Silicon ring bevel processing tool

Abstract

The present invention discloses a tool for processing the bevel of a silicon ring, which belongs to the technical field of tooling for processing semiconductor components. It comprises a hollow mounting shell, one end of which is provided with a closed end face, and the closed end face is provided with a cross-shaped through groove, and the through groove is provided on the inner side of the closed end face. One end of the slide is fixedly connected to the closed end face, and the other end of the slide is provided with a partition, and the edge of the partition is detachably connected to the inner side of the hollow mounting shell. Sliders are provided in the slides, and a hollow pushing frame is provided on the end of the slider facing the middle of the hollow mounting shell, one end of the pushing frame is fixed on the slider, and the other end of the pushing frame extends to the top of the through groove, and a rotating shaft is provided below the partition. This technical solution is used to solve the problem of low processing efficiency and low pass rate in the prior art of processing the bevel of the silicon ring by fixing the silicon ring with wax.

Description

Technical Field

[0001] The invention belongs to the technical field of semiconductor component processing tooling, and in particular relates to a silicon ring bevel processing tooling. Background Art

[0002] In the processing of semiconductor components, one of the processes involves the processing of silicon ring bevel steps, which requires the product to be fixed or limited on a turntable for processing; traditional semiconductor silicon ring bevel processing requires the use of different fixed plates to stick wax, and then the silicon ring is fixed on the fixed plate for processing. In this process, the wax sticking time is long, the processing efficiency is low, and this fixing method is prone to scratches during installation and disassembly, resulting in a low pass rate. Summary of the Invention

[0003] In view of this, the purpose of the present invention is to provide a silicon ring bevel processing tool to solve the problem of low processing efficiency and low qualification rate in the prior art of using wax to fix the silicon ring to process the silicon ring bevel.

[0004] In order to achieve the above object, the present invention provides the following technical solutions:

[0005] The cam is secured to the inner wall of the housing and has a locking plate, the other end of which is secured to the inner wall of the housing and is secured to a camshaft at the outer wall of the housing.

[0006] The working principle of this technical solution is:

[0007] Place the silicon ring on the closure of the hollow mounting shell, and then manually rotate the shaft, which drives the winding wheel to rotate, and then the first traction rope is wound around the winding wheel, thereby driving the slider to move toward the center in the slideway. During the movement, the push frame and the silicon ring are in contact, thereby driving the silicon ring to move toward the center of the closed end face. When it moves to the specified position, due to the limitation of the outer side of the silicon ring, that is, the push frame and the outer side of the silicon ring contact and limit, the horizontal movement of the silicon ring is limited, which is convenient for the subsequent processing of the inclined surface of the silicon ring.

[0008] The cam is secured to the bottom of the sliding post and has a locking mechanism which allows the cam to slide relative to the first support frame and to lock the sliding post so that the cam can slide relative to the first support frame.

[0009] The working principle of the above technical solution is:

[0010] When the pushing frame moves to the specified position and limits the horizontal movement position of the silicon ring, it is only necessary to slide the hollow sliding column downward, that is, the third pull rope is pulled downward for a while to make the sliding column move downward, that is, drive the pressure plate to move downward, that is, the pressure plate will be pressed against the edge of the upper surface of the silicon ring to limit the up and down movement of the silicon ring, and further ensure the limiting effect of the silicon ring during processing; it should be noted that one end of the pressure plate passes through the pushing frame and extends to its outside, that is, it slides inside the pushing frame, and the sliding column is not set at the end of the slider, so that the sliding column will not contact the silicon ring when sliding downward, avoiding sliding damage to the silicon ring, and at the same time, the upper edge of the pushing frame can limit the upward movement of the pressure plate to ensure that the initial positions of each pressure plate are at the same height.

[0011] Furthermore, a second traction rope is provided at the connection between the first traction rope and the winding wheel, one end of the first traction rope and the winding wheel is fixedly connected to each other, one end of the second traction rope is fixedly connected to the part where the first traction rope is connected to each other, and the other end of the second traction rope is fixed to the winding wheel. The benefit is that the first traction rope is driven to move vertically downward by the second traction rope, so that each first traction rope can be in a taut and stressed state at the moment of being pulled, so that the movement of multiple first traction ropes is more synchronized (because if the ends of the first traction ropes are respectively connected to the winding wheels, then when the winding wheel rotates, the first traction rope facing the side of the rotation direction will first relax and then tighten, instead of being taut and stressed from the beginning, so this will cause the distances that each first traction rope pulls the slider to be asynchronous).

[0012] Furthermore, a first spring is provided on one end of the slider facing the inner wall of the hollow mounting shell, and the two ends of the first spring are fixedly connected to the hollow mounting shell and the slider respectively. The benefit is that after the constraint on the rotating shaft is lost, the first spring will drive the slider to reset, making it easy to remove the silicon ring and prepare for the next use.

[0013] Furthermore, a mounting column is provided on the partition, one end of the mounting column is fixedly connected to the partition, and the other end of the mounting column passes through the closed end of the hollow sliding column and extends to the outside of the hollow mounting shell. The advantage is that it is convenient to connect the tooling and other components, and a gap is left at the connection part, so it does not affect the sliding of the hollow sliding column.

[0014] Furthermore, a notch corresponding to the position of the rotating shaft is provided on the edge of the hollow sliding column, and a wedge block is provided in the notch, and the wedge block is slidably connected to the edge of the hollow mounting shell, and a baffle is provided on the side of the wedge block facing the rotating shaft, and a gear used in conjunction with the baffle is provided on the rotating shaft. The benefit is that after the silicon ring is horizontally limited, it is only necessary to push the wedge block to make the wedge block move inward, so as to drive the hollow sliding column downward, thereby driving the pressure plate downward to limit the silicon ring up and down, and at the same time, the baffle moves with the movement of the wedge block and moves to the tooth spacing of the gear set on the rotating shaft, that is, limiting the gear, that is, the movement of the wedge block can not only realize the compression of the silicon ring, but also limit the rotation of the rotating shaft through the baffle, so as to maintain the limitation of the silicon ring.

[0015] Furthermore, a push rod is provided on the outward end of the wedge block, and one end of the push rod is fixedly connected to the wedge block, which is beneficial in that it facilitates pushing the wedge block.

[0016] Furthermore, slide grooves are provided on both sides of the wedge block, a sliding frame is provided in the slide groove, one end of the sliding frame is located in the slide groove, and the other end of the sliding frame is fixed to the side surface of the hollow mounting frame.

[0017] Furthermore, rotating hand wheels are provided on both ends of the rotating shaft.

[0018] Furthermore, the mounting column is located outside the hollow mounting shell and a turntable is provided at one end thereof. The advantage of this is that the setting of the turntable facilitates the rotation processing of the silicon ring.

[0019] The beneficial effects of the present invention are:

[0020] (1) The arrangement of the first traction rope, the slider and the pushing frame can limit the horizontal movement of the silicon ring, and the arrangement of the sliding column, the pressure plate and the third pull rope can limit the vertical displacement of the silicon ring, thus ensuring the processing effect of the inclined surface of the silicon ring; (2) The structure of this technical solution is ingenious, and the complexity of each component is low, and the reliability of use is high; (3) The limiting method of the pushing frame enables the device to limit silicon rings of different sizes, and the movement method of the pressure plate enables the tool to limit silicon rings of different heights, that is, the practicality of this tool is high, and it can perform limiting processing on silicon rings of different diameters and heights.

[0021] Other advantages, objectives and features of the present invention will be described in the following description and will be apparent to those skilled in the art to some extent, or those skilled in the art can be taught from the practice of the present invention. The objectives and other advantages of the present invention can be realized and obtained through the following description. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to make the purpose, technical solutions and beneficial effects of the present invention more clear, the present invention provides the following drawings for illustration:

[0023] Figure 1 It is a three-dimensional schematic diagram of the tooling of the present invention;

[0024] Figure 2 A schematic plan view of one orientation of the tooling of the present invention;

[0025] Figure 3 It is a schematic cross-sectional view of the front view of the tooling of the present invention;

[0026] Figure 4 It is a schematic diagram of an exploded view of the tooling of the present invention;

[0027] Figure 5 This is a schematic diagram of the internal components of the tooling of the present invention;

[0028] Figure 6 A schematic diagram of the internal components of the tooling of the present invention from another perspective;

[0029] Figure 7 This is a schematic diagram of the internal configuration of the tooling of the present invention without the hollow installation;

[0030] Figure 8 A three-dimensional schematic diagram of the tooling of the present invention from another perspective;

[0031] Figure 9 For the present invention Figure 8 A local enlarged schematic diagram of point A in the middle.

[0032] The following are marked in the accompanying drawings:

[0033] Turntable 1, hollow mounting shell 2, through groove 3, baffle 4, slider 5, first spring 6, push frame 7, sliding column 8, second spring 9, pressure plate 10, first traction rope 11, second traction rope 12, winding wheel 13, rotating shaft 14, rotating handwheel 15, third traction rope 16, partition 17, mounting column 18, hollow sliding column 19, third through hole 20, notch 21, sliding frame 22, slide groove 23, wedge block 24, push rod 25, gear 26, silicon ring 27, baffle 28. DETAILED DESCRIPTION

[0034] like Figures 1 to 9 As shown, the present invention is a silicon ring bevel processing tool, including a hollow mounting shell 2, one end of the hollow mounting shell 2 is provided with a closed end face, the closed end face is provided with a cross-shaped through groove 3, the through groove 3 is located on the inner side of the closed end face and is provided with a slide. It can be seen from the figure that the number of slides is 4, and the slides are respectively provided by baffles 4 provided on both sides. One end of the slide is fixedly connected to the closed end face, and the other end of the slide is provided with a partition 17. The edge of the partition 17 is detachably connected to the inner side of the hollow mounting shell 2. Sliders 5 are provided in the slides, and the slides 5 are limited by the baffles 4 and can only move in a specified direction. The slides 5 move toward the hollow mounting shell. 2 is provided with a hollow pushing frame 7 at one end of the middle part. The pushing frame 7 is rectangular. One end of the pushing frame 7 is fixed to the slider 5, and the other end of the pushing frame 7 extends to the top of the through slot 3. A rotating shaft 14 is provided below the partition 17. Both ends of the rotating shaft 14 extend to the outside of the hollow mounting shell 2. It is rotatably connected to the hollow mounting shell 2. The rotational connection can be achieved by means of a bearing. A winding wheel 13 is provided in the middle of the rotating shaft 14. A first traction rope 11 is provided at one end of the slider 5 facing the hollow mounting shell 2. One end of the first traction rope 11 is fixed to the slider 5, and the other end of the first traction rope 11 passes through the center of the partition 17 and is connected to the winding wheel 13.

[0035] The working principle of this technical solution is:

[0036] Place the silicon ring 27 on the closure of the hollow mounting shell 2, and then manually rotate the rotating shaft 14, which drives the winding wheel 13 to rotate, and then the first traction rope 11 is wound around the winding wheel 13, thereby driving the slider 5 to move toward the center in the slide. During the movement, the push frame 7 and the silicon ring 27 are in contact, thereby driving the silicon ring 27 to move toward the center of the closed end face. When it moves to the specified position, due to the limitation of the outer side surface of the silicon ring 27, that is, the push frame 7 and the outer side surface of the silicon ring 27 contact and limit, the horizontal movement of the silicon ring 27 is limited, which is convenient for the subsequent processing of the inclined surface of the silicon ring 27.

[0037] A first through hole is provided on the slider 5, and a second through hole is provided on the partition 17 that matches the position of the first through hole. A sliding column 8 is provided inside the first through hole and the second through hole. A second spring 9 is sleeved on one end of the sliding column 8 above the slider 5. One end of the second spring 9 is fixed to the slider 5, and the other end of the second spring 9 is fixed to the end of the sliding column 8. A hollow sliding column 19 is provided below the partition 17, which is slidably connected to the hollow mounting shell 2 and closed at one end. It should be noted that the hollow sliding column 19 here refers to a thin-walled cylindrical component. A third traction rope 16 is provided on one end of the sliding column 8 below the partition 17. One end of the third traction rope 16 is fixed to the end of the sliding column 8, and the other end of the third traction rope 16 is fixedly connected to the center of the closed end of the hollow sliding column 19. A pressure plate 10 is also provided on the end of the sliding column 8 above the slider 5. One end of the pressure plate 10 is fixedly connected to the sliding column 8, and the other end of the pressure plate 10 is arranged toward the center of the hollow mounting shell 2 and is located inside the pushing frame 7.

[0038] The working principle of the above technical solution is:

[0039] When the push frame 7 moves to the specified position and limits the horizontal movement position of the silicon ring 27, it is only necessary to slide the hollow sliding column 19 downward, that is, the third pull rope is pulled downward for a while, so that the sliding column 8 moves downward, which drives the pressing plate 10 to move downward, that is, the pressing plate 10 will be pressed tightly against the edge of the upper surface of the silicon ring 27, limiting the up and down movement of the silicon ring 27, and further ensuring the limiting effect of the silicon ring 27 during processing; It should be noted that one end of the pressing plate 10 passes through the pushing frame 7 and extends to its outside, that is, when the pushing frame 7, and the sliding column 8 is not set at the end of the slider 5, so that the sliding column 8 will not contact the silicon ring 27 when sliding downward, avoiding sliding damage to the silicon ring 27. At the same time, the upper edge of the push frame 7 can limit the upward movement of the pressure plate 10, ensuring that the initial positions of all pressure plates 10 are at the same height. It is further explained that this setting method only moves the sliding column 8, and the push frame 7 does not move. When the pressure plate 10 moves downward, no parts slide down and contact the silicon ring 27, thereby avoiding the generation of scratches.

[0040] The first traction rope 11 is provided with a second traction rope 12 at the connection of the winding wheel 13. One end of the first traction rope 11 connected to the winding wheel 13 is fixedly connected to each other. It should be noted that the ends of the four first traction ropes 11 are knotted, and the knotted part is located at the center of the partition 17. One end of the second traction line is fixedly connected to the part where the first traction rope 11 is connected to each other, and the other end of the second traction rope 12 is fixed to the winding wheel 13. A through hole is provided at the center of the partition 17. The second traction rope 12 passes vertically through the through hole. The first traction rope 11 is driven vertically downward by the second traction rope 12 to move, so that each first traction rope 11 can be pulled downward. A traction rope 11 can be in a taut and stressed state at the moment of being pulled, so that the movement of multiple first traction ropes 11 is more synchronized (because if the ends of the first traction ropes 11 are respectively connected to the winding wheel 13, then when the winding wheel 13 rotates, the first traction rope 11 facing the rotation direction will first relax and then tighten, instead of being taut and stressed from the beginning. Therefore, this will cause the distances that each first traction rope 11 pulls the slider 5 to be asynchronous. Of course, it should be noted that the second traction rope 12 is located at the center of the partition 17, and then the winding wheel 13 is set according to the position of the second traction rope 12).

[0041] A first spring 6 is provided on one end of the slider 5 facing the inner wall of the hollow mounting shell 2. The two ends of the first spring 6 are fixedly connected to the hollow mounting shell 2 and the slider 5 respectively. After the constraint on the rotating shaft 14 is lost, the first spring 6 will drive the slider 5 to reset, making it easy to remove the silicon ring 27 and prepare for the next use.

[0042] A mounting column 18 is provided on the partition 17, one end of the mounting column 18 is fixedly connected to the partition 17, and the other end of the mounting column 18 passes through the closed end of the hollow sliding column 19. Specifically, a third through hole 20 is provided on the partition 17 to match the position of the mounting column 18, and extends to the outside of the hollow mounting shell 2, so as to facilitate the connection between this tooling and other components, and a gap is left at the connection part, so as not to affect the sliding of the hollow sliding column 19.

[0043] A notch 21 corresponding to the position of the rotating shaft 14 is provided on the edge of the hollow sliding column 19, and a wedge block 24 is provided in the notch 21. The wedge block 24 is slidably connected to the edge of the hollow mounting shell 2, and a baffle 28 is provided on the side of the wedge block 24 facing the rotating shaft 14. A gear 26 used in conjunction with the baffle 28 is provided on the rotating shaft 14. After the silicon ring 27 is horizontally limited, it is only necessary to push the wedge block 24 to move the wedge block 24 inward to drive the hollow sliding column 19 to move downward, thereby driving the pressure plate 10 to move downward to limit the silicon ring 27 up and down. At the same time, the baffle 28 moves with the movement of the wedge block 24. It reaches the position of gear 26 only after a certain displacement, so as not to interfere with the early rotation of the shaft 14, and moves to the tooth spacing of gear 26 set on the shaft 14, that is, limiting the gear 26. The spacing of gear 26 and the width of block 28 can be set according to the required accuracy, that is, the movement of the wedge block can not only realize the compression of silicon ring 27, but also limit the rotation of the shaft 14 through baffle 28, that is, the limiting of silicon ring 27 can be maintained. It should be noted that in order to achieve self-locking between the wedge block 24 and the notch 21, the friction of the contact surface can be increased, such as setting a rubber layer or increasing the roughness.

[0044] A push rod 25 is attached to the outward end of the wedge block 24. One end of the push rod 25 is fixedly connected to the wedge block 24, facilitating its advancement. Slide slots 23 are located on either side of the wedge block 24. Slide racks 22 are located within these slots, with one end of the rack positioned within the slots and the other end secured to the side of the hollow mounting frame. Rotating handwheels 15 are located at both ends of the rotating shaft 14. A turntable 1 is located at one end of the mounting column 18, located outside the hollow mounting housing 2. This turntable 1 facilitates the rotational processing of the silicon ring 27.

[0045] It should be noted that the present tooling can be formed by assembling various components. For example, during assembly, it is difficult to ensure that the third traction rope 16 is fixed on the inner side surface of the end face of the hollow sliding column 19 at a certain distance. At this time, it can be considered to be fixed on the outer side surface of the end face of the hollow sliding column 19. The assembly relationship of the remaining components can be achieved by those skilled in the art. The fixed connection of the present application document can be riveted, welded or bolted. As long as the assembly relationship of the present tooling can be achieved, it can be used and no further details will be given here.

[0046] Finally, it should be noted that the above preferred embodiments are only used to illustrate the technical solutions of the present invention and are not limiting. Although the present invention has been described in detail through the above preferred embodiments, those skilled in the art should understand that various changes can be made in form and details without departing from the scope defined by the claims of the present invention.

Claims

1. A silicon ring bevel processing tool, characterized by: The cam is secured to the inner wall of the housing and is engageable with the cam in a manner that allows the cam to move freely in the housing so that the cam can move freely in the housing, thereby enabling the cam to move freely in the housing so as to move freely in the housing. The cam is secured to the interior of the sliding panel and has a first end secured to the second end of the sliding panel, the second end of the sliding panel having a first end secured thereto and a second end of the second spring fitted to allow the cam to pass through the sliding panel and to allow the cam to pass through the sliding panel. A notch corresponding to the position of the rotating shaft is provided on the edge of the hollow sliding column, and a wedge block is provided in the notch, and the wedge block is slidably connected to the edge of the hollow mounting shell, and a baffle is provided on the side of the wedge block facing the rotating shaft, and a gear used in conjunction with the baffle is provided on the rotating shaft; a push rod is provided on the outward end of the wedge block, and one end of the push rod is fixedly connected to the wedge block; slide grooves are provided on both sides of the wedge block, and a sliding frame is provided in the slide groove, one end of the sliding frame is located in the slide groove, and the other end of the sliding frame is fixed to the side of the hollow mounting frame.

2. A silicon ring bevel processing tool according to claim 1, characterized in that: A second traction rope is provided at the connection between the first traction rope and the winding wheel. One end of the first traction rope connected to the winding wheel is fixedly connected to each other, one end of the second traction rope is fixedly connected to the part where the first traction rope is connected to each other, and the other end of the second traction rope is fixed on the winding wheel.

3. The silicon ring bevel processing tool according to claim 1, characterized in that: A first spring is provided on one end of the slider facing the inner wall of the hollow mounting shell, and two ends of the first spring are fixedly connected to the hollow mounting shell and the slider respectively.

4. The silicon ring bevel processing tool according to claim 1, characterized in that: Rotating hand wheels are provided on both ends of the rotating shaft.

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