End face seal structure of a plug-in valve and method for manufacturing the same

Abstract

The present application relates to the field of sealing, in particular to an end face sealing structure of a plug valve and a manufacturing method thereof. The end face sealing structure of the plug valve of the present application mainly comprises a detachable connecting structure, an end face sealing ring, a sealing cover plate, an O-shaped sealing ring and a sealing base plate. The sealing cover plate is fixed on the sealing base plate through the detachable connecting structure on the inner side, and the sealing cover plate and the sealing base plate are sealed through the O-shaped sealing ring; the outer side of the sealing cover plate is provided with the end face sealing ring. The fusion of the end face sealing ring is realized by laser heating, the side surface of the end face sealing ring is fused first, and then the bottom surface of the end face sealing ring is fused, and the local non-uniform heating mode is adopted to ensure that no internal stress is generated in the laser fusion process, so that the deformation of the sealing ring caused by stress release can be prevented, and the sealing effect is affected. The present application can be applied to the end face sealing of a vacuum plug valve.

Description

Technical Field

[0001] This invention relates to the field of sealing, and specifically to an end face sealing structure for a slide gate valve and its manufacturing method. Background Technology

[0002] Vacuum gate valves are used to ensure the vacuum level of semiconductor etching chambers, and their sealing structure is a key component determining their sealing performance and maintaining the cleanliness of the etching chamber. Typically, the sealing rings of vacuum gate valves are made of fluororubber. To prevent foreign material molecules from entering the etching chamber, a one-piece sealing structure is usually created by directly bonding the sealing ring to the sealing substrate. The bonding process for the sealing ring involves: applying a vulcanizing adhesive – drying – installing the sealing ring – vulcanization. This process is complex, time-consuming (usually several days), and has high environmental requirements. When the sealing ring fails, the entire sealing component needs to be replaced, resulting in high operating costs. The invention patent application number 201980013569.2, "Manufacturing Method of Polyamide Resin Composition and its Molded Body, Laser-Welded Body," uses laser irradiation through a transparent resin component to irradiate the adhesive to achieve the welding of different types of resin materials. This method requires filler material and direct laser irradiation, making it unsuitable for welding metal materials and opaque rubber. Summary of the Invention

[0003] The purpose of this invention is to provide an end face sealing structure for a slide gate valve and its manufacturing method. While greatly simplifying the manufacturing process and achieving a good sealing effect, it can also enable quick replacement, significantly reduce manufacturing and usage costs, and is suitable for welding between metal materials and opaque rubber.

[0004] To solve the above technical problems, the specific technical solution adopted by the present invention is as follows.

[0005] A method for manufacturing an end face sealing structure for a slide gate valve, characterized by comprising the following steps:

[0006] Step 1: Use quartz sand to treat the sealing end face (31) and sealing side face (32) of the sealing cover plate (3) to remove the oxide scale and grease on the surface, and make the surface roughness of the sealing end face (31) and sealing side face greater than Ra3.2 and less than Ra6.4.

[0007] Step 2: A first black polyester tape (61) is pasted on the inner side of the sealing cover (3), with the lower edge of the first black polyester tape (61) being 0.2~0.3mm from the inner bottom surface (34); a second black polyester tape (62) is pasted on the outer side of the lower surface of the sealing cover (3), with the inner side of the second black polyester tape (62) being 0.2~0.3mm from the sealing side surface (32); the width of the first black polyester tape (61) is less than the height of the side baffle (35). b4The width of the second black polyester tape (62) is greater than the width of the sealing end face (31). b3 .

[0008] Step 3: Apply pressure F1 to the side of the end face sealing ring (2). The pressure F1 is between 1 and 2 MPa. Then, use a laser beam to irradiate the first black polyester tape (61). The laser beam travels around the inner side (33) at a constant speed to complete the welding of the end face sealing ring (2) and the sealing side (32). Then, remove F1.

[0009] Step 4: Apply pressure F2 above the end face sealing ring (2). The pressure F2 is between 1 and 2 MPa. Then, use a laser beam to irradiate the second black polyester tape (62). The laser beam travels around the outside of the bottom surface (37) at a constant speed to complete the welding of the end face sealing ring (2) and the sealing end face (31). Remove F2.

[0010] Step 5: Remove the first black polyester tape (61) and the second black polyester tape (62) to complete the welding of the end face sealing ring (2) and the sealing cover plate (3).

[0011] The laser beam is a continuous laser with a wavelength of 1064 nm, a scanning speed of 3~5 mm / s, and a power density range of 5000~10000 W / cm². 2 .

[0012] The thickness of the first black polyester tape (61) and the second black polyester tape (62) is 30~50μm.

[0013] The surface treatment mentioned is sandblasting or other cleaning and roughening methods.

[0014] An end-face sealing structure for a slide gate valve includes an end-face sealing ring (2) and a sealing base plate (5), characterized in that it further includes: a detachable connection structure (1), a sealing cover plate (3), and an O-ring (4), wherein the thickness of the side baffle (35) and the bottom surface (37) of the sealing cover plate (3) are... b1 and b2 The thickness is equal to that of the sealing cover plate (3), which is 2 to 2.5 mm. The sealing cover plate (3) is fixed to the sealing substrate (5) by the detachable connection structure (1) on the inner side. The sealing cover plate (3) and the sealing substrate (5) are sealed by an O-ring (4). An end face sealing ring (2) is installed on the outer side of the sealing cover plate (3). This is different from the existing method of manufacturing on the sealing substrate by direct bonding.

[0015] The detachable connection structure (1) has a sealing cover plate (3) and a sealing base plate (5) made of the same material, namely aluminum alloy or stainless steel.

[0016] The end face sealing ring (2) and the O-ring sealing ring (4) are made of fluororubber.

[0017] The present invention has the following beneficial effects:

[0018] 1. This invention uses laser welding to weld the end face sealing ring and the sealing cover plate, which can greatly simplify the manufacturing process of the end face sealing ring and shorten the manufacturing time of the sealing structure.

[0019] 2. This invention uses a laser sequential welding method to first achieve side welding of the end face sealing ring (2), and then achieve end face welding of the end face sealing ring (2). In order to ensure that no internal stress is generated inside the end face sealing ring (2) during the welding process, the solution adopted is that the distance between the lower edge of the first black polyester tape (61) and the inner bottom surface (34) is 0.2~0.3mm, and the width of the first black polyester tape (61) is less than the height of the side baffle (35). b4， The purpose is that aluminum alloy has extremely high reflectivity to lasers with a wavelength of 1064nm. Applying black polyester tape can cause the temperature in this area to rise rapidly, while the temperature in the area without tape rises more slowly. This technique can achieve the fusion of the side of the end face sealing ring (2) with the sealing side (32) of the sealing cover plate (3), while the bottom surface of the end face sealing ring (2) and the bottom surface of the sealing cover plate (3) are not fused. Then F1 is removed, and the sealing end face (31) is fused again. Since the width of the second black polyester tape (62) is greater than the width of the sealing end face (31), b3 This allows for complete fusion between the bottom surface of the end face sealing ring (2) and the sealing end face (31) of the sealing cover plate (3).

[0020] 3. The side baffle (35) and bottom plate (36) of the sealing cover plate (3) of the present invention have a thickness range of 2~2.5mm. While ensuring the sealing cover plate, it is beneficial to quickly transfer heat during laser irradiation and realize the complete fusion of the end face sealing ring (2) and the sealing surface.

[0021] 4. By separating the sealing cover plate (3) from the sealing base plate (5), the present invention enables rapid replacement when the end face sealing ring (2) fails, thus facilitating rapid equipment maintenance. The sealing ring of the present invention is detachable and can replace the existing integrated sealing ring. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the end face sealing structure of the slide gate valve of the present invention;

[0023] Figure 2 This is a schematic diagram of the end face sealing ring installation;

[0024] Figure 3 Top view of the sealing cover;

[0025] Figure 4 A three-dimensional schematic diagram of the cross-sectional sealing structure of the slide gate valve of the present invention.

[0026] In the figure: 1 Detachable connection structure; 2 End face sealing ring; 3 Sealing cover plate; 4 O-ring sealing ring; 5 Sealing base plate; 31 Sealing end face; 32 Sealing side; 33 Inner side; 34 Inner bottom; 35 Side baffle; 36 Base plate; 37 Bottom surface; 61 First black polyester tape; 62 Second black polyester tape. Detailed Implementation

[0027] To better illustrate the implementation details of the present invention, the technical solution of the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. Figure 3 This is a top view of the sealing cover. Figure 4 This is a three-dimensional schematic diagram of the cross-sectional sealing structure of the slide gate valve of the present invention.

[0028] An end-face sealing structure for a slide gate valve according to the present invention is as follows: Figure 1 As shown, it includes a detachable connection structure 1, namely screws, an end face sealing ring 2, a sealing cover plate 3, an O-ring sealing ring 4, and a sealing base plate 5. The sealing cover plate 3 is fixed to the sealing base plate 5 by screws on the inside, and the sealing cover plate 3 and the sealing base plate 5 are sealed by the O-ring sealing ring 4; the end face sealing ring 2 is installed on the outside of the sealing cover plate 3.

[0029] Example 1

[0030] In this example, both the sealing substrate 5 and the sealing cover 3 are made of 6061 aluminum alloy, and both the end face sealing ring 2 and the O-ring 4 are made of perfluororubber. The following steps are used to achieve the welding of the sealing cover 3 and the end face sealing ring 2:

[0031] Step 1: Use 200-mesh quartz sand to... Figure 1 The sealing end face 31 and sealing side face 32 of the sealing cover plate 3 shown are sandblasted to remove the oxide scale and grease on the surface, and to make the surface roughness of the sealing end face 31 and sealing side face greater than Ra3.2 and less than Ra6.4.

[0032] Step 2: Adhere the first black polyester tape 61 to the inner side of the sealing cover plate 3, with the lower edge of the first black polyester tape 61 0.2mm away from the inner bottom surface 34; Adhere the second black polyester tape 62 to the outer side of the lower surface of the sealing cover plate 3, with the inner side of the second black polyester tape 62 0.2mm away from the sealing side surface 32.

[0033] Step 3: Apply a pressure of 1 MPa to the side of the end face sealing ring 2, and then use a power density of 5000 W / cm². 2The laser beam irradiates the first black polyester tape 61, and the laser beam travels around the inner side 33 at a uniform speed of 3 mm / s to complete the welding of the end face sealing ring 2 and the sealing side 32.

[0034] Step four: Apply a pressure of 1 MPa above the end face sealing ring 2, then use 5000 W / cm 2 The laser beam irradiates the second black polyester tape 62, and the laser beam travels around the outer side of the bottom surface 37 at a uniform speed of 3 mm / s to complete the welding of the end face sealing ring 2 and the sealing end face 31.

[0035] Step 5: Remove the first black polyester tape 61 and the second black polyester tape 62 to complete the welding of the end face sealing ring 2 and the sealing cover plate 3.

[0036] The sealing structure of the slide gate valve manufactured by this method has been tested and found to meet the usage requirements. The manufacturing process of the sealing structure takes about 30 minutes, and the manufacturing cost is low and maintenance is convenient.

[0037] Example 2

[0038] In this example, both the sealing substrate 5 and the sealing cover 3 are made of 304 stainless steel, and both the end face sealing ring 2 and the O-ring 4 are made of perfluororubber. The following steps are used to achieve the welding of the sealing cover 3 and the end face sealing ring 2:

[0039] Step one: Use laser cleaning to clean, for example... Figure 1 The sealing end face 31 and sealing side face 32 of the sealing cover plate 3 shown are cleaned and roughened to remove the oxide scale and grease on the surface, and to make the surface roughness of the sealing end face 31 and sealing side face greater than Ra3.2 and less than Ra6.4.

[0040] Step 2: Adhere the first black polyester tape 61 to the inner side of the sealing cover plate 3, with the lower edge of the first black polyester tape 61 0.3mm away from the inner bottom surface 34; Adhere the second black polyester tape 62 to the outer side of the lower surface of the sealing cover plate 3, with the inner side of the second black polyester tape 62 0.3mm away from the sealing side surface 32.

[0041] Step 3: Apply a pressure of 2 MPa to the side of the end face sealing ring 2, and then use a power density of 10000 W / cm². 2 The laser beam irradiates the first black polyester tape 61, and the laser beam travels around the inner side 33 at a uniform speed of 5 mm / s to complete the welding of the end face sealing ring 2 and the sealing side 32.

[0042] Step four: Apply a pressure of 2 MPa above the end face sealing ring 2, then use 10000 W / cm 2The laser beam irradiates the second black polyester tape 62. The laser beam travels around the outer side of the bottom surface 37 at a uniform speed of 5 mm / s, completing the welding of the end face sealing ring 2 and the sealing end face 31.

[0043] Step 5: Remove the first black polyester tape 61 and the second black polyester tape 62 to complete the welding of the end face sealing ring 2 and the sealing cover plate 3.

[0044] The sealing structure of the slide gate valve manufactured by this method has been tested and found to meet the usage requirements. The manufacturing process of the sealing structure takes about 20 minutes, and the manufacturing cost is low and maintenance is convenient.

[0045] Installation of the sealing structure of the slide gate valve: After completing the welding of the end face sealing ring 2 and the sealing cover plate 3 (such as... Figure 2 After that (as shown), first install the O-ring 4 into the sealing groove of the sealing substrate 5 (as shown). Figure 4 (as shown), then as Figure 2 The sealing cover plate 4, which is laser-welded with an end face sealing ring 3, covers the sealing base plate 5. The sealing cover plate 3 and the seal 5 are connected together by screws to complete the installation of the gate valve sealing structure.

[0046] Disassembly of the sealing structure of the slide gate valve: When the sealing ring is damaged, remove the screws to separate the sealing cover plate 3 from the sealing base plate 5, and then... Figure 2 The sealing cover plate 4, which is laser-welded with end face sealing ring 3, covers the sealing substrate 5. The sealing cover plate 3 and the seal 5 are connected together by screws to complete the replacement of the sealing structure.

Claims

1. A method for manufacturing an end face sealing structure for a slide gate valve, characterized in that... Includes the following steps: Step 1: Use quartz sand to treat the sealing end face (31) and sealing side face (32) of the sealing cover plate (3) to remove the oxide scale and grease on the surface, and make the surface roughness of the sealing end face (31) and sealing side face greater than Ra3.2 and less than Ra6.

4. Step 2: A first black polyester tape (61) is pasted on the inner side of the sealing cover (3), with the lower edge of the first black polyester tape (61) being 0.2~0.3mm from the inner bottom surface (34); a second black polyester tape (62) is pasted on the outer side of the lower surface of the sealing cover (3), with the inner side of the second black polyester tape (62) being 0.2~0.3mm from the sealing side surface (32); the width of the first black polyester tape (61) is less than the height of the side baffle (35). b4 The width of the second black polyester tape (62) is greater than the width of the sealing end face (31). b3 ; Step 3: Apply pressure F1 to the side of the end face sealing ring (2). The pressure F1 is between 1 and 2 MPa. Then, use a laser beam to irradiate the first black polyester tape (61). The laser beam travels around the inner side (33) at a constant speed to complete the welding of the end face sealing ring (2) and the sealing side (32). Then, remove F1. Step 4: Apply pressure F2 above the end face sealing ring (2). The pressure F2 is between 1 and 2 MPa. Then, use a laser beam to irradiate the second black polyester tape (62). The laser beam travels around the outside of the bottom surface (37) at a constant speed to complete the welding of the end face sealing ring (2) and the sealing end face (31). Remove F2. Step 5: Remove the first black polyester tape (61) and the second black polyester tape (62) to complete the welding of the end face sealing ring (2) and the sealing cover plate (3); The end face sealing structure includes a detachable connection structure (1), wherein the sealing cover plate (3) and the sealing base plate (5) are made of the same material, namely aluminum alloy or stainless steel. The end face sealing ring (2) and the O-ring sealing ring (4) are made of fluororubber.

2. The manufacturing method of the end face sealing structure of a slide gate valve according to claim 1, characterized in that: The laser beam is a continuous laser with a wavelength of 1064 nm, a scanning speed of 3~5 mm / s, and a power density range of 5000~10000 W / cm². 2 .

3. The manufacturing method of the end face sealing structure of a slide gate valve according to claim 1, characterized in that: The thickness of the first black polyester tape (61) and the second black polyester tape (62) is 30~50μm.

4. The manufacturing method of the end face sealing structure of a slide gate valve according to claim 1, characterized in that: The surface treatment can be sandblasting or other cleaning and texturing methods.

5. The end-face sealing structure obtained by the manufacturing method of the end-face sealing structure of the slide gate valve according to any one of claims 1-4, comprising an end-face sealing ring (2) and a sealing base plate (5), characterized in that... It also includes: a detachable connection structure (1), a sealing cover (3), and an O-ring (4), wherein the thickness of the side baffle (35) and the bottom surface (37) of the sealing cover (3) is... b1 and b2 Equal thickness, ranging from 2 to 2.5 mm; the sealing cover (3) is fixed to the sealing substrate (5) by the detachable connection structure (1) on the inner side, and the sealing cover (3) and the sealing substrate (5) are sealed by an O-ring (4); an end face sealing ring (2) is installed on the outer side of the sealing cover (3).

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