Evaporation equipment

Abstract

The present invention relates to the technical field of evaporative coating, and in particular to an evaporation device, comprising: a container for accommodating an evaporation material; a connecting portion disposed on a side surface of the container; and a nozzle disposed on the connecting portion so as to be movable along the length direction of the connecting portion, and the nozzle is connected to the container via the connecting portion. A accommodating cavity is formed in the container to accommodate the evaporation material. The evaporation material is heated and vaporized in the accommodating cavity. The nozzle is connected to the accommodating cavity via the connecting portion. The evaporation material evaporated in the accommodating cavity can be sprayed onto a substrate to be evaporated through the nozzle to form an evaporation film layer on the substrate. The nozzle can be moved along the length direction of the connecting portion, and the nozzle's spray coverage can be expanded by moving the nozzle. With such an arrangement, there is no need to design an evaporation source cover with multiple nozzle positions as in the prior art, thereby saving design and production costs. Furthermore, there is no need to replace the evaporation source cover when adjusting the nozzle position, thereby improving adjustment efficiency and reducing adjustment difficulty.

Description

Technical Field

[0001] The present invention relates to the technical field of evaporation coating, and in particular to an evaporation coating device. Background Art

[0002] Currently, OLED production typically uses an evaporation source for evaporation. During this process, the nozzle position on the evaporation source cover often needs to be adjusted to optimize the thickness of the film deposited on the substrate. However, the nozzle position of existing evaporation equipment is fixed. Adjusting the nozzle position requires replacing the evaporation source cover, resulting in low adjustment efficiency and difficulty. Furthermore, the cover requires multiple nozzle positions, which is costly. Summary of the Invention

[0003] The present invention aims to solve at least one of the technical problems existing in the prior art or related art.

[0004] To this end, the present invention provides an evaporation device.

[0005] In view of this, according to an embodiment of the present application, a vapor deposition device is proposed, comprising:

[0006] A receiving portion, used for receiving the evaporation material;

[0007] A connecting portion, provided on a side surface of the accommodating portion;

[0008] The nozzle is provided on the connecting portion so as to be movable along the longitudinal direction of the connecting portion, and the nozzle is communicated with the accommodating portion through the connecting portion.

[0009] In a feasible embodiment, the accommodating portion includes:

[0010] A housing, wherein the housing is formed with an open accommodating cavity;

[0011] a cover body, which covers the opening, and the connecting portion is provided on the cover body;

[0012] The flow port penetrates the cover body, and the nozzle is connected to the flow port through the connecting portion.

[0013] In a feasible embodiment, the nozzle is rotatably disposed on the connecting portion, and the rotation direction of the nozzle intersects with the length direction.

[0014] In a feasible embodiment, the nozzle includes:

[0015] a movable portion rotatably disposed on the connecting portion;

[0016] A nozzle, the nozzle being provided through the movable portion;

[0017] The first fixing member is used to fix the movable part to the connecting part.

[0018] In a feasible embodiment, a long hole is opened along the rotation direction of the movable part, and a fixing hole is opened on the connecting part;

[0019] When the movable portion rotates to a preset position, the first fixing member passes through the elongated hole and the fixing hole.

[0020] In a feasible embodiment, a portion of the movable portion away from the connecting portion is movable along the length direction, and a portion of the movable portion close to the connecting portion covers the flow port.

[0021] In a feasible embodiment, the nozzle is provided in plurality, and the movable parts of the plurality of nozzles are arranged at intervals along the length direction, and the distance that each movable part moves along the length direction is less than or equal to half of the spacing between adjacent movable parts.

[0022] In a feasible embodiment, the movable part includes:

[0023] A plurality of connecting pieces are stacked and arranged on the connecting portion, and the connecting pieces connected to the nozzle can rotate relative to the connecting portion;

[0024] The adjacent connecting pieces can be displaced along the length direction;

[0025] The second fixing member is used to fix the plurality of connecting pieces.

[0026] In a feasible embodiment, the connecting piece is provided with a first through hole along the length direction, and the second fixing member can be inserted into the first through hole.

[0027] In a feasible embodiment, the connecting piece is provided with a second through hole, and when the plurality of connecting pieces are shifted to a maximum distance, the second through holes of the plurality of connecting pieces are connected to each other.

[0028] In a feasible embodiment, along the thickness extension direction of the cover body, the cross section of the connecting portion is a first arc shape, the cross section of the movable portion is a second arc shape, and the arc length of the first arc shape is greater than the arc length of the second arc shape.

[0029] In a feasible embodiment, the connecting portion is provided with a first gear, the movable portion is provided with a second gear, and the first gear is meshed with the second gear.

[0030] In a feasible embodiment, the cover and the connecting portion are an integrated structure; and / or

[0031] The nozzle and the movable part are an integrated structure; and / or

[0032] The nozzle and the movable part are made of high-temperature resistant rigid material.

[0033] Compared with the prior art, the present invention includes at least the following beneficial effects: the evaporation equipment provided in the embodiment of the present application is provided with a housing, a connecting portion and a nozzle. Among them, a housing cavity is formed in the housing to place and accommodate the evaporation material, and the evaporation material is heated and vaporized in the housing cavity. The connecting portion is provided on one side surface of the housing portion, and the nozzle is connected to the housing cavity through the connecting portion. The evaporation material evaporated in the housing cavity can be sprayed out through the nozzle onto the substrate to be evaporated to form an evaporation film layer on the substrate. The nozzle can be moved along the length direction of the connecting portion, and the nozzle can be moved to expand the spraying coverage of the nozzle. With such a configuration, there is no need to design a evaporation source cover with multiple nozzle positions as in the prior art, saving design and production costs. And when adjusting the position of the nozzle, there is no need to replace the cover of the evaporation source, which improves the adjustment efficiency and reduces the difficulty of adjustment. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] Various other advantages and benefits will become apparent to those skilled in the art upon reading the detailed description of the exemplary embodiments below. The accompanying drawings are for illustration purposes only and are not to be considered limiting of the present application. Throughout the drawings, the same reference numerals are used to denote the same components. In the drawings:

[0035] Figure 1 A schematic structural diagram of an evaporation device according to an embodiment of the present application;

[0036] Figure 2 for Figure 1 A cross-sectional schematic diagram of a working state of the evaporation equipment shown;

[0037] Figure 3 for Figure 1 A cross-sectional schematic diagram of another working state of the evaporation equipment shown;

[0038] Figure 4 A schematic structural diagram of a nozzle according to an embodiment of the present application;

[0039] Figure 5 This is a schematic diagram of the assembly of the nozzle and connecting part of an embodiment provided in the present application.

[0040] in, Figures 1 to 5 The corresponding relationship between the reference numerals and component names is as follows:

[0041] 110 accommodating portion, 120 connecting portion, 130 nozzle;

[0042] 111 housing, 112 cover, 113 flow port, 131 movable portion, 132 nozzle, 133 elongated hole;

[0043] 1311 connecting piece, 1312 second through hole. DETAILED DESCRIPTION

[0044] The following describes exemplary embodiments of the present application in more detail with reference to the accompanying drawings. Although exemplary embodiments of the present application are shown in the accompanying drawings, it should be understood that the present application can be implemented in various forms and should not be limited by the embodiments set forth herein. Rather, these embodiments are provided to enable a more thorough understanding of the present application and to fully convey the scope of the present application to those skilled in the art.

[0045] like Figures 1 to 5 As shown, according to an embodiment of the present application, a vapor deposition device is proposed, including: a containing portion 110 for containing vapor deposition materials; a connecting portion 120, which is arranged on a side surface of the above-mentioned containing portion 110; a nozzle 130, which is movably arranged on the above-mentioned connecting portion 120 along the length direction of the above-mentioned connecting portion 120, and the above-mentioned nozzle 130 is connected to the above-mentioned containing portion 110 through the above-mentioned connecting portion 120.

[0046] The evaporation device provided in the embodiment of the present application is provided with a accommodating portion 110, a connecting portion 120 and a nozzle 130. Among them, a accommodating cavity is formed in the accommodating portion 110 to place and accommodate the evaporation material. The evaporation material is heated and vaporized in the accommodating cavity. The connecting portion 120 is arranged on a side surface of the accommodating portion 110. The nozzle 130 is connected to the accommodating cavity through the connecting portion 120. The evaporation material evaporated in the accommodating cavity can be sprayed onto the substrate to be evaporated through the nozzle 130 to form an evaporation film layer on the substrate. The nozzle 130 can be moved along the length direction of the connecting portion 120. By moving the nozzle 130, the spraying coverage range of the nozzle 130 can be expanded. With such an arrangement, there is no need to design a evaporation source cover 112 with multiple nozzle 130 positions as in the prior art, saving design and production costs. And when adjusting the position of the nozzle 130, there is no need to replace the evaporation source cover 112, which improves the adjustment efficiency and reduces the difficulty of adjustment.

[0047] It should be noted that when the nozzle 130 moves along the length direction of the connecting portion 120, the nozzle 130 always remains connected to the containing portion 110 to ensure that the evaporation material in the containing portion 110 can be smoothly sprayed onto the substrate to be evaporated through the nozzle 130, avoiding interruptions during the evaporation operation and affecting the uniformity of the evaporated film layer.

[0048] For example, multiple nozzles 130 may be provided, and the multiple nozzles 130 may be arranged along the length of the connecting portion 120 to reduce the movement stroke of each nozzle 130, making the movement control of each nozzle 130 more precise and easily ensuring that the nozzle 130 always remains connected to the receiving portion 110 during movement, thereby further improving the uniformity of the evaporated film layer.

[0049] For example, the movement speed of the nozzle 130 can be coordinated with the movement speed of the substrate to be evaporated. When the substrate to be evaporated moves faster, the movement speed of the nozzle 130 is increased accordingly to prevent the sprayed evaporation material from overlapping too much on the substrate, resulting in an uneven evaporated film layer. When the substrate to be evaporated moves slower, the movement speed of the nozzle 130 is slowed down accordingly to prevent the evaporated film layer sprayed on the substrate from being too thin and failing to meet the design standard.

[0050] In some examples, such as Figure 1 and Figure 5 As shown, the accommodating portion 110 includes: a shell 111, the shell 111 forms an open accommodating cavity; a cover 112, which covers the open cavity, and the connecting portion 120 is arranged on the cover 112; a flow port 113, which passes through the cover 112, and the nozzle 130 is connected to the flow port 113 through the connecting portion 120.

[0051] It can be understood that the accommodating portion 110 is provided with a shell 111, a cover 112 and a flow port 113. Among them, an open accommodating chamber is formed inside the shell 111 to accommodate the evaporation material. The cover 112 can be covered on the opening to close the accommodating chamber. And a flow port 113 is provided on the cover 112, and the flow port 113 passes through the cover 112 and is connected to the accommodating chamber. In this way, after the evaporation material is heated to a certain temperature in the accommodating chamber, the evaporation material evaporates to form a gaseous state, and at the same time, a carrier gas can be introduced into the accommodating chamber. The carrier gas can be an inert gas to avoid reacting with the evaporation material in a high temperature environment and affecting the properties and evaporation of the evaporation material. And the flow of the carrier gas in the accommodating chamber can make the evaporation material evaporated into a gaseous state evenly distributed throughout the accommodating chamber, reduce the difference in the ejection rate of the evaporation material at each nozzle 130, and improve the uniformity of the evaporation coating.

[0052] It can be understood that the connecting portion 120 is connected to the cover body 112, and the flow port 113 can pass through the connecting portion 120, so that the nozzle 130 can be connected to the flow port 113 through the connecting portion 120, and the gaseous evaporation material can flow to the nozzle 130 through the flow port 113 and be sprayed out from the nozzle 130.

[0053] In some examples, such as Figure 5 As shown, the nozzle 130 is rotatably disposed on the connecting portion 120 , and the rotation direction of the nozzle 130 intersects with the longitudinal direction.

[0054] It is understood that the nozzle 130 is rotatably mounted on the connecting portion 120, and the rotation direction of the nozzle 130 intersects the length direction of the connecting portion 120. For example, the nozzle 130 can swing along the width direction of the accommodating portion 110. The rotation of the nozzle 130 can change the direction in which the gaseous evaporation material is ejected from the nozzle 130, thereby expanding the range of the substrate to be evaporated by the nozzle 130 in its rotational direction. This reduces the difference in the thickness of the evaporated film layer in the area corresponding to the nozzle 130 on the substrate, reduces the overlapping area of ​​the evaporated film layer, and improves the uniformity of the evaporated film layer.

[0055] It is understood that the rotation period of the nozzle 130 is coordinated with the movement speed of the substrate to be evaporated. When the substrate to be evaporated is moving faster, the rotation speed of the nozzle 130 is increased accordingly to prevent the sprayed evaporation material from overlapping too much on the substrate, resulting in an uneven evaporated film layer. When the substrate to be evaporated is moving slower, the rotation speed of the nozzle 130 is slowed down accordingly to prevent the evaporated film layer on the substrate from being too thin and failing to meet the design standard.

[0056] It is understood that the evaporation device may also be provided with a controller, which is connected to the nozzle 130 and can control the rotation speed, rotation angle, and movement speed of the nozzle 130. This ensures that the gaseous evaporation material ejected from the nozzle 130 can evenly cover the substrate, improve the uniformity of the evaporated film layer, and further improve the optical uniformity and overall display performance of the display device assembled with the substrate. In the case where multiple nozzles 130 are provided, the controller is connected to each nozzle 130 respectively to control the rotation speed, rotation angle, and movement speed of each nozzle 130 individually and in a targeted manner.

[0057] In some examples, such as Figure 4 As shown, the nozzle 130 includes: a movable portion 131 rotatably disposed on the connecting portion 120 ; a nozzle 132 , the nozzle 132 passing through the movable portion 131 ; and a first fixing member for fixing the movable portion 131 to the connecting portion 120 .

[0058] It is understandable that the nozzle 130 is provided with a movable part 131, a nozzle 132 and a first fixing part. Among them, the nozzle 132 is provided in the movable part 131 and is connected to the connecting part 120, and the movable part 131 is rotatably provided on the connecting part 120, and rotating the movable part 131 can drive the nozzle 132 to rotate. After adjusting the angle of the nozzle 132, the movable part 131 can be fixed to the connecting part 120 by the first fixing part, so that the nozzle 132 can maintain a fixed angle to spray the gaseous evaporation material, thereby improving the spraying stability. After the thickness of the evaporation film layer sprayed on the substrate by the nozzle 132 at this angle reaches a preset thickness, the fixing of the movable part 131 by the first fixing part can be released to adjust the movable part 131 so that the nozzle 132 is aligned with the area to be sprayed on the substrate. Due to the fixing effect of the first fixing part, the nozzle 132 is fixed in position during spraying, thereby reducing the spraying overlap area after changing the spraying position, and further ensuring the uniformity of the evaporation film layer.

[0059] For example, the cross-sectional shape of the nozzle 132 can be circular, rectangular, or other shapes. Furthermore, when the cross-sectional shape of the nozzle 132 is circular, the cross-sectional shape of the nozzle 132 along the vertical direction can be trumpet-shaped, with the diameter of the end of the nozzle 132 away from the movable portion 131 being larger than the diameter of the end of the nozzle 132 closer to the movable portion 131, thereby increasing the coverage area of ​​the evaporation material ejected from the nozzle 132.

[0060] In some examples, such as Figure 4 As shown, a long hole 133 is opened along the rotation direction of the above-mentioned movable part 131, and a fixing hole is opened in the above-mentioned connecting part 120; when the above-mentioned movable part 131 rotates to a preset position, the above-mentioned first fixing member passes through the above-mentioned long hole 133 and the above-mentioned fixing hole.

[0061] It is understandable that the first fixing member can be a bolt. A long hole 133 can be opened along the rotation direction of the movable part 131, and the long hole 133 is a through hole, and a fixing hole is opened on the side surface of the connecting part 120 close to the movable part 131. The fixing hole is a threaded hole and the positions of the long hole 133 and the fixing hole correspond to each other. When the movable part 131 is adjusted to rotate to a preset position, the bolt can be passed through the long hole 133 and then screwed into the fixing hole to fix the movable part 131. It should be noted that the fixing hole is only opened on the side surface of the connecting part 120 close to the movable part 131, and the fixing hole is not a through hole, so as to prevent the gaseous evaporation material in the accommodating part 110 from escaping through the flow port 113 and the fixing hole, thereby ensuring the stability of the spraying.

[0062] It is understandable that the rotation range of the movable portion 131 can be limited by providing the elongated hole 133 . To ensure that the first fixing member can fix the movable portion 131 , the rotation range of the movable portion 131 cannot exceed the length of the elongated hole 133 .

[0063] It can be understood that there can be multiple long holes 133, and the multiple long holes 133 are symmetrically arranged about the midline of the length direction of the movable part 131. At the same time, the position and number of the fixing holes correspond to the long holes 133. Such an arrangement ensures that the first fixing member is evenly loaded with force on the movable part 131, thereby improving the fixing stability.

[0064] In some examples, such as Figure 2 and Figure 3 As shown, a portion of the movable portion 131 away from the connecting portion 120 can move along the length direction, and a portion of the movable portion 131 close to the connecting portion 120 covers the flow opening 113 .

[0065] It is understood that in order to ensure that the nozzle 132 is always connected to the flow port 113 to eject the gaseous evaporation material, the portion of the movable portion 131 close to the connecting portion 120 is always covered by the flow port 113, and the portion of the movable portion 131 away from the connecting portion 120 is movable along the length of the connecting portion 120. This arrangement allows only the fluid channel of the movable portion 131 to be changed when the nozzle 132 is moved, so that the nozzle 132 can always maintain communication with the accommodating portion 110, ensuring the stability and reliability of the nozzle 132 in ejecting the gaseous evaporation material, thereby ensuring the uniformity of the evaporated film layer.

[0066] In some examples, such as Figure 1 As shown, the nozzles 130 are provided in plurality, and the movable portions 131 of the plurality of nozzles 130 are arranged at intervals along the length direction, and the distance that each movable portion 131 moves along the length direction is less than or equal to half of the interval between adjacent movable portions 131 .

[0067] It is understandable that multiple nozzles 130 can be set at the same time, and each nozzle 130 can be rotated and moved to cover a larger spraying area. And the rotation angle and movement position of the multiple nozzles 130 can be controlled individually to more flexibly spray the gaseous evaporation material on the substrate to make the evaporation film layer more uniform. Specifically, the movable parts 131 of the multiple nozzles 130 are arranged at intervals along the length direction of the connecting part 120. When the nozzles 132 are fixed, the thickness of the evaporation film layer formed in the area between the two adjacent nozzles 132 is relatively thin, resulting in poor uniformity of the evaporation film layer. The multiple nozzles 130 can be moved along the length direction of the connecting part 120 and can be rotated in a direction intersecting with the length direction, so that the area between the two adjacent nozzles 132 can also be covered by the evaporation material, thereby reducing the uneven thickness of the evaporation film layer formed on the substrate and improving the overall uniformity of the thickness of the evaporation film layer.

[0068] It is understood that the spacing between adjacent nozzles 130 along the length of the connecting portion 120 cannot be set too small to avoid collision when the two nozzles 130 are moved, which would affect the spraying stability of each nozzle 130 and result in uneven thickness of the evaporated film layer sprayed on the substrate. Therefore, the distance that each movable portion 131 moves along the length of the connecting portion 120 is less than or equal to half the spacing between adjacent movable portions 131. This ensures that each nozzle 130 can move while ensuring uniform thickness of the evaporated film layer sprayed on the substrate.

[0069] It is understandable that in the process of evaporation on the substrate, two evaporation sources are usually used to evaporate different materials separately for doping evaporation, and the uniformity of the doping of the two materials will greatly affect the display effect of the display device assembled with the substrate. By adjusting the angles and moving positions of multiple nozzles, the uniformity of the evaporation film layer formed on the substrate by the doping evaporation of the two materials can be ensured, thereby improving the optical uniformity and overall display performance of the display device.

[0070] In some examples, such as Figure 2 and Figure 3 As shown, the movable portion 131 includes: a plurality of connecting pieces 1311, which are stacked on the connecting portion 120, and the connecting pieces 1311 connected to the nozzle 132 can rotate relative to the connecting portion 120; adjacent connecting pieces 1311 can be displaced along the length direction; and a second fixing member for fixing the plurality of connecting pieces 1311.

[0071] It is understandable that the movable portion 131 may be provided with a plurality of connecting pieces 1311, and the plurality of connecting pieces 1311 are stacked on the connecting portion 120, and at least one connecting piece 1311 is connected to the nozzle 132. Adjacent connecting pieces 1311 can be displaced along the length direction of the connecting portion 120 to adjust the position of the plurality of connecting pieces 1311 along the length direction, and then the movement distance of the nozzle 132 along the length direction can be adjusted by adjusting the connecting pieces 1311. The provision of multiple connecting pieces 1311 makes the movable portion 131 more flexible and the adjustment accuracy better. In addition, the connecting piece 1311 close to the connecting portion 120 is fixed to the connecting portion 120 to ensure that when the position of the movable portion 131 is adjusted, the cavity formed in the movable portion 131 is always connected to the flow port 113, thereby improving stability.

[0072] It is understood that at least the connecting piece 1311 connected to the nozzle 132 can rotate relative to the connecting portion 120, so that the nozzle 132 can rotate, and the rotation direction intersects with the length direction of the connecting portion 120. By providing multiple connecting pieces 1311, the nozzle 132 can move along the length direction of the connecting portion 120 while rotating, thereby ensuring the uniformity of the thickness of the vapor-deposited film layer sprayed on the substrate.

[0073] It is understood that the movable portion 131 is also provided with a second fixing member. After the multiple connecting pieces 1311 are staggered and adjusted to the preset position, the second fixing member fixes the multiple connecting pieces 1311 in the current position to ensure that the position of the nozzle 132 along the length of the connecting portion 120 is fixed, ensuring the stable discharge of the gaseous evaporation material. This reduces the overlap of the spraying area after changing the spraying position and further ensures the uniformity of the evaporated film layer.

[0074] For example, the widths of the plurality of connection pieces 1311 decrease in sequence from being close to the connection portion 120 to being away from the connection portion 120 , so as to ensure smooth interlacing of the plurality of connection portions 120 , avoid interference, and improve reliability.

[0075] In some examples, the connecting piece 1311 is provided with a first through hole along the length direction, and the second fixing member can be inserted into the first through hole.

[0076] It can be understood that the second fixing member can be a bolt, and each connecting plate 1311 is provided with a first through hole along the length direction of the connecting portion 120. The first through hole can be a threaded hole. The bolts are screwed into the first through holes of the multiple connecting plates 1311 to fix the multiple connecting plates 1311. The operation is simple and efficient.

[0077] In some examples, the connecting pieces 1311 are provided with second through holes 1312 . When the connecting pieces 1311 are shifted to a maximum distance, the second through holes 1312 of the connecting pieces 1311 are connected to each other.

[0078] It is understood that each connecting piece 1311 is provided with a second through hole 1312, and the second through hole 1312 can be located at the center of the connecting piece 1311. When multiple connecting pieces 1311 are stacked together to form the movable portion 131, the second through holes 1312 of the multiple connecting pieces 1311 can form a cavity, which is respectively connected to the flow port 113 and the nozzle 132, so that the gaseous evaporation material in the accommodating cavity is sprayed toward the substrate through the nozzle 132. Moreover, when the multiple connecting pieces 1311 are shifted to the maximum shift distance, the second through holes 1312 of the multiple connecting pieces 1311 are still connected to each other to ensure that the gaseous evaporation material can still be sprayed out through the nozzle 132. Furthermore, when the multiple connecting pieces 1311 are shifted to the maximum shift distance, the radial dimension of the cavity remains unchanged to ensure that the flow rate of the gaseous evaporation material sprayed from the nozzle 132 remains unchanged, thereby ensuring the uniformity of the evaporation film layer.

[0079] In some examples, such as Figures 1 to 5As shown, along the thickness extension direction of the cover body 112, the cross section of the connecting portion 120 is a first arc shape, the cross section of the movable portion 131 is a second arc shape, and the arc length of the first arc shape is greater than the arc length of the second arc shape.

[0080] It can be understood that the connecting portion 120 can be an arc-shaped connecting portion 120. Specifically, the cross-section of the connecting portion 120 along the thickness extension direction of the cover body 112 is a first arc shape, and the shape of the movable portion 131 matches the shape of the connecting portion 120. The cross-section of the movable portion 131 along the thickness extension direction of the cover body 112 is a second arc shape, and the second arc shape can abut against the first arc shape and slide along the surface of the first arc shape, so that the movable portion 131 can rotate relative to the connecting portion 120, and then the angle of the gaseous evaporation material ejected from the nozzle 132 can be adjusted to ensure that the thickness of the evaporated film layer formed on the substrate is uniform.

[0081] It should be noted that the range of rotation of the second arc on the first arc is the difference in arc length between the first and second arcs. Therefore, the arc length of the first arc is set to be greater than the arc length of the second arc to ensure that the movable portion 131 can rotate smoothly on the connecting portion 120 and can rotate to a certain angle to cover a larger spraying area.

[0082] For example, the nozzle 132 is located at the center of the movable portion 131, and the maximum rotation angle of the nozzle 132 is less than or equal to 60 degrees. Avoid excessive rotation of the nozzle 132, which may cause the evaporation material ejected from the nozzle 132 to form a ring-shaped area on the substrate during rotation, making it difficult to ensure the evaporation effect on the corresponding area of ​​the substrate when the nozzle 132 is located at the center.

[0083] In some examples, the connecting portion 120 is provided with a first gear, the movable portion 131 is provided with a second gear, and the first gear is engaged with the second gear.

[0084] It is understandable that a first gear may be provided on the connecting portion 120, and a second gear may be provided on the movable portion 131, and the first gear and the second gear are meshed with each other. By rotating the first gear, the second gear can be driven to rotate, so that the movable portion 131 can be rotated relative to the connecting portion 120 to adjust the angle at which the nozzle 132 sprays the gaseous evaporation material. And after adjusting the nozzle 132 to a preset angle, the fixing member can be clamped at the root of the first gear to stop the rotation of the first gear and fix the position of the first gear. Then, the nozzle 132 is fixed at the current angle until the gaseous evaporation material sprayed from the nozzle 132 forms an evaporation film layer of a preset thickness in the corresponding area on the substrate. The position of the nozzle 132 is improved during spraying, thereby reducing the spraying overlap area after changing the spraying position, and further ensuring the uniformity of the evaporation film layer.

[0085] In some examples, the cover 112 and the connecting portion 120 are an integrated structure; and / or the nozzle 132 and the movable portion 131 are an integrated structure; and / or the nozzle 132 and the movable portion 131 are made of a high-temperature resistant rigid material.

[0086] It is understandable that the connecting portion 120 and the cover body 112 can be made by an integrated molding process. After the integrated molding, the flow port 113 can be processed, and the flow port 113 runs through the cover body 112 and the connecting portion 120. This is to enhance the structural strength of the cover body 112 and the connecting portion 120 and reduce the assembly process. The nozzle 132 and the movable portion 131 can be made by an integrated molding process, and the nozzle 132 is provided through the movable portion 131, so that when the movable portion 131 is connected to the connecting portion 120, the flow port 113 can be connected to the nozzle 132. The nozzle 132 and the movable portion 131 are made of high-temperature resistant rigid materials to prevent the high-temperature gaseous evaporation material from affecting the nozzle 132 and the movable portion 131, thereby ensuring the stability of the ejected gaseous evaporation material and preventing the nozzle 132 and the movable portion 131 from deforming under the influence of high temperature, resulting in a change in the flow rate of the ejected gaseous evaporation material and affecting the uniformity of the formed evaporation film layer. For example, the nozzle 132 and the movable portion 131 may be made of high-temperature resistant stainless steel or titanium alloy.

[0087] In the present invention, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. The term "plurality" refers to two or more, unless expressly limited otherwise. Terms such as "installed," "connected," "connected," and "fixed" should be interpreted broadly. For example, "connected" can mean a fixed connection, a detachable connection, or an integral connection; "connected" can mean a direct connection or an indirect connection through an intermediary. Those skilled in the art will understand the specific meanings of these terms in the present invention based on specific circumstances.

[0088] In the description of the present invention, it should be understood that the directions or positional relationships indicated by terms such as "up", "down", "left", "right", "front" and "back" are based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or unit referred to must have a specific direction, be constructed and operated in a specific direction. Therefore, they should not be understood as limiting the present invention.

[0089] Throughout this specification, terms such as "one embodiment," "some embodiments," and "specific embodiments" mean that the specific features, structures, materials, or characteristics described in conjunction with that embodiment or example are included in at least one embodiment or example of the present invention. In this specification, schematic representations of these terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

[0090] The above are merely preferred embodiments of the present invention and are not intended to limit the present invention. Those skilled in the art will readily appreciate that various modifications and variations of the present invention are possible. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the present invention.

Claims

1. A vapor deposition device, characterized in that: include: A receiving portion, used for receiving the evaporation material; A connecting portion, provided on a side surface of the accommodating portion; a nozzle, movably provided on the connecting portion along the length direction of the connecting portion, and the nozzle is connected to the accommodating portion through the connecting portion; The nozzle comprises: a movable portion rotatably disposed on the connecting portion; a nozzle, the nozzle being provided through the movable portion; The activities include: A plurality of connecting pieces are stacked and arranged on the connecting portion, and the connecting pieces connected to the nozzle can rotate relative to the connecting portion; Adjacent connecting pieces can be displaced along the length direction; The widths of the plurality of connecting pieces decrease in sequence from close to the connecting portion to away from the connecting portion.

2. The evaporation device according to claim 1, characterized in that The accommodating portion includes: a housing, wherein the housing is formed with an open accommodating cavity; a cover body, which covers the opening, and the connecting portion is provided on the cover body; The flow port penetrates the cover body, and the nozzle is connected to the flow port through the connecting portion.

3. The evaporation device according to claim 1, characterized in that The nozzle is rotatably disposed on the connecting portion, and a rotation direction of the nozzle intersects with the longitudinal direction.

4. The evaporation device according to claim 2, characterized in that The nozzle comprises: The first fixing member is used to fix the movable part to the connecting part.

5. The evaporation equipment according to claim 4, characterized in that A long hole is provided along the rotation direction of the movable part, and a fixing hole is provided on the connecting part; When the movable portion rotates to a preset position, the first fixing member passes through the elongated hole and the fixing hole.

6. The evaporation equipment according to claim 4, characterized in that The portion of the movable portion away from the connecting portion is movable along the length direction, and the portion of the movable portion close to the connecting portion covers the flow port.

7. The evaporation device according to claim 5, characterized in that There are multiple nozzles, and the movable parts of the multiple nozzles are arranged at intervals along the length direction. The distance that each movable part moves along the length direction is less than or equal to half of the interval between adjacent movable parts.

8. The evaporation equipment according to claim 6, characterized in that The activities include: The second fixing member is used to fix the plurality of connecting pieces.

9. The evaporation equipment according to claim 8, characterized in that The connecting piece is provided with a first through hole along the length direction, and the second fixing member can be inserted into the first through hole.

10. The evaporation equipment according to claim 9, characterized in that The connecting piece is provided with a second through hole. When the connecting pieces are shifted to a maximum distance, the second through holes of the connecting pieces are connected to each other.

11. The evaporation equipment according to claim 4, characterized in that Along the thickness extension direction of the cover body, the cross section of the connecting portion is a first arc shape, the cross section of the movable portion is a second arc shape, and the arc length of the first arc shape is greater than the arc length of the second arc shape.

12. The evaporation equipment according to claim 4, characterized in that The connecting portion is provided with a first gear, the movable portion is provided with a second gear, and the first gear is engaged with the second gear.

13. The evaporation device according to any one of claims 4 to 12, characterized in that: The cover and the connecting portion are an integrated structure; and / or The nozzle and the movable part are an integrated structure; and / or The nozzle and the movable part are made of high-temperature resistant rigid material.

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