A high-rigidity three-dimensional full-decoupling micro-motion platform

Abstract

This application provides a high-rigidity three-dimensional fully decoupled micro-motion platform, including a support frame. The micro-motion mechanism includes a main body, a first actuating structure, a second actuating structure, and a third actuating structure. The main body is mounted on the support frame. The first actuating structure is movably mounted on the main body along a first direction and has a first reinforcing part. The second actuating structure is movably mounted on the first actuating structure along a second direction and has a second reinforcing part. The third actuating structure is movably mounted on the second actuating structure along a third direction. A second driver is drive-connected to the second actuating structure. The third driver is drive-connected to the third actuating structure. This application provides a high-rigidity three-dimensional fully decoupled micro-motion platform. By providing a first reinforcing part and a second reinforcing part in the first and second actuating structures respectively, the rigidity of the micro-motion mechanism is improved, thereby enhancing the decoupling performance and efficiency of the micro-motion platform.

Description

Technical Field

[0001] This application belongs to the field of micro-nano fabrication technology, and more specifically, relates to a high-rigidity three-dimensional fully decoupled micro-motion platform. Background Technology

[0002] Three-dimensional fully decoupled micro-motion platforms are widely used in the fabrication of micro and nanostructures due to their precision and high processing efficiency. These platforms primarily use actuators to drive the various actuator components. The deformation of the platform mainly relies on flexible hinges, a special type of kinematic pair that utilizes the elastic deformation of materials to generate displacement. Flexible hinges offer advantages such as zero mechanical friction, zero backlash, easy maintenance, and high resolution. There are many structural types of flexible hinges, commonly including straight beam, straight-circle, and elliptical types. Three-dimensional fully decoupled micro-motion platforms are mainly divided into series and parallel types. While series-type platforms have a simple structure and good decoupling performance, they have low processing efficiency and are prone to error accumulation. Parallel-type platforms employ a symmetrical structure, resulting in better mechanical properties and less susceptibility to error accumulation; however, they require high rigidity.

[0003] Currently, most parallel three-dimensional fully decoupled micro-motion platforms have micro-motion mechanisms that do not meet the strength requirements. When the internal actuator is running at high frequency, the three-dimensional micro-motion mechanism is prone to slight deformation in some areas. This causes the actuator to be unable to drive the corresponding execution structure to complete high-frequency motion efficiently, and can only do some low-frequency motion. As a result, the three-dimensional fully decoupled micro-motion platform has poor decoupling performance and low decoupling efficiency. Summary of the Invention

[0004] The purpose of this application is to provide a high-rigidity three-dimensional fully decoupled micro-motion platform to solve the technical problem that the micro-motion mechanism inside the existing micro-motion platform has insufficient rigidity, resulting in poor decoupling performance and low decoupling efficiency.

[0005] To achieve the above objectives, the technical solution adopted in this application is as follows: a high-rigidity three-dimensional fully decoupled micro-motion platform is provided, comprising: a support; a micro-motion mechanism, including a main body disposed on the support, a first execution structure movably disposed on the main body along a first direction, a second execution structure movably disposed on the first execution structure along a second direction, and a third execution structure movably disposed on the second execution structure along a third direction, wherein the first execution structure is provided with a first reinforcing part, and the second execution structure is provided with a second reinforcing part; a first driver is disposed on the support and is drively connected to the first execution structure; a second driver is disposed on the first execution structure and is drively connected to the second execution structure; and a third driver is disposed on the second execution structure and is drively connected to the third execution structure.

[0006] The beneficial effects of the high-rigidity three-dimensional fully decoupled micro-motion platform provided in this application are as follows: Compared with the prior art, the high-rigidity three-dimensional fully decoupled micro-motion platform of this application sets the main body of the micro-motion mechanism on the support, sets the first execution structure on the main body, sets the second execution structure on the first execution structure, and sets the third execution structure on the second execution structure. The first execution structure, the second execution structure, and the third execution structure can perform micro-motion along the first direction, the second direction, and the third direction, respectively, thereby realizing a series connection structure inside the micro-motion mechanism. At the same time, the first execution structure and the second execution structure, which are equipped with the second driver and the third driver, are respectively provided with a first reinforcement part and a second reinforcement part, thereby effectively improving the rigidity of the first execution structure and the second execution structure, avoiding slight deformation of the first execution structure and the second execution structure during high-frequency operation, so that the second execution structure and the third execution structure can smoothly complete high-frequency vibration, thereby improving the decoupling performance and decoupling efficiency of the high-rigidity three-dimensional fully decoupled micro-motion platform.

[0007] In one embodiment, the micro-motion mechanism further includes a first flexible hinge, the two ends of which are respectively connected to the main body and the first actuation structure, and the first flexible hinge is disposed on opposite sides of the first actuation structure along a second direction and / or a third direction.

[0008] In one embodiment, the micro-motion mechanism further includes a second flexible hinge, the two ends of which are respectively connected to the first actuating structure and the second actuating structure, and the second flexible hinge is disposed on opposite sides of the second actuating structure along a third direction.

[0009] In one embodiment, the micro-motion mechanism further includes a third flexible hinge, the two ends of which are respectively connected to the second actuating structure and the third actuating structure, and the third flexible hinge is disposed on opposite sides of the third actuating structure along the second direction.

[0010] In one embodiment, the second execution structure has a third reinforcement on the side near the second driver.

[0011] In one embodiment, the first execution structure has a first mounting position, the second driver is disposed in the first mounting position, and the first reinforcement is located on opposite sides of the first mounting position along the third direction.

[0012] In one embodiment, the second execution structure has a second mounting position, the third driver is disposed in the second mounting position, and the second reinforcement is located on opposite sides of the second mounting position along the second direction.

[0013] In one embodiment, a connector is further included, which is connected to the first driver and the first execution structure respectively, and the first driver drives the first execution structure to move along a first direction through the connector.

[0014] In one embodiment, the connector has a driving end on the side near the first driver, the first driver is connected to the driving end, and the connector has a plurality of transmission ends on the side near the first execution structure, the plurality of transmission ends being connected to the first execution structure.

[0015] In one embodiment, the bracket has a first positioning part protruding on the side near the main body, and the main body has a second positioning part, with the first positioning part and the second positioning part being positioned and connected to each other. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of this application, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 A three-dimensional structural schematic diagram of a high-rigidity three-dimensional fully decoupled micro-motion platform provided for embodiments of this application;

[0018] Figure 2 for Figure 1 An exploded view of a high-rigidity three-dimensional fully decoupled micro-motion platform is shown.

[0019] Figure 3 for Figure 1 The front view of the micro-motion mechanism is shown;

[0020] Figure 4 for Figure 3 The diagram shows a cross-sectional view of a high-rigidity three-dimensional fully decoupled micro-motion platform.

[0021] The following are the labeling elements in the figure:

[0022] 10. Bracket; 11. First positioning part; 12. Third mounting position;

[0023] 20. Micro-motion mechanism; 21. Main body; 211. Second positioning part; 22. First actuating structure; 221. First flexible hinge; 222. First reinforcing part; 223. First mounting position; 23. Second actuating structure; 231. Second flexible hinge; 232. Second reinforcing part; 233. Third reinforcing part; 234. Second mounting position; 24. Third actuating structure; 241. Third flexible hinge;

[0024] 30. Connectors;

[0025] X, Third-party destination;

[0026] Y, First direction;

[0027] Z, the second direction. Detailed Implementation

[0028] To make the technical problems, technical solutions, and beneficial effects to be solved by this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and are not intended to limit the scope of this application.

[0029] It should be noted that when a component is referred to as being "fixed to" or "set on" another component, it can be directly on or indirectly on that other component. When a component is referred to as being "connected to" another component, it can be directly connected to or indirectly connected to that other component.

[0030] It should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0031] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.

[0032] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and embodiments.

[0033] Please refer to the following: Figures 1 to 3 The present application will now describe a high-rigidity three-dimensional fully decoupled micro-motion platform according to an embodiment. The high-rigidity three-dimensional fully decoupled micro-motion platform includes a support 10, a micro-motion mechanism 20, a first actuator, a second actuator, and a third actuator.

[0034] The micro-motion mechanism 20 includes a main body 21, a first actuating structure 22, a second actuating structure 23, and a third actuating structure 24. The main body 21 is mounted on the support 10. The first actuating structure 22 is movably mounted on the main body 21 along a first direction Y and is provided with a first reinforcing part 222. The second actuating structure 23 is movably mounted on the first actuating structure 22 along a second direction Z and is provided with a second reinforcing part 232. The third actuating structure 24 is movably mounted on the second actuating structure 23 along a third direction X. A first driver is mounted on the support 10 and is drively connected to the first actuating structure 22. A second driver is mounted on the first actuating structure 22 and is drively connected to the second actuating structure 23. A third driver is mounted on the second actuating structure 23 and is drively connected to the third actuating structure 24.

[0035] For example, such as Figures 1 to 3 As shown, the bracket 10 is mainly used to position the entire micro-motion mechanism 20. The bracket 10 is connected to the main body 21 by fasteners. The main body 21 is located on the outer periphery of the first actuating structure 22, and the first actuating structure 22 is connected to the main body 21. The first actuating structure 22 is located on the outer periphery of the second actuating structure 23, and the second actuating structure 23 is connected to the first actuating structure 22. The second actuating structure 23 is located on the outer periphery of the third actuating structure 24, and the third actuating structure 24 is connected to the second actuating structure 23. In this embodiment, the first driver is mounted on the bracket 10 and is drivenly connected to the first execution structure 22. The second driver is mounted in the first execution structure 22 and is drivenly connected to the second execution structure 23. The third driver is mounted on the second execution structure 23 and is drivenly connected to the third execution structure 24. Meanwhile, since the first execution structure 22 and the second execution structure 23 are specifically hollow quadrilaterals, their resistance to deformation is relatively weak. The first reinforcing part 222 and the second reinforcing part 232 are respectively provided on the first execution structure 22 and the second execution structure 23 to improve their rigidity and reduce the probability of deformation caused by stress.

[0036] It should be noted that the first direction Y, the second direction Z, and the third direction X are all perpendicular to each other.

[0037] It should be further explained that the purpose of three-dimensional full decoupling is to enable the micro-motion mechanism 20 to connect with the target mechanism and drive the target mechanism to make micro-motions in the first direction Y, the second direction Z and the third direction X, thereby achieving decoupling of the target mechanism in three-dimensional space.

[0038] This application provides a high-rigidity three-dimensional fully decoupled micro-motion platform. Compared with the prior art, this application's high-rigidity three-dimensional fully decoupled micro-motion platform, by setting the main body 21 of the micro-motion mechanism 20 on the support 10, setting the first actuating structure 22 on the main body 21, setting the second actuating structure 23 on the first actuating structure 22, and setting the third actuating structure 24 on the second actuating structure 23, and enabling the first actuating structure 22, the second actuating structure 23, and the third actuating structure 24 to perform micro-motions along the first direction Y, the second direction Z, and the third direction X, respectively, thereby achieving series connection within the micro-motion mechanism 20. The connection structure is such that, in addition, the first execution structure 22 and the second execution structure 23, which are equipped with the second driver and the third driver respectively, are provided with a first reinforcing part 222 and a second reinforcing part 232, thereby effectively improving the rigidity of the first execution structure 22 and the second execution structure 23, avoiding slight deformation of the first execution structure 22 and the second execution structure 23 in local areas when the first driver and the second driver are running at high frequency, so that the second execution structure 23 and the third execution structure 24 can smoothly complete high frequency vibration, thereby improving the decoupling performance and decoupling efficiency of a high-rigidity three-dimensional fully decoupled micro-motion platform.

[0039] In one embodiment of this application, please refer to the following: Figure 3 The micro-motion mechanism 20 also includes a first flexible hinge 221, the two ends of which are connected to the main body 21 and the first actuation structure 22 respectively, and the first flexible hinge 221 is disposed on opposite sides of the first actuation structure 22 along the second direction Z and / or the third direction X.

[0040] Specifically, the first flexible hinge 221 has a flat plate-like structure, wherein the main body 21 and the first actuating structure 22 are located at the two ends of the length direction of the first flexible hinge 221, and the thickness direction of the first flexible hinge 221 is the same as the first direction Y, so that the first flexible hinge 221 can undergo slight deformation along the first direction Y, so that the first actuating structure 22 can perform micro-movement under the drive of the first driver.

[0041] Furthermore, the first flexible hinge 221 can be disposed on opposite sides of the first actuating structure 22 along the second direction Z, or on opposite sides of the first actuating structure 22 along the third direction X, or both. In this embodiment, the number of first flexible hinges 221 is 8, of which 4 first flexible hinges 221 are located on opposite sides of the first actuating structure 22 along the second direction Z, and the other 4 first flexible hinges 221 are respectively located on opposite sides of the first actuating structure 22 along the second direction Z.

[0042] In one embodiment of this application, please refer to the following: Figure 3 The micro-motion mechanism 20 also includes a second flexible hinge 231, the two ends of which are connected to the first actuating structure 22 and the second actuating structure 23 respectively, and the second flexible hinge 231 is disposed on opposite sides of the second actuating structure 23 along the third direction X.

[0043] Specifically, the second flexible hinge 231 has a flat plate-like structure. The first actuating structure 22 and the second actuating structure 23 are located at the two ends of the length direction of the second flexible hinge 231, and the thickness direction of the second flexible hinge 231 is the same as the second direction Z. Thus, the second flexible hinge 231 can undergo slight deformation along the second direction Z, so that the second actuating structure 23 can perform micro-movement under the drive of the second actuator.

[0044] Furthermore, the second flexible hinge 231 is disposed on opposite sides of the second execution structure 23 along the second direction Z. In this embodiment, there are four second flexible hinges 231, and all four second flexible hinges 231 are located on opposite sides of the second execution structure 23 along the first direction Y.

[0045] In one embodiment of this application, please refer to the following: Figure 3 The micro-motion mechanism 20 also includes a third flexible hinge 241, the two ends of which are connected to the second actuation structure 23 and the third actuation structure 24 respectively, and the third flexible hinge 241 is disposed on opposite sides of the third actuation structure 24 along the second direction Z.

[0046] Specifically, the third flexible hinge 241 has a flat plate-like structure. The length direction of the third flexible hinge 241 is the same as the second direction Z, and the thickness direction of the third flexible hinge 241 is the same as the third direction X. Thus, the third flexible hinge 241 can undergo slight deformation along the third direction X, so that the third actuator 24 can perform micro-movement under the drive of the third actuator.

[0047] Furthermore, the third flexible hinge 241 is disposed on opposite sides of the third execution structure 24 along the first direction Y. In this embodiment, there are four third flexible hinges 241, and all four third flexible hinges 241 are located on opposite sides of the third execution structure 24 along the second direction Z.

[0048] Furthermore, the first flexible hinge 221, the second flexible hinge 231, and the third flexible hinge 241 can be other structures capable of slight elastic deformation, in addition to being flat plate-like structures.

[0049] In one embodiment of this application, please refer to the following: Figure 3 The second actuator 23 is provided with a third reinforcement 233 on the side near the second driver. The third reinforcement 233 is used to improve the rigidity of the second actuator 23 along the second direction Z.

[0050] Specifically, in this embodiment, the second execution structure 23 is generally quadrilateral in shape, and the third reinforcing part 233 is disposed on the outer surface of one side of the second execution structure 23 and located on the side close to the second driver. The cross-sectional area of ​​the third reinforcing part 233 gradually decreases towards the direction close to the second driver. The third reinforcing part 233 is specifically trapezoidal. By gradually decreasing the cross-sectional area of ​​the third reinforcing part 233 towards the direction close to the second driver, the third reinforcing part 233 can better resist the impact force generated in the second driver and effectively prevent the second execution structure from deforming when the second driver vibrates at high frequency.

[0051] In one embodiment of this application, please refer to the following: Figure 3 The first execution structure 22 has a first mounting position 223, the second driver is disposed in the first mounting position 223, and the first reinforcement 222 is located on opposite sides of the first mounting position 223 along the third direction X.

[0052] Specifically, both the first reinforcing part 222 and the second actuator are disposed within the first actuating structure 22. When the second actuator is installed in the first mounting position 223, the shape of the first mounting position 223 is adapted to the shape of the second actuator. The side of the second actuator facing away from the second actuating structure 23 abuts against the inner wall surface of the first actuating structure 22. When the second actuator moves, it generates a high-frequency impact force on the inner wall surface of the first actuating structure 22. Simultaneously, there are two first reinforcing parts 222, which are respectively disposed on opposite sides of the second actuator along the third direction X, effectively improving the rigidity around the first mounting position 223 and effectively resisting the high-frequency impact force of the second actuator.

[0053] In one embodiment of this application, please refer to the following: Figure 3The second execution structure 23 has a second mounting position 234, the third driver is disposed in the second mounting position 234, and the second reinforcement 232 is located on opposite sides of the second mounting position 234 along the second direction Z.

[0054] Specifically, both the second reinforcing part 232 and the third actuator are disposed within the second actuating structure 23. When the third actuator is installed in the second mounting position 234, the shape of the second mounting position 234 is adapted to the shape of the third actuator. The side of the third actuator facing away from the second actuating structure 23 abuts against the inner wall surface of the second actuating structure 23. When the third actuator moves, it generates a high-frequency impact force on the inner wall surface of the first actuating structure 22. Simultaneously, there are two second reinforcing parts 232, which are respectively disposed on opposite sides of the third actuator along the third direction X, effectively improving the rigidity around the second mounting position 234 and effectively resisting the high-frequency impact force of the third actuator.

[0055] Furthermore, the bracket 10 is provided with a third mounting position 12, in which the first driver is mounted.

[0056] In one embodiment of this application, please refer to the following: Figure 2 and Figure 4 It also includes a connector 30, which is connected to the first driver and the first execution structure 22 respectively. The first driver drives the first execution structure 22 to move along the first direction Y through the connector 30.

[0057] Specifically, since the first execution structure 22 is a hollow quadrilateral shape, and the first driver is a single-point local driving method, if the power output by the first driver is transmitted to the first execution structure 22 in a single-point manner along the first direction Y, it will cause an imbalance of force on the first execution structure 22 in the first direction Y, making it impossible for the first execution structure 22 to move smoothly in the first direction Y. Therefore, a connector 30 is needed between the first execution structure 22 and the first driver to transmit the power of the first driver to the first execution structure 22 through multiple points and evenly, thereby improving the smoothness of the first execution structure 22 moving along the first direction Y.

[0058] In one embodiment of this application, please refer to the following: Figure 2 and Figure 4 The connector 30 has a drive end on the side near the first driver, and the first driver is connected to the drive end. The connector 30 has multiple transmission ends on the side near the first execution structure 22, and the multiple transmission ends are connected to the first execution structure 22.

[0059] Specifically, the connector 30 includes four connecting arms, one end of which is connected to each other. The connection point is the driving end, and the other end of each of the four connecting arms is a transmission end. When the first driver transmits power to the driving end, the power received at the driving end is then transmitted to the corresponding transmission end through the four connecting arms. The power output at each transmission end is the same. At the same time, the four transmission ends are respectively connected to the four corners of the first execution structure 22. By providing one driving end and four transmission ends on the connector 30, the power in the first driver can be effectively distributed evenly to the four positions of the first execution structure 22, thereby improving the smoothness of the first execution structure 22 moving along the first direction Y.

[0060] In one embodiment of this application, please refer to the following: Figures 1 to 3 The bracket 10 has a first positioning part 11 protruding on the side near the main body 21, and the main body 21 has a second positioning part 211. The first positioning part 11 and the second positioning part 211 are positioned and connected to each other.

[0061] Specifically, the shapes of the first positioning part 11 and the second positioning part 211 are adapted to each other. The first positioning part 11 is a protrusion, and the second positioning part 211 is a groove. The first positioning part 11 and the second positioning part 211 are engaged with each other. At the same time, the first positioning part 11 is provided with a first mounting hole, and the corresponding position on the second positioning part 211 is provided with a second mounting hole. The second mounting hole is provided with an internal thread structure. A fastener is passed through the first mounting hole and then threaded into the second mounting hole to connect the bracket 10 to the main body 21.

[0062] The above are merely preferred embodiments of the present invention, and only specifically describe the technical principles of the present invention. These descriptions are only for explaining the principles of the present invention and should not be construed as limiting the scope of protection of the present invention in any way. Based on this explanation, any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention, as well as other specific embodiments of the present invention that can be conceived by those skilled in the art without creative effort, should be included within the scope of protection of the present invention.

Claims

1. A high-rigidity three-dimensional fully decoupled micro-motion platform, characterized in that, include: support; The micro-motion mechanism includes a main body disposed on the bracket, a first execution structure movably disposed on the main body along a first direction, a second execution structure movably disposed on the first execution structure along a second direction, and a third execution structure movably disposed on the second execution structure along a third direction. The first execution structure is provided with a first reinforcing part, and the second execution structure is provided with a second reinforcing part. A first driver is mounted on the bracket and is connected in a transmission manner to the first actuator. The second driver is disposed on the first execution structure and is drively connected to the second execution structure; A third driver is disposed on the second actuator and is drively connected to the third actuator. The second actuation structure has a third reinforcing part on the side near the second driver; The first execution structure has a first mounting position, the second driver is disposed in the first mounting position, and the first reinforcement is located on opposite sides of the first mounting position along the third direction; The second execution structure has a second mounting position, the third driver is disposed in the second mounting position, and the second reinforcement is located on opposite sides of the second mounting position along the second direction.

2. The high-rigidity three-dimensional fully decoupled micro-motion platform as described in claim 1, characterized in that: The micro-motion mechanism further includes a first flexible hinge, the two ends of which are respectively connected to the main body and the first actuation structure, and the first flexible hinge is disposed on opposite sides of the first actuation structure along the second direction and / or the third direction.

3. The high-rigidity three-dimensional fully decoupled micro-motion platform as described in claim 1, characterized in that: The micro-motion mechanism further includes a second flexible hinge, the two ends of which are respectively connected to the first execution structure and the second execution structure, and the second flexible hinge is disposed on opposite sides of the second execution structure along a third direction.

4. The high-rigidity three-dimensional fully decoupled micro-motion platform as described in claim 1, characterized in that: The micro-motion mechanism further includes a third flexible hinge, the two ends of which are respectively connected to the second actuating structure and the third actuating structure, and the third flexible hinge is disposed on opposite sides of the third actuating structure along the second direction.

5. A high-rigidity three-dimensional fully decoupled micro-motion platform as described in any one of claims 1-4, characterized in that: It also includes a connector, which is connected to the first driver and the first execution structure respectively. The first driver drives the first execution structure to move along a first direction through the connector.

6. The high-rigidity three-dimensional fully decoupled micro-motion platform as described in claim 5, characterized in that: The connector has a driving end on the side near the first driver, and the first driver is connected to the driving end. The connector also has multiple transmission ends on the side near the first execution structure, and the multiple transmission ends are connected to the first execution structure.

7. The high-rigidity three-dimensional fully decoupled micro-motion platform as described in claim 1, characterized in that: The bracket has a first positioning part protruding on one side near the main body, and the main body has a second positioning part, with the first positioning part and the second positioning part being mutually positioned and connected.

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