A diamond color center maser and a method for preparing the same

Abstract

The application provides a diamond color center microwave generator and a preparation method thereof. The diamond color center microwave generator is composed of arrayed diamond color center columns, laser diodes, sapphire resonant cavities, copper resonant cavities and microwave antennas. The diamond color center columns of each array unit can realize energy level deflection under the action of an external magnetic field, particle number inversion under the action of laser excitation, stimulated radiation under the action of external microwave particles received by the microwave antennas, and avalanche microwave particle amplification after resonance of the sapphire resonant cavities and the copper resonant cavities. The output powers of the array units are accumulated, and the microwave output power of the diamond color center microwave generator is increased.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of microwave maser technology, and in particular to a diamond color center microwave maser and a preparation method thereof. BACKGROUND

[0002] The diamond color center is a solid-state single-spin quantum system with multiple advantages. Compared with traditional materials, the diamond can work stably at room temperature for a long time. The room-temperature quantum microwave maser based on the diamond color center has an ultra-low noise limit and can amplify the weak microwave of W. -18 The room-temperature continuous wave state can work continuously, and has obvious advantages in temperature and stability compared with the low-temperature ruby system and the room-temperature pulse wave doped pentacene against triphenyl crystal system.

[0003] The diamond color center microwave maser utilizes the Zeeman splitting phenomenon inside the diamond color center. The diamond color center produces stimulated radiation and resonant amplified microwave particles under the action of external microwave particles, and can be used to detect weak microwave signals. The existing diamond color center microwave maser is limited by the number of diamond color centers participating in particle flipping, and the emitted microwave particles are less, resulting in low microwave emission power. SUMMARY

[0004] The embodiments of the present application provide a diamond color center microwave maser and a preparation method thereof to solve the problem of low microwave emission power of the existing diamond color center microwave maser.

[0005] In a first aspect, the embodiments of the present application provide a diamond color center microwave maser, comprising: a diamond substrate. The lower surface of the diamond substrate is provided with N copper resonant cavities arranged in an array, and N is a positive integer greater than or equal to 2. For each copper resonant cavity, one side of the copper resonant cavity facing the diamond substrate is provided with a first opening, and the lower surface of the diamond substrate in the first opening is provided with a sapphire resonant cavity. For each sapphire resonant cavity, one side of the sapphire resonant cavity facing the diamond substrate is provided with a second opening, and the lower surface of the diamond substrate in the second opening is provided with a diamond color center column. For each copper resonant cavity, a microwave antenna corresponding to the copper resonant cavity is provided, wherein a first end of the microwave antenna is arranged in the corresponding copper resonant cavity, and a second end of the microwave antenna is arranged outside the corresponding copper resonant cavity. For each diamond color center column, a laser diode corresponding to the diamond color center column is arranged, and the laser diode is arranged on the upper surface of the diamond substrate.

[0006] In a possible implementation manner, each microwave antenna penetrates the diamond substrate, and the second end of each microwave antenna is arranged on a side of the diamond substrate away from the copper resonant cavity.

[0007] In a possible implementation, for any copper resonant cavity, a cover plate is arranged at the first opening of the copper resonant cavity. The cover plate is provided with a through hole, wherein the corresponding diamond color center column and sapphire resonant cavity of the copper resonant cavity pass through the through hole.

[0008] In a possible implementation, in the array-distributed copper resonant cavities, the resonant cavity size of each copper resonant cavity changes linearly along a preset direction parallel to the diamond substrate.

[0009] In a possible implementation, in the array-distributed sapphire resonant cavities, the resonant cavity size of each sapphire resonant cavity changes linearly along a preset direction parallel to the diamond substrate.

[0010] In a possible implementation, the copper resonant cavity is further provided with a magnetic field module on the side away from the diamond substrate. The magnetic field module is used to apply a deflection magnetic field to all the diamond color center columns. The magnetic field strength of the deflection magnetic field changes linearly along a preset direction parallel to the diamond substrate.

[0011] In a possible implementation, the resonant cavity size of each sapphire resonant cavity, the resonant cavity size of each copper resonant cavity, and the deflection magnetic field strength of each diamond color center column correspond to each other, and the linear gradient change directions are the same.

[0012] In a possible implementation, the preparation method comprises the following steps: preparing N diamond color center columns in an array distribution on the lower surface of the diamond substrate, where N is greater than or equal to 2. Arranging N laser diodes on the upper surface of the diamond substrate, wherein each laser diode corresponds to a diamond color center column. Preparing N sapphire resonant cavities, wherein one side of each sapphire resonant cavity is provided with a second opening. Passing the diamond color center column through the second opening of the sapphire resonant cavity to arrange the diamond color center column inside the sapphire resonant cavity, wherein each sapphire resonant cavity corresponds to a diamond color center column. Preparing N copper resonant cavities, wherein one side of each copper resonant cavity is provided with a first opening. Passing the sapphire resonant cavity through the first opening of the copper resonant cavity to arrange the sapphire resonant cavity inside the copper resonant cavity, wherein each copper resonant cavity corresponds to a sapphire resonant cavity. Correspondingly arranging a microwave antenna for each copper resonant cavity, wherein the first end of the microwave antenna is arranged inside the corresponding copper resonant cavity, and the second end of the microwave antenna is arranged outside the corresponding copper resonant cavity.

[0013] In a possible implementation, the preparation of the N sapphire resonant cavities comprises the following steps: laminating a sapphire substrate and a non-metal substrate. Etching the sapphire substrate to obtain N sapphire resonant cavities that are not connected to each other, wherein one side of each sapphire resonant cavity away from the non-metal substrate is provided with a second opening. After the step of passing the diamond color center column through the second opening of the sapphire resonant cavity to arrange the diamond color center column inside the sapphire resonant cavity, the method further comprises the following step: removing the non-metal substrate.

[0014] In a possible implementation, the step of arranging one microwave antenna in each of the copper resonant cavities comprises: preparing a through hole through the diamond substrate in a region of the vertical projection of the copper resonant cavity on the diamond substrate; and arranging the microwave antenna through the through hole of the diamond substrate, wherein a first end of the microwave antenna is arranged in the corresponding copper resonant cavity, and a second end of the microwave antenna is arranged on a side of the diamond substrate away from the copper resonant cavity.

[0015] The embodiment of the present application provides a diamond color center microwave amplifier and a preparation method thereof. The present application comprises an arrayed diamond color center column, a laser diode, a sapphire resonant cavity, a copper resonant cavity and a microwave antenna. The diamond color center column of each array unit can realize energy level deflection under the action of an external magnetic field, generate particle number inversion under laser excitation, generate stimulated radiation under the action of external microwave particles received by the microwave antenna, and realize avalanche microwave particle amplification after resonance of the sapphire resonant cavity and the copper resonant cavity. The output power of each array unit is accumulated, thereby increasing the microwave output power of the diamond color center microwave amplifier. BRIEF DESCRIPTION OF DRAWINGS

[0016] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the embodiments or prior art description will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor.

[0017] Figure 1 is a structure schematic diagram of a diamond color center microwave amplifier provided by the embodiment of the present application;

[0018] Figure 2 is a preparation method schematic diagram of a diamond color center column array provided by the embodiment of the present application;

[0019] Figure 3 is a structure schematic diagram of a laser diode array provided by the embodiment of the present application;

[0020] Figure 4 is a preparation method schematic diagram of a sapphire resonant cavity array provided by the embodiment of the present application;

[0021] Figure 5 is a preparation method schematic diagram of a copper resonant cavity array provided by the embodiment of the present application. DETAILED DESCRIPTION

[0022] In order to make the person skilled in the art better understand the present scheme, the technical solutions in the embodiments of the present scheme will be clearly described in combination with the drawings in the embodiments of the present scheme. Obviously, the described embodiments are part of the embodiments of the present scheme, rather than all the embodiments. Based on the embodiments in the present scheme, all other embodiments obtained by the person skilled in the art without creative labor should belong to the scope of protection of the present scheme.

[0023] The term "comprising" and other any variations thereof in the specification and claims of the present scheme and the above-mentioned drawings means "including but not limited to", which is intended to cover non-exclusive inclusion and is not limited to the examples listed in the text. In addition, the terms "first" and "second" and the like are used to distinguish different objects, rather than to describe a specific order.

[0024] The implementation of the present application will be described in detail in combination with specific drawings:

[0025] The diamond color center is a solid-state single-spin quantum system with many advantages. Compared with traditional materials, diamond can work stably at room temperature for a long time. The room-temperature quantum microwave amplifier based on diamond color center has an ultra-low noise limit and can amplify 10 -18 Weak microwave of W, and can work continuously at room temperature, which has obvious temperature and stability advantages compared with low-temperature ruby system and room-temperature pulse wave doped pentacene against triphenyl crystal system.

[0026] The principle of diamond color center microwave amplifier is to use the Zeeman splitting phenomenon inside the diamond color center. By applying an external bias magnetic field, the electron energy level m s =|-1> is deflected to the energy level below m s =|0>, so that the electron at the high energy level is deflected to the low energy level. Then the electron polarization of m s =|-1> is polarized to the energy level of m s =|0> by laser excitation, so that the number of electrons at the high energy level will increase, which will cause the system to be in an unstable state. In the unstable state, the external microwave particles act on the energy level of the diamond color center. When the frequency of the external microwave particles is the same as the Zeeman splitting frequency, the diamond color center will produce stimulated emission and emit a particle. The newly emitted particle not only has the same frequency as the external microwave particle, but also has the same emission direction, polarization state, phase and rate. The newly emitted particle is amplified by the oscillation of the external resonant cavity of the diamond, realizing the avalanche amplification of the microwave particles.

[0027] The diamond color center microwave maser utilizes the Zeeman splitting phenomenon inside the diamond color center. The diamond color center produces stimulated radiation under the action of external microwave particles, and resonantly amplifies the microwave particles, which can be used to detect weak microwave signals. The existing diamond NV color center microwave maser technology is mainly carried out on a single cavity. The existing diamond color center microwave maser is limited by the number of diamond color centers participating in particle inversion, and the microwave particles emitted are less, resulting in low microwave output power.

[0028] In order to solve the problem of low microwave output power, the present application provides an array type diamond color center microwave maser, which matches the laser diode array and the resonant cavity array through the diamond color center array, so as to realize the improvement of the microwave maser output power. The problem of low microwave output power of the existing diamond microwave maser is solved.

[0029] Figure 1 is a structural schematic diagram of a diamond color center microwave maser provided by an embodiment of the present application. Referring to Figure 1 The microwave maser includes: a diamond substrate 1; the lower surface of the diamond substrate 1 is provided with N copper resonant cavities 2 arranged in an array, N is a positive integer greater than or equal to 2; for each copper resonant cavity 2, one side of the copper resonant cavity 2 facing the diamond substrate 1 is provided with a first opening, and the lower surface of the diamond substrate 1 in the first opening is provided with a sapphire resonant cavity 3. For each sapphire resonant cavity 3, one side of the sapphire resonant cavity 3 facing the diamond substrate 1 is provided with a second opening, and the lower surface of the diamond substrate 1 in the second opening is provided with a diamond color center column 11. For each copper resonant cavity 2, the copper resonant cavity 2 is correspondingly provided with a microwave antenna 4, wherein the first end of the microwave antenna 4 is arranged in the corresponding copper resonant cavity 2, and the second end is arranged outside the corresponding copper resonant cavity 2. For each diamond color center column 11, the diamond color center column 11 is correspondingly provided with a laser diode 5, and the laser diode 5 is arranged on the upper surface of the diamond substrate 1.

[0030] In some embodiments, the diamond color center microwave maser includes a laser array layer, a diamond color center array layer and a sapphire resonant cavity 3 array layer arranged from top to bottom. It also includes a copper resonant cavity 2 array layer and a microwave antenna 4 array layer.

[0031] For example, the laser array layer includes N laser diodes 5 arranged in an array. The diamond color center array layer includes a diamond substrate 1 and N diamond color center columns 11 arranged in an array on the lower surface of the diamond substrate 1. The sapphire resonant cavity 3 array layer includes N sapphire resonant cavities 3 arranged in an array. The copper resonant cavity 2 array layer includes N copper resonant cavities 2 arranged in an array. The microwave antenna 4 array layer includes N microwave antennas 4 arranged in an array.

[0032] Exemplarily, the positions of the laser diodes 5, the diamond color center columns 11, the sapphire resonant cavities 3, the copper resonant cavities 2 and the microwave antennas 4 are one-to-one corresponding.

[0033] Exemplarily, each group of the laser diodes 5, the diamond color center columns 11, the sapphire resonant cavities 3, the copper resonant cavities 2 and the microwave antennas 4 forms one detection unit of the array.

[0034] Exemplarily, the array distribution is a matrix distribution. For example, it can be a matrix distribution of single row and multiple columns, single column and multiple rows, or multiple rows and multiple columns. Correspondingly, N is an integer of i*j, wherein i and j are both positive integers greater than 1, and i*j is greater than 2.

[0035] In some embodiments, the diamond color center columns 11 are prepared on the lower surface of the diamond substrate 1.

[0036] Exemplarily, the diamond color center layer is prepared on the surface of the diamond substrate 1, and the diamond color center layer is patterned and etched to obtain the diamond color center columns 11.

[0037] Exemplarily, the diamond color center columns 11 are perpendicular to the diamond substrate 1.

[0038] Exemplarily, the cross-sectional shape of the diamond color center columns 11 parallel to the diamond substrate 1 includes a circle or a polygon.

[0039] In some embodiments, each sapphire resonant cavity 3 is provided with a second opening facing the diamond substrate 1. Correspondingly, the corresponding diamond color center column 11 is arranged inside the sapphire resonant cavity 3 through the second opening.

[0040] Exemplarily, the shape of the sapphire resonant cavity 3 is a hollow column, and the cavity inside the hollow column is the resonant cavity.

[0041] Exemplarily, the sapphire resonant cavity 3 is fixedly connected to the lower surface of the diamond substrate 1. Exemplarily, the sapphire resonant cavity 3 is fixed to the lower surface of the diamond substrate 1 by bonding.

[0042] In some embodiments, each copper resonant cavity 2 is provided with a first opening facing the diamond substrate 1. Correspondingly, the sapphire resonant cavity 3 is arranged inside the copper resonant cavity 2 through the first opening of the copper resonant cavity 2.

[0043] Exemplarily, the shape of the copper resonant cavity 2 is a hollow column, and the cavity inside the hollow column is the resonant cavity.

[0044] Exemplarily, the copper resonant cavities 2 are connected by cross-shaped net reinforcing copper ribs to fix the copper resonant cavities 2 and make the copper resonant cavities 2 arranged in an array.

[0045] Exemplarily, the copper resonant cavity 2 is fixedly connected with the lower surface of the diamond substrate 1. Exemplarily, the copper resonant cavity 2 is fixed on the lower surface of the diamond substrate 1 through adhesion.

[0046] In some embodiments, each copper resonant cavity 2 is provided with a microwave antenna 4.

[0047] Exemplarily, the microwave antenna 4 penetrates the side wall of the copper resonant cavity 2, and the first end of the microwave antenna 4 is arranged in the corresponding copper resonant cavity 2, and the second end is arranged outside the corresponding copper resonant cavity 2.

[0048] Exemplarily, the first end of the microwave antenna 4 is arranged in the corresponding copper resonant cavity 2, and the second end is arranged outside the sapphire resonant cavity 3.

[0049] Exemplarily, the microwave antenna 4 is insulatively connected with the copper resonant cavity 2. That is, the microwave antenna 4 and the copper resonant cavity 2 are insulated from each other.

[0050] In some embodiments, each diamond color center column 11 is provided with a laser diode 5 arranged on the upper surface of the diamond substrate 1.

[0051] Exemplarily, the laser diodes 5 are arranged in an array on a fixed substrate. One side of the fixed substrate on which the laser diodes 5 are arranged faces the upper surface of the diamond substrate 1. Correspondingly, the laser diodes 5 are fixedly connected with the diamond substrate 1 through the fixed substrate.

[0052] Exemplarily, the light emitting direction of each laser diode 5 is towards the corresponding diamond color center column 11.

[0053] The embodiment of the present application sets the arrayed diamond color center column 11, the laser diode 5, the sapphire resonant cavity 3, the copper resonant cavity 2 and the microwave antenna 4 to form an arrayed diamond color center microwave maser. The diamond color center column 11 of each array unit can realize energy level deflection under the action of an external magnetic field, particle number inversion under the action of laser excitation, stimulated radiation under the action of external microwave particles received by the microwave antenna 4, and avalanche microwave particle amplification after resonance in the sapphire resonant cavity 3 and the copper resonant cavity 2. The output power of each array unit is accumulated, which increases the microwave output power of the diamond color center microwave maser. The arrayed units are compact in structure, which reduces the volume of the diamond color center microwave maser.

[0054] The arrayed diamond color center microwave maser provided by the embodiment of the present application sets the arrayed laser diode 5 on the back surface of the diamond substrate 1, and the emitted laser can directly act on the diamond color center through the diamond substrate 1, which avoids increasing the fiber waveguide to emit laser to the diamond color center, and reduces the volume of the device.

[0055] In a possible implementation, the microwave antenna 4 passes through the joint of the copper resonant cavity 2 and the diamond substrate 1, wherein a first end of the microwave antenna 4 is arranged in the corresponding copper resonant cavity 2, and a second end of the microwave antenna 4 is arranged on a side of the diamond substrate 1 facing the copper resonant cavity 2.

[0056] For example, the microwave antenna 4 is in a U shape. Both ends of the U-shaped antenna point to the side of the diamond substrate 1 facing the copper resonant cavity 2. The U-shaped antenna passes through the joint of the copper resonant cavity 2 and the diamond substrate 1. The U-shaped antenna is arranged on the part outside the copper resonant cavity 2 and passes through the gap between the two copper resonant cavities 2.

[0057] For example, the microwave antenna 4 is insulatedly connected with the copper resonant cavity 2.

[0058] In a possible implementation, each microwave antenna 4 penetrates the diamond substrate 1, and a second end of each microwave antenna 4 is arranged on a side of the diamond substrate 1 away from the copper resonant cavity 2.

[0059] For example, the microwave antenna 4 passes through the first opening of the copper resonant cavity 2 and penetrates the diamond substrate 1. A first end is arranged inside the copper resonant cavity 2, and a second end is arranged on a side of the diamond substrate 1 away from the copper resonant cavity 2.

[0060] The embodiment of the present application provides the diamond color center microwave amplifier, the microwave antenna 4 is arranged to penetrate the diamond substrate 1, which can transmit the external microwave signal to the inside of the resonant cavity and transmit the resonant signal in the resonant cavity to the outside, and avoids the connection with the copper resonant cavity 2, thereby reducing the interference of the copper resonant cavity 2 on the signal of the microwave antenna 4.

[0061] In a possible implementation, for any copper resonant cavity 2, a cover plate 21 is arranged at the first opening of the copper resonant cavity 2. The cover plate 21 is provided with a through hole, wherein the corresponding diamond color center column 11 and sapphire resonant cavity 3 of the copper resonant cavity 2 pass through the through hole.

[0062] For example, the material of the cover plate 21 is copper.

[0063] The embodiment of the present application provides the diamond color center microwave amplifier, the cover plate 21 is arranged at the first opening of the copper resonant cavity 2, and the cover plate 21 is provided with a through hole, thereby reducing the leakage of the microwave signal at the first opening of the copper resonant cavity 2, reducing the leakage of the microwave particles generated by the stimulated radiation, and improving the avalanche amplification of the copper resonant cavity 2 and the output power.

[0064] In a possible implementation, the sizes of the sapphire resonant cavities 3 are the same, the sizes of the copper resonant cavities 2 are the same, and the external magnetic field intensity applied to all the diamond color center columns 11 is the same.

[0065] For each probe unit, the size of the sapphire resonant cavity 3, the size of the copper resonant cavity 2, and the external magnetic field strength of the diamond color center column 11 correspond to each other, so that the resonant frequencies of the sapphire resonant cavity 3 and the copper resonant cavity 2 are the same as the frequency corresponding to the diamond color center's split level.

[0066] The resonant frequencies of the resonant cavities of the same specification are consistent, and the same magnetic field strength makes the split levels of each diamond color center column 11 the same. The array device structure accumulates the microwave output power of each array unit, which can increase the microwave output power of the diamond color center microwave amplifier.

[0067] However, the bandwidth of the diamond color center microwave amplifier is small, only MHz, due to the resonant frequency bandwidth of the resonant cavity. In order to solve the problem of small microwave output bandwidth, the embodiment of the present application provides an array distributed diamond color center microwave amplifier with a size gradient change.

[0068] In a possible implementation, in each copper resonant cavity 2 in the array distribution, a plurality of resonant cavity size specifications are included, each copper resonant cavity 2 includes one resonant cavity size specification, and each resonant cavity size specification includes at least one copper resonant cavity 2.

[0069] In some embodiments, the cross section of the resonant cavity is cylindrical, and the resonant cavity size is the diameter of the cylinder.

[0070] In some embodiments, the cross section of the resonant cavity is polygonal, and the resonant cavity size is the diameter of the circumscribed circle of the polygon. For example, the cross section of the resonant cavity is square.

[0071] The embodiment of the present application increases the number of resonant frequency points supported by the copper resonant cavity 2 array, the number of avalanche amplification frequency points, and the bandwidth of the diamond color center microwave amplifier by providing a plurality of resonant cavity size specifications in each copper resonant cavity 2 in the array distribution.

[0072] In a possible implementation, in each copper resonant cavity 2 in the array distribution, the resonant cavity size of each copper resonant cavity 2 changes linearly along a preset direction parallel to the diamond substrate 1.

[0073] In some embodiments, the resonant cavity size of each copper resonant cavity 2 changes linearly with the change of the position in the array.

[0074] In some embodiments, the preset direction includes from one side of the array distribution to the other side. It can also include from one corner of the array distribution to the diagonal.

[0075] In some embodiments, the preset direction can also include from the center of the array distribution to the outside, or from the outside of the array distribution to the center.

[0076] In some embodiments, the linear gradient change represents two copper resonant cavities 2 equidistant along a preset direction, and the resonant cavity sizes change by the same amplitude.

[0077] For example, the arrayed copper resonant cavities 2 increase in linear gradient from left to right.

[0078] For another example, the arrayed copper resonant cavities 2 decrease in linear gradient from left to right.

[0079] The embodiments of the present application increase the number of resonant frequency points supported by the array of copper resonant cavities 2, the number of frequency points for avalanche amplification, and the bandwidth of the diamond color center microwave amplifier by providing multiple resonant cavity sizes in the arrayed copper resonant cavities 2, and changing the resonant cavity sizes in linear gradient along a preset direction.

[0080] In a possible implementation, in the arrayed sapphire resonant cavities 3, multiple resonant cavity sizes are included, each sapphire resonant cavity 3 includes one resonant cavity size, and each resonant cavity size includes at least one sapphire resonant cavity 3.

[0081] In some embodiments, the sapphire resonant cavities 3 have the same cavity shape as the sapphire resonant cavities 3.

[0082] In some embodiments, the sapphire resonant cavities 3 have one-to-one correspondence with the cavity size specifications of the sapphire resonant cavities 3.

[0083] The embodiments of the present application increase the number of resonant frequency points supported by the array of sapphire resonant cavities 3, the number of frequency points for avalanche amplification, and the bandwidth of the diamond color center microwave amplifier by providing multiple resonant cavity sizes in the arrayed sapphire resonant cavities 3.

[0084] In a possible implementation, in the arrayed sapphire resonant cavities 3, the resonant cavity sizes of the sapphire resonant cavities 3 change in linear gradient along a preset direction parallel to the diamond substrate 1.

[0085] In some embodiments, the resonant cavity sizes of the sapphire resonant cavities 3 change in linear gradient with the change of the position in the array.

[0086] In some embodiments, the preset direction includes from one side of the array distribution to the other side. It can also include from one corner of the array distribution to the diagonally opposite corner.

[0087] In some embodiments, the preset direction can also include from the center of the array distribution to the outside, or from the outside of the array distribution to the center.

[0088] In some embodiments, the linear gradient change represents two sapphire resonant cavities 3 equidistant along the preset direction, and the resonant cavity size changes by the same amplitude.

[0089] For example, the sapphire resonant cavities 3 in the array distribution are sequentially increased in linear gradient from left to right.

[0090] For another example, the sapphire resonant cavities 3 in the array distribution are sequentially decreased in linear gradient from left to right.

[0091] The embodiment of the present application increases the number of resonant frequency points supported by the sapphire resonant cavity 3 array, the number of avalanche amplification frequency points, and the bandwidth of the diamond color center microwave amplifier by setting multiple size specifications of resonant cavities in the sapphire resonant cavities 3 in the array distribution, and changing the resonant cavity size in linear gradient along the preset direction.

[0092] In a possible implementation, the applied deflection magnetic field strength in each diamond color center column 11 in the array distribution includes multiple magnetic field strengths, each diamond color center column 11 corresponds to a magnetic field strength, and each magnetic field strength corresponds to at least one diamond color center column 11.

[0093] In a possible implementation, the outside of the copper resonant cavity 2, away from the diamond substrate 1, is also provided with a magnetic field module.

[0094] The magnetic field module is used to apply a deflection magnetic field to all diamond color center columns 11.

[0095] Along the preset direction parallel to the diamond substrate 1, the magnetic field strength of the deflection magnetic field changes in linear gradient.

[0096] In some embodiments, the change of the deflection magnetic field applied by each diamond color center column 11 with the position in the array changes in linear gradient.

[0097] In some embodiments, the preset direction includes from one side of the array distribution to the other side. It can also include from one corner of the array distribution to the diagonally opposite corner.

[0098] In some embodiments, the preset direction can also include from the center of the array distribution to the outside, or from the outside of the array distribution to the center.

[0099] In some embodiments, the linear gradient change represents two diamond color center columns 11 equidistant along the preset direction, and the corresponding magnetic field strength changes by the same amplitude.

[0100] The embodiment of the present application increases the number of Zeeman splitting energy levels of the diamond color center column 11 array, the frequency points of the stimulated radiation particles, and the bandwidth of the diamond color center microwave amplifier by applying a deflection magnetic field with a linear gradient change in magnetic field strength on each diamond color center column 11 in the array distribution.

[0101] In a possible implementation, the resonant cavity size of each sapphire resonant cavity 3, the resonant cavity size of each copper resonant cavity 2, and the deflection magnetic field strength of each diamond color center column 11 correspond to each other, and the linear gradient changes in the same direction.

[0102] In some embodiments, the resonant cavity size of each sapphire resonant cavity 3, the resonant cavity size of each copper resonant cavity 2, and the deflection magnetic field strength of each diamond color center column 11 correspond to each other, so that the resonant frequency of each sapphire resonant cavity 3, the resonant frequency of each copper resonant cavity 2, and the particle frequency corresponding to the Zeeman splitting energy level of each diamond color center column 11 are the same. In the case of the same frequency, the stimulated radiation avalanche amplification effect is the largest.

[0103] In some embodiments, in the array distribution, the resonant cavity size of each sapphire resonant cavity 3, the resonant cavity size of each copper resonant cavity 2, and the deflection magnetic field strength of each diamond color center column 11 all change in a linear gradient along a preset direction.

[0104] For example, in the array distribution, the resonant cavity size of each sapphire resonant cavity 3, the resonant cavity size of each copper resonant cavity 2, and the deflection magnetic field strength of each diamond color center column 11 increase in a linear gradient from left to right.

[0105] For example, in the array distribution, the resonant cavity size of each sapphire resonant cavity 3, the resonant cavity size of each copper resonant cavity 2, and the deflection magnetic field strength of each diamond color center column 11 decrease in a linear gradient from left to right.

[0106] The embodiments of the present application correspond one-to-one the resonant cavity size of each sapphire resonant cavity 3, the resonant cavity size of each copper resonant cavity 2, and the deflection magnetic field strength of each diamond color center column 11, and all change in a linear gradient along a preset direction, thereby increasing the number of resonant frequency points supported by the resonant cavity array, increasing the number of Zeeman splitting energy levels of the diamond color center column 11 array, increasing the number of frequency points of the stimulated radiation particles, and increasing the bandwidth of the diamond color center microwave amplifier.

[0107] In a possible implementation, the resonant cavity size of a single sapphire resonant cavity 3 changes in a linear gradient.

[0108] For example, the single sapphire resonant cavity 3 is composed of multiple resonant cavities of different sizes, and the size of each resonant cavity meets the linear gradient change rule. The side of each resonant cavity facing the diamond substrate direction is provided with an opening.

[0109] For example, the single sapphire resonant cavity 3 is a hollow column, and the inner diameter of the hollow column changes in a linear gradient from top to bottom.

[0110] In a possible implementation, the resonant cavity size of a single copper resonant cavity 2 changes in a linear gradient.

[0111] Exemplarily, the single copper resonant cavity 2 is composed of a plurality of resonant cavities with different sizes, and the size of each resonant cavity meets the linear gradient change rule.

[0112] Exemplarily, the single copper resonant cavity 2 is a hollow cylinder, and the inner diameter of the hollow cylinder changes linearly from top to bottom.

[0113] The embodiment of the present application provides the structure that the internal size of the single resonant cavity changes linearly, and the deflection magnetic field with the gradient change of the magnetic field strength over time can be applied to increase the Zeeman splitting energy level. Further, the matching of the plurality of resonant frequencies of the single resonant cavity and the plurality of Zeeman splitting energy level frequencies is realized, the number of frequency points that can be detected by the diamond color center microwave amplifier is increased, and the bandwidth of the diamond color center microwave amplifier is increased.

[0114] The embodiment of the present application provides a preparation method of a diamond color center microwave amplifier. The method comprises:

[0115] In S100, N diamond color center columns 11 distributed in an array are prepared on the lower surface of the diamond substrate 1, and N is greater than or equal to 2.

[0116] Figure 2 FIG. 1 is a schematic diagram of the preparation method of the diamond color center column 11 array provided by the embodiment of the present application. Referring to FIG. 1, Figure 2 In FIG. 1, a, b and c are cross-sectional schematic diagrams of the diamond substrate 1 and the diamond color center material layer, the diamond substrate 1 and the diamond color center column 11 array, and the planar schematic diagram of the diamond substrate 1 and the diamond color center column 11 array, respectively. Figure 2 In FIG. 1, a, b and c are cross-sectional schematic diagrams of the diamond substrate 1 and the diamond color center material layer, the diamond substrate 1 and the diamond color center column 11 array, and the planar schematic diagram of the diamond substrate 1 and the diamond color center column 11 array, respectively.

[0117] In some embodiments, a diamond color center material layer is grown on the surface of the diamond substrate 1. After irradiation and annealing treatment, the diamond color center column 11 array is etched by using a photolithography patterning and ICP etching process.

[0118] Exemplarily, the diamond substrate 1 is high-purity diamond {111}.

[0119] Exemplarily, the diamond color center material layer is a high-concentration diamond NV color center material layer. For example, the concentration of the diamond NV color center ranges from 1 to 100 ppm. For example, the concentration of the diamond NV color center can be 3 ppm. For another example, the concentration of the diamond NV color center can be 10 ppm.

[0120] Exemplarily, the cross section of the diamond color center column 11 in the diamond color center column 11 array is circular or square.

[0121] Exemplarily, the number of the diamond color center columns 11 in the array of the diamond color center columns 11 is between 2*2 and 100*100. For example, the array of the diamond color center columns 11 can be a 2*2 array. For another example, the array of the diamond color center columns 11 can be a 100*100 array.

[0122] In S200, N laser diodes 5 are arranged on the upper surface of the diamond substrate 1, wherein each laser diode 5 corresponds to the position of each diamond color center column 11.

[0123] Figure 3 FIG. 1 is a schematic diagram of the array structure of the laser diode 5 provided by an embodiment of the present application. Referring to FIG. 1, Figure 3 :

[0124] Exemplarily, N laser diodes 5 are arranged in an array on the substrate.

[0125] Exemplarily, the wavelength range of the laser diode 5 is 500nm to 560nm. For example, it can be 520nm. For another example, it can also be 532nm.

[0126] Exemplarily, the light emitting direction of the laser diode 5 is towards the diamond color center column 11.

[0127] In S300, N sapphire resonant cavities 3 are prepared, wherein one side of each sapphire resonant cavity 3 is provided with a second opening.

[0128] Figure 4 FIG. 2 is a schematic diagram of the array preparation method of the sapphire resonant cavity 3 provided by an embodiment of the present application. Referring to FIG. 2, Figure 4 , wherein Figure 4 FIG. 2a is a schematic diagram of the cross-sectional structure of the sapphire substrate, FIG. 2b is a schematic diagram of the cross-sectional structure of the array of the sapphire resonant cavity 3, and FIG. 2c is a schematic diagram of the planar structure of the array of the sapphire resonant cavity 3.

[0129] In some embodiments, the sapphire resonant cavity 3 array is formed by performing patterned etching on the sapphire substrate.

[0130] Exemplarily, the shape of the sapphire resonant cavity 3 is a cylindrical cavity or a square column cavity. One side of each sapphire resonant cavity 3 is provided with a second opening, wherein the diamond color center column 11 can pass through the second opening and be arranged inside the sapphire resonant cavity 3.

[0131] Exemplarily, the array of the sapphire resonant cavity 3 is a 2*2 array.

[0132] In S400, the diamond color center column 11 passes through the second opening of the sapphire resonant cavity 3 and is arranged inside the sapphire resonant cavity 3, wherein each sapphire resonant cavity 3 corresponds to the position of each diamond color center column 11.

[0133] In S500, N copper resonant cavities 2 are prepared, each of which is provided with a first opening on one side.

[0134] Figure 5 FIG. 1 is a schematic diagram of a method for preparing an array of copper resonant cavities 2 according to an embodiment of the present application. Referring to FIG. 1, Figure 5 wherein Figure 5 FIG. 1a is a schematic diagram of a cross-sectional structure of an oxygen-free copper plate, FIG. 1b is a schematic diagram of a cross-sectional structure of an array of copper resonant cavities 2, and FIG. 1c is a schematic diagram of a planar structure of the array of copper resonant cavities 2.

[0135] In some embodiments, the array of copper resonant cavities 2 is prepared by a mechanical processing process. The copper resonant cavities 2 are used to be sleeved on the outside of the sapphire resonant cavities 3 and the diamond color center columns 11.

[0136] For example, one side of the copper resonant cavities 2 is provided with a first opening, and the sapphire resonant cavities 3 and the diamond color center columns 11 can pass through the first opening and be arranged in the copper resonant cavities 2.

[0137] For example, the array of copper resonant cavities 2 is a 2*2 array.

[0138] For example, the material of the copper resonant cavities 2 is oxygen-free copper.

[0139] In S600, the sapphire resonant cavities 3 pass through the first openings of the copper resonant cavities 2 and are arranged inside the copper resonant cavities 2, and each copper resonant cavity 2 corresponds to each sapphire resonant cavity 3.

[0140] In S700, each copper resonant cavity 2 is provided with a microwave antenna 4, wherein the first end of the microwave antenna 4 is arranged in the corresponding copper resonant cavity 2, and the second end is arranged outside the corresponding copper resonant cavity 2.

[0141] For example, the microwave antenna 4 is used for microwave signal access and microwave signal export.

[0142] The present application sets up the arrayed diamond color center column 11, the laser diode 5, the sapphire resonant cavity 3, the copper resonant cavity 2 and the microwave antenna 4 to form an arrayed diamond color center microwave maser. The diamond color center column 11 of each array unit can realize energy level deflection under the action of an external magnetic field, generate particle number inversion under laser excitation, generate stimulated radiation under the action of external microwave particles received by the microwave antenna 4, and realize avalanche microwave particle amplification after resonance in the sapphire resonant cavity 3 and the copper resonant cavity 2. The output power of each array unit is accumulated, which increases the microwave output power of the diamond color center microwave maser.

[0143] In a possible implementation, preparing N sapphire resonant cavities 3 includes:

[0144] In S301, the sapphire substrate is laminated with the non-metal substrate.

[0145] Exemplarily, the sapphire substrate is bonded on the non-metal substrate.

[0146] In S302, the sapphire substrate is etched to obtain N sapphire resonant cavities 3 which are not connected to each other, wherein each sapphire resonant cavity 3 is provided with a second opening away from one side of the non-metal substrate.

[0147] Correspondingly, after the diamond color center column 11 is passed through the second opening of the sapphire resonant cavity 3 and arranged inside the sapphire resonant cavity 3, the non-metal substrate is removed.

[0148] The present application realizes the installation of multiple sapphire resonant cavities 3 in an array by etching the sapphire substrate on the non-metal substrate, removing the non-metal substrate after the installation of the sapphire resonant cavity 3 array is completed, and improves the preparation efficiency and the consistency of the installation position of the sapphire resonant cavity 3 array.

[0149] In a possible implementation, the corresponding arrangement of one microwave antenna 4 for each copper resonant cavity 2 includes: preparing a through hole penetrating the diamond substrate 1 in the vertical projection area of the copper resonant cavity 2 to the diamond substrate 1. The microwave antenna 4 penetrates the through hole of the diamond substrate 1, wherein the first end of the microwave antenna 4 is arranged in the corresponding copper resonant cavity 2, and the second end is arranged on the side of the diamond substrate 1 away from the copper resonant cavity 2.

[0150] The embodiment of the present application can reduce the gap of the copper resonant cavity 2 and reduce the size of the device by penetrating the through hole of the microwave antenna 4 through the diamond substrate 1 and arranging the second end of the microwave antenna 4 on the upper surface of the simple structure diamond substrate 1. Avoiding the opening on the copper resonant cavity 2 further reduces the microwave leakage. The through hole can be etched at the same time in step S100 in the preparation process, and there is no need to arrange an insulating connection between the microwave antenna 4 and the diamond, which simplifies the preparation process.

[0151] The above embodiments are only used to illustrate the technical solutions of the present application, but not limit it; although the foregoing embodiments of the present application have been described in detail, those skilled in the art should understand that the technical solutions recorded in the foregoing embodiments can be modified, or some technical features can be replaced by equivalents; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present application.

Claims

1. A diamond color center microwave maser, characterized by, include: Diamond substrate; The lower surface of the diamond substrate is provided with N copper resonant cavities arranged in an array, where N is a positive integer greater than or equal to 2; For each copper resonator, a first opening is provided on the side of the copper resonator facing the diamond substrate, and a sapphire resonator is provided inside the first opening and on the lower surface of the diamond substrate. For each sapphire resonant cavity, a second opening is provided on the side of the sapphire resonant cavity facing the diamond substrate, and a diamond color core column is provided inside the second opening and on the lower surface of the diamond substrate; For each copper resonant cavity, a microwave antenna is provided, wherein the first end of the microwave antenna is located inside the corresponding copper resonant cavity, and the second end is located outside the corresponding copper resonant cavity; For each diamond color core, a corresponding laser diode is provided, which is disposed on the upper surface of the diamond substrate.

2. The diamond color center microwave maser as described in claim 1, characterized in that, Each microwave antenna penetrates the diamond substrate, and the second end of each microwave antenna is located on the side of the diamond substrate away from the copper resonant cavity.

3. The diamond color center microwave maser as described in claim 1, characterized in that, For any copper resonant cavity, a cover plate is provided at the first opening of the copper resonant cavity; The cover plate is provided with a through hole, through which the diamond-colored core column and the sapphire resonant cavity corresponding to the copper resonant cavity pass.

4. The diamond color center microwave maser as described in claim 1, characterized in that, In each of the arrayed copper resonant cavities, the cavity size varies linearly along a predetermined direction parallel to the diamond substrate.

5. The diamond color center microwave maser as described in claim 4, characterized in that, In each of the arrayed sapphire resonant cavities, the cavity size varies linearly along a predetermined direction parallel to the diamond substrate.

6. The diamond color center microwave maser as described in claim 5, characterized in that, A magnetic field module is also provided on the outside of the copper resonant cavity, on the side away from the diamond substrate; The magnetic field module is used to apply a deflection magnetic field to all diamond color core pillars; Along a predetermined direction parallel to the diamond substrate, the magnetic field strength of the deflection magnetic field varies linearly with a gradient.

7. The diamond color center microwave maser as described in claim 6, characterized in that, The resonant cavity dimensions of the sapphire resonant cavity and the copper resonant cavity correspond one-to-one with the deflection magnetic field strength of the diamond color core column, and the direction of the linear gradient change is the same.

8. A method for preparing a diamond color center microwave maser, characterized in that, include: N diamond color cores are arrayed on the lower surface of a diamond substrate, where N ≥ 2; N laser diodes are disposed on the upper surface of a diamond substrate, wherein each laser diode corresponds to the position of each diamond color core column. N sapphire resonant cavities are fabricated, wherein each sapphire resonant cavity has a second opening on one side; A diamond-colored core is passed through the second opening of the sapphire resonant cavity and placed inside the sapphire resonant cavity, wherein the positions of each sapphire resonant cavity and each diamond-colored core correspond one-to-one. Prepare N copper resonant cavities, wherein each copper resonant cavity has a first opening on one side; The sapphire resonant cavity is placed inside the copper resonant cavity through the first opening of the copper resonant cavity, wherein the positions of each copper resonant cavity and each sapphire resonant cavity correspond one-to-one. Each copper resonator is provided with a microwave antenna, wherein the first end of the microwave antenna is located inside the corresponding copper resonator and the second end is located outside the corresponding copper resonator.

9. The method for preparing the diamond color center microwave maser as described in claim 8, characterized in that, The preparation of N sapphire resonant cavities includes: Stacking a sapphire substrate with a non-metallic substrate; Etching a sapphire substrate yields N unconnected sapphire resonant cavities, wherein each sapphire resonant cavity has a second opening on the side away from the non-metallic substrate; After the diamond-colored core is passed through the second opening of the sapphire resonant cavity and placed inside the sapphire resonant cavity, the method further includes: Remove the non-metallic substrate.

10. The method for preparing the diamond color center microwave maser as described in claim 8, characterized in that, Each copper resonant cavity is equipped with a corresponding microwave antenna, including: Within the region of the copper resonant cavity projected vertically onto the diamond substrate, a through-hole is fabricated that penetrates the diamond substrate. The microwave antenna passes through a through-hole in the diamond substrate, wherein the first end of the microwave antenna is disposed in the corresponding copper resonant cavity, and the second end is disposed on the side of the diamond substrate away from the copper resonant cavity.

Images