Method for using an atomic gas chamber filling preparation system for realizing raw material recovery

Abstract

This invention provides a method for using an atomic gas chamber filling preparation system that enables raw material recovery, applicable to the field of atomic gas chamber manufacturing. Addressing the problem of low raw material utilization in current atomic gas chamber filling preparation processes, this invention proposes a process scheme for recovering and reusing residual alkali metals and rare gases in the filling pipeline after atomic gas chamber preparation. The atomic gas chamber filling system incorporates two-stage recovery and purification modules. After gas chamber filling is completed, the remaining alkali metals in the pipeline are first purified and recovered using an electric chiller; then, the remaining rare gases in the pipeline are separated, purified, and recovered using a cryogenic chiller. The recovered alkali metals and rare gases can be reused in subsequent batches of gas chamber preparation. This invention enables the recovery and reuse of high-value alkali metals and rare gases during atomic gas chamber preparation, effectively reducing the preparation cost of atomic gas chambers by improving raw material utilization.

Description

Technical Field

[0001] This invention relates to the field of atomic gas cell manufacturing technology, and in particular to a method of using an atomic gas cell filling preparation system that enables raw material recovery. Background Technology

[0002] The atomic gas chamber is a core component of quantum instruments such as gyroscopes, magnetometers, and atomic clocks, and its performance directly affects the final accuracy of these instruments. Atomic gas chambers typically employ a glass cubic / cylindrical structure. The usual operating procedure involves first evacuating the empty glass shell of the atomic gas chamber, then filling it with alkali metals and a filling gas, and finally sealing the chamber by melting the glass tube at high temperature. The alkali metals used to fill the atomic gas chamber include rubidium, cesium, and potassium. Some alkali metal isotopes, such as rubidium-87, are very expensive, with each gram of raw material costing around 100,000 yuan. The rare gases used include helium, xenon, neon, and argon, some of which are very expensive (especially helium-3 and neon-21, which can cost tens of thousands of yuan per liter and are heavily reliant on imports). This results in a high manufacturing cost for atomic gas chambers.

[0003] For millimeter-sized atomic gas cells, the piping volume in the gas cell manufacturing system is hundreds to thousands of times larger than the gas cell volume. After the gas cell is filled, the residual alkali metals and rare gases in the piping are directly discharged, resulting in very low filling efficiency for alkali metals and rare gases. Against this backdrop, recycling and utilizing the alkali metals (mainly rubidium-87) and rare gases (primarily helium-3 and neon-21) generated during the gas cell preparation process can significantly improve the utilization rate of rare gases, reduce the manufacturing cost of atomic gas cells, and yield substantial economic benefits. Summary of the Invention

[0004] The purpose of this invention is to overcome the shortcomings of existing technologies and address the problem of low raw material utilization in current atomic gas chamber filling preparation processes. It proposes a method for using an atomic gas chamber filling preparation system that enables raw material recovery. The system incorporates two-stage recovery and purification modules. After atomic gas chamber filling is completed, the remaining alkali metals in the recovery pipeline are first purified and recovered using an electric chiller; then, the remaining rare gases in the recovery pipeline are separated, purified, and recovered using a cryogenic chiller. The recovered alkali metals and rare gases can be reused in subsequent batches of gas chamber preparation. This achieves the recovery and reuse of high-value alkali metals and rare gases during atomic gas chamber preparation, effectively reducing the preparation cost of atomic gas chambers by improving raw material utilization and laying the foundation for low-cost, large-scale preparation of atomic gas chambers.

[0005] The above-mentioned objectives of the present invention are mainly achieved through the following technical solutions:

[0006] A method for using an atomic gas chamber filling preparation system for raw material recovery, the system comprising a vacuum maintenance and gas filling module, an evacuation valve, an alkali metal reaction module, an alkali metal valve, an atomic gas chamber preparation module, a heating and baking module, an alkali metal recovery valve, an alkali metal recoverer, a gas recovery valve, a gas purifier, a cryogenic refrigerator, a recovery gas cylinder module, and recovery pipelines; the method of use includes a method for recovering alkali metals and filling gas, and a method for reusing alkali metals and filling gas, wherein the method for recovering alkali metals and filling gas includes:

[0007] Ensure that the evacuation valve, alkali metal valve, alkali metal recovery valve, and gas recovery valve are closed, and start the atomic gas chamber filling preparation system;

[0008] Turn on the heating and baking module and open the alkali metal recovery valve;

[0009] Start the alkali metal recovery unit to recover the residual alkali metals in the system;

[0010] After the alkali metal recovery is complete, shut down the alkali metal recovery unit and the heating and baking module.

[0011] Open the gas recovery valve and start the cryogenic refrigerator. The filling gas to be recovered is purified and then enters the cryogenic refrigerator.

[0012] Set cooling temperature T I The filling gas I is recovered into the first recovery gas cylinder and stored; after the filling gas I is recovered, the cooling temperature T is set. II Filling gas II is recovered and stored in the second recovery gas cylinder; this process is repeated until all types of filling gases have been recovered and stored; the gas liquefaction points from highest to lowest are: filling gas I > filling gas II > ... > filling gas M;

[0013] After all filling gases have been separated and recovered, the cryogenic refrigerator, gas recovery valve, and alkali metal recovery valve are closed in sequence, and the recovery of alkali metals and filling gases is completed.

[0014] Furthermore, the method for reusing alkali metals and filling gases includes the following steps:

[0015] Ensure that the evacuation valve, alkali metal valve, alkali metal recovery valve, and gas recovery valve are closed, and start the atomic gas chamber filling preparation system;

[0016] Open the evacuation valve, and the vacuum maintenance and gas filling module will evacuate the system. Then, turn on the heating and baking module.

[0017] After the system reaches the preset vacuum level, the heating and baking module is turned off, the alkali metal recovery valve is turned on, and the alkali metal recovery device transfers the alkali metal to the mixing and dispensing device.

[0018] Open the gas recovery valve, and the gas recovery cylinder module will deliver the gas to the mixing and dispensing unit;

[0019] The mixing and dispensing unit delivers the alkali metal and filling gas to the atomic gas chamber;

[0020] Each atomic gas cell is then sealed and removed, completing the preparation of the atomic gas cells.

[0021] The gas recovery valve and alkali metal recovery valve are closed, and the alkali metal and filling gas reuse process is complete.

[0022] Furthermore, the alkali metal and filling gas in the atomic gas chamber preparation module evaporate along the recovery pipeline. An alkali metal recoverer, a gas purifier, and a cryogenic refrigerator are sequentially installed on the recovery pipeline. The filling gas in the recovery pipeline is condensed by the cryogenic refrigerator and stored in the recovery gas cylinder module.

[0023] The heating and baking module is used to bake and degas the atomic gas chamber preparation module and accelerate the diffusion of alkali metals and filling gas into the recovery pipeline.

[0024] An alkali metal recovery valve is installed between the atomic gas chamber preparation module and the alkali metal recovery device, and is opened during the alkali metal recovery process and the alkali metal reuse process.

[0025] An alkali metal recovery unit is used to condense and recover alkali metals during the alkali metal recovery process. During the alkali metal reuse process, the alkali metals recovered by heating are charged into the atomic gas chamber preparation module.

[0026] The gas recovery valve is located between the alkali metal recovery unit and the gas purifier, and is opened during the filling gas recovery process and the filling gas reuse process.

[0027] A gas purifier is used to purify the filling gas that diffuses into the recovery pipeline during the filling gas recovery process, removing impurities before it enters the cryogenic refrigerator.

[0028] The cryogenic refrigeration unit is used to determine the refrigeration temperature based on the freezing point of the filling gas, separate and recover different types of filling gases, and store the separated filling gas in the recovery gas cylinder module.

[0029] Furthermore, the vacuum maintenance and gas filling module is used to evacuate the system before the atomic gas chamber is prepared and to measure the system vacuum level in real time; and to supply filling gas to the atomic gas chamber preparation module during the atomic gas chamber preparation.

[0030] The evacuation valve is located between the vacuum maintenance and gas filling module and the atomic gas chamber preparation module, and is opened during the atomic gas chamber preparation process.

[0031] Furthermore, the alkali metal reaction module is used to generate alkali metals which are then transported to the atomic gas chamber preparation module;

[0032] The alkali metal valve is located between the alkali metal reaction module and the atomic gas chamber preparation module, and is opened during the atomic gas chamber preparation process.

[0033] Furthermore, the atomic gas chamber preparation module includes a mixing and dispensing device, N filling tubes, and N atomic gas chambers, where N ≥ 1;

[0034] The mixing and dispensing unit receives alkali metal from the alkali metal reaction module and filling gas from the vacuum maintenance and gas filling module, and mixes the filling gas evenly.

[0035] The two ends of the filling tube are connected to the mixing and dispensing device and the atomic gas chamber, respectively. The mixing and dispensing device is connected to the N atomic gas chambers through N filling tubes.

[0036] Furthermore, the alkali metal recovery unit utilizes electric refrigeration to obtain a low temperature of 5-10°C for condensing and recovering alkali metals that diffused into the recovery pipeline during the preparation of the atomic gas chamber; the alkali metal recovery unit is equipped with a heater for heating the recovered alkali metals to refill the atomic gas chamber preparation module.

[0037] Furthermore, the gas recovery cylinder module includes M gas recovery cylinders for storing different types of filling gases obtained from the condensation and separation of the cryogenic refrigeration unit, where M ≥ 1;

[0038] The gas cylinder is equipped with an oxygen-free copper heat exchanger at its opening, and the gas stored in the gas cylinder has a pressure of 0-1 MPa.

[0039] Furthermore, it also includes a pressure sensor, which is installed between the alkali metal recoverer and the gas purifier to detect the absolute pressure of the gas in the recovery pipeline.

[0040] Compared with the prior art, the present invention has the following advantages:

[0041] (1) This method involves setting up two-stage recovery and purification modules within the atomic gas chamber preparation system. After the gas chamber filling preparation is completed, the remaining alkali metals in the recovery pipeline are first purified and recovered using an electric chiller, and then the remaining rare gases in the recovery pipeline are separated, purified, and recovered using a cryogenic chiller. The recovered alkali metals and rare gases can be reused in subsequent batches of gas chamber preparation. This method achieves the separation, purification, and storage of alkali metals and different rare gases, which can then be used for subsequent atomic gas chamber preparation.

[0042] (2) When the remaining alkali metals and rare gases after the preparation of the atomic gas chamber are recycled and reused, this method can effectively reduce the preparation cost of the atomic gas chamber by improving the utilization rate of raw materials, compared with the method of directly discharging the alkali metals and rare gases remaining in the pipeline after the gas chamber is filled in the existing technology. This lays the foundation for the low-cost mass production of atomic gas chambers. Attached Figure Description

[0043] Figure 1 This is a schematic diagram of an atomic gas chamber filling preparation system for realizing raw material recovery according to the present invention. Detailed Implementation

[0044] This invention provides a method for using an atomic gas chamber filling preparation system that enables raw material recovery, including a method for recovering alkali metals and filling gas, and a method for reusing alkali metals and filling gas.

[0045] First, the filling preparation system is described, including a vacuum maintenance and gas filling module 1, an evacuation valve 2, an atomic gas chamber preparation module, a heating and baking module 6, an alkali metal valve 7, an alkali metal reaction module 8, a recovery pipeline, an alkali metal recovery valve 9, an alkali metal recoverer 10, a gas recovery valve 11, a pressure sensor 12, a gas purifier 13, a cryogenic refrigerator 14, and a recovery gas cylinder module. In this embodiment, the recovery gas cylinder module includes a first recovery gas cylinder 15, a second recovery gas cylinder 16, a third recovery gas cylinder 17, and a fourth recovery gas cylinder 18.

[0046] The vacuum maintenance and gas filling module 1, the atomic gas chamber preparation module, and the alkali metal reaction module 8 are connected in series. An evacuation valve 2 is provided between the vacuum maintenance and gas filling module 1 and the atomic gas chamber preparation module, and an alkali metal valve 7 is provided between the atomic gas chamber preparation module and the alkali metal reaction module 8.

[0047] Furthermore, the atomic gas chamber preparation module includes a mixing and dispensing device 3, N filling tubes 4, and N atomic gas chambers 5, where N ≥ 1. The vacuum maintenance and gas filling module 1 is connected to the mixing and dispensing device 3, and the alkali metal reaction module 8 is connected to the mixing and dispensing device 3. The mixing and dispensing device 3 is connected to the N atomic gas chambers 5 via the N filling tubes 4.

[0048] The alkali metal and filling gas in the mixing and dispensing unit 3 evaporate along the recovery pipeline, which is sequentially equipped with an alkali metal recoverer 10, a gas purifier 13, and a cryogenic refrigerator 14. An alkali metal recovery valve 9 is installed between the mixing and dispensing unit 3 and the alkali metal recoverer 10, and a gas recovery valve 11 and a pressure sensor 12 are installed between the alkali metal recoverer 10 and the gas purifier 13. The cryogenic refrigerator 14 condenses and separates the filling gas in the recovery pipeline and stores it in the first recovery gas cylinder 15, the second recovery gas cylinder 16, the third recovery gas cylinder 17, and the fourth recovery gas cylinder 18.

[0049] The description of each component is as follows:

[0050] Vacuum maintenance and gas filling module 1 includes a three-stage vacuum pump (an oil-free dry pump, a molecular pump, and an ion pump, in sequence), with an ultimate vacuum level better than 10. -7Before the atomic gas chamber is prepared, the oil-free dry pump, molecular pump and ion pump are turned on in sequence to evacuate the air in the system, and the system vacuum degree is measured and displayed in real time. During the preparation of the atomic gas chamber, different gases (helium, neon, xenon, argon, etc.) are provided in quantitative filling according to the gas ratio.

[0051] Vacuum valve 2 is used to control the delivery of filling gas between vacuum maintenance and gas filling module 1 and mixing and dispensing device 3, with a vacuum leakage rate better than 1×10⁻⁶. -12 Pa·L / s.

[0052] The mixing and dispensing unit 3 is made of quartz glass or borosilicate glass and is used to mix the filling gas evenly.

[0053] The filling tube 4 is made of quartz glass or borosilicate glass. The inner diameter of the filling tube 4 is 1-4 mm and the wall thickness is 0.5-1 mm. It is used to transport the filling gas in the mixing and dispensing device 3 and the alkali metal generated by the reaction of the alkali metal reaction module 8 to the atomic gas chamber 5.

[0054] The atomic gas chamber 5 is made of quartz glass or borosilicate glass, with the inner cavity size of the glass shell ranging from 2 to 50 mm and the wall thickness of the glass shell ranging from 0.5 to 1 mm.

[0055] The heating and baking module 6 has a maximum baking temperature of 500℃. On the one hand, it is used to bake and degas the atomic gas chamber preparation module; on the other hand, it is used to bake and migrate alkali metals during the recycling process, accelerate the diffusion of alkali metals to the alkali metal collector 10, thereby accelerating the recycling of alkali metals, and at the same time, it accelerates the diffusion of filling gas to the recycling pipeline for recycling.

[0056] Alkali metal valve 7 is used to control the opening and closing of the recovery pipeline between the alkali metal reaction module 8 and the mixing and dispensing unit 3, with a vacuum leakage rate better than 1×10⁻⁶. -12 Pa·L / s.

[0057] Alkali metal reaction module 8 contains alkali metal reactants. The alkali metal generated through the chemical reaction is transported to mixing and dispensing device 3, and then filled into atomic gas chamber 5 through filling pipe 4.

[0058] Alkali metal recovery valve 9 is used to control the opening and closing of the recovery pipeline between alkali metal recoverer 10 and mixing and dispensing device 3, with a vacuum leakage rate better than 1×10⁻⁶. -12 Pa·L / s.

[0059] The alkali metal recovery unit 10 uses electric refrigeration to obtain a low temperature of 5-10°C for recovering the remaining alkali metals (rubidium, cesium, potassium) from the atomic gas chamber preparation; it stores the recovered alkali metals for subsequent atomic gas chamber preparation; the alkali metal recovery unit 10 is also equipped with a heater (heating temperature up to 200°C) for heating the stored alkali metals to refill the atomic gas chamber preparation module.

[0060] Gas recovery valve 11 is used to control the opening and closing of the recovery pipeline between gas purifier 13 and alkali metal recoverer 10, with a vacuum leakage rate better than 1×10⁻⁶. -12 Pa·L / s.

[0061] Pressure sensor 12 is used to detect the absolute pressure of gas in the recovery pipeline, and the measurement range is 0.

[0062] ~1.0MPa.

[0063] Gas purifier 13 is used to purify rare gases to be recovered and remove impurities.

[0064] The low-temperature refrigerator 14 uses a dilution refrigerator with a minimum cooling temperature of 2K. It uses the cooling capacity of the low-temperature refrigerator 14 to condense rare gases. Each time it works, a different cooling temperature is determined for the freezing point of different gases in order to separate and recover different types of gases.

[0065] The gas cylinder modules 15-18 are made of aluminum alloy. The gas cylinders store gas with a pressure range of 0-1MPa. The cylinder mouth is equipped with a low-temperature heat exchanger made of oxygen-free copper (externally insulated by vacuum multi-layer heat insulation) to store rare gases that have been condensed and recovered by the dilution refrigeration unit in the recovery pipeline.

[0066] The method for preparing atomic gas cells using the above-described filling preparation system includes the following steps:

[0067] Step 101: Ensure that the evacuation valve 2, alkali metal valve 7, alkali metal recovery valve 9, and gas recovery valve 11 are closed, and start the atomic gas chamber filling preparation system;

[0068] Step 102: Open the vacuum valve 2, the vacuum maintenance and gas filling module 1 evacuates the system, and the heating and baking module 6 is turned on.

[0069] Step 103: The system vacuum reaches 10. -7 After Pa, the heating and baking module 6 is turned off, the alkali metal valve 7 is opened, and the alkali metal reaction module 8 generates alkali metal and delivers it to the mixing and dispensing device 3.

[0070] Step 104: The vacuum maintenance and gas filling module 1 delivers a quantitative filling gas to the mixing and dispensing unit 3 according to the gas ratio;

[0071] Step 105: The mixing and dispensing device 3 delivers the alkali metal and filling gas to the atomic gas chamber 5 through the filling pipe 4;

[0072] Step 106: Seal and remove each atomic gas chamber 5 one by one, and the preparation of atomic gas chamber 5 is completed.

[0073] The method for recovering alkali metals and rare gases using the above-described packed preparation system includes the following steps:

[0074] Step 201: Ensure that the evacuation valve 2, alkali metal valve 7, alkali metal recovery valve 9, and gas recovery valve 11 are closed, and start the atomic gas chamber filling preparation system;

[0075] Step 202: Close the evacuation valve 2 and the alkali metal valve 7;

[0076] Step 203: Turn on the heating and baking module 6 and turn on the alkali metal recovery valve 9;

[0077] Step 204: Start the alkali metal recovery unit 10 to recover the residual alkali metal in the system;

[0078] Step 205: After the alkali metal recovery is complete, turn off the alkali metal recovery unit 10 and the heating and baking module 6.

[0079] Step 206: Open the gas recovery valve 11 and start the cryogenic refrigerator 14. The filling gas to be recovered enters the cryogenic refrigerator 14 after purification.

[0080] Step 207: Set the cooling temperature T I Rare gas I is recovered and stored in the first recovery gas cylinder 15; after rare gas I is recovered, the cooling temperature T is set. II Rare gas II is recovered and stored in the second recovery gas cylinder 16; after rare gas II is recovered, the cooling temperature T is set. III Rare gas III is recovered and stored in the third recovery gas cylinder 17; after the recovery of rare gas III is completed, the cooling temperature T is set. IV Rare gas IV is recovered to the fourth recovery gas cylinder 18 and stored; the gas liquefaction points from high to low are: rare gas I > rare gas II > rare gas III > rare gas IV;

[0081] Step 208: After all rare gases have been separated and recovered, shut down the cryogenic refrigerator 14, gas recovery valve 11 and alkali metal recovery valve 9 in sequence. The recovery of alkali metals and rare gases is now complete.

[0082] Using the above-described filling preparation system, the method for reusing alkali metals and rare gases includes the following steps:

[0083] Step 301: Ensure that the evacuation valve 2, alkali metal valve 7, alkali metal recovery valve 9, and gas recovery valve 11 are closed, and start the atomic gas chamber filling preparation system;

[0084] Step 302: After the alkali metal and rare gas recovery is completed, open the evacuation valve 2, the vacuum maintenance and gas filling module 1 evacuates the system, and the heating and baking module 6 is turned on.

[0085] Step 303: The vacuum of the system reaches 10. -7 After Pa, the heating and baking module 6 is turned off, the alkali metal recovery valve 9 is turned on, and the alkali metal recovery unit 10 conveys the alkali metal to the mixing and dispensing unit 3.

[0086] Step 304: Open the gas recovery valve 11, and the gas recovery cylinder modules 15-18 will transport the gas to the mixing and dispensing unit 3;

[0087] Step 305: The mixing and dispensing device 3 delivers the alkali metal and filling gas to the N atomic gas chambers 5 through N filling tubes 4;

[0088] Step 306: Seal and remove N atomic gas chambers 5 one by one, and the preparation of atomic gas chambers 5 is completed.

[0089] Step 307: Close gas recovery valve 11 and alkali metal recovery valve 9. The alkali metal and rare gas reuse process is complete.

[0090] Using the above-described packed preparation system, the alkali metal and rare gas recovery process includes the following steps:

[0091] Step 401: Repeat steps 201 to 208 to recover alkali metals and rare gases;

[0092] Step 402: The atomic gas chamber filling preparation system is shut down.

[0093] The above description is only one specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in the present invention should be included within the protection scope of the present invention.

[0094] The contents not described in detail in this specification are common knowledge to those skilled in the art.

Claims

1. A method of using an atomic gas chamber filling preparation system for raw material recovery, the system comprising a vacuum maintenance and gas filling module (1), an evacuation valve (2), an alkali metal reaction module (8), an alkali metal valve (7), an atomic gas chamber preparation module, a heating and baking module (6), an alkali metal recovery valve (9), an alkali metal recoverer (10), a gas recovery valve (11), a gas purifier (13), a cryogenic refrigerator (14), a gas recovery cylinder module, and recovery pipelines; characterized in that, The method of use includes a method for recovering alkali metals and filling gas, and a method for reusing alkali metals and filling gas, wherein the method for recovering alkali metals and filling gas includes: Ensure that the evacuation valve (2), alkali metal valve (7), alkali metal recovery valve (9), and gas recovery valve (11) are closed, and start the atomic gas chamber filling preparation system; Turn on the heating and baking module (6) and turn on the alkali metal recovery valve (9); Start the alkali metal recovery unit (10) to recover the residual alkali metal in the system; After the alkali metals are recovered, shut down the alkali metals recovery unit (10) and the heating and baking module (6); Open the gas recovery valve (11) and start the cryogenic refrigerator (14). The filling gas to be recovered enters the cryogenic refrigerator (14) after purification. Set cooling temperature T I The filling gas I is recovered into the first recovery gas cylinder and stored; after the filling gas I is recovered, the cooling temperature T is set. II Filling gas II is recovered and stored in the second recovery gas cylinder; this process is repeated until all types of filling gases have been recovered and stored; the gas liquefaction points from highest to lowest are: filling gas I > filling gas II > ... > filling gas M; After all the filling gas has been separated and recovered, the cryogenic refrigerator (14), gas recovery valve (11) and alkali metal recovery valve (9) are closed in sequence, and the recovery of alkali metal and filling gas is completed.

2. The method of using the atomic gas chamber filling preparation system for raw material recovery according to claim 1, characterized in that, The method for reusing alkali metals and filling gases includes the following steps: Ensure that the evacuation valve (2), alkali metal valve (7), alkali metal recovery valve (9), and gas recovery valve (11) are closed, and start the atomic gas chamber filling preparation system; Open the vacuum valve (2), the vacuum maintenance and gas filling module (1) evacuates the system, and the heating and baking module (6) is turned on; After the system reaches the preset vacuum level, the heating and baking module (6) is turned off, the alkali metal recovery valve (9) is turned on, and the alkali metal recovery unit (10) transports the alkali metal to the mixing and dispensing unit (3). Open the gas recovery valve (11), and the gas recovery cylinder module will deliver the gas to the mixing and dispensing unit (3); The mixing and dispensing unit (3) delivers the alkali metal and filling gas to the atomic gas chamber (5); Each atomic gas cell (5) is sealed and removed, and the preparation of the atomic gas cell (5) is completed; The gas recovery valve (11) and alkali metal recovery valve (9) are closed, and the alkali metal and filling gas reuse process is completed.

3. The method of using the atomic gas chamber filling preparation system for raw material recovery according to claim 2, characterized in that, Alkali metals and filling gas in the atomic gas chamber preparation module evaporate along the recovery pipeline. An alkali metal recoverer (10), a gas purifier (13), and a cryogenic refrigerator (14) are sequentially installed on the recovery pipeline. The filling gas in the recovery pipeline is condensed by the cryogenic refrigerator (14) and stored in the recovery gas cylinder module. The heating and baking module (6) is used to bake and degas the atomic gas chamber preparation module and accelerate the diffusion of alkali metals and filling gas into the recovery pipeline. An alkali metal recovery valve (9) is installed between the atomic gas chamber preparation module and the alkali metal recovery device (10), and is opened during the alkali metal recovery process and the alkali metal reuse process. Alkali metal recovery unit (10) is used to condense and recover alkali metals during the alkali metal recovery process. During the alkali metal reuse process, the alkali metals recovered by heating are charged into the atomic gas chamber preparation module. The gas recovery valve (11) is located between the alkali metal recovery unit (10) and the gas purifier (13), and is opened during the filling gas recovery process and the filling gas reuse process; Gas purifier (13) is used to purify the filling gas that diffuses into the recovery pipeline during the filling gas recovery process, remove impurities, and then enter the cryogenic refrigerator (14). The cryogenic refrigeration unit (14) is used to determine the refrigeration temperature based on the freezing point of the filling gas, separate and recover different types of filling gases, and store the separated filling gas in the recovery gas cylinder module.

4. The method of using the atomic gas chamber filling preparation system for raw material recovery according to claim 3, characterized in that, The vacuum maintenance and gas filling module (1) is used to evacuate the system before the atomic gas chamber is prepared and to measure the system vacuum level in real time; and to supply filling gas to the atomic gas chamber preparation module during the preparation of the atomic gas chamber. The evacuation valve (2) is located between the vacuum maintenance and gas filling module (1) and the atomic gas chamber preparation module, and is opened during the atomic gas chamber preparation process.

5. The method of using the atomic gas chamber filling preparation system for raw material recovery according to claim 4, characterized in that, The alkali metal reaction module (8) is used to generate alkali metals which are then transported to the atomic gas chamber preparation module. The alkali metal valve (7) is located between the alkali metal reaction module (8) and the atomic gas chamber preparation module and is opened during the atomic gas chamber preparation process.

6. The method of using the atomic gas chamber filling preparation system for raw material recovery according to claim 5, characterized in that, The atomic gas chamber preparation module includes a mixing and dispensing device (3), N filling tubes (4), and N atomic gas chambers (5), where N ≥ 1; The mixing and dispensing unit (3) receives the alkali metal delivered by the alkali metal reaction module (8) and the filling gas delivered by the vacuum maintenance and gas filling module (1), and mixes the filling gas evenly. The two ends of the filling tube (4) are connected to the mixing and dispensing device (3) and the atomic gas chamber (5) respectively. The mixing and dispensing device (3) and the N atomic gas chambers (5) are connected to each other through the N filling tubes (4).

7. The method of using the atomic gas chamber filling preparation system for raw material recovery according to claim 6, characterized in that, The alkali metal recovery unit (10) uses electric cooling to obtain a low temperature of 5-10°C for condensing and recovering alkali metals that diffused into the recovery pipeline during the preparation of the atomic gas chamber; the alkali metal recovery unit (10) is equipped with a heater for heating the recovered alkali metals so as to refill the atomic gas chamber preparation module.

8. The method of using the atomic gas chamber filling preparation system for raw material recovery according to claim 7, characterized in that, The gas recovery cylinder module includes M gas recovery cylinders for storing different types of filling gases obtained by condensation and separation of the cryogenic refrigerator (14), where M ≥ 1; The gas cylinder is equipped with an oxygen-free copper heat exchanger at its opening, and the gas stored in the gas cylinder has a pressure of 0-1 MPa.

9. The method of using the atomic gas chamber filling preparation system for raw material recovery according to claim 8, characterized in that, It also includes a pressure sensor (12), which is located between the alkali metal recoverer (10) and the gas purifier (13) to detect the absolute pressure of the gas in the recovery pipeline.

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