Rapid Furnace Tube Air Exchange System

Abstract

The present invention discloses a rapid air exchange system for a furnace tube, which relates to the technical field of solar cell production. The furnace tube includes a furnace tube body, and a furnace door is installed at one end of the furnace tube body; the rapid air exchange system includes an air inlet and exhaust assembly for air exchange inside the furnace tube. The air inlet and exhaust assembly includes an exhaust pipe and an intake pipe, and the exhaust pipe and the intake pipe form an air exchange passage with the inside of the furnace tube body; a water bottle is used for pretreatment of waste gas to achieve cooling of the waste gas and separation and removal of harmful substances in the waste gas; the exhaust assembly can pump the waste gas inside the furnace tube body into the inside of the water bottle to accelerate the exhaust rate of the waste gas. The present invention can assist in the discharge of the waste gas inside the furnace tube through the exhaust assembly to achieve rapid air exchange of the furnace tube. In addition, it can achieve two separations of metaphosphoric acid in the waste gas and cooling of the waste gas, effectively improving the waste gas treatment effect, simplifying the subsequent waste gas treatment process, and being able to wash and collect the separated metaphosphoric acid to prevent pollution.

Description

Technical Field

[0001] The present invention relates to the technical field of solar cell production, and particularly to a rapid air exchange system for furnace tubes. Background Art

[0002] With the increasing environmental awareness of people, the solar cell industry has also achieved sufficient development. When producing solar cells, a series of processing and manufacturing operations need to be carried out on single-crystalline silicon wafers.

[0003] The production process flow of crystalline silicon solar cells is divided into: silicon wafer inspection - surface texturing and pickling - diffusion junction formation - removing phosphosilicate glass - plasma etching and pickling - depositing antireflection film - screen printing - rapid sintering, etc. Among them, diffusion to form a PN junction is the most basic and crucial process in solar cell production.

[0004] Solar cells require a large-area PN junction to achieve the conversion of light energy to electrical energy, and a diffusion furnace is a special equipment for manufacturing the PN junction of solar cells. A tube-type diffusion furnace mainly consists of four major parts: the loading and unloading part of the quartz boat, the exhaust gas chamber, the furnace body part, and the gas cabinet part, etc. Generally, phosphorus oxychloride liquid source is used as the diffusion source for diffusion. Place the P-type silicon wafer in the quartz container of the tube-type diffusion furnace, and use nitrogen to introduce phosphorus oxychloride into the quartz container at a high temperature of 850 - 900 degrees Celsius. Through the reaction between phosphorus oxychloride and the silicon wafer, phosphorus atoms are obtained. After a certain period of time, the phosphorus atoms enter the surface layer of the silicon wafer from all around and penetrate and diffuse into the silicon wafer through the gaps between silicon atoms, forming the interface between the N-type semiconductor and the P-type semiconductor, that is, the PN junction.

[0005] During the use of the diffusion furnace tube, phosphorus oxychloride needs to be introduced. In the normal process, metaphosphoric acid will be generated and doped in the furnace tube air during the reaction, which will affect the quality of the diffusion reaction. The metaphosphoric acid needs to be discharged to the acid treatment equipment for treatment through air exchange.

[0006] In the prior art, the air exchange of the diffusion furnace tube can only discharge the exhaust gas inside the furnace tube by continuously introducing nitrogen. However, this air exchange method has low efficiency, cannot timely discharge the exhaust gas, and cannot timely separate the metaphosphoric acid in the exhaust gas, resulting in complex subsequent exhaust gas treatment processes and increased production costs.

[0007] Therefore, in view of the above technical problems, it is necessary to provide a rapid air exchange system for furnace tubes. Summary of the Invention

[0008] The purpose of the present invention is to provide a rapid air exchange system for furnace tubes, which can solve the problems of low air exchange efficiency and poor exhaust gas treatment effect.

[0009] To achieve the above object, an embodiment of the present invention provides a rapid air change system for a furnace tube. The furnace tube includes a furnace tube body, and a furnace door is installed at one end of the furnace tube body;

[0010] The rapid air change system includes: an air inlet and exhaust assembly for air change inside the furnace tube. The air inlet and exhaust assembly includes an outlet pipe and an inlet pipe, and the outlet pipe and the inlet pipe form an air change passage with the inside of the furnace tube body;

[0011] A water bottle for pre-treatment of waste gas to cool the waste gas and separate and remove harmful substances in the waste gas;

[0012] An exhaust assembly capable of pumping the waste gas inside the furnace tube body into the inside of the water bottle to accelerate the waste gas discharge rate;

[0013] A water cooling assembly for heat exchange cooling of the exhaust assembly to ensure the long-term and efficient operation of the exhaust assembly, and at the same time capable of flushing and removing harmful substances separated from the waste gas attached to the inner wall of the water bottle.

[0014] In one or more embodiments of the present invention, air valves are installed on both the outlet pipe and the inlet pipe. One end of the outlet pipe and the inlet pipe is fixedly connected to the furnace door, and the other end of the outlet pipe is fixedly connected to the water bottle. The waste gas can be introduced into the inside of the water bottle through the outlet pipe.

[0015] In one or more embodiments of the present invention, the middle pipe section of the outlet pipe is spirally wound around the outside of the water bottle.

[0016] In one or more embodiments of the present invention, the inlet pipe is used to send the gas required for the diffusion reaction into the inside of the furnace tube body, and a heat exchange coil is fixedly connected to the inlet pipe, and the heat exchange coil is located inside the water bottle.

[0017] In one or more embodiments of the present invention, the heat exchange coil is spiral, and the material of the heat exchange coil is one of carbon steel, low alloy steel, stainless steel, copper, copper-nickel alloy or aluminum alloy.

[0018] In one or more embodiments of the present invention, an exhaust pipe is installed at the top of the water bottle, a collection bottle is installed at the bottom of the water bottle, a drain pipe is fixedly connected to the bottom of the collection bottle, and a water valve is installed on the drain pipe.

[0019] In one or more embodiments of the present invention, a fixing frame is fixedly connected inside the water bottle, the exhaust assembly is installed on the fixing frame, and the exhaust assembly includes a rotating shaft, a motor, a centrifugal fan blade and a water spraying channel, and the rotating shaft is fixedly connected to the fixing frame.

[0020] In one or more embodiments of the present invention, the motor is fixedly connected to the output shaft of the rotating shaft, multiple groups of centrifugal fan blades are installed on the motor, and the water spraying flow channel is arranged between the inside of the motor and the centrifugal fan blades.

[0021] In one or more embodiments of the present invention, the water cooling component is connected to the motor. The water cooling component includes a water tank, a booster pump, and a water delivery pipe. One end of the water delivery pipe is connected to the motor, the inside of the water delivery pipe is communicated with the inside of the water spraying flow channel, and a control valve is installed on the water delivery pipe.

[0022] In one or more embodiments of the present invention, the booster pump is fixedly connected to the water tank, the input end of the booster pump is fixedly connected to the water tank, and one end of the water delivery pipe is fixedly connected to the output end of the booster pump.

[0023] Compared with the prior art, the embodiments of the present invention have the following technical effects:

[0024] Through the exhaust component, the present invention can assist in discharging the waste gas inside the furnace tube, realizing rapid air replacement of the furnace tube. In addition, it can achieve two - stage separation of metaphosphoric acid in the waste gas and cooling of the waste gas, effectively improving the waste gas treatment effect, simplifying the subsequent waste gas treatment process, and being able to wash and collect the separated metaphosphoric acid to prevent pollution. Brief Description of the Drawings

[0025] Figure 1 is a schematic structural diagram of a furnace tube rapid air replacement system according to an embodiment of the present invention;

[0026] Figure 2 is a front view of a furnace tube rapid air replacement system according to an embodiment of the present invention;

[0027] Figure 3 is a rear view of a furnace tube rapid air replacement system according to an embodiment of the present invention;

[0028] Figure 4 is an enlarged front - view cross - section of the water bottle of a furnace tube rapid air replacement system according to an embodiment of the present invention Figure 1 ;

[0029] Figure 5 is an enlarged cross - sectional view of the exhaust component of a furnace tube rapid air replacement system according to an embodiment of the present invention;

[0030] Figure 6 is a top view of the exhaust component of a furnace tube rapid air replacement system according to an embodiment of the present invention;

[0031] Figure 7 is a furnace tube rapid air replacement system according to an embodiment of the present invention Figure 5 Enlarged view at A in;

[0032] Figure 8 Front view of the water bottle of the furnace tube rapid air exchange system according to an embodiment of the present invention, enlarged sectional view Figure 2 .

[0033] Description of main reference numerals:

[0034] 1. Furnace tube body; 2. Furnace door; 3. Exhaust pipe; 4. Intake pipe; 5. Air valve; 6. Water bottle; 7. Exhaust pipe; 8. Collection bottle; 9. Water valve; 10. Drain pipe; 11. Water tank; 12. Booster pump; 13. Water delivery pipe; 14. Control valve; 15. Exhaust assembly; 1501. Rotating shaft; 1502. Motor; 1503. Centrifugal fan blade; 1504. Water spray channel; 16. Fixed frame; 17. Demister; 18. Heat exchange coil; 19. Threaded joint; 20. Connector; 21. Connection groove; 22. Sealing assembly. Detailed implementation manners

[0035] The following combines the drawings to describe the detailed implementation manners of the present invention in detail, but it should be understood that the protection scope of the present invention is not limited by the detailed implementation manners.

[0036] Unless otherwise clearly stated, in the whole specification and claims, the term "comprising" or its variations such as "including" or "having" etc. will be understood to include the stated elements or components, without excluding other elements or other components.

[0037] As Figures 1 to 8 shown, in the furnace tube rapid air exchange system according to the preferred embodiment of the present invention, the furnace tube includes a furnace tube body 1, and wafers are sent into the inside of the furnace tube body 1 for diffusion junction formation process. A furnace door 2 is installed at one end of the furnace tube body 1, and the furnace door 2 is used to seal the furnace opening.

[0038] Refer Figures 1 to 3 shown, the rapid air exchange system includes: an intake and exhaust assembly for air exchange inside the furnace tube. The intake and exhaust assembly includes an exhaust pipe 3 and an intake pipe 4, and the exhaust pipe 3 and the intake pipe 4 form an air exchange passage with the inside of the furnace tube body 1. Air valves 5 are installed on both the exhaust pipe 3 and the intake pipe 4. By setting the air valves 5, the intake and exhaust can be flexibly controlled.

[0039] Refer Figures 1 to 3 shown, one ends of both the exhaust pipe 3 and the intake pipe 4 are fixedly connected to the furnace door 2 through flanges, and the other end of the exhaust pipe 3 is fixedly connected to the water bottle 6. Through the exhaust pipe 3, the waste gas can be introduced into the inside of the water bottle 6. Among them, the exhaust pipe 3 and the water bottle 6 are of an integrally formed structure, and both the exhaust pipe 3 and the water bottle 6 are made of glass material and can resist the corrosion of metaphosphoric acid.

[0040] Among them, refer Figure 1 and Figure 2As shown, the middle pipe section of the exhaust pipe 3 is spirally coiled around the outside of the water bottle 6. The spirally coiled exhaust pipe 3 has the function of gas-liquid separation. When the waste gas passes through this pipe section, metaphosphoric acid in the waste gas can be separated out.

[0041] Specifically, the waste gas inside the furnace tube body 1 can be discharged through the exhaust pipe 3. When the waste gas passes through the spiral pipe section of the exhaust pipe 3, the metaphosphoric acid droplets in the waste gas can be separated under the action of centrifugal force. After the separated metaphosphoric acid droplets converge on the pipe wall of the spiral pipe section, they will gradually flow into the inside of the water bottle 6, realizing the initial separation treatment of metaphosphoric acid.

[0042] See Figure 1 , Figure 2 and Figure 4 As shown, the intake pipe 4 is used to send the gas required for the diffusion reaction into the inside of the furnace tube body 1. A heat exchange coil 18 is fixedly connected to the intake pipe 4, and the heat exchange coil 18 is located inside the water bottle 6. Among them, the heat exchange coil 18 is spiral, and the material of the heat exchange coil 18 is one of carbon steel, low alloy steel, stainless steel, copper, copper-nickel alloy or aluminum alloy.

[0043] Preferably, in this embodiment, the material of the heat exchange coil 18 is preferably made of copper or copper-nickel alloy material, which not only has good heat conduction and heat exchange capabilities, but also has good acid and alkali corrosion resistance and can be used inside the water bottle 6 for a long time.

[0044] Specifically, see Figure 4 As shown, the gas for the diffusion reaction will pass through the inside of the heat exchange coil 18 before entering the inside of the furnace tube body 1 through the intake pipe 4. The heat exchange coil 18 can efficiently exchange heat with the waste gas entering the inside of the water bottle 6 inside the water bottle 6. When the gas for the diffusion reaction passes through the inside of the heat exchange coil 18, it can indirectly exchange heat with the high-temperature waste gas, so that not only the initial cooling of the waste gas can be realized, but also the intake air can be preheated to prevent a large impact on the furnace tube temperature due to too low intake air temperature.

[0045] See Figures 1 to 4 As shown, the water bottle 6 is used for the pretreatment of waste gas, realizing the cooling of waste gas and the separation and removal of harmful substances in the waste gas. An exhaust pipe 7 is installed at the top of the water bottle 6, and the exhaust pipe 7 is used for the final discharge of waste gas. A collection bottle 8 is installed at the bottom of the water bottle 6. A drain pipe 10 is fixedly connected to the bottom of the collection bottle 8, and a water valve 9 is installed on the drain pipe 10.

[0046] Specifically, after the metaphosphoric acid droplets converge and flow into the inside of the water bottle 6, they will then flow into the inside of the collection bottle 8 for collection. When a certain amount of metaphosphoric acid liquid is collected inside the collection bottle 8, open the water valve 9 on the drain pipe 10, and the collected metaphosphoric acid liquid can be discharged into a designated container through the drain pipe 10 to prevent pollution.

[0047] Among them, the parameter Figure 4 As shown, a threaded interface is provided at the top end inside the collection bottle 8, and a threaded joint 19 is fixedly connected to the bottom end of the water bottle 6. The threaded joint 19 is matched with the threaded interface. The collection bottle 8 is installed below the water bottle 6 by means of threaded connection, and can be disassembled and assembled flexibly, which is very convenient for cleaning and maintenance.

[0048] In addition, the parameter Figure 8 As shown, in this embodiment, if the volume of the collection bottle 8 is large enough, then the collection bottle 8 can also be used as the collection container at the tail end. One end of the drain pipe 10 is directly fixedly connected to the bottom end of the water bottle 6, and the other end is fixedly connected to the top end of the collection bottle 8. After the metaphosphoric acid and water flow generated inside the water bottle 6 reach the bottom end inside the water bottle 6, they can be directly introduced into the inside of the collection bottle 8 through the drain pipe 10 and stored, which can reduce the overall volume, simplify the overall structure, and make the installation and use more convenient.

[0049] The parameter Figures 4 to 6 As shown, the exhaust assembly 15 can draw the waste gas inside the furnace tube body 1 into the inside of the water bottle 6 to accelerate the exhaust rate of the waste gas. A fixing frame 16 is fixedly connected inside the water bottle 6, and the exhaust assembly 15 is installed on the fixing frame 16. The exhaust assembly 15 includes a rotating shaft 1501, a motor 1502, a centrifugal fan blade 1503 and a water spraying channel 1504.

[0050] The parameter Figure 5 and Figure 6 As shown, the rotating shaft 1501 is fixedly connected to the fixing frame 16, and the rotating shaft 1501 is located on the vertical center line of the water bottle 6. The motor 1502 is fixedly connected to the output shaft of the rotating shaft 1501, and multiple groups of centrifugal fan blades 1503 are installed on the motor 1502.

[0051] Specifically, the parameter Figure 5 and Figure 6 As shown, five groups of centrifugal fan blades 1503 are evenly installed on the motor 1502, and the five groups of centrifugal fan blades 1503 and the motor 1502 are integrally formed. The rotating shaft 1501 can drive the motor 1502 to rotate, and the centrifugal fan blades 1503 on the motor 1502 will send air upward, so that the waste gas entering the inside of the water bottle 6 rises rapidly, thereby generating negative pressure below the inside of the water bottle 6. The principle of negative pressure adsorption can be used to extract waste gas, so that the waste gas inside the furnace tube body 1 can enter the inside of the water bottle 6 faster, thereby accelerating the ventilation rate inside the furnace tube body 1.

[0052] It should be noted that during the process of the centrifugal fan blade 1503 rotating at high speed to extract the waste gas below, under the action of centrifugal force, the residual metaphosphoric acid droplets in the waste gas will also be thrown out, causing the metaphosphoric acid droplets to adhere to the inner wall of the water bottle 6 and flow downward after gathering, thereby realizing the secondary separation of metaphosphoric acid in the waste gas. In this way, effective separation of metaphosphoric acid can be achieved inside the water bottle 6, bringing great convenience to the subsequent transportation and treatment of the waste gas.

[0053] The water cooling component is connected to the motor 1502. The water cooling component is used for heat exchange cooling of the exhaust component 15 to ensure the long-term and efficient operation of the exhaust component 15, and at the same time can wash and remove the harmful substances separated from the waste gas adhering to the inner wall of the water bottle 6.

[0054] See Figure 5 and Figure 7 As shown, the water cooling component includes a water tank 11, a booster pump 12 and a water delivery pipe 13. One end of the water delivery pipe 13 is connected to the motor 1502. Among them, a connection groove 21 is opened at the central position of the top end of the motor 1502, and a sealing component 22 is fixedly connected to the inner wall of the connection groove 21. One end of the water delivery pipe 13 is provided with a connection head 20.

[0055] Among them, the sealing component 22 can be a polyurethane sealing ring, a polytetrafluoroethylene sealing ring, a fluororubber sealing ring, etc. Preferably, since the connection head 20 and the connection groove 21 are rotatably connected, the sealing component 22 is preferably a fluororubber sealing ring with wear-resistant and high-temperature resistant properties, which can meet the long-term precise sealing of the rotational connection between the connection head 20 and the connection groove 21 and prevent water seepage.

[0056] Specifically, see Figure 5 and Figure 7 As shown, the connection head 20 is embedded inside the connection groove 21, and the connection head 20 and the connection groove 21 are rotatably connected. The sealing component 22 can ensure the sealing performance between the connection head 20 and the connection groove 21. When the motor 1502 rotates at high speed, the water delivery pipe 13 and the connection head 20 always remain stationary.

[0057] See Figures 2 to 6 As shown, the booster pump 12 is fixedly connected to the water tank 11, and clear water is stored inside the water tank 11. The input end of the booster pump 12 is fixedly connected to the water tank 11, and one end of the water delivery pipe 13 is fixedly connected to the output end of the booster pump 12. The booster pump 12 can extract the clear water inside the water tank 11 and inject it into the water delivery pipe 13. The water spraying channel 1504 is arranged between the inside of the motor 1502 and the centrifugal fan blade 1503. Among them, multiple groups of through holes are opened on the centrifugal fan blade 1503, and the through holes are communicated with the inside of the water spraying channel 1504.

[0058] See Figures 2 to 5As shown, the inside of the water delivery pipe 13 is connected to the inside of the water spraying channel 1504. A control valve 14 is installed on the water delivery pipe 13, and the water inlet speed can be controlled through the control valve 14. After the booster pump 12 extracts the clear water inside the water tank 11, it is injected into the inside of the water spraying channel 1504 through the water delivery pipe 13. At this time, both the motor 1502 and the centrifugal fan blade 1503 are in a state of high-speed rotation. The clear water entering the inside of the water spraying channel 1504 will be thrown out through the through holes. After the clear water is thrown out, it will directly contact the inner wall of the water bottle 6 and flow downward along the inner wall of the water bottle 6.

[0059] Among them, after the clear water enters the inside of the water spraying channel 1504, it will directly contact the motor 1502 and the centrifugal fan blade 1503, exchange heat and cool the motor 1502 and the centrifugal fan blade 1503, so that both the motor 1502 and the centrifugal fan blade 1503 are in a low-temperature state, so as to be able to cool the passing waste gas again. In addition, it can also prevent the exhaust component 15 from being damaged due to excessive self-temperature.

[0060] It should be noted that after the clear water is thrown out and flows downward along the inner wall of the water bottle 6, it can also wash and clean the inner wall of the water bottle 6, so that the metaphosphoric acid droplets attached to the inner wall of the water bottle 6 can be quickly cleaned, preventing the metaphosphoric acid from solidifying on the inner wall of the water bottle 6 and causing pollution. At the same time, the thrown water can also directly contact the waste gas and cool the waste gas.

[0061] Among them, a porous spray nozzle can be installed on the through hole. By installing the spray nozzle, the water can be sprinkled more evenly, so that the washing of the inner wall of the water bottle 6 can be more uniform and comprehensive, and the contact area between the water and the waste gas can also be increased, so that the thrown water can efficiently contact and exchange heat with the water, so as to more efficiently cool the waste gas.

[0062] In addition, as shown in Figure 4 As shown, a demister 17 is fixedly installed at the top inside the water bottle 6. The demister 17 is a demister with corrugated blades. Since the clear water will generate water mist mixed in the waste gas after hitting the inner wall of the water bottle 6 when it is thrown out, the waste gas will pass through the demister 17 before being discharged from the inside of the water bottle 6. The demister 17 can remove the droplets contained in the waste gas, so as to more fully separate the droplets in the waste gas and make the separation of metaphosphoric acid complete.

[0063] During use, the rotating shaft 1501 is started. The rotating shaft 1501 will drive the motor 1502 to rotate at a high speed. The rotation of the centrifugal fan blade 1503 outside the motor 1502 will generate negative pressure inside the water bottle 6. Through the action of negative pressure adsorption, the waste gas inside the furnace tube body 1 can be drawn into the inside of the water bottle 6 through the air outlet pipe 3, so as to achieve the effect of quickly replacing the air inside the furnace tube body 1 by accelerating the discharge of the waste gas.

[0064] At this time, the booster pump 12 is started. The booster pump 12 will extract the water inside the water tank 11 and inject it into the inside of the water spraying flow channel 1504 through the water delivery pipe 13. During the process of the water passing through the inside of the water spraying flow channel 1504, it will exchange heat with the motor 1502 and the centrifugal fan blade 1503, cooling down the motor 1502 and the centrifugal fan blade 1503; when the waste gas passes through the motor 1502 and the centrifugal fan blade 1503, it will come into contact with them and directly exchange heat with the motor 1502 and the centrifugal fan blade 1503, thereby cooling down the waste gas; in addition, the water entering the inside of the water spraying flow channel 1504 will be thrown out through the through holes, and after the water is thrown out, it will flow down along the inner wall of the water bottle 6, and the inner wall of the water bottle 6 can also be washed and cleaned by using the clear water.

[0065] Finally, the water and metaphosphoric acid are mixed and collected inside the collection bottle 8. When it needs to be discharged, the water valve 9 is opened, and the collected liquid can be discharged into a specified container through the liquid discharge pipe 10.

[0066] Through the exhaust assembly, the present invention can assist in discharging the waste gas inside the furnace tube, realizing the rapid air change of the furnace tube. In addition, it can realize the two - stage separation of metaphosphoric acid in the waste gas and the cooling of the waste gas, effectively improving the waste gas treatment effect, simplifying the subsequent waste gas treatment process, and being able to wash and collect the separated metaphosphoric acid to prevent pollution.

[0067] The foregoing description of the specific exemplary embodiments of the present invention is for the purposes of illustration and exemplification. These descriptions are not intended to limit the present invention to the precise forms disclosed, and obviously, many changes and variations are possible in light of the above teachings. The purpose of selecting and describing the exemplary embodiments is to explain the specific principles of the present invention and its practical applications, so that those skilled in the art can implement and utilize various different exemplary embodiments of the present invention, as well as various different selections and changes. The scope of the present invention is intended to be defined by the claims and their equivalents.

Claims

1. A rapid furnace tube air change system, characterized in that, The furnace tube includes: A furnace tube body, with a furnace door installed at one end of the furnace tube body; The rapid ventilation system includes: An intake and exhaust component for ventilation inside the furnace tube. The intake and exhaust component includes an outlet pipe and an inlet pipe, and the outlet pipe and the inlet pipe form a ventilation passage with the inside of the furnace tube body; A water bottle for pre-treatment of waste gas, realizing cooling of the waste gas and separation and removal of harmful substances in the waste gas; An exhaust component capable of pumping the waste gas inside the furnace tube body into the interior of the water bottle to accelerate the waste gas discharge rate; A water cooling component for heat exchange cooling of the exhaust component, ensuring long-term and efficient operation of the exhaust component, and at the same time capable of flushing and removing harmful substances separated from the waste gas attached to the inner wall of the water bottle; A fixing frame is fixedly connected inside the water bottle, and the exhaust component is installed on the fixing frame. The exhaust component includes a rotating shaft, a motor, centrifugal fan blades, and a water spraying channel, and the rotating shaft is fixedly connected to the fixing frame; The motor is fixedly connected to the output shaft of the rotating shaft, multiple groups of centrifugal fan blades are installed on the motor, and the water spraying channel is arranged between the inside of the motor and the centrifugal fan blades; The water cooling component is connected to the motor. The water cooling component includes a water tank, a booster pump, and a water delivery pipe. One end of the water delivery pipe is connected to the motor, the inside of the water delivery pipe is communicated with the inside of the water spraying channel, and a control valve is installed on the water delivery pipe; The booster pump is fixedly connected to the water tank, the input end of the booster pump is fixedly connected to the water tank, and one end of the water delivery pipe is fixedly connected to the output end of the booster pump.

2. The furnace tube rapid air change system according to claim 1, wherein, Air valves are installed on both the outlet pipe and the inlet pipe. One end of the outlet pipe and the inlet pipe is fixedly connected to the furnace door, and the other end of the outlet pipe is fixedly connected to the water bottle. The waste gas can be introduced into the interior of the water bottle through the outlet pipe.

3. The furnace tube rapid air change system according to claim 2, wherein The middle pipe section of the outlet pipe is spirally wound around the outside of the water bottle.

4. The rapid air change system for furnace tubes according to claim 1, characterized in that, The inlet pipe is used to send the gas required for the diffusion reaction into the interior of the furnace tube body, and a heat exchange coil is fixedly connected to the inlet pipe, and the heat exchange coil is located inside the water bottle.

5. The furnace tube rapid air change system according to claim 4, characterized in that, The heat exchange coil is spiral, and the material of the heat exchange coil is one of carbon steel, low alloy steel, stainless steel, copper, copper-nickel alloy, or aluminum alloy.

6. The rapid air exchange system for furnace tubes according to claim 1, wherein, An exhaust pipe is installed at the top of the water bottle, a collection bottle is installed at the bottom of the water bottle, a drain pipe is fixedly connected to the bottom of the collection bottle, and a water valve is installed on the drain pipe.

Images