inkjet head

Abstract

An inkjet head includes: an inkjet head main body having a plurality of nozzle holes arranged on a straight line and ejecting ink, a plurality of ink chambers respectively communicating with the plurality of nozzle holes, and a vibrating plate that pressurizes the ink in the plurality of ink chambers by vibrating; and a plurality of piezoelectric element units having piezoelectric elements that vibrate the vibrating plate, and being arranged in a zigzag shape in a manner of sandwiching the straight line along the straight line and being joined to the vibrating plate.

Description

Technical Field

[0001] This disclosure relates to inkjet heads. Background Technology

[0002] As an example of prior art for inkjet printheads, the technology disclosed in Patent Document 1 is known. When printing on an object having a width greater than the width of the printhead, the printhead reciprocates multiple times. According to Patent Document 1, by arranging multiple printheads in a staggered pattern on a substrate, the number of reciprocations of the substrate and even the printheads can be reduced. Furthermore, by adjusting the spacing between the printheads on the substrate, the nozzle pitch can be adjusted.

[0003] Prior art literature

[0004] Patent documents

[0005] Patent Document 1: Japanese Patent Application Publication No. 2007-90686 Summary of the Invention

[0006] One aspect of this disclosure relates to an inkjet head comprising: an inkjet head body having a plurality of nozzle holes arranged in a straight line and ejecting ink, a plurality of ink chambers respectively communicating with the plurality of nozzle holes, and a vibrating plate that pressurizes the ink in the plurality of ink chambers by vibration; and a plurality of piezoelectric element units having piezoelectric elements that cause the vibrating plate to vibrate, and being arranged in a zigzag manner along and sandwiching the straight line and engaged with the vibrating plate. Attached Figure Description

[0007] Figure 1 This is a top view of the inkjet head according to the first embodiment of this disclosure.

[0008] Figure 2 It is along Figure 1 A cross-sectional view of the inkjet head on line II-II shown.

[0009] Figure 3 It is along Figure 1 A cross-sectional view of the inkjet head along line III-III.

[0010] Figure 4 This diagram illustrates the operation of the inkjet head when the nozzle pitch is changed.

[0011] Figure 5 This is a top view of the inkjet head according to the second embodiment of this disclosure.

[0012] Figure 6 It is along Figure 5 A cross-sectional view of the inkjet head with the VI-VI line shown.

[0013] Figure 7 It is along Figure 5A cross-sectional view of the inkjet head along line VII-VII. Detailed Implementation

[0014] The application of inkjet printheads in the production of semiconductor devices is also continuously advancing. To improve production efficiency, there is a pressing need to increase print width and to make the nozzle pitch variable. Variable nozzle pitch can be achieved, for example, by arranging the nozzles in a straight line and tilting the inkjet printhead relative to the scanning direction.

[0015] However, when multiple inkjet heads are arranged in an interleaved manner as disclosed in Patent Document 1, the desired nozzle pitch cannot be obtained even when the substrate is tilted.

[0016] Furthermore, when the inkjet head is lengthened to increase the printing width by arranging the nozzles in a straight line, the piezoelectric element used in the ink ejection actuator is difficult to lengthen due to its characteristics. In addition, due to the differences in the coefficients of linear expansion of the components constituting the inkjet head, uneven internal stress and even strain caused by temperature changes affect the pitch between nozzles.

[0017] This disclosure was made to solve the aforementioned problems, and its purpose is to suppress strain that occurs under temperature changes even when the inkjet head is lengthened.

[0018] <First Implementation Method>

[0019] The inkjet head according to the first embodiment of this disclosure will now be described with reference to the accompanying drawings. It should be noted that in the following description, six directions—right, left, front, back, top, and bottom—are used. Each direction is shown in… Figures 1-3 middle.

[0020] The inkjet head 1 ejects ink to print on the object. The ink is printing ink. In addition to printing ink, ink can also be a liquid material, such as solder paste, silver paste, stamp paste, fluorescent paste, and cell suspension.

[0021] The inkjet head 1 ejects ink via a piezoelectric element (described later) controlled by a control device (not shown). Furthermore, the inkjet head 1 is configured to circulate ink with a liquid delivery device (not shown). That is, the liquid delivery device supplies ink to the inkjet head 1, and ink not ejected from the inkjet head 1 is discharged from the inkjet head 1 to the liquid delivery device.

[0022] Inkjet head 1 Figures 1 to 3 As shown, it comprises an inkjet head body 10, a piezoelectric element unit 20, and a housing component 30.

[0023] The inkjet head body 10 is formed in a cuboid shape and is constructed by stacking a nozzle plate 11, an ink chamber plate 12, and a vibrating plate 13. The nozzle plate 11, the ink chamber plate 12, and the vibrating plate 13 are joined together by, for example, an adhesive.

[0024] The nozzle plate 11 is formed into a plate shape from alloy steel such as stainless steel. Multiple nozzle holes 11a are formed on the nozzle plate 11, and these nozzle holes 11a are arranged on a straight line L to eject ink. The straight line L is an imaginary straight line extending in the left-right direction. The number of nozzle holes 11a is 36, but is not limited to this.

[0025] The ink chamber plate 12 is formed into a cuboid shape, for example, by etching and pressure processing of a stainless steel plate, which is then bonded together with an adhesive. The ink chamber plate 12 has multiple groups consisting of a supply path 12a, an ink chamber 12b, a silo 12c, and a discharge path 12d. These multiple groups are configured to correspond to multiple nozzle holes 11a. That is, the number of groups is the same as the number of nozzle holes 11a, which is 36, but it is not limited to this.

[0026] The supply path 12a is formed to extend in the front-to-back direction for supplying ink to the ink chamber 12b.

[0027] The ink chamber 12b is formed into a cuboid shape extending in the front-to-back direction and is connected to the supply path 12a and the silo 12c. The upper wall of the ink chamber 12b is formed by a vibrating plate 13.

[0028] The silo 12c is formed to extend in the vertical direction and is connected to the ink chamber 12b and the discharge path 12d. In addition, the silo 12c is formed to be connected to the nozzle orifice 11a. That is, the plurality of ink chambers 12b are respectively connected to a corresponding nozzle orifice 11a of the plurality of nozzle orifices 11a through a corresponding silo 12c of the plurality of silos 12c.

[0029] The discharge path 12d extends in the front-to-back direction and is connected to the silo 12c. The discharge path 12d communicates with the ink chamber 12b via the silo 12c and is used to discharge ink from the ink chamber 12b.

[0030] Furthermore, the multiple groups are divided into multiple clusters. There are four clusters in total. That is, each of the multiple clusters contains nine subgroups. It should be noted that the number of clusters is not limited to four. Each of the multiple clusters has one supply connection path 12e and one discharge connection path 12f.

[0031] Supply connection 12e is connected to multiple supply connections 12a in one of the multiple groups. Discharge connection 12f is connected to multiple discharge connections 12d in one of the multiple groups.

[0032] Multiple groups are arranged in a zigzag pattern along and between lines L and L. Figure 1That is, the nine supply paths 12a, ink chamber 12b, silo 12c and discharge path 12d that constitute a group are arranged in a zigzag manner along and between straight lines L.

[0033] By configuring multiple groups in this way, the supply connection path 12e, supply path 12a, and ink chamber 12b are arranged on opposite sides of the discharge path 12d and discharge connection path 12f, sandwiched between them along a straight line L. Furthermore, each of the multiple discharge paths 12d is connected to a multiple of the ink chambers 12b arranged on opposite sides of the straight line L. Each of the multiple supply paths 12a is connected to a multiple of the ink chambers 12b arranged on the same side when viewed from the straight line L.

[0034] Furthermore, in both the supply connection path 12e and the discharge connection path 12f, they are arranged in a zigzag pattern along and sandwiching the straight line L. It should be noted that... Figure 2 This is a cross-sectional view of the portion of ink chamber 12b located at the front when viewed from line L. Additionally, Figure 3 This is a cross-sectional view of the part of ink chamber 12b located at the rear when viewed from the straight line L.

[0035] The vibrating plate 13 pressurizes the ink in the plurality of ink chambers 12b by vibration. The vibrating plate 13 is formed into a plate shape and is configured to cover the plurality of ink chambers 12b. The vibrating plate 13 is formed using a nickel-cobalt alloy and nickel, etc. The plurality of vibrating plate members 13a of the vibrating plate 13 are correspondingly joined to the ink chambers 12b by, for example, an adhesive.

[0036] Multiple piezoelectric element units 20 are arranged corresponding to multiple groups. The number of piezoelectric element units 20 is four, but is not limited to this.

[0037] One of the multiple piezoelectric element units 20 has multiple piezoelectric elements 20a corresponding to multiple groups constituting multiple groups. The number of piezoelectric elements 20a in one piezoelectric element unit 20 is nine, but is not limited to this. The piezoelectric elements 20a are formed in a cuboid shape.

[0038] The piezoelectric element unit 20 is formed by combining multiple piezoelectric elements 20a. The piezoelectric element unit 20 is formed in a comb-like shape with multiple piezoelectric elements 20a connected to each other at their upper ends. The lower ends of the piezoelectric elements 20a are bonded to the vibrating plate 13a by, for example, an adhesive. The piezoelectric elements 20a deform when a voltage is applied, causing the vibrating plate 13a and even the vibrating plate 13 to vibrate. The piezoelectric element unit 20 includes electrodes (not shown) for applying voltage to the piezoelectric elements 20a and is formed in a cuboid shape, and is bonded to the vibrating plate 13 by, for example, an adhesive.

[0039] Furthermore, the plurality of piezoelectric element units 20 are arranged in a zigzag pattern along and sandwiching the straight line L. Specifically, the plurality of piezoelectric element units 20 are arranged in a zigzag pattern along and sandwiching the straight line L in a manner corresponding to the plurality of ink chambers 12b. Conversely, the plurality of ink chambers 12b are arranged in a zigzag pattern along and sandwiching the straight line L in a manner corresponding to the plurality of piezoelectric element units 20.

[0040] Multiple piezoelectric element units 20 are arranged in a zigzag pattern along and sandwiching a straight line L. Therefore, the multiple piezoelectric element units 20 include two or more first piezoelectric element units and two or more second piezoelectric element units located on the opposite side of the two or more first piezoelectric element units relative to the straight line L. The two or more first piezoelectric element units are arranged at a first interval in a direction parallel to the straight line L. The two or more second piezoelectric element units are arranged at a second interval in a direction parallel to the straight line L. The second interval may also be the same as the first interval. The two or more second piezoelectric element units are offset relative to the two or more first piezoelectric element units in a direction parallel to the straight line L. The offset may also be half the length of the first interval. The two or more first piezoelectric element units may also be separated from the straight line L by a first distance in a direction orthogonal to the straight line L. The two or more second piezoelectric element units may also be separated from the straight line L by a second distance in a direction orthogonal to the straight line L. The second distance may also be the same as the first distance.

[0041] Furthermore, one of the piezoelectric element units 20 is configured to partially oppose another piezoelectric element unit 20 in a direction orthogonal to the line L. Specifically, when viewed from the line L, the right and left sides of the piezoelectric element unit 20 positioned in front are respectively opposed to the left and right sides of the piezoelectric element unit 20 positioned behind when viewed from the line L.

[0042] The housing component 30 is formed from alloy steel such as stainless steel into a rectangular frame shape when viewed from above. The housing component 30 is joined to the upper surface of the inkjet head body 10 by, for example, an adhesive. The housing component 30 has a common supply path 31, a plurality of second discharge connection paths 32, and a common discharge path 33. The common supply path 31, the plurality of second discharge connection paths 32, and the common discharge path 33 are respectively arranged on both sides along a straight line L.

[0043] The common supply path 31 is formed to extend along the straight line L on the lower side of the housing member 30 and is connected to a plurality of supply connection paths 12e respectively. Specifically, the common supply path 31 located in front when viewed from the straight line L is connected to the plurality of supply connection paths 12e located in front when viewed from the straight line L. In addition, the common supply path 31 located in the rear when viewed from the straight line L is connected to the plurality of supply connection paths 12e located in the rear when viewed from the straight line L. The common supply path 31 is connected to the liquid delivery device via a supply pipe 40 connected to the housing member 30.

[0044] Multiple second discharge connection paths 32 are respectively configured to connect to discharge connection path 12f in one of the multiple groups and to a common discharge path 33.

[0045] The common discharge passage 33 extends along the straight line L on the upper side of the housing member 30 and is connected to the plurality of discharge connection passages 12f via the second discharge connection passage 32. Specifically, the common discharge passage 33 located at the front when viewed from the straight line L is connected to the plurality of discharge connection passages 12f located at the front when viewed from the straight line L via the second discharge connection passage 32. In addition, the common discharge passage 33 located at the rear when viewed from the straight line L is connected to the plurality of discharge connection passages 12f located at the rear when viewed from the straight line L via the second discharge connection passage 32. The common discharge passage 33 is connected to the liquid delivery device via a discharge pipe 50 connected to the housing member 30.

[0046] Furthermore, in the inkjet head body 10, the coefficients of linear expansion of the nozzle plate 11, ink chamber plate 12, and housing component 30 are different from those of the vibrating plate 13 and piezoelectric element unit 20. Additionally, the coefficients of linear expansion of the nozzle plate 11, ink chamber plate 12, housing component 30, and vibrating plate 13 are larger than those of the piezoelectric element unit 20.

[0047] Specifically, the linear expansion coefficients of the nozzle plate 11, ink chamber plate 12, and housing component 30 are approximately 10–18 × 10⁻⁶ / ℃. The linear expansion coefficient of the vibrating plate 13 is approximately 13–15 × 10⁻⁶ / ℃. The linear expansion coefficient of the piezoelectric element unit 20 is approximately 2–4 × 10⁻⁶ / ℃. It should be noted that the materials and linear expansion coefficients of the components constituting the inkjet head 1 are not limited to those described above.

[0048] The components constituting the inkjet head 1, as described above, have different coefficients of linear expansion, resulting in different amounts of deformation due to temperature changes, for example, in the ambient temperature. Furthermore, the components constituting the inkjet head 1 are joined as described above. Consequently, uneven internal stress and even strain occur within the inkjet head body 10.

[0049] Even though the coefficients of linear expansion of the components constituting the inkjet head 1 are different as described above, the unevenness of internal stress and even strain of the inkjet head body 10 can be suppressed because the multiple piezoelectric element units 20 are arranged in a zigzag manner along and sandwiching the straight line L.

[0050] For example, in inkjet head 1 as a comparative example, the case where all of the multiple piezoelectric element units 20 are arranged in the direction along line L, only in front when viewed from line L. It should be noted that in this case, all of the multiple ink chambers 12b are arranged in the front when viewed from line L.

[0051] As described above, the coefficient of linear expansion of the piezoelectric element unit 20 is smaller than that of the nozzle plate 11, the ink chamber plate 12, and the vibrating plate 13. Therefore, when the ambient temperature rises, internal stress is generated at the front part of the inkjet head body 10 where the piezoelectric element unit 20 is located when viewed from a straight line L, due to the difference in the coefficient of linear expansion.

[0052] On the other hand, the piezoelectric element unit 20 is not disposed in the rear portion of the inkjet head body 10 when viewed from the straight line L. That is, the internal stress generated in the rear portion of the inkjet head body 10 when viewed from the straight line L is smaller than the internal stress generated in the front portion of the inkjet head body 10 when viewed from the straight line L. Therefore, in the inkjet head body 10, there is a difference in the internal stress generated on both sides of the straight line L, i.e., uneven internal stress. As a result, strain occurs in the inkjet head body 10, affecting the nozzle pitch.

[0053] On the other hand, in the inkjet head 1 of the first embodiment, as described above, the piezoelectric element units 20 are arranged in a zigzag pattern along and sandwiching the straight line L. Furthermore, in the inkjet head body 10, the internal stresses generated at the locations where the plurality of piezoelectric element units 20 are arranged are of the same magnitude. Therefore, the unevenness of internal stress generated in the inkjet head body 10 is smaller than that in the inkjet head 1 of the comparative example described above. That is, the strain generated in the inkjet head 1 of the first embodiment, and even its influence on the nozzle pitch, is suppressed compared to the inkjet head 1 of the comparative example described above.

[0054] Furthermore, as described above, one of the piezoelectric element units 20 is configured to partially oppose another piezoelectric element unit 20 in a direction orthogonal to the line L. Therefore, compared to the case where one piezoelectric element unit 20 is not partially opposed to another piezoelectric element unit 20 in a direction orthogonal to the line L, the distance between adjacent piezoelectric element units 20 along the line L is smaller.

[0055] Therefore, in the inkjet head body 10, the difference between the internal stress generated in the area where the piezoelectric element unit 20 is located and the internal stress generated in the area where the piezoelectric element unit 20 is not located, i.e., the unevenness of internal stress, becomes smaller. Consequently, the strain generated in the inkjet head body 10 and its impact on the nozzle pitch decrease. It should be noted that one of the piezoelectric element units 20 can also be configured so that it is not locally opposed to another piezoelectric element unit 20 in a direction orthogonal to the line L.

[0056] Next, the operation of the inkjet head 1 described above will be explained. Ink is supplied from the liquid delivery device to the common supply path 31 via the supply piping 40. The ink supplied to the common supply path 31 is distributed to the multiple supply paths 12a via the multiple groups of their respective supply connection paths 12e.

[0057] Ink flows through multiple groups via supply path 12a, ink chamber 12b, silo 12c, and discharge path 12d, converging at discharge connection path 12f. Ink that has flowed through one of the groups is discharged from discharge connection path 12f via second discharge connection path 32 to a common discharge path 33, where it merges with ink that has flowed through another group. Furthermore, ink is discharged from the common discharge path 33 to the liquid delivery device via discharge piping 50.

[0058] With the ink circulating between the ink delivery device and the inkjet head 1 as described above, when a voltage is applied to the piezoelectric element 20a, the vibrating plate 13a, and even the vibrating plate 13 itself, vibrates according to the deformation of the piezoelectric element 20a. Through the vibration of the vibrating plate 13, the ink in the ink chamber 12b is pressurized, and the ink is ejected from the nozzle orifice 11a. Thus, printing is performed on the object passing below the inkjet head 1.

[0059] Furthermore, the nozzle orifice 11a is positioned on a straight line L, therefore, as Figure 4 As shown, the inkjet head 1 is tilted relative to the direction of travel F of the object, thereby changing the nozzle pitch relative to the direction of travel F.

[0060] As described above, in the inkjet head 1, multiple piezoelectric element units 20 are arranged in a zigzag pattern along and sandwiching the straight line L. Corresponding to the piezoelectric element units 20, the ink chamber 12b, and even the supply connection path 12e, supply path 12a, hopper 12c, discharge path 12d, discharge connection path 12f, and second discharge connection path 32 are arranged in a zigzag pattern along and sandwiching the straight line L. Therefore, the piezoelectric element units 20 and the discharge connection path 12f are arranged alternately along the straight line L. Thus, the inkjet head body 10 can be efficiently and compactly constructed.

[0061] Furthermore, in the housing component 30, as described above, a common supply path 31 and a common discharge path 33 are respectively arranged on both sides of the inkjet head body 10 along a straight line L. Therefore, the inkjet head body 10 can be constructed more efficiently and effectively.

[0062] <Second Implementation Method>

[0063] Next, regarding the inkjet head 1 according to the second embodiment of this disclosure, the parts that differ from those in the first embodiment will be described. The inkjet head 1 of the second embodiment is as follows: Figure 5 As shown, multiple vibrating plates 113 are provided in a manner corresponding to multiple groups. In the second embodiment, the number of vibrating plates 113 is four, but it is not limited to this.

[0064] The vibratory plate 113 is formed using an electroforming process including a photolithography step, employing a nickel-cobalt alloy, a nickel-palladium alloy, or nickel. In other words, the vibratory plate 113 is a thin metal film formed using metal in a thin film form. The manufacturing of the vibratory plate 113 includes a photolithography step, thus enabling the precise formation of its shape. Furthermore, when multiple vibratory plate members 13a are fabricated and bonded to the vibratory plate 113 via a photolithography step, the precision of the shape of the vibratory plate members 13a and their positional precision relative to the vibratory plate 113 are improved. Consequently, the positional precision of the vibratory plate members 13a relative to the piezoelectric element 20a, and even the positional precision of the vibratory plate 113 relative to the piezoelectric element unit 20, is improved. Therefore, multiple vibratory plates 113 can be arranged without interference. Additionally, since the vibratory plate 113 is a thin metal film, it exhibits good responsiveness to deformation of the piezoelectric element 20a.

[0065] Furthermore, the vibrating plate 113 in the second embodiment is smaller than that in the first embodiment. Therefore, when the ambient temperature changes, the deformation of each vibrating plate 113 in the second embodiment is smaller than that in the first embodiment. Consequently, the internal stress of the inkjet head body 10 in the second embodiment is smaller than that in the first embodiment. That is, by forming multiple vibrating plates 113, unevenness in internal stress and strain within the inkjet head body 10 can be reduced.

[0066] Multiple vibrating plates 113 are arranged in a zigzag pattern along and sandwiching the straight line L, corresponding to the piezoelectric element unit 20. Therefore, similar to the arrangement of the multiple piezoelectric element units 20 described above, the multiple vibrating plates 113 of the second embodiment can reduce the unevenness of internal stress and even strain of the inkjet head body 10.

[0067] Furthermore, one of the plurality of vibrating plates 113 is configured to be partially opposite to another vibrating plate 113 in the direction along the line L. Moreover, one of the plurality of vibrating plates 113 is configured to be partially opposite to another vibrating plate 113 in the direction orthogonal to the line L.

[0068] Therefore, compared to the case where one of the multiple vibrating plates 113 is not partially opposed to another of the multiple vibrating plates 113, the distance between the multiple vibrating plates 113 in the second embodiment is smaller. That is, similar to the arrangement of the multiple piezoelectric element units 20 described above, the unevenness of internal stress and even strain of the inkjet head body 10 can be reduced.

[0069] In the plurality of vibrating plates 113, specifically, the corners located on the side of the straight line L are chamfered, and the corners of the plurality of vibrating plates 113 arranged obliquely adjacent to each other are opposite each other. It should be noted that one of the vibrating plates 113 may also be arranged not to be partially opposite to another vibrating plate 113 in the plurality of vibrating plates 113 in a direction orthogonal to the straight line L or along the straight line L.

[0070] In addition, such as Figure 6 and Figure 7 As shown, in the ink chamber plate 12, the ink chamber 12b is disposed separately from the nozzle orifice 11a in a direction orthogonal to the straight line L. Therefore, the ink chamber 12b of the second embodiment can be made smaller compared to the ink chamber 12b of the first embodiment. Consequently, the number of vibrating plates 113 constituting the upper wall of the ink chamber 12b can be reduced, and thus multiple vibrating plates 113 can be arranged without interference.

[0071] Furthermore, in the ink chamber plate 12, the ink chamber 12b and the silo 12c are connected via the intermediate flow path 112g. As a result, compared with the first embodiment, the distance traveled between the multiple ink chambers 12b via the discharge connection path 12f is longer, thus suppressing the influence of pressure fluctuations between the multiple ink chambers 12b.

[0072] According to the inkjet head disclosed herein, even when the inkjet head is lengthened, strain caused by temperature changes can be suppressed.

[0073] This disclosure is not limited to the embodiments described herein. Various modifications to these embodiments, as well as combinations of elements from different embodiments, are also included within the scope of this disclosure, provided they do not depart from its spirit.

[0074] Industrial availability

[0075] This invention can be widely used in inkjet heads.

[0076] Explanation of reference numerals in the attached figures

[0077] 1 inkjet head

[0078] 10 inkjet head body

[0079] 11 Nozzle Plate

[0080] 11a Nozzle Orifice

[0081] 12 ink chamber plate

[0082] 12a supply route

[0083] 12b ink chamber

[0084] 12d discharge path

[0085] 13 Vibrating Plate

[0086] 13a Vibration Plate

[0087] 20 piezoelectric element units

[0088] 20A piezoelectric element

[0089] 30 Shell Components

[0090] 31 Shared Supply Road

[0091] 33 Shared exhaust path

[0092] Line L.

Claims

1. An inkjet head, wherein, The inkjet head has the following features: The inkjet head body has a plurality of nozzle holes arranged in a straight line and ejecting ink, a plurality of ink chambers respectively connected to the plurality of nozzle holes, and a vibrating plate that pressurizes the ink in the plurality of ink chambers by vibration. as well as Multiple piezoelectric element units, each having a piezoelectric element that causes the vibrating plate to vibrate, are arranged in a zigzag pattern and engaged with the vibrating plate in a manner that follows and sandwiches the straight line. The piezoelectric elements corresponding to the plurality of ink chambers are integrated.

2. An inkjet head, wherein, The inkjet head has the following features: The inkjet head body has a plurality of nozzle holes arranged in a straight line and ejecting ink, a plurality of ink chambers respectively connected to the plurality of nozzle holes, and a vibrating plate that pressurizes the ink in the plurality of ink chambers by vibration. as well as Multiple piezoelectric element units, each having a piezoelectric element that causes the vibrating plate to vibrate, are arranged in a zigzag pattern and engaged with the vibrating plate in a manner that follows and sandwiches the straight line. A group is formed by a plurality of the piezoelectric elements, and the plurality of piezoelectric elements are arranged in a zigzag pattern according to each group.

3. An inkjet head, wherein, The inkjet head has the following features: The inkjet head body has a plurality of nozzle holes arranged in a straight line and ejecting ink, a plurality of ink chambers respectively connected to the plurality of nozzle holes, and a vibrating plate that pressurizes the ink in the plurality of ink chambers by vibration. as well as Multiple piezoelectric element units, each having a piezoelectric element that causes the vibrating plate to vibrate, are arranged in a zigzag pattern and engaged with the vibrating plate in a manner that follows and sandwiches the straight line. The plurality of ink chambers are arranged in a zigzag pattern along and sandwiching the straight line in a manner corresponding to the plurality of piezoelectric element units. The plurality of ink chambers form a group, and the plurality of ink chambers are arranged in a zigzag pattern according to each of the groups.

4. An inkjet head, wherein, The inkjet head has the following features: The inkjet head body has a plurality of nozzle holes arranged in a straight line and ejecting ink, a plurality of ink chambers respectively connected to the plurality of nozzle holes, and a vibrating plate that pressurizes the ink in the plurality of ink chambers by vibration. as well as Multiple piezoelectric element units, each having a piezoelectric element that causes the vibrating plate to vibrate, are arranged in a zigzag pattern and engaged with the vibrating plate in a manner that follows and sandwiches the straight line. The coefficient of linear expansion of the parts constituting the plurality of nozzle holes and the plurality of ink chambers in the inkjet head body is different from the coefficient of linear expansion of the vibrating plate and the plurality of piezoelectric element units.

5. The inkjet head according to any one of claims 1 to 4, wherein, The inkjet head body is constructed by stacking a nozzle plate having the plurality of nozzle holes, an ink chamber plate having the plurality of ink chambers, and a vibrating plate.

6. The inkjet head according to any one of claims 1 to 4, wherein, One of the plurality of piezoelectric element units is configured to be partially opposite to another piezoelectric element unit in a direction orthogonal to the line.

7. The inkjet head according to any one of claims 1 to 4, wherein, The inkjet head has multiple vibrating plates. The plurality of vibrating plates are arranged in a zigzag pattern along and sandwiching the straight line in a manner corresponding to the plurality of piezoelectric element units.

8. The inkjet head according to claim 7, wherein, One of the plurality of vibrating plates is configured to be partially opposite to another of the plurality of vibrating plates in a direction along the straight line.

9. The inkjet head according to claim 7, wherein, One of the plurality of vibrating plates is configured to be partially opposite to another of the plurality of vibrating plates in a direction orthogonal to the line.

10. The inkjet head according to any one of claims 1 to 4, wherein, The plurality of ink chambers are separated from the plurality of nozzle orifices in a direction orthogonal to the straight line.

11. The inkjet head according to any one of claims 1 to 3, wherein, The coefficient of linear expansion of the parts constituting the plurality of nozzle holes and the plurality of ink chambers in the inkjet head body is different from the coefficient of linear expansion of the vibrating plate and the plurality of piezoelectric element units.

12. The inkjet head according to any one of claims 1 to 4, wherein, The linear expansion coefficients of the parts constituting the plurality of nozzle holes and the plurality of ink chambers in the inkjet head body, as well as the vibrating plate, are greater than the linear expansion coefficients of the plurality of piezoelectric element units.

13. The inkjet head according to any one of claims 1, 2, and 4, wherein, The plurality of ink chambers are arranged in a zigzag pattern along and sandwiching the straight line in a manner corresponding to the plurality of piezoelectric element units.

14. The inkjet head according to claim 13, wherein, The inkjet head body also has multiple discharge paths for discharging the ink from the plurality of ink chambers. The plurality of discharge paths are arranged in a zigzag pattern along and between the straight lines. The plurality of discharge paths are respectively connected to the plurality of ink chambers arranged on opposite sides of the straight line.

15. The inkjet head according to claim 14, wherein, The inkjet head also has a housing component that is engaged with the inkjet head body and has a common discharge path that allows the ink discharged from the plurality of discharge paths to merge and discharge.

16. The inkjet head according to claim 15, wherein, The inkjet head body also has multiple supply paths for supplying ink to the multiple ink chambers. The plurality of supply paths are arranged in a zigzag pattern along and between the straight lines. The plurality of supply paths are respectively connected to the plurality of ink chambers located on the same side when viewed from the straight line.

17. The inkjet head according to claim 16, wherein, The housing component also has a common supply path that branches off to and supplies ink to the plurality of supply paths. The shared discharge path and the shared supply path are respectively arranged on both sides of the straight line in a direction orthogonal to the straight line.

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