Semiconductor process control methods and systems, electronic devices

Abstract

This disclosure provides a method, system, and electronic device for controlling semiconductor process flows. The method includes: acquiring an execution file for controlling semiconductor equipment to perform semiconductor production; parsing the independent process flows to be executed and their execution order defined in the execution file, treating each independent process flow as a path node and obtaining the main path according to the execution order; parsing whether each path node defines a corresponding sub-path and whether an automatic jump function is set to automatically jump to the sub-path to execute the corresponding control and then jump back, where the sub-path is a sub-process flow; receiving an instruction to delete a sub-path, and if it is determined that the path node corresponding to the sub-path to be deleted has an automatic jump function, outputting a prompt message prohibiting the deletion of the sub-path. This disclosure saves user query time by determining whether the sub-path can be deleted through system judgment, has high accuracy, and improves the yield of semiconductor products.

Description

Technical Field

[0001] This disclosure relates to the field of access control technology, and in particular to a method and system for controlling semiconductor process flow, and electronic equipment. Background Technology

[0002] The semiconductor industry is highly automated, and a semiconductor production line is a manufacturing system with numerous processing equipment and extremely complex processes. The overall process involves many independently executed processes, and within the semiconductor production testing process, there are many independently executed test items. However, over time, at least the following problems exist: In the field of semiconductor control, for an overall process involving multiple independently controlled components, controlling the execution order of test items through the system end results in an overly simplistic testing process that cannot accommodate the diversity of test item execution sequences. Summary of the Invention

[0003] The purpose of this disclosure is to provide a method, system, and electronic device for controlling semiconductor process flows. This addresses the problem that overly simplistic testing procedures cannot accommodate the diverse sequences of test items.

[0004] In a first aspect, embodiments of this disclosure provide a method for controlling a semiconductor process flow, the method comprising:

[0005] Obtain the executable files used to control semiconductor equipment to perform semiconductor production;

[0006] The independent process flows to be executed and their execution order as defined in the executable file are parsed, and each independent process flow is used as a path node and the main path is obtained according to the execution order.

[0007] The analysis determines whether each path node has a corresponding sub-path defined, and whether an automatic jump function is set to automatically jump to the sub-path to execute the corresponding control and then jump back. The sub-path is a sub-process flow.

[0008] Upon receiving an instruction to delete a subpath, if the path node corresponding to the subpath to be deleted is configured with an automatic redirection function, output a prompt message indicating that deletion of the subpath is prohibited.

[0009] In some possible embodiments, the method further includes:

[0010] If it is determined that the path node corresponding to the subpath to be deleted does not have an automatic redirection function set, then delete the subpath to be deleted.

[0011] In some possible embodiments, parsing whether an automatic redirection function is set for each path node to automatically redirect to the sub-path, perform corresponding control, and then redirect back includes at least one of the following steps:

[0012] The script of the executable file is pre-compiled. If each path node corresponds to an independent process flow with corresponding automatic jump function first control information, it is determined that the path node has an automatic jump function for script jump; and / or

[0013] When determining the second control information for setting the corresponding automatic jump function for each independent process flow of each path node in the system, it is determined that the path node has the automatic jump function for system jump.

[0014] In some possible embodiments, determining that the path node has an automatic script redirection function includes:

[0015] When the first control information associated with the independent process flow corresponding to each path node includes keywords indicating automatic jump, or includes keywords indicating automatic jump and sub-path information, it is determined that the path node has an automatic jump function for script jump.

[0016] In some possible embodiments, it is determined that the path node is configured with an automatic redirection function for system jumps, including:

[0017] If the second control information for the independent process flow corresponding to each path node in the system includes keywords indicating automatic jump, or includes keywords indicating automatic jump and sub-path information, then the path node is determined to have an automatic jump function for system jump.

[0018] In some possible embodiments, an instruction to delete a subpath is received, it is determined that the path node corresponding to the subpath to be deleted has an automatic redirection function, and a prompt message prohibiting the deletion of the subpath is output, including:

[0019] Receive the instruction to delete the sub-path, obtain the parsed first path node with script jump automatic jump function, and the second path node with system jump automatic jump function;

[0020] Obtain the first sub-path corresponding to the first path node and the second sub-path corresponding to the second path node;

[0021] If it is determined that the sub-path to be deleted is contained in the first sub-path or the second sub-path, a prompt message prohibiting the deletion of the sub-path is output.

[0022] In some possible embodiments, the method further includes:

[0023] If it is determined that the sub-path to be deleted is not included in the first sub-path and the second sub-path, the association between the sub-path to be deleted and the corresponding path node is automatically disconnected or disconnected according to the instruction, so that the corresponding automatic jump function is invalid.

[0024] In some possible embodiments, obtaining the first sub-path corresponding to the first path node and the second sub-path corresponding to the second path node includes:

[0025] When it is determined that the automatic jump information of the first path node and the automatic jump information of the second path node are obtained by parsing, the corresponding existing first sub-path and second sub-path are found according to the sub-path information.

[0026] If the parsing process fails to obtain the sub-path information corresponding to the automatic jump of the first path node and the automatic jump of the second path node, the process searches for the first sub-path corresponding to the first path node and the second sub-path corresponding to the second path node in the semiconductor file.

[0027] In some possible embodiments, the method further includes:

[0028] After confirming that the executable file has been updated, parse the updated executable file;

[0029] Following the order of the path nodes on the main path obtained from the parsing, execute the independent process flow corresponding to each path node to perform semiconductor production control / semiconductor product testing control.

[0030] When the execution reaches a path node with automatic jump function, it jumps to the corresponding sub-process flow to execute semiconductor production control / semiconductor product testing control according to the sub-path of the path node, and then jumps back to the path node to continue executing the corresponding semiconductor production control / semiconductor product testing control.

[0031] In some possible embodiments, the independent process flow included in the semiconductor executable file is a multi-level independent process flow. Each independent process flow in each level serves as a path node in the same level of independent process flow. A first path is obtained according to the execution order of the path nodes. The first path is a sub-path relative to the previous level of independent process flow and a main path relative to the next level of independent control path.

[0032] Secondly, embodiments of this disclosure provide a control system for a semiconductor process flow, including:

[0033] The acquisition module is used to acquire the execution files that control semiconductor devices to perform semiconductor production.

[0034] The first parsing module is used to parse the independent process flows to be executed and their execution order as defined in the executable file, and to take each independent process flow as a path node and obtain the main path according to the execution order.

[0035] The second parsing module is used to parse whether each path node has a corresponding sub-path defined, and whether an automatic jump function is set to automatically jump to the sub-path to execute the corresponding control and then jump back. The sub-path is a sub-process flow.

[0036] The determination module is used to receive instructions to delete sub-paths. If the path node corresponding to the sub-path to be deleted has an automatic jump function, it outputs a prompt message prohibiting the deletion of the sub-path.

[0037] Thirdly, embodiments of this disclosure provide an electronic device, including at least one processor; and a memory communicatively connected to the at least one processor; wherein the memory stores instructions executable by the at least one processor, the instructions being executed by the at least one processor to enable the at least one processor to perform the semiconductor process control method provided in the first aspect above.

[0038] Fourthly, embodiments of this disclosure provide a computer storage medium storing a computer program for causing a computer to execute the semiconductor process control method provided in the first aspect.

[0039] In this embodiment, to address the issue of an overly simplistic testing process that cannot adapt to the diverse sequences of test items, the system automatically checks whether an automatic redirection function is enabled on a path node before the user deletes it. If the automatic redirection function is enabled, the system prompts the user to prohibit deletion of the sub-path. This prevents the semiconductor product's control timeout from exceeding its limit, thus avoiding product defects. The system's ability to determine whether a sub-path can be deleted saves user query time, has high accuracy, and improves the yield of semiconductor products.

[0040] Other features and advantages of this disclosure will be set forth in the following description and will be apparent in part from the description or may be learned by practicing the disclosure. The objects and other advantages of this disclosure may be realized and obtained by means of the structures particularly pointed out in the written description, claims, and drawings. Attached Figure Description

[0041] To more clearly illustrate the technical solutions of the embodiments of this disclosure, the accompanying drawings used in the embodiments of this disclosure will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this disclosure. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0042] Figure 1 This is a schematic flowchart of a semiconductor process control method according to an embodiment of the present disclosure;

[0043] Figure 2 This is a schematic diagram illustrating the relationship between the main path and sub-paths according to an embodiment of this disclosure;

[0044] Figure 3 This is a schematic diagram of the overall process control method for a semiconductor process according to an embodiment of the present disclosure.

[0045] Figure 4 This is a schematic diagram of a control system structure for a semiconductor process flow according to an embodiment of the present disclosure;

[0046] Figure 5 This is a schematic diagram of an electronic device structure according to an embodiment of the present disclosure. Detailed Implementation

[0047] The technical solutions in the embodiments of this disclosure will now be described clearly and in detail with reference to the accompanying drawings. In the description of the embodiments of this disclosure, unless otherwise stated, " / " means "or", for example, A / B can mean A or B; "and / or" in the text is merely a description of the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A existing alone, A and B existing simultaneously, and B existing alone. In addition, in the description of the embodiments of this disclosure, "multiple" refers to two or more.

[0048] In the description of the embodiments of this disclosure, unless otherwise stated, the term "a plurality of" refers to two or more, and other quantifiers are similarly understood. The preferred embodiments described herein are for illustration and explanation only and are not intended to limit this disclosure. Furthermore, the embodiments of this disclosure and the features in the embodiments can be combined with each other without conflict.

[0049] To further illustrate the technical solutions provided by the embodiments of this disclosure, a detailed description is provided below in conjunction with the accompanying drawings and specific implementation methods. Although the embodiments of this disclosure provide method operation steps as shown in the following embodiments or drawings, more or fewer operation steps may be included in the method based on conventional or non-inventive effort. For steps that do not logically have a necessary causal relationship, the execution order of these steps is not limited to the execution order provided by the embodiments of this disclosure. In actual processing or when executed by the control device, the method may be executed sequentially or in parallel as shown in the embodiments or drawings.

[0050] Given that the testing processes in related technologies are too simplistic and cannot accommodate the diverse sequences of test items, this disclosure proposes a semiconductor process flow control method, system, and electronic equipment. The system determines whether a sub-path can be deleted, saving user query time, achieving high accuracy, and improving the yield of semiconductor products.

[0051] Other features and advantages of this disclosure will be set forth in the following description and will be apparent in part from the description or may be learned by practicing the disclosure. The objects and other advantages of this disclosure may be realized and obtained by means of the structures particularly pointed out in the written description, claims, and drawings.

[0052] The control method for the semiconductor process flow in the embodiments of this disclosure will be described in detail below with reference to the accompanying drawings.

[0053] Figure 1 A schematic flowchart of a semiconductor process control method according to an embodiment of the present disclosure is shown, including:

[0054] Step 101: Obtain the execution file used to control the semiconductor equipment to perform semiconductor production.

[0055] A semiconductor production line is a manufacturing system with numerous processing equipment and extremely complex processes. The overall semiconductor production process includes many independently executed process steps, and the semiconductor testing process includes many independently executed test items. Controlling the semiconductor equipment involves executing these process steps or test items according to pre-compiled executable files.

[0056] Step 102: Parse the independent process flows to be executed and their execution order as defined in the executable file, take each independent process flow as a path node, and obtain the main path according to the execution order.

[0057] Specifically, in the field of semiconductor control, for an overall process flow that includes multiple independent controls, control can be achieved through the system. Each independently executed process flow can be treated as a path node, and the execution order of each independent control is pre-defined in the system to obtain the main path. For example, in semiconductor process control, slicing, diffusion, etching, etc., are pre-defined main paths in the system. For another example, in the semiconductor production chain, aging tests, high-temperature tests, and wear resistance tests need to be performed in sequence. Each test can be understood as a path node. The execution order of performing the aging test first, then the high-temperature test, and finally the wear resistance test can be defined as a main path. In other words, the main path is used to pre-define the execution order of each independent process flow.

[0058] Step 103: Analyze whether each path node has a corresponding sub-path defined, and whether an automatic jump function is set to automatically jump to the sub-path to execute the corresponding control and then jump back. The sub-path is a sub-process flow.

[0059] Depending on actual production process requirements, it may sometimes be necessary to temporarily switch to other control processes outside of a specific path node within the main path. For example, in the main path defined above, which executes path node A first, then path nodes B and C, and finally path node D, if after completing the experiment at path node A, it is necessary to switch to other process conditions for testing, and after completing that test, switch back to executing the experiment at path node A on the main path, then this testing under other process conditions can be understood as a branch path, or sub-path, within the main path execution process. This automatic switching function is defined in this disclosure as an automatic switching function. For details, see [link to relevant documentation]. Figure 2 The diagram shows the relationship between the main path and sub-paths. The main path includes a first path node, a second path node, a third path node, and a fourth path node. An automatic jump function is set at the second path node to enter the sub-path. The sub-path can include, for example, path node a, path node b, and path node c. That is, after executing the first path node and before the second path node, the system automatically jumps to the sub-path. After executing the sub-path, the system automatically jumps back to the main path, for example, back to after the first path node and before the second path node, and continues to execute the remaining second, third, and fourth path nodes on the main path. Of course, it can also return to other path nodes on the main path.

[0060] Step 104: Receive the instruction to delete the sub-path. If the path node corresponding to the sub-path to be deleted has an automatic jump function, output a prompt message prohibiting the deletion of the sub-path.

[0061] As an optional implementation, if it is determined that the path node corresponding to the sub-path to be deleted does not have an automatic redirection function, the sub-path to be deleted is deleted.

[0062] When a user instructs the deletion of a subpath on a specified path node, the system first needs to determine whether an automatic redirection function is enabled on that path node. If it is, the system will display a message indicating that deletion of the subpath is prohibited to prevent the user from doing so. If it is determined that the path node does not have an automatic redirection function enabled, the system will display a message indicating that deletion of the subpath is permitted to the user.

[0063] This disclosure addresses the issue of automatically checking whether an automatic redirection function is set on a path node before a user deletes a subpath. If the automatic redirection function is set, the system prompts the user to prohibit deletion of the subpath, thus preventing the semiconductor product's control time from exceeding its limit and causing product defects. The system's ability to determine whether a subpath can be deleted saves user query time, has high accuracy, and improves the yield of semiconductor products.

[0064] As an optional implementation, the automatic redirection function, which determines whether each path node is configured to automatically redirect to a sub-path, perform corresponding control, and then redirect back, includes at least one of the following steps:

[0065] The script of the executable file is pre-compiled. If each path node corresponds to an independent process flow with corresponding automatic jump function first control information, it is determined that the path node has an automatic jump function for script jump; and / or

[0066] When determining the second control information for setting the corresponding automatic jump function for each independent process flow of each path node in the system, it is determined that the path node has the automatic jump function for system jump.

[0067] A script is a series of text commands that can be viewed (e.g., opened and edited with Notepad). When a script is executed, an interpreter translates each command into machine-readable instructions, which are then executed sequentially. Specifically, this disclosure provides two methods for determining whether an automatic jump function is enabled on a path node. Both methods can be used simultaneously, or either method can be used to determine if an automatic jump function is enabled on a path node.

[0068] Method 1: The path node is set with an automatic redirection function for script jumps.

[0069] As an optional implementation, determining that the path node has an automatic script jump function includes: determining that the path node has an automatic script jump function when the first control information associated with the independent process flow corresponding to each path node includes a keyword indicating automatic jump, or includes a keyword indicating automatic jump and sub-path information.

[0070] If the user wants to delete a subpath, before submitting, check if a script redirection is set on this path node. The keyword indicating automatic redirection includes "redirection". The keyword indicating automatic redirection and subpath information refer to the script including both the keyword "redirection" and the subpath ID used to locate the subpath.

[0071] Method 2: The path node is configured with an automatic redirection function for system redirection.

[0072] As an optional implementation, it is determined that the path node is equipped with an automatic redirection function for system redirection, including:

[0073] If the second control information for the independent process flow corresponding to each path node in the system includes keywords indicating automatic jump, or includes keywords indicating automatic jump and sub-path information, then the path node is determined to have an automatic jump function for system jump.

[0074] See the description in Method 1 above; it will not be repeated here.

[0075] As an optional implementation, the system receives an instruction to delete a subpath, determines that the path node corresponding to the subpath to be deleted has an automatic redirection function, and outputs a prompt message prohibiting the deletion of the subpath, including:

[0076] Receive the instruction to delete the sub-path, obtain the parsed first path node with script jump automatic jump function, and the second path node with system jump automatic jump function;

[0077] Obtain the first sub-path corresponding to the first path node and the second sub-path corresponding to the second path node;

[0078] If it is determined that the sub-path to be deleted is contained in the first sub-path or the second sub-path, a prompt message prohibiting the deletion of the sub-path is output.

[0079] Specifically, upon receiving an instruction to delete a subpath, the system iterates through the first path node with script redirection in Method 1 and the second path node with system redirection in Method 2, obtaining all path nodes with automatic redirection functionality. Then, it retrieves the subpaths of these path nodes. By checking all subpaths of path nodes with automatic redirection, if a subpath that is simply to be deleted exists, a message prohibiting deletion of this subpath is output. In this disclosure, the output of the message can be, but is not limited to, using a pop-up window.

[0080] As an optional implementation, the method further includes:

[0081] If it is determined that the sub-path to be deleted is not included in the first sub-path and the second sub-path, the association between the sub-path to be deleted and the corresponding path node is automatically disconnected or disconnected according to the instruction, so that the corresponding automatic jump function is invalid.

[0082] Specifically, when the sub-path to be deleted is not included in the path node set for automatic redirection, this means that although the redirection relationship between the path node and the sub-path is still there, the sub-path was previously deleted or modified. Therefore, in order to ensure that the process flow will not get stuck at this path node, when it is determined that the sub-path to be deleted is not included in the path node set for automatic redirection, the association between the sub-path and the corresponding path node is broken, so that the automatic redirection function on the path node is disabled. Afterwards, when the process flow passes through this path node, there will be no situation where the sub-path is redirected but the corresponding sub-path cannot be found.

[0083] As an optional implementation, obtaining the first sub-path corresponding to the first path node and the second sub-path corresponding to the second path node includes:

[0084] When it is determined that the automatic jump information of the first path node and the automatic jump information of the second path node are obtained by parsing, the corresponding existing first sub-path and second sub-path are found according to the sub-path information.

[0085] If the parsing process fails to obtain the sub-path information corresponding to the automatic jump of the first path node and the automatic jump of the second path node, the process searches for the first sub-path corresponding to the first path node and the second sub-path corresponding to the second path node in the semiconductor file.

[0086] Specifically, there are generally two ways to find the subpaths corresponding to a path node. When the path node is set to automatically jump, the subpaths can be found based on the subpath information corresponding to the automatic jump. When the path node is not set to automatically jump, the subpaths corresponding to the path node are found by managing the pre-compiled path nodes and their own subpaths in the semiconductor file.

[0087] As an optional implementation, the method further includes:

[0088] After confirming that the executable file has been updated, parse the updated executable file;

[0089] Following the order of the path nodes on the main path obtained from the parsing, execute the independent process flow corresponding to each path node to perform semiconductor production control / semiconductor product testing control.

[0090] When the execution reaches a path node with automatic jump function, it jumps to the corresponding sub-process flow to execute semiconductor production control / semiconductor product testing control according to the sub-path of the path node, and then jumps back to the path node to continue executing the corresponding semiconductor production control / semiconductor product testing control.

[0091] Specifically, when a subpath deletion instruction is received and it is determined that the subpath can be deleted, the deletion of the subpath is equivalent to completing an update of the executable file. The updated executable file is parsed and executed in the order of the path nodes on the main path in the updated executable file. If an automatic jump function is set on a path node on the main path, the jump is made to the corresponding subpath. After the subpath is executed, the jump is made back to the next path node on the main path to continue execution.

[0092] As an optional implementation, the independent process flow included in the semiconductor execution file is a multi-level independent process flow. Each independent process flow in each level serves as a path node in the same level of independent process flow. The first path is obtained according to the execution order of the path nodes. The first path is a sub-path relative to the previous level of independent process flow and a main path relative to the next level of independent control path.

[0093] Specifically, for example, a semiconductor executable file might include an independent process flow consisting of paths A, B, and C. Execution B has an automatic jump function. When B is executed, it automatically jumps to the independent process flow path consisting of paths D and E. Furthermore, an automatic jump function is also set up on D. The sub-path of D is F. That is, after executing D, it automatically jumps to the independent process flow F, after executing F it automatically jumps to the parent path E, and after executing E it jumps back to the parent path C. In summary, in the example above, A, B, and C are equivalent to the main paths of D and E, and D and E are equivalent to the sub-paths of A, B, and C, but equivalent to the main path of F. Therefore, the example represents an independent process flow with three levels.

[0094] See Figure 3 The overall execution process of this disclosure is as follows:

[0095] Step 301: Receive an instruction to delete the subpath;

[0096] Step 302: Determine whether the path node corresponding to the sub-path to be deleted has an automatic redirect function set. If it is determined that it is set, proceed to step 303; if it is determined that it is not set, proceed to step 305.

[0097] Step 303: Determine whether script jumps or system jumps are set for each path node, and whether the script has been modified or the system jump has been deleted. If yes, proceed to step 304; otherwise, proceed to step 305.

[0098] Step 304: Output a message indicating that deletion of subpaths is prohibited;

[0099] Step 305, successful deletion.

[0100] Example 2

[0101] Based on the same inventive concept, this disclosure also provides a control system for a semiconductor process, such as... Figure 4 As shown, the system includes:

[0102] Module 401 is used to acquire the execution file that controls the semiconductor equipment to perform semiconductor production.

[0103] The first parsing module 402 is used to parse the independent process flows to be executed and the execution order defined in the executable file, take each independent process flow as a path node and obtain the main path according to the execution order;

[0104] The second parsing module 403 is used to parse whether each path node has a corresponding sub-path defined, and whether an automatic jump function is set to automatically jump to the sub-path to execute the corresponding control and then jump back. The sub-path is a sub-process flow.

[0105] The determination module 404 is used to receive the instruction to delete the sub-path, and if the path node corresponding to the sub-path to be deleted is set to automatic jump function, it outputs a prompt message prohibiting the deletion of the sub-path.

[0106] Optionally, the determining module 404 is further configured to:

[0107] If it is determined that the path node corresponding to the subpath to be deleted does not have an automatic redirection function set, then delete the subpath to be deleted.

[0108] Optionally, the second parsing module 403 is specifically used to parse whether an automatic jump function is set for each path node to automatically jump to the sub-path to perform the corresponding control and then jump back, including at least one of the following steps:

[0109] The script of the executable file is pre-compiled. If each path node corresponds to an independent process flow with corresponding automatic jump function first control information, it is determined that the path node has an automatic jump function for script jump; and / or

[0110] When determining the second control information for setting the corresponding automatic jump function for each independent process flow of each path node in the system, it is determined that the path node has the automatic jump function for system jump.

[0111] Optionally, the second parsing module 403 is specifically used for:

[0112] When the first control information associated with the independent process flow corresponding to each path node includes keywords indicating automatic jump, or includes keywords indicating automatic jump and sub-path information, it is determined that the path node has an automatic jump function for script jump.

[0113] Optionally, the second parsing module 403 is specifically used for:

[0114] If the second control information for the independent process flow corresponding to each path node in the system includes keywords indicating automatic jump, or includes keywords indicating automatic jump and sub-path information, then the path node is determined to have an automatic jump function for system jump.

[0115] Optionally, the second parsing module 403 is specifically used to receive an instruction to delete a sub-path, obtain a first path node with script jump automatic jump function and a second path node with system jump automatic jump function.

[0116] Obtain the first sub-path corresponding to the first path node and the second sub-path corresponding to the second path node;

[0117] If it is determined that the sub-path to be deleted is contained in the first sub-path or the second sub-path, a prompt message prohibiting the deletion of the sub-path is output.

[0118] Optionally, the second parsing module 403 is further configured to:

[0119] If it is determined that the sub-path to be deleted is not included in the first sub-path and the second sub-path, the association between the sub-path to be deleted and the corresponding path node is automatically disconnected or disconnected according to the instruction, so that the corresponding automatic jump function is invalid.

[0120] Optionally, the second parsing module 403 is specifically used to, when it is determined that the sub-path information corresponding to the automatic jump of the first path node and the automatic jump of the second path node is obtained by parsing, search for the corresponding existing first sub-path and second sub-path according to the sub-path information;

[0121] If the parsing process fails to obtain the sub-path information corresponding to the automatic jump of the first path node and the automatic jump of the second path node, the process searches for the first sub-path corresponding to the first path node and the second sub-path corresponding to the second path node in the semiconductor file.

[0122] Optionally, the system further includes an execution module 405, configured to:

[0123] After confirming that the executable file has been updated, parse the updated executable file;

[0124] Following the order of the path nodes on the main path obtained from the parsing, execute the independent process flow corresponding to each path node to perform semiconductor production control / semiconductor product testing control.

[0125] When the execution reaches a path node with automatic jump function, it jumps to the corresponding sub-process flow to execute semiconductor production control / semiconductor product testing control according to the sub-path of the path node, and then jumps back to the path node to continue executing the corresponding semiconductor production control / semiconductor product testing control.

[0126] Optionally, the independent process flow included in the semiconductor execution file is a multi-level independent process flow. Each independent process flow in each level serves as a path node in the same level of independent process flow. The first path is obtained according to the execution order of the path nodes. The first path is a sub-path relative to the previous level of independent process flow and a main path relative to the next level of independent control path.

[0127] Having introduced the control method and control system for semiconductor process flow according to exemplary embodiments of the present disclosure, the electronic device according to another exemplary embodiment of the present disclosure will now be described.

[0128] Those skilled in the art will understand that various aspects of this disclosure can be implemented as a system, method, or program product. Therefore, various aspects of this disclosure can be specifically implemented in the following forms: a completely hardware implementation, a completely software implementation (including firmware, microcode, etc.), or a combination of hardware and software aspects, collectively referred to herein as a "circuit," "module," or "system."

[0129] In some possible implementations, the electronic device according to this disclosure may include at least one processor and at least one memory. The memory stores program code that, when executed by the processor, causes the processor to perform the steps in the control method for the semiconductor process flow according to various exemplary embodiments of this disclosure described above.

[0130] The following reference Figure 5 To describe an electronic device 130 according to this embodiment of the present disclosure, namely, a control device for the semiconductor process described above. Figure 5 The electronic device 130 shown is merely an example and should not impose any limitation on the functionality and scope of use of the embodiments disclosed herein.

[0131] like Figure 5 As shown, the electronic device 130 is presented in the form of a general-purpose electronic device. The components of the electronic device 130 may include, but are not limited to: at least one processor 131, at least one memory 132, and a bus 133 connecting different system components (including memory 132 and processor 131).

[0132] Bus 133 represents one or more of several bus structures, including a memory bus or memory controller, peripheral bus, processor, or local bus using any of the various bus structures.

[0133] The memory 132 may include a readable medium in the form of volatile memory, such as random access memory (RAM) 1321 and / or cache memory 1322, and may further include read-only memory (ROM) 1323.

[0134] The memory 132 may also include a program / utility 1325 having a set (at least one) of program modules 1324, including but not limited to: an operating system, one or more application programs, other program modules, and program data, each or some combination of these examples may include an implementation of a network environment.

[0135] Electronic device 130 can also communicate with one or more external devices 134 (e.g., keyboard, pointing device, etc.), and with one or more devices that enable a user to interact with electronic device 130, and / or with any device that enables electronic device 130 to communicate with one or more other electronic devices (e.g., router, modem, etc.). This communication can be performed via input / output (I / O) interface 135. Furthermore, electronic device 130 can also communicate with one or more networks (e.g., local area network (LAN), wide area network (WAN), and / or public networks, such as the Internet) via network adapter 136. As shown, network adapter 136 communicates with other modules used in electronic device 130 via bus 133. It should be understood that, although not shown in the figures, other hardware and / or software modules can be used in conjunction with electronic device 130, including but not limited to: microcode, device drivers, redundant processors, external disk drive arrays, RAID systems, tape drives, and data backup storage systems.

[0136] In some possible implementations, various aspects of the semiconductor process control method provided in this disclosure can also be implemented in the form of a program product, which includes program code that, when the program product is run on a computer device, causes the computer device to perform the steps of the semiconductor process control method according to various exemplary embodiments of this disclosure as described above.

[0137] The program product may employ any combination of one or more readable media. A readable medium may be a readable signal medium or a readable storage medium. A readable storage medium may be, for example,—but not limited to—an electrical, magnetic, optical, electromagnetic, infrared, or semiconductor system, apparatus, or device, or any combination thereof. More specific examples (a non-exhaustive list) of readable storage media include: electrical connections having one or more wires, portable disks, hard disks, random access memory (RAM), read-only memory (ROM), erasable programmable read-only memory (EPROM or flash memory), optical fiber, portable compact disk read-only memory (CD-ROM), optical storage devices, magnetic storage devices, or any suitable combination thereof.

[0138] The monitoring program product of the embodiments of this disclosure may employ a portable compact disc read-only memory (CD-ROM) and include program code, and may run on an electronic device. However, the program product of this disclosure is not limited thereto. In this document, the readable storage medium may be any tangible medium that contains or stores a program that may be used by or in conjunction with an instruction execution system, apparatus, or device.

[0139] A readable signal medium may include a data signal propagated in baseband or as part of a carrier wave, carrying readable program code. This propagated data signal may take various forms, including but not limited to electromagnetic signals, optical signals, or any suitable combination thereof. A readable signal medium may also be any readable medium other than a readable storage medium, capable of sending, propagating, or transmitting a program for use by or in conjunction with an instruction execution system, apparatus, or device.

[0140] The program code contained on the readable medium may be transmitted using any suitable medium, including but not limited to wireless, wired, optical fiber, RF, etc., or any suitable combination thereof.

[0141] Program code for performing the operations of this disclosure can be written in any combination of one or more programming languages, including object-oriented programming languages ​​such as Java and C++, and conventional procedural programming languages ​​such as C or similar languages. The program code can execute entirely on the user's electronic device, partially on the user's device, as a standalone software package, partially on the user's electronic device and partially on a remote electronic device, or entirely on a remote electronic device or server. In cases involving remote electronic devices, the remote electronic device can be connected to the user's electronic device via any type of network—including a local area network (LAN) or a wide area network (WAN)—or can be connected to an external electronic device (e.g., via the Internet using an Internet service provider).

[0142] It should be noted that although several units or sub-units of the apparatus have been mentioned in the detailed description above, this division is merely exemplary and not mandatory. In fact, according to embodiments of this disclosure, the features and functions of two or more units described above can be embodied in one unit. Conversely, the features and functions of one unit described above can be further divided and embodied by multiple units.

[0143] Furthermore, although the operations of the methods disclosed herein are described in a specific order in the accompanying drawings, this does not require or imply that these operations must be performed in that specific order, or that all of the operations shown must be performed to achieve the desired result. Additionally or alternatively, certain steps may be omitted, multiple steps may be combined into one step, and / or one step may be broken down into multiple steps.

[0144] Those skilled in the art will understand that embodiments of this disclosure can be provided as methods, systems, or computer program products. Therefore, this disclosure can take the form of a completely hardware embodiment, a completely software embodiment, or an embodiment combining software and hardware aspects. Furthermore, this disclosure can take the form of a computer program product embodied on one or more computer-usable storage media (including, but not limited to, disk storage, CD-ROM, optical storage, etc.) containing computer-usable program code.

[0145] This disclosure is described with reference to flowchart illustrations and block diagrams of methods, apparatus (systems), and computer program products according to embodiments of this disclosure. It will be understood that each block of the flowchart illustrations and block diagrams, and combinations of blocks in the flowchart illustrations and block diagrams, can be implemented by computer program instructions. These computer program instructions can be provided to a processor of a general-purpose computer, special-purpose computer, embedded processor, or other programmable data processing apparatus to produce a machine, such that the instructions, which execute via the processor of the computer or other programmable data processing apparatus, create a machine for implementing the flowchart illustrations. Figure 1 One or more processes and boxes Figure 1 A device that provides the functions specified in one or more boxes.

[0146] These computer program instructions may also be stored in a computer-readable storage medium that can direct a computer or other programmable data processing device to function in a particular manner, such that the instructions stored in the computer-readable storage medium produce an article of manufacture including instruction means, which are implemented in a process Figure 1 One or more processes and boxes Figure 1 The function specified in one or more boxes.

[0147] These computer program instructions may also be loaded onto a computer or other programmable data processing equipment to cause a series of operational steps to be performed on the computer or other programmable equipment to produce a computer-implemented process, thereby providing instructions that execute on the computer or other programmable equipment for implementing the process. Figure 1 One or more processes and boxes Figure 1 The steps of the function specified in one or more boxes.

[0148] Although preferred embodiments of this disclosure have been described, those skilled in the art, upon learning the basic inventive concept, can make other changes and modifications to these embodiments. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments as well as all changes and modifications falling within the scope of this disclosure.

[0149] Obviously, those skilled in the art can make various modifications and variations to this disclosure without departing from its spirit and scope. Therefore, if such modifications and variations fall within the scope of the claims of this disclosure and their equivalents, this disclosure is also intended to include such modifications and variations.

Claims

1. A method for controlling a semiconductor process flow, characterized in that, The method includes: Obtain the executable files used to control semiconductor equipment to perform semiconductor production; The independent process flows to be executed and their execution order as defined in the executable file are parsed, and each independent process flow is used as a path node and the main path is obtained according to the execution order. The analysis determines whether each path node has a corresponding sub-path defined, and whether an automatic jump function is set to automatically jump to the sub-path to execute the corresponding control and then jump back. The sub-path is a sub-process flow. Upon receiving an instruction to delete a subpath, if the path node corresponding to the subpath to be deleted is configured with an automatic redirection function, output a prompt message indicating that deletion of the subpath is prohibited.

2. The method according to claim 1, characterized in that, Also includes: If it is determined that the path node corresponding to the subpath to be deleted does not have an automatic redirection function set, then delete the subpath to be deleted.

3. The method according to claim 1 or 2, characterized in that, The process of determining whether to configure automatic redirection for each path node to automatically jump to the sub-path, perform corresponding control, and then jump back includes at least one of the following steps: The script of the executable file is pre-compiled. If each path node corresponds to an independent process flow with corresponding automatic jump function first control information, it is determined that the path node has an automatic jump function for script jump; and / or When determining the second control information for setting the corresponding automatic jump function for each independent process flow of each path node in the system, it is determined that the path node has the automatic jump function for system jump.

4. The method according to claim 3, characterized in that, This path node has been confirmed to have an automatic redirection function configured for script navigation, including: When the first control information associated with the independent process flow corresponding to each path node includes keywords indicating automatic jump, or includes keywords indicating automatic jump and sub-path information, it is determined that the path node has an automatic jump function for script jump.

5. The method according to claim 3, characterized in that, This path node has been confirmed to have an automatic redirection function configured for system redirection, including: If the second control information for the independent process flow corresponding to each path node in the system includes keywords indicating automatic jump, or includes keywords indicating automatic jump and sub-path information, then the path node is determined to have an automatic jump function for system jump.

6. The method according to claim 3, characterized in that, Upon receiving an instruction to delete a subpath, and confirming that the path node corresponding to the subpath to be deleted has an automatic redirection function set, output a prompt message prohibiting the deletion of the subpath, including: Receive the instruction to delete the sub-path, obtain the parsed first path node with script jump automatic jump function, and the second path node with system jump automatic jump function; Obtain the first sub-path corresponding to the first path node and the second sub-path corresponding to the second path node; If it is determined that the sub-path to be deleted is contained in the first sub-path or the second sub-path, a prompt message prohibiting the deletion of the sub-path is output.

7. The method according to claim 6, characterized in that, Also includes: If it is determined that the sub-path to be deleted is not included in the first sub-path and the second sub-path, the association between the sub-path to be deleted and the corresponding path node is automatically disconnected or disconnected according to the instruction, so that the corresponding automatic jump function is invalid.

8. The method according to claim 6, characterized in that, Obtaining the first sub-path corresponding to the first path node and the second sub-path corresponding to the second path node includes: When it is determined that the automatic jump information of the first path node and the automatic jump information of the second path node are obtained by parsing, the corresponding existing first sub-path and second sub-path are found according to the sub-path information. If the parsing process fails to obtain the sub-path information corresponding to the automatic jump of the first path node and the automatic jump of the second path node, the execution file is searched for the first sub-path corresponding to the first path node and the second sub-path corresponding to the second path node.

9. The method according to claim 1, characterized in that, Also includes: After confirming that the executable file has been updated, parse the updated executable file; Following the order of the path nodes on the main path obtained from the parsing, execute the independent process flow corresponding to each path node to perform semiconductor production control / semiconductor product testing control. When the execution reaches a path node with automatic jump function, it jumps to the corresponding sub-process flow to execute semiconductor production control / semiconductor product testing control according to the sub-path of the path node, and then jumps back to the path node to continue executing the corresponding semiconductor production control / semiconductor product testing control.

10. The method according to claim 1, characterized in that, The execution file includes a multi-level independent process flow. Each independent process flow in each level serves as a path node in the same level of independent process flow. The first path is obtained according to the execution order of the path nodes. The first path is a sub-path relative to the previous level of independent process flow and a main path relative to the next level of independent control path.

11. A control system for a semiconductor process flow, characterized in that, include: The acquisition module is used to acquire the execution files that control semiconductor devices to perform semiconductor production. The first parsing module is used to parse the independent process flows to be executed and their execution order as defined in the executable file, and to take each independent process flow as a path node and obtain the main path according to the execution order. The second parsing module is used to parse whether each path node has a corresponding sub-path defined, and whether an automatic jump function is set to automatically jump to the sub-path to execute the corresponding control and then jump back. The sub-path is a sub-process flow. The determination module is used to receive instructions to delete sub-paths. If the path node corresponding to the sub-path to be deleted has an automatic jump function, it outputs a prompt message prohibiting the deletion of the sub-path.

12. An electronic device, characterized in that, The method includes at least one processor; and a memory communicatively connected to the at least one processor; wherein the memory stores instructions executable by the at least one processor to enable the at least one processor to perform the method as described in any one of claims 1-10.

13. A computer storage medium, characterized in that, The computer storage medium stores a computer program that enables the computer to perform the method as described in any one of claims 1-10.

14. A computer program product, characterized in that, It includes computer program instructions that, when executed by a processor, implement the method according to any one of claims 1-10.

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