Microstage system

Abstract

The application provides a micro-motion stage system, comprising: a moving module, the moving module comprising a base and a moving driving part, the moving driving part being installed on the base; a rotating module, the rotating module comprising a rotating driving part, a rotating base and a mounting base, the rotating base being rotatably arranged on the mounting base, the moving driving part being drivingly connected with the mounting base to drive the mounting base to move; wherein the rotating driving part comprises an ultrasonic motor and a ceramic piece, the ultrasonic motor being installed on the mounting base, the ceramic piece being installed on the rotating base, the ceramic piece extending along the circumference of the rotating base, the ultrasonic motor being in contact with at least part of the ceramic piece to drive the rotating base to rotate through the inverse piezoelectric effect between the ultrasonic motor and the ceramic piece. Through the technical scheme provided by the application, the technical problem of poor positioning accuracy of the micro-motion stage in the prior art can be solved.

Description

Technical Field

[0001] This invention relates to the field of integrated circuit manufacturing equipment technology, and more specifically, to a micro-motion stage system. Background Technology

[0002] Currently, in the field of integrated circuit manufacturing, microstages are superimposed on coarse stages, and the microstages are used to compensate for the accuracy of the coarse stages. Microstages are mainly used in lithography equipment for micro-positioning and micro-feeding. The positioning accuracy of the microstage affects the exposure accuracy of the lithography machine, and the movement speed of the microstage affects the production efficiency of the lithography machine. Existing microstage systems generally include a moving module and a rotating module.

[0003] However, the drive motors of the rotary modules in existing micro-motion stage systems have poor accuracy and are not easy to self-lock when the rotation stops. This will have a certain impact on the positioning accuracy of the micro-motion stage system. In addition, the rotary module usually requires multiple components such as a driver, position detector, limit switch, and self-locking device, resulting in a complex structure and hindering compact and lightweight design. Summary of the Invention

[0004] The main objective of this invention is to provide a micro-motion stage system to solve the technical problem of poor positioning accuracy of micro-motion stages in the prior art.

[0005] To achieve the above objectives, according to one aspect of the present invention, a micro-motion stage system is provided, comprising:

[0006] A mobile module, comprising a base and a mobile drive unit, wherein the mobile drive unit is mounted on the base;

[0007] The rotating module includes a rotating drive unit, a rotating base, and a mounting base. The rotating base is rotatably mounted on the mounting base, and the moving drive unit is driven to drive the mounting base to move.

[0008] The rotary drive unit includes an ultrasonic motor and a ceramic component. The ultrasonic motor is mounted on a mounting base, and the ceramic component is mounted on a rotary base. The ceramic component extends circumferentially along the rotary base, and the ultrasonic motor is in at least partial contact with the ceramic component to drive the rotary base to rotate through the inverse piezoelectric effect between the ultrasonic motor and the ceramic component.

[0009] Furthermore, there are at least two ultrasonic motors, which are arranged at circumferential intervals along the rotating base;

[0010] The rotating base comprises at least two ceramic components spaced apart circumferentially; at least two ultrasonic motors are arranged in a one-to-one correspondence with the at least two ceramic components, with each ultrasonic motor in at least partial contact with its corresponding ceramic component, thereby driving the rotating base to rotate through the inverse piezoelectric effect between the ultrasonic motor and its corresponding ceramic component; or,

[0011] At least two ultrasonic motors are in at least partial contact with a ceramic component to drive the rotating base to rotate via the inverse piezoelectric effect between the at least two ultrasonic motors and the ceramic component.

[0012] Furthermore, the micro-motion stage system also includes:

[0013] An angle detection structure is provided, with its detection part mounted on the mounting base. The detection part of the angle detection structure and the ultrasonic motor are spaced apart along the circumference of the rotating base, with the detection part of the angle detection structure facing the rotating base, so as to detect the rotation angle of the rotating base.

[0014] Furthermore, the angle detection structure includes:

[0015] A circular grating reader is mounted on a mounting base, and the circular grating reader forms the detection section of the angle detection structure;

[0016] The first grating ruler is set on the rotating base, and is spaced apart from the ceramic part. The first grating ruler extends circumferentially along the rotating base, and the circular grating reading head is set toward the first grating ruler.

[0017] Furthermore, the mounting base includes a main body with a polygonal structure, multiple moving drive units, and multiple moving drive units are arranged one-to-one with multiple vertices of the polygonal structure. Each moving drive unit is located at its corresponding vertices. An ultrasonic motor is located between two adjacent moving drive units, and the detection unit of the angle detection structure is located between two adjacent moving drive units.

[0018] Furthermore, the micro-stage system also includes a vertical detection structure, the detection part of which is mounted on the base; the mounting base includes:

[0019] The main body and the moving drive unit are connected to the main body for driving.

[0020] The connecting seat protrudes from the bottom of the main body, and the ultrasonic motor and the part to be detected of the vertical detection structure are both mounted on the connecting seat.

[0021] Furthermore, the vertical detection structure includes a second grating ruler and a movable reading head. The second grating ruler is disposed on the side of the connecting seat away from the rotating seat, and forms the detected part of the vertical detection structure. The movable reading head forms the detection part of the vertical detection structure, and is disposed opposite to the second grating ruler; and / or,

[0022] The main body is a polygonal structure, and there are multiple connecting seats. The multiple connecting seats are set one-to-one with the multiple sides of the main body, and each connecting seat is connected to the corresponding side of the main body.

[0023] Furthermore, the mounting base is provided with a first limiting fitting, and the rotating base is provided with a second limiting fitting. At least a portion of the first limiting fitting and the second limiting fitting are engaged to limit the rotation angle of the rotating base.

[0024] Furthermore, one of the first limiting fitting and the second limiting fitting is a limiting protrusion, and the other of the first limiting fitting and the second limiting fitting is provided with a limiting groove. The limiting protrusion is movably disposed in the limiting groove. The limiting groove has a first limiting sidewall and a second limiting sidewall disposed opposite to each other along the circumference of the rotating seat, so as to abut and limit the limiting protrusion through the first limiting sidewall or the second limiting sidewall.

[0025] Furthermore, the ceramic part and the second limiting mating part are spaced apart circumferentially along the rotating seat; and / or,

[0026] The ceramic component and the second limiting component are both located at the bottom of the rotating base.

[0027] Furthermore, the micro-motion stage system also includes bearings, an inner end cover, and an outer end cover, with the bearings positioned between the mounting base and the rotating base;

[0028] The outer peripheral wall of the rotating seat is provided with a first positioning step and a second positioning step. The first and second positioning steps are arranged in a stepped manner along the axial direction of the rotating seat. The side wall of the first positioning step is adapted to the inner ring of the bearing. One end of the inner ring of the bearing is positioned at the bottom of the first positioning step. The second positioning step is adapted to the inner end cover. The inner end cover is located at the second positioning step and abuts and positions the other end of the inner ring of the bearing; and / or,

[0029] The inner peripheral wall of the mounting base is provided with a third positioning step and a fourth positioning step. The third positioning step and the fourth positioning step are arranged in an axial step along the mounting base. The third positioning step is adapted to the outer end cover. The outer end cover is set at the third positioning step and abuts and positions one end of the outer ring of the bearing. The side wall of the fourth positioning step is adapted to the outer ring of the bearing. The outer ring of the bearing is positioned at the bottom of the fourth positioning step.

[0030] Furthermore, a fifth positioning step is provided on the rotating base, which is adapted to the shape of the ceramic part, and the ceramic part is installed at the fifth positioning step.

[0031] Furthermore, the mounting base is provided with a first positioning part, the base has a mounting groove, the rotating module is installed in the mounting groove, and the side wall of the base is provided with a clearance hole, which is positioned opposite to the first positioning part, so that a second positioning part that is positioned and engaged with the first positioning part passes through the clearance hole and connects with the first positioning part; and / or,

[0032] The moving module also includes a flexible buffer, one end of which is connected to the base and the other end of which is connected to the mounting base.

[0033] By applying the technical solution of this invention, since the ultrasonic motor is in at least partial contact with the ceramic component, there will be a large static friction force between the ultrasonic motor and the ceramic component when the ultrasonic motor stops running. This will generate a large static holding torque, thereby achieving stable self-locking and effectively ensuring the positioning accuracy of the micro-motion stage system. Furthermore, the above-mentioned configuration eliminates the need for a braking mechanism, simplifying positioning control and resulting in a shorter dynamic response time for the micro-motion stage system. Therefore, the technical solution provided in this embodiment can solve the technical problem of poor positioning accuracy of micro-motion stages in the prior art. Attached Figure Description

[0034] The accompanying drawings, which form part of this application, are used to provide a further understanding of the invention. The illustrative embodiments of the invention and their descriptions are used to explain the invention and do not constitute an undue limitation of the invention. In the drawings:

[0035] Figure 1 A schematic diagram of the micro-motion stage system provided according to an embodiment of the present invention is shown;

[0036] Figure 2 A schematic diagram of the installation structure of some moving modules and rotating modules provided according to an embodiment of the present invention is shown;

[0037] Figure 3 This diagram illustrates another angle of the structure of a portion of the moving module and rotating module provided according to an embodiment of the present invention;

[0038] Figure 4 A schematic diagram of the bottom structure of a portion of the moving module and rotating module provided according to an embodiment of the present invention is shown;

[0039] Figure 5 A cross-sectional view of a portion of the moving module and rotating module provided according to an embodiment of the present invention is shown;

[0040] Figure 6 A schematic diagram of the structure of the rotary seat provided according to an embodiment of the present invention is shown.

[0041] The above figures include the following reference numerals:

[0042] 10. Moving module; 11. Base; 111. Clearance hole; 12. Moving drive unit; 13. Flexible buffer component;

[0043] 20. Rotating module; 21. Rotating drive unit; 211. Ultrasonic motor; 212. Ceramic component; 22. Rotating seat; 221. First positioning step; 222. Second positioning step; 223. Fifth positioning step; 23. Second limiting fitting component; 24. Mounting seat; 241. Main body; 242. Connecting seat; 243. Third positioning step; 244. Fourth positioning step; 25. First limiting fitting component; 26. First positioning part;

[0044] 30. Angle detection structure; 31. Circular grating reader; 32. First grating ruler;

[0045] 40. Bearing; 51. Inner end cap; 52. Outer end cap;

[0046] 60. Vertical detection structure; 61. Second grating ruler; 62. Moving read head;

[0047] 70. Suction cup holder; 80. Photoelectric limit switch. Detailed Implementation

[0048] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. The present invention will now be described in detail with reference to the accompanying drawings and embodiments.

[0049] like Figures 1 to 6 As shown, Embodiment 1 of the present invention provides a micro-motion stage system, which includes a moving module 10 and a rotating module 20. The moving module 10 includes a base 11, a moving drive unit 12, and a flexible buffer 13. The moving drive unit 12 is mounted on the base 11. The rotating module 20 includes a mounting base 24, a rotating drive unit 21, and a rotating seat 22. The rotating seat 22 is rotatably disposed on the mounting base 24. The moving drive unit 12 is drivenly connected to the mounting base 24 to drive the mounting base 24 to move. The rotating drive unit 21 includes an ultrasonic motor 211 and a ceramic component 212. The ultrasonic motor 211 is mounted on the mounting base 24, and the ceramic component 212 is mounted on the rotating seat 22. The ceramic component 212 extends circumferentially along the rotating seat 22. The ultrasonic motor 211 is in at least partial contact with the ceramic component 212 to drive the rotating seat 22 to rotate through the inverse piezoelectric effect between the ultrasonic motor 211 and the ceramic component 212.

[0050] The micro-motion stage system provided in this embodiment utilizes an ultrasonic motor 211, which can directly drive the rotational motion, resulting in high motion accuracy. Simultaneously, due to at least partial contact between the ultrasonic motor 211 and the ceramic component 212, there is significant static friction between the ultrasonic motor 211 and the ceramic component 212 when the system stops, generating a large static holding torque. This ensures stable self-locking and effectively guarantees the positioning accuracy of the micro-motion stage system. Furthermore, the above-mentioned design eliminates the need for a braking mechanism, simplifying positioning control and resulting in a shorter dynamic response time for the rotation module 20 of the micro-motion stage system. Additionally, the ultrasonic motor is lighter than a conventional motor, and the absence of a braking mechanism reduces the overall mass of the rotating part, leading to a shorter dynamic response time in the vertical direction of the micro-motion stage system. Therefore, the technical solution provided in this embodiment can solve the technical problem of poor positioning accuracy in existing micro-motion stages.

[0051] Specifically, the mounting base 24 forms the stator of the rotating module 20, and the rotating base 22 forms the mover of the rotating module 20. Preferably, in order to effectively ensure the rotational drive motion of the ultrasonic motor 211, the ceramic part 212 in this embodiment is an arc-shaped strip structure. It is also necessary to ensure that the ceramic part 212 remains in contact with the ultrasonic motor 211 within the rotation range.

[0052] In this embodiment, the moving module 10 further includes a flexible buffer 13. One end of the flexible buffer 13 is connected to the base 11, and the other end is connected to the mounting base 24. The flexible buffer 13 in this embodiment can be made of an elastic material, and it can buffer and decouple the movement of the rotating module 20. Specifically, in this embodiment, the moving drive unit 12 of the moving module 10 drives the mounting base 24 to move in the vertical direction, thus buffering and decoupling the vertical movement of the rotating module 20.

[0053] Specifically, in this embodiment, the flexible buffer 13 is a flexible spring, and the moving drive 12 is a voice coil motor. When energized, the ultrasonic motor 211 and the ceramic component 212 vibrate and frictionally couple through the inverse piezoelectric effect of the piezoelectric ceramic to achieve rotational movement. After de-energization, a large holding force can be achieved through contact friction.

[0054] In addition, the ultrasonic motor 211 generates almost no heat, has low noise, fast response speed, small size, and is not affected by magnetic field interference, giving it a significant advantage in high-precision control systems.

[0055] Specifically, there are at least two ultrasonic motors 211, which are arranged at circumferential intervals along the rotating seat 22 so that the rotating seat 22 can rotate stably.

[0056] In one embodiment, there are at least two ceramic components 212, which are spaced apart circumferentially along the rotating base 22. At least two ultrasonic motors 211 are arranged in a one-to-one correspondence with the at least two ceramic components 212, with each ultrasonic motor 211 in at least partial contact with its corresponding ceramic component 212, thereby driving the rotating base 22 to rotate through the inverse piezoelectric effect between the ultrasonic motor 211 and its corresponding ceramic component 212. This structural arrangement allows for flexible and convenient configuration of the positions of the ultrasonic motors 211 and the ceramic components 212.

[0057] In another embodiment, at least two ultrasonic motors 211 are in at least partial contact with a ceramic component 212 to drive the rotating base 22 to rotate via the inverse piezoelectric effect between the at least two ultrasonic motors 211 and the ceramic component 212. This structural arrangement simplifies the installation process by requiring only one ceramic component 212.

[0058] In this embodiment, the micro-motion stage system further includes an angle detection structure 30. The detection part of the angle detection structure 30 is disposed on the mounting base 24. The detection part of the angle detection structure 30 and the ultrasonic motor 211 are arranged circumferentially around the rotating base 22, and the detection part of the angle detection structure 30 faces the rotating base 22, so as to detect the rotation angle of the rotating base 22. With this structural arrangement, it is convenient to accurately detect the rotation angle of the rotating base 22, thereby facilitating better adaptive control and adjustment of the rotation of the rotating base 22.

[0059] Specifically, the angle detection structure 30 in this embodiment includes a circular grating reader 31 and a first grating ruler 32. The circular grating reader 31 is mounted on the mounting base 24 and forms the detection part of the angle detection structure 30. The first grating ruler 32 is mounted on the rotating base 22, spaced apart from the ceramic part 212, and extends circumferentially along the rotating base 22. The circular grating reader 31 is positioned facing the first grating ruler 32. This structural arrangement facilitates better detection accuracy of the rotation angle of the rotating base 22, enabling more precise adaptive control and adjustment of the rotation of the rotating base 22. In this embodiment, the mounting base 24 includes a main body 241, which has a polygonal structure. Multiple moving drive units 12 are arranged, each corresponding to one of the vertices of the polygonal structure. Each moving drive unit 12 is located at its corresponding vertices. An ultrasonic motor 211 is positioned between two adjacent moving drive units 12, and the detection unit of the angle detection structure 30 is also positioned between two adjacent moving drive units 12. This structural arrangement facilitates optimization of the ultrasonic motor 211's layout, improves the uniformity and stability of the micro-motion stage system's layout, and thus ensures the uniformity and stability of the drive.

[0060] Preferably, the angle detection structure 30 and the ultrasonic motor 211 are evenly distributed along the circumference of the rotating base 22. This facilitates better gravity optimization distribution, thereby improving the uniformity and stability of the micro-motion stage system's structural layout. Preferably, in this embodiment, there is one angle detection structure 30 and two ultrasonic motors 211. The two ultrasonic motors 211 and the detection part of the detection structure are spaced apart along the circumference of the rotating base 22. The included angle between the two ultrasonic motors 211 is 120°, and the included angle between any ultrasonic motor 211 and the detection part of the detection structure is also 120°. This achieves a uniform arrangement of the ultrasonic motors 211 and the angle detection structure 30, improving the structural uniformity.

[0061] In this embodiment, the mounting base 24 includes a main body 241 and a connecting base 242. The moving drive unit 12 is drivenly connected to the main body 241, and the connecting base 242 protrudes from the bottom of the main body 241 and is used to mount the ultrasonic motor 211. The micro-motion stage system also includes a vertical detection structure 60, which is used to provide feedback on vertical movement. The detected part of the vertical detection structure 60 is disposed on the connecting base 242, and the detection part of the vertical detection structure 60 is disposed on the base 11. Since the ultrasonic motor 211 generates almost no heat and does not produce a magnetic field during operation, it will not affect the detection of the vertical detection structure 60, thus effectively utilizing space and simplifying the structure.

[0062] Specifically, an ultrasonic motor 211 is provided at the bottom of the connecting seat 242. The vertical detection structure 60 includes a second grating ruler 61 and a moving reading head 62. The second grating ruler 61 is disposed on the side wall of the connecting seat 242 facing away from the rotating seat 22, and forms the detected part of the vertical detection structure 60. The moving reading head 62 is disposed on the base 11 and forms the detection part of the vertical detection structure 60. The moving reading head 62 is disposed opposite to the second grating ruler 61.

[0063] Preferably, the main body 241 has a polygonal structure, and any connecting seat 242 is disposed between two adjacent vertices. This structural design makes the rotating module 20 more stable and improves the stability of the ultrasonic motor 211 and the vertical detection structure 60 during operation. In addition, at least one connecting seat 242 is provided with the part of the vertical detection structure 60 to be detected.

[0064] Preferably, the main body 241 has a polygonal structure, and there are multiple connecting seats 242. The multiple connecting seats 242 are arranged one-to-one with multiple sides of the main body 241, and each connecting seat 242 is connected to the corresponding side of the main body 241. This structural arrangement can better improve the uniformity of the overall structural mass distribution and minimize the impact of unbalanced structural layout on the movement.

[0065] Specifically, there are three connecting seats 242 and three vertical detection structures 60, which are arranged in a one-to-one correspondence and at intervals along the circumference of the mounting base 24. Each connecting seat 242 has a second grating ruler 61 on its side wall facing away from the rotating base 22.

[0066] It should be noted that the number of connecting seats 242, ultrasonic motors 211, and vertical detection structures 60 does not need to correspond one-to-one. They can be matched and set according to actual needs. In addition to ultrasonic motors 211, other components that do not affect the vertical detection structure 60, such as mechanical limiting components or position detection components, can also be set at the bottom of the connecting seat 242.

[0067] Specifically, the mounting base 24 is provided with a first limiting fitting 25, and the rotating base 22 is provided with a second limiting fitting 23. At least a portion of the first limiting fitting 25 and the second limiting fitting 23 abut against each other to limit the rotation angle of the rotating base 22. With this structural arrangement, the rotation of the rotating base 22 can be effectively limited, so that the rotating base 22 can rotate within a predetermined rotation range.

[0068] To facilitate the installation of the first grating ruler 32, the base 11 of the rotating seat 22 is also provided with a grating ruler support. The micro-motion stage in this embodiment also includes an electrical limiting contact and a corresponding photoelectric limiting 80, which are also used to limit the rotation angle of the rotating seat 22. Preferably, the second limiting mating part 23, the electrical limiting contact, and the ceramic part 212 are installed along the same circumferential plane, and the ceramic part 212 is bonded and fixed to the rotating seat 22 as a moving part.

[0069] In this embodiment, one of the first limiting fitting member 25 and the second limiting fitting member 23 is a limiting protrusion, and the other of the first limiting fitting member 25 and the second limiting fitting member 23 is provided with a limiting groove. The limiting protrusion is movably disposed in the limiting groove. The limiting groove has a first limiting sidewall and a second limiting sidewall disposed opposite to each other along the circumference of the rotating seat 22, so as to abut and limit the limiting protrusion through the first limiting sidewall or the second limiting sidewall. With this structural arrangement, a limiting device can be used to limit the rotation in two directions. The structure is simple, the limiting is stable, and it is easy to install and operate.

[0070] In this embodiment, the ceramic component 212 and the second limiting fitting component 23 are spaced apart along the circumference of the rotating seat 22. This not only facilitates the stable engagement between the ultrasonic motor 211 and the ceramic component 212, allowing the rotating seat 22 to rotate smoothly, but also effectively limits the rotation angle of the rotating seat 22, ensuring the limiting stability of the rotating seat 22.

[0071] Specifically, the ceramic part 212 and the second limiting fitting part 23 are both located at the bottom of the rotating seat 22. This facilitates the optimization of the compact layout of the ceramic part 212 and the second limiting fitting part 23, and avoids interference between the ceramic part 212 and the second limiting fitting part 23 and other components.

[0072] In this embodiment, the mounting base 24 has a mounting hole, and at least a portion of the rotating base 22 is rotatably disposed within the mounting hole. With this structural arrangement, during operation, it is only necessary to first install the rotating base 22 into the mounting hole, and then operate and install the mounting base 24, which is convenient for operation and also facilitates optimization of the structural layout of the rotating base 22. Preferably, the axis of symmetry of the mounting hole coincides with the axis of symmetry of the mounting base 24, so as to better optimize the uniformity of the layout of the mounting base 24 and the rotating base 22.

[0073] like Figure 5 , Figure 6 As shown, in this embodiment, the micro-motion stage system further includes a bearing 40, an inner end cover 51, and an outer end cover 52. The bearing 40 is disposed between the mounting base 24 and the rotating base 22, so that the rotating base 22 can rotate smoothly on the mounting base 24, providing guidance for the rotating base 22, while reducing the rotational resistance between the rotating base 22 and the mounting base 24. Specifically, the outer peripheral wall of the rotating base 22 is provided with a first positioning step 221 and a second positioning step 222. The first positioning step 221 and the second positioning step 222 are arranged in a stepped manner along the axial direction of the rotating base 22. The side wall of the first positioning step 221 is adapted to the inner ring of the bearing 40. One end of the inner ring of the bearing 40 is positioned at the bottom of the first positioning step 221. The second positioning step 222 is adapted to the inner end cover 51. The inner end cover 51 is disposed at the second positioning step 222 and abuts and positions the other end of the inner ring of the bearing 40. This structural design facilitates the optimization of the shape of the rotating seat 22, as well as the effective positioning of the bearing 40, further improving the compactness of the structural layout.

[0074] Specifically, the inner peripheral wall of the mounting base 24 is provided with a third positioning step 243 and a fourth positioning step 244. The third positioning step 243 and the fourth positioning step 244 are arranged in a stepped manner along the axial direction of the mounting base 24. The third positioning step 243 is adapted to the outer end cover 52, which is located at the third positioning step 243 and abuts against and positions one end of the outer ring of the bearing 40. The side wall of the fourth positioning step 244 is adapted to the outer ring of the bearing 40, and the outer ring of the bearing 40 is positioned at the bottom of the fourth positioning step 244. This structural arrangement facilitates the optimization of the structural layout of the mounting base 24, facilitates the effective positioning of the other part of the bearing 40, and further improves the compactness of the structural layout.

[0075] Specifically, the micro-motion stage system in this embodiment also includes a suction cup seat 70, which is mounted on the top of the rotary seat 22.

[0076] In this embodiment, a fifth positioning step 223 is provided on the rotating base 22. The fifth positioning step 223 is adapted to the shape of the ceramic part 212, and the ceramic part 212 is installed at the fifth positioning step 223. This structural arrangement facilitates better positioning and installation of the ceramic part 212, improves the installation stability of the ceramic part 212, further optimizes the structure of the rotating base 22, and further improves the compactness of the structural layout.

[0077] Preferably, the first grating ruler 32 and the first limiting fitting 25 are located at the fifth positioning step 223. This arrangement can effectively utilize the space of the fifth positioning step 223, optimize the structure, and make the device more compact.

[0078] Specifically, the mounting base 24 is provided with a first positioning part 26; the base 11 has a mounting groove, the rotating module 20 is installed in the mounting groove, and the side wall of the base 11 is provided with a clearance hole 111, which is positioned opposite to the first positioning part 26, so that the second positioning part (not shown) that is positioned and cooperates with the first positioning part 26 passes through the clearance hole 111 and connects with the first positioning part 26. With this structure, the cooperation between the external second positioning part and the first positioning part 26 can be effectively utilized to better position the mounting base 24.

[0079] Specifically, the first positioning part 26 can be a positioning groove, and the second positioning part can be a positioning block.

[0080] The micro-motion stage system in this embodiment has four degrees of freedom of motion in the Z, Rz, Rx, and Ry directions, which can dynamically compensate for the surface shape of the object being measured. The Z-axis movement is achieved by the motion drive unit 12 of the motion module 10. The X, Y, and Z axes represent the three coordinate axes of the spatial coordinate system, and preferably, any two of the X, Y, and Z axes are perpendicular to each other. The Rz direction refers to the rotation direction about the Z-axis, the Rx direction refers to the rotation direction about the X-axis, and the Ry direction refers to the rotation direction about the Y-axis.

[0081] Specifically, in this embodiment, the rotating module 20 is mounted at the center of the moving module 10 via a bearing 40, and the ultrasonic motor 211, photoelectric limiter 80, and circular grating reader 31 are mounted on the mounting base 24. The flexible springs can be separate or integrated; one end of the flexible spring is connected to the mounting base 24, and the other end is connected to the base 11. Multiple flexible springs are configured, each corresponding to one of the multiple moving drive units 12. Preferably, the moving drive unit 12 is a voice coil motor, and there are three moving drive units 12, with adjacent moving drive units 12 distributed at 120° intervals. Three flexible springs are configured, each corresponding to one of the three moving drive units 12. The voice coil motor is located below the flexible springs; the voice coil motor mover is mounted on the mounting base 24, and the voice coil motor stator is mounted on the base 11.

[0082] Preferably, the second grating ruler 61 is at a 60° angle to the flexible reed, and the three sets of second grating rulers 61 are distributed at 120° angles on the moving module 10, with their corresponding moving read heads 62 mounted on the base 11. The three vertically distributed voice coil motors, flexible reeds, and second grating rulers 61 can be coupled to provide control in the Z, Rx, and Ry directions. The voice coil motor and the constant force magnetic levitation are integrated into one design. The magnetic levitation can compensate for the gravity of the rotating module 20. The three voice coil motors output driving force respectively, effectively reducing motor current, reducing heat generation, and saving micro-motion space.

[0083] Specifically, the number of ultrasonic motors 211 in this embodiment is not limited. When there are two ultrasonic motors 211, the angle between the two ultrasonic motors 211 is not limited to 120°. Theoretically, any angle is possible. In this embodiment, 120° is used to better balance the mass in conjunction with the circular grating read head 31 and the three voice coil motors.

[0084] Specifically, one of the advantages of the ultrasonic motor 211 as a rotary drive unit 21 is that it has high precision in small-angle rotation. Therefore, in this embodiment, the rotation range is preferably ±3 degrees.

[0085] As can be seen from the above description, the embodiments of the present invention achieve the following technical effects: high positioning accuracy; dynamic response block with compact structural layout and good structural weight balance.

[0086] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this application. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0087] Unless otherwise specifically stated, the relative arrangement, numerical expressions, and values ​​of the components and steps described in these embodiments do not limit the scope of this application. It should also be understood that, for ease of description, the dimensions of the various parts shown in the drawings are not drawn to actual scale. Techniques, methods, and devices known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and devices should be considered part of the specification. In all examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not as limitations. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters in the following drawings denote similar items; therefore, once an item is defined in one drawing, it need not be further discussed in subsequent drawings.

[0088] In the description of this application, it should be understood that the orientation or positional relationship indicated by directional terms such as "front, back, up, down, left, right", "horizontal, vertical, horizontal" and "top, bottom" is usually based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing this application and simplifying the description. Unless otherwise stated, these directional terms do not indicate or imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on the scope of protection of this application; the directional terms "inner" and "outer" refer to the inner and outer contours relative to the outline of each component itself.

[0089] For ease of description, spatial relative terms such as "above," "on top of," "on the upper surface of," "above," etc., are used herein to describe the spatial positional relationship of a device or feature as shown in the figures to other devices or features. It should be understood that spatial relative terms are intended to encompass different orientations in use or operation beyond the orientation of the device as described in the figures. For example, if the device in the figures were inverted, a device described as "above" or "on top of" other devices or structures would subsequently be positioned as "below" or "under" other devices or structures. Thus, the exemplary term "above" can include both "above" and "below." The device may also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatial relative descriptions used herein will be interpreted accordingly.

[0090] Furthermore, it should be noted that the use of terms such as "first" and "second" to define components is merely for the purpose of distinguishing the corresponding components. Unless otherwise stated, the above terms have no special meaning and therefore cannot be construed as limiting the scope of protection of this application.

[0091] The above description is merely a preferred embodiment of the present invention and is not intended to limit the invention. Various modifications and variations can be made to the present invention by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. A micromanipulation stage system characterized by comprising: The utility model relates to a rotary angle detection device, including: A moving module (10) comprising a base (11) and a moving drive part (12), the moving drive part (12) is installed on the base (11); A rotating module (20) comprising a rotating drive part (21), a rotating seat (22) and a mounting seat (24), the rotating seat (22) is rotatably arranged on the mounting seat (24), the moving drive part (12) is drivingly connected with the mounting seat (24) to drive the mounting seat (24) to move; the rotating drive part (21) comprises an ultrasonic motor (211) and a ceramic piece (212), the ultrasonic motor (211) is installed on the mounting seat (24), the ceramic piece (212) is installed on the rotating seat (22), the ceramic piece (212) extends along the circumference of the rotating seat (22), the ultrasonic motor (211) contacts at least part of the ceramic piece (212) to drive the rotating seat (22) to rotate through the inverse piezoelectric effect between the ultrasonic motor (211) and the ceramic piece (212); the ultrasonic motor (211) is at least two; An angle detection structure (30), the detection part of the angle detection structure (30) is arranged on the mounting seat (24), the detection part of the angle detection structure (30) is arranged along the circumference of the rotating seat (22) and is spaced apart from the ultrasonic motor (211), the detection part of the angle detection structure (30) is arranged towards the rotating seat (22) to detect the rotation angle of the rotating seat (22) through the angle detection structure (30). At least two ultrasonic motors (211) are arranged along the circumference of the rotating seat (22) and are spaced apart; 2. The micromanipulation system according to claim 1, wherein Wherein, the ceramic piece (212) is at least two, at least two ceramic pieces (212) are arranged along the circumference of the rotating seat (22) and are spaced apart; at least two ultrasonic motors (211) are arranged one by one with at least two ceramic pieces (212), each ultrasonic motor (211) contacts at least part of the corresponding ceramic piece (212) to drive the rotating seat (22) to rotate through the inverse piezoelectric effect between each ultrasonic motor (211) and the corresponding ceramic piece (212); or, At least two ultrasonic motors (211) contact at least part of one ceramic piece (212) to drive the rotating seat (22) to rotate through the inverse piezoelectric effect between at least two ultrasonic motors (211) and one ceramic piece (212). The angle detection structure (30) comprises:

3. The micromanipulation system according to claim 1, wherein A circular grating reader (31) arranged on the mounting seat (24), the circular grating reader (31) forms the detection part of the angle detection structure (30); ​ A first grating ruler (32) is arranged on the rotating seat (22), the first grating ruler (32) is arranged spaced apart from the ceramic piece (212), the first grating ruler (32) extends along the circumference of the rotating seat (22), and the circular grating reader (31) is arranged towards the first grating ruler (32).

4. The micromanipulation system according to claim 1, wherein The mounting seat (24) comprises a main seat body (241), the main seat body (241) is of a polygonal structure, the plurality of mobile driving parts (12) are arranged in one-to-one correspondence with a plurality of vertexes of the polygonal structure, each mobile driving part (12) is arranged at a corresponding vertex, the ultrasonic motor (211) is arranged between two adjacent mobile driving parts (12), and the detection part of the angle detection structure (30) is arranged between two adjacent mobile driving parts (12).

5. The micromanipulation system according to claim 1, wherein The micro-motion stage system further comprises a vertical detection structure (60), and a detection part of the vertical detection structure is arranged on the base (11); The mounting seat (24) comprises: a main seat body (241), the mobile driving part (12) is drivingly connected with the main seat body (241); a connecting seat (242), the connecting seat (242) is arranged protruding from the bottom of the main seat body (241), and the ultrasonic motor (211) and the detected part of the vertical detection structure (60) are both mounted on the connecting seat (242).

6. The micro-motion stage system according to claim 5, characterized in that: the vertical detection structure (60) comprises a second grating ruler (61) and a mobile reader (62), the second grating ruler (61) is arranged on a side of the connecting seat (242) away from the rotating seat (22), the second grating ruler (61) forms the detected part of the vertical detection structure (60), the mobile reader (62) forms the detection part of the vertical detection structure (60), and the mobile reader (62) is arranged opposite to the second grating ruler (61); and / or the main seat body (241) is of a polygonal structure, and the connecting seat (242) is of a plurality of connecting seats, the plurality of connecting seats (242) are arranged in one-to-one correspondence with a plurality of edges of the main seat body (241), and each connecting seat (242) is connected with a corresponding edge of the main seat body (241).

7. The micromanipulation system according to claim 1, wherein The mounting seat (24) is provided with a first limiting matching part (25), the rotating seat (22) is provided with a second limiting matching part (23), and at least part of the first limiting matching part (25) and the second limiting matching part (23) abut and match to limit the rotation angle of the rotating seat (22).

8. The micromanipulation system according to claim 7, wherein, One of the first limiting fitting (25) and the second limiting fitting (23) is a limiting protrusion, and the other of the first limiting fitting (25) and the second limiting fitting (23) is provided with a limiting groove, the limiting protrusion is movably arranged in the limiting groove, and the limiting groove has a first limiting side wall and a second limiting side wall oppositely arranged in the circumferential direction of the rotating seat (22) to abut and limit the limiting protrusion through the first limiting side wall or the second limiting side wall.

9. The micro stage system of claim 7, wherein, The ceramic piece (212) and the second limiting fitting (23) are spaced apart in the circumferential direction of the rotating seat (22); and / or, The ceramic piece (212) and the second limiting fitting (23) are both arranged at the bottom of the rotating seat (22).

10. The micromanipulation system according to claim 1, wherein The micro stage system further comprises a bearing (40), an inner end cover (51) and an outer end cover (52), and the bearing (40) is arranged between the mounting seat (24) and the rotating seat (22); The outer peripheral wall of the rotating seat (22) is provided with a first positioning step (221) and a second positioning step (222), the first positioning step (221) and the second positioning step (222) are arranged in the axial direction of the rotating seat (22) in steps, the side wall of the first positioning step (221) is matched with the inner ring of the bearing (40), one end of the inner ring of the bearing (40) is positioned at the bottom of the first positioning step (221), the second positioning step (222) is matched with the inner end cover (51), and the inner end cover (51) is arranged at the second positioning step (222) and abuts and positions the other end of the inner ring of the bearing (40); and / or, The inner peripheral wall of the mounting seat (24) is provided with a third positioning step (243) and a fourth positioning step (244), the third positioning step (243) and the fourth positioning step (244) are arranged in the axial direction of the mounting seat (24) in steps, the third positioning step (243) is matched with the outer end cover (52), the outer end cover (52) is arranged at the third positioning step (243) and abuts and positions one end of the outer ring of the bearing (40), and the side wall of the fourth positioning step (244) is matched with the outer ring of the bearing (40), and the outer ring of the bearing (40) is positioned at the bottom of the fourth positioning step (244).

11. The micromanipulation system according to claim 1, wherein The rotating seat (22) is provided with a fifth positioning step matched with the shape of the ceramic piece (212), and the ceramic piece (212) is arranged at the fifth positioning step.

12. The micro stage system of any one of claims 1 to 11, wherein, The mounting seat (24) is provided with a first positioning part (26), the base (11) has a mounting groove, the rotating module (20) is mounted in the mounting groove, the sidewall of the base (11) is provided with a avoiding hole (111), the avoiding hole (111) is opposite to the first positioning part (26), so that the second positioning part matched with the first positioning part (26) is connected with the first positioning part (26) through the avoiding hole (111); and / or, The moving module (10) further comprises a flexible buffer (13), one end of the flexible buffer (13) is connected with the base (11), and the other end of the flexible buffer (13) is connected with the mounting seat (24).

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