A cooling water supply system for a silicon carbide production plant and a control method for the cooling water supply system

By designing a cooling water cooling system with low-electricity-cost cold storage and high-electricity-cost cooling modes in the silicon carbide production workshop, the problems of high power consumption and the impact of power outages were solved, achieving a high-efficiency and low-cost cooling water cooling effect.

CN116817539BActive Publication Date: 2026-02-17TONGWEI MICROELECTRONICS CO LTD
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Patent Information

Application Number
CN202310757731.X
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2023-06-25
Publication Date
2026-02-17
Estimated Expiration
2043-06-25

AI Technical Summary

Technical Problem

The cooling water network in the silicon carbide production workshop needs to be continuously cooled. The existing temperature control device consumes a lot of electricity and cannot maintain the process temperature in the event of a power outage.

Method used

Design a cooling water supply system for a silicon carbide production workshop, including a cold water tank, a heat exchange unit, and a refrigeration unit. It adopts a low-electricity-price cold storage mode and a high-electricity-price cooling mode. By storing cold energy during periods of low electricity price and releasing cold energy during periods of high electricity price, it reduces power consumption and can still provide cooling in the event of a power outage.

Benefits of technology

It significantly reduces cooling costs and can still effectively cool down the water during power outages, achieving efficient cooling water supply.

✦ Generated by Eureka AI based on patent content.

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Abstract

The application discloses a silicon carbide production workshop cooling water cooling system and a cooling system control method, and relates to the technical field of silicon carbide production. The cooling system comprises a cold water pool, a heat exchange unit, a refrigerating unit and a cooling water pipe network. The cooling system has a low electricity price cold storage mode, a high electricity price cooling mode and a low electricity price combination mode. In the low electricity price cold storage mode, the refrigerating unit operates, and the heat exchange unit exchanges heat between chilled water in the refrigerating unit and cold water in the cold water pool. In the high electricity price cooling mode, the refrigerating unit stops operating, the refrigerating unit delivers chilled water to the cooling water pipe network, and / or the heat exchange unit exchanges heat between cold water in the cold water pool and cooling water in the cooling water pipe network. In the low electricity price combination mode, the refrigerating unit operates, the heat exchange unit exchanges heat between chilled water in the refrigerating unit and cold water in the cold water pool, and the refrigerating unit delivers chilled water to the cooling water pipe network. The cooling system can reduce cost and supply cooling to the cooling water pipe network in a power-off state.
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Description

Technical Field

[0001] This invention relates to the field of silicon carbide production technology, and more specifically, to a cooling water supply system and a control method for the cooling system in a silicon carbide production workshop. Background Technology

[0002] The various pieces of equipment in the silicon carbide crystal production workshop generate a lot of heat, with operating temperatures reaching over 2000 degrees Celsius. Therefore, a cooling water pipeline network is required for continuous cooling.

[0003] The cooling water network requires continuous cooling via an externally configured temperature control device to maintain the process temperature, typically around 7°C. The continuous operation of this temperature control device consumes a significant amount of electricity, resulting in excessive costs. Furthermore, in the event of a power outage, the temperature control device ceases operation, causing the cooling water to be unable to maintain the process temperature. Summary of the Invention

[0004] The purpose of this invention is to provide a cooling water supply system for a silicon carbide production workshop, which can reduce costs and provide cooling to the cooling water pipeline network during power outages.

[0005] Another objective of this invention is to provide a cooling system control method that can significantly reduce costs and provide cooling to the cooling water network during power outages.

[0006] An embodiment of the present invention provides a technical solution:

[0007] A cooling water supply system for a silicon carbide production workshop includes a cold water tank, a heat exchange unit, a refrigeration unit, and a cooling water pipeline network. The cooling water pipeline network is used to cool various equipment in the silicon carbide production workshop. The cooling water supply system for the silicon carbide production workshop has a low-electricity-price cold storage mode, a high-electricity-price cooling mode, and a low-electricity-price combined mode.

[0008] In the low-electricity-price cold storage mode, the refrigeration unit operates, and the heat exchange unit exchanges heat between the chilled water in the refrigeration unit and the cold water in the cold water pool.

[0009] Under the high electricity price cooling mode, the refrigeration unit stops, the refrigeration unit supplies chilled water to the cooling water network, and / or the heat exchange unit exchanges heat between the chilled water in the chilled water pool and the cooling water in the cooling water network.

[0010] In the low electricity price combination mode, the chiller unit operates, the heat exchanger unit exchanges heat between the chilled water in the chiller unit and the cold water in the cold water pool, and the chiller unit supplies chilled water to the cooling water pipeline network.

[0011] Furthermore, the cooling water supply system for the silicon carbide production workshop also includes a first heat exchange pipeline, a second heat exchange pipeline, a third heat exchange pipeline, and a supply and return water pipeline. The heat exchange unit is equipped with a first medium flow path and a second medium flow path.

[0012] The cold water tank and the first medium flow path are both connected to the first heat exchange pipeline. The refrigeration unit is connected to the second heat exchange pipeline. The cooling water network is connected to the third heat exchange pipeline. The second medium flow path is connected to both the second heat exchange pipeline and the third heat exchange pipeline. The refrigeration unit and the cooling water network are both connected to the supply and return water pipeline. The supply and return water pipeline is used to input chilled water from the refrigeration unit into the cooling water network and to input cooling water from the cooling water network into the refrigeration unit.

[0013] Furthermore, the refrigeration unit includes multiple refrigeration units, and the chilled water tanks of the multiple refrigeration units are all connected to the supply and return water pipelines. Some of the chilled water tanks of the multiple refrigeration units are connected to the second heat exchange pipeline.

[0014] Furthermore, the heat exchange unit includes multiple plate heat exchangers, the first medium flow paths of the multiple plate heat exchangers are connected in parallel to the first heat exchange pipeline, and the second medium flow paths of the multiple plate heat exchangers are connected in parallel to the second heat exchange pipeline and the third heat exchange pipeline.

[0015] Furthermore, the cold water pool is provided with a first water outlet and a second water outlet in sequence in the direction of increasing depth, and both the first water outlet and the second water outlet are connected to the first heat exchange pipeline.

[0016] In the low-electricity-price cold storage mode, the first heat exchange pipeline inputs cold water from the cold water pool into the refrigeration unit for heat exchange through the first water inlet, and then outputs the heat-exchanged cold water back to the cold water pool through the second water inlet.

[0017] In the high-electricity-price cooling mode, if the cold water in the cold water pool exchanges heat with the cooling water in the cooling water network, the first heat exchange pipeline inputs the cold water in the cold water pool into the refrigeration unit through the second water outlet for heat exchange, and then outputs the heat-exchanged cold water back to the cold water pool through the first water outlet.

[0018] Furthermore, the first heat exchange pipeline includes a pumping unit and multiple pipe sections equipped with on / off valves. The pumping unit has a first input end and a first output end. The first input end is connected to the first water inlet and the second water inlet respectively through two pipe sections. The first output end is connected to both ends of the first medium flow path respectively through two pipe sections. The two ends of the first medium flow path are also connected to the first water inlet and the second water inlet respectively through two pipe sections.

[0019] The embodiments of the present invention also provide a cooling system control method, applied to the cooling water cooling system of the silicon carbide production workshop, the cooling water cooling system of the silicon carbide production workshop includes a cold water tank, a heat exchange unit, a refrigeration unit and a cooling water pipe network, the cooling water pipe network is used to cool down various equipment in the silicon carbide production workshop, and the cooling water cooling system of the silicon carbide production workshop has a low electricity price cold storage mode, a high electricity price cooling mode and a low electricity price combination mode;

[0020] In the low-electricity-price cold storage mode, the refrigeration unit operates, and the heat exchange unit exchanges heat between the chilled water in the refrigeration unit and the cold water in the cold water pool.

[0021] Under the high electricity price cooling mode, the refrigeration unit stops, the refrigeration unit supplies chilled water to the cooling water network, and / or the heat exchange unit exchanges heat between the chilled water in the chilled water pool and the cooling water in the cooling water network.

[0022] In the low electricity price combination mode, the chiller unit operates, the heat exchanger unit exchanges heat between the chilled water in the chiller unit and the cold water in the cold water tank, and the chiller unit supplies chilled water to the cooling water pipeline network. The cooling system control method includes:

[0023] During periods of low electricity prices, the cooling water supply system of the silicon carbide production workshop is controlled to operate in either the low electricity price cold storage mode or the low electricity price combination mode, based on the operating status of the cooling water pipeline network.

[0024] During periods of high electricity prices, the cooling water supply system of the silicon carbide production workshop is controlled to operate in the high electricity price cooling mode, wherein the electricity price during the low electricity price period is lower than the electricity price during the high electricity price period.

[0025] Furthermore, the step of controlling the cooling water supply system of the silicon carbide production workshop to operate in the low-electricity-price cold storage mode or the low-electricity-price combined mode according to the operating status of the cooling water pipeline network during the low-electricity-price period includes:

[0026] If the cooling water network is not in operation during the low electricity price period, the cooling water supply system of the silicon carbide production workshop is controlled to operate in the low electricity price cold storage mode.

[0027] During the period of low electricity price, if the cooling water pipeline is in operation, the cooling water supply system of the silicon carbide production workshop is controlled to operate in the low electricity price combination mode.

[0028] Furthermore, the step of controlling the cooling water supply system of the silicon carbide production workshop to operate in the high-electricity-price cooling mode during periods of high electricity prices includes:

[0029] During the period of high electricity price, if the cooling water pipeline network is operating at low load, the chiller unit is controlled to supply chilled water to the cooling water pipeline network, or the heat exchanger unit is controlled to exchange heat between the chilled water in the chilled water pool and the cooling water in the cooling water pipeline network.

[0030] During the period of high electricity price, if the cooling water pipeline network is operating at high load, the chiller unit is controlled to supply chilled water to the cooling water pipeline network, and the heat exchanger unit is controlled to exchange heat between the cold water in the cold water pool and the cooling water in the cooling water pipeline network.

[0031] Furthermore, the step of controlling the chiller unit to supply chilled water to the cooling water network, or controlling the heat exchanger unit to exchange heat between the chilled water in the chilled water tank and the cooling water in the cooling water network, during the high electricity price period, includes:

[0032] During the period of high electricity price, if the cooling water pipeline is operating at low load and the heat exchange unit fails, the refrigeration unit is controlled to supply chilled water to the cooling water pipeline.

[0033] During the period of high electricity price, if the cooling water pipeline network is operating at low load and the refrigeration unit fails, the heat exchange unit is controlled to exchange heat between the cold water in the cold water pool and the cooling water in the cooling water pipeline network.

[0034] Compared to existing technologies, the cooling water supply system for silicon carbide production workshops provided by this invention can operate the refrigeration units in a low-electricity-price cold storage mode, storing the cooling capacity of the refrigeration units in a cold water tank. In a high-electricity-price cooling mode, the refrigeration units are shut down, and cooling is supplied to the cooling water through the neutralization of chilled water and / or heat exchange between chilled water and cooling water in the cold water tank. This cooling method consumes no electricity. Therefore, the beneficial effects of the cooling water supply system for silicon carbide production workshops provided by this invention include: significantly reducing costs and enabling cooling of the cooling water network during power outages. Attached Figure Description

[0035] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the embodiments will be briefly described below. It should be understood that the following drawings only show some embodiments of the present invention and should not be considered as limiting the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0036] Figure 1 A schematic diagram of the cooling water supply system for a silicon carbide production workshop provided in an embodiment of the present invention;

[0037] Figure 2 for Figure 1A schematic diagram of the structure connecting the intermediate heat exchanger unit and the refrigeration unit to the second heat exchange pipeline;

[0038] Figure 3 for Figure 1 A schematic diagram of the structure connecting the intermediate heat exchanger unit and the cooling water network to the third heat exchange pipeline;

[0039] Figure 4 for Figure 1 A schematic diagram of the structure connecting the refrigeration unit and the cooling water network to the supply and return water pipelines;

[0040] Figure 5 A flowchart illustrating a cooling system control method provided in an embodiment of the present invention;

[0041] Figure 6 for Figure 5 A flowchart of a sub-step of step S101;

[0042] Figure 7 for Figure 5 A flowchart of a sub-step of step S102.

[0043] Icons: 100 - Cooling water supply system for silicon carbide production workshop; 110 - Cold water pool; 111 - First water inlet; 112 - Second water inlet; 120 - Heat exchanger unit; 130 - Refrigeration unit; 140 - Cooling water network; 150 - First heat exchange pipeline; 151 - Pumping unit; 1511 - First input end; 1512 - First output end; 152 - On / off valve; 153 - Water pump; 160 - Second heat exchange pipeline; 170 - Third heat exchange pipeline; 180 - Supply and return water pipeline. Detailed Implementation

[0044] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. The components of the embodiments of the present invention described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0045] Therefore, the following detailed description of the embodiments of the invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the invention without inventive effort are within the scope of protection of the invention.

[0046] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0047] In the description of this invention, it should be understood that the terms "upper," "lower," "inner," "outer," "left," "right," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this invention is in use, or the orientation or positional relationship commonly understood by those skilled in the art. They are only used to facilitate the description of this invention and to simplify the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0048] Furthermore, the terms "first," "second," etc., are used only to distinguish descriptions and should not be interpreted as indicating or implying relative importance.

[0049] In the description of this invention, it should also be noted that, unless otherwise explicitly specified and limited, terms such as "set" and "connection" should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be a connection within two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0050] The specific embodiments of the present invention will now be described in detail with reference to the accompanying drawings.

[0051] Example

[0052] Please see Figure 1 , Figure 1 The diagram shown is a structural schematic of the cooling water supply system 100 for the silicon carbide production workshop provided in this embodiment.

[0053] The cooling water supply system 100 for a silicon carbide production workshop provided in this embodiment includes a cold water tank 110, a heat exchange unit 120, a refrigeration unit 130, and a cooling water pipeline network 140. The cooling water pipeline network 140 is used to cool various equipment in the silicon carbide production workshop. The cooling water supply system 100 for the silicon carbide production workshop has a low-electricity-price cold storage mode, a high-electricity-price cooling mode, and a low-electricity-price combined mode. In the low-electricity-price cold storage mode, the refrigeration unit 130 operates, and the heat exchange unit 120 combines the chilled water in the refrigeration unit 130 with the cold water supply system. The chilled water in the water tank 110 undergoes heat exchange; in the high-electricity-price cooling mode, the chiller unit 130 is shut down, and the chiller unit 130 supplies chilled water to the cooling water network 140, and / or, the heat exchanger unit 120 exchanges heat between the chilled water in the chilled water tank 110 and the cooling water in the cooling water network 140; in the low-electricity-price combination mode, the chiller unit 130 is in operation, the heat exchanger unit 120 exchanges heat between the chilled water in the chiller unit 130 and the chilled water in the chilled water tank 110, and the chiller unit 130 supplies chilled water to the cooling water network 140.

[0054] In practice, based on the varying electricity prices at different times of the day, the 24-hour period can be divided into low-price and high-price periods, with lower electricity prices during low-price periods. In this embodiment, the low-price period refers to 23:00 to 7:00, and the remaining time is the high-price period. The cooling water supply system 100 for the silicon carbide production workshop provided in this embodiment has a low-price cold storage mode and a low-price combination mode corresponding to the low-price periods, and a high-price cooling mode corresponding to the high-price periods.

[0055] The cooling water supply system 100 for the silicon carbide production workshop provided in this embodiment also includes a controller. The controller controls the cooling water supply system 100 to execute different operating modes. During periods of low electricity prices, the controller controls the cooling water supply system 100 to operate in a low-electricity-price cold storage mode or a low-electricity-price combination mode, so that the refrigeration unit 130 operates during the period of lowest electricity prices, and the generated cooling capacity is transferred to the cold water in the cold water tank 110 for storage through the chilled water in the heat exchange unit 120.

[0056] During periods of high electricity prices, the controller controls the cooling water supply system 100 in the silicon carbide production workshop to operate in a high-electricity-price cooling mode, so that the chiller unit 130 is shut down to avoid excessive electricity costs. Temperature regulation of the cooling water is achieved without consuming electricity by directly inputting the chilled water from the chiller unit 130 into the cooling water network 140, and / or by transferring the cold energy stored in the chilled water to the cooling water in the cooling water network 140 through heat exchange.

[0057] As can be seen, the cooling water supply system 100 for the silicon carbide production workshop provided in this embodiment produces and stores cooling capacity during periods of low electricity price, and releases the stored cooling capacity during periods of high electricity price to regulate the temperature of the cooling water in the cooling water pipeline network 140, thereby reducing costs and eliminating the impact of power outages.

[0058] Specifically, the cooling water supply system 100 for the silicon carbide production workshop provided in this embodiment also includes a first heat exchange pipeline 150, a second heat exchange pipeline 160, a third heat exchange pipeline 170, and a supply and return water pipeline 180. The heat exchange unit 120 is equipped with a first medium flow path and a second medium flow path. Please refer to the relevant documentation. Figure 2 , Figure 3 and Figure 4 , Figure 2 The diagram shows the structure of heat exchanger 120 and refrigeration unit 130 connected to the second heat exchange pipeline 160. Figure 3 The diagram shows the structure of the heat exchanger unit 120 and the cooling water network 140 connected to the third heat exchange pipeline 170. Figure 4 The diagram shows the structure of the refrigeration unit 130 and the cooling water network 140 connected to the supply and return water pipeline 180.

[0059] The cold water pool 110 and the first medium flow path are both connected to the first heat exchange pipeline 150. The refrigeration unit 130 is connected to the second heat exchange pipeline 160. The cooling water network 140 is connected to the third heat exchange pipeline 170. The second medium flow path is connected to the second heat exchange pipeline 160 and the third heat exchange pipeline 170 respectively. The refrigeration unit 130 and the cooling water network 140 are both connected to the supply and return water pipeline 180. The supply and return water pipeline 180 is used to input chilled water from the refrigeration unit 130 into the cooling water network 140 and to input cooling water from the cooling water network 140 into the refrigeration unit 130.

[0060] It is understood that the first medium flow path and the second medium flow path of the heat exchanger unit 120 are respectively used to supply different heat exchange media, thereby realizing heat exchange between different heat exchange media. In this embodiment, the heat exchange medium corresponding to the first medium flow path is cold water in the cold water pool 110, and the heat exchange medium corresponding to the second medium flow path is chilled water in the refrigeration unit 130 or cooling water in the cooling water pipe network 140.

[0061] Under the control of the controller, the first heat exchange pipe 150 connects the first medium flow path to the cold water tank 110 to form a circulating flow path for cold water. Under the control of the controller, the second heat exchange pipe 160 connects the second medium flow path to the refrigeration unit 130 to form a circulating flow path for chilled water. Under the control of the controller, the third heat exchange pipe 170 connects the second medium flow path to the cooling water network 140 to form a circulating flow path for cooling water.

[0062] Specifically, in the low-electricity-price cold storage mode, the controller controls the first heat exchange pipe 150 to connect the first medium flow path to the cold water tank 110, controls the second heat exchange pipe 160 to connect the second medium flow path to the chiller unit 130, and controls the third heat exchange pipe 170 and the supply and return water pipes 180 to be closed. In the low-electricity-price combination mode, the controller controls the first heat exchange pipe 150 to connect the first medium flow path to the cold water tank 110, controls the second heat exchange pipe 160 to connect the second medium flow path to the chiller unit 130, controls the supply and return water pipes 180 to connect the chiller unit 130 to the cooling water network 140, and controls the third heat exchange pipe 170 to be closed.

[0063] The refrigeration unit 130 includes multiple chillers, and the chilled water tanks of each chiller are connected to the supply and return water pipeline 180. Some of the chilled water tanks of the multiple chillers are connected to the second heat exchange pipeline 160. In this embodiment, there are six chillers, with the chilled water tanks of two chillers connected to the second heat exchange pipeline 160. In other embodiments, the number of chillers can be adjusted according to actual application conditions, and the chilled water tanks of all chillers can be connected to the second heat exchange pipeline 160.

[0064] The heat exchange unit 120 includes multiple plate heat exchangers. The first medium flow paths of the multiple plate heat exchangers are connected in parallel to a first heat exchange pipeline 150, and the second medium flow paths of the multiple plate heat exchangers are connected in parallel to a second heat exchange pipeline 160 and a third heat exchange pipeline 170. In other words, for any given plate heat exchanger, its second medium flow path is connected to both the second heat exchange pipeline 160 and the third heat exchange pipeline 170. In this embodiment, the number of plate heat exchangers is two. In other embodiments, the number of plate heat exchangers can be adjusted according to actual application conditions.

[0065] Considering that under natural conditions, the deeper the cold water in the cold water pool 110, the lower the temperature of the cold water, and the better the storage effect of cold energy. Therefore, in this embodiment, the cold water pool 110 is provided with a first water inlet 111 and a second water inlet 112 in the direction of increasing depth. Both the first water inlet 111 and the second water inlet 112 are connected to the first heat exchange pipeline 150. In the low-electricity-price cold storage mode, the first heat exchange pipeline 150 inputs the cold water in the cold water pool 110 into the refrigeration unit 130 for heat exchange through the first water inlet 111, and outputs the heat-exchanged cold water back to the cold water pool 110 through the second water inlet 112. In the high-electricity-price cooling mode, if the cold water in the cold water pool 110 exchanges heat with the cooling water in the cooling water network 140, the first heat exchange pipeline 150 inputs the cold water in the cold water pool 110 into the refrigeration unit 130 for heat exchange through the second water inlet 112, and outputs the heat-exchanged cold water back to the cold water pool 110 through the first water inlet 111.

[0066] Understandably, in the cold water tank 110, the cold water temperature in the area where the first water inlet 111 is located is higher than the cold water temperature in the area where the second water inlet 112 is located. To extract more cooling capacity from the chilled water in the chiller unit 130 during low-electricity-price cold storage and combined low-electricity-price modes, the higher-temperature cold water in the area where the first water inlet 111 is located is input into the heat exchanger unit 120 to exchange heat with the chilled water. The cooled water after heat exchange is then input into the area where the second water inlet 112 is located for better storage. To provide more cooling capacity to the cooling water and improve temperature control efficiency during high-electricity-price cooling mode, the lower-temperature cold water in the area where the second water inlet 112 is located is input into the heat exchanger unit 120 to exchange heat with the cooling water. The cooled water after heat exchange is then input into the area where the first water inlet 111 is located, ready to exchange heat with the chilled water during the next low-electricity-price period.

[0067] The first heat exchange pipeline 150 includes a pumping unit 151 and multiple pipe sections equipped with on / off valves 152. The pumping unit 151 has a first input end 1511 and a first output end 1512. The first input end 1511 is connected to a first water inlet 111 and a second water inlet 112 respectively through two pipe sections. The first output end 1512 is connected to both ends of a first medium flow path respectively through two pipe sections. The two ends of the first medium flow path are also connected to the first water inlet 111 and the second water inlet 112 respectively through two pipe sections. In this embodiment, the pumping unit 151 is composed of multiple water pumps 153 arranged in parallel.

[0068] Understandably, the controller is electrically connected to the on / off valves 152 on multiple pipe sections constituting the first heat exchange pipeline 150. The controller coordinates the opening and closing states of these valves to switch the flow path of the first heat exchange pipeline, thereby switching the inlet and outlet states of the first inlet 111 and the second inlet 112. For example, in low-electricity-price cold storage mode, the controller only controls the opening and closing valves 152 on the pipe section between the first inlet 111 and the first input end 1511, the pipe section between the second inlet 112 and one end of the first medium flow path, and the pipe section between the other end of the first medium flow path and the first output end 1512 to open, while controlling the remaining valves 152 to close. At this time, the pumping unit 151 pumps the chilled water pump 153 from the area corresponding to the first inlet 111 into the first medium flow path to complete heat exchange, and then pumps it into the area corresponding to the second inlet 112 in the cold water pool 110.

[0069] Similarly, the second heat exchange pipeline 160 and the third heat exchange pipeline 170 are also equipped with multiple on / off valves 152 and water pumps 153 electrically connected to the controller. The controller, through the coordinated control of these on / off valves 152 and water pumps 153, introduces chilled water or cooling water into the second medium flow path. Likewise, the supply and return water pipeline 180 is also equipped with on / off valves 152 and water pumps 153, which are controlled by the controller.

[0070] In summary, the cooling water supply system 100 for the silicon carbide production workshop provided in this embodiment can significantly reduce costs and can supply cooling water to the cooling water pipeline network 140 in the event of a power outage.

[0071] Please see Figure 5 , Figure 5 The diagram shown is a flowchart of the cooling system control method provided in this embodiment. This cooling system control method is applied to the aforementioned cooling water cooling system 100 in a silicon carbide production workshop and may include the following steps:

[0072] Step S101: During periods of low electricity price, based on the operating status of the cooling water network 140, control the cooling water supply system 100 of the silicon carbide production workshop to operate in either a low electricity price cold storage mode or a low electricity price combination mode.

[0073] Please see Figure 6 , Figure 6 The diagram shown is a flowchart of one sub-step of step S101. The operating status of the cold water pipe network includes two states: running and not running. For these two states, step S101 may include the following sub-steps:

[0074] Sub-step S1011: If the cooling water network 140 is not in operation during the low electricity price period, control the cooling water supply system 100 of the silicon carbide production workshop to operate in the low electricity price cold storage mode.

[0075] Sub-step S1012: During the low electricity price period, if the cooling water pipeline network 140 is operating, control the cooling water supply system 100 of the silicon carbide production workshop to operate in the low electricity price combination mode.

[0076] It is understandable that when the cooling water network 140 is not in operation, it will not cool the equipment in the silicon carbide production workshop, and there is no need for temperature regulation. Therefore, in this state, it is sufficient to operate the low-electricity-price cold storage mode to store the cooling capacity produced by the refrigeration unit 130 in the cold water.

[0077] When the cooling water network 140 is in operation, there is a need for temperature regulation to cool the equipment in the silicon carbide production workshop. Therefore, under this condition, the low-electricity-price combination mode is operated, storing the cooling capacity produced by the chiller unit 130 in the chilled water while inputting part of the chilled water from the chiller unit 130 into the cooling water network 140 to regulate the cooling water temperature.

[0078] Please continue reading. Figure 5 The cooling system control method may also include:

[0079] Step S102: During periods of high electricity prices, control the cooling water supply system 100 of the silicon carbide production workshop to operate in a high electricity price cooling mode.

[0080] Please see Figure 7 , Figure 7The diagram shown is a flowchart of one sub-step of step S102. Step S102 may include the following sub-steps:

[0081] In sub-step S1021, if the cooling water network 140 is operating at low load during periods of high electricity prices, the chiller unit 130 is controlled to supply chilled water to the cooling water network 140, or the heat exchanger unit 120 is controlled to exchange heat between the chilled water in the chilled water pool 110 and the cooling water in the cooling water network 140.

[0082] In sub-step S1022, if the cooling water network 140 is operating at high load during periods of high electricity prices, the chiller unit 130 is controlled to supply chilled water to the cooling water network 140, and the heat exchanger unit 120 is controlled to exchange heat between the chilled water in the chilled water pool 110 and the cooling water in the cooling water network 140.

[0083] The determination of whether the cooling water pipe network 140 is operating under low load or high load can be based on the number of equipment operating in the silicon carbide production workshop, or by configuring a temperature detection device to detect the temperature difference between the input end and the return end of the cooling water pipe network 140.

[0084] For example, when the temperature difference between the input end and the return end of the cooling water pipe network 140 is detected to be greater than a certain set threshold, it indicates that the cooling water temperature has risen significantly, and it is determined that the cooling water pipe network 140 is operating under high load; conversely, when the temperature difference between the input end and the return end of the cooling water pipe network 140 is detected to be less than the set threshold, it indicates that the cooling water temperature has not risen significantly, and it is determined that the cooling water pipe network 140 is operating under low load.

[0085] When the cooling water network 140 is operating at low load, the cooling water has a small demand for cooling capacity. Therefore, controlling the refrigeration unit 130 to supply chilled water to the cooling water network 140, or controlling the heat exchange unit 120 to exchange heat between the chilled water in the chilled water pool 110 and the cooling water in the cooling water network 140, can meet the low cooling capacity demand of the cooling water.

[0086] In actual operation, the two methods of providing cooling capacity to the cooling water can serve as backups for each other. For example, if the heat exchanger unit 120 fails, the chiller unit 130 is controlled to supply chilled water to the cooling water network 140. If the chiller unit 130 fails, the heat exchanger unit 120 is controlled to exchange heat between the chilled water in the chilled water pool 110 and the cooling water in the cooling water network 140.

[0087] When the cooling water network 140 is operating under high load, the cooling water has a large demand for cooling capacity. Therefore, the chiller unit 130 is controlled to supply chilled water to the cooling water network 140, and the heat exchanger unit 120 is controlled to exchange heat between the chilled water in the chilled water pool 110 and the cooling water in the cooling water network 140 to meet the high cooling capacity demand of the cooling water.

[0088] In summary, the cooling system control method provided in this embodiment can significantly reduce costs and provide cooling to the cooling water network 140 in the event of a power outage.

[0089] The above description is merely a preferred embodiment of the present invention and is not intended to limit the invention. Various modifications and variations can be made to the present invention by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. A cooling water supply system for a silicon carbide production plant, characterized by, The system comprises a cold water pool (110), a heat exchange unit (120), a refrigeration unit (130), a cooling water pipe network (140), a first heat exchange pipe (150), a second heat exchange pipe (160), a third heat exchange pipe (170) and a supply and return water pipe (180). The cooling water pipe network (140) is used to cool various equipment in a silicon carbide production workshop. The heat exchange unit (120) is provided with a first medium flow path and a second medium flow path. The cold water pool (110) and the first medium flow path are connected to the first heat exchange pipe (150). The refrigeration unit (130) is connected to the second heat exchange pipe (160). The cooling water pipe network (140) is connected to the third heat exchange pipe (170). The second medium flow path is connected to the second heat exchange pipe (160) and the third heat exchange pipe (170) respectively. The corresponding heat exchange medium of the second medium flow path is chilled water in the refrigeration unit (130) or cooling water in the cooling water pipe network (140). The refrigeration unit (130) and the cooling water pipe network (140) are connected to the supply and return water pipe (180). In the low electricity price cold storage mode, the first heat exchange pipe (150) connects the first medium flow path and the cold water pool (110). The refrigeration unit (130) is running. The second heat exchange pipe (160) connects the second medium flow path and the refrigeration unit (130). The third heat exchange pipe (170) and the supply and return water pipe (180) are not connected. The heat exchange unit (120) exchanges heat between the chilled water in the refrigeration unit (130) and the cold water in the cold water pool (110). In the high electricity price cooling mode, the refrigeration unit (130) is stopped. The supply and return water pipe (180) connects the refrigeration unit (130) and the cooling water pipe network (140). The refrigeration unit (130) delivers chilled water to the cooling water pipe network (140). The first heat exchange pipe (150) connects the first medium flow path and the cold water pool (110). The second heat exchange pipe (160) is not connected. The third heat exchange pipe (170) connects the second medium flow path and the cooling water pipe network (140). The heat exchange unit (120) exchanges heat between the cold water in the cold water pool (110) and the cooling water in the cooling water pipe network (140). In the low electricity price combination mode, the chiller unit (130) is in operation, the second heat exchange pipeline (160) connects the second medium flow path to the chiller unit (130), the third heat exchange pipeline (170) is not connected, the heat exchange unit (120) exchanges heat between the chilled water in the chiller unit (130) and the cold water in the cold water pool (110), and the supply and return water pipeline (180) connects the chiller unit (130) to the cooling water network (140), and the chiller unit (130) supplies chilled water to the cooling water network (140).

2. The cooling water supply system for a silicon carbide production plant according to claim 1, characterized by, The refrigeration unit (130) includes multiple refrigeration units, and the chilled water tanks of the multiple refrigeration units are all connected to the supply and return water pipeline (180). Some of the chilled water tanks of the multiple refrigeration units are connected to the second heat exchange pipeline (160).

3. The cooling water supply system for a silicon carbide production plant according to claim 1, characterized by, The heat exchange unit (120) includes multiple plate heat exchangers, the first medium flow paths of the multiple plate heat exchangers are connected in parallel to the first heat exchange pipeline (150), the second medium flow paths of the multiple plate heat exchangers are connected in parallel to the second heat exchange pipeline (160) and the third heat exchange pipeline (170).

4. The cooling water supply system for a silicon carbide production plant according to claim 1, characterized by, The cold water pool (110) is provided with a first water inlet (111) and a second water inlet (112) in sequence in the direction of increasing depth. Both the first water inlet (111) and the second water inlet (112) are connected to the first heat exchange pipeline (150). In the low-electricity-price cold storage mode, the first heat exchange pipeline (150) inputs the cold water in the cold water pool (110) into the refrigeration unit (130) for heat exchange through the first water inlet (111), and outputs the cold water after heat exchange back to the cold water pool (110) through the second water inlet (112). In the high electricity price cooling mode, if the cold water in the cold water pool (110) exchanges heat with the cooling water in the cooling water network (140), the first heat exchange pipeline (150) inputs the cold water in the cold water pool (110) into the refrigeration unit (130) through the second water outlet (112) for heat exchange, and outputs the heat-exchanged cold water back to the cold water pool (110) through the first water outlet (111).

5. The cooling water supply system for a silicon carbide production plant according to claim 4, characterized by, The first heat exchange pipeline (150) includes a pump unit (151) and multiple pipe sections equipped with on / off valves (152). The pump unit (151) has a first input end (1511) and a first output end (1512). The first input end (1511) is connected to the first water inlet (111) and the second water inlet (112) through two pipe sections respectively. The first output end (1512) is connected to both ends of the first medium flow path through two pipe sections respectively. The two ends of the first medium flow path are also connected to the first water inlet (111) and the second water inlet (112) through two pipe sections respectively.

6. A cooling system control method applied to the cooling water cooling system (100) of the silicon carbide production plant according to any one of claims 1-5, characterized in that, The cooling system control method includes: During periods of low electricity prices, the cooling water supply system (100) of the silicon carbide production workshop is controlled to operate in the low electricity price cold storage mode or the low electricity price combination mode, based on the operating status of the cooling water network (140). During periods of high electricity prices, the cooling water supply system (100) of the silicon carbide production workshop is controlled to operate in the high electricity price cooling mode, wherein the electricity price during the low electricity price period is lower than the electricity price during the high electricity price period.

7. The cooling system control method according to claim 6, wherein The steps of controlling the cooling water supply system (100) of the silicon carbide production workshop to operate in the low-electricity-price cold storage mode or the low-electricity-price combined mode according to the operating status of the cooling water pipeline network (140) during the low-electricity-price period include: If the cooling water network (140) is not in operation during the low electricity price period, the cooling water supply system (100) of the silicon carbide production workshop is controlled to operate in the low electricity price cold storage mode. During the low electricity price period, if the cooling water network (140) is in operation, the cooling water supply system (100) of the silicon carbide production workshop is controlled to operate in the low electricity price combination mode.

8. The cooling system control method according to claim 6, wherein The steps for controlling the cooling water supply system (100) of the silicon carbide production workshop to operate in the high-electricity-price cooling mode during periods of high electricity prices include: During the period of high electricity price, if the cooling water pipeline (140) is operating at low load, the chiller unit (130) is controlled to deliver chilled water to the cooling water pipeline (140), or the heat exchanger unit (120) is controlled to exchange heat between the cold water in the cold water pool (110) and the cooling water in the cooling water pipeline (140). During the period of high electricity price, if the cooling water pipeline (140) is operating at high load, the chiller unit (130) is controlled to deliver chilled water to the cooling water pipeline (140), and the heat exchanger unit (120) is controlled to exchange heat between the cold water in the cold water pool (110) and the cooling water in the cooling water pipeline (140).

9. The cooling system control method according to claim 8, wherein The steps of controlling the chiller unit (130) to supply chilled water to the cooling water network (140) during the high electricity price period, if the cooling water network (140) is operating at low load, or controlling the heat exchanger unit (120) to exchange heat between the cold water in the cold water pool (110) and the cooling water in the cooling water network (140) include: During the period of high electricity price, if the cooling water pipeline (140) is operating at low load and the heat exchange unit (120) is faulty, the refrigeration unit (130) is controlled to supply chilled water to the cooling water pipeline (140). During the period of high electricity price, if the cooling water network (140) is operating at low load and the refrigeration unit (130) is faulty, the heat exchange unit (120) is controlled to exchange heat between the cold water in the cold water pool (110) and the cooling water in the cooling water network (140).

Citation Information

Patent Citations

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