Joint device, joint structure, and manufacturing method of joint structure

Abstract

The connector device 10 includes: a connector member 50 having an annular main body 60 covering the outer periphery of the connecting portions of the tubes 11 and 12 and an intervention portion 61 that intervenes between the end faces 20 of the two tubes 11 and 12; a conductive member 51 disposed on the outer peripheral surface of the connector member 50 corresponding to the intervention portion 61 and heated by electromagnetic induction; and an annular covering member 52 that covers the conductive member 51 from the outside. The connector device 10 also includes an annular intervention member 53 capable of intervening between the outer peripheral surface of the connecting portions of the two tubes 11 and 12 and the main body 60 of the connector member 50.

Description

Technical Field

[0001] This invention relates to a joint device, a joint structure, and a method for manufacturing the joint structure. Background Technology

[0002] In general, the fittings used in piping of semiconductor manufacturing equipment and the like are mechanically connected using pipes and threaded mechanisms. For example, with a pipe inserted into the fitting, the fitting and the pipe are connected by tightening the threaded mechanism located on the outside of the fitting and the pipe (see Patent Document 1).

[0003] However, when using the aforementioned mechanical methods to connect the joint to the pipe, the joint wall thickness must be increased to withstand the tightening stress of the threads, resulting in a larger joint-pipe connection structure. Furthermore, during piping use, vibration or internal pressure can cause loosening at the joint-pipe connection, necessitating reinforcement to prevent leakage.

[0004] Therefore, it is proposed to install a conductive component on the joint connected to the pipe, and to weld the joint to the pipe by heating the conductive component through electromagnetic induction (see Patent Document 2).

[0005] Existing technical documents

[0006] Patent documents

[0007] Patent Document 1: Japanese Patent Application Publication No. 2009-115154

[0008] Patent Document 2: Japanese International Publication No. 2020 / 022178 Summary of the Invention

[0009] However, according to the above welding method, when connecting two pipes, it is necessary to connect one side of the pipe and the connector first, and then connect the other side of the pipe and the connector. The pipe connection operation takes time.

[0010] The present invention has been made in view of the above aspects, and one of its objectives is to reduce the time spent on the connection of joints and pipes using welding methods.

[0011] One aspect of the present invention relates to a connector device comprising: a connector member having an annular main body portion covering the outer periphery of the connecting portions of two connected tubes and an intervention portion intervening between the end faces of the two connected tubes; a conductive member disposed on the outer peripheral surface of the connector member corresponding to the intervention portion and heated by electromagnetic induction; and an annular covering member covering the conductive member from the outside.

[0012] According to this method, a connector device is installed relative to two connected tubes, in which a conductive component is disposed on the outer peripheral surface of a connector component and a cover component is formed by covering the outer surface of the conductive component. The insertion portion of the connector component is disposed between the end faces of the two connected tubes, and the main body of the connector component covers the outer peripheral surface of the connection portion of the two connected tubes. In this state, the conductive component can be heated by electromagnetic induction, and the periphery of the insertion portion of the connector component is welded together, thus connecting the two connected tubes to each other via the connector component. Therefore, since electromagnetic induction can be used to simultaneously and easily connect the two connected tubes to the connector component, the time spent on connecting the connector component to the connected tubes can be significantly reduced. Furthermore, since the contact area between the connector component and the connected tubes can be increased, the welding strength can be improved.

[0013] In the above-described manner, the connector component may also have an abutment portion, which is configured such that the conductive component is inserted axially relative to the main body and abuts against a first end face on the insertion direction side of the inserted conductive component.

[0014] In the above manner, the covering member may also be configured to be axially inserted from the main body of the connector member into which the conductive member is inserted.

[0015] In the above manner, the covering component may also have a pressing portion that presses the second end face of the conductive component along its axial direction.

[0016] In the above-described manner, the connector component and the cover component may also have an engagement mechanism that engages the connector component and the cover component with each other.

[0017] In the above-described manner, the connector device may also include an annular intervening component that can be inserted between the outer peripheral surface of the connecting portion of the two connected pipes and the main body of the connector component.

[0018] In the above-described manner, the intervention component may also have a locking portion that locks onto the end face of the connected tube.

[0019] In the above-described manner, the intervention component may also have the function of confirming that the end faces of the two connected pipes are in contact with or close to the intervention portion of the connector component.

[0020] In the above-described manner, the insertion portion of the connector component may also have an annular convex shape that protrudes from the main body portion toward its central axis and surrounds the axis of the main body portion.

[0021] In the above-described manner, the insertion portion of the connector component can also be formed such that its two axial sides protrude outwards axially.

[0022] In the above method, the connected piping can also be piping used in semiconductor manufacturing equipment.

[0023] One aspect of the present invention relates to a connector structure comprising the aforementioned connector device and two connected tubes, wherein the periphery of the insertion portion of the connector component is welded to each other, and the two connected tubes are connected to each other via the connector component.

[0024] A method for manufacturing a connector structure according to one aspect of the present invention includes: a first step of mounting a connector device relative to two connected tubes, disposing an intervention portion between the end faces of the two connected tubes and covering the outer peripheral surface of the connection portion of the two connected tubes by a main body portion, the connector device comprising: a connector member having an annular main body portion and the intervention portion; a conductive member disposed on the outer peripheral surface of the connector member corresponding to the intervention portion and heated by electromagnetic induction; and an annular covering member covering the conductive member from the outside; and a second step of heating the conductive member by electromagnetic induction, welding at least the periphery of the intervention portion of the connector member to each other, and connecting the two connected tubes to each other via the connector member.

[0025] In the above method, during the first step, an annular insertion component may also be inserted between the outer peripheral surface of the connecting portion of the two connected tubes and the main body of the connector component.

[0026] In the above method, during the first step, the intervention component can also be used to confirm that the end faces of the two connected pipes are in contact with or close to the intervention portion of the connector component.

[0027] In the above-described manner, a step of assembling the connector component, the conductive component, and the cover component may be performed before the first step.

[0028] Invention Effects

[0029] According to the present invention, the time spent on connecting joints and pipes using welding methods can be reduced. Attached Figure Description

[0030] Figure 1 This is a perspective view showing the components of the connector structure involved in this embodiment.

[0031] Figure 2 These are cross-sectional views of the components of the joint structure.

[0032] Figure 3 This is a cross-sectional view of the joint structure when assembling the various components of the joint structure.

[0033] Figure 4 This is a cross-sectional view of the pipe.

[0034] Figure 5This is an enlarged cross-sectional view of the joint structure.

[0035] Figure 6 This is a 3D view of the connector components.

[0036] Figure 7 This is a cross-sectional view of the connector component.

[0037] Figure 8 It is a 3D view of a conductive component.

[0038] Figure 9 This is a cross-sectional view of a conductive component.

[0039] Figure 10 It is a 3D view of the covered component.

[0040] Figure 11 This is a cross-sectional view of the covering component.

[0041] Figure 12 This is an enlarged cross-sectional view of the joint structure.

[0042] Figure 13 This is an enlarged cross-sectional view of the joint structure.

[0043] Figure 14 It is a 3D view of the intervention component.

[0044] Figure 15 This is a cross-sectional view of the intervention component.

[0045] Figure 16 This is an enlarged cross-sectional view of the tube with the interventional component installed.

[0046] Figure 17 This is a cross-sectional view of the connector assembly.

[0047] Figure 18 This is a cross-sectional view of a connector component with conductive parts installed.

[0048] Figure 19 This is a cross-sectional view of the connector assembly positioned between two pipes. Detailed Implementation

[0049] Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings. Furthermore, the same reference numerals are used to label the same elements, and repeated descriptions are omitted. Moreover, unless otherwise specified, positional relationships such as up, down, left, and right are based on the positional relationships shown in the accompanying drawings.

[0050] Figure 1 A perspective view showing the components of the connector structure 1 according to this embodiment. Figure 2 This is a cross-sectional view of each component of the joint structure 1 cut off in a vertical plane containing the central axis C of the joint structure 1. Figure 3This is a cross-sectional view of joint structure 1 when all components of joint structure 1 are assembled. For example... Figures 1 to 3 As shown, the connector structure 1 includes a connector device 10 and two pipes 11 and 12 that are connected to the piping.

[0051] Tubes 11 and 12 are formed from fluorinated resins, such as those used in piping systems of semiconductor manufacturing equipment. Tubes 11 and 12 are, for example, round tubes, flexible and freely deformable. Furthermore, the material of tubes 11 and 12 is not particularly limited to fluorinated resins; other plastic resins, such as PP, can also be used. Tubes 11 and 12 each have an end face 20 on the connecting portion side.

[0052] On end face 20, for example, Figure 4 As shown, a locking portion 30 is formed protruding towards the front end side of the axial direction X, which is parallel to the central axis C of the tubes 11 and 12. This locking portion 30 is used to lock the locking portion 221 of the intervention component 53, which will be described later. Furthermore, the term "front end side" of the tubes 11 and 12 here refers to the side of the connection portion where the tubes 11 and 12 are connected to each other.

[0053] The locking portion 30 has an inclined surface 40 that is inclined at a predetermined angle relative to the radial direction (direction perpendicular to the axial direction X) Y of the tubes 11 and 12. The inclined surface 40 is formed from the outer peripheral surfaces 11a and 12a of the tubes 11 and 12 toward the central axis C (inner side). The inclined surface 40 is inclined such that it gradually moves away from the front end toward the central axis C. That is, the locking portion 30 has a triangular shape in the cross-section of the tubes 11 and 12 cut by a vertical plane including the central axis C. The locking portion 30 is formed in a ring shape around the central axis C.

[0054] Furthermore, the end face 20 has an annular flat surface 41 (parallel to the radial Y) on the inner side (central axis C side) of the locking portion 30, facing the front end side. The flat surface 41 is connected to the inclined surface 40 of the locking portion 30. The locking portion 30 and the flat surface 41 are formed, for example, by machining the end faces of the tubes 11 and 12 using a special jig.

[0055] like Figures 1 to 3 As shown, the connector device 10 includes, for example, a connector component 50, a conductive component 51, a cover component 52, and two intervention components 53.

[0056] like Figures 5 to 7 As shown, the connector component 50 has a generally cylindrical shape. The connector component 50 is made of resin melted by heat at a specified temperature. The connector component 50 has, for example, an annular body portion 60 covering the outer periphery of the connecting portion of the two tubes 11, 12, an intervening portion 61 between the end faces 20 of the two tubes 11, 12, and a connecting portion 62 connecting the body portion 60 and the intervening portion 61.

[0057] The main body 60 has a generally cylindrical shape. The main body 60 has a first outer peripheral surface 80 and a second outer peripheral surface 81. The first outer peripheral surface 80 is formed along a path from a first end 60a to a second end 60b in the axial direction X of the main body 60. The length of the first outer peripheral surface 80 in the axial direction X is longer than the length of the conductive member 51 in the axial direction X. The distance (diameter) of the first outer peripheral surface 80 from the central axis C of the main body 60 in the axial direction X is fixed.

[0058] A recess 90 is provided on the first outer peripheral surface 80 for engaging with the cover member 52 described later. The recess 90 is provided, for example, at the end of the first outer peripheral surface 80 on the side of the first end 60a. The recess 90 is provided at equal intervals in multiple locations (e.g., two locations) around the central axis C of the main body 60 in the circumferential direction R.

[0059] The second outer peripheral surface 81 is connected to the end of the first outer peripheral surface 80 at the second end 60b side. The second outer peripheral surface 81 is, for example, larger in diameter than the first outer peripheral surface 80. Thus, an end face 82 is formed between the first outer peripheral surface 80 and the second outer peripheral surface 81 as an annular abutment portion facing the axial direction X (parallel to the radial direction Y). This end face 82 abuts against the first end face 152 of the conductive member 51 (described later) when the conductive member 51 is inserted into the first outer peripheral surface 80, and functions as a stop.

[0060] A protrusion 91 for engaging with the cover member 52 described later is provided on the second outer peripheral surface 81. The protrusion 91 protrudes outward in the radial direction Y. The protrusion 91 is provided, for example, near the end of the second end 60b side of the second outer peripheral surface 81. The protrusion 91 is provided at equal intervals in multiple locations (e.g., two locations) around the central axis C of the main body 60 in the circumferential direction R. The recess 90 is provided at the same position as the protrusion 91 in the circumferential direction R of the main body 60, for example.

[0061] The main body 60 has a first inner circumferential surface 120, a second inner circumferential surface 121, a third inner circumferential surface 122, a fourth inner circumferential surface 123 and a fifth inner circumferential surface 124 in sequence from the first end 60a side toward the second end 60b side.

[0062] The diameters of the first inner circumferential surface 120, the second inner circumferential surface 121, the third inner circumferential surface 122, the fourth inner circumferential surface 123, and the fifth inner circumferential surface 124 are larger than the diameters of the outer circumferential surfaces 11a and 12a of the tubes 11 and 12.

[0063] The first inner circumferential surface 120 and the second inner circumferential surface 121 are located on the first end 60a side of the axial direction X compared with the connecting portion 62, and the third inner circumferential surface 122, the fourth inner circumferential surface 123 and the fifth inner circumferential surface 124 are located on the second end 60b side of the axial direction X compared with the connecting portion 62.

[0064] The diameter of the second inner circumferential surface 121 is smaller than the diameter of the first inner circumferential surface 120. As a result, an annular end face 125 is formed between the second inner circumferential surface 121 and the first inner circumferential surface 120, facing the first end 60a side in the axial direction X.

[0065] The diameter of the third inner circumferential surface 122 is smaller than the diameter of the fourth inner circumferential surface 123, and the diameter of the fourth inner circumferential surface 123 is smaller than the diameter of the fifth inner circumferential surface 124. Thus, an annular end face 126 facing the second end portion 60b in the axial direction X is formed between the third inner circumferential surface 122 and the fourth inner circumferential surface 123, and an annular end face 127 facing the second end portion 60b in the axial direction X is formed between the fourth inner circumferential surface 123 and the fifth inner circumferential surface 124.

[0066] The overall length of the first inner circumferential surface 120 and the second inner circumferential surface 121 along the axial direction X is shorter than the overall length of the third inner circumferential surface 122, the fourth inner circumferential surface 123, and the fifth inner circumferential surface 124 along the axial direction X. For example, the second inner circumferential surface 121 and the third inner circumferential surface 122 are equal in length along the axial direction X, and the first inner circumferential surface 120 and the fourth inner circumferential surface 123 are equal in length along the axial direction X.

[0067] The intervention portion 61 has an annular convex shape that protrudes from the main body portion 60 toward the central axis C and surrounds the central axis C of the main body portion 60. The intervention portion 61 is disposed on the inner side of the main body portion 60 relative to the center of the main body portion 60 along the axial direction X, near the first end portion 60a. The intervention portion 61 has annular side peripheral surfaces 130 on both sides along the axial direction X and annular inner peripheral surface 131 on the central axis C side.

[0068] The lateral peripheral surface 130 is formed to project outwards toward the axial direction X. The lateral peripheral surface 130 is, for example, formed by a first inclined surface 140 located on the outer side of the radial direction Y and a second inclined surface 141 located on the inner side of the radial direction Y. The first inclined surface 140 and the second inclined surface 141 are connected at the center of the radial direction Y. Thus, the lateral peripheral surface 130 has a most prominent top at the center of the radial direction Y.

[0069] The inner circumferential surface 131 is a flat surface with a fixed diameter. The diameter of the inner circumferential surface 131 is, for example, the same as that of the inner circumferential surfaces of tubes 11 and 12.

[0070] The connecting portion 62 protrudes from between the second inner peripheral surface 121 and the third inner peripheral surface 122 of the main body portion 60 toward the central axis C and is formed in a ring around the central axis C of the main body portion 60.

[0071] like Figure 5 , Figure 8 as well as Figure 9The conductive component 51 shown is disposed on the outer peripheral surface of the connector component 50 and between the connector component 50 and the cover component 52. The conductive component 51 is formed of, for example, carbon or metallic silicon. Furthermore, the material of the conductive component 51 is not limited to these, and may also be a metal such as stainless steel (SUS430), steel (SS400), pre-hardened steel (NAK55), or a spring material (SUS304WPB, SUS316WPA).

[0072] The conductive component 51 is formed in an annular shape around a central axis C. The conductive component 51 has an outer peripheral surface 150 and an inner peripheral surface 151 with a fixed diameter. The inner peripheral surface 151 has a diameter approximately the same as the first outer peripheral surface 80 of the main body 60 of the connector component 50. The outer peripheral surface 150 has a diameter approximately the same as or smaller than the second inner peripheral surface 161 of the cover component 52 (described later). The radial Y thickness of the conductive component 51 is, for example, approximately the same as the radial Y width of the end face 82 of the main body 60. The conductive component 51 has an axial X length shorter than the first outer peripheral surface 80 of the main body 60 of the connector component 50. The conductive component 51 has a first end face 152 and a second end face 153 at both ends in the axial X direction.

[0073] like Figure 5 , Figure 10 as well as Figure 11 As shown, the cover member 52 has a generally cylindrical shape. The cover member 52 is made of PTFE, which has a higher melting point than the connector member 50 or the intervening member 53, or PFA, which has the same melting point. The cover member 52 has a first inner circumferential surface 160 and a second inner circumferential surface 161. The first inner circumferential surface 160 and the second inner circumferential surface 161 are arranged in a sequence from a first end 52a toward a second end 52b along the axial direction X of the cover member 52. Furthermore, when assembling the connector member 50, the conductive member 51, and the cover member 52, the first end 60a side of the main body portion 60 of the connector member 50, the second end face 153 side of the conductive member 51, and the first end 52a side of the cover member 52 correspond to each other, and the second end 60b side of the main body portion 60 of the connector member 50, the first end face 152 side of the conductive member 51, and the second end 52b side of the cover member 52 correspond to each other.

[0074] A first inner circumferential surface 160 is disposed near the first end 52a of the cover member 52. The diameter of the first inner circumferential surface 160 is smaller than the diameter of the second inner circumferential surface 161. Thus, an end face 162, which is an annular pressing portion facing the second end 52b in the axial direction X, is formed between the first inner circumferential surface 160 and the second inner circumferential surface 161. The end face 162 can cover and press the second end face 153 of the conductive member 51 mounted on the connector member 50.

[0075] like Figure 12As shown, a protrusion 170 is provided on the first inner circumferential surface 160 to engage with the recess 90 of the main body portion 60 of the connector member 50. The protrusion 170 is provided at equal intervals, for example, at multiple locations (e.g., two locations) around the central axis C of the cover member 52 in the circumferential direction R.

[0076] like Figure 5 , Figure 10 as well as Figure 11 As shown, the second inner circumferential surface 161 extends from the first inner circumferential surface 160 to the second end 52b of the cover member 52 in the axial direction X. The second inner circumferential surface 161 has a substantially fixed diameter in the axial direction X. The second inner circumferential surface 161 covers the outer circumferential surface 150 of the conductive member 51 when the cover member 52 is mounted on the connector member 50.

[0077] A raised rib 180, slightly protruding toward the central axis C and extending axially X, is formed on the second inner circumferential surface 161. The raised rib 180 is provided at multiple locations in the circumferential direction R. Furthermore, as... Figure 13 As shown, a through hole 190 is provided near the second end 52b of the second inner circumferential surface 161, which engages with the protrusion 91 of the main body 60 of the connector member 50. The through hole 190 extends radially (in the thickness direction) through the cover member 52. The through holes 190 are provided at equal intervals in multiple locations (e.g., two locations) in the circumferential direction R around the central axis C of the cover member 52. Furthermore, a groove 191 is formed on the second end 52b corresponding to the through hole 190 of the second inner circumferential surface 161. This groove 191 serves as a guide for the protrusion 91 of the main body 60 of the connector member 50 to pass through when the cover member 52 is inserted into the connector member 50.

[0078] The cover member 52 has an outer peripheral surface 195 with a fixed diameter. The cover member 52 is configured such that when combined with the connector member 50, the end face of the second end 52b side in the axial direction X is aligned with the end face of the second end 60b side of the main body portion 60 of the connector member 50.

[0079] The connector component 50 and the cover component 52 have an engaging mechanism that engages with each other. The engaging mechanism is composed of the aforementioned recess 90, protrusion 170, protrusion 91, and through hole 190.

[0080] like Figure 5 , Figure 14 as well as Figure 15 The intervention component 53 is located between the intervention connector component 50 and the outer peripheral surfaces 11a and 12a of the tubes 11 and 12. The intervention component 53 is made of a resin (e.g., PFA) having a melting point similar to that of the connector component 50. The intervention component 53 has a first outer peripheral surface 200, a second outer peripheral surface 201, and a third outer peripheral surface 202 in sequence from the front end 53a side to the rear end 53b side.

[0081] The diameter of the second outer peripheral surface 201 is larger than the diameter of the first outer peripheral surface 200, and the diameter of the third outer peripheral surface 202 is larger than the diameter of the second outer peripheral surface 201. Therefore, an annular end face 203 facing the front end portion 53a in the axial direction X is formed between the first outer peripheral surface 200 and the second outer peripheral surface 201. Furthermore, an annular end face 204 facing the front end portion 53a in the axial direction X is formed between the second outer peripheral surface 201 and the third outer peripheral surface 202.

[0082] The first outer peripheral surface 200 has a diameter that is substantially the same as the second inner peripheral surface 121 and the third inner peripheral surface 122 of the main body portion 60 of the connector member 50. Furthermore, the first outer peripheral surface 200 has the same axial length X as the second inner peripheral surface 121 and the third inner peripheral surface 122 of the main body portion 60.

[0083] The second outer peripheral surface 201 has the same diameter as the first inner peripheral surface 120 and the fourth inner peripheral surface 123 of the main body portion 60 of the connector component 50. In addition, the second outer peripheral surface 201 has the same axial length X as the first inner peripheral surface 120 and the fourth inner peripheral surface 123 of the main body portion 60.

[0084] The third outer peripheral surface 202 has the same diameter as the fifth inner peripheral surface 124 of the main body 60 of the connector member 50 and the first inner peripheral surface 160 of the cover member 52. Furthermore, the third outer peripheral surface 202 has the same axial length X as the fifth inner peripheral surface 124 of the main body 60 and the first inner peripheral surface 160 of the cover member 52.

[0085] Therefore, as Figure 5 as well as Figure 12 As shown, when the intervention component 53 is located on the second end 60b side of the main body 60 of the connector component 50, between the intervention connector component 50 and the outer peripheral surface 11a of the tube 11, the first outer peripheral surface 200, the second outer peripheral surface 201, and the third outer peripheral surface 202 respectively mate with the third inner peripheral surface 122, the fourth inner peripheral surface 123, and the fifth inner peripheral surface 124 of the main body 60. Furthermore, as... Figure 5 as well as Figure 13 As shown, when the intervention component 53 is located on the first end 60a side of the main body 60 of the connector component 50, between the intervention connector component 50 and the outer peripheral surface 12a of the tube 12, the first outer peripheral surface 200, the second outer peripheral surface 201, and the third outer peripheral surface 202 respectively match the second inner peripheral surface 121, the first inner peripheral surface 120 of the main body 60, and the first inner peripheral surface 160 of the cover component 52.

[0086] like Figure 16 As shown, the intervention component 53 has an inner peripheral surface 220 with the same diameter as the outer peripheral surfaces 11a and 12a of the tubes 11 and 12. A locking part 221 is formed at the front end of the inner peripheral surface 220 to hook onto the locking part 30 of the end face 20 of the tubes 11 and 12.

[0087] The locking portion 221 protrudes inward (towards the central axis C) and is formed in a ring shape around the central axis C. The locking portion 221 has an inclined surface 222 facing the rear end portion 53b. The inclined surface 222 is formed so that it gradually approaches the rear end portion 53b from the front end portion 53a as it approaches the central axis C. The locking portion 221 is locked to the locked portion 30 by the engagement of the inclined surface 222 with the inclined surface 40 of the locked portion 30.

[0088] like Figure 5 As shown, the intervention component 53 is configured such that when the end faces 20 of the tubes 11 and 12 abut or approach the intervention portion 61 of the connector component 50, the rear end portion 53b of the intervention component 53 is aligned with the end face of the second end portion 60b of the main body portion 60 of the connector component 50, and the rear end portion 53b of the intervention component 53 is aligned with the end face of the first end portion 52a of the cover component 52. That is, the intervention component 53 has the function of confirming that the end faces of the tubes 11 and 12 abut or approach the intervention portion 61 of the connector component 50.

[0089] Next, the manufacturing method of the joint structure 1 as described above will be explained.

[0090] First, such as Figure 1 As shown, pipes 11 and 12, the connector component 50 of the connector device 10, the conductive component 51, the covering component 52, and the two insertion components 53 are prepared as the pipes to be connected. Next, the end faces 20 of pipes 11 and 12 are machined using a special fixture, such as... Figure 4 As shown, a locking portion 30 is formed on the end face 20 of tubes 11 and 12. Then, as... Figure 16 As shown, intervention components 53 are installed on the end faces 20 of each tube 11 and 12. At this time, the locking portion 221 of the front end portion 53a of the intervention component 53 is locked to the locking portion 30 of the end face 20 of the tube 11 and 12.

[0091] On the other hand, such as Figure 17 As shown, the connector component 50, the conductive component 51, and the cover component 52 are combined with each other. For example, firstly, as shown... Figure 18 As shown, the conductive member 51 is inserted into the first outer peripheral surface 80 of the main body 60 of the connector member 50 from the first end 60a side. The first end face 152 of the conductive member 51 is inserted until it abuts against the end face 82. Then, as shown... Figure 17As shown, the cover member 52 is inserted from the first end 60a side of the main body 60 onto the conductive member 51 already inserted into the main body 60. At this time, the end face 162 of the cover member 52 covers and presses against the second end face 153 of the conductive member 51, and the second inner peripheral surface 161 of the cover member 52 covers the outer peripheral surface 150 of the conductive member 51. Furthermore, the protrusion 91 of the main body 60 engages with the through hole 190 of the cover member 52, and the protrusion 170 of the cover member 52 engages with the recess 90 of the main body 60. Thus, the connector member 50 and the cover member 52 are engaged with the conductive member 51 internally embedded. At this time, the conductive member 51 is not exposed externally. Alternatively, either the assembly process of the tubes 11, 12 and the insertion member 53, or the assembly process of the connector member 50, the conductive member 51 and the cover member 52 can be performed first.

[0092] Next, as Figure 19 As shown, the connector component 50, the conductive component 51, and the cover component 52 are arranged between the pipe 11 and the pipe 12. Then, as... Figure 3 As shown, the end faces 20 of tubes 11 and 12 are fitted together by inserting the insertion portion 61 of the connector member 50 between them. At this time, the insertion member 53 is embedded between the outer peripheral surfaces 11a and 12a of tubes 11 and 12 and the main body 60 of the connector member 50. Then, as... Figure 5 As shown, on the tube 11 side, tube 11 is inserted into the inside of the main body 60 until the rear end 53b of the intervention member 53 is aligned with the end face of the second end 60b of the main body 60 of the connector member 50. On the tube 12 side, tube 11 is inserted into the inside of the main body 60 until the rear end 53b of the intervention member 53 is aligned with the end face of the first end 52a of the cover member 52. Then, the user confirms that tube 11 is fully embedded in the connector member 50 by aligning the rear end 53b of the intervention member 53 with the end face of the second end 60b of the main body 60 of the connector member 50, and confirms that tube 12 is fully embedded in the connector member 50 by aligning the rear end 53b of the intervention member 53 with the end face of the first end 52a of the cover member 52.

[0093] Next, the electromagnetic induction welding machine is operated to induce electromagnetic induction in the conductive component 51 of the joint device 10, causing the conductive component 51 to heat up. The heat from the conductive component 51 is transferred, for example, to the surrounding joint components 50 and the intervening component 53, causing the main body 60, connecting portion 62, and intervening portion 61 of the joint component 50 and the intervening component 53 surrounding the conductive component 51 to melt and weld together. In this way, pipes 11 and 12 are connected to each other via the joint component 50. Afterward, the welding machine is stopped, and the connection operation of pipes 11 and 12 is completed.

[0094] According to this embodiment, a conductive component 51 is disposed on the first outer peripheral surface 80 of the connector component 50. A connector device 10, which covers the outer side of the conductive component 51 with a covering component 52, is installed relative to the two pipes 11 and 12. The insertion portion 61 of the connector component 50 is disposed between the end faces 20 of the two pipes 11 and 12. The outer peripheral surfaces 11a and 12a of the connecting portion of the two pipes 11 and 12 are covered by the main body portion 60 of the connector component 50. In this state, the conductive component 51 is heated by electromagnetic induction, and the periphery of the insertion portion 61 of the connector component 50 is welded together, thus connecting the two pipes 11 and 12 to each other via the connector component 50. Therefore, since the connection between the two pipes 11 and 12 and the connector component 50 can be performed simultaneously and easily using electromagnetic induction, the time required for the connection operation between the connector component 50 and the pipes 11 and 12 can be significantly shortened. Furthermore, since the contact area between the connector component 50 and the pipes 11 and 12 can be increased, the welding strength can be improved.

[0095] The connector component 50 has an end face 82 that serves as an abutment portion, which is configured to be inserted into the main body 60 from the axial direction X and abuts against a first end face 152 on the insertion direction side of the inserted conductive component 51. This simplifies the installation of the conductive component 51 relative to the connector component 50.

[0096] The cover member 52 is configured to be inserted axially (X-axis) into the main body 60 of the connector member 50 into which the conductive member 51 is inserted. This simplifies the installation of the cover member 52 relative to the connector member 50.

[0097] The cover member 52 has an end face 162 that serves as a pressing portion of the second end face 153 in the axial direction X of the conductive member 51. Thus, the cover member 52 and the connector member 50 can securely cover the area around the conductive member 51, preventing the conductive member 51 from being exposed to the outside.

[0098] The connector 50 and the cover 52 have a locking mechanism that engages the connector 50 and the cover 52 with each other. This simplifies the process of installing the cover 52 onto the connector 50. Furthermore, it prevents the conductive component 51 from being accidentally exposed.

[0099] Because the connector 10 has an intervening component 53, gaps can be suppressed between the connector 10 and the pipes 11 and 12. As a result, the overall contact strength between the connector 10 and the pipes 11 and 12 can be improved.

[0100] Since the intervention component 53 has a locking part 221 that locks onto the end face 20 of the tubes 11 and 12, the installation operation of the intervention component 53 relative to the tubes 11 and 12 becomes simple.

[0101] The intervention component 53 has the function of confirming that the end faces 20 of the tubes 11 and 12 are in contact with or close to the intervention portion 61 of the connector component 50. The contact portion between the end faces 20 of the tubes 11 and 12 and the intervention portion 61 of the connector component 50 is located in a position that is difficult to see visually, thereby preventing insufficient engagement due to the large distance between the end faces 20 of the tubes 11 and 12 and the intervention portion 61 of the connector component 50. Furthermore, since the confirmation operation for the installation of the tubes 11 and 12 and the connector device 10 is simplified, the installation operation can be performed in a short time.

[0102] The insertion portion 61 of the connector component 50 has an annular convex shape that protrudes from the main body portion 60 toward its central axis and surrounds the central axis C of the main body portion 60. As a result, the welding area between the connector component 50 and the end faces 20 of the pipes 11 and 12 is widened, and the welding strength is improved.

[0103] The insertion portion 61 of the connector component 50 is formed such that its two sides protrude outward along the axial direction X. As a result, the welding area between the connector component 50 and the end faces 20 of the pipes 11 and 12 is widened, and the welding strength is improved.

[0104] While it is difficult to use materials like conductive components that prevent the generation of particles in the piping of semiconductor manufacturing equipment, since the connector device 10 does not expose the conductive component 51, it can also be used in the connector of the piping for semiconductor manufacturing equipment.

[0105] The above description, with reference to the accompanying drawings, describes suitable embodiments of the present invention, but the invention is not limited to the examples described. Obviously, those skilled in the art will conceive of various modifications or variations within the scope of the ideas described in the claims, and these naturally fall within the technical scope of the present invention.

[0106] For example, in the above embodiments, the shapes of the connector component 50, conductive component 51, covering component 52, and intervention component 53 of the connector device 10 are not limited to the above embodiments. The connector device 10 may also omit the intervention component 53. The shapes of the tubes 11 and 12 are also not limited to the above embodiments, and the present invention can be applied to connectors of all known tubes such as L-shaped and T-shaped tubes.

[0107] Industrial applicability

[0108] This invention is useful in reducing the time spent on joint and pipe connection operations using welding methods.

[0109] Explanation of reference numerals in the attached figures

[0110] 1. Joint Structure

[0111] 10 Connector Device

[0112] 11 and 12 tubes

[0113] 50 Connector Components

[0114] 51 Conductive components

[0115] 52 Covering components

[0116] 60 Main body

[0117] 61 Interventional Department

[0118] C Central axis

[0119] X-axis

[0120] Y radial

[0121] R Zhou Xiang.

Claims

1. A connector device, comprising: The connector component has an annular body portion covering the outer periphery of the connecting portions of two connected tubes and an intervening portion intervening between the end faces of the two connected tubes; A conductive component, disposed on the outer peripheral surface of the connector component corresponding to the intervention portion and heated by electromagnetic induction; and A ring-shaped covering member covers the conductive member from the outside. The connector component has an abutment portion, which is configured such that the conductive component is inserted axially relative to the main body and abuts against a first end face of the inserted conductive component on the insertion direction side. The cover member is configured to be insertable axially from the main body of the connector member into which the conductive member is inserted. The covering component has a pressing portion that presses the second end face of the conductive component along its axial direction.

2. The connector device according to claim 1, wherein, The connector component and the cover component have an engagement mechanism that engages the connector component and the cover component with each other.

3. The connector device according to claim 1 or 2, wherein, The insertion portion of the connector component has an annular convex shape that protrudes from the main body portion toward its central axis and surrounds the axis of the main body portion.

4. The connector device according to claim 1 or 2, wherein, The insertion portion of the connector component is formed such that its two axial sides protrude outwards axially.

5. The connector device according to claim 1 or 2, wherein, The connected tube is a pipe used in semiconductor manufacturing equipment.

6. A connector device, comprising: The connector component has an annular body portion covering the outer periphery of the connecting portions of two connected tubes and an intervening portion intervening between the end faces of the two connected tubes; A conductive component is disposed on the outer peripheral surface of the connector component corresponding to the intervention portion and is heated by electromagnetic induction; A ring-shaped covering member covers the conductive member from the outside; and The annular insertion component is capable of intervening between the outer peripheral surface of the connecting portion of the two connected tubes and the main body of the connector component. The intervention component has a locking part that locks onto the end face of the tube being connected. The intervention component has the function of confirming that the end faces of the two connected tubes are in contact with or close to the intervention portion of the connector component.

7. The connector device according to claim 6, wherein, The insertion portion of the connector component has an annular convex shape that protrudes from the main body portion toward its central axis and surrounds the axis of the main body portion.

8. The connector device according to claim 6 or 7, wherein, The insertion portion of the connector component is formed such that its two axial sides protrude outwards axially.

9. The connector device according to claim 6 or 7, wherein, The connected tube is a pipe used in semiconductor manufacturing equipment.

10. A joint structure comprising: The connector device according to any one of claims 1 to 9; and Two connected tubes, The insertion portions of the connector components are welded together around each other, and the two connected tubes are connected to each other via the connector components.

11. A method for manufacturing a joint structure, comprising: In the first step, the connector device is installed relative to the two connected tubes, and the intervention part is positioned between the end faces of the two connected tubes. The main body covers the outer peripheral surface of the connection portion of the two connected tubes. The connector device includes: a connector member having an annular main body and the intervention part; a conductive member disposed on the outer peripheral surface of the connector member corresponding to the intervention part and heated by electromagnetic induction; and an annular covering member covering the conductive member from the outside; and In the second step, the conductive component is heated by electromagnetic induction, and at least the area around the insertion portion of the connector component is welded together, thus connecting the two pipes to each other via the connector component. In the first step, an annular insertion component is inserted between the outer peripheral surface of the connecting portion of the two connected tubes and the main body of the connector component. In the first step, the intervention component confirms that the end faces of the two connected tubes are in contact with or close to the intervention portion of the connector component.

12. The method for manufacturing the joint structure according to claim 11, wherein, Prior to the first step, there is a step of assembling the connector component, the conductive component, and the cover component.

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