 1319, the positive pressure flow sensor 1320, the positive pressure valve 1321, the negative pressure sensor 1317, the negative pressure flow sensor 1318 and the negative pressure valve 1322 are all in communication connection with the controller 1323.

[0052] In this embodiment, when the pneumatic structure 13 needs to switch from the floating state to the braking state, the positive pressure valve 1321 is closed and the negative pressure valve 1322 is opened, so as to avoid the positive pressure source 20 entering between the first surface of the air cushion 131 and the fixed table 40 through the positive pressure outlet hole 1311, and thus affecting the formation of the braking state; when the pneumatic structure 13 needs to switch from the braking state to the floating state, the positive pressure valve 1321 is opened, and the negative pressure valve 1322 can be selected to be closed or opened, as long as the negative pressure source 30 does not perform gas suction, both will not affect the formation of the floating state.

[0053] The positive pressure sensor 1319 sends the detected pressure value, the positive pressure flow sensor 1320 sends the detected flow value, the negative pressure sensor 1317 sends the detected pressure value, and the negative pressure flow sensor 1318 sends the detected pressure value to the controller 1323 in real time, the controller 1323 determines whether each component of the pneumatic structure 13 is normal according to the received values, determines the current state of the pneumatic structure 13, and determines whether the pneumatic structure 13 is accurately in the floating state or the braking state, and the controller 1323 is also used to control the positive pressure valve 1321 to be closed and the negative pressure valve 1322 to be opened after receiving the braking signal, and control the positive pressure valve 1321 to be opened after receiving the floating signal.

[0054] Through the above setting, the pneumatic brake device 10 can be monitored in real time, and automatic control is realized, and use is more convenient.

[0055] With reference to Figures 1 to 3 In one embodiment of the present application, the base 11 is provided with a containing hole and an adjusting hole 111 which are in communication with each other, the elastic member 12 is located in the containing hole, and the pneumatic brake device 10 further comprises an adjusting rod 14, the first end of the adjusting rod 14 passes through the adjusting hole 111 and abuts against the elastic member 12.

[0056] In the embodiment, the containing hole is inwardly formed from the base 11 towards the air cushion 131, and is used for containing the elastic member 12, thereby improving the space utilization rate. The containing hole and the adjusting hole 111 are both circular holes, the hole diameter of the containing hole is greater than the hole diameter of the adjusting hole 111, the first end of the adjusting rod 14 is provided with a circular baffle, the baffle is located in the containing hole, the diameter of the baffle towards the adjusting hole 111 is greater than the hole diameter of the adjusting hole 111, so as to avoid the baffle from entering the adjusting hole 111, the elastic member 12, the baffle and the adjusting rod 14 are sequentially arranged, the first end of the elastic member 12 faces the air cushion 131, the second end of the elastic member 12 is in abutting fit with the first surface of the baffle, the second surface of the baffle is fixedly connected with the first end of the adjusting rod 14, the adjusting rod 14 moves to drive the baffle to move, specifically: the adjusting rod 14 moves towards the elastic member 12 to drive the baffle to move towards the elastic member 12, thereby increasing the compression amount of the elastic member 12, and further increasing the braking force of the air cushion 131, on the contrary, the adjusting rod 14 moves away from the elastic member 12 to drive the baffle to move away from the elastic member 12, thereby reducing the compression amount of the elastic member 12, and further reducing the braking force of the air cushion 131.

[0057] Through the above setting, the braking force of the air cushion 131 is adjustable, on the one hand, the compression amount of the elastic member 12 can be adjusted according to different moving platforms 50 and fixed platforms 40, so as to ensure the smooth realization of the brake function and increase the application range of the pneumatic brake device 10; on the other hand, when the elastic member 12 is used for a period of time and the elastic force is weakened, the compression amount of the elastic member 12 is increased through the adjusting rod 14, so that the elastic force of the elastic member 12 is always kept within the required range, the braking force is kept within the required range, the use time and replacement cycle of the elastic member 12 are increased.

[0058] Specifically, the adjusting hole 111 is a threaded hole, the adjusting rod 14 is a screw rod, the adjusting rod 14 adjusts the compression amount of the elastic member 12 by changing the depth of rotating into the adjusting hole 111, and further adjusts the braking force of the air cushion 131.

[0059] With reference to Figures 1 to 3As shown, in one embodiment of the present application, the pneumatic brake device 10 further comprises a decoupling piece 15, which is arranged between the air cushion 131 and the base 11, and the air cushion 131 and the base 11 are connected with the decoupling piece 15.

[0060] In this embodiment, the air cushion 131 will swing in a direction different from the moving direction during the movement relative to the base 11, at this time, the decoupling piece 15 realizes the flexible connection between the air cushion 131 and the base 11, and can offset the swing of the air cushion 131 relative to the base 11 in different directions, on the one hand, it can avoid the damage of the hard connection between the air cushion 131 and the base 11, on the other hand, when the positive pressure air source 20 is opened, due to the swing caused by the above movement, the parallelism of the corresponding surface of the air cushion 131 relative to the fixed table 40 will change, the decoupling piece 15 can adapt to the change of the parallelism, so that the first surface of the air cushion 131 and the corresponding surface of the fixed table 40 always remain parallel, thereby ensuring the uniform formation of the air film.

[0061] For reference, see Figures 1 to 3 As shown, in one embodiment of the present application, the decoupling piece 15 comprises a first decoupling piece 151 and a second decoupling piece 152, the first decoupling piece 151 is connected with the air cushion 131, at least two deformation holes 1511 are arranged on the first decoupling piece 151, and the first decoupling piece 151 and the base 11 are connected with the second decoupling piece 152, and the connection between the second decoupling piece 152 and the first decoupling piece 151 forms a second decoupling area.

[0062] In this embodiment, the first decoupling piece 151 is a circular piece, the deformation hole 1511 comprises a first straight section, an arc section and a second straight section which are sequentially connected, the first straight sections of the two deformation holes 1511 are opposite to each other, and the area between the two first straight sections is a first decoupling area, the second straight sections of the two deformation holes 1511 are opposite to each other, and the area between the two second straight sections is another first decoupling area, when the air cushion 131 swings relative to the base 11, the two first decoupling areas can be deformed to realize the decoupling function, so that Figure 3 The directions shown are for reference in description, the first straight section and the second straight section are vertically arranged, and the first straight section is located above the second straight section, the decoupling direction realized by the first decoupling area is the direction of left and right swing, that is, the arrangement of the first decoupling area can allow the air cushion 131 to swing left and right relative to the base 11, the arc sections of the two deformation holes 1511 are opposite to each other, and the curvature of the arc section is matched with the curvature of the first decoupling piece 151.

[0063] The second decoupling piece 152 is a circular rectangular piece, and two are arranged, one is connected with the first decoupling piece 151, and the other is connected with the base 11. Figure 3The shown direction is taken as a reference for description, two second decoupling pieces 152 are respectively located on the left and right sides of the first decoupling piece 151, and two second decoupling zones are respectively formed at the connection positions of the two second decoupling pieces 152 and the two sides of the first decoupling piece 151, the decoupling direction realized by the second decoupling zone is the up-and-down swinging direction, that is, the arrangement of the second decoupling zone can allow the air cushion 131 to swing up and down relative to the base 11. The combination of the first decoupling zone and the second decoupling zone realizes the flexible connection between the air cushion 131 and the base 11.

[0064] Specifically, the first decoupling piece 151 is provided with two first connecting holes 1512, the first connecting hole 1512 is a threaded hole, the first connecting hole 1512 is located between the two deformation holes 1511, and the first connecting hole 1512 is used for connecting the air cushion 131. Figure 3 The shown direction is taken as a reference for description, two first connecting holes 1512 are arranged side by side in up-and-down direction, the first connecting hole 1512 is used for connecting the air cushion 131; two second connecting holes 1521 are arranged on each second decoupling piece 152, the second connecting hole 1521 is a threaded hole, and the second connecting hole 1521 is used for connecting the base 11. Figure 3 The shown direction is taken as a reference for description, two second connecting holes 1521 are arranged side by side in up-and-down direction on each second decoupling piece 152, and the second connecting hole 1521 is used for connecting the base 11.

[0065] In combination with Figures 1 to 3 As shown, in one embodiment of the present application, the pneumatic brake device 10 further comprises a mounting block 16 and a connecting rod 161, a first surface of the mounting block 16 faces the decoupling piece 15, a second surface of the mounting block 16 abuts against the elastic piece 12, the connecting rod 161 passes through the mounting block 16 and the decoupling piece 15 in sequence and is connected with the air cushion 131, the deformation hole 1511 and the first decoupling zone surround a floating zone, and the second surface of the mounting block 16 is entirely located in the floating zone.

[0066] In the embodiment, the floating zone is the region between the two first connecting holes 1512, the mounting block 16 is a cylindrical structure, under the action of the swing of the air cushion 131, the floating zone swings correspondingly and drives the mounting block 16 to swing, the second surface of the mounting block 16 is entirely located in the floating zone, which can avoid limiting the swing of the floating zone due to the mounting block 16, thereby ensuring that the decoupling piece 15 smoothly realizes the decoupling effect, that is, the mounting block 16 realizes the avoiding effect, at the same time, the mounting block 16 also realizes the cooperating effect with the elastic piece 12, and the connecting rod 161 realizes the connecting effect of the mounting block 16, the decoupling piece 15 and the air cushion 131.

[0067] Specifically, the second face of the air cushion 131 is provided with two connecting holes coaxial with the two first connecting holes 1512, two connecting rods 161 are provided, and the two connecting rods 161 are coaxial with the two first connecting holes 1512, the connecting rod 161 is first arranged to pass through the first connecting hole 1512 and then arranged to pass through the second connecting hole 1521, so as to realize the connection of the mounting block 16, the decoupling piece 15 and the air cushion 131.

[0068] With reference to Figures 1 to 5 As shown in the drawings, the application further provides a motion platform, comprising: a fixed table 40; a moving table 50 in sliding cooperation with the fixed table 40; and the above-mentioned pneumatic brake device 10, wherein the base 11 is connected with the moving table 50, the first face of the air cushion 131 faces the fixed table 40, in the braking state, the first face of the air cushion 131 abuts against the fixed table 40, and the moving table 50 can be fixed relative to the fixed table 40, and in the floating state, the pneumatic structure 13 forms an air gap between the air cushion 131 and the fixed table 40, and the moving table 50 can move relative to the fixed table 40.

[0069] In the embodiment, the fixed table 40 is provided with a U-shaped mounting groove, and the moving table 50 and the pneumatic brake device 10 are located in the mounting groove, the side wall of the moving table 50 is in sliding cooperation with the side wall of the mounting groove, the base 11 of the pneumatic brake device 10 is connected with the top surface of the moving table 50, the first face of the air cushion 131 faces the side wall of the mounting groove and cooperates with the side wall of the mounting groove, when the moving table 50 and the fixed table 40 stop, the pneumatic structure 13 is in the braking state, the pneumatic brake device 10 generates a pressing force towards the side wall of the mounting groove, the direction of the pressing force is perpendicular to the side wall of the mounting groove, and the pressing force enables the moving table 50 to stably stay at the current position relative to the fixed table 40.

[0070] Specifically, the pneumatic brake device 10 is provided as two, which are respectively matched with the opposite two side walls of the mounting groove, the two pneumatic brake devices 10 are opposite to each other, so as to ensure the stability of the braking process and provide sufficient braking force to avoid the sliding of the moving table 50 relative to the fixed table 40.

[0071] The pneumatic brake device 10 of the motion platform in the embodiment has all the technical solutions and all the technical effects of the above-mentioned pneumatic brake device 10, and details are not repeated here.

[0072] With reference to Figures 1 to 5As shown, the application also provides a control method of the pneumatic brake device 10, which is implemented by using the above-mentioned pneumatic brake device 10, and the method comprises a floating step and a braking step. When a starting instruction is received, the floating step is implemented, and the floating step comprises: making the gas of the positive pressure gas source 20 enter the positive pressure interface and be output from the positive pressure gas outlet hole 1311, the gas overcomes the elastic force of the elastic member 12, and forms a gas film between the first surface of the air cushion 131 and the fixed table 40, so that an air gap is formed between the air cushion 131 and the fixed table 40. When a stopping instruction is received, the braking step is implemented, and the braking step comprises: stopping the gas from entering the positive pressure interface, and the elastic member 12 is elongated under the action of its own elastic force, and drives the air cushion 131 to abut against the fixed table 40.

[0073] In the embodiment, the braking step further comprises: closing the positive pressure gas source 20, and through the continuously opened negative pressure gas source 30, the gas between the first surface of the air cushion 131 and the fixed table 40 is sucked into the negative pressure gas channel inside the air cushion 131, so that the gas film between the first surface of the air cushion 131 and the fixed table 40 disappears, a negative pressure state is formed between the first surface of the air cushion 131 and the fixed table 40, and the first surface of the air cushion 131 is driven to abut against the fixed table 40. The negative pressure groove 1313, the negative pressure gas suction hole 1314 and the negative pressure interface can cooperate with the elastic member 12 to jointly make the pneumatic structure 13 smoothly switch from the floating state to the braking state.

[0074] Through the arrangement of the pneumatic brake device 10, when the moving table 50 and the fixed table 40 are working, the floating step can be implemented, and the normal work of the moving table 50 and the fixed table 40 is not affected by the existence of the pneumatic brake device 10; when the moving table 50 and the fixed table 40 are stopped, the braking step can be implemented, and the relative position relationship between the moving table 50 and the fixed table 40 is not changed due to the movement of the moving table 50 relative to the fixed table 40 under the action of external force.

[0075] In another embodiment, the control method of the pneumatic brake device 10 can be implemented by the controller 1323, and the floating step or the braking step can be automatically implemented, so that the degree of automation and intelligence is improved.

[0076] The pneumatic brake device 10 in the embodiment has all the technical solutions and all the technical effects of the above-mentioned pneumatic brake device 10, and details are not repeated here.

[0077] From the above description, it can be seen that the above-mentioned embodiments of the present application achieve the following technical effects: The pneumatic brake device is added between the mobile table and the fixed table, when the precision equipment stops, the pneumatic structure is in the brake state, the first surface of the air cushion abuts against the fixed table, the relative fixation between the mobile table and the fixed table is realized, when the mobile table is subjected to external force, the mobile table cannot shake and deviate due to the action of the pneumatic brake device, so that the positional relationship between the mobile table and the fixed table will not change, thereby avoiding the influence on the use of the precision equipment; when the precision equipment operates, the gas enters the positive pressure interface from the positive pressure source and is output to the fixed table from the positive pressure outlet hole, and acts on the air cushion, the air cushion overcomes the elastic force of the elastic element and the negative pressure of the negative pressure source, and compresses the elastic element, so that the air gap is generated between the air cushion and the fixed table, at this time, the fixed relationship between the mobile table and the fixed table is released, and the mobile table can move relative to the fixed table, thereby ensuring the normal use of the precision equipment.

[0078] Obviously, the above-described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work should belong to the protection scope of the present application.

[0079] It should be noted that the terms used herein are only intended to describe specific embodiments, and are not intended to limit the exemplary embodiments according to the present application. As used herein, the singular form is intended to include the plural form, unless the context clearly indicates otherwise, and it should be understood that, when the terms "comprise" and / or "include" are used in the specification, there is a feature, step, work, device, component and / or combination thereof.

[0080] The above only describes the preferred embodiments of the present application and is not intended to limit the present application. For those skilled in the art, the present application can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application should be included in the protection scope of the present application.

Claims

1. A pneumatic brake device characterized by comprising: The utility model relates to a kind of air cushion, including: Base (11) is configured to be connectable with mobile station (50); Elastic member (12); And Pneumatic structure (13) has floating state and brake state, the pneumatic structure (13) includes air cushion (131), the first surface of the air cushion (131) is configured to be able to align fixed platform (40), the elastic member (12) is arranged between the second surface of the air cushion (131) and the base (11), air cushion (131) is opened with mutually communicating positive pressure interface and positive pressure outlet hole (1311), the positive pressure outlet hole (1311) is opened along the first surface of the air cushion (131) to the inside, the positive pressure interface is configured to be able to communicate positive pressure gas source (20); In the floating state, the positive pressure gas source (20) is opened, the gas of the positive pressure gas source (20) enters along the positive pressure interface and is output from the positive pressure outlet hole (1311), air film is formed between the first surface of the air cushion (131) and the fixed platform (40), to make the air gap between the air cushion (131) and the fixed platform (40), the mobile station (50) can move relative to the fixed platform (40); In the brake state, the positive pressure gas source (20) is closed, the elastic member (12) is under the action of self elastic force and the first surface of the air cushion (131) is pressed against the fixed platform (40); Air cushion (131) is also opened with equalizing groove (1312), the equalizing groove (1312) is opened along the first surface of the air cushion (131) to the inside, the positive pressure outlet hole (1311) is communicated with the equalizing groove (1312), the equalizing groove (1312) is communicated with the positive pressure interface by the positive pressure outlet hole (1311), wherein the shape of the first surface of the air cushion (131) is circular, the equalizing groove (1312) is arc groove, the radian of the equalizing groove (1312) is adapted to the radian of the first surface of the air cushion (131).

2. The pneumatic brake device according to claim 1, characterized in that The area where the positive pressure outlet hole (1311) and the equalizing groove (1312) are located is a positive pressure area, the positive pressure outlet hole (1311) and the equalizing groove (1312) are both provided as at least two, the positive pressure outlet hole (1311) and the equalizing groove (1312) are one-to-one corresponding, the positive pressure outlet hole (1311) and the equalizing groove (1312) are evenly arranged along the circumference of the positive pressure area.

3. The pneumatic brake device according to claim 2, characterized in that Air cushion (131) is also opened with negative pressure groove (1313), negative pressure suction hole (1314) and negative pressure interface, the negative pressure groove (1313) is opened along the first surface of the air cushion (131) to the inside, the negative pressure suction hole (1314) is opened along the groove bottom of the negative pressure groove (1313) to the inside, the negative pressure groove (1313) forms negative pressure area, the negative pressure area is concave to the positive pressure area, the negative pressure interface is communicated with the negative pressure suction hole (1314), and the negative pressure interface can communicate negative pressure gas source (30).

4. The pneumatic brake apparatus according to claim 3, wherein The air cushion (131) is further provided with an isolation groove (1315) and a return air hole (1316), the isolation groove (1315) is inwardly provided along the first surface of the air cushion (131), the isolation groove (1315) forms an isolation area between the positive pressure area and the negative pressure area, and the return air hole (1316) is inwardly provided along the groove bottom of the isolation groove (1315).

5. A pneumatic brake device according to claim 3 or 4, characterised in that The pneumatic structure (13) further comprises a negative pressure sensor (1317) and a negative pressure flow sensor (1318), and the negative pressure sensor (1317) and the negative pressure flow sensor (1318) are arranged on the communication path of the negative pressure interface and the negative pressure source (30).

6. The pneumatic brake apparatus according to claim 5, wherein The pneumatic structure (13) further comprises a positive pressure sensor (1319) and a positive pressure flow sensor (1320), and the positive pressure sensor (1319) and the positive pressure flow sensor (1320) are arranged on the communication path of the positive pressure interface and the positive pressure source (20).

7. The pneumatic brake apparatus according to claim 6, wherein The pneumatic structure (13) further comprises a positive pressure valve (1321), a negative pressure valve (1322) and a controller (1323), the positive pressure valve (1321) is arranged on the communication path of the positive pressure interface and the positive pressure source (20), the negative pressure valve (1322) is arranged on the communication path of the negative pressure interface and the negative pressure source (30), and the positive pressure sensor (1319), the positive pressure flow sensor (1320), the positive pressure valve (1321), the negative pressure sensor (1317), the negative pressure flow sensor (1318) and the negative pressure valve (1322) are in communication connection with the controller (1323).

8. A pneumatic brake apparatus according to claim 3 or 4, wherein The pneumatic structure (13) further comprises a positive pressure valve (1321), which is arranged on the communication path of the positive pressure interface and the positive pressure source (20); and / or, The pneumatic structure (13) further comprises a negative pressure valve (1322), which is arranged on the communication path of the negative pressure interface and the negative pressure source (30).

9. The pneumatic brake device according to any one of claims 1 to 4, characterized in that The base (11) is provided with a containing hole and an adjusting hole (111) in communication with each other, the elastic member (12) is located in the containing hole, and the pneumatic brake device (10) further comprises an adjusting rod (14), and a first end of the adjusting rod (14) abuts against the elastic member (12) through the adjusting hole (111).

10. The pneumatic brake device according to any one of claims 1 to 4, characterized in that The pneumatic brake device (10) further comprises a decoupling member (15), and the decoupling member (15) is arranged between the air cushion (131) and the base (11), and the air cushion (131) and the base (11) are connected with the decoupling member (15).

11. The pneumatic brake apparatus according to claim 10, wherein The decoupling piece (15) comprises a first decoupling piece (151) and a second decoupling piece (152), the first decoupling piece (151) is connected with the air cushion (131), at least two deformation holes (1511) are formed on the first decoupling piece (151), a first decoupling area is formed between the deformation holes (1511), the first decoupling piece (151) and the base (11) are both connected with the second decoupling piece (152), and a second decoupling area is formed at the connection between the second decoupling piece (152) and the first decoupling piece (151).

12. The pneumatic brake apparatus according to claim 11, wherein The pneumatic brake device (10) further comprises a mounting block (16) and a connecting rod (161), a first surface of the mounting block (16) faces the decoupling piece (15), a second surface of the mounting block (16) abuts against the elastic piece (12), the connecting rod (161) passes through the mounting block (16) and the decoupling piece (15) in sequence and is connected with the air cushion (131), the deformation hole (1511) and the first decoupling area form a floating area, and the second surface of the mounting block (16) is located in the floating area.

13. A motion platform characterized by Comprise: a fixed table (40); a moving table (50) in sliding cooperation with the fixed table (40); and a pneumatic brake device (10) as claimed in any one of claims 1 to 12, wherein the base (11) is connected with the moving table (50), a first surface of the air cushion (131) faces the fixed table (40), in the brake state, the first surface of the air cushion (131) abuts against the fixed table (40), and the moving table (50) is fixed relative to the fixed table (40), and in the floating state, an air gap is formed between the air cushion (131) and the fixed table (40), and the moving table (50) is movable relative to the fixed table (40). The method is implemented by using the pneumatic brake device (10) as claimed in any one of claims 1 to 12, and the method comprises a floating step and a brake step, 14. A control method of a pneumatic brake device, characterized by, when a starting instruction is received, the floating step is implemented, and the floating step comprises: gas of the positive pressure gas source (20) enters the positive pressure interface and is output from the positive pressure gas outlet hole (1311), the gas overcomes the elastic force of the elastic piece (12), and forms an air film between the first surface of the air cushion (131) and the fixed table (40), so that an air gap is formed between the air cushion (131) and the fixed table (40); when a stopping instruction is received, the brake step is implemented, and the brake step comprises: the gas supply to the positive pressure interface is stopped, the elastic piece (12) is elongated under the action of its own elastic force, and the air cushion (131) is driven to abut against the fixed table (40). ​

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