Precision Temperature Controlled Glass Substrate Baking Furnace

Abstract

The present invention discloses a precision temperature-controlled glass substrate baking furnace, which comprises a heating furnace body, on which a door leaf assembly is movably installed; a glass clamping rack is installed in the baking cavity of the heating furnace body, and a plurality of heaters and blowers are arranged in the heating cavity of the heating furnace body; the heating cavity is communicated with the baking cavity through a filter and an air distributor, and a plurality of hot air partition plates are arranged in parallel in the heating cavity, and a hierarchical heat supply channel is formed between two adjacent hot air partition plates, and a heater and a blower are correspondingly arranged in each hierarchical heat supply channel; the air distributor comprises an air distribution base plate and an air distribution adjusting plate which are superposed with each other, and vertical air guiding rib plates and / or horizontal guiding rib plates are fixedly arranged on the surface of the air distribution base plate or the air distribution adjusting plate, and the vertical air guiding rib plates and / or the horizontal guiding rib plates face the baking cavity. This baking furnace can effectively control and adjust the flow rate and flow direction of the baking hot air, and accurately control the baking temperature of each layer of glass substrate, so as to improve and stabilize the baking quality of the glass substrate.

Description

Technical Field

[0001] The present invention relates to a glass substrate manufacturing device used in flat panel displays such as liquid crystal and plasma displays, and particularly to an oven furnace for curing a photoresist coated on the surface of a glass substrate. The baking oven can accurately control and adjust the baking temperature of the baking chamber. Background Art

[0002] The glass substrate is one of the key basic materials in the flat panel display industry and is glass with an extremely flat surface and an ultra-thin thickness. The performance and quality of the glass substrate itself are closely related to the basic indicators of flat panel display such as resolution, imaging effect, thickness, and weight. The increasing requirements for the resolution, thinness, and low energy consumption of flat panel display panels mean that the performance requirements for the glass substrate are getting higher and higher, especially in terms of surface defects.

[0003] The key factor affecting the baking quality of the glass substrate is the stability of the baking temperature. In the existing glass substrate baking oven furnace, since the glass substrates to be baked are placed on the glass holders in the baking chamber of the baking oven in layers, the baking hot air flow can circulate up and down between the glass plates of each layer in the baking chamber. When working, the glass substrates for baking in each layer are alternately fed into or taken out of the baking chamber to improve the baking efficiency, but this will also cause obvious temperature fluctuations and temperature gradients in the baking chamber of the baking oven. At the same time, since the hot air flow in the baking chamber always rises, it is more difficult to control the baking temperature of the glass plates located at the bottom section of the glass holder. The glass plates at the bottom heat up slowly and have a lower temperature, while the glass plates at the top heat up relatively faster and have a higher temperature.

[0004] The uneven baking caused by a low heating temperature or heating temperature fluctuations in the baking chamber of the baking oven results in the solvent in the photoresist film on the glass substrate not being fully volatilized. In the under-baked area, the solvent is not fully volatilized, and the unexposed part is also dissolved during exposure and development, forming floating glue or deforming the pattern. Over-baking leads to warping and hardening of the film, and the pattern cannot be developed or there is a bottom film left during development; the uneven baking temperature also causes thermal stress on the glass substrate due to the temperature gradient, resulting in cracking or breaking of the substrate glass and reducing the baking yield.

[0005] Since the baking furnace cavity is a very large cavity that can accommodate multiple layers of glass substrates, in order to enable the heating air flow on the heating side to enter the baking cavity evenly, the applicant applied for and obtained an authorized utility model patent "Air Distribution Hot Air Structure for the Baking Furnace Cavity of Display Glass Substrates" on April 24, 2022, with the patent number: 202220996854.X. A filter and an air distributor are sequentially arranged between the hot air cavity and the baking cavity in this air distribution hot air structure. The heater and the blower in the hot air cavity filter the heating air flow through the filter and then blow it to the air distributor. The air distributor is provided with a number of ventilation holes with adjustable hole diameters. The heating air flow can enter the baking furnace baking cavity more evenly under the action of the ventilation holes of the air distributor. However, the air distributor of this structure cannot control and guide the air flow direction of the baking hot air, and temperature fluctuations and temperature gradients will still be formed on the glass substrate, and it cannot ensure that the heating air flow blows precisely to the corresponding glass substrate. Summary of the Invention

[0006] The technical problem to be solved by the present invention is to provide a precision temperature-controlled glass substrate baking furnace, which can effectively control the flow rate and flow direction of the hot air in each baking layer to precisely control the baking temperature of each layer of glass substrates.

[0007] To solve the above technical problem, the precision temperature-controlled glass substrate baking furnace of the present invention includes a heating furnace body, and a door leaf assembly is movably installed on the heating furnace body; a glass holder is installed in the baking cavity of the heating furnace body, and a number of heaters and blowers are arranged in the heating cavity of the heating furnace body; the heating cavity is connected to the baking cavity through a filter and an air distributor, and a number of hot air partition plates are arranged in parallel in the heating cavity, and a hierarchical heat supply channel is formed between adjacent two hot air partition plates. Each hierarchical heat supply channel corresponds to a heater and a blower; the air distributor includes a stacked air distribution substrate and an air distribution adjustment plate, and vertical air guiding rib plates and / or horizontal guiding rib plates are fixedly arranged on the surface of the air distribution substrate or the air distribution adjustment plate, and the vertical air guiding rib plates and / or the horizontal guiding rib plates face the baking cavity.

[0008] In the above structure, since a number of hot air partition plates are arranged in parallel in the heating chamber, and a heater and a blower are arranged in the hierarchical heat supply channels formed between two adjacent hot air partition plates, a hierarchical heat supply structure separated from each other is formed on the heating side, so that the baking temperature and the hot air flow rate of the glass substrate in different layer intervals in the baking chamber can be accurately controlled and adjusted; when the doors corresponding to different baking levels on the baking furnace body are alternately opened or closed, the heating temperature and flow rate of the corresponding layer area can be adjusted and controlled respectively according to the actual baking parameters of the baking area of this layer, so as to accurately control the baking temperature of different baking areas; at the same time, the hot air flow layer formed by this hierarchical heat supply also reduces the different heating rates and baking temperature gradients in the upper and lower areas caused by the rise of baking heat energy in the traditional mixed-flow heat supply structure. This hierarchical heat supply makes the baking temperature control easier to be finely adjusted and accurately controlled, greatly improving and ensuring the excellent product rate and baking quality of the glass substrate.

[0009] Moreover, since the present invention is provided with hot air guiding rib plates on the existing air distributor substrate, the air distributor can not only supply heat to the baking chamber evenly and stably, but also guide and control the heat supply direction and heat supply flow rate of different baking layer areas; the setting of the hot air partition plate structure in the heating chamber and the hot air guiding rib plates on the air distributor can respectively regulate the corresponding heaters and blowers according to the actual baking parameters of different baking layer areas, so as to achieve precise and fine control of the baking temperature of different baking layer areas; the hot air guiding rib plates on the air distributor can accurately control the flowing direction of the hot air supply, so that the baking hot air is blown into different baking layer areas in a directional manner, so as to achieve precise adjustment and control of the baking temperature of the baking chamber in different areas.

[0010] In a preferred embodiment of the present invention, the hot air partition plates are horizontally and fixedly installed on the furnace body frame of the heating furnace through hot air partition plate frames. Each hot air partition plate corresponds to a transverse air guiding rib plate, and the corresponding transverse air guiding rib plate and the hot air partition plate are on the same horizontal plane; a hierarchical heat conduction channel is formed between two adjacent transverse air guiding rib plates, and the hierarchical heat conduction channel is communicated with the corresponding hierarchical heat supply channel. The formed hierarchical heat supply channels, hierarchical heat conduction channels and the glass substrates at different levels in the baking chamber divide the baking chamber into baking areas that can be accurately regulated respectively, so as to realize precise and fine adjustment and control of the baking parameters of the baking areas.

[0011] In a further embodiment of the present invention, the vertical air guiding rib plates and the transverse guiding rib plates are perpendicular to the air distribution substrate and the air distribution adjusting plate; the air distribution substrate is provided with substrate air distribution holes, and the air distribution adjusting plate is provided with adjusting plate air distribution holes, and the positions of the substrate air distribution holes and the adjusting plate air distribution holes correspond to each other. The air distribution substrate is close to the air filter, and the air distribution adjusting plate and the vertical rib plates and / or transverse guiding rib plates thereon face the baking chamber. This structure can well control the flow rate and flowing direction of the heating air flow, so as to achieve accurate control of the baking temperature.

[0012] In a preferred embodiment of the present invention, the door leaf assembly includes a plurality of door leaves arranged in parallel with each other. Each door leaf is movably supported on the heating furnace body through a corresponding door opening and closing mechanism; a door cavity suction pipe is provided at the position of the baking cavity inside each door leaf; a door top suction hood is further installed at the top position of the heating furnace body, and the door top suction hood is located at the top of the door leaf assembly. A door cavity suction pipe is correspondingly arranged inside each door leaf. In this way, when the door leaf is opened, the door cavity suction pipe enters a negative pressure state and starts to work; since the door cavity suction pipe is arranged in the baking cavity inside the door leaf, it can effectively control the suction volume and suction speed of the hot air flow, and can form a uniform suction surface, without forming waste gas retention and accumulation pollution of organic particulate matter caused by "dead corners" of waste gas inhalation; at the same time, it will not inhale cold air outside the cavity and cause heat energy loss in the recycling, improving energy utilization efficiency; more importantly, the door cavity suction pipe effectively prevents the waste gas with organic solvents from being emitted into the space outside the furnace, avoiding environmental pollution caused by the leakage of volatile organic compounds. The door top suction hood located at the top of the door leaf assembly ensures that the residual external organic waste gas that may leak is also completely collected. The structural combination of the door cavity suction pipe and the door top suction hood forms a reliable zero-leakage structure.

[0013] In a further embodiment of the present invention, the door opening and closing mechanism includes two door leaf swing rods arranged in parallel with each other. A door leaf driving cylinder is hinged on the door leaf swing rods; the two door leaf swing rods are of equal length. One end of the door leaf swing rod is hinged to both ends of the door leaf, and the other end of the door leaf swing rod is hinged to the heating furnace body. This door opening and closing mechanism is a parallelogram link mechanism driven by a cylinder, so that the opened door leaf can approach or leave the door and window in a translational manner, avoiding the formation of a door leaf opening gap and effectively preventing the leakage of hot air flow in the baking cavity.

[0014] In a preferred embodiment of the present invention, the door cavity suction pipe is formed by a suction pipe front folding plate and a suction pipe rear folding plate fixedly connected to each other. A narrow strip-shaped suction channel is formed between the suction pipe front folding plate and the suction pipe rear folding plate, and the suction channel leads to the suction pipe cavity of the door cavity suction pipe through a suction hole channel. A plurality of the door cavity suction pipes are connected to a door cavity collecting suction pipe through a pipe valve, and the pipe valve is a pneumatic stop valve. It not only ensures the uniform suction of the door cavity suction pipe inside the door leaf, but also can accurately control the suction collection and stop closing of the suction pipe.

[0015] In a preferred embodiment of the present invention, the suction hood body of the door top suction hood is in a tubular structure, and a plurality of hood body suction holes are provided on the suction hood body. The door top suction hood leads to a door top suction hood exhaust pipe. It ensures the suction collection of the waste gas that may leak outside the door. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The following further describes the precision temperature-controlled glass substrate baking furnace of the present invention in conjunction with the drawings and specific embodiments.

[0017] Figure 1 This is a schematic diagram of the three-dimensional structure of a specific embodiment of the precision temperature-controlled glass substrate baking furnace of the present invention;

[0018] Figure 2 yes Figure 1 The door leaf assembly and door leaf opening and closing mechanism in the embodiment shown;

[0019] Figure 3 yes Figure 1 Schematic diagram of the installation structure of the door cavity suction pipe in the embodiment shown;

[0020] Figure 4 yes Figure 1 A schematic diagram of the installation structure of the hot air baffle on the heating furnace body in the embodiment shown;

[0021] Figure 5 yes Figure 4 Schematic diagram of the vertical section structure;

[0022] Figure 6 yes Figure 4 Schematic diagram of the transverse (horizontal) cross-sectional structure;

[0023] Figure 7 yes Figure 1 A schematic diagram of the communication structure of the portal cavity air intake pipe and the portal cavity collecting air intake pipe in the embodiment shown;

[0024] Figure 8 yes Figure 7 Schematic diagram of the AA cross-section structure of the midportal inspiratory duct;

[0025] Figure 9 yes Figure 1 A schematic diagram of the connection structure between the door top suction hood and the door top suction hood exhaust duct in the embodiment shown;

[0026] Figure 10 yes Figure 9 Schematic diagram of the three-dimensional structure of the middle door top air suction cover;

[0027] Figure 11 yes Figure 1 A three-dimensional structural diagram of a specific embodiment of the air distributor in the embodiment shown;

[0028] Figure 12 yes Figure 11 The three-dimensional structure diagram of the central air distribution unit;

[0029] Figure 13 yes Figure 12 Three-dimensional structural diagram of the central vertical wind guide rib;

[0030] Figure 14 yes Figure 12 A three-dimensional structural diagram of the middle transverse wind guide rib;

[0031] Figure 15 Yes Figure 1 The three-dimensional structure diagram of another specific embodiment of the air distributor in the shown embodiment.

[0032] In the figure, 1 - heating furnace body, 101 - furnace body frame; 2 - furnace body base; 3 - exhaust duct of the air suction hood at the top of the door; 4 - air collecting suction pipe in the door cavity; 5 - door opening and closing mechanism, 501 - door seat, 502 - door connecting rod, 503 - door swing rod, 504 - swing rod support, 505 - door driving cylinder, 506 - cylinder seat; 6 - air suction pipe in the door cavity, 601 - front folding plate of the suction pipe, 602 - air suction channel, 603 - rear folding plate of the suction pipe, 604 - air suction hole channel, 605 - air suction pipe cavity; 7 - door leaf assembly, 701 - door leaf; 8 - air suction hood at the top of the door, 801 - air suction hood body, 802 - air suction hole of the hood body; 9 - hanging bracket at the top of the furnace; 10 - blower; 11 - heater; 12 - preheating and makeup air pipe; 13 - hot air partition frame; 14 - hot air partition; 15 - baking cavity; 16 - glass clamping frame; 17 - air distributor, 171 - vertical air guiding rib plate, 172 - air distribution adjusting plate, 173 - air distribution base plate, 174 - horizontal air guiding rib plate, 178 - air guiding plate mounting ear; 18 - filter; 19 - heating cavity; 20 - hot air discharge pipe of the furnace cavity. Specific embodiments

[0033] As Figure 1 The precision temperature-controlled glass substrate baking furnace shown. The heating furnace body 1 of this substrate baking furnace has a three-dimensional cabinet structure. The heating furnace body 1 is fixedly installed on the furnace body base 2. Heat exchange devices, condensation equipment, volatile agent collectors, fans, electrical control cabinets and other devices are installed in the seat cavity of the furnace body base 2. A door leaf assembly 7 (the lower two door leaves are removed in the figure) is installed on the front side of the heating furnace body 1. Five groups of heaters 11 and blowers 10 are installed on one side of the heating furnace body 1; a preheating and makeup air pipe 12 and a maintenance door are also installed on this side. A number of hanging brackets 9 are installed on the top of the heating furnace body 1. The hanging brackets 9 are used for the installation and maintenance of the equipment in the furnace.

[0034] The door leaf assembly 7 includes 12 openable door leaves 701. Both ends of the door leaf 701 are respectively and openably installed on the heating furnace body 1 through corresponding door leaf opening and closing mechanisms 5. A door cavity suction pipe 6 is installed in the baking cavity inside each door leaf 701. Each door cavity suction pipe 6 is connected to the door cavity collecting suction pipe 4 through a corresponding air pipe valve. The air pipe valve is a commonly used pneumatic stop valve to open and close the corresponding door cavity suction pipe 6. Each door cavity suction pipe 6 is connected in parallel to the door cavity collecting suction pipe 4, and the air pipe valve is located at the connection of the door cavity suction pipe 6 and the door cavity collecting suction pipe 4. A door top suction hood 8 is also installed at the top position of the heating furnace body 1. The door top suction hood 8 is located above the door leaf assembly 7, and the door top suction hood 8 is connected to the door top suction hood exhaust pipe 3.

[0035] As Figure 2 shown, the door leaf closing mechanism 5 fixedly installed at both ends of the door leaf 701 includes two mutually parallel door leaf swing rods 503, and the two door leaf swing rods 503 have the same length. The swinging end of the door leaf swing rod 503 is hinged to the door leaf seat 501, the door leaf seat 501 is fixedly installed at the end of the door leaf 701, the supporting end of the door leaf swing rod 503 is hinged to the swing rod support 504, and the swing rod support 504 is fixedly installed on the heating furnace body 1. The cylinder body of the door leaf driving cylinder 505 is hinged to the heating furnace body 1 through the cylinder seat 506, and the piston rod end of the door leaf driving cylinder 505 is hinged to a door leaf swing rod 503. When the door leaf driving cylinder 505 acts, the door leaf 701 approaches or moves away from the door and window in a translational manner, and a rubber seal is installed inside the door leaf 701.

[0036] As Figure 3 shown, the heating furnace body 1 includes a furnace body frame 101, and the furnace body frame 101 is fixedly assembled by aluminum profiles. A panel is covered on the furnace body frame 101 to form the baking oven furnace body. 12 door cavity suction pipes 6 are detachably installed on the furnace body frame 101 on the door side to facilitate the installation, disassembly and cleaning of the door cavity suction pipes 6. Each door cavity suction pipe 6 corresponds to a door leaf, and the door cavity suction pipe 6 is located inside the door leaf (the door leaf is removed in the figure).

[0037] As Figure 4 shown, the inner side of the furnace wall of the heating furnace body 1 equipped with the heater 11 and the blower 10 is the heating cavity 19. The working ends of the heater 11 and the blower 10 extend into the heating cavity 19, and the other ends of the heater 11 and the blower 10 extend outside the furnace wall plate. 5 hot air partition plates 14 are horizontally arranged in the heating cavity 19, and the hot air partition plates 14 are fixedly installed on the furnace body frame 101 of the heating furnace body 1 through the hot air partition plate frames 13. The 5 hot air partition plates 14 located between the top wall plate and the bottom plate of the heating furnace body 1 divide the heating cavity 19 into six mutually independent hierarchical heating channels. One heater 11 and one blower 10 are fixedly installed in each hierarchical heating channel. The heater 11 is an electric heater, and the blower 10 is a centrifugal fan.

[0038] As Figure 5 , Figure 6 shown, the furnace cavity of the heating furnace body 1 is divided into a heating cavity 19, a baking cavity 15 and a return air passage. The return air passage is connected to the furnace cavity hot air discharge pipe 20. The heating cavity 19 is divided into hierarchical heating channels by a hot air partition plate 14, and the hot air partition plate 14 is horizontally arranged. A glass holder 16 is installed in the baking cavity 15, and several layers of glass substrates can be horizontally placed on the glass holder 16. A filter 18 and a air distributor 17 are sequentially arranged between the heating cavity 19 and the baking cavity 15.

[0039] As Figure 7 , Figure 8 shown, an air suction pipe 6 of the door cavity is installed on the inner side of each door leaf 701. The parallel arranged air suction pipes 6 of the door cavity lead to the air suction pipe 4 of the door cavity collection through corresponding air pipe valves. The air suction pipe 4 of the door cavity collection is connected to a volatile collector located in the furnace body base 2. The air pipe valve is a commonly used pneumatic stop valve. When the door leaf 701 is opened, the corresponding air suction pipe 6 of the door cavity enters the air suction state, and when the door leaf 701 is in the closed state, the pneumatic stop valve closes, and the air suction pipe 6 of the door cavity is in the non-air suction state.

[0040] The air suction pipe 6 of the door cavity is formed by enclosing a front air suction pipe folding plate 601 and a rear air suction pipe folding plate 603 which are bent and fixedly connected. A narrow strip-shaped air suction channel 602 is formed between the front air suction pipe folding plate 601 and the rear air suction pipe folding plate 603. The air suction channel 60 = 2 is located at the lower pipe wall position of the air suction pipe 6 of the door cavity. The narrow strip-shaped structure is beneficial to improving the suction negative pressure and suction force of the air suction pipe 6 of the door cavity. The air suction channel 602 leads to the air suction pipe cavity 605 of the air suction pipe 6 of the door cavity through an air suction hole channel 604. The air suction hole channel 604 is a circular through hole uniformly distributed on the lower wall plate of the front air suction pipe folding plate 601.

[0041] As Figure 9 , Figure 10 shown, the door top air suction hood 8 located at the top of the door leaf assembly 7 includes an air suction hood body 801. The air suction hood body 801 has a square tubular structure, and a number of hood body air suction holes 802 are uniformly arranged at the lower pipe wall position of the air suction hood body 801. The door top air suction hood 8 leads to the door top air suction hood exhaust pipe 3, and the door top air suction hood exhaust pipe 3 also leads to the volatile collector. The door top air suction hood 8 is installed at the top of the heating furnace body 1 and extends to the outside of the plane where the door leaf assembly 7 is located.

[0042] As Figure 11 shown, the air distributor 17 is assembled by a number of air distributor units, so as to facilitate the processing and assembly of the large-area air distributor 17.

[0043] As Figure 12As shown, each air distributor unit includes a plate-shaped air distribution base plate 173. An air distribution adjustment plate 172 is mounted on the air distribution base plate 173 by screws. A vertical air guiding rib plate 171 and a horizontal air guiding rib plate 174 are mounted on the air distribution adjustment plate 172, and the vertical air guiding rib plate 171 and the horizontal air guiding rib plate 174 are arranged perpendicular to each other. The vertical air guiding rib plate 171 and the horizontal air guiding rib plate 174 are perpendicular to the plate surfaces of the air distribution adjustment plate 172 and the air distribution base plate 173. Uniform base plate air distribution holes are provided on the plate surface of the air distribution base plate 173. The base plate air distribution holes are rectangular through holes. Connecting screw holes for mounting the air distribution adjustment plate 172 are also provided on the air distribution base plate 173. Uniform adjustment plate air distribution holes are provided on the plate surface of the air distribution adjustment plate 172. The adjustment plate air distribution holes are also rectangular through holes. An adjustment plate waist slot is provided on the air distribution adjustment plate 172. The adjustment plate waist slot can adjust the relative positions of the air distribution adjustment plate 172 and the air distribution base plate 173, so as to change the actual ventilation hole area formed by the mutually corresponding and stacked adjustment plate air distribution holes and base plate air distribution holes, to meet the baking requirements of different glass substrates.

[0044] As Figure 13 shown, air guiding plate mounting lugs 178 perpendicular to the rib plate surface are welded on the vertical air guiding rib plate 171, so that the vertical air guiding rib plate 171 is fixedly mounted on the plate surface of the air distribution adjustment plate 172. As Figure 14 shown, air guiding plate mounting lugs 178 perpendicular to the rib plate surface are also welded on the horizontal air guiding rib plate 174, to fixedly mount the horizontal air guiding rib plate 174 on the plate surface of the air distribution adjustment plate 172.

[0045] Each hot air partition plate 14 in the heating chamber 19 corresponds to the horizontal air guiding rib plate 174 on an air distributor 17, and the mutually corresponding horizontal air guiding rib plate 174 and hot air partition plate 14 are on the same horizontal plane. A hierarchical heat conduction channel is formed between two adjacent horizontal air guiding rib plates 174. The hierarchical heat conduction channel is on the same plane as and communicates with the corresponding hierarchical heat supply channel. The heaters 11 in the same hierarchical heat supply channel generate baking hot air. Under the action of the blower 10, the baking hot air blows towards the filter 18 and the corresponding hierarchical heat conduction channel along the hierarchical heat supply channel where it is located. The baking hot air flow blows towards the glass substrate on the corresponding layer under the guidance of the hierarchical heat conduction channel. Since the glass substrates placed on the glass holders 16 also naturally form glass baking channels, and the baking hot air generated by the heaters 11 forms an air flow layer with a certain speed and flow direction under the blowing of the blower 10, the baking hot air on different layers is not easily mixed and flows chaotically. In this way, the hot air flow generated by the heaters 11 and the blower 10 in the same hierarchical heat supply channel can only blow towards the corresponding glass baking channel through the corresponding hierarchical heat conduction channel. By adjusting the heating power of the heaters 11 on different layers and the air volume of the blower 10, the corresponding hot air temperature and hot air flow are generated, so as to accurately control the baking temperature of the corresponding layer.

[0046] As Figure 15 shown, the difference between this embodiment and the above-described embodiment is that only the transverse air guiding rib plate 174 is installed on the air distribution adjusting plate 172, and the other structures are the same.

[0047] Only some preferred embodiments of the present invention are listed above, but the present invention is not limited thereto, and many improvements and transformations can be made. As long as the improvements and transformations are made on the basis of the basic principles of the present invention, they should be regarded as falling within the protection scope of the present invention.

Claims

1. A precision temperature-controlled glass substrate baking furnace, comprising a heating furnace body (1), on which a door leaf assembly (7) is movably installed; a glass clamping frame (16) is installed in the baking cavity (15) of the heating furnace body (1), and a plurality of heaters (11) and a blower (10) are arranged in the heating cavity (19) of the heating furnace body (1); the heating cavity (19) is communicated with the baking cavity (15) through a filter (18) and an air distributor (17), and is characterized in that: In the heating chamber (19), a plurality of hot air partition plates (14) are arranged in parallel. A hierarchical heat supply channel is formed between two adjacent hot air partition plates (14). In each hierarchical heat supply channel, a heater (11) and a blower (10) are correspondingly arranged; the air distributor (17) includes an air distribution base plate (173) and an air distribution adjustment plate (172) which are stacked on each other. On the surface of the air distribution base plate (173) or the air distribution adjustment plate (172), vertical air guiding rib plates (171) and horizontal air guiding rib plates (174) are fixedly arranged. The vertical air guiding rib plates (171) and the horizontal air guiding rib plates (174) face the baking chamber (15); each hot air partition plate (14) corresponds to a horizontal air guiding rib plate (174). The mutually corresponding horizontal air guiding rib plates (174) and the hot air partition plates (14) are on the same horizontal plane; a hierarchical heat conduction channel is formed between two adjacent horizontal air guiding rib plates (174), and the hierarchical heat conduction channel is communicated with the corresponding hierarchical heat supply channel; the vertical air guiding rib plates (171) and the horizontal air guiding rib plates (174) are perpendicular to the air distribution base plate (173) and the air distribution adjustment plate (172).

2. The precision temperature-controlled glass substrate baking furnace according to claim 1, characterized in that: The hot air partition plates (14) are horizontally and fixedly installed on the furnace body frame (101) of the heating furnace body (1) through hot air partition plate frames (13).

3. The precision temperature-controlled glass substrate baking furnace according to claim 1, characterized in that: Substrate air distribution holes (175) are arranged on the air distribution base plate (173), and adjustment plate air distribution holes (177) are arranged on the air distribution adjustment plate (172). The positions of the substrate air distribution holes (175) and the adjustment plate air distribution holes (177) correspond to each other.

4. The precision temperature-controlled glass substrate baking furnace according to claim 3, characterized in that: The air distribution base plate (173) is close to the air filter (18), and the air distribution adjustment plate (172) and the vertical air guiding rib plates (171) and the horizontal air guiding rib plates (174) thereon face the baking chamber (15).

5. The precision temperature-controlled glass substrate baking furnace according to claim 1, wherein: The door leaf assembly (7) includes a plurality of door leaves (701) arranged in parallel. Each door leaf (701) is movably supported on the heating furnace body (1) through a corresponding door leaf opening and closing mechanism (5); at the position of the baking chamber (15) inside each door leaf (701), a door cavity air suction pipe (6) is arranged; at the top position of the heating furnace body (1), a door top air suction hood (8) is further installed, and the door top air suction hood (8) is located at the top of the door leaf assembly (7).

6. The precision temperature-controlled glass substrate baking furnace according to claim 5, characterized in that: The door leaf opening and closing mechanism (5) includes two door leaf swing rods (503) arranged in parallel. A door leaf driving cylinder (505) is hinged on the door leaf swing rods (503); the two door leaf swing rods (503) have the same length. One end of each door leaf swing rod (503) is hinged to both ends of the door leaf ( 7. The precision temperature-controlled glass substrate baking furnace according to claim 5 or 6, characterized in that: ​ 8. The precision temperature-controlled glass substrate baking furnace according to claim 7, wherein: A plurality of the cavity-gate suction pipes (6) are connected to a cavity-gate collecting suction pipe (4) via a trachea valve, and the trachea valve is a pneumatic stop valve.

9. The precision temperature-controlled glass substrate baking furnace according to claim 5 or 6, characterized in that: The suction hood body (801) of the top-gate suction hood (8) has a tubular structure, and a plurality of hood body suction holes (802) are provided on the suction hood body (801).

10. The precision temperature-controlled glass substrate baking furnace according to claim 9, wherein: The top-gate suction hood (8) leads to a top-gate suction hood exhaust pipe (3).

Images