Actuator and method of manufacturing an actuator

Abstract

An actuator is provided that includes a magnetic drive mechanism for rotating a movable body holding an optical element relative to a fixed body. Even when the drive coil of the magnetic drive mechanism is not energized, the movable body can be held in a fixed position in the rotational direction relative to the fixed body, thus reducing costs. In the actuator (1), a magnetic attraction force is generated between a flat magnetic plate (8) and a holding magnet (7) to hold the movable body (3) in a fixed position in the rotational direction of the movable body when the drive coil (16) is not energized. A magnetic plate mounting hole (4e) is formed on the fixed body (4) for mounting and fixing the magnetic plate. The surface of the magnetic plate mounting hole on the side of the holding magnet becomes a contact surface (4f) that contacts the magnetic plate through the magnetic attraction force generated between the magnetic plate and the holding magnet. A recess (4g) is formed on the contact surface that is recessed toward the side of the holding magnet.

Description

TECHNICAL FIELD

[0001] The present application relates to an actuator for rotating an optical element. The present application also relates to a manufacturing method of such an actuator. BACKGROUND

[0002] In the past, an image shift device for vibrating a glass plate (optical glass) through which a projection light is transmitted is known (for example, refer to Patent Literature 1). The image shift device described in Patent Literature 1 is installed in a projector. The image shift device has a glass frame that fixes the glass plate, a base that rotatably holds the glass frame, and a driving portion that rotates the glass frame with respect to the base. The driving portion has a driving magnet fixed to the glass frame, and a driving coil arranged opposite the driving magnet and fixed to the base.

[0003] In addition, the image shift device described in Patent Literature 1 has a braking portion for holding the glass frame at a fixed position in the rotation direction of the glass frame with respect to the base when the driving coil is in a non-energized state (i.e., for holding the glass frame at a certain posture with respect to the base). The braking portion has one frame-side braking magnet fixed to the glass frame, and two base-side braking magnets fixed to the base. The frame-side braking magnet is sandwiched between the two base-side braking magnets. When the driving coil is in the non-energized state, the glass frame is held at the fixed position in the rotation direction of the glass frame with respect to the base by the magnetic repulsive force generated between the frame-side braking magnet and the two base-side braking magnets.

[0004] In addition, in the image shift device described in Patent Literature 1, the positions of the base-side braking magnets can be adjusted by a set screw, and the distance between the frame-side braking magnet and the base-side braking magnets can be adjusted. That is, in this image shift device, the magnetic repulsive force generated between the frame-side braking magnet and the base-side braking magnets can be adjusted by the set screw. Therefore, in this image shift device, the position of the glass frame in the rotation direction of the glass frame with respect to the base when the driving coil is in the non-energized state can be adjusted.

[0005] PRIOR ART DOCUMENTS

[0006] PATENT LITERATURE

[0007] Patent Literature 1: Japanese Patent Application Publication No. 2019-215466 SUMMARY

[0008] The image shift device described in Patent Literature 1 is provided with a brake portion, and thus, in the image shift device, it is possible to hold the glass frame at a fixed position in the direction of rotation of the glass frame with respect to the base when the driving coil is in a non-energized state. However, in the image shift device, in order to hold the glass frame at a fixed position in the direction of rotation of the glass frame with respect to the base when the driving coil is in a non-energized state, three brake magnets are required, and thus, the cost of the image shift device becomes high.

[0009] Therefore, an object of the present application is to provide an actuator provided with a movable body that holds an optical element, a fixed body that rotatably holds the movable body, and a magnetic drive mechanism that rotates the movable body with respect to the fixed body, in which, even when it is possible to hold the movable body at a certain position in the direction of rotation of the movable body with respect to the fixed body when the driving coil of the magnetic drive mechanism is in a non-energized state, it is possible to reduce the cost. In addition, an object of the present application is to provide a manufacturing method of such an actuator.

[0010] To solve the above problems, the actuator of the present application is characterized by comprising: a movable body that holds an optical element; a fixed body that is formed in a frame shape with the movable body disposed on the inner circumferential side and holds the movable body so as to be rotatable; a magnetic drive mechanism that rotates the movable body in a direction in which the movable body is inclined with respect to the fixed body; and a holding magnet and a magnetic plate that hold the movable body at a fixed position with respect to the fixed body in a direction of rotation of the movable body with respect to the fixed body, the magnetic drive mechanism including a drive magnet and a drive coil disposed opposite the drive magnet, the holding magnet being fixed to either one of the movable body and the fixed body, the magnetic plate being formed in a flat plate shape and disposed on one side of the holding magnet in a thickness direction of the magnetic plate, the other one of the movable body and the fixed body being formed of a non-magnetic material, a magnetic plate placement hole in which the magnetic plate is disposed and fixed being formed in the other one of the movable body and the fixed body, the holding magnet being composed of two magnetization portions polarized in a first direction orthogonal to the thickness direction of the magnetic plate, a magnetic attractive force for holding the movable body at the fixed position in the direction of rotation of the movable body when the drive coil is in a non-energized state being generated between the magnetic plate and the holding magnet, and the position of the movable body in the direction of rotation of the movable body when the drive coil is in the non-energized state being defined by the position of the magnetic plate in the first direction, the one side of the first direction being defined as a first direction one side, the other side of the first direction being defined as a first direction other side, the magnetic plate placement hole being open at least on the first direction one side of the other one of the movable body and the fixed body when the first direction one side is defined as the first direction one side and the first direction other side is defined as the first direction other side, a surface of the holding magnet side of the magnetic plate placement hole becoming a contact surface that comes into contact with the magnetic plate by the magnetic attractive force generated between the magnetic plate and the holding magnet, a recessed portion recessed toward the holding magnet side being formed in the contact surface, the recessed portion being formed in a straight line shape from the first direction one side end of the magnetic plate placement hole toward the first direction other side, and the recessed portion being formed at least to the first direction one side end of the magnetic plate.

[0011] The actuator of the present application includes a holding magnet and a magnetic plate that hold the movable body at a fixed position with respect to the fixed body in a direction of rotation of the movable body with respect to the fixed body, a magnetic attractive force for holding the movable body at the fixed position in the direction of rotation of the movable body when the drive coil is in a non-energized state being generated between the magnetic plate and the holding magnet. Thus, in the present application, the magnetic plate formed in a flat plate shape and the holding magnet hold the movable body at the fixed position in the direction of rotation of the movable body when the drive coil is in the non-energized state. Thus, in the present application, the movable body can be held at the fixed position in the direction of rotation of the movable body even when the drive coil is in the non-energized state, and the cost of the actuator can be reduced compared to the image shift device described in Patent Document 1 that has three braking magnets.

[0012] In addition, in the present application, since the position of the movable body in the rotation direction of the movable body when the driving coil is in the non-energized state is defined by the position of the magnetic plate in the first direction orthogonal to the thickness direction of the magnetic plate, the position of the movable body in the rotation direction of the movable body when the driving coil is in the non-energized state can be adjusted by adjusting the position of the magnetic plate in the first direction at the time of manufacturing the actuator.

[0013] In addition, in the present application, the magnetic plate arrangement hole in which the magnetic plate is arranged and fixed is opened on at least the first direction side of the other of the movable body and the fixed body, and thus, at the time of manufacturing the actuator, the position of the magnetic plate in the first direction can be adjusted by inserting a rod-shaped jig from the first direction side of the magnetic plate arrangement hole into the magnetic plate arrangement hole and moving the magnetic plate to the other side in the first direction by bringing the front end surface of the jig into contact with the end surface on the first direction side of the magnetic plate before arrangement in the magnetic plate arrangement hole.

[0014] Furthermore, in the present application, the side of the magnetic plate arrangement hole on which the holding magnet is located becomes a contact surface that comes into contact with the magnetic plate by the magnetic attraction force generated between the magnetic plate and the holding magnet, and a recessed portion recessed toward the side of the holding magnet is formed on the contact surface. In addition, in the present application, the recessed portion is formed in a straight line shape from the first direction side end of the magnetic plate arrangement hole to the other side in the first direction, and is formed at least to the first direction side end of the magnetic plate.

[0015] Therefore, in the present application, for example, even if the thickness of the magnetic plate is very thin, and even if the edge of the front end surface of the jig formed in a rod shape is chamfered, the front end surface of the jig arranged in the recessed portion can be reliably brought into contact with the end surface on the first direction side of the magnetic plate at the time of manufacturing the actuator. Therefore, in the present application, even if the thickness of the magnetic plate is very thin, and even if the edge of the front end surface of the jig formed in a rod shape is chamfered, the position of the magnetic plate in the first direction can be easily adjusted at the time of manufacturing the actuator using the jig.

[0016] In the present application, it is preferable that the recessed portion be formed at a plurality of positions in a second direction orthogonal to the thickness direction of the magnetic plate and the first direction in a state of being spaced apart. If so configured, at the time of manufacturing the actuator, the magnetic plate can be easily moved to the other side in the first direction using a plurality of rod-shaped jigs arranged in a state of being spaced apart in the second direction. Therefore, at the time of manufacturing the actuator, the position of the magnetic plate in the first direction can be more easily adjusted.

[0017] In the present application, it is preferable that the magnetic plate arrangement hole be a through hole that penetrates either of the movable body and the other of the fixed body in the first direction, and the recess be formed in the entire area of the magnetic plate arrangement hole in the first direction. If so configured, when the front end surface of the jig is brought into contact with the end surface of the magnetic plate on the one side in the first direction to move the magnetic plate to the other side in the first direction, even if the magnetic plate is moved excessively to the other side in the first direction, the jig can be inserted into the magnetic plate arrangement hole from the other side in the first direction of the magnetic plate arrangement hole, and the front end surface of the jig arranged in the recess can be reliably brought into contact with the end surface of the magnetic plate on the other side in the first direction to return the magnetic plate to the one side in the first direction.

[0018] In the present application, it is preferable that, if one side in the thickness direction of the magnetic plate is set as the one side in the thickness direction and the other side in the thickness direction of the magnetic plate is set as the other side in the thickness direction, the face of the magnetic plate arrangement hole on the other side in the thickness direction become the contact face, a second recess recessed toward the one side in the thickness direction is formed on the face of the magnetic plate arrangement hole on the one side in the thickness direction, the second recess is formed at the same position as the recess in a second direction orthogonal to the thickness direction and the first direction, and the second recess is formed in the same range as the recess in the first direction. If so configured, even if the width of the magnetic plate arrangement hole in the thickness direction of the magnetic plate is narrow, the jig can be inserted into the magnetic plate arrangement hole using the recess and the second recess to move the magnetic plate to the other side in the first direction.

[0019] In the present application, for example, the actuator is provided with a second magnetic plate that is flat and that is used to hold the movable body at a fixed position with respect to the fixed body in the movable body rotation direction, a driving magnet and a holding magnet are fixed to the movable body, a driving coil, a magnetic plate, and the second magnetic plate are fixed to the fixed body, the driving magnet is composed of two magnetization sections polarized in the first direction, a magnetic attractive force for holding the movable body at the fixed position in the movable body rotation direction when the driving coil is in a non-energized state is generated between the driving magnet and the second magnetic plate, and a positioning section for positioning the second magnetic plate in the first direction is formed on the fixed body. In this case, since adjustment of the position of the second magnetic plate in the first direction is not performed, the manufacturing process of the actuator can be simplified.

[0020] The actuator of the present application is manufactured, for example, by an actuator manufacturing method including: a magnetic plate position adjustment process of inserting a rod-shaped jig arranged in a recess from the one side in the first direction into a magnetic plate arrangement hole and bringing the front end surface of the jig into contact with the end surface on the one side in the first direction of the magnetic plate before fixation arranged in the magnetic plate arrangement hole to move the magnetic plate to the other side in the first direction, thereby adjusting the position of the magnetic plate in the first direction; and a magnetic plate fixation process of fixing the magnetic plate in the magnetic plate arrangement hole after the magnetic plate position adjustment process.

[0021] As described above, in the present invention, in an actuator comprising a movable body that holds optical elements, a fixed body that holds the movable body in a rotatable position, and a magnetic drive mechanism that rotates the movable body relative to the fixed body, when the drive coil of the magnetic drive mechanism is not energized, even if the movable body can be held in a fixed position in the rotation direction of the movable body relative to the fixed body, the cost of the actuator can be reduced. Attached Figure Description

[0022] Figure 1 This is a perspective view of the actuator according to an embodiment of the present invention.

[0023] Figure 2 yes Figure 1 The actuator shown is shown in top view.

[0024] Figure 3 yes Figure 1 An exploded perspective view of the actuator is shown.

[0025] Figure 4 (A) is Figure 2 A sectional view of the EE section. Figure 4 (B) is Figure 2 A sectional view of the FF section.

[0026] Figure 5 yes Figure 2 An enlarged view of part G.

[0027] Figure 6 It is used for explanation Figure 4 The diagram (B) shows the method for adjusting the vertical position of the magnetic plate.

[0028] Figure 7 This is a diagram illustrating the structure of the magnetic plate configuration holes in other embodiments of the present invention.

[0029] Figure 8 This is a diagram illustrating the structure of the magnetic plate configuration holes in other embodiments of the present invention. Detailed Implementation

[0030] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.

[0031] (Overall structure of the actuator)

[0032] Figure 1 This is a perspective view of the actuator 1 according to an embodiment of the present invention. Figure 2 yes Figure 1 The top view of actuator 1 shown. Figure 3 yes Figure 1 An exploded perspective view of actuator 1 is shown. Figure 4 (A) is Figure 2 A sectional view of the EE section.Figure 4 (B) is Figure 2 A sectional view of the FF section.

[0033] In the following explanation, such as Figure 1 As shown, the three mutually orthogonal directions are designated as the X, Y, and Z directions, respectively. The X direction is designated as the left-right direction, the Y direction as the front-back direction, and the Z direction as the up-down direction. Additionally, one side, which is designated as the left-right direction... Figure 1 The X1 direction side is set as the "right" side, and will be the opposite side. Figure 1 The X2 direction side is set as the "left" side, which will be the side used for the front-back direction. Figure 1 The Y1 direction side is designated as the "front" side, and the opposite side is designated as the "back" side. Figure 1 The Y2 direction side is designated as the "rear" side, which will be the side that acts as the vertical direction. Figure 1 The Z1 direction side is designated as the "up" side, and the opposite side will be... Figure 1 The Z2 direction side is set as the "down" side.

[0034] The actuator 1 in this embodiment is a device for vibrating the optical glass 2, which is an optical element, and is used in a projector. The optical glass 2 is a light-transmitting glass plate formed into a square flat plate. The optical glass 2 constitutes part of the projection optical system of the projector. In order to improve the image quality of the image projected by the projector, the actuator 1 causes the optical glass 2 to vibrate at a predetermined frequency and angle, periodically changing the orientation of the optical glass 2. For example, the actuator 1 causes the optical glass 2 to vibrate at 60Hz.

[0035] The actuator 1 is integrally formed as a thin, flat cuboid in the vertical direction. The actuator 1 includes a movable body 3 that holds the optical glass 2 and a fixed body 4 that rotatably holds the movable body 3. The movable body 3 and the fixed body 4 are frame-shaped. The optical glass 2 is disposed on the inner periphery of the movable body 3. The movable body 3 is disposed on the inner periphery of the fixed body 4. Furthermore, the actuator 1 includes: a magnetic drive mechanism 5 that causes the movable body 3 to rotate in a direction inclined relative to the fixed body 4, thereby vibrating the optical glass 2; a fulcrum portion 6 that serves as a fulcrum for the rotation of the movable body 3 relative to the fixed body 4; and a holding magnet 7 and magnetic plates 8 and 9, which are used to hold the movable body 3 in a certain position relative to the fixed body 4 in the direction of rotation of the movable body 3 relative to the fixed body 4. In this embodiment, the magnetic plate 9 is a second magnetic plate.

[0036] In this embodiment, when no current is supplied to the drive coil 16 (described later) which constitutes part of the magnetic drive mechanism 5 (i.e., when the drive coil 16 is not energized), the movable body 3 is positioned at a predetermined reference position relative to the fixed body 4 in the direction of rotation of the movable body. In the direction of rotation of the movable body, when the movable body 3 is positioned at the reference position relative to the fixed body 4, the thickness direction of the optical glass 2 is aligned with the vertical direction.

[0037] Furthermore, in the direction of rotation of the movable body, when the movable body 3 is positioned at a reference position relative to the fixed body 4, in the actuator 1 of the projector, the thickness direction of the optical glass 2 is aligned with the optical axis direction of the projector's projection optical system, and the optical axis of the projector's projection optical system passes through the center of the optical glass 2. Additionally, the rotation angle of the movable body 3 relative to the fixed body 4 when the optical glass 2 vibrates is, for example, less than 0.5°, which is very small. Therefore, regardless of whether the optical glass 2 vibrates, the thickness direction of the optical glass 2 is approximately aligned with the vertical direction.

[0038] When viewed from the outer periphery of the fixed body 4, the movable body 3 is capable of rotating in a direction inclined relative to the fixed body 4. Furthermore, the movable body 3 is capable of rotating in a first orthogonal direction orthogonal to the thickness direction of the optical glass 2. Figure 2 The movable body 3 can rotate relative to the fixed body 4 with the V direction as the axis of rotation. That is, the movable body 3 can rotate with respect to the axis L1 (refer to the first orthogonal direction) as the axis of rotation. Figure 2 The rotation center is relative to the fixed body 4. The first orthogonal direction is orthogonal to the vertical direction. Furthermore, when viewed from above, the first orthogonal direction is relative to the front-back direction. Figure 2 The axis L1 is offset by 45° clockwise. When viewed from the thickness direction of the optical glass 2, the axis L1 passes through the center of the optical glass 2. The fulcrum 6 is disposed on both ends of the movable body 3 in the first orthogonal direction.

[0039] The movable body 3 is a glass holder that holds the optical glass 2. The movable body 3 is formed of a non-magnetic material. Alternatively, the movable body 3 is formed of a resin material. As described above, the movable body 3 is formed in a frame shape. Specifically, the movable body 3 is formed in a square or rectangular frame shape. In the direction of rotation of the movable body, when the movable body 3 is positioned at a reference position relative to the fixed body 4, two of the four sides of the outer peripheral surface of the movable body 3, which has a square or rectangular shape, are parallel to the left-right direction, and the remaining two sides are parallel to the front-back direction.

[0040] The movable body 3 is formed with a magnet arrangement recess 3a that arranges the drive magnet 15 described later that constitutes a part of the magnetic drive mechanism 5 and a magnet arrangement recess 3b that arranges the holding magnet 7. The magnet arrangement recess 3a is recessed from the right end of the movable body 3 to the left side. The magnet arrangement recess 3b is recessed from the left end of the movable body 3 to the right side. The magnet arrangement recesses 3a, 3b are formed in the entire region of the movable body 3 in the thickness direction of the optical glass 2. In addition, as shown in Fig. 1, the movable body 3 is formed with a protrusion 3c that protrudes to both sides in the first orthogonal direction. The protrusion 3c is formed in a cylindrical shape. The axis direction of the protrusion 3c formed in the cylindrical shape coincides with the first orthogonal direction. Figure 3

[0041] As described above, the optical glass 2 is arranged on the inner peripheral side of the movable body 3. The optical glass 2 is fixed to the movable body 3. In the movable body rotation direction, when the movable body 3 is arranged at the reference position with respect to the fixed body 4, two of the four edges of the outer peripheral surface of the optical glass 2 that is square in shape are parallel to the left-right direction, and the remaining two edges are parallel to the front-back direction.

[0042] The fixed body 4 is formed of a non-magnetic material. In addition, the fixed body 4 is formed of a resin material. As described above, the fixed body 4 is formed in a frame shape. Specifically, the fixed body 4 is formed in a square or rectangular frame shape. Two of the four edges of the outer peripheral surface of the fixed body 4 that is square or rectangular in shape are parallel to the left-right direction, and the remaining two edges are parallel to the front-back direction. The fixed body 4 is formed with a coil arrangement recess 4a that arranges the coil 16 described later that constitutes a part of the magnetic drive mechanism 5 and a magnetic plate arrangement recess 4b that arranges the magnetic plate 9.

[0043] The coil arrangement recess 4a and the magnetic plate arrangement recess 4b are formed in the right edge portion of the fixed body 4. The coil arrangement recess 4a is recessed from the left end of the right edge portion of the fixed body 4 to the right side. The coil arrangement recess 4a is formed in the entire region in the up-down direction of the fixed body 4. The magnetic plate arrangement recess 4b is formed to the right of the coil arrangement recess 4a. The magnetic plate arrangement recess 4b is recessed more to the right side than the coil arrangement recess 4a. The magnetic plate arrangement recess 4b is not formed in the entire region in the up-down direction of the fixed body 4, and a magnetic plate placement portion 4c that places the magnetic plate 9 is formed on the lower end side of the right edge portion of the fixed body 4. The upper surface of the magnetic plate placement portion 4c becomes a plane orthogonal to the up-down direction.

[0044] ​Further, the fixed body 4 is provided with a spring arrangement portion 4d in which a leaf spring 13, which is a part of the fulcrum portion 6, is arranged, and a magnetic plate arrangement hole 4e in which the magnetic plate 8 is arranged and fixed. The spring arrangement portion 4d is formed in two corners of one diagonal of the fixed body 4 which is formed in a square frame shape. Specifically, the spring arrangement portion 4d is formed in the corner of the right rear end and the corner of the left front end of the fixed body 4. The magnetic plate arrangement hole 4e is formed in the left side portion of the fixed body 4. The magnetic plate arrangement hole 4e is a through hole which penetrates the fixed body 4 in the up-down direction. Further, the magnetic plate arrangement hole 4e is a square hole which is long in the front-rear direction. The detailed structure of the magnetic plate arrangement hole 4e will be described later.

[0045] The fulcrum portion 6 is provided with a ball 11 which is formed in a spherical shape, a ball holding member 12 for holding the ball 11, and a leaf spring 13 which is formed with a concave curved surface shaped contact surface 13a which contacts a part of the ball 11 at a prescribed contact pressure (refer to FIG. 2). Figure 3 ) The ball 11 is formed of ceramic. The ball holding member 12 is formed of a metal material. The ball holding member 12 is formed in a bottomed cylindrical shape, and has a cylindrical portion which is formed in a cylindrical shape, and a bottom portion which is connected to one end of the cylindrical portion. The inner diameter of the ball holding member 12 is larger than the outer diameter of the ball 11.

[0046] The ball holding member 12 is fixed to the protrusion portion 3c of the movable body 3. The protrusion portion 3c is slightly pressed into the inner peripheral side of the ball holding member 12 from the inner side in the first orthogonal direction. The ball holding member 12 is fixed to the protrusion portion 3c by an adhesive. The ball 11 is arranged on the inner peripheral side of the ball holding member 12. The bottom portion of the ball holding member 12 is arranged at a position which is on the outer side in the first orthogonal direction from the front end surface of the protrusion portion 3c. A gap for arranging the ball 11 is formed between the front end surface of the protrusion portion 3c and the bottom portion of the ball holding member 12.

[0047] A through hole is formed in the bottom portion of the ball holding member 12, and is used to arrange a part of the ball 11 which is arranged on the inner peripheral side of the ball holding member 12 on the outside of the ball holding member 12. The inner diameter of the through hole is smaller than the outer diameter of the ball 11. The ball 11 contacts the bottom surface of the recess formed in the front end surface of the protrusion portion 3c, and contacts the edge of the through hole. A part of the ball 11 is arranged at a position which is on the outer side in the first orthogonal direction from the bottom portion of the ball holding member 12, and is arranged on the outside of the ball holding member 12. The ball 11 is held by the protrusion portion 3c and the ball holding member 12 on the movable body 3.

[0048] The plate spring 13 is formed by bending a metal plate such as a stainless steel plate into a prescribed shape. The plate spring 13 is formed in a U shape. The plate spring 13 is disposed in the spring disposition portion 4d in a manner such that the shape of the plate spring 13 as viewed from the upper and lower directions is a U shape. As viewed from the thickness direction of the optical glass 2, the plate spring 13 disposed at the right rear end and the plate spring 13 disposed at the left front end are disposed in point symmetry with respect to the center of the optical glass 2. The plate spring 13 is fixed to the spring disposition portion 4d in a state of being positioned. The contact surface 13a of the plate spring 13 contacts a portion of the sphere 11 disposed outside the sphere holding member 12 at a prescribed contact pressure from the outside in the first orthogonal direction. The plate spring 13 exerts a force on the sphere 11 toward the inside in the first orthogonal direction.

[0049] The magnetic drive mechanism 5 has a drive magnet 15 and a drive coil 16 disposed opposite the drive magnet 15. The drive magnet 15 is fixed to the movable body 3. Specifically, the drive magnet 15 is disposed in the magnet disposition recess 3a and is fixed to the right surface side of the movable body 3. The drive magnet 15 is formed in a rectangular solid shape elongated in the front and back directions. The drive magnet 15 is composed of two magnetized portions 15a polarized in the upper and lower directions. More specifically, the drive magnet 15 is composed of two magnetized portions 15a polarized in the thickness direction of the optical glass 2.

[0050] The drive coil 16 is, for example, a hollow coil formed by winding a wire into a hollow shape. The drive coil 16 is mounted on a flexible printed board 17. In addition, the drive coil 16 is disposed in the coil disposition recess 4a. The flexible printed board 17 is fixed to the fixed body 4. The drive coil 16 is fixed to the fixed body 4 via the flexible printed board 17. The drive magnet 15 and the drive coil 16 are opposite each other in the left and right directions.

[0051] The magnetic drive mechanism 5 rotates the movable body 3 with respect to the fixed body 4 with the first orthogonal direction as the axis of rotation. In addition, a Hall sensor (omitted from the drawing) for detecting the rotational position of the movable body 3 with respect to the fixed body 4 is mounted on the flexible printed circuit board 17. The Hall sensor is disposed opposite the drive magnet 15. An electric current is supplied to the drive coil 16 based on the detection result of the Hall sensor.

[0052] The holding magnet 7 is fixed to the movable body 3. Specifically, the holding magnet 7 is disposed in the magnet disposition recess 3b and is fixed to the left surface side of the movable body 3. The holding magnet 7 is formed in a rectangular solid shape elongated in the front and back directions. In addition, the holding magnet 7 is composed of two magnetized portions 7a polarized in the upper and lower directions, similarly to the drive magnet 15. More specifically, the holding magnet 7 is composed of two magnetized portions 7a polarized in the thickness direction of the optical glass 2.

[0053] As Figure 2As shown, the center of the front-rear direction of the holding magnet 7 and the center of the front-rear direction of the driving magnet 15 are offset in the front-rear direction. Specifically, the center of the front-rear direction of the holding magnet 7 is disposed at a position on the rear side of the center of the front-rear direction of the driving magnet 15. In the present embodiment, the holding magnet 7 and the driving magnet 15 are disposed in point symmetry with respect to the center of the movable body 3 when viewed in the thickness direction of the optical glass 2. In addition, the holding magnet 7 and the driving magnet 15 are disposed in point symmetry with respect to the center of the optical glass 2 when viewed in the thickness direction of the optical glass 2.

[0054] The magnetic plate 8 is formed of a metal material having magnetism. The magnetic plate 8 is formed in a flat plate shape. Specifically, the magnetic plate 8 is formed in an elongated rectangular flat plate shape. The thickness of the magnetic plate 8 is thin. For example, the thickness of the magnetic plate 8 is about 0.1 to 0.2 (mm), which is very thin. The magnetic plate 8 is disposed so that the thickness direction of the magnetic plate 8 coincides with the left-right direction. That is, the left-right direction (X direction) of the present embodiment is the thickness direction of the magnetic plate 8. In addition, the magnetic plate 8 is disposed so that the long side direction of the magnetic plate 8 formed in a rectangular flat plate shape coincides with the front-rear direction.

[0055] The magnetic plate 8 is disposed in the magnetic plate disposition hole 4e and fixed in the magnetic plate disposition hole 4e. That is, the magnetic plate 8 is fixed to the fixed body 4. The magnetic plate 8 is fixed to the fixed body 4 by an adhesive. For example, the magnetic plate 8 is fixed to the fixed body 4 by a heat-hardening adhesive. In addition, the magnetic plate 8 is disposed on the left side of the holding magnet 7. That is, the magnetic plate 8 is disposed on one side of the holding magnet 7 in the thickness direction of the magnetic plate 8. The left side surface of the holding magnet 7 becomes a plane that is substantially orthogonal to the left-right direction and is magnetized into two poles in the up-down direction. The center of the up-down direction of the left side surface of the holding magnet 7 and the center of the up-down direction of the magnetic plate 8 coincide in the up-down direction by design when the driving coil 16 is in a non-energized state. In the present embodiment, as described later, the position of the magnetic plate 8 in the up-down direction is adjusted before the magnetic plate 8 is fixed to the fixed body 4.

[0056] The left side (X2 direction side) of the present embodiment becomes one side in the thickness direction of the magnetic plate 8, that is, the thickness direction one side, and the right side (X1 direction side) becomes the other side in the thickness direction of the magnetic plate 8, that is, the thickness direction other side. In addition, the up-down direction (Z direction) of the present embodiment becomes a first direction that is orthogonal to the thickness direction of the magnetic plate 8, and the front-rear direction (Y direction) becomes a second direction that is orthogonal to the thickness direction of the magnetic plate 8 and the first direction. Furthermore, the lower side (Z2 direction side) of the present embodiment becomes the first direction one side that is one side of the first direction, and the upper side (Z1 direction side) becomes the first direction other side that is the other side of the first direction.

[0057] The magnetic plate 9 is configured similarly to the magnetic plate 8 and is formed in a flat plate shape. The magnetic plate 9 is disposed so that the thickness direction of the magnetic plate 9 coincides with the left-right direction. In addition, the magnetic plate 9 is disposed so that the long side direction of the flat plate-shaped magnetic plate 9 coincides with the front-rear direction. The magnetic plate 9 is disposed in the magnetic plate disposition recess 4b. As shown in (A) of FIG. 9, the magnetic plate 9 is placed on the magnetic plate placement portion 4c with the lower end surface of the magnetic plate 9 in contact with the upper surface of the magnetic plate placement portion 4c. That is, the magnetic plate 9 is positioned in the up-down direction. Figure 4

[0058] The magnetic plate placement portion 4c of the present embodiment functions as a positioning portion for positioning the magnetic plate 9 in the up-down direction as the first direction. That is, the magnetic plate placement portion 4c as a positioning portion for positioning the magnetic plate 9 in the first direction is formed in the fixed body 4. In addition, the magnetic plate 9 is fixed to the flexible printed substrate 17 and is fixed to the fixed body 4 via the flexible printed substrate 17. The magnetic plate 9 is disposed to the right of the drive magnet 15. The right side surface of the drive magnet 15 is a flat surface that is substantially orthogonal to the left-right direction and is magnetized in two poles in the up-down direction. The center of the right side surface of the drive magnet 15 in the up-down direction and the center of the magnetic plate 9 in the up-down direction coincide in the up-down direction by design when the drive coil 16 is in the non-energized state.

[0059] In the present embodiment, magnetic attractive forces are generated between the magnetic plate 8 and the holding magnet 7 and between the magnetic plate 9 and the drive magnet 15, and these magnetic attractive forces function to hold the movable body 3 in a fixed position in the movable body rotation direction when the drive coil 16 is in the non-energized state (i.e., function to hold the movable body 3 in a certain posture with respect to the fixed body 4). Specifically, magnetic attractive forces are generated between the magnetic plate 8 and the holding magnet 7 and between the magnetic plate 9 and the drive magnet 15, and these magnetic attractive forces function to hold the movable body 3 in a reference position in the movable body rotation direction when the drive coil 16 is in the non-energized state.

[0060] In addition, in the present embodiment, the position of the movable body 3 in the movable body rotation direction when the drive coil 16 is in the non-energized state can be adjusted by adjusting the position of the magnetic plate 8 in the up-down direction. That is, in the present embodiment, the position of the movable body 3 in the movable body rotation direction when the drive coil 16 is in the non-energized state is defined by the position of the magnetic plate 8 in the up-down direction. In addition, in the present embodiment, if the sizes of the magnetic plates 8, 9 are changed, the magnetic attractive force generated between the magnetic plate 8 and the holding magnet 7 and the magnetic attractive force generated between the magnetic plate 9 and the drive magnet 15 change. In addition, by changing the magnetic attractive force generated between the magnetic plate 8 and the holding magnet 7 and the magnetic attractive force generated between the magnetic plate 9 and the drive magnet 15, the resonance frequency of the actuator 1 when the optical glass 2 is vibrated can be changed. ​

[0061] (Structure of magnetic plate arrangement hole)

[0062] Figure 5 is Figure 2 An enlarged view of the G portion of the magnetic plate arrangement hole 4e.

[0063] As described above, the magnetic plate arrangement hole 4e is a through hole that penetrates the fixed body 4 in the up-down direction. That is, the magnetic plate arrangement hole 4e is open at the upper end of the fixed body 4 and the lower end of the fixed body 4. In addition, as described above, the magnetic plate arrangement hole 4e is a square hole that is elongated in the front-rear direction. The width of the magnetic plate arrangement hole 4e in the left-right direction is wider than the thickness of the magnetic plate 8, and the length of the magnetic plate arrangement hole 4e in the front-rear direction is longer than the length in the front-rear direction (the length in the long side direction) of the magnetic plate 8. The face on the right side of the magnetic plate arrangement hole 4e becomes a contact face 4f that comes into contact with the magnetic plate 8 by the magnetic attraction force generated between the magnetic plate 8 and the holding magnet 7. That is, the face on the holding magnet 7 side of the magnetic plate arrangement hole 4e becomes the contact face 4f. The contact face 4f is a plane that is orthogonal to the left-right direction.

[0064] A recessed portion 4g that is recessed toward the right side (that is, toward the holding magnet 7 side) is formed on the contact face 4f. The recessed portion 4g is formed in a straight line shape from the lower end of the magnetic plate arrangement hole 4e toward the upper side. That is, the recessed portion 4g is formed in a straight line shape that is parallel to the up-down direction. The recessed portion 4g of the present embodiment is formed in the entire region in the up-down direction of the magnetic plate arrangement hole 4e, from the lower end of the magnetic plate arrangement hole 4e to the upper end of the magnetic plate arrangement hole 4e. In addition, the recessed portion 4g is formed at a plurality of positions in a state of being spaced apart in the front-rear direction. In the present embodiment, the recessed portion 4g is formed at two positions, the front end portion and the rear end portion of the contact face 4f. The side surface of the recessed portion 4g when viewed in the up-down direction is a concave curved surface that is a circular arc shape.

[0065] The left side face 4h that is the face on the left side of the magnetic plate arrangement hole 4e is a plane that is orthogonal to the left-right direction. A recessed portion 4j that is a second recessed portion that is recessed toward the left side is formed on the left side face 4h. The recessed portion 4j is formed in a straight line shape from the lower end of the magnetic plate arrangement hole 4e to the upper end of the magnetic plate arrangement hole 4e. That is, the recessed portion 4j is formed in a straight line shape that is parallel to the up-down direction. The recessed portion 4j is formed at the same position in the front-rear direction as the recessed portion 4g. That is, the recessed portion 4j is formed at two positions. In addition, as described above, the recessed portion 4j is formed from the lower end of the magnetic plate arrangement hole 4e to the upper end of the magnetic plate arrangement hole 4e, and is formed in the same range in the up-down direction as the recessed portion 4g.

[0066] The side surface of the recessed portion 4j when viewed in the up-down direction is a concave curved surface that is a circular arc shape. The radius of curvature of the side surface of the recessed portion 4j is equal to the radius of curvature of the side surface of the recessed portion 4g. In addition, the center of curvature of the side surface of the recessed portion 4j coincides with the center of curvature of the side surface of the recessed portion 4g when viewed in the up-down direction.

[0067] (Method for manufacturing actuator)

[0068] Figure 6 is a diagram for explaining Figure 4 the adjustment method of the up-and-down direction position of the magnetic plate 8 shown in (B).

[0069] In the present embodiment, even if a deviation of each component constituting the actuator 1 or a deviation in the manufacturing of the actuator 1 occurs, the up-and-down direction position of the magnetic plate 8 with respect to the fixed body 4 is adjusted at the final stage of the manufacturing process of the actuator 1 so that the thickness direction of the optical glass 2 when the driving coil 16 is in the non-energized state coincides with the up-and-down direction. When the up-and-down direction position of the magnetic plate 8 is adjusted, the movable body 3 on which the optical glass 2, the holding magnet 7, and the driving magnet 15 are fixed and the fulcrum portion 6 are mounted on the fixed body 4, and the magnetic plate 9, the driving coil 16, and the flexible printed substrate 17 are mounted on the fixed body 4.

[0070] In the adjustment of the up-and-down direction position of the magnetic plate 8, a jig 20 in a bar shape is used. The jig 20 is formed in a cylindrical shape. The radius (half of the outer diameter) of the jig 20 is substantially equal to the radius of curvature of the side surface of the recesses 4g, 4j. In the present embodiment, the adjustment of the up-and-down direction position of the magnetic plate 8 uses two jigs 20. The two jigs 20 are arranged so that the axial direction of the jig 20 coincides with the up-and-down direction. In addition, the two jigs 20 are arranged in a state in which they are spaced apart in the front-and-rear direction. The front-and-rear direction interval of the two jigs 20 is equal to the front-and-rear direction interval of the two recesses 4g. The two jigs 20 are connected to a lifting mechanism (omitted from the drawing) that lifts the jigs 20. The jig 20 is inserted into the portion of the magnetic plate arrangement hole 4e in which the recesses 4g, 4j are formed. In addition, the edge of the front end surface of the jig 20 is chamfered.

[0071] In addition, when the up-and-down direction position of the magnetic plate 8 is adjusted, the magnetic plate 8 is arranged in the magnetic plate arrangement hole 4e. The magnetic plate 8 is brought into contact with the contact surface 4f by the magnetic attraction force generated between the magnetic plate 8 and the holding magnet 7. The magnetic plate 8 is held at a fixed position in the up-and-down direction by the magnetic attraction force generated between the magnetic plate 8 and the holding magnet 7 even in a state in which the magnetic plate 8 is not adhesively fixed in the magnetic plate arrangement hole 4e.

[0072] The magnetic plate 8 before the adjustment of the up-and-down direction position is arranged at a position lower than the designed up-and-down direction position of the magnetic plate 8. In this state, as shown in Figure 6As shown in (A), a portion of the clamp 20 disposed in the recesses 4g and 4j is inserted from the bottom into the magnetic plate mounting hole 4e (that is, the clamp 20 with its front end facing upward is inserted from the bottom into the portion of the magnetic plate mounting hole 4e in which the recesses 4g and 4j are formed), so that the front end face of the clamp 20 contacts the lower end face of the magnetic plate 8 disposed in the magnetic plate mounting hole 4e before fixing, thereby moving the magnetic plate 8 upward and adjusting the position of the magnetic plate 8 in the vertical direction (magnetic plate position adjustment process).

[0073] In the magnetic plate position adjustment process, for example, while confirming the tilt of the optical glass 2 using a laser displacement gauge, the magnetic plate 8 is gradually moved upwards. When the thickness direction of the optical glass 2 aligns with the vertical direction, the position adjustment of the magnetic plate 8 in the vertical direction is completed. After the position adjustment of the magnetic plate 8 in the vertical direction is completed, the magnetic plate 8 is fixed in the magnetic plate mounting hole 4e (magnetic plate fixing process). That is, after the magnetic plate position adjustment process, the magnetic plate 8 is fixed in the magnetic plate mounting hole 4e. Specifically, the magnetic plate 8 is fixed in the magnetic plate mounting hole 4e using an adhesive.

[0074] Furthermore, during the magnetic plate position adjustment process, if the magnetic plate 8 is moved excessively upwards, before fixing the magnetic plate 8 into the magnetic plate mounting hole 4e, as follows: Figure 6 As shown in (B), a portion of the clamp 20 disposed in the recesses 4g and 4j is inserted from the top into the magnetic plate mounting hole 4e (that is, the portion of the magnetic plate mounting hole 4e with the front end face facing downward is inserted from the top into the recesses 4g and 4j), so that the front end face of the clamp 20 contacts the upper end face of the magnetic plate 8 disposed in the magnetic plate mounting hole 4e before fixing, thereby moving the magnetic plate 8 downward and adjusting the position of the magnetic plate 8 in the vertical direction. After the position adjustment of the magnetic plate 8 in the vertical direction is completed, the magnetic plate 8 is fixed in the magnetic plate mounting hole 4e.

[0075] (Main effects of this implementation method)

[0076] As described above, in the present embodiment, the magnetic attraction force generated between the magnetic plate 8 and the holding magnet 7 and between the magnetic plate 9 and the driving magnet 15 is used to hold the movable body 3 in the reference position in the movable body rotation direction when the driving coil 16 is in the non-energized state. Therefore, in the present embodiment, by the two thin flat magnetic plates 8, 9, the one holding magnet 7, and the driving magnet 15 that constitutes a part of the magnetic driving mechanism 5, it is possible to hold the movable body 3 in the reference position in the movable body rotation direction when the driving coil 16 is in the non-energized state. Therefore, in the present embodiment, even when the driving coil 16 is in the non-energized state, it is possible to hold the movable body 3 in the fixed position in the movable body rotation direction, and compared to the image shift device described in Patent Literature 1 that has three braking magnets and a driving magnet, it is possible to reduce the cost of the actuator 1.

[0077] In the present embodiment, the position of the movable body 3 in the movable body rotation direction when the driving coil 16 is in the non-energized state is defined by the position of the magnetic plate 8 in the vertical direction. Also, in the present embodiment, when the actuator 1 is manufactured, the jig 20 that is partially disposed in the recesses 4g, 4j is inserted into the magnetic plate disposition hole 4e from the lower side, and the front end surface of the jig 20 is brought into contact with the lower end surface of the magnetic plate 8 before fixation that is disposed in the magnetic plate disposition hole 4e, and the magnetic plate 8 is moved upward, and the position of the magnetic plate 8 in the vertical direction is adjusted. Therefore, in the present embodiment, it is possible to adjust the position of the movable body 3 in the movable body rotation direction so that the thickness direction of the optical glass 2 when the driving coil 16 is in the non-energized state coincides with the vertical direction.

[0078] Also, in the present embodiment, the recess 4g that is recessed toward the left side is formed on the contact surface 4f that comes into contact with the magnetic plate 8 by the magnetic attraction force generated between the magnetic plate 8 and the holding magnet 7, and the recess 4g is formed in a straight line shape from the lower end to the upper end of the magnetic plate disposition hole 4e. Therefore, in the present embodiment, even if the thickness of the magnetic plate 8 is very thin, and even if the edge of the front end surface of the jig 20 that is formed in a rod shape is chamfered, it is possible to reliably bring the front end surface of the jig 20 that is partially disposed in the recess 4g into contact with the lower end surface of the magnetic plate 8. Therefore, in the present embodiment, even if the thickness of the magnetic plate 8 is very thin, and even if the edge of the front end surface of the jig 20 is chamfered, it is possible to easily adjust the position of the magnetic plate 8 in the vertical direction using the jig 20.

[0079] In the present embodiment, the recess 4g is formed at two positions in a state of being spaced apart in the front-rear direction. Therefore, in the present embodiment, using the two jigs 20 that are disposed in a state of being spaced apart in the front-rear direction, it is easy to move the magnetic plate 8 in the vertical direction. Therefore, in the present embodiment, it is possible to more easily adjust the position of the magnetic plate 8 in the vertical direction.

[0080] In the present embodiment, the magnetic plate arrangement hole 4e is a through hole that penetrates the fixing body 4 in the up-down direction, and the recess 4g is formed in the entire region of the magnetic plate arrangement hole 4e in the up-down direction. Therefore, in the present embodiment, as described above, even if the magnetic plate 8 is moved excessively upward in the magnetic plate position adjustment process, the jig 20 whose front end surface faces downward can be inserted from the upper side into the portion of the magnetic plate arrangement hole 4e in which the recess 4g, 4j is formed, and the front end surface of the jig 20 can be brought into contact with the upper end surface of the magnetic plate 8 that is arranged in the magnetic plate arrangement hole 4e before fixation to return the magnetic plate 8 to the lower side.

[0081] In the present embodiment, the recess 4j that is recessed toward the left side is formed in the left side surface 4h of the magnetic plate arrangement hole 4e, the recess 4j is formed in the same position as the recess 4g in the front-rear direction, and the recess 4j is formed in the entire region of the magnetic plate arrangement hole 4e in the up-down direction. Therefore, in the present embodiment, even if the width of the magnetic plate arrangement hole 4e in the left-right direction is narrow, the jig 20 can be inserted into the magnetic plate arrangement hole 4e using the recesses 4g, 4j to move the magnetic plate 8 in the up-down direction.

[0082] In the present embodiment, the magnetic plate 9 is placed on the magnetic plate placement portion 4c of the fixing body 4, is positioned in the up-down direction, and the position adjustment of the magnetic plate 9 in the up-down direction is not performed. Therefore, in the present embodiment, compared to the case where the position adjustment of the magnetic plate 9 in the up-down direction is performed, it is possible to simplify the manufacturing process of the actuator 1.

[0083] (Other Embodiments)

[0084] The above-described embodiment is an example of a preferred embodiment of the present application, but is not limited thereto, and various modifications can be made within a range that does not change the gist of the present application.

[0085] In the above-described embodiment, the recess 4g is formed in the entire region of the magnetic plate arrangement hole 4e in the up-down direction, but the recess 4g can be formed at least in the range from the lower end of the magnetic plate arrangement hole 4e to the lower end of the magnetic plate 8 that is in a fixed state in the magnetic plate arrangement hole 4e and in the range from the upper end of the magnetic plate arrangement hole 4e to the upper end of the magnetic plate 8 that is in a fixed state in the magnetic plate arrangement hole 4e.

[0086] In the above-described embodiment, the entire magnetic plate arrangement hole 4e penetrates the fixing body 4 in the up-down direction, but only a portion of the magnetic plate arrangement hole 4e can penetrate the fixing body 4 in the up-down direction. For example, as shown in FIG. 19, the magnetic plate arrangement hole 4e can be formed in the fixing body 4 so as to penetrate the fixing body 4 in the up-down direction only in the portion of the magnetic plate arrangement hole 4e in which the recess 4g is formed. Figure 7As shown in FIG. 6, the portion of the magnetic plate arrangement hole 4e in which the recesses 4g, 4j are formed can also be made to penetrate the fixed body 4 in the up-down direction. In this case, for example, the upper end portion of the portion of the magnetic plate arrangement hole 4e that penetrates in the up-down direction is made into a round hole, and the jig 20 is inserted from the upper side of the fixed body 4 in the portion of the magnetic plate arrangement hole 4e that penetrates in the up-down direction, and the magnetic plate 8 can be moved to the lower side. Also, Figure 7 (B) is a cross-sectional view of the H-H cross section of (A), Figure 7 (A), Figure 7 (C) is a cross-sectional view of the J-J cross section of (A), Figure 7 (A), (B) is a cross-sectional view of the K-K cross section of (A).

[0087] Also, in the case where only a portion of the magnetic plate arrangement hole 4e penetrates the fixed body 4 in the up-down direction, for example, as shown in FIG. 7, only the portion of the magnetic plate arrangement hole 4e that does not have the recesses 4g, 4j formed therein can be made to penetrate the fixed body 4 in the up-down direction. In this case, for example, the upper end portion of the portion of the magnetic plate arrangement hole 4e that penetrates in the up-down direction is made into a round hole, and a recess 4p that is recessed to the right of the contact surface 4f and a recess 4r that is recessed to the left of the left side surface 4h are formed in this portion. Figure 8 Also, in this case, the jig 20 can be inserted from the upper side of the fixed body 4 into the portion of the magnetic plate arrangement hole 4e that penetrates in the up-down direction, and the magnetic plate 8 can be moved to the lower side. Also, in this case, the recess 4g can be formed in the entire region of the up-down direction of the magnetic plate arrangement hole 4e, but it is sufficient that the recess 4g be formed at least in the range from the lower end of the magnetic plate arrangement hole 4e to the lower end of the magnetic plate 8 that is in a fixed state in the magnetic plate arrangement hole 4e. Also,

[0088] (B) is a cross-sectional view of the K-K cross section of (A). Figure 8 (A), Figure 8 (B) is a cross-sectional view of the K-K cross section of (A).

[0089] In the above embodiment, the magnetic plate arrangement hole 4e can also not penetrate the fixed body 4 in the up-down direction. In this case, the magnetic plate arrangement hole 4e is formed, for example, so as to be recessed from the lower end of the fixed body 4 to the upper side, and is open only at the lower end of the fixed body 4. Also, in this case, the recess 4g can also be formed, for example, in the entire region of the up-down direction of the magnetic plate arrangement hole 4e, but it is sufficient that the recess 4g be formed at least in the range from the lower end of the magnetic plate arrangement hole 4e to the lower end of the magnetic plate 8 that is in a fixed state in the magnetic plate arrangement hole 4e.

[0090] Also, in the case where the magnetic plate arrangement hole 4e does not penetrate the fixed body 4 in the up-down direction, the magnetic plate arrangement hole 4e can also be formed so as to be recessed from the upper end of the fixed body 4 to the lower side, and be open only at the upper end of the fixed body 4. In this case, the upper side (Zl direction side) becomes the one side of the first direction, and the lower side (Z2 direction side) becomes the other side of the first direction.​​​​​​​​​​​

[0091] In the above embodiment, the jig 20 can also not be formed in a cylindrical shape. For example, the jig 20 can also be formed in a prismatic shape. In this case, the shape of the side surface of the recess 4g, 4j when viewed from the upper and lower directions becomes a shape corresponding to the shape of the jig 20. Also, in the above embodiment, the recess 4g, 4j can also be formed at three or more positions in a state of being spaced apart in the front and rear directions. Also, the recess 4g, 4j can also be formed at only one position.

[0092] In the above embodiment, the width of the magnetic plate arrangement hole 4e in the left and right directions becomes wide, and even if the left side surface 4h is not formed with the recess 4j, as long as the jig 20 can be inserted into the magnetic plate arrangement hole 4e, the recess 4j can also not be formed in the left side surface 4h. Also, the magnetic plate arrangement hole 4e can also be open at the left end of the fixed body 4. Also, in the above embodiment, the actuator 1 can also not be provided with the magnetic plate 9. In this case, a magnetic attraction force is generated between the magnetic plate 8 and the holding magnet 7, and this magnetic attraction force is used to hold the movable body 3 at a fixed position in the movable body rotation direction when the drive coil 16 is in a non-energized state.

[0093] In the above embodiment, the holding magnet 7 can also be fixed to the fixed body 4, and the magnetic plate 8 can also be fixed to the movable body 3. In this case, the magnetic plate arrangement hole in which the magnetic plate 8 is arranged and fixed is formed in the movable body 3. Also, in the above embodiment, the drive magnet 15 can also be fixed to the fixed body 4, and the drive coil 16 and the magnetic plate 9 can also be fixed to the movable body 3. Also, in the above embodiment, the magnetic drive mechanism 5 can also be provided with a drive coil arranged opposite the holding magnet 7 in addition to the drive coil 16. In this case, the holding magnet 7 constitutes a part of the magnetic drive mechanism 5 and functions as a drive magnet.

[0094] In the above embodiment, the actuator 1 can also be used in a device other than a projector. In this case, an optical element other than the optical glass 2 can also be held on the movable body 3. For example, an optical element such as a lens, a prism, a reflection plate, or an optical filter can also be held on the movable body 3. Also, an image pickup element can also be held on the movable body 3. In the case where the image pickup element is held on the movable body 3, the actuator 1 is mounted, for example, to a camera. The "optical element" in the present specification also includes an image pickup element.

[0095] Symbol Explanation

[0096] 1 actuator

[0097] 2 optical glass (optical element)

[0098] 3 movable body

[0099] 4 fixed body

[0100] 4c magnetic plate placement portion (positioning portion)

[0101] 4e magnetic plate arrangement hole

[0102] 4f contact surface

[0103] 4g recess

[0104] 4h left side surface (surface on one side in the thickness direction of the magnetic plate arrangement hole)

[0105] 4j recess (second recess)

[0106] 5 magnetic drive mechanism

[0107] 7 holding magnet

[0108] 7a magnetization portion

[0109] 8 magnetic plate

[0110] 9 magnetic plate (second magnetic plate)

[0111] 15 drive magnet

[0112] 15a magnetization portion

[0113] 16 drive coil

[0114] 20 jig

[0115] X thickness direction of the magnetic plate

[0116] X1 other side in the thickness direction

[0117] X2 one side in the thickness direction

[0118] Y second direction

[0119] Z first direction

[0120] Z1 other side in the first direction

[0121] Z2 one side in the first direction

Claims

1. An actuator, characterized by The actuator includes: a movable body that holds an optical element; a fixed body that is formed in a frame shape with the movable body disposed on an inner peripheral side and holds the movable body so as to be rotatable; a magnetic drive mechanism that rotates the movable body in a direction in which the movable body is inclined with respect to the fixed body; and a holding magnet and a magnetic plate that hold the movable body at a fixed position with respect to the fixed body in a direction in which the movable body rotates with respect to the fixed body, The magnetic drive mechanism includes a drive magnet and a drive coil disposed opposite the drive magnet, The holding magnet is fixed to either one of the movable body and the fixed body, The magnetic plate is formed in a flat plate shape and is disposed on one side of the holding magnet in a thickness direction of the magnetic plate, The other one of the movable body and the fixed body is formed of a non-magnetic material, A magnetic plate disposition hole in which the magnetic plate is disposed and fixed is formed in the other one of the movable body and the fixed body, The holding magnet is composed of two magnetization portions polarized in a first direction orthogonal to the thickness direction of the magnetic plate, Between the magnetic plate and the holding magnet, a magnetic attractive force that holds the movable body at a fixed position in the direction in which the movable body rotates when the drive coil is in a non-energized state is generated, and a position of the movable body in the direction in which the movable body rotates when the drive coil is in the non-energized state is defined by a position of the magnetic plate in the first direction, When one side of the first direction is set as a first direction one side and the other side of the first direction is set as a first direction other side, The magnetic plate disposition hole is open at least on the first direction one side of the other one of the movable body and the fixed body, A surface of the holding magnet side of the magnetic plate disposition hole becomes a contact surface that contacts the magnetic plate by the magnetic attractive force generated between the magnetic plate and the holding magnet, A recessed portion recessed toward the holding magnet side is formed on the contact surface, The recessed portion is formed in a straight line shape from the first direction one side of the magnetic plate disposition hole toward the first direction other side, and is formed at least to the first direction one side of the magnetic plate.

2. The actuator according to claim 1, wherein The recessed portion is formed at a plurality of sites in a second direction orthogonal to the thickness direction of the magnetic plate and the first direction in a state in which the sites are spaced apart.

3. The actuator according to claim 1 or 2, wherein The magnetic plate disposition hole is a through hole that penetrates the other one of the movable body and the fixed body in the first direction, The recessed portion is formed in an entire region of the magnetic plate disposition hole in the first direction.

4. The actuator according to any one of claims 1 to 3, wherein When one side of the thickness direction of the magnetic plate is set as a thickness direction one side and the other side of the thickness direction of the magnetic plate is set as a thickness direction other side, the other side of the thickness direction of the magnetic plate configuring hole is made the contact surface, a second recessed portion recessed toward the one side of the thickness direction is formed on the side of the magnetic plate configuring hole, the second recessed portion is formed at the same position as the recessed portion in a second direction orthogonal to the thickness direction of the magnetic plate and the first direction, and is formed in the same range as the recessed portion in the first direction.

5. The actuator according to any one of claims 1 to 4, characterized in that a second magnetic plate having a flat plate shape is provided for holding the movable body at a fixed position relative to the fixed body in the direction of rotation of the movable body, the drive magnet and the holding magnet are fixed to the movable body, the drive coil, the magnetic plate, and the second magnetic plate are fixed to the fixed body, the drive magnet is composed of two magnetized portions polarized in the first direction, a magnetic attractive force for holding the movable body at a fixed position in the direction of rotation of the movable body when the drive coil is in a non-energized state is generated between the drive magnet and the second magnetic plate, a positioning portion for positioning the second magnetic plate in the first direction is formed on the fixed body.

6. A manufacturing method of an actuator, for manufacturing the actuator according to any one of claims 1 to 5, characterized by, including: a magnetic plate position adjustment process in which a rod-shaped jig configured with a portion in the recessed portion is inserted into the magnetic plate configuring hole from the one side of the first direction, and a front end surface of the jig is brought into contact with an end surface on the one side of the first direction of the magnetic plate before fixation configured in the magnetic plate configuring hole to move the magnetic plate to the other side of the first direction, thereby adjusting the position of the magnetic plate in the first direction; and a magnetic plate fixation process in which the magnetic plate is fixed in the magnetic plate configuring hole after the magnetic plate position adjustment process.

Images