Shielding structure, showerhead, and plasma apparatus

Abstract

The application discloses a shielding structure, a shower head and a plasma device. The shielding structure shields a shower electrode and comprises a shell part, a cover part and a gap. The shell part forms a containing cavity for containing the shower electrode. An avoiding groove is arranged at the bottom of the containing cavity. In the state that the shower electrode is contained in the containing cavity, the shower hole of the shower electrode is exposed from the avoiding groove. The cover part covers the containing cavity and, together with the shell part, wraps the shower electrode and shields the shower electrode. One of the shell part and the cover part has a protruding area protruding towards the other one, and the other one has a recessed area recessed along the direction of the protruding area. In the state that the cover part and the shell part cover each other, the cover part covers the containing cavity, and the protruding area and the recessed area are in butt joint with each other in the mode of surrounding the outer periphery of the shower electrode. The shielding structure can inhibit the sparking phenomenon in the gap therebetween.

Description

Technical Field

[0001] The present invention relates to the field of plasma technology, and in particular to a shielding structure, a shower head and plasma equipment. Background Art

[0002] In the manufacture of microelectronic devices (such as semiconductor devices), plasma atomic layer deposition (PEALD) technology is used. In PEALD equipment, a large number of active free radicals are generated by a plasma generator, which enhances the reactivity of the precursor. This expands the range of ALD precursors and the requirements, shortens the reaction cycle time, and reduces the requirement for sample deposition temperature, enabling low-temperature or even room-temperature deposition. In addition, the introduction of plasma can further remove impurities in the film, resulting in lower resistivity and higher film density.

[0003] Capacitively coupled plasma (CCP) equipment generates plasma within a reaction chamber by capacitively coupling radio frequency (or DC) current applied to electrodes. It is widely used because it can provide uniform plasma over a large area. The operating pressure of CCP equipment is generally below 10 Torr or even 1 Torr.

[0004] In addition, due to the RF feed, the electrode plates need to be shielded. Due to assembly deviations, machining errors, etc., gaps will appear in the shielding structure, and process gases will enter these gaps. When the working gas pressure in the cavity rises, sparks (sometimes also called "parasitic plasma") may occur in these gaps. The occurrence of sparks will make the plasma state uncontrollable, thereby affecting the uniformity of the plasma. Summary of the Invention

[0005] The present invention aims to at least partially address the known problems. To this end, the present invention provides a shielding structure capable of suppressing sparking within the gaps therein. Furthermore, the present invention provides a showerhead and plasma apparatus having the shielding structure.

[0006] According to the shielding structure of the first aspect of the present invention, shielding the spray electrode includes:

[0007] a shell portion, wherein the shell portion is formed with a receiving cavity for receiving the spray electrode, and a avoidance groove is formed at the bottom of the receiving cavity, and when the spray electrode is received in the receiving cavity, the spray hole of the spray electrode is exposed from the avoidance groove;

[0008] a cover portion, covering the accommodating cavity, and wrapping the spray electrode together with the shell portion to shield the spray electrode;

[0009] Among the shell part and the cover part, one has a protruding area protruding toward the other, and the other has a recessed area recessed along the protruding direction of the protruding area. When the cover part and the shell part are covered with each other, the cover part covers the accommodating cavity, and the protruding area and the recessed area are connected to each other in a manner of surrounding the outer periphery of the spray electrode.

[0010] The shield structure according to the first aspect of the present invention has the following advantageous effect: it is possible to suppress the occurrence of sparking in the gaps thereof.

[0011] In some embodiments, the shell portion has a wall portion surrounding the accommodating cavity, the wall portion has the recessed area, the recessed area includes a first groove portion, the first groove portion is formed on a side of the wall portion adjacent to the accommodating cavity and surrounds the accommodating cavity as a whole; the cover portion has the protruding area, the protruding area includes a first protrusion, the first protrusion protrudes in the middle of the surface of the cover portion opposite to the shell portion; when the cover portion and the shell portion are covered with each other, the first protrusion is embedded in the first groove portion.

[0012] In some embodiments, the recessed area includes a second groove portion, which is formed on one side of the short side wall in the wall portion, extends along the width direction of the shell portion, and is separated from the first groove portion; the protruding area includes a second protrusion portion, which is formed on one side of the short side of the cover portion, extends along the width direction of the cover portion, and is separated from the first protrusion portion; when the cover portion and the shell portion are covered with each other, the second protrusion portion is embedded in the second groove portion.

[0013] In some embodiments, the shell portion includes a plurality of first shielding members, which are spliced ​​along the length direction of the spray electrode; the cover portion includes a plurality of second shielding members, which are spliced ​​along the length direction of the spray electrode; the positions where the plurality of first shielding members are spliced ​​together and the positions where the plurality of second shielding members are spliced ​​together are staggered along the length direction of the spray electrode.

[0014] In some embodiments, the shell portion includes a plurality of first shielding members, which are spliced ​​along the length direction of the spray electrode; among the two first shielding members spliced ​​together, one has a third protrusion protruding along the direction of their splicing, and the other has a third groove extending along the protruding direction of the third protrusion, and the third protrusion is embedded in the third groove.

[0015] In some embodiments, when the third protrusion is embedded in the third groove, a gap between the protruding area and the recessed area at the position where the third protrusion is embedded in the third groove is covered.

[0016] In some embodiments, the cover portion includes a plurality of second shielding members, which are linearly spliced ​​along the length direction of the spray electrode; among the two second shielding members spliced ​​together, one has a fourth protrusion protruding along the direction of their splicing, and the other has a fourth groove extending along the protruding direction of the fourth protrusion, and the fourth protrusion is embedded in the fourth groove.

[0017] In some embodiments, the cover portion includes a plurality of second shielding members, which are linearly spliced ​​along the length direction of the spray electrode; among the two second shielding members spliced ​​together, one has two fourth protrusions protruding along the direction of their splicing, and the other has two fourth grooves extending along the protruding direction of the fourth protrusions, and each of the fourth protrusions is respectively embedded in the fourth groove opposite to it; the two fourth protrusions are respectively arranged on both sides of the width direction of the corresponding second shielding member; the two fourth grooves are respectively arranged on both sides of the width direction of the corresponding second shielding member.

[0018] The shower head according to the second aspect of the present invention comprises a shower electrode and further comprises any one of the above-mentioned shielding structures, wherein the shower electrode is shielded by the shielding structure.

[0019] The shielding structure according to the second aspect of the present invention has the following advantageous effect: it is possible to suppress the occurrence of sparking in the gaps of the shielding structure.

[0020] The plasma equipment according to the third aspect of the present invention comprises the shower head.

[0021] The plasma equipment according to the third aspect of the present invention has the following advantageous effects: it can suppress the occurrence of sparking in the gaps of the shielding structure of the shower head, thereby improving the uniformity of the plasma. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 FIG. 1 is a schematic diagram of an embodiment of a shower head having a shielding structure according to the present invention.

[0023] Figure 2 yes Figure 1 Exploded view of the sprinkler head viewed from above.

[0024] Figure 3 yes Figure 1 Exploded view of the sprinkler head viewed from above.

[0025] Figure 4 It is along Figure 1 Schematic cross-sectional view of the shell and cover section at AA in FIG.

[0026] Figure 5 It is along Figure 1 Schematic cross-sectional view of the shell and cover section at BB in FIG.

[0027] Figure 6 It is a schematic diagram of another embodiment of the spray structure of the present invention.

[0028] Figure 7 yes Figure 6 Exploded view of the main part of the shell viewed from the rear direction.

[0029] Figure 8 yes Figure 6 Exploded view of the main part of the shell viewed from the front.

[0030] Figure 9 yes Figure 6 An exploded view of the main part of the cover as viewed from the front.

[0031] Figure 10 yes Figure 6 An exploded view of the main part of the cover as viewed from the rear. DETAILED DESCRIPTION

[0032] Examples of the present embodiment are described in detail below. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present embodiment and are not to be construed as limiting the present embodiment.

[0033] In the description of this embodiment, it should be understood that descriptions involving orientation, such as up, down, front, back, left, right, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings. They are only for the convenience of describing this embodiment and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, they cannot be understood as limitations on this embodiment.

[0034] In the description of this embodiment, "several" means one or more, "many" means more than two, "greater than," "less than," and "exceed" are understood to exclude the number itself, while "above," "below," and "within" are understood to include the number itself. The use of "first" and "second" in the description is solely for the purpose of distinguishing technical features and is not to be construed as indicating or implying relative importance, implicitly specifying the number of the indicated technical features, or implicitly specifying the order of the indicated technical features.

[0035] In the description of this embodiment, unless otherwise clearly defined, terms such as setting, installing, and connecting should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in this embodiment based on the specific content of the technical solution.

[0036] As mentioned above, some gaps within the chamber are unavoidable in plasma equipment, such as deviations caused by mechanical fit, tolerances due to machining, and assembly gaps due to the inability to machine large-scale, integrated ceramics. As the pressure within the chamber increases, the probability of the gas discharge threshold voltage at these gaps falling into an extremely low range (1-10 pd×cm) increases. This is particularly true for certain asymmetric electrode structures, where the sheath voltage is higher at the smaller electrode, leading to stronger ion bombardment and more uncontrollable plasma states. This, in turn, results in a more uneven plasma spray.

[0037] In the field of vapor deposition, the gas pressure range of capacitively coupled plasma equipment is generally below 10 Torr or even below 1 Torr. Within this pressure range, the showerhead 200 can maintain a stable operating state (i.e., unexpected sparking is generally not generated). However, in actual process operations, it is sometimes necessary to increase the pressure within the chamber. In such cases, in a medium-to-high pressure environment within the chamber, sparking and parasitic plasma generation can become more serious.

[0038] At higher gas pressures, it may be possible to suppress sparking and parasitic plasma by increasing the substrate side distance and reducing the gap size. However, increasing the substrate side distance increases the overall chamber size. Furthermore, reducing the gap size increases processing difficulty and costs.

[0039] To this end, this embodiment proposes a shielding structure 100 that can be implemented at a low cost without changing the existing chamber structure, and can suppress the occurrence of sparks in the gaps of the shielding structure 100. In particular, it can suppress the occurrence of sparks in the gaps of the shielding structure 100 when the air pressure in the chamber gradually increases.

[0040] Reference Figures 1 to 10 , and mainly refer to Figures 1 to 3According to the shielding structure 100 of the first embodiment, it is used to shield the spray electrode 201. The shielding structure 100 includes: a shell 101 and a cover 102. The shell 101 is formed with a housing cavity 103 for accommodating the spray electrode 201. The bottom of the housing cavity 103 (the lower part in the drawing) is provided with an avoidance groove 104. When the spray electrode 201 is accommodated in the housing cavity 103, the spray hole 202 of the spray electrode 201 is exposed from the avoidance groove 104. The cover 102 covers the housing cavity 103, and together with the shell 101, wraps the spray electrode 201 and shields the spray electrode 201. Among the shell 101 and the cover 102, one has a protruding area 105 protruding toward the other, and the other has a concave area 106 concave along the protruding direction of the protruding area 105. When the cover 102 and the shell 101 are covered with each other, the cover 102 covers the accommodating cavity 103 , and the protruding area 105 and the recessed area 106 are butted against each other in a manner of surrounding the outer circumference of the shower electrode 201 .

[0041] The shield structure 100 of this embodiment can suppress sparking in the gap therebetween. Specifically, when the cover 102 and shell 101 are in a closed position, a gap exists between them. When this gap is short, i.e., when the gas discharge path is short, sparking is more likely to occur. In this embodiment, by providing one of the cover 102 and shell 101 with a protruding region 105 and the other with a recessed region 106, and by aligning the protruding region 105 and the recessed region 106 when in the closed position, the gap between the cover 102 and shell 101 can be lengthened, thereby reducing the frequency of sparking in this gap (at the asymmetric electrode), improving the uniformity of the plasma generated by the showerhead 200, and enhancing the stability of the plasma device.

[0042] The spray electrode 201 is generally rectangular in shape, with a first semicircular portion 203 formed at each end of the spray electrode 201 in the longitudinal direction (front-to-back direction in the figure). An RF power source (not shown) is fed into the center of the upper portion of the spray electrode 201. Spray holes 202 are formed on the lower surface of the spray electrode 201. The spray holes 202 are distributed across the entire longitudinal direction of the spray electrode 201.

[0043] The shell 101 can be a component integrally formed with a shielding material such as ceramic, or a component formed by splicing together multiple components of a shielding material such as ceramic (described later). Overall, the shell 101 is roughly rectangular, and the accommodating cavity 103 is formed by being recessed downward from the top of the shell 101. The accommodating cavity 103 is centrally symmetrical with respect to the shell 101. The accommodating cavity 103 is formed according to the shape of the spray electrode 201. For example, a second semicircular portion 107 is formed at both ends of the length direction of the accommodating cavity 103. In addition, the depth of the accommodating cavity 103 in the up-down direction is slightly greater than the height of the spray electrode 201 as a whole, thereby enabling the accommodating cavity 103 to accommodate the spray electrode 201 as a whole.

[0044] The escape groove 104 extends through the bottom of the accommodating chamber 103 and along the length of the accommodating chamber 103. The overall length and width of the escape groove 104 are sufficient to fully expose the spray holes 202 of the spray electrode 201. In the plasma device (not shown), a ground electrode (not shown) is located below the showerhead 200. The ground electrode and the spray electrode 201 (connected to the RF electrode) are arranged parallel to each other. Gas is ejected from the spray holes 202, and plasma is generated between the ground electrode and the spray electrode 201 using RF glow discharge.

[0045] The cover 102 covers the housing cavity 103 of the shell 101 from above. An air inlet region 108 is defined in the middle of the upper surface of the cover 102, extending along the length of the cover 102. When the cover 102 covers the housing cavity 103, the air inlet region 108 of the cover 102 communicates with the spray holes 202 of the spray electrode 201. Furthermore, an RF electrode feed hole 109 is formed approximately in the center of the cover 102, through which the RF electrode is electrically connected to the spray electrode 201.

[0046] Reference Figure 4 , and auxiliary reference Figure 2 , it should be noted that, in Figure 4In the figure, for the convenience of illustration, the cross-sectional view of the shell 101 and the cross-sectional view of the cover 102 are separated in the up and down directions. In some embodiments, the shell 101 has a recessed area 106 recessed in the downward direction. Specifically, the shell 101 has a wall portion 110 surrounding the accommodating cavity 103. The recessed area 106 is formed in the wall portion 110, and the recessed area 106 includes a first groove portion 111. The first groove portion 111 is formed on a side of the wall portion 110 adjacent to the accommodating cavity 103 and surrounds the accommodating cavity 103 as a whole. The wall portion 110 has a first end face 112 located at the uppermost end. The first groove portion 111 is rectangular in shape as a whole, and the first groove portion 111 is symmetrical with the outer periphery of the shell 101 as a whole. In a top view, the first groove portion 111 covers the entire accommodating cavity 103 and a portion of the wall portion 110, that is, the first groove portion 111 cuts off a portion of the first end face 112. The front-to-back dimension (length) of the first groove portion 111 is approximately the same as the front-to-back dimension (length) of the accommodating cavity 103, and the left-to-right dimension (width) of the first groove portion 111 is larger than the left-to-right dimension (width) of the accommodating cavity 103. The first groove portion 111 has a first bottom surface 113 and a first side surface 114. The first bottom surface 113 is approximately parallel to the first end surface 112 and extends to the edge of the accommodating cavity 103. The first side surface 114 is located on the periphery of the first groove portion 111. The first side surfaces 114 are approximately perpendicular to the first end surface 112 and the first bottom surface 113, respectively, and connect the first end surface 112 and the first bottom surface 113. Thus, at the upper end of the shell portion 101, a transition portion (hereinafter referred to as the first transition portion 115 for ease of distinction) is formed, surrounding the accommodating cavity 103 and consisting of at least the first end surface 112 of the wall portion 110, the first side surface 114 of the first groove portion 111, and the first bottom surface 113.

[0047] Continue to refer to Figure 4 , and auxiliary reference Figure 3 The cover 102 can be a component integrally formed using a shielding material such as ceramic, or a component formed by splicing together multiple components of a shielding material such as ceramic (described later). Overall, the cover 102 is roughly in the shape of a rectangular flat plate. The dimensions of the cover 102 in the front-to-back direction (length) are roughly the same as the dimensions of the shell 101 in the front-to-back direction (length), and the dimensions of the cover 102 in the left-to-right direction (width) are also roughly the same as the dimensions of the shell 101 in the left-to-right direction (width). Therefore, when the cover 102 and the shell 101 are covered with each other, the shielding structure 100 as a whole is in the shape of a rectangular parallelepiped.

[0048] Corresponding to the downwardly recessed recessed area 106 of the shell 101, the lower portion of the cover 102 has a downwardly protruding protruding area 105. Specifically, the cover 102 has a first lower surface 116. The protruding area 105 includes a first protrusion 117. The first protrusion 117 protrudes from the center of the surface of the cover 102 opposite the shell 101. For example, the first protrusion 117 protrudes from the first lower surface 116 of the cover 102. When viewed from above, the first protrusion 117 is generally rectangular and symmetrical with the outer center of the cover 102. The first protrusion 117 has a second lower surface 118 and a second side surface 119. The second lower surface 118 protrudes downward relative to the first lower surface 116 of the cover 102. The second side surface 119 surrounds the four edges of the second lower surface 118 and connects the first lower surface 116 and the second lower surface 118. The dimension of the first protrusion 117 in the front-to-back direction (length) is slightly smaller than the dimension of the first groove 111 in the front-to-back direction (length). Although not particularly limited, the length of the first protrusion 117 can be smaller than the length of the first groove 111 by at least 0.3 mm and at most 1 mm. The dimension of the first protrusion 117 in the left-to-right direction (width) is also slightly smaller than the dimension of the first groove 111 in the left-to-right direction (width), for example, it can be smaller by at least 0.3 mm and at most 1 mm. Similarly, the height of the first protrusion 117 in the vertical direction is also slightly smaller than the depth of the first groove 111 in the vertical direction, for example, it can be smaller by at least 0.3 mm and at most 1 mm.

[0049] Continue to refer to Figure 4When the cover 102 and the shell 101 are covered with each other, the first protrusion 117 is embedded in the first groove 111. Furthermore, the first end surface 112 of the shell 101 and the first lower surface 116 of the cover 102 are vertically opposed. The first bottom surface 113 of the first groove 111 and the second lower surface 118 of the first protrusion 117 are vertically opposed. The first side surface 114 of the first groove 111 and the second side surface 119 of the first protrusion 117 are horizontally opposed (also in the front-to-back direction). As a result, an extended gap (i.e., the gap formed by the extension path of the first turning portion 115) is formed between the exterior of the cover 102 and the shell 101 and the spray electrode 201. Taking the long sides of the width of the cover 102 and shell 101 as an example, when gas enters the long side (left side) of the cover 102 and shell 101 into the long side (left side) of the accommodating chamber 103 of the shell 101, it sequentially passes through the gap between the first end surface 112 and the first lower surface 116, the gap between the first side surface 114 and the second side surface 119, and the gap between the first bottom surface 113 and the second lower surface 118. Thus, a roughly Z-shaped first transition portion 115 is formed between the exterior of the cover 102 and shell 101 and the spray electrode 201. This first transition portion 115 can significantly reduce the frequency of sparking in the gap between the cover 102 and shell 101 and the spray electrode 201. In particular, even when the chamber pressure gradually increases (higher than the normal operating pressure of a plasma device), this sparking can be suppressed.

[0050] Furthermore, by forming the first transition portion 115, even if there is a larger gap between the cover 102 and the shell 101 (a gap of 0.3 mm or more and 1 mm or less as described above), the frequency of sparks occurring in this gap can be suppressed. This can reduce the difficulty of assembling the cover 102 and the shell 101 and reduce the required processing accuracy.

[0051] Reference Figure 5 , and auxiliary reference Figure 2At both ends of the short side of the spray electrode 201 (the front end and the rear end in the accompanying drawings), due to the short gap (i.e., the length of the gap extending in the left-right direction), sparking is more likely to occur in this case. To this end, a turning portion (hereinafter also referred to as the second turning portion 120 for ease of distinction) can be further formed at both ends of the short side of the spray electrode 201. Specifically, the recessed area 106 of the shell 101 includes two second grooves 121, which are respectively formed on one side of the short side wall of the wall 110 (i.e., the front and rear ends of the wall 110). The second groove 121 extends along the width direction of the shell 101 (the left-right direction in the accompanying drawings), and the second groove 121 is separated from the first groove 111 in the front-to-back direction. The thickness of the short side wall of the wall 110 along the length direction of the shell 101 is thicker than the thickness of the long side wall of the wall 110 along the width direction of the shell 101. That is, the thickness of the front and rear ends of the wall portion 110 along the front-to-back direction is thicker than the thickness of the left and right ends of the wall portion 110 along the left-to-right direction. The second groove portion 121 of the wall portion 110 can penetrate the wall portion 110 in the left-to-right direction of the shell portion 101. The second groove portion 121 has a third side surface 122 and a fourth side surface 123 that are opposed to each other in the front-to-back direction of the wall portion 110, and a second bottom surface 124 at the bottom. When viewed from the left-to-right direction, the cross-section of the second groove portion 121 is generally U-shaped, that is, the third side surface 122, the fourth side surface 123, and the second bottom surface 124 form a U-shape.

[0052] Correspondingly, the protruding region 105 of the cover 102 has a second protrusion 125 that protrudes downward. The second protrusion 125 is formed on one side of the short side of the cover 102 and extends along the width of the cover 102. The second protrusion 125 is spaced apart from the first protrusion 117 in the front-to-back direction. Specifically, the second protrusion 125 includes two locations, one located on either side of the first protrusion 117 in the front-to-back direction and spaced apart from the first protrusion 117 in the front-to-back direction. The second protrusion 125 has a fifth side surface 126 and a sixth side surface 127 that face away from each other in the front-to-back direction of the cover 102, and a third lower surface 128 located at the bottom. The third lower surface 128 protrudes downward relative to the first lower surface 116 of the cover 102. The length of the second protrusion 125 is slightly smaller than the length of the second groove 121. Although not particularly limited, the length of the second protrusion 125 can be smaller by 0.3 mm or more and 1 mm or less than the length of the second groove 121. The width of the second protrusion 125 is also slightly smaller than the width of the second groove 121, for example, it can be smaller by 0.3 mm or more and 1 mm or less. In addition, the height of the second protrusion 125 is also slightly smaller than the depth of the second groove 121, for example, it can be smaller by 0.3 mm or more and 1 mm or less.

[0053] When the cover 102 and the shell 101 are covered with each other, the second protrusion 125 is inserted into the second groove 121. Furthermore, the first end surface 112 of the shell 101 and the first lower surface 116 of the cover 102 are vertically opposed. The second bottom surface 124 of the second groove 121 is vertically opposed to the third lower surface 128 of the second protrusion 125. The third side surface 122 and the fourth side surface 123 of the second groove 121 are respectively opposed to the fifth side surface 126 and the sixth side surface 127 of the second protrusion 125. Thus, a second transition portion 120 with an extended gap is formed between the exterior of the cover 102 and the shell 101 and the first transition portion 115. Before reaching the first turning portion 115 from both ends of the cover 102 and the shell 101 in the front-to-back direction, the gas passes through the gap between the first end surface 112 and the first lower surface 116, the gap between the third side surface 122 and the fifth side surface 126, the gap between the second bottom surface 124 and the third lower surface 128, the gap between the fourth side surface 123 and the sixth side surface 127, and the gap between the first end surface 112 and the first lower surface 116. Thus, a second turning portion 120, which has multiple turns, is formed between the outside of the cover 102 and the shell 101 and the first turning portion 115. This second turning portion 120 can further reduce the frequency of sparking in the gap between the short sides of the cover 102 and the shell 101 and the short sides of the spray electrode 201. In particular, this sparking can be suppressed even when the chamber pressure gradually increases (higher than the normal operating pressure of a plasma apparatus).

[0054] Furthermore, by forming the second transition portion 120, even if there is a larger gap between the cover 102 and the shell 101 (a gap of 0.3 mm or more and 1 mm or less as described above), the frequency of sparks occurring in this gap can be suppressed. This can reduce the difficulty of assembling the cover 102 and the shell 101 and reduce the required processing accuracy.

[0055] Furthermore, although the above description describes an example in which the shell 101 has the recessed region 106 and the lid 102 has the protruding region 105, the present invention is not limited thereto. The shell 101 may have the protruding region 105 and the lid 102 may have the recessed region 106, or the shell 101 may have both the recessed region 106 and the protruding region 105, and the lid 102 may also have both the recessed region 106 and the protruding region 105.

[0056] In addition, although the above description describes an example in which the first turning portion 115 is formed on both sides (left and right ends) of the long side of the spray electrode 201, and the first turning portion 115 and the second turning portion 120 are formed on both sides (front and back ends) of the short side of the spray electrode 201, the present invention is not limited to this. For example, multiple first turning portions 115 may be formed on both sides of the long side of the spray electrode 201, and multiple second turning portions 120 may be formed on both sides of the short side of the spray electrode 201.

[0057] Furthermore, while the above description describes an example where the first turning portion 115 is formed in a Z-shape, including the gap between the first end surface 112 and the first lower surface 116, the gap between the first side surface 114 and the second side surface 119, and the gap between the first bottom surface 113 and the second lower surface 118, the present invention is not limited thereto. The first turning portion 115 may also have various other turning shapes, such as the same shape as the second turning portion 120, or a shape such as a rectangular pulse or a sine wave formed by interlocking multiple protrusions and multiple grooves.

[0058] Likewise, the shape of the second turning portion 120 is not limited thereto, and may be formed in a shape in which a plurality of protrusions and a plurality of grooves engage with each other.

[0059] Reference Figures 6 to 10 As described above, the shell 101 and the cover 102 can be components formed by splicing together multiple components made of shielding materials such as ceramics.

[0060] Reference Figure 7 And auxiliary reference Figure 6 In some embodiments, to reduce processing difficulty and lower costs, the shell 101 may include multiple first shielding members 129, which are spliced ​​along the length direction of the spray electrode 201 (the front-to-back direction in the accompanying drawings). It should be noted that the structures of the first shielding members 129 are not necessarily identical. For example, the wall portion 110 of the outer first shielding member 129 may each have a second groove 121 formed on one side of the short side, while the wall portion 110 of the middle first shielding member 129 does not have such a second groove 121. In addition, it should be noted that although the first shielding members 129 are described above as being spliced ​​along the length direction of the spray electrode 201, other configurations are not limited thereto. For example, in one specific example, the first shielding member 129 includes a shielding member whose wall portion 110 is generally U-shaped when viewed from above, and a shielding member whose wall portion 110 is generally linear. One U-shaped shielding member needs to be spliced ​​with two linear shielding members.

[0061] Continue to refer to Figure 6Similarly, the cover 102 may also include multiple second shielding members 130, which are spliced ​​along the length direction (the front-to-back direction in the figures) of the spray electrode 201. Similarly, the structures of the second shielding members 130 are not necessarily identical. For example, the lower portions of the two outer second shielding members 130 may be formed with the second protrusion 125, while the lower portion of the second shielding member 130 located in the middle may not be formed with the second protrusion 125.

[0062] The locations where the multiple first shielding members 129 are joined together and the locations where the multiple second shielding members 130 are joined together are staggered along the length of the spray electrode 201. By staggering the locations where the multiple first shielding members 129 are joined together and the locations where the multiple second shielding members 130 are joined together in the front-to-back direction, their respective joint structures can be independently configured, thereby preventing gaps between them from being connected, which would complicate the joint structure and even cause abnormal sparks at adjacent locations.

[0063] Reference Figure 7 、 Figure 8 Of the two joined first shielding members 129, one has a third protrusion 131 that protrudes in the direction of their joining, and the other has a third groove 132 that extends in the direction of the third protrusion 131. The third protrusion 131 fits into the third groove 132. In the following description, to facilitate differentiation between the first shielding members 129, one of the two joined first shielding members 129 is referred to as the "first male shield 129a" and the other as the "first female shield 129b." The first male shield 129a has the third protrusion 131, and the first female shield 129b has the third groove 132.

[0064] When viewed from above, the wall portion 110 of the first female shield 129b is roughly U-shaped. Furthermore, a portion of the accommodating cavity 103 is formed between the two long side walls of the first female shield 129b. The first female shield 129b has two third grooves 132, located at either end of the rear end of the first female shield 129b. The structures of the two third grooves 132 are roughly identical, and one of the third grooves 132 will be used as an example for description. The third groove 132 is formed on the side of the wall portion 110 facing the accommodating cavity 103. The third groove 132 extends inward along the length of the first female shield 129b from the second end surface 133 of the first female shield 129b, located at the end opposite the short side wall (referred to as the back in the drawings). When viewed from the side of the second end surface 133 of the first female shield 129b, or when viewed from above, the third groove 132 is roughly stepped. The third groove portion 132 has a first inner mating surface 134, one end of which is connected to the first end surface 112 of the wall portion 110, and the other end of which extends downward. A step is formed along the longitudinal direction (front-to-back direction) of the first female shield 129b between the first inner mating surface 134 and the first side surface 114 of the adjacent first groove portion 111. For example, the distance between the first inner mating surface 134 and the center of the width direction of the accommodating cavity 103 is greater than the distance between the first side surface 114 and the same position of the accommodating cavity 103. The third groove portion 132 has a second inner mating surface 135, which is located below the first bottom surface 113 of the first groove portion 111 and connected to the other end of the first inner mating surface 134. Thus, a step is formed along the vertical direction of the first female shield 129b between the second inner mating surface 135 and the first bottom surface 113 of the adjacent first groove portion 111. The third groove portion 132 has a third inner mating surface 136. One end of the third inner mating surface 136 is connected to the second inner mating surface 135, and the other end of the third inner mating surface 136 extends downward. A step is formed between the third inner mating surface 136 and the adjacent cavity side surface 137 of the accommodating cavity 103 along the front-to-back direction of the first female shield 129b. For example, the distance between the third inner mating surface 136 and the center of the accommodating cavity 103 in the width direction is greater than half the width of the accommodating cavity 103. The third groove portion 132 has a fourth inner mating surface 138, which is located below the bottom of the accommodating cavity 103 and connected to the other end of the third inner mating surface 136. The third groove portion 132 has a fifth inner mating surface 139, which respectively connects the first inner mating surface 134 and the first side surface 114, the second inner mating surface 135 and the first bottom surface 113, and the third inner mating surface 136 and the cavity side surface 137 adjacent to the accommodating cavity 103.The third groove portion 132 has a sixth inner mating surface 140, which is opposite the third inner mating surface 136 and is substantially coplanar with the adjacent cavity side surface 137 of the accommodating cavity 103. The sixth inner mating surface 140 connects the fourth inner mating surface 138 of the third groove portion 132 and the bottom of the accommodating cavity 103. Thus, a step is formed between the sixth inner mating surface 140 and the bottom of the accommodating cavity 103 along the width direction of the first female shield 129b.

[0065] The first male shield 129a has a third protrusion 131, which is formed by abutting the ends of one long side wall of the first male shield 129a and the first female shield 129b. The third protrusion 131 extends outward (frontward) along the length of the first male shield 129a from a third end surface 141 at the longitudinal end of the first male shield 129a. When viewed from one longitudinal end of the first male shield 129a (the end forming the third protrusion 131) or from a top view, the third protrusion 131 has a generally stepped shape. The third protrusion 131 has a first outer mating surface 142, one end of which is connected to the first end surface 112 of the wall portion 110 and the other end of which extends downward. The distance between the first outer mating surface 142 and the adjacent first side surface 114 of the first groove portion 111 is less than the distance between the outer surface of the first male shield 129a and the first side surface 114. As a result, a step is formed between the first outer mating surface 142 and the outer surface of the first male shield 129a. The third protrusion 131 has a second outer mating surface 143, which is located below the first bottom surface 113 of the first groove 111 and connected to the other end of the first outer mating surface 142. The third protrusion 131 has a third outer mating surface 144, one end of which is connected to the second outer mating surface 143, and the other end of which extends downward. A step is formed between the third outer mating surface 144 and the first outer mating surface 142, along the vertical direction of the first male shield 129a. Furthermore, a step is formed between the third outer mating surface 144 and the outer surface of the first male shield 129a, along the length of the first male shield 129a. The third protrusion 131 has a fourth outer mating surface 145, which is located below the bottom of the accommodating cavity 103 and connected to the other end of the third outer mating surface 144. The third protrusion 131 has a fifth outer mating surface 146 . The fifth outer mating surface 146 is located at a distal end of the third protrusion 131 .

[0066] When the first female shield 129b and the first male shield 129a are joined together, the third protrusion 131 is inserted into the third groove 132. In this state, the first inner mating surface 134 of the third groove 132 and the first outer mating surface 142 of the third protrusion 131 oppose each other along the width direction of the housing 101. The second inner mating surface 135 of the third groove 132 and the second outer mating surface 143 of the third protrusion 131 oppose each other along the vertical direction of the housing 101. The third inner mating surface 136 of the third groove 132 and the third outer mating surface 144 of the third protrusion 131 oppose each other along the width direction of the housing 101. The fourth inner mating surface 138 of the third groove 132 and the fourth outer mating surface 145 of the third protrusion 131 oppose each other along the vertical direction of the housing 101. The fifth inner mating surface 139 of the third groove 132 and the fifth outer mating surface 146 of the third protrusion 131 face each other along the length direction of the housing 101. The second end surface 133 of the first female shield 129b and the third end surface 141 of the first male shield 129a face each other.

[0067] Thus, by embedding the third protrusion 131 into the third groove 132, a third turning portion 147 can be formed between the outside of the shell 101 and the spray electrode 201, extending from one side of the long side of the shell 101 to one side of the long side of the spray electrode 201. The third turning portion 147 extends from one side of the long side of the shell 101 to one side of the long side of the spray electrode 201, and includes: a gap between the second end face 133 and the third end face 141, a gap between the first inner mating surface 134 and the first outer mating surface 142, a gap between the second inner mating surface 135 and the second outer mating surface 143, a gap between the third inner mating surface 136 and the third outer mating surface 144, and a gap between the fifth inner mating surface 139 of the third groove 132 and the fifth outer mating surface 146 of the third protrusion 131. The third turning portion 147 can greatly reduce the frequency of sparking in the gap between one side of the long side of the shell 101 and one side of the long side of the spray electrode 201 .

[0068] Furthermore, since the first inner mating surface 134 and the first outer mating surface 142 extend to the lower side of the first bottom surface 113 of the first groove portion 111 respectively, when the third protrusion 131 is embedded in the third groove portion 132, at the position where the third protrusion 131 is embedded in the third groove portion 132, the gap between the first bottom surface 113 of the shell portion 101 and the second lower surface 118 of the cover portion 102 that are opposite to each other is covered, that is, the gap between the first groove portion 111 of the recessed area 106 and the first protrusion 117 of the protruding area 105 that are connected (opposed) to each other is covered, which can prevent the spark phenomenon caused by the partial gap in the third turning portion 147 and the partial gap in the first turning portion 115 being linearly connected along the width direction of the shell portion 101.

[0069] Furthermore, since the third inner mating surface 136 and the fourth outer mating surface 145 extend to the lower side of the bottom of the accommodating cavity 103 respectively, when the third protrusion 131 is embedded in the third groove 132, the gap between the side of the spray electrode 201 and the bottom of the accommodating cavity 103 is covered, which can prevent the spark phenomenon caused by the partial gap in the third turning portion 147 and the gap between the side of the spray electrode 201 and the bottom of the accommodating cavity 103 being linearly connected along the width direction of the shell 101.

[0070] Furthermore, although the above description describes an example in which the first male shield 129a has one third protrusion 131 and the first female shield 129b has one third groove 132, the present invention is not limited thereto. The first male shield 129a may have multiple third protrusions 131, and the first female shield 129b may have multiple third grooves 132. The multiple third protrusions 131 and the multiple third grooves 132 may engage with each other to form multiple third turning portions 147. Furthermore, the first male shield 129a may have both the third protrusion 131 and the third groove 132, and the first female shield 129b may also have both the third protrusion 131 and the third groove 132.

[0071] Reference Figure 9 、 Figure 10 And auxiliary reference Figure 6 As described above, the cover 102 can include multiple second shielding members 130, which are linearly connected along the length of the shower electrode 201. One of the two connected second shielding members 130 has a fourth protrusion 148 that protrudes along the direction of their connection, and the other has a fourth groove 149 that extends along the direction of the fourth protrusion 148. The fourth protrusion 148 fits into the fourth groove 149. In the following description, to facilitate differentiation between the second shielding members 130, one of the two connected second shielding members 130 is referred to as the "second male shield 130a" and the other as the "second female shield 130b." The second male shield 130a has the fourth protrusion 148, and the second female shield 130b has the fourth groove 149.

[0072] The fourth protrusion 148 extends outward from a fourth end surface 150, which serves as one longitudinal end of the second male shield 130a. When viewed from the side of the fourth end surface 150, the fourth protrusion 148 is L-shaped. The fourth protrusion 148 includes a first extension arm 151 extending in the width direction (left-right direction) of the second male shield 130a. The first extension arm 151 has a first outer extension surface 152 and a second outer extension surface 153. The first outer extension surface 152 is located at the distal end of the first extension arm 151, inward relative to the outer surface of the second male shield 130a. This creates a step in the front-to-back direction of the second male shield 130a between the first outer extension surface 152 and the outer surface of the second male shield 130a. The second outer extension surface 153 is located below the first extension arm 151 and above the first lower surface 116 of the cover 102. Fourth protrusion 148 includes a second extension arm 154 extending in the vertical direction of second male shield 130a. Second extension arm 154 has a third outer extension surface 155. One end of third outer extension surface 155 is connected to second outer extension surface 153, and the other end of third outer extension surface 155 extends downward to a position connected to second lower surface 118 of first protrusion 117. Fourth protrusion 148 also has a first protrusion surface 156 at the distal end of the protrusion and a second protrusion surface 157 located on the inner side.

[0073] The fourth groove 149 extends inward from the fifth end surface 158, which is one longitudinal end of the second female shield 130b. When viewed from the side of the fifth end surface 158, the fourth groove 149 has an L-shape. The fourth groove 149 includes a first inner extension surface 159 parallel to the vertical direction. The first inner extension surface 159 extends inward from the rear end of the second female shield 130b in the front-to-back direction, on the side closer to the outer surface of the second female shield 130b. The fourth groove 149 includes a second inner extension surface 160, which extends inward from the rear end of the second female shield 130b in the front-to-back direction, perpendicular to the first inner extension surface 159. The fourth groove 149 includes a third inner extension surface 161, one end of which is connected to the second inner extension surface 160 and the other end of which extends downward to a position where it connects to the second lower surface 118 of the first protrusion 117. The fourth groove portion 149 includes a third bottom surface 162, which is located at the bottom of the fourth groove portion 149 along the longitudinal direction (front-back direction) of the second female shield 130b. The fourth groove portion 149 includes a fourth inner extending surface 163, which extends from the upper portion of the second female shield 130b to the second lower surface 118 of the second protrusion 125 of the second female shield 130b. The fourth inner extending surface 163 is opposed to the third inner extending surface 161 with a gap therebetween along the width direction of the second female shield 130b.

[0074] When the second female shield 130b and the second male shield 130a are joined together, the fourth protrusion 148 is inserted into the fourth groove 149. In this state, the first outer extending surface 152 of the fourth protrusion 148 and the first inner extending surface 159 of the fourth groove 149 oppose each other along the width direction of the cover 102. The second outer extending surface 153 of the fourth protrusion 148 and the second inner extending surface 160 of the fourth groove 149 oppose each other along the vertical direction of the cover 102. The third outer extending surface 155 of the fourth protrusion 148 and the third inner extending surface 161 of the fourth groove 149 oppose each other along the width direction of the cover 102. The first protruding surface 156 of the fourth protrusion 148 and the third bottom surface 162 of the fourth groove 149 oppose each other along the length direction of the cover 102. The second protruding surface 157 of the fourth protrusion 148 and the fourth inner extending surface 163 of the fourth groove 149 oppose each other along the width direction of the cover 102.

[0075] Thus, by fitting the fourth protrusion 148 into the fourth groove 149, a fourth transition portion 164 can be formed between the exterior of the cover 102 and the spray electrode 201, extending from one long side of the cover 102 to one long side of the spray electrode 201. The fourth transition portion 164, extending from one long side of the cover 102 to one long side of the spray electrode 201, includes a gap between the first outer extending surface 152 and the first inner extending surface 159, a gap between the first protruding surface 156 and the third bottom surface 162, and a gap between the second protruding surface 157 and the fourth inner extending surface 163. This fourth transition portion 164 significantly reduces the frequency of sparks occurring in the gap between the long side of the cover 102 and one long side of the spray electrode 201.

[0076] Furthermore, by fitting fourth protrusion 148 into fourth groove 149, a fifth transition portion 165 is formed between the exterior of lid 102 and first end surface 112 of shell 101, extending from the top of lid 102 to first end surface 112 of shell 101. Fifth transition portion 165, from the top of lid 102 to first end surface 112 of shell 101, includes a gap between first outer extending surface 152 and first inner extending surface 159, a gap between second outer extending surface 153 and second inner extending surface 160, and a gap between third outer extending surface 155 and third inner extending surface 161. Fifth transition portion 165 significantly reduces the frequency of sparks in the gap between the top of lid 102 and first end surface 112 of shell 101.

[0077] It should be noted that while the above example illustrates the second male shield 130a having the fourth protrusions 148 and the second female shield 130b having the fourth grooves 149, the number of these protrusions 148 is not particularly limited. For example, one of the two joined second shields 130 (i.e., the second male shield 130a and the second female shield 130b) may have two fourth protrusions 148 protruding along the direction of their joining, while the other may have two fourth grooves 149 extending along the direction of the fourth protrusions 148, with each fourth protrusion 148 fitting into its corresponding fourth groove 149. Furthermore, the two fourth protrusions 148 are provided on either side of the width of the corresponding second shield 130 (i.e., the second male shield 130a), while the two fourth grooves 149 are provided on either side of the width of the corresponding second shield 130 (i.e., the second female shield 130b). In this way, the gap generated when the two second shielding parts 130 of the cover 102 are spliced ​​together and the gap generated when the cover 102 and the shell 101 are spliced ​​together can be avoided from being linearly connected, which can greatly reduce the frequency of sparks in the gap from the top of the cover 102 to the spray electrode 201.

[0078] In addition, a structure such as the above-mentioned protruding structure and recessed structure may be formed at the position of the RF electrode feeding hole 109 of the cover portion 102 to extend the path of the gap.

[0079] As described above, the shielding structure 100 of the first embodiment can shield the shower electrode 201 of the shower head 200. The shower head 200 according to the second embodiment includes the shower electrode 201, which is shielded by the shielding structure 100 of the first embodiment. Because the shielding structure 100 of the first embodiment can suppress sparking in the gaps of the shielding structure 100, it can reliably shield the shower electrode 201.

[0080] As described above, the showerhead 200 of the second embodiment can be used in a plasma device. A plasma device according to a third embodiment includes a plasma processing chamber, wherein the chamber includes the showerhead 200 of the above embodiment. The plasma device according to the third embodiment can suppress sparking in the gaps of the shield structure 100 of the showerhead 200, thereby improving plasma uniformity.

[0081] Although examples of the present embodiment have been shown and described, those skilled in the art will appreciate that various changes, modifications, substitutions, and variations may be made to these embodiments without departing from the principles and intent of the present embodiment, and the scope of the present embodiment is defined by the claims and their equivalents.

Claims

1. Shielding structure, shielding the spray electrode, characterized in that: include: a shell portion, wherein the shell portion is formed with a receiving cavity for receiving the spray electrode, and a avoidance groove is formed at the bottom of the receiving cavity, and when the spray electrode is received in the receiving cavity, the spray hole of the spray electrode is exposed from the avoidance groove; a cover portion, covering the accommodating cavity, and wrapping the spray electrode together with the shell portion to shield the spray electrode; Among the shell part and the cover part, one has a protruding area protruding toward the other, and the other has a recessed area recessed along the protruding direction of the protruding area. When the cover part and the shell part are covered with each other, the cover part covers the accommodating cavity, and the protruding area and the recessed area are connected to each other in a manner of surrounding the outer periphery of the spray electrode.

2. The shielding structure according to claim 1, wherein: The shell portion has a wall portion surrounding the accommodating cavity, the wall portion has the concave area, and the concave area includes a first groove portion, which is formed on a side of the wall portion adjacent to the accommodating cavity and entirely surrounds the accommodating cavity; The cover portion has the protruding area, the protruding area includes a first protrusion, the first protrusion protruding from a middle portion of a surface of the cover portion opposite to the shell portion; When the cover portion and the shell portion are covered with each other, the first protrusion is fitted into the first groove.

3. The shielding structure according to claim 2, wherein: The recessed area includes a second groove portion, the second groove portion is formed on one side of a short side wall of the wall portion, extends along the width direction of the shell portion, and is separated from the first groove portion; The protruding area includes a second protruding portion, the second protruding portion is formed on one side of the short side of the cover portion and extends along the width direction of the cover portion, and the second protruding portion is spaced apart from the first protruding portion; When the cover portion and the shell portion are covered with each other, the second protrusion is fitted into the second groove.

4. The shielding structure according to any one of claims 1 to 3, characterized in that: The shell portion includes a plurality of first shielding members, and the plurality of first shielding members are spliced ​​along the length direction of the spray electrode; The cover portion includes a plurality of second shielding members, and the plurality of second shielding members are spliced ​​along the length direction of the spray electrode; Positions where the plurality of first shielding members are spliced ​​together and positions where the plurality of second shielding members are spliced ​​together are staggered along the length direction of the spray electrode.

5. The shielding structure according to any one of claims 1 to 3, characterized in that: The shell portion includes a plurality of first shielding members, and the plurality of first shielding members are spliced ​​along the length direction of the spray electrode; Among the two first shielding members spliced ​​together, one has a third protrusion protruding along the splicing direction, and the other has a third groove extending along the protruding direction of the third protrusion, and the third protrusion is embedded in the third groove.

6. The shielding structure according to claim 5, characterized in that: When the third protrusion is fitted into the third groove, a gap between the protruding region and the recessed region is covered at a position where the third protrusion is fitted into the third groove.

7. The shielding structure according to any one of claims 1 to 3, characterized in that: The cover portion includes a plurality of second shielding members, and the plurality of second shielding members are linearly spliced ​​along the length direction of the spray electrode; Among the two second shielding members spliced ​​together, one has a fourth protrusion protruding along the splicing direction, and the other has a fourth groove extending along the protruding direction of the fourth protrusion, and the fourth protrusion is embedded in the fourth groove.

8. The shielding structure according to claim 2, characterized in that: The cover portion includes a plurality of second shielding members, and the plurality of second shielding members are linearly spliced ​​along the length direction of the spray electrode; One of the two second shielding members joined together has two fourth protrusions protruding along the direction of their joining together, and the other has two fourth grooves extending along the protruding direction of the fourth protrusions, with each fourth protrusion being respectively embedded in the fourth groove opposite thereto; The two fourth protrusions are respectively arranged on both sides of the corresponding second shielding member in the width direction; The two fourth grooves are respectively provided on both sides of the corresponding second shielding member in the width direction.

9. A shower head comprising a shower electrode, characterized in that: It further comprises the shielding structure according to any one of claims 1 to 8, wherein the spray electrode is shielded by the shielding structure.

10. Plasma equipment, characterized in that The shower head according to claim 9 is included.

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