A lifting retaining ring and a concentric calibration method

Abstract

The present application discloses a lifting retaining ring and a concentric calibration method, belonging to the technical field of chemical mechanical polishing. The lifting retaining ring includes: a lifting retaining ring body and a distance detection device; the lifting retaining ring body surrounds the outside of the polishing pad during use; at least three measurement positions are arranged on the lifting retaining ring body in the circumferential direction; the distance detection device is arranged on the lifting retaining ring body and is used to detect whether the distances from each measurement position to the edge of the polishing pad are equal, so as to judge whether to adjust the position of the lifting retaining ring body according to the detection result. In the present application, a distance detection device is added to the lifting retaining ring body, and it is detected by the distance detection device whether the distances from multiple measurement positions in the circumferential direction of the lifting retaining ring body to the polishing pad are equal, so as to judge whether the lifting retaining ring is concentric with the polishing pad, enabling the lifting retaining ring to have the function of automatically calibrating concentricity with the polishing pad, improving the concentric alignment accuracy between the lifting retaining ring and the polishing pad, and providing a reference for calibrating the lifting retaining ring.

Description

Technical Field

[0001] This application relates to the technical field of chemical mechanical polishing, and particularly to a lifting retaining ring and a concentric calibration method. Background Art

[0002] Chemical Mechanical Polish (CMP) in the chip manufacturing process is a technology for globally planarizing the surface of a wafer through physical and chemical reactions. During the polishing process, there is an annular baffle called a lifting retaining ring around the periphery of the polishing pad, whose function is to prevent the impurities and polishing liquid ground off from splashing and contaminating the inside of the machine during wafer polishing. During the polishing process, the lifting retaining ring will be frequently lifted and lowered. Due to the small number of mechanisms for fixing the retaining ring, it is prone to displacement after frequent lifting and lowering, resulting in its non-concentricity with the polishing pad. Therefore, it is necessary to calibrate the lifting retaining ring. Currently, the steps for calibrating the lifting retaining ring are as follows: When performing maintenance, an engineer adjusts the lifting retaining ring to be concentric with the polishing pad by visual observation. As Figure 1 shown in the existing lifting retaining ring 1, since there are only two fixing mechanisms 2 and no calibration device, the displacement caused by the frequent lifting and lowering of the lifting retaining ring can only be adjusted manually by humans, and the manual adjustment has low precision and is extremely prone to errors, resulting in the rotation of the polishing pad 3 rubbing against the lifting retaining ring during polishing. Therefore, how to improve the concentric alignment accuracy between the lifting retaining ring and the polishing pad is a technical problem that needs to be solved by those skilled in the art at present. Summary of the Invention

[0003] The purpose of this application is to provide a lifting retaining ring and a concentric calibration method, so as to improve the concentric alignment accuracy between the lifting retaining ring and the polishing pad, avoid the lifting retaining ring rubbing against the polishing pad when it rises, and achieve a better polishing effect.

[0004] To achieve the above purpose, this application provides a lifting retaining ring, including: a lifting retaining ring body and a distance detection device; the lifting retaining ring body surrounds the outside of the polishing pad during use;

[0005] At least three measurement positions are arranged on the lifting retaining ring body in the circumferential direction; the distance detection device is arranged on the lifting retaining ring body and is used to detect whether the distances from each of the measurement positions to the edge of the polishing pad are equal, so as to judge whether to adjust the position of the lifting retaining ring body according to the detection result.

[0006] Optionally, the distance detection device arranged on the lifting retaining ring body is further used to detect whether the distances from each of the measurement positions to the edge of the polishing pad are equal after detecting that the distances from each of the measurement positions to the edge of the polishing pad are equal, so as to judge whether to adjust the position of the polishing pad according to the detection result; the polishing pad is placed on the polishing pad.

[0007] Optionally, three measurement positions are provided on the circumferential direction of the lifting retaining ring body; the distance detection device includes three distance detection components; the three distance detection components are respectively arranged at the three measurement positions.

[0008] Optionally, through holes are provided at the measurement positions; the distance detection component includes a probe and a telescopic distance detection fitting;

[0009] The probe is arranged inside the lifting retaining ring body; the telescopic distance detection fitting is arranged outside the lifting retaining ring body; the telescopic distance detection fitting is connected to the probe through the through hole, and is used to detect the telescopic distance of the probe after the probe extends and retracts to contact the edge of the grinding disc, so as to detect whether the distances from the three measurement positions to the edge of the grinding disc are equal according to the telescopic distance of the probe.

[0010] Optionally, the telescopic distance detection fitting is a ball screw structure with scale marks.

[0011] Optionally, the probe is an arc-shaped baffle.

[0012] Optionally, the included angle between adjacent measurement positions and the center of the lifting retaining ring body is 120°.

[0013] To achieve the above object, the present application also provides a concentric calibration method, which is applied to the above-mentioned lifting retaining ring, and includes:

[0014] Raise the lifting retaining ring so that the grinding disc is located inside the lifting retaining ring; the lifting retaining ring includes a lifting retaining ring body and a distance detection device; at least three measurement positions are provided on the lifting retaining ring body; the distance detection device is arranged on the lifting retaining ring body;

[0015] Detect whether the distances from each measurement position to the edge of the grinding disc are equal through the distance detection device;

[0016] When it is detected that the distances from each measurement position to the edge of the grinding disc are not equal, adjust the position of the lifting retaining ring body.

[0017] Optionally, adjusting the position of the lifting retaining ring body includes:

[0018] After the first adjustment of the position of the lifting retaining ring body, repeatedly execute the step of detecting whether the distances from each measurement position to the edge of the grinding disc are equal through the distance detection device until it is detected that the distances from each measurement position to the edge of the grinding disc are not equal, and then adjust the position of the lifting retaining ring body until the distances from each measurement position to the edge of the grinding disc are equal.

[0019] Optionally, after making the distances from each of the positions to be measured to the edge of the grinding disk equal, the method further includes:

[0020] Placing a polishing pad on the grinding disk;

[0021] Detecting whether the distances from each of the positions to be measured to the edge of the polishing pad are equal by means of the distance detection device;

[0022] When it is detected that the distances from each of the positions to be measured to the edge of the polishing pad are not equal, adjusting the position of the polishing pad.

[0023] Optionally, adjusting the position of the polishing pad includes:

[0024] After making a first adjustment to the position of the polishing pad, repeatedly execute the step of detecting whether the distances from each of the positions to be measured to the edge of the polishing pad are equal by means of the distance detection device until, when it is detected that the distances from each of the positions to be measured to the edge of the polishing pad are not equal, adjusting the position of the polishing pad, until the distances from each of the positions to be measured to the edge of the polishing pad are equal.

[0025] Optionally, three positions to be measured are arranged on the lifting retaining ring body along the circumferential direction; the distance detection device includes three distance detection components; the three distance detection components are respectively arranged at the three positions to be measured; through holes are arranged at the positions to be measured; the distance detection component includes a probe and a telescopic distance detection fitting; the probe is arranged inside the lifting retaining ring body; the telescopic distance detection fitting is arranged outside the lifting retaining ring body; the telescopic distance detection fitting is connected to the probe through the through hole;

[0026] Detecting whether the distances from the three positions to be measured to the edge of the grinding disk are equal by means of the distance detection device includes:

[0027] After making each of the probes extend and retract to contact the edge of the grinding disk through each of the telescopic distance detection fittings, detecting the extension and retraction distances of each of the probes;

[0028] Detecting whether the distances from the three positions to be measured to the edge of the grinding disk are equal according to the extension and retraction distances of each of the probes.

[0029] Obviously, in this application, a distance detection device is added to the lifting retaining ring body. By detecting whether the distances from multiple positions to be measured in the circumferential direction of the lifting retaining ring body to the grinding disc are equal, it is determined whether the lifting retaining ring is concentric with the grinding disc, enabling the lifting retaining ring to have the function of automatically calibrating concentricity with the grinding disc, improving the concentric alignment accuracy between the lifting retaining ring and the grinding disc, and providing a reference for calibrating the lifting retaining ring. This application also provides a concentric calibration method. By using the lifting retaining ring with the function of automatically calibrating concentricity with the grinding disc provided in this application, the concentric calibration of the lifting retaining ring is assisted through the lifting retaining ring, thereby reducing the rubbing against the grinding disc during lifting, which is beneficial to reducing grinding defects such as scratches, and achieving a better grinding effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only the embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on the provided drawings.

[0031] Figure 1 FIG. 9 is a schematic structural diagram of a traditional lifting retaining ring;

[0032] Figure 2 FIG. 13 is a schematic structural diagram of a lifting retaining ring provided by an embodiment of the present application;

[0033] Figure 3 FIG. 1 is a flowchart of a concentric calibration method provided by an embodiment of the present application;

[0034] [[ID=)20]] Figure 4 FIG. 21 is a schematic structural diagram of a guiding mechanism in a fixing mechanism.

[0035] The reference numerals are explained as follows:

[0036] 1 - lifting retaining ring; 11 - arc-shaped baffle; 12 - ball screw structure with scale marks; 2 - fixing mechanism; 21 - support mechanism; 22 - floating mechanism; 23 - cylinder; 24 - nut; 3 - grinding disc. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0037] To make the objectives, technical solutions, and advantages of the embodiments of the present application clearer, the following will clearly and completely describe the technical solutions in the embodiments of the present application with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are some, but not all, of the embodiments of the present application. Based on the embodiments of the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts fall within the scope of protection of the present application.

[0038] An embodiment of the present application provides a lifting retaining ring, which may include: a lifting retaining ring body and a distance detection device; the lifting retaining ring body surrounds the outside of the grinding disc during use;

[0039] At least three positions to be measured are arranged on the lifting retaining ring body in the circumferential direction; the distance detection device is arranged on the lifting retaining ring body and is used to detect whether the distances from each position to be measured to the edge of the grinding disc are equal, so as to judge whether to adjust the position of the lifting retaining ring body according to the detection result.

[0040] It should be noted that a grinding pad is placed on the grinding disc, and the size of the grinding pad is slightly larger than that of the grinding disc. When an engineer replaces the grinding pad, due to the large size of the grinding pad, it is impossible to accurately align and fit the grinding pad with the grinding disc. When the retaining ring is lifted, it will lift the grinding pad and cause the edge to warp. Further, in order to improve the concentric alignment accuracy between the grinding pad and the grinding disc, in this embodiment, the distance detection device is arranged on the lifting retaining ring body and can also be used to detect whether the distances from each position to be measured to the edge of the grinding pad are equal after detecting that the distances from each position to be measured to the edge of the grinding disc are equal, so as to judge whether to adjust the position of the grinding pad according to the detection result; the grinding pad is placed on the grinding disc.

[0041] This embodiment does not limit the specific arrangement manner of the positions to be measured, as long as it is ensured that the positions to be measured are arranged at different positions on the downshift retaining ring body in the circumferential direction. They can be evenly arranged on the downshift retaining ring body in the circumferential direction or unevenly arranged on the downshift retaining ring body in the circumferential direction. For example, when three positions to be measured are arranged on the lifting retaining ring body in the circumferential direction, the included angle between adjacent positions to be measured and the center of the lifting retaining ring body can be 120°, that is, the three positions to be measured are evenly arranged on the downshift retaining ring body in the circumferential direction.

[0042] This embodiment does not limit the specific structure of the distance detection device, as long as it is ensured that the distance detection device can detect whether the distances from each position to be measured to the edge of the grinding disc are equal. It can be that the distance detection device includes a distance detection component, and this distance detection component is used to detect the distances from each position to be measured to the edge of the grinding disc, or it can be that the distance detection device includes multiple distance detection components, with one distance detection component arranged at each position to be measured, and each distance detection component is used to detect the distances from each position to be measured to the edge of the grinding disc. For example, three positions to be measured are arranged on the lifting retaining ring body in the circumferential direction; the distance detection device includes three distance detection components; the three distance detection components are respectively arranged at the three positions to be measured.

[0043] This embodiment does not limit the specific structure of each distance detection component, as long as it is ensured that each distance detection component can measure the distance from each position to be measured to the edge of the grinding disc. For example, there may be through holes provided at the positions to be measured; the distance detection component includes a probe and a telescopic distance detection fitting; the probe is arranged inside the lifting retaining ring body; the telescopic distance detection fitting is arranged outside the lifting retaining ring body; the telescopic distance detection fitting is connected to the probe through the through hole and is used to detect the telescopic distance of the probe after the probe is telescoped to contact the edge of the grinding disc, so as to detect whether the distances from the three positions to be measured to the edge of the grinding disc are equal according to the telescopic distance of the probe. It should be noted that in this example, the telescopic distance detection fitting is used to control the telescopic movement of the probe, so that the probe contacts the edge of the grinding disc, and the distance from the position to be measured to the edge of the grinding disc is determined by measuring the telescopic distance of the probe. In addition, in this embodiment, the telescopic distance detection fitting is connected to the probe through the through hole, and can also be used to, after detecting that the distances from the three positions to be measured to the edge of the grinding disc are equal, make the arc-shaped baffle telescopic to contact the edge of the grinding pad and then detect the telescopic distance of the arc-shaped baffle, so as to detect whether the distances from the three positions to be measured to the edge of the grinding pad are equal; the grinding pad is placed on the grinding disc.

[0044] This embodiment does not limit the specific structure of the telescopic distance detection fitting, as long as it is ensured that the telescopic distance detection fitting can control the telescopic movement of the probe and can detect the telescopic distance of the probe. For example, the telescopic distance detection fitting can be a ball screw structure with scale marks. It should be noted that the ball screw structure is a structure that can convert rotary motion into linear motion. In this embodiment, one end of the ball screw structure is connected to the probe inside the lifting retaining ring, and the other end is connected to the motor. By rotating the motor, the rotary motion is converted into linear motion to push the probe to telescopic, and at the same time, the telescopic distance of the probe can be observed through the scale marks on the ball screw structure. This embodiment does not limit the specific structure of the probe. For example, the probe can be an arc-shaped baffle; it can also be a flat plate.

[0045] Based on the above embodiments, the present application adds a distance detection device to the lifting retaining ring body, and detects whether the distances from multiple positions to be measured in the circumferential direction of the lifting retaining ring body to the grinding disc are equal, so as to determine whether the lifting retaining ring is concentric with the grinding disc, enabling the lifting retaining ring to have the function of automatically calibrating concentricity with the grinding disc, improving the concentric alignment accuracy between the lifting retaining ring and the grinding disc, and providing a reference for calibrating the lifting retaining ring.

[0046] Please refer to Figure 2 , Figure 2 which is a schematic structural diagram of a lifting retaining ring provided by an embodiment of the present application. The lifting retaining ring 1 may include: a lifting retaining ring 1 body and three distance detection components; the lifting retaining ring 1 body surrounds the outside of the grinding disc 3 during use;

[0047] There are three positions to be measured arranged circumferentially on the body of the lifting and lowering retaining ring 1; three distance detection components are respectively arranged at the three positions to be measured;

[0048] Through holes are arranged at the positions to be measured; the distance detection component includes an arc-shaped baffle 11 and a ball screw structure 12 with scale marks; the arc-shaped baffle 11 is arranged inside the body of the lifting and lowering retaining ring 1; the ball screw structure 12 with scale marks is arranged outside the body of the lifting and lowering retaining ring 1; the ball screw structure 12 with scale marks is connected to the arc-shaped baffle 11 through the through hole, and is used to detect the telescopic distance of the arc-shaped baffle 11 after the arc-shaped baffle 11 is telescoped to contact the edge of the grinding disc 3, so as to detect whether the distances from the three positions to be measured to the edge of the grinding disc 3 are equal according to the telescopic distance of the arc-shaped baffle 11; it is also used to, after detecting that the distances from the three positions to be measured to the edge of the grinding disc 3 are equal, make the arc-shaped baffle 11 telescoped to contact the edge of the grinding pad, and then detect the telescopic distance of the arc-shaped baffle 11, so as to detect whether the distances from the three positions to be measured to the edge of the grinding pad are equal according to the telescopic distance of the arc-shaped baffle 11; the grinding pad is placed on the grinding disc 3.

[0049] Based on the above embodiments, the present application detects whether the distances from the three positions to be measured in the circumferential direction of the body of the lifting and lowering retaining ring 1 to the grinding disc 3 are equal through the arc-shaped baffle 11 and the ball screw structure 12 with scale marks, so as to judge whether the lifting and lowering retaining ring 1 is concentric with the grinding disc 3, enabling the lifting and lowering retaining ring 1 to have the function of automatically calibrating concentricity with the grinding disc 3, improving the concentric alignment accuracy between the lifting and lowering retaining ring 1 and the grinding disc 3, and providing a reference for calibrating the lifting and lowering retaining ring 1; on the other hand, after adjusting the lifting and lowering retaining ring 1 to be concentric with the grinding disc 3, it also detects whether the distances from the three positions to be measured in the circumferential direction of the body of the lifting and lowering retaining ring 1 to the grinding pad are equal through the arc-shaped baffle 11 and the ball screw structure 12 with scale marks, so as to judge whether the grinding pad is concentric with the grinding disc 3, improving the concentric alignment accuracy between the grinding pad and the grinding disc 3, providing a reference for calibrating the grinding pad, making it more convenient for engineers to attach the grinding pad, and being more conducive to maintaining the concentricity of the grinding pad, the grinding disc 3 and the lifting and lowering retaining ring 1.

[0050] Please refer to Figure 3 , Figure 3 which is a flowchart of a concentric calibration method provided by an embodiment of the present application. The method may include:

[0051] S101: Raise the lifting and lowering retaining ring so that the grinding disc is located inside the lifting and lowering retaining ring; the lifting and lowering retaining ring includes a body of the lifting and lowering retaining ring and a distance detection device; at least three positions to be measured are arranged on the body of the lifting and lowering retaining ring; the distance detection device is arranged on the body of the lifting and lowering retaining ring.

[0052] It should be noted that a guiding mechanism is arranged in the two fixing mechanisms 2 of the lifting and lowering retaining ring, and the guiding mechanism is used to raise and lower the lifting and lowering retaining ring. As Figure 4As shown in the figure, the guiding mechanism includes a supporting mechanism 21, a floating mechanism 22 and a cylinder 23. Among them, the supporting mechanism 21 is a carrier for bearing the up-and-down movement of the lifting retaining ring 1 and connecting the cylinder 23. The lifting retaining ring 1 is fixed on the supporting mechanism 21. The floating mechanism 22 is used to move the lifting retaining ring 1 up and down. It is a telescopic mechanism that can ensure a certain deformation when the cylinder 23 moves up and down. When the cylinder 23 works, the supporting mechanism 21 receives an upward force, driving the lifting retaining ring 1 to move up; when the cylinder 23 contracts, the supporting mechanism 21 descends, driving the lifting retaining ring 1 to move down.

[0053] S102: Use a distance detection device to detect whether the distances from each position to be measured to the edge of the grinding disc are equal.

[0054] This embodiment does not limit the specific method of detecting whether the distances from the three positions to be measured to the edge of the grinding disc are equal. The specific detection method can be determined according to the specific structure of the distance detection device. For example, when there are three positions to be measured arranged circumferentially along the upper edge of the lifting retaining ring body; the distance detection device includes three distance detection components; the three distance detection components are respectively arranged at the three positions to be measured; there are through holes at the positions to be measured; the distance detection component includes a probe and a telescopic distance detection fitting; the probe is arranged inside the lifting retaining ring body; the telescopic distance detection fitting is arranged outside the lifting retaining ring body; when the telescopic distance detection fitting is connected to the probe through the through hole, to detect whether the distances from the three positions to be measured to the edge of the grinding disc are equal by the distance detection device, it can include: after each probe is extended or retracted by each telescopic distance detection fitting to contact the edge of the grinding disc, detecting the telescopic distance of each probe; and detecting whether the distances from the three positions to be measured to the edge of the grinding disc are equal according to the telescopic distances of each probe.

[0055] S103: When it is detected that the distances from the positions to be measured to the edge of the grinding disc are not equal, adjust the position of the lifting retaining ring body.

[0056] This embodiment does not limit the specific method of adjusting the position of the lifting retaining ring body, as long as it can ensure that the distances from the positions to be measured to the edge of the grinding disc are equal. For example, after the first adjustment of the position of the lifting retaining ring body, the steps of using the distance detection device to detect whether the distances from the positions to be measured to the edge of the grinding disc are equal are cyclically executed. Until it is detected that the distances from the positions to be measured to the edge of the grinding disc are not equal, the step of adjusting the position of the lifting retaining ring body is executed until the distances from the positions to be measured to the edge of the grinding disc are equal.

[0057] It should be noted that after manually loosening the nut 24 (fixed on the supporting mechanism) for fixing the lifting retaining ring as shown in Figure 2 the figure, the position of the lifting retaining ring can be manually adjusted.

[0058] Further, in order to improve the concentric alignment accuracy between the polishing pad and the polishing platen, after making the distances from each position to be measured to the edge of the polishing platen equal in this embodiment, the following steps may further be included: placing the polishing pad on the polishing platen; detecting whether the distances from each position to be measured to the edge of the polishing pad are equal through a distance detection device; when it is detected that the distances from each position to be measured to the edge of the polishing pad are not equal, adjusting the position of the polishing pad. This embodiment does not limit the specific manner of adjusting the position of the polishing pad, as long as it can ensure that the distances from each position to be measured to the edge of the polishing pad are equal. For example, after the first adjustment of the position of the polishing pad, the steps of detecting whether the distances from each position to be measured to the edge of the polishing pad are equal through the distance detection device are cyclically executed until it is detected that the distances from each position to be measured to the edge of the polishing pad are not equal, and then the position of the polishing pad is adjusted until the distances from each position to be measured to the edge of the polishing pad are equal.

[0059] Based on the above embodiments, the present application uses the lifting retaining ring with the function of automatically calibrating concentricity with the polishing platen as described above. The concentricity of the lifting retaining ring is calibrated with the assistance of the lifting retaining ring, so that the rubbing against the polishing platen during lifting can be reduced, which is beneficial to reducing polishing defects such as scratches, and achieving a better polishing effect.

[0060] The following specifically describes the above concentric calibration process with reference to Figure 2 , Figure 2 FIG. is a schematic structural diagram of a lifting retaining ring provided by an embodiment of the present application. The working principle of the lifting retaining ring is as follows:

[0061] Three movable arc-shaped baffles 11 are installed inside the lifting retaining ring 1. When the lifting retaining ring 1 rises, the three arc-shaped baffles 11 move inward to the inner ring to align and calibrate the concentric relative positions of the lifting retaining ring 1 and the polishing platen 3. A ball screw structure 12 with a scale mark at one end is installed. The ball screw structure 12 with a scale mark passes through a through hole on the lifting retaining ring 1 and is connected to the arc-shaped baffle 11, which can make the arc-shaped baffle 11 expand and contract. The scale helps to judge the inward and outward telescopic distances of the three arc-shaped baffles 11. After determining the relative distance between the lifting retaining ring 1 and the polishing platen 3, the numerical value of the scale is used to detect whether the lifting retaining ring 1 has a displacement each time for adjustment. The arc-shaped baffle 11 can also be used to assist in the concentric alignment of the polishing pad and the lifting retaining ring 1 and the centering and fitting of the polishing platen 3 during maintenance.

[0062] The process of using the lifting retaining ring 1 for concentric calibration is as follows:

[0063] 1. After the lifting retaining ring 1 is raised, the three arc-shaped baffles 11 move inward through the ball screw structure 12 with a scale mark. After the three arc-shaped baffles 11 contact the edge of the polishing platen 3, the movement stops;

[0064] 2. After step 1 is completed, respectively compare the relative distances between the three arc-shaped baffles 11 and the grinding disc 3. If they are the same, it is determined that the lifting retaining ring 1 and the grinding disc 3 are in a concentric state; if they are different, manually loosen the nut 24 that fixes the lifting retaining ring 1, manually adjust it to make the distances between the three arc-shaped baffles 11 and the grinding disc 3 the same, and then tighten the nut 24 to perform an initial concentric calibration.

[0065] 3. After the concentric calibration of the lifting retaining ring 1 and the grinding disc 3, when the engineer performs preventive maintenance and replaces the grinding pad, place the grinding pad on the grinding disc 3, and make the grinding pad contact with the arc-shaped baffles 11 on both sides to ensure that the grinding pad is also concentric with the lifting retaining ring 1.

[0066] 4. After the fitting is completed, move the arc-shaped baffle 11 to the initial position.

[0067] In this text, specific examples are used to elaborate on the principles and implementation manners of the present application, and the various embodiments are in a progressive relationship. Each embodiment focuses on the differences from other embodiments. For the same and similar parts among the various embodiments, reference can be made to each other. The description of the above embodiments is only used to help understand the method and its core idea of the present application. For those of ordinary skill in the art in this technical field, without departing from the principle of the present application, several improvements and modifications can also be made to the present application, and these improvements and modifications also fall within the protection scope of the claims of the present application.

[0068] It should also be noted that in this specification, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the term "comprising", "including" or any other variant thereof is intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements not only includes those elements, but also includes other elements not expressly listed, or further includes elements inherent to such process, method, article or device. Without further limitation, an element defined by the statement "including a..." does not exclude the existence of additional identical elements in the process, method, article or device including the element.

Claims

1. A lifting retaining ring, characterized in that: Comprising: A lifting retaining ring body and a distance detection device; When in use, the lifting retaining ring body surrounds the outside of the grinding disc; At least three measurement positions are arranged on the lifting retaining ring body along the circumferential direction; the distance detection device is arranged on the lifting retaining ring body and is used for detecting whether the distances from each of the measurement positions to the edge of the grinding disc are equal, so as to judge whether to adjust the position of the lifting retaining ring body according to the detection result; the distance detection device is further used for detecting whether the distances from each of the measurement positions to the edge of the grinding pad are equal after detecting that the distances from each of the measurement positions to the edge of the grinding disc are equal, so as to judge whether to adjust the position of the grinding pad according to the detection result; The grinding pad is placed on the grinding disc.

2. The lifting retaining ring according to claim 1, wherein Three measurement positions are arranged on the lifting retaining ring body along the circumferential direction; the distance detection device comprises three distance detection components; the three distance detection components are respectively arranged at the three measurement positions.

3. The lifting retaining ring according to claim 2, wherein, Through holes are arranged at the measurement positions; the distance detection component comprises a probe and a telescopic distance detection fitting; The probe is arranged inside the lifting retaining ring body; the telescopic distance detection fitting is arranged outside the lifting retaining ring body; the telescopic distance detection fitting is connected with the probe through the through hole and is used for detecting the telescopic distance of the probe after the probe extends and retracts to contact the edge of the grinding disc, so as to detect whether the distances from the three measurement positions to the edge of the grinding disc are equal according to the telescopic distance of the probe.

4. The lift retaining ring according to claim 3, characterized in that, The telescopic distance detection fitting is a ball screw structure with scale marks.

5. The lift retaining ring according to claim 3, wherein The probe is an arc-shaped baffle.

6. The lift retaining ring according to claim 2, wherein The included angle between adjacent measurement positions and the center of the lifting retaining ring body is 120°.

7. A concentric calibration method, applied to the lifting retaining ring according to any one of claims 1 to 6, characterized in that, Comprising: Raise the lifting retaining ring to make the grinding disc located inside the lifting retaining ring; the lifting retaining ring comprises a lifting retaining ring body and a distance detection device; At least three measurement positions are arranged on the lifting retaining ring body; the distance detection device is arranged on the lifting retaining ring body; Detect whether the distances from each of the measurement positions to the edge of the grinding disc are equal through the distance detection device; When it is detected that the distances from each of the measurement positions to the edge of the grinding disc are not equal, adjust the position of the lifting retaining ring body to make the distances from each of the measurement positions to the edge of the grinding disc equal; After adjusting the position of the lifting retaining ring body to make the distances from each of the measurement positions to the edge of the grinding disc equal, it further comprises: Place the grinding pad on the grinding disc; Detect whether the distances from each of the measurement positions to the edge of the grinding pad are equal through the distance detection device; When it is detected that the distances from each of the measurement positions to the edge of the grinding pad are not equal, adjust the position of the grinding pad.

8. The concentric calibration method according to claim 7, characterized in that Adjusting the position of the lifting retaining ring body includes: After the first adjustment of the position of the lifting retaining ring body, the steps of detecting whether the distances from the respective positions to be measured to the edge of the grinding disc are equal by means of the distance detection device are repeatedly executed until, when it is detected that the distances from the respective positions to be measured to the edge of the grinding disc are not equal, the position of the lifting retaining ring body is adjusted until the distances from the respective positions to be measured to the edge of the grinding disc are equal.

9. The concentric calibration method according to claim 7, wherein Adjusting the position of the polishing pad includes: After the first adjustment of the position of the polishing pad, the steps of detecting whether the distances from the respective positions to be measured to the edge of the polishing pad are equal by means of the distance detection device are repeatedly executed until, when it is detected that the distances from the respective positions to be measured to the edge of the polishing pad are not equal, the position of the polishing pad is adjusted until the distances from the respective positions to be measured to the edge of the polishing pad are equal.

10. The concentric calibration method according to claim 7, wherein Three positions to be measured are arranged on the lifting retaining ring body along the circumferential direction; the distance detection device includes three distance detection components; the three distance detection components are respectively arranged at the three positions to be measured; through holes are arranged at the positions to be measured; the distance detection component includes a probe and a telescopic distance detection fitting; the probe is arranged inside the lifting retaining ring body; the telescopic distance detection fitting is arranged outside the lifting retaining ring body; the telescopic distance detection fitting is connected to the probe through the through hole; Detecting whether the distances from the three positions to be measured to the edge of the grinding disc are equal by means of the distance detection device includes: After each telescopic distance detection fitting makes each probe extend and retract until it contacts the edge of the grinding disc, detecting the telescopic distance of each probe; Detecting whether the distances from the three positions to be measured to the edge of the grinding disc are equal according to the telescopic distances of the respective probes.

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