A three-generation semiconductor isostatic pressing graphite purification equipment

Abstract

This invention discloses an isostatic pressing graphite purification device for third-generation semiconductors, specifically relating to the technical field of graphite purification equipment. It includes a support base on which a conveying purification component is mounted. The conveying purification component comprises several support frames, each positioned on top of the base and detachably connected to it. Through the coordinated use of these structures, the raw material is simultaneously moved within the mesh cylinder and ground, shaping it into relatively uniform sized blocks, increasing its compressibility. Lower pressure is applied to further enhance the density and internal structure of the graphite. Under high temperature and high pressure conditions, impurities in the graphite raw material and gases within the pores are decomposed, thereby reducing defects in the graphite material.

Description

Technical Field

[0001] This invention relates to the field of graphite purification equipment technology, and more specifically, to an isostatic graphite purification device for third-generation semiconductors. Background Technology

[0002] Third-generation semiconductors refer to a new generation of semiconductor materials and device technologies. Compared with traditional silicon-based semiconductor technology, third-generation semiconductors include two concepts: a broad one and a narrow one. In a broad sense, third-generation semiconductors often refer to materials with better electron transport performance and band structure advantages, such as compound semiconductor materials like gallium nitride, silicon carbide (SiC), and indium gallium nitride, as well as two-dimensional materials like graphene. These materials can provide higher electron mobility, higher breakdown electric field strength, and wider band gap, thereby achieving higher power density and operating temperature, making them suitable for high-performance electronic devices and power electronics applications.

[0003] In a narrow sense, third-generation semiconductors include device technologies that combine two-dimensional materials with other materials to form heterostructures, such as layered heterostructures for graphene, also known as graphene heterojunctions. These device structures possess excellent electronic properties and can be applied in fields such as energy conversion and optoelectronic devices. Semiconductor isostatic graphite purification is a process that uses high temperature and high pressure to process graphite materials, transforming them into high-purity and high-density semiconductor-grade graphite products.

[0004] Among them, a search revealed that patent application number CN202320000419.1 discloses an isostatic graphite high-efficiency purification device, which includes: an atmosphere furnace, a purified gas inlet pipe connector, an exhaust pipe connector, a cover plate and a carrier. The atmosphere furnace has an opening at the top of its inner cavity, the cover plate is movably mounted on the opening, the bottom of the cover plate has a downwardly extending column, the bottom of the column has a horizontally mounted reflector, the bottom of the reflector has symmetrically mounted first hooks, and the carrier is detachably mounted on the first hooks.

[0005] In use, the structure lowers the cover plate, allowing the carrier and isostatic graphite to enter the inner cavity of the atmosphere furnace through the opening. Purification gases such as halogens or halogenated hydrocarbons are introduced at high temperature to purify the isostatic graphite. After purification, the cover plate rises, and the carrier and isostatic graphite are removed from the atmosphere furnace, facilitating carrier replacement via forklift and improving production efficiency.

[0006] However, in actual use, it is impossible to perform preliminary screening, grinding and molding, which leads to the inability of static pressure purification to decompose impurities and gases in the graphite raw materials during subsequent plastic forming under high temperature and high pressure conditions, resulting in defects in the graphite materials. Summary of the Invention

[0007] This invention addresses the problem of overly simplistic solutions in existing technologies by providing a significantly different approach. To overcome the aforementioned shortcomings of existing technologies, this invention provides an isostatic pressing graphite purification device for third-generation semiconductors, aiming to solve the problems mentioned in the background section.

[0008] To achieve the above objectives, the present invention provides the following technical solution: an isostatic pressing graphite purification device for third-generation semiconductors, comprising a base for support, wherein a purification conveying component is disposed on the base;

[0009] The delivery purification component includes;

[0010] Several support frames for support, and each of the support frames is disposed on the top of the base and detachably connected to the base;

[0011] Several retaining rings for limiting position, and each of the retaining rings is respectively mounted on a corresponding support frame;

[0012] A sealing cylinder for sealing, the sealing cylinder being disposed outside the support ring and detachably connected to the support ring;

[0013] A mesh cylinder for limiting position, wherein the mesh cylinder is disposed in the middle of the support ring and is detachably connected to the support ring;

[0014] A discharge pipe for discharging material is provided at one end of the mesh cylinder and is connected to the mesh cylinder;

[0015] A first electric valve for controlling closure is located at the bottom of the discharge pipe;

[0016] A screening hopper with a vertical cross-section of conical shape is used for screening materials, and the screening hopper is located at the end of the sealing cylinder away from the discharge pipe;

[0017] Two baffles are used for separation, and each of the baffles is set on the screen hopper;

[0018] The bottom of the screening hopper passes through the sealing cylinder and extends to the screen cylinder, where it is connected.

[0019] As can be seen, in the above technical solution, the raw material is screened by the screening hopper and then introduced into the screen cylinder for easy material guidance. Subsequently, the first electric valve is opened and rotated again by the hollow rotating rod and the guide ribs to discharge the purified raw material through the discharge pipe.

[0020] A rotatable hollow rotating rod is disposed in the middle of the mesh cylinder and is movably connected to the mesh cylinder;

[0021] A heating rod for heating is disposed in the middle of the hollow rotating rod, and one end of the heating rod passes through the mesh cylinder and extends to one side of the surface of the mesh cylinder;

[0022] Several heat dissipation shields for limiting position, and each of the heat dissipation shields is distributed circumferentially around the center point of the hollow rotating rod on the outside of the hollow rotating rod.

[0023] Several heat dissipation aluminum blocks for heat conduction, and each of the heat dissipation aluminum blocks is distributed circumferentially around the axis of the hollow rotating rod in the corresponding heat dissipation shield.

[0024] A guide rib with a helical cross-sectional shape is provided on the outside of the hollow rotating rod;

[0025] As can be seen, in the above technical solution, the hollow rotating rod rotates, which drives the guide ribs to rotate, so that the guide ribs come into contact with the material when they rotate. Through the partition of the mesh cylinder and the traction force of the guide ribs when they rotate, the material is displaced in the mesh cylinder and ground, and the material is molded into a relatively uniform size block, increasing its compressibility. The hollow rotating rod is heated by a heating rod, and the heat is conducted by a heat dissipation aluminum block.

[0026] Two support round frames for support, each of which is located on the outside of the sealing cylinder, and the bottom of each of which extends to the base and is detachably connected to the base by bolts.

[0027] Several connecting parts for lifting, and each of the supporting round frames is distributed around the outer side of the corresponding supporting round frame along the circumference of the axis of the supporting round frame;

[0028] Several threaded cylinders for positioning, and each pair of threaded cylinders is respectively set at both ends of the corresponding connector;

[0029] Several rotatable adjusting rods, each of which is respectively disposed in a corresponding threaded cylinder and threadedly connected to the threaded cylinder; several pin seats for limiting, each of which is respectively disposed at one end of a corresponding adjusting rod and movably connected to the adjusting rod via a pin.

[0030] A plurality of pins for limiting the position, and each of the pins is respectively disposed on a corresponding pin seat and movably connected to the pin seat via a pin.

[0031] A plurality of heaters for heating, and each of the heaters is respectively mounted on a shaft pin to which a corresponding connector belongs;

[0032] As can be seen, in the above technical solution, the rotating adjusting rod drives the shaft pin seat and shaft pin to move, so that the heater can fit more closely with the mesh cylinder. In conjunction with the heating rod, the heating is diffused through the heat dissipation aluminum block, so as to realize the simultaneous heating of the raw material from the inside out and from the outside in, thereby improving the purification efficiency and effect.

[0033] A flow guide seat for guiding flow, the flow guide seat being disposed at the bottom of the base;

[0034] A connecting plate for docking is provided at one end of the flow guide seat and communicates with the flow guide seat. The connecting plate and the flow guide seat are detachably connected by bolts.

[0035] A pipe fitting for guiding flow is provided on one side of the connecting plate and communicates with the connecting plate. The pipe fitting is connected to an external air pump through a conduit.

[0036] A filter screen for filtration is disposed between the connecting disc and the pipe fitting;

[0037] An extension cylinder for conveying is provided on the side of the guide seat away from the connecting plate and is connected to the connecting plate;

[0038] A heating wire for heating is disposed between a flow guide seat and an extension cylinder, and the heating wire and the extension cylinder are detachably connected by bolts.

[0039] Guide vanes for guiding flow, the guide vanes being disposed in the middle of the guide seat;

[0040] A second electric valve for control is located at one end of the extension cylinder;

[0041] An L-tube for flow concentration is provided at one end of the second electric valve. The vertical cross-sectional shape of the L-tube is L-shaped, and the top of the L-tube passes through the base and extends to the bottom of the sealing cylinder.

[0042] A flow diffuser with a vertical cross-sectional shape of a cone is provided and connected to the top of the L-tube.

[0043] The top of the diffuser extends to the sealing cylinder and is connected to the sealing cylinder. The diffuser and the sealing cylinder are detachably connected by bolts, and a sealing ring is provided between them.

[0044] As can be seen, in the above technical solution, the air pump injects high-pressure gas into the guide seat through the connecting plate. The heating wire first preheats the high-pressure gas. At the same time, the second electric valve opens to deliver the hot and high-pressure gas flow through the L pipe and the diffuser to the sealed cylinder, applying a lower pressure to further enhance the density and internal structure of the graphite. The second electric valve adjusts the pressure of the high-pressure gas flow entering the mesh cylinder. Under high temperature and high pressure conditions, impurities in the graphite raw material and gas in the pores are decomposed, thereby reducing defects in the graphite material.

[0045] Each of the multiple support rings has a through-hole groove, and all the frame grooves are on the same axis. Each of the multiple frame grooves has a slidably connected receiving plate for blocking. The receiving plate is slidably connected to the frame groove. One end of the receiving plate is provided with a motor installed on the support ring for driving the hollow rotating rod to rotate.

[0046] The technical effects and advantages of this invention are as follows:

[0047] 1. In this invention, the raw material is screened by the sieve hopper and then introduced into the screen cylinder for easy material guiding. Subsequently, the first electric valve is opened and the hollow rotating rod and the guiding ribs rotate again to discharge the purified raw material through the discharge pipe, realizing the simultaneous transmission, purification and subsequent material collection of the raw material.

[0048] 2. In this invention, the rotation of the hollow rotating rod will drive the guide ribs to rotate, so that the guide ribs come into contact with the material when they rotate. With the partition of the mesh cylinder and the traction force of the guide ribs when they rotate, the raw material is displaced in the mesh cylinder and ground, and the raw material is molded into a more uniform size block, increasing its compressibility.

[0049] 3. In this invention, an external air pump injects high-pressure gas into the guide seat through a connecting plate. The high-pressure gas is preheated by a heating wire. At the same time, the second electric valve is opened to deliver the hot and high-pressure gas flow through the L-tube and the diffuser to the sealed cylinder, applying a lower pressure to further enhance the density and internal structure of the graphite. The hollow rotating rod is heated by a heating rod, and the heat is conducted by a heat dissipation aluminum block, allowing the heat to diffuse within the mesh cylinder. The second electric valve then adjusts the pressure of the high-pressure gas flow entering the mesh cylinder. Under high temperature and high pressure conditions, impurities in the graphite raw material and gas in the pores are decomposed, thereby reducing defects in the graphite material.

[0050] 4. This invention uses a rotating adjusting rod to move the shaft pin seat and shaft pin parts, so that the heater can fit more closely with the mesh cylinder. When combined with the heating rod, the heating is diffused through the heat dissipation aluminum block, so as to realize the simultaneous heating of the raw material from the inside out and from the outside in, thereby improving the purification efficiency and effect.

[0051] In summary, the overall design is simple and the structure is reasonable. Through the corresponding cooperation of various structures, the raw material is ground while it is displaced in the mesh cylinder, and the raw material is molded into relatively uniform-sized blocks to increase its compressibility. The hot and high-pressure airflow is transported from the L-pipe through the diffuser to the sealed cylinder, where a lower pressure is applied to further enhance the density and internal structure of the graphite. Heat is conducted by the heat dissipation aluminum block, allowing the heat to diffuse within the mesh cylinder. The pressure of the high-pressure airflow entering the mesh cylinder is regulated by the second electric valve. Under high temperature and high pressure conditions, impurities in the graphite raw material and gases in the pores are decomposed, thereby reducing defects in the graphite material. Attached Figure Description

[0052] To more clearly illustrate the technical solutions in this disclosure, the accompanying drawings used in some embodiments of this disclosure will be briefly described below. Obviously, the drawings described below are only drawings of some embodiments of this disclosure, and those skilled in the art can obtain other drawings based on these drawings. In addition, the drawings described below can be regarded as schematic diagrams and are not intended to limit the actual size of the product, the actual flow of the method, the actual timing of the signals, etc. involved in the embodiments of this disclosure.

[0053] Figure 1 This is a schematic diagram of the overall structure of the present invention.

[0054] Figure 2 This is a cross-sectional view of the overall structure of the present invention.

[0055] Figure 3 This is a front view of the delivery and purification component of the present invention.

[0056] Figure 4 This is a schematic diagram of the mesh cylinder of the present invention installed on the base.

[0057] Figure 5 This is a front view of the various structures on the supporting circular frame of the present invention.

[0058] Figure 6 This is a partial front view of the hollow rotating rod and the guide ribs in this invention.

[0059] Figure 7 This is a front view of each structure on the flow guide seat of the present invention.

[0060] The attached figures are labeled as follows: 1. Base; 101. Support frame; 102. Support ring; 103. Sealing cylinder; 104. Mesh cylinder; 105. Discharge pipe; 106. First electric valve; 107. Screen hopper; 108. Baffle.

[0061] 2. Hollow rotating rod; 201. Heating rod; 202. Heat dissipation shroud; 203. Heat dissipation aluminum block; 204. Material guide ribs;

[0062] 3. Supporting circular frame; 301. Connecting piece; 302. Threaded cylinder; 303. Adjusting rod; 304. Shaft pin seat; 305. Shaft pin component; 306. Heater;

[0063] 4. Flow guide seat; 401. Connecting plate; 402. Pipe fitting; 403. Filter screen; 404. Extension tube; 405. Heating wire; 406. Flow guide vane; 407. Second electric valve; 408. L-tube; 409. Diffuser;

[0064] 5. Frame groove; 501. Receiving plate; 502. Motor. Detailed Implementation

[0065] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0066] The terms "first," "second," and "third" used in the embodiments of this application are for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first," "second," or "third" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion. For example, a process, method, system, product, or device that includes a series of steps or units is not limited to the listed steps or units, but may optionally include steps or units not listed, or may optionally include other steps or units inherent to these processes, methods, products, or devices.

[0067] In this document, the term "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a mutually exclusive, independent, or alternative embodiment. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0068] In the embodiments, as shown in the appendix Figure 1-7 The device shown is a static pressure graphite purification device for third-generation semiconductors. Through the transfer and purification components set on the base 1, the raw materials can be initially screened and molded. It is easy to perform plastic molding under high temperature and high pressure conditions. Static pressure purification decomposes the impurities in the graphite raw materials and the gas in the pores. The transfer and purification of the raw materials are carried out simultaneously. The specific structural settings of the components are as follows.

[0069] The delivery purification components include;

[0070] Several support frames 101 are provided for support, and each support frame 101 is disposed on the top of the base 1 and detachably connected to the base 1.

[0071] Several retaining rings 102 for limiting position, and each retaining ring 102 is respectively set on a corresponding support frame 101;

[0072] A sealing cylinder 103 is used for sealing. The sealing cylinder 103 is disposed on the outside of the support ring 102 and is detachably connected to the support ring 102.

[0073] The mesh cylinder 104 is used for limiting the position. The mesh cylinder 104 is disposed in the middle of the support ring 102 and is detachably connected to the support ring 102.

[0074] The discharge pipe 105 is used for discharging material. The discharge pipe 105 is located at one end of the mesh cylinder 104 and is connected to the mesh cylinder 104.

[0075] The first electric valve 106 for controlling closure is located at the bottom of the discharge pipe 105;

[0076] The vertical cross-section is set as a cone shape for the screening hopper 107, which is located at the end of the sealing cylinder 103 away from the discharge pipe 105.

[0077] Two baffles 108 are used for separation, and each baffle 108 is set on the screen hopper 107;

[0078] The bottom of the screening hopper 107 passes through the sealing cylinder 103 and extends to the screen cylinder 104, where it is connected to the screen cylinder 104.

[0079] A rotatable hollow rotating rod 2 is located in the middle of the mesh cylinder 104 and is movably connected to the mesh cylinder 104;

[0080] Heating rod 201 for heating is disposed in the middle of hollow rotating rod 2, and one end of heating rod 201 passes through mesh cylinder 104 and extends to one side of the surface of mesh cylinder 104.

[0081] Several heat dissipation shields 202 are used for limiting the position, and each heat dissipation shield 202 is distributed around the circumference of the hollow rotating rod 2 along the axis of the hollow rotating rod 2 on the outside of the hollow rotating rod 2.

[0082] Several heat dissipation aluminum blocks 203 are used for heat conduction, and each heat dissipation aluminum block 203 is distributed circumferentially along the axis of the hollow rotating rod 2 within the corresponding heat dissipation cover 202.

[0083] The guide rib 204 has a cross-sectional shape that is spiral and is located on the outside of the hollow rotating rod 2.

[0084] Two support round frames 3 are provided for support, and each support round frame 3 is provided on the outside of the sealing cylinder 103, and the bottom of each support round frame 3 extends to the base 1 and is detachably connected to the base 1 by bolts.

[0085] Several connecting parts 301 for supporting are provided, and each supporting round frame 3 is distributed around the circumference of the axis of the supporting round frame 3 on the outer side of the corresponding supporting round frame 3.

[0086] Several threaded cylinders 302 for positioning, and each pair of threaded cylinders 302 are respectively set at both ends of the corresponding connector 301;

[0087] Several rotatable adjusting rods 303 are respectively set in the corresponding threaded cylinders 302 and threadedly connected to the threaded cylinders 302. Several pin seats 304 for limiting are respectively set at one end of the corresponding adjusting rod 303 and movably connected to the adjusting rod 303 through pins.

[0088] Several pins 305 for limiting, and each pin 305 is respectively disposed on a corresponding pin seat 304 and is movably connected to the pin seat 304 via a pin.

[0089] Several heaters 306 for heating, and each heater 306 is respectively mounted on the shaft pin 305 to which the corresponding connector 301 belongs;

[0090] A flow guide seat 4 is used for guiding the flow, and the flow guide seat 4 is set at the bottom of the base 1;

[0091] The connecting plate 401 is used for docking. The connecting plate 401 is located at one end of the flow guide seat 4 and is connected to the flow guide seat 4. The connecting plate 401 and the flow guide seat 4 are detachably connected by bolts.

[0092] The pipe fitting 402 is used for guiding the flow. The pipe fitting 402 is located on one side of the connecting plate 401 and is connected to the connecting plate 401. The pipe fitting 402 is connected to the external air pump through a conduit.

[0093] Filter screen 403 is used for filtration and is disposed between connecting plate 401 and pipe joint 402;

[0094] The extension cylinder 404 is used for conveying. The extension cylinder 404 is located on the side of the guide seat 4 away from the connecting plate 401 and is connected to the connecting plate 401.

[0095] Heating wire 405 is used for heating. Heating wire 405 is disposed between flow guide seat 4 and extension tube 404. Heating wire 405 and extension tube 404 are detachably connected by bolts.

[0096] The guide vane 406 is used for guiding the flow, and the guide vane 406 is disposed in the middle of the guide seat 4;

[0097] The second electric valve 407 is used for control and is located at one end of the extension cylinder 404;

[0098] The L-tube 408 used for flow concentration is located at one end of the second electric valve 407. The vertical cross-sectional shape of the L-tube 408 is set to L-shape, and the top of the L-tube 408 passes through the base 1 and extends to the bottom of the sealing cylinder 103.

[0099] A flow diffuser 409 with a vertical cross-sectional shape of a cone is provided. The flow diffuser 409 is located at the top of the L-tube 408 and is connected to the L-tube 408.

[0100] The top of the diffuser 409 extends to the sealing cylinder 103 and is connected to the sealing cylinder 103. The diffuser 409 and the sealing cylinder 103 are detachably connected by bolts, and a sealing ring is provided between them.

[0101] Multiple support rings 102 are respectively provided with frame slots 5, and each frame slot 5 is located on the same axis. Each frame slot 5 is slidably connected with a receiving plate 501 for partitioning. The receiving plate 501 is slidably connected to the frame slot 5. One end of the receiving plate 501 is provided with a motor 502 installed on the support ring 102 for driving the hollow rotating rod 2 to rotate.

[0102] According to the above structure, during use, the staff puts the raw material to be purified through the sieve hopper 107 and then puts it into the screen cylinder 104. The raw material is driven by the motor 502 to rotate the hollow rotating rod 2 inside the screen cylinder 104. When the hollow rotating rod 2 rotates, it will drive the guide rib 204 to rotate, so that the guide rib 204 comes into contact with the material when it rotates. Through the partition of the screen cylinder 104 and the traction force of the guide rib 204 when it rotates, the raw material is displaced in the screen cylinder 104 and ground, and the raw material is ground and molded to form a relatively uniform size block, increasing its compressibility.

[0103] At the same time, the high-pressure gas is injected into the guide seat 4 through the connecting plate 401 by the external air pump. The high-pressure gas is preheated by the heating wire 405 first. At the same time, the second electric valve 407 is opened to transport the hot and high-pressure gas flow from the L pipe 408 through the diffuser 409 to the sealing cylinder 103, applying a lower pressure to further enhance the density and internal structure of the graphite.

[0104] Meanwhile, the diffuser 409 is connected to the sealing cylinder 103. The high-pressure airflow conveyed by the diffuser 409 is blocked by the connecting plate 401, so that the airflow can be diverted to the side of the receiving plate 501 through the arc-shaped cross section and injected into the mesh cylinder 104. The impurities generated by the material in the mesh cylinder 104 during the grinding process will fall onto the receiving plate 501, thus preventing the impurities generated by the raw material during the grinding process from clogging the diffuser 409.

[0105] Furthermore, during the static pressing of the raw material, the hollow rotating rod 2 is heated by the heating rod 201, and the heat is conducted by the heat dissipation aluminum block 203, so that the heat is diffused in the mesh cylinder 104. Then, the pressure of the high-pressure airflow entering the mesh cylinder 104 is adjusted by the second electric valve 407. Under high temperature and high pressure conditions, the impurities in the graphite raw material and the gas in the pores are decomposed, thereby reducing the defects of the graphite material.

[0106] Furthermore, staff can rotate the adjusting rod 303 to move the shaft pin seat 304 and shaft pin 305 according to their needs, so that the heater 306 can fit more closely with the mesh cylinder 104. In addition, the heating rod 201 heats the material and diffuses the heat through the heat dissipation aluminum block 203, so as to achieve simultaneous heating of the raw material from the inside out and from the outside in, thereby improving the purification efficiency and effect.

[0107] Subsequently, the first electric valve 106 is opened and rotated again by the hollow rotating rod 2 and the guide rib 204 to discharge the purified raw material through the discharge pipe 105. At the same time, the receiving plate 501 can be pulled out from the frame groove 5 to clean the impurities generated during the grinding of the raw material.

[0108] Unlike existing technologies, this application discloses an isostatic pressing graphite purification device for third-generation semiconductors. Through the corresponding cooperation of various structures, the raw material is ground while being displaced within the mesh cylinder 104, shaping it into relatively uniform-sized blocks to increase its compressibility. A hot, high-pressure airflow is delivered from the L-pipe 408 through the diffuser 409 to the sealed cylinder 103, applying a lower pressure to further enhance the density and internal structure of the graphite. Heat is conducted by the heat dissipation aluminum block 203, allowing heat to diffuse within the mesh cylinder 104. The pressure of the high-pressure airflow entering the mesh cylinder 104 is then regulated by the second electric valve 407. Under high temperature and high pressure conditions, impurities in the graphite raw material and gases within the pores are decomposed, thereby reducing defects in the graphite material.

[0109] The above are merely preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A plant for the purification of three-generation semiconducting isostatic graphite, comprising a base (1) for the support, characterized by: The base (1) is provided with a conveying and purifying assembly; The conveying and purifying assembly comprises: a plurality of support frames (101) for supporting, each of the support frames (101) being arranged on the top of the base (1) and detachably connected with the base (1); a plurality of supporting rings (102) for limiting, each of the supporting rings (102) being arranged on the corresponding support frame (101); a sealing cylinder (103) for sealing, the sealing cylinder (103) being arranged on the outside of the supporting ring (102) and detachably connected with the supporting ring (102); a mesh cylinder (104) for limiting, the mesh cylinder (104) being arranged in the middle of the supporting ring (102) and detachably connected with the supporting ring (102); a hollow rotating rod (2) which can rotate, the hollow rotating rod (2) being arranged in the middle of the mesh cylinder (104) and movably connected with the mesh cylinder (104); a heating rod (201) for heating, the heating rod (201) being arranged in the middle of the hollow rotating rod (2), one end of the heating rod (201) penetrating through the mesh cylinder (104) and extending to the surface of the mesh cylinder (104); a plurality of heat dissipation covers (202) for limiting, each of the heat dissipation covers (202) being circumferentially distributed on the outside of the hollow rotating rod (2) along the axis point of the hollow rotating rod (2); a plurality of heat dissipation aluminum blocks (203) for heat conduction, each of the heat dissipation aluminum blocks (203) being circumferentially distributed in the corresponding heat dissipation cover (202) along the axis point of the hollow rotating rod (2); a material guide rib (204) with a spiral cross-sectional shape, the material guide rib (204) being arranged on the outside of the hollow rotating rod (2); two support circular frames (3) for supporting, each of the support circular frames (3) being arranged on the outside of the sealing cylinder (103), and the bottom of each of the support circular frames (3) extending to the base (1) and detachably connected with the base (1) through bolts; a discharge pipe (105) for discharging, the discharge pipe (105) being arranged at one end of the mesh cylinder (104) and being in communication with the mesh cylinder (104); a first electric valve (106) for controlling closing, the first electric valve (106) being arranged at the bottom of the discharge pipe (105); a sieve hopper (107) with a tapered vertical cross-sectional shape for sieving, the sieve hopper (107) being arranged at the end of the sealing cylinder (103) away from the discharge pipe (105); two baffles (108) for blocking, each of the baffles (108) being arranged on the sieve hopper (107); wherein the bottom of the sieve hopper (107) penetrates through the sealing cylinder (103) and extends to the mesh cylinder (104) and is in communication with the mesh cylinder (104); a plurality of connecting pieces (301) for lifting, each of the support circular frames (3) being circumferentially distributed on the outside of the corresponding support circular frame (3) along the axis point of the support circular frame (3); a plurality of threaded cylinders (302) for positioning, each of the threaded cylinders (302) being arranged at the two ends of the corresponding connecting piece (301) as a group; A plurality of rotatable adjusting rods (303), and each adjusting rod (303) is arranged in a corresponding threaded cylinder (302) and is in threaded connection with the threaded cylinder (302); A plurality of shaft pin seats (304) for limiting, and each shaft pin seat (304) is arranged at one end of a corresponding adjusting rod (303) and is in movable connection with the adjusting rod (303) through a shaft pin; A plurality of shaft pin pieces (305) for limiting, and each shaft pin piece (305) is arranged on a corresponding shaft pin seat (304) and is in movable connection with the shaft pin seat (304) through a shaft pin; A plurality of heaters (306) for heating, and each heater (306) is arranged on a corresponding shaft pin piece (305) to which the connecting piece (301) belongs; A flow guide seat (4) for guiding flow, which is arranged at the bottom of the base (1); A connecting disc (401) for docking, which is arranged at one end of the flow guide seat (4) and is in communication with the flow guide seat (4), and the connecting disc (401) is in detachable connection with the flow guide seat (4) through bolts; A pipe joint (402) for guiding flow, which is arranged at one side of the connecting disc (401) and is in communication with the connecting disc (401), and the pipe joint (402) is connected with an external air pump through a conduit; A filter screen (403) for filtering, which is arranged between the connecting disc (401) and the pipe joint (402); An extension cylinder (404) for conveying, which is arranged at one side of the flow guide seat (4) away from the connecting disc (401) and is in communication with the connecting disc (401); A heating wire (405) for heating, which is arranged between the flow guide seat (4) and the extension cylinder (404), and the heating wire (405) is in detachable connection with the extension cylinder (404) through bolts; A flow guide vane (406) for guiding flow, which is arranged in the middle of the flow guide seat (4); A second electric valve (407) for controlling, which is arranged at one end of the extension cylinder (404); An L-shaped pipe (408) for converging flow, which is arranged at one end of the second electric valve (407), and the vertical cross-sectional shape of the L-shaped pipe (408) is arranged in an L shape, and the top of the L-shaped pipe (408) penetrates through the base (1) and extends to the bottom of the sealing cylinder (103); A flow diffuser (409) with a vertical cross-sectional shape arranged in a tapered shape, which is arranged at the top of the L-shaped pipe (408) and is in communication with the L-shaped pipe (408); The top of the flow diffuser (409) extends to the sealing cylinder (103) and is in communication with the sealing cylinder (103), the flow diffuser (409) and the sealing cylinder (103) are in detachable connection through bolts, and a sealing ring is arranged therebetween.

2. A three-generation semiconductor isostatic pressing graphite purification equipment according to claim 1, characterized in that: A plurality of said supporting rings (102) are provided with frame slot (5) respectively, and each said frame slot (5) is on the same axis, and a plurality of said frame slots (5) are slidably connected with a supporting plate (501) for blocking, the supporting plate (501) is slidably connected with the frame slot (5), and one end of the supporting plate (501) is provided with a motor (502) mounted on the supporting ring (102) for driving the hollow rotating rod (2) to rotate.

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