Workpiece table for semiconductor testing

Abstract

The application provides a workpiece table for semiconductor testing, and the structure of the workpiece table for semiconductor testing comprises a base, a workpiece table body installed on the top of the base, the workpiece table body comprising: an extension shaft, the top of the extension shaft being used for installing a stage; an inner support seat sleeved on the extension shaft, the inner support seat being movably connected with the extension shaft; and an outer support seat sleeved on the inner support seat, the outer support seat being movably connected with the inner support seat and being installed on the base; a vertical driving part connected with the extension shaft and used for driving the extension shaft to move in the vertical direction; a rotary driving part connected with the inner support seat and used for driving the inner support seat to rotate; and a connecting part connected with the extension shaft and the inner support seat. The workpiece table for semiconductor testing can solve the problem of complex structure of the existing workpiece table for semiconductor testing.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor testing devices, in particular to a workpiece table for semiconductor testing. BACKGROUND

[0002] During the process of testing, the semiconductor needs to complete the vertical and rotating actions. The vertical action can realize the contact and separation between the semiconductor pad and the test probe, and realize the focusing function of the optical detection device such as microscope. The rotating action can realize the scanning of the semiconductor device before the detection process, and meet the detection process requirements.

[0003] The existing workpiece table for semiconductor testing has a complex structure, poor applicability in different working conditions, and lacks maintainability and assembly. Therefore, there is a need for a workpiece table with a more compact and simple overall structure, a more stable module structure operation, and convenient assembly and maintenance. SUMMARY

[0004] Therefore, the purpose of the present application is to provide a workpiece table for semiconductor testing to solve the problem of complex structure of the existing workpiece table for semiconductor testing.

[0005] According to the present application, a workpiece table for semiconductor testing is provided, which comprises a base, a workpiece table body installed on the top of the base, the workpiece table body comprising an extension shaft, the top of which is used to install the workpiece table, an inner support seat sleeved on the extension shaft, the inner support seat being movably connected with the extension shaft, and an outer support seat sleeved on the inner support seat, the outer support seat being movably connected with the inner support seat, the outer support seat being installed on the base, a vertical driving part connected with the extension shaft for driving the extension shaft to move in the vertical direction, a rotating driving part connected with the inner support seat for driving the inner support seat to rotate, and a connecting part connected with the extension shaft and the inner support seat.

[0006] Preferably, a notch is opened in the first side of the base to communicate with the middle part of the base, the vertical driving part comprises a first motor arranged on the first side of the base, a first synchronous wheel connected with the first motor, a synchronous belt with a first end connected with the first synchronous wheel, the synchronous belt being arranged in the notch of the base, a second synchronous wheel connected with a second end of the synchronous belt, a first lead screw with a bottom connected with the second synchronous wheel, a top of the first lead screw penetrating into the inside of the extension shaft, and a matching female part sleeved on the first lead screw, the matching female part being connected with the bottom of the extension shaft.

[0007] Preferably, the vertical driving part further comprises a screw rod fixing seat sleeved at the bottom of the first screw rod, the screw rod fixing seat being connected with the inner support seat; and a connecting arm connected with the first motor and the screw rod fixing seat, the connecting arm being covered on the upper part of the synchronous belt.

[0008] Preferably, the rotating driving part comprises a second driving motor installed at the top of the second side of the base, a shaft coupling installed at the second driving motor, a second screw rod having a first end connected with the shaft coupling, a screw rod female member installed at the second screw rod, a first guide wheel arranged at the first side of the movement direction of the screw rod female member, a second guide wheel arranged at the second side of the movement direction of the screw rod female member, and a synchronous steel belt partially sleeved on the outer support seat and wound around the outer periphery of the inner support seat, the synchronous steel belt being fixedly connected with the inner support seat, the synchronous steel belt being wound around the first guide wheel and the second guide wheel and connected with the screw rod female member.

[0009] Preferably, the rotating driving part further comprises a guide rail installed at the top of the second side of the base, the extension direction of the guide rail being parallel to the movement direction of the screw rod female member, a guide sliding block installed at the guide rail, the guide sliding block being slidingly connected with the guide rail, and a connecting seat sleeved on the screw rod female member, the bottom of the connecting seat being connected with the guide sliding block.

[0010] Preferably, the rotating driving part further comprises an adjusting pull block movably connected with the top of the connecting seat, the end of the connecting seat being formed with a protruding part, the adjusting pull block being connected with the protruding part through an adjusting bolt, the adjusting pull block being capable of moving in a direction perpendicular to the movement direction of the screw rod female member, a first tensioning pull block connected with the adjusting pull block, a first end of the synchronous steel belt being connected with the first tensioning pull block after passing through the first guide wheel, and a second tensioning pull block connected with the first tensioning pull block through an adjusting bolt, a second end of the synchronous steel belt being connected with the second tensioning pull block after passing through the second guide wheel, the second tensioning pull block being capable of moving in a direction parallel to the movement direction of the screw rod female member relative to the first tensioning pull block.

[0011] Preferably, the side of the second screw rod is installed with a first photoelectric switch group, the connecting seat is installed with a baffle on the side facing the first photoelectric switch group, and the baffle triggers the first photoelectric switch group when the connecting seat moves to a specified position.

[0012] Preferably, the connecting part comprises a limiting block installed on the top of the inner support base, an upper part of the limiting block forms a limiting slot, a limiting rod is installed on the top of the extending shaft, end parts of the limiting rod are clamped in the limiting slot, a limiting bolt is connected with the limiting block, the limiting bolt is parallel to the limiting rod, and a spring connects the limiting bolt and the limiting rod.

[0013] Preferably, a linear bearing is sleeved between the extending shaft and the inner support base, a cross roller bearing is arranged between the inner support base and the outer support base, a bearing pressing mother is arranged at the bottom of the cross roller bearing, a bearing pressing cover is arranged at the side of the bearing pressing mother, and a fixed pressing base is arranged at the upper part of the cross roller bearing.

[0014] Preferably, an arc-shaped first grating ruler is installed on the circumferential side of the upper part of the inner support base, a first reading head for cooperating with the first grating ruler is installed on the top of the fixed pressing base, a first extending rod and a second extending rod extending in the radial direction are arranged on the upper part of the extending shaft, a second grating ruler is installed on the end part of the first extending rod, a second reading head for cooperating with the second grating ruler is installed on the side of the second grating ruler, the second reading head is connected with the inner support base, oppositely arranged second photoelectric switch groups are installed on the top of the inner support base, the end part of the second extending rod is located between the second photoelectric switch groups, and the second extending rod triggers the second photoelectric switch groups when the extending shaft moves to a specified position.

[0015] The workpiece table for semiconductor testing of the embodiment of the application comprises a workpiece table main body installed on the top of a base, the workpiece table main body comprises an extending shaft for installing a carrier table at the top, an inner support base sleeved on the extending shaft, and an outer support base sleeved on the inner support base, a vertical driving part connected with the extending shaft for driving the extending shaft to move in the vertical direction, a rotating driving part connected with the inner support base for driving the inner support base to rotate, and a connecting part connecting the extending shaft and the inner support base, so that the extending shaft can move in the vertical direction and rotate, thereby effectively solving the problem of complex structure of the existing workpiece table for semiconductor testing.

[0016] In order to make the above objectives, characteristics and advantages of the present application more apparent and easy to understand, the following preferred embodiments are specifically described below with reference to the accompanying drawings. BRIEF DESCRIPTION OF DRAWINGS

[0017] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings needed to be used in the embodiments will be briefly introduced as follows. It should be understood that the following drawings only show some of the embodiments of the present application, and therefore should not be considered as a limitation to the scope. For those skilled in the art, other related drawings can also be obtained from these drawings without any creative effort.

[0018] Figure 1 is a schematic view of a workpiece table for semiconductor testing according to the present application.

[0019] Figure 2 is a schematic view of a base of a workpiece table for semiconductor testing according to the present application.

[0020] Figure 3 is a plan view of a workpiece table for semiconductor testing according to the present application.

[0021] Figure 4 is a plan view of a workpiece table for semiconductor testing according to the present application from another angle.

[0022] Figure 5 is a plan view of a workpiece table for semiconductor testing according to the present application from yet another angle.

[0023] Figure 6 is a plan view of a workpiece table for semiconductor testing according to the present application from yet another angle.

[0024] Figure 7 is a schematic view of a part of a workpiece table for semiconductor testing according to the present application.

[0025] Figure 8 is a top view of a workpiece table for semiconductor testing according to the present application.

[0026] Reference: 1 - base; 11 - notch; 2 - workpiece table main body; 21 - extension shaft; 201 - first extension rod; 202 - second extension rod; 22 - inner support seat; 23 - outer support seat; 24 - linear bearing; 25 - cross roller bearing; 26 - bearing pressure female; 27 - bearing gland; 28 - fixed pressure seat; 3 - vertical driving part; 31 - first motor; 301 - first synchronous wheel; 302 - second synchronous wheel; 303 - synchronous belt; 32 - first lead screw; 33 - matching female part; 34 - lead screw fixing seat; 35 - connecting arm; 4 - rotary driving part; 41 - second driving motor; 42 - shaft coupling; 43 - second lead screw; 431 - support part; 44 - lead screw female part; 46 - first guide wheel; 45 - second guide wheel; 47 - synchronous steel belt; 48 - mounting plate; 401 - connecting seat; 402 - guide rail; 403 - guide sliding block; 404 - adjusting pull block; 405 - first tensioning pull block; 406 - second tensioning pull block; 5 - connecting part; 51 - limiting block; 511 - limiting clamping groove; 52 - limiting rod; 53 - limiting bolt; 54 - spring; 6 - first photoelectric switch group; 61 - baffle; 7 - first grating ruler; 71 - first reading head; 8 - second grating ruler; 81 - second reading head; 9 - second photoelectric switch group. DETAILED DESCRIPTION

[0027] The following detailed description is presented to aid the reader in gaining a comprehensive understanding of the methods, apparatuses, and / or systems described herein. However, various changes, modifications, and equivalents can be used, and the

[0028] The features described herein can be implemented in different forms and should not be construed as limited to the examples described herein. Rather, these examples have been provided so that this disclosure will be thorough and complete, and will fully convey the scope of the methods, apparatuses, and / or systems to those skilled in the art. Further, the description should not be construed as limiting the described examples to applications that elicit the particular features, advantages, and / or properties described herein. Rather, claims can be pursued beyond the examples described herein.

[0029] Throughout the specification, when an element (such as a layer, region or substrate) is referred to as being "on" another element, "connected to" another element, "coupled to" another element, "adjacent to" another element, "on top of" another element, or "covering" another element, it can be directly on, connected to, coupled to, adjacent to, on top of, or covering the other element, or one or more other elements can be interposed therebetween. In contrast, when an element is referred to as being "directly on", "directly connected to", "directly coupled to", "directly adjacent to", "directly on top of", or "directly covering" another element, there are no other elements interposed therebetween.

[0030] As used herein, the term "and / or" includes any one of the listed items and any combination of two or more of the listed items.

[0031] Although terms such as "first" and "second" and "third" can be used herein to describe various components, assemblies, regions, layers or sections, these components, assemblies, regions, layers or sections are not limited by these terms. Rather, these terms are only used to distinguish one component, assembly, region, layer or section from another component, assembly, region, layer or section. Thus, a component, assembly, region, layer or section referred to as a first component, assembly, region, layer or section in one example described herein can also be referred to as a second component, assembly, region, layer or section in another example without departing from the teachings of the examples.

[0032] For ease of description, spatial terms such as "on", "upper", "below", and "lower" can be used with respect to the orientation of one element relative to another element as illustrated in the figures. Such spatial terms are intended to encompass different orientations of the device in use or operation, in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, a component described as on "top" or the "upper" relative to another component would then be oriented on the "bottom" or "lower" relative to the other component. Accordingly, the term "on" encompasses both a position "on" as well as a position "under" depending on the spatial orientation of the device. The device can be oriented in other ways (e.g., rotated 90 degrees or at other orientations) and an appropriate modification to the spatial terms would be made to those of skill in the art in light of the disclosure.

[0033] The terminology used herein is for the purpose of describing various examples only and is not intended to be limiting. As used herein, the singular forms "a," "an," and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. The terms "comprises," "comprising," "includes," "including" and "has," "having" as used herein, are intended to be open-ended terms that encompass both the recited elements and other elements.

[0034] Variations in the shapes illustrated in the drawings can occur as a result of manufacturing techniques and / or tolerances. Thus, the examples described herein are not limited to the specific shapes illustrated in the drawings, but include variations in shapes that occur during manufacturing.

[0035] Features of the examples described herein can be combined with one another as would be apparent to one of ordinary skill in the art after understanding the disclosure provided herein. Furthermore, although examples described herein have a variety of configurations, other configurations are possible as would be apparent to one of ordinary skill in the art after understanding the disclosure provided herein.

[0036] The present invention provides a work stage for semiconductor testing, such as Figures 1 to 8 As shown, the work stage for semiconductor testing includes a base 1, a work stage main body 2, a vertical driving portion 3, a rotary driving portion 4, and a connecting portion 5.

[0037] In the following description, reference will be made to Figures 1 to 8 The specific structure of the above components of the work stage for semiconductor testing and the connection relationship of the above components will be described in detail.

[0038] As shown in FIG. 1, the work stage for semiconductor testing includes a base 1, a work stage main body 2, a vertical driving portion 3, a rotary driving portion 4, and a connecting portion 5. Figures 1 to 8As shown, in this embodiment, the base 1 is located at the bottom of the workpiece stage for semiconductor testing, and the workpiece stage body 2 can be installed at the center of the top of the base 1. Specifically, the workpiece stage body 2 may include an extension shaft 21, an inner support 22, and an outer support 23. The extension shaft 21 can be located in the middle of the workpiece stage body 2, and its top is used to mount a stage, which is a component for loading semiconductors. The inner support 22 can be sleeved on the extension shaft 21 and can be movably connected to the extension shaft 21. The outer support 23 can be sleeved on the inner support 22 and can be movably connected to the inner support 22. The bottom of the outer support 23 can be installed on the top surface of the base 1. A vertical drive unit 3 can be located on one side of the base 1, and the vertical drive unit 3 can be connected to the extension shaft 21, which is used to drive the extension shaft 21 to move in the vertical direction. The rotary drive unit 4 can be installed on one side of the top of the base 1. The rotary drive unit 4 can be connected to the inner support base 22 and is used to drive the inner support base 22 to rotate. The connecting part 5 can be provided on the top of the workpiece stage body 2. It is used to connect the extension shaft 21 and the inner support base 22, so that the extension shaft 21 can both move up and down and rotate in the circumferential direction to meet the needs of semiconductor testing.

[0039] Preferred, such as Figure 1 and Figure 2 As shown, in this embodiment, the base 1 can be formed as a cuboid for mounting other components. A rectangular notch 11 can be formed on the first side of the base 1, the notch 11 connecting to the middle of the base 1. A vertical drive unit 3 can be disposed at the notch 11 of the base 1, passing through the notch 11 and connected to the protruding shaft 21 inside the workpiece stage body 2. A rotary drive unit 4 can be disposed on the top of the second side of the base 1. Preferably, the first side can be the long side of the base 1, and the second side can be the wide side of the base 1.

[0040] Preferred, such as Figures 1 to 4 As shown, in this embodiment, the protruding shaft 21 can be a cylindrical shaft with an axial through hole in the center, and it is located in the center of the workpiece table body 2. The inner support 22 can be a cylindrical sleeve, the inner diameter of which can be larger than the outer diameter of the protruding shaft 21, and the axial dimension of the inner support 22 can be smaller than the axial dimension of the protruding shaft 21. A linear bearing 24 can be provided between the inner support 22 and the protruding shaft 21. Specifically, the linear bearing 24 can be installed in the inner hole of the inner support 22, and the inner diameter of the linear bearing 24 can be equal to the outer diameter of the protruding shaft 21. The linear bearing 24 is used to guide the linear and rotational motion of the protruding shaft 21. The outer support 23 can be a cylindrical sleeve, and a disc-shaped protrusion can be formed at both the top and bottom ends of the outer support 23. The inner diameter of the outer support 23 can be larger than the outer diameter of the inner support 22, and the bottom end of the outer support 23 can be bolted to the base 1.

[0041] Preferred, such as Figures 1 to 4 As shown, in this embodiment, the outer support 23 and the inner support 22 can be connected via a crossed roller bearing 25, a bearing nut 26, a bearing cap 27, and a fixed support 28. Specifically, as... Figure 3 As shown, the upper end of the inner support seat 22 can have a radial protrusion. The bearing cap 27 can be disposed between the protrusion of the inner support seat 22 and the top of the outer support seat 23. The bearing nut 26 is sleeved on the outside of the bearing cap 27. The crossed roller bearing 25 is disposed on the upper part of the bearing nut 26 and the bearing cap 27. The fixed seat 28 is sleeved on the outside of the inner support seat 22 and the crossed roller bearing 25. The outer diameter of the fixed seat 28 can be equal to the size of the disc-shaped protrusion at the top of the outer support seat 23, thereby enabling the inner support seat 22 to rotate relative to the outer support seat 23.

[0042] Preferred, such as Figures 1 to 3 As shown, in this embodiment, the vertical drive unit 3 may include a first motor 31, a first synchronous pulley 301, a synchronous belt 303, a second synchronous pulley 302, a first lead screw 32, and a mating part 33. The first motor 31 may be disposed on the first side of the base 1, opposite to the notch 11. The output shaft of the first motor 31 may be disposed at its bottom, and the output shaft is connected to the first synchronous pulley 301. The synchronous belt 303 may be disposed within the notch 11, with its first end connected to the first synchronous pulley 301 and its second end connected to the second synchronous pulley 302. The first lead screw 32 may be vertically disposed inside the workpiece table body 2, with its bottom end connected to the second synchronous pulley 302 and its upper end passing through the interior of the extension shaft 21. The first lead screw 32 and the extension shaft 21 are coaxially arranged. The mating part 33 is sleeved on the first lead screw 32 and is threadedly connected to the first lead screw 32. The top of the mating part 33 can be bolted to the bottom of the extension shaft 21, so that the extension shaft 21 can move synchronously with the mating part 33.

[0043] During use, the first motor 31 drives the first synchronous pulley 301 to rotate, and transmits the rotation to the second synchronous pulley 302 through the synchronous belt 303. The second synchronous pulley 302 drives the first lead screw 32 to rotate, so that the mating part 33 that cooperates with the first lead screw 32 can move along the length direction of the first lead screw 32. The extension shaft 21 moves synchronously with the mating part 33. The upper end face of the extension shaft 21 can be connected to the platform by screws, thereby realizing the vertical movement of the platform.

[0044] In addition, preferred, such as Figures 1 to 3As shown, in the embodiment, the vertical driving part 3 can further include a screw fixing seat 34 and a connecting arm 35. The screw fixing seat 34 can be connected with the lower part of the first screw 32 through a bearing, so that the first screw 32 can rotate relative to the screw fixing seat 34, and the first screw 32 is formed with a radial protrusion at the lower part, and the first screw 32 is clamped on the top of the screw fixing seat 34 through the radial protrusion. Specifically, the screw fixing seat 34 can be arranged between the second synchronous wheel 302 and the matching female part 33, and the top of the screw fixing seat 34 can be connected with the inner support seat 22 through a screw. The first end of the connecting arm 35 can be screwed with the screw fixing seat 34, and the second end of the connecting arm 35 can be fixedly sleeved on the first motor 31. In the case that the inner support seat 22 rotates, the screw fixing seat 34 can rotate synchronously with the inner support seat 22, drive the connecting arm 35 to swing, and further make the first motor 31 rotate around the workpiece table body 2. Preferably, the connecting arm 35 can be arranged in the notch 11 of the base 1, and can be covered on the top of the synchronous belt 303, so as to protect the synchronous belt 303.

[0045] Preferably, as Figure 1 and Figures 4 to 7As shown in the embodiment, the rotary driving part 4 can be mounted on the top of the mounting plate 48, and the bottom of the mounting plate 48 can be connected with the upper surface of the base 1 by screws. The mounting plate 48 can be mounted on the top of the second side of the base 1, and the length of the mounting plate 48 can be greater than the width of the base 1. The rotary driving part 4 can include a second driving motor 41, a shaft coupling 42, a second lead screw 43, a lead screw female part 44, a first guide wheel 46, a second guide wheel 45, and a synchronous steel belt 47. The second driving motor 41 can be fixed on one end of the length direction of the mounting plate 48 by bolts, the shaft coupling 42 can be mounted on the output shaft of the second driving motor 41, the first end of the second lead screw 43 can be connected with the shaft coupling 42, and the second end of the second lead screw 43 can be connected with a support 431 through a bearing. The support 431 can be a "convex" shaped support block, the bottom of which is bolted to the mounting plate 48, and the second lead screw 43 passes through the middle of the support 431. Preferably, the number of supports 431 can be two, and the other support 431 can be arranged at the end of the second lead screw 43 close to the shaft coupling 42. The lead screw female part 44 can be threadedly connected to the second lead screw 43, and can move along the length direction of the second lead screw 43. The first guide wheel 46 and the second guide wheel 45 can be mounted on the side of the second lead screw 43 facing the worktable main body 2, the bottoms of the first guide wheel 46 and the second guide wheel 45 are bolted to the mounting plate 48, the first guide wheel 46 and the second guide wheel 45 are arranged on both sides of the movement direction of the lead screw female part 44 respectively, and the synchronous steel belt 47 partially passes through the outer support seat 23 and is wound around the outer periphery of the inner support seat 22, is connected with the side of the inner support seat 22 away from the second lead screw 43 by screws, and is wound around the first guide wheel 46 and the second guide wheel 45 and connected to the lead screw female part 44.

[0046] In addition, preferably, as shown in Figure 1 and Figures 4 to 7 In the embodiment, the rotary driving part 4 can further include a guide rail 402, a guide sliding block 403, and a connecting seat 401. The guide rail 402 can be mounted below the second lead screw 43 and connected with the upper surface of the mounting plate 48 by screws, and the extension direction of the mounting plate 48 can be parallel to the movement direction of the lead screw female part 44. The guide sliding block 403 is slidably mounted on the guide rail 402, and can be a square sliding block with the top bolted to the bottom of the connecting seat 401. The end of the connecting seat 401 is connected to the lead screw female part 44 by screws, so that the connecting seat 401 can move synchronously with the lead screw female part 44, and the guide rail 402 and the guide sliding block 403 can guide the movement of the lead screw female part 44.

[0047] Further, preferably, as shown in Figure 1 and Figures 4 to 7As shown, in the embodiment, the rotary driving part 4 can further include an adjusting pull block 404, a first tensioning pull block 405, and a second tensioning pull block 406. The adjusting pull block 404 can be movably connected to the top of the connecting seat 401. Specifically, the top of the adjusting pull block 404 can be formed with a waist-shaped hole, and the adjusting pull block 404 can be screwed to the connecting seat 401 through the waist-shaped hole, so that the adjusting pull block 404 can move along the length direction of the waist-shaped hole. The end of the connecting seat 401 can be formed with a protruding part, and the adjusting pull block 404 can be connected to the protruding part through an adjusting screw. Rotating the adjusting screw can make the adjusting pull block 404 move in a direction perpendicular to the movement direction of the screw rod female part 44 (i.e. the length direction of the waist-shaped hole). Thus, the parallelism between the synchronous steel belt 47 and the second screw rod 43 between the first guide wheel 46 and the second guide wheel 45 can be adjusted through the adjusting pull block 404. The first tensioning pull block 405 and the second tensioning pull block 406 can be arranged on the side of the connecting seat 401 facing the workpiece table body 2. The first tensioning pull block 405 can be integrally formed with the adjusting pull block 404, and the second tensioning pull block 406 can be connected to the first tensioning pull block 405 through an adjusting screw. Rotating the adjusting screw can make the first tensioning pull block 405 and the second tensioning pull block 406 approach each other. The side of the outer supporting seat 23 facing the adjusting pull block 404 can be formed with two notches for the synchronous steel belt 47 to enter and exit the inside of the workpiece table body 2 and be fixedly connected to the inner supporting seat 22. Figure 5 As shown, the first end of the synchronous steel belt 47 is screwed to the first tensioning pull block 405, passes around the first guide wheel 46, enters the workpiece table body 2, the second end of the synchronous steel belt 47 extends out of the workpiece table body 2, passes around the second guide wheel 45, and is screwed to the second tensioning pull block 406. The first tensioning pull block 405 and the second tensioning pull block 406 are used to tension the synchronous steel belt 47.

[0048] During use, the second driving motor 41 drives the second screw rod 43 to rotate through the shaft coupling 42, and then drives the screw rod female part 44 to move along the length direction of the second screw rod 43. The connecting seat 401 moves synchronously with the screw rod female part 44, and drives the synchronous steel belt 47 to move. The synchronous steel belt 47 is connected to the inner supporting seat 22. When the synchronous steel belt 47 moves with the connecting seat 401, the inner supporting seat 22 also rotates. Preferably, the left and right swinging amplitude of the inner supporting seat 22 is not more than 7 degrees.

[0049] In addition, preferably, Figure 1 and Figures 4 to 7As shown in the embodiment, the side of the second screw rod 43 is provided with the first photoelectric switch group 6 (the first photoelectric switch group 6 can include two photoelectric switches), and the connecting base 401 can be provided with the baffle 61 on the side facing the first photoelectric switch group 6. The number of the first photoelectric switch group 6 can be two, and the number of the baffle 61 can also be two. When the connecting base 401 moves to a specified position (for example, the upper and lower limit positions of the preset movement path of the connecting base 401), the baffle 61 triggers the first photoelectric switch group 6, thereby limiting the rotation movement of the inner support base 22 by the operator. The model of the first photoelectric switch group 6 can be PM-L25.

[0050] Preferably, as shown in the embodiment, Figure 1 , Figure 3 , Figure 4 and Figure 8 As shown in the embodiment, the connecting part 5 can include a limiting block 51, a limiting rod 52, a limiting bolt 53, and a spring 54. The limiting block 51 can be formed as a cuboid and is installed on the top of the inner support base 22 by a bolt. The upper part of the limiting block 51 is formed with a downwardly recessed rectangular limiting clamping groove 511. The first end of the limiting rod 52 can be threadedly connected with the mounting hole on the circumferential side of the top of the extension shaft 21, and the second end of the limiting rod 52 can be clamped in the limiting clamping groove 511. Preferably, the movement stroke of the extension shaft 21 in the vertical direction can be not greater than 5 mm, so that the second end of the limiting rod 52 is always located in the limiting clamping groove 511. The limiting bolt 53 is threadedly connected with the limiting block 51 and is parallel to the limiting rod 52. The spring 54 is installed between the limiting bolt 53 and the limiting rod 52, which is used to tension the limiting rod 52 to avoid the shaking of the limiting rod 52.

[0051] In addition, preferably, as shown in the embodiment, Figure 1 and Figure 8As shown, in the embodiment, the circumferential side of the upper portion of the inner support base 22 can also be provided with an arc-shaped first grating ruler 7 through screw mounting, and the top of the fixed pressing base 28 of the side portion can be provided with a first reading head 71 for cooperating with the first grating ruler 7. Specifically, the first reading head 71 can be screw connected with a bracket, and the bracket is screw connected with the top of the fixed pressing base 28. The first reading head 71 is used for an operator to detect the rotation distance of the extension shaft 21. Preferably, the circumferential side of the top of the extension shaft 21 can be screw connected with a first extension rod 201 and a second extension rod 202 extending in the radial direction, and the first extension rod 201 and the second extension rod 202 can be oppositely arranged. The end of the first extension rod 201 can be screw connected with a second grating ruler 8, and the side portion of the second grating ruler 8 is provided with a second reading head 81 for cooperating with the second grating ruler 8. The second reading head 81 can be screw connected with the inner support base 22 through a bracket. The second reading head 81 is used for an operator to detect the movement distance of the extension shaft 21 in the vertical direction. The model of the first grating ruler 7 and the second grating ruler 8 can be RTLC40-S-200, and the model of the first reading head 71 and the second reading head 81 can be Q4BCY30D20A. The top of the inner support base 22 can also be provided with a second photoelectric switch group 9 (the second photoelectric switch group 9 can include two photoelectric switches) arranged at intervals and oppositely. The end of the second extension rod 202 can be located in the middle of the second photoelectric switch group 9 (i.e. between the two photoelectric switches). When the extension shaft 21 moves to a specified position (for example, the extension shaft 21 moves up and down to the upper and lower limits of the preset path in the vertical direction), the second extension rod 202 triggers the second photoelectric switch group 9, which is used for an operator to limit the movement of the extension shaft 21 in the vertical direction. The model of the second photoelectric switch group 9 can be PM-L25.

[0052] In use, the vertical driving part 3 drives the extension shaft 21 to move in the vertical direction, the rotary driving part 4 drives the inner support base 22 to rotate, and the connecting part 5 connects the inner support base 22 and the extension shaft 21 together, thereby integrating the vertical movement and the rotary movement, so that the structure of the worktable for semiconductor testing is more compact and simple and is easy to assemble and maintain.

[0053] Finally, it should be noted that the above-described embodiments are merely specific embodiments of the present application, which are used to illustrate the technical solutions of the present application, but not to limit the same. The protection scope of the present application is not limited thereto. Although the present application has been described in detail with reference to the foregoing embodiments, it should be understood by those skilled in the art that any skilled person in the art can still modify or easily think of changes to the technical solutions recorded in the foregoing embodiments, or make equivalent replacements to some of the technical features, within the technical scope disclosed by the present application. The modifications, changes or replacements do not make the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present application, and should be covered within the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. A workpiece stage for semiconductor testing, used for mounting a stage, characterized in that, The semiconductor testing stage includes: Base; A workpiece stage body is mounted on top of the base, and the workpiece stage body includes: An extension shaft, the top of which is used to mount the stage; An inner support seat is sleeved on the protruding shaft, and the inner support seat is movably connected to the protruding shaft; and An outer support base is sleeved on the inner support base, the outer support base is movably connected to the inner support base, and the outer support base is installed on the base; A vertical drive unit, connected to the extending shaft, is used to drive the extending shaft to move in the vertical direction; A rotary drive unit, connected to the inner support base, is used to drive the inner support base to rotate; and The connecting part is connected to the protruding shaft and the inner support seat; The connecting part includes: A limiting block is installed on the top of the inner support base, and a limiting groove is formed on the upper part of the limiting block; A limiting rod is installed on the top of the extending shaft, and the end of the limiting rod is engaged in the limiting groove; A limiting bolt, connected to the limiting block, the limiting bolt being parallel to the limiting rod; and A spring connects the limiting bolt and the limiting rod.

2. The workpiece stage for semiconductor testing according to claim 1, characterized in that, The base has a notch on its first side that connects to the middle of the base, and the vertical drive unit includes: A first motor is disposed on the first side of the base; The first synchronous pulley is connected to the first motor; A timing belt, the first end of which is connected to the first timing pulley, is disposed within a notch in the base; The second synchronous pulley is connected to the second end of the synchronous belt; The first lead screw has its bottom connected to the second synchronous pulley, and its top passes through the interior of the protruding shaft; and The mating part is sleeved on the first lead screw, and the mating part is connected to the bottom of the protruding shaft.

3. The workpiece stage for semiconductor testing according to claim 2, characterized in that, The vertical drive unit also includes: A lead screw fixing seat is sleeved on the bottom of the first lead screw, and the lead screw fixing seat is connected to the inner support seat; and A connecting arm is connected to the first motor and the lead screw fixing seat, and the connecting arm is covered on the upper part of the synchronous belt.

4. The semiconductor testing stage according to any one of claims 1 to 3, characterized in that, The rotation drive unit includes: The second drive motor is mounted on the top of the second side of the base; The coupling is mounted on the second drive motor; The second lead screw has its first end connected to the coupling; The lead screw female component is installed on the second lead screw; The first guide wheel is located on the first side in the direction of movement of the lead screw; The second guide wheel is disposed on the second side in the direction of motion of the lead screw; and A synchronous steel belt is provided, which is partially inserted through the outer support seat and wrapped around the outer periphery of the inner support seat. The synchronous steel belt is fixedly connected to the inner support seat, and is wrapped around the first guide wheel and the second guide wheel and connected to the lead screw.

5. The workpiece stage for semiconductor testing according to claim 4, characterized in that, The rotary drive unit further includes: A guide rail is installed on the top of the second side of the base, and the extension direction of the guide rail is parallel to the movement direction of the lead screw. A guide slider is mounted on the guide rail, and the guide slider is slidably connected to the guide rail; and A connecting seat is sleeved on the lead screw female component, and the bottom of the connecting seat is connected to the guide slider.

6. The workpiece stage for semiconductor testing according to claim 5, characterized in that, The rotary drive unit further includes: An adjusting block is movably connected to the top of the connecting seat. The end of the connecting seat has a protrusion. The adjusting block is connected to the protrusion by an adjusting bolt. The adjusting block can move in a direction perpendicular to the movement direction of the lead screw. The first tensioning block is connected to the adjusting block, and the first end of the synchronous steel belt passes around the first guide wheel and is connected to the first tensioning block; and The second tensioning block is connected to the first tensioning block by an adjusting bolt, and the second end of the synchronous steel belt passes around the second guide wheel and is connected to the second tensioning block; The second tension block can move relative to the first tension block in a direction parallel to the movement of the lead screw.

7. The workpiece stage for semiconductor testing according to claim 5, characterized in that, A first photoelectric switch group is installed on the side of the second lead screw. A baffle is installed on the side of the connecting seat facing the first photoelectric switch group. When the connecting seat moves to a designated position, the baffle triggers the first photoelectric switch group.

8. The workpiece stage for semiconductor testing according to claim 1, characterized in that, A linear bearing is sleeved between the protruding shaft and the inner support seat; a cross roller bearing is provided between the inner support seat and the outer support seat; a bearing nut is provided at the bottom of the cross roller bearing; a bearing cap is provided on the side of the bearing nut; and a fixed pressure seat is provided at the top of the cross roller bearing.

9. The workpiece stage for semiconductor testing according to claim 8, characterized in that, An arc-shaped first grating ruler is installed on the upper circumferential side of the inner support base, and a first reading head for cooperating with the first grating ruler is installed on the top of the fixed pressure base. The upper part of the extension shaft is provided with a first extension rod and a second extension rod extending radially. A second grating ruler is installed at the end of the first extension rod, and a second reading head for cooperating with the second grating ruler is installed on the side of the second grating ruler. The second reading head is connected to the inner support base. The top of the inner support is equipped with a second photoelectric switch group arranged opposite to it. The end of the second extension rod is located between the second photoelectric switch groups. When the extension shaft moves to a designated position, the second extension rod triggers the second photoelectric switch group.

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