Mirror module, synchrotron radiation device and free electron laser device

Abstract

The application discloses a mirror module, a synchrotron radiation device and a free electron laser device, and relates to the technical field of synchrotron radiation and free electron laser. The mirror module comprises a mirror body, a heating assembly and a cooling assembly. The mirror body has an upper surface and a side surface. The upper surface is a reflection surface of a light beam. A groove is formed through the side surface. The groove is arranged along a first direction. The groove is used for inhibiting thermal deformation of the mirror body. The heating assembly is connected to the side surface. The heating assembly is located on one side of the groove close to the upper surface. The heating assembly is used for temperature compensation of the reflection surface. The cooling assembly is connected to the heating assembly. The cooling assembly transfers heat of the heating assembly, so as to reduce the temperature of the reflection surface. The mirror module provided by the application can play a role of meeting preset requirements of a mirror surface height error RMS value and a slope error RMS value under the condition that a spot center and a physical center of the reflection surface are inconsistent.

Description

Technical Field

[0001] This application relates to the fields of synchrotron radiation and free-electron laser technology, and in particular to a mirror module, a synchrotron radiation device, and a free-electron laser device. Background Technology

[0002] In synchrotron radiation and free-electron laser devices, the beamline mirrors typically absorb the thermal load from the light source. After absorbing the thermal power from the light source, a temperature gradient is generated on the mirror, causing thermal deformation of the mirror surface, which ultimately adversely affects the transmission efficiency and quality of X-rays.

[0003] Fourth-generation light sources, whether diffraction-limiting rings or free-electron laser devices, place very high demands on the surface shape control of the mirror body. Generally, the height error RMS (Root Mean Square) value is required to be around 1 nm and the slope error RMS value is around 100 nrad. Therefore, a suitable surface shape scheme must be adopted for the mirror.

[0004] Currently, cooling solutions for beamline mirrors include not only the commonly used side-contact cooling but also side-grooving designs. These designs optimize parameters such as groove position, depth, and width to minimize surface thermal deformation under specific heat loads. The Shanghai Synchrotron Radiation Facility (SSRF) in China has proposed a side-local cooling scheme. This scheme optimizes the length and width of the contact area between the cooling copper block and the mirror side while maintaining the mirror's overall appearance, resulting in minimal surface shape error under a given load. Besides side-contact cooling, internal channel cooling is also used for short-sized optical components. Furthermore, cooling methods for beamline optical components in free-electron laser devices have been developed. For example, some technologies propose using electrically heated plates for temperature compensation.

[0005] These solutions share a common feature: they are only effective when the center of the light spot and the center of the reflector surface are approximately aligned. When the center of the light spot on the reflector surface is not aligned with the physical center of the reflector surface, these solutions are no longer applicable. Summary of the Invention

[0006] In view of this, the purpose of this application is to overcome the shortcomings of the prior art. This application provides a reflector module, a synchrotron radiation device and a free-electron laser device to solve the technical problem of the lack of a reflector module in the prior art that can cope with the inconsistency between the center of the light spot on the reflector surface and the physical center of the reflector surface.

[0007] This application provides:

[0008] A mirror module, comprising:

[0009] The mirror body has an upper surface and a side surface, the side surface being connected to the upper surface. The upper surface is a reflective surface for light beams. A groove is formed through the side surface, the groove being arranged along a first direction, and the groove is used to suppress thermal deformation of the mirror body.

[0010] A heating component is connected to the side surface and is located on the side of the groove near the upper surface. The heating component is used to compensate the temperature of the reflective surface.

[0011] A cooling component, connected to the heating component, transfers heat from the heating component to reduce the temperature of the reflective surface.

[0012] In addition, the mirror module according to this application may also have the following additional technical features:

[0013] In some embodiments of this application, the reflector module further includes a first connecting layer, which connects the mirror body and the heating assembly.

[0014] In some embodiments of this application, the reflector module further includes a second connection layer that connects the cooling component and the heating component.

[0015] In some embodiments of this application, the first connecting layer is an indium gallium eutectic solution film with a thickness of 50 micrometers; the second connecting layer is an indium gallium eutectic solution film with a thickness of 50 micrometers.

[0016] In some embodiments of this application, the heating assembly includes a heat-conducting block, a plurality of heating elements, and a heating controller. The first connecting layer is connected to the heat-conducting block and the side surface, the plurality of heating elements are connected to the surface of the heat-conducting block, and the heating controller is electrically connected to the plurality of heating elements.

[0017] In some embodiments of this application, the plurality of heating elements are spaced apart along the first direction and are disposed close to the upper surface.

[0018] In some embodiments of this application, the cooling assembly includes cooling pipes, the second connecting layer connects the cooling pipes and the heat-conducting block respectively, and the cooling pipes are connected to an external cooling system.

[0019] In some embodiments of this application, the number of the sides is two, and the two sides are spaced apart on both sides of the upper surface along the second direction. The number of the heating components and the cooling components are both two sets, and the first direction and the second direction are perpendicular.

[0020] Two sets of heating components are symmetrically arranged on the two sides along the first direction, and two sets of cooling components are symmetrically arranged on the two heating components along the first direction.

[0021] This application also provides a synchrotron radiation device, including the mirror module as described above.

[0022] This application also provides a free-electron laser device, including the mirror module as described above.

[0023] Compared to existing technologies, the advantages of this application are as follows: This application proposes a reflector module that, when the center of the light spot and the physical center of the reflective surface are not aligned, controls the surface shape of the reflective surface by setting the groove to suppress the deformation of the mirror body, thereby controlling the surface shape of the reflective surface by setting the cooling component to reduce the temperature of the mirror body, and further compensating for the surface shape of the reflective surface by setting the heating component to heat the mirror body. Ultimately, the reflective surface height error RMS value is maintained at approximately 1 nm, and the slope error RMS value is maintained at approximately 100 nrad, meeting the preset requirements. Attached Figure Description

[0024] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0025] Figure 1 The working principle diagram of the mirror body is shown;

[0026] Figure 2 One of the structural schematic diagrams of the mirror module of this application is shown;

[0027] Figure 3 It shows Figure 2 Schematic diagram of the cross section at point AA;

[0028] Figure 4 The second schematic diagram of the reflector module of this application is shown;

[0029] Figure 5 The third schematic diagram of the structure of the reflector module of this application is shown;

[0030] Figure 6 The diagram shows the working principle of the reflector module;

[0031] Figure 7 The diagram shows the deformation distribution curve along the normal direction of the meridian obtained by X-ray irradiation onto the reflecting surface;

[0032] Figure 8 The diagram shows the slope error distribution curve of the normal direction of the meridian obtained by X-ray irradiation onto the reflecting surface.

[0033] Key component symbols: 10 - X-ray; 20 - Spot; 30 - Meridian; 100 - Mirror module; 110 - Mirror body; 111 - Top surface; 112 - Side surface; 113 - Groove; 120 - Heating assembly; 121 - Heat-conducting block; 1211 - First surface; 1212 - Second surface; 1213 - Third surface; 122 - Heating element; 123 - First connecting layer; 130 - Cooling assembly; 131 - Cooling pipe; 132 - Through hole; 133 - Second connecting layer; 134 - Third connecting layer; D1 - First direction; D2 - Second direction; D3 - Third direction. Detailed Implementation

[0034] The embodiments of this application are described in detail below. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this application, and should not be construed as limiting this application.

[0035] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0036] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.

[0037] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0038] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0039] like Figure 1 and Figure 2 As shown, when the reflective surface of the mirror 110 is irradiated by light of a certain energy, a light spot 20 is formed on the surface of the reflective surface. The heat deposited on the reflective surface will raise the temperature of the mirror 110, thereby affecting the surface shape accuracy of the reflective surface.

[0040] In response to the above problems, such as Figures 1 to 3 As shown, embodiments of this application provide a reflector module 100 for suppressing reflector deformation when a light beam illuminates the reflector surface. Especially when the center of the light spot 20 and the physical center of the reflector surface are not aligned, the reflector module 100 of this application can maintain the reflector surface height error RMS value on the order of 1 nm and the slope error RMS value on the order of 100 nrad.

[0041] The reflector module 100 includes a mirror body 110, a heating component 120, and a cooling component 130.

[0042] In this embodiment, the mirror body 110 is rectangular, with a length, width, and height of 700 mm, 60 mm, and 60 mm, respectively. The beam is an X-ray 10, which forms a light spot 20 when it irradiates the reflective surface. The light spot 20 is located on the meridian 30 of the reflective surface, which is the center line of symmetry of the reflective surface along its length.

[0043] The mirror body 110 has an upper surface 111 and a side surface 112. The side surface 112 is connected to the upper surface 111. The light beam shines on the upper surface 111 and forms a light spot 20. The upper surface 111 is the reflecting surface of the light beam.

[0044] There are two side surfaces 112, which are respectively connected to the two sides of the upper surface 111 along the second direction D2 of the mirror body 110.

[0045] It should be noted that in this embodiment, the first direction D1 is the length direction of the mirror body 110, the second direction D2 is the width direction of the mirror body 110, and the third direction D3 is the height direction of the mirror body 110.

[0046] The groove 113 extends through the side surface 112 along the first direction D1. The groove 113 is used to suppress the thermal deformation of the mirror body 110, thereby controlling the surface shape of the reflective surface.

[0047] Each side 112 of the mirror body 110 has a groove 113. In order to better suppress the thermal deformation of the mirror body 110, two grooves 113 are symmetrically distributed on the two sides 112. The grooves 113 are used to block and optimize the internal heat flow path of the mirror body 110, so that the heat distribution of the mirror body 110 is more even.

[0048] The power, position and size of the groove 113 and the heating component 120 were optimized using finite element software, resulting in a groove 113 with a depth of 10mm and a height of 10mm.

[0049] The heating component 120 is connected to the side 112. The heating component 120 is located on the side of the groove 113 near the upper surface 111. The heating component 120 is used to perform temperature compensation on the reflective surface to reduce the temperature gradient near the light spot 20, thereby controlling the surface shape of the reflective surface.

[0050] In this embodiment, in order to better compensate for the surface shape of the reflective surface, there are two sets of heating components 120, and the two sets of heating components 120 are symmetrically arranged on the two side surfaces 112 along the first direction D1.

[0051] Specifically, the heating assembly 120 includes a heat-conducting block 121, multiple heating elements 122, and a heating controller (not shown). The first connecting layer 123 connects the heat-conducting block 121 and the side 112 respectively, the multiple heating elements 122 are connected to the surface of the heat-conducting block 121, and the heating controller is electrically connected to the multiple heating elements 122.

[0052] In this embodiment, the heat-conducting block 121 is made of monocrystalline silicon material. The heat-conducting block 121 is generally rectangular in shape, and its length along the second direction D2 is 676 mm, its length along the second direction D2 is 20 mm, and its length along the third direction D3 is 10 mm.

[0053] like Figure 3As shown, the heat-conducting block 121 has a first surface 1211 parallel to the upper surface 111, a second surface 1212 connected to the first surface 1211, and a third surface 1213 connected to the cooling assembly 130.

[0054] Multiple heating elements 122 are spaced apart along the first direction D1, which can effectively reduce the temperature gradient of the light spot 20 in the direction of the meridian 30.

[0055] Furthermore, multiple heating elements 122 are disposed close to the upper surface 111. Specifically, the heating elements 122 can be disposed on any one of the first surface 1211, the second surface 1212, and the third surface 1213. In this embodiment, the first surface 1211 is closest to the reflective surface, and the heat conduction efficiency generated by the heating elements 122 is the highest. Therefore, it is preferable to dispose of multiple heating elements 122 on the first surface 1211.

[0056] The number of heating elements 122 can be set according to actual needs and is not limited.

[0057] In this embodiment, there are 21 heating elements 122, all of which are disposed on the first surface 1211 of the heat-conducting block 121. Each heating element 122 is a rectangular ceramic sheet of 30mm*8mm, and the spacing between each heating element 122 is 2mm.

[0058] The heating controller is used to determine the heating control command for each heating element 122 according to the position of the light spot 20. The heating element 122 changes the voltage (or current) according to the heating control command to heat the mirror body 110 in order to compensate for the surface shape of the reflector.

[0059] In this embodiment, the power of each heating element 122 can be calculated using simulation software. The specific calculation process is as follows:

[0060] The light spot 20 moves along the first direction D1 on the reflective surface, and the light spot 20 moves and stops at a preset position;

[0061] Analyze the deformation of the reflecting surface at the preset position;

[0062] The power of each heating element 122 is calculated based on this deformation.

[0063] The control command for each heating element 122 is derived based on the power of each heating element 122;

[0064] The control commands are input into the heating controller, which facilitates practical application.

[0065] In this embodiment, the first surface 1211 is flush with the upper surface 111, which increases the contact area between the first connecting layer 123 and the heat-conducting block 121, thereby making the connection between the mirror body 110 and the heat-conducting block 121 more robust and reliable.

[0066] The reflector module 100 also includes a first connecting layer 123, which connects the mirror body 110 and the heating assembly 120.

[0067] In this embodiment, the first interconnect layer 123 is an indium gallium eutectic solution film, and the thickness of the first interconnect layer 123 is 50 micrometers. In other embodiments, the first interconnect layer 123 may also be a germanium wafer.

[0068] It should be noted that the thickness of the first connecting layer 123 is variable, and its size is related to the adsorption force between the side surface 112 and the surface of the heat-conducting block 121. Factors affecting the adsorption force include the surface roughness of the side surface 112, the material of the heat-conducting block 121, and the material of the side surface 112. It can be understood that when the adsorption force between the side surface 112 and the surface of the heat-conducting block 121 increases, the thickness of the first connecting layer 123 can be reduced; when the adsorption force between the side surface 112 and the surface of the heat-conducting block 121 decreases, the thickness of the first connecting layer 123 can be increased, or the material of the first connecting layer 123 can be changed, so that the first connecting layer 123 has good adsorption force with both the surface of the side surface 112 and the surface of the heat-conducting block 121.

[0069] The cooling component 130 is connected to the heating component 120. The cooling component 130 transfers the heat from the heating component 120 to reduce the temperature of the reflective surface, thereby controlling the surface shape of the reflective surface.

[0070] In this embodiment, in order to control the surface shape of the reflective surface, there are two sets of cooling components 130, and the two sets of cooling components 130 are symmetrically connected to the two heating components 120 along the first direction D1.

[0071] Specifically, such as Figure 3 As shown, the cooling assembly 130 includes a cooling pipe 131, and a second connecting layer 133 connects the cooling pipe 131 and the heat-conducting block 121 respectively. The cooling pipe 131 is connected to an external cooling system (not shown) to reduce the temperature of the mirror body 110. The external cooling system is used to provide circulating cooling water as a cold source.

[0072] The cooling pipe 131 has a through hole 132 through it. Circulating cooling water flows through the through hole 132 to reduce the heat of the cooling pipe 131. Since the cooling pipe 131 is connected to the heat-conducting block 121, the heat of the heat-conducting block 121 is transferred to the cooling pipe 131, reducing the temperature of the heat-conducting block 121. Similarly, the mirror body 110 is connected to the heat-conducting block 121, and the heat of the mirror body 110 is transferred to the heat-conducting block 121 and the cooling pipe 131 in sequence, ultimately achieving the purpose of reducing the temperature of the mirror body 110 and suppressing the deformation of the reflective surface.

[0073] In this embodiment, the cooling pipe 131 is hollow and elongated, with a length of 676 mm along the first direction D1 and a length of 10 mm along the third direction D3. The through hole 132 in the middle has a diameter of 8 mm. The through hole 132 is used for circulating cooling water from the circulating cooling system to carry away the heat of the cooling pipe 131 to cool the mirror body 110.

[0074] In some embodiments, the cooling channel is made of a thermally conductive material. Optionally, the thermally conductive material may be copper or aluminum, etc.

[0075] In other embodiments, the cooling system connected to the cooling pipe 131 provides a circulating cooling temperature range of 18°C ​​to 25°C.

[0076] Optionally, the temperature of the circulating cooling provided by the cooling system can be selected as 18.5℃, 18.9℃, 19℃, 19.4℃, 20.2℃, 20.6℃, 21℃, 21.8℃, 22.1℃, 22.5℃, 23℃, 23.5℃, 24℃, 24.2℃, 24.6℃, or 24.9℃. It should be understood that the above are merely illustrative examples and are not intended to limit the scope of protection of this application.

[0077] The reflector module 100 also includes a second connection layer 133, which connects the cooling assembly 130 and the heating assembly 120.

[0078] Specifically, the second interconnecting layer 133 is an indium gallium eutectic solution film, and the thickness of the second interconnecting layer 133 is 50 micrometers. In other embodiments, the second interconnecting layer 133 may also be a germanium sheet.

[0079] It should be noted that the thickness of the second connecting layer 133 is variable, and its size is related to the adsorption force on the surfaces of the cooling pipe 131 and the heat-conducting block 121. Factors affecting the adsorption force include the surface roughness of the cooling pipe 131 and the heat-conducting block 121, the material of the heat-conducting block 121, and the material of the cooling pipe 131. It can be understood that when the adsorption force on the surfaces of the cooling pipe 131 and the heat-conducting block 121 increases, the thickness of the second connecting layer 133 can be reduced; when the adsorption force on the surfaces of the cooling pipe 131 and the heat-conducting block 121 decreases, the thickness of the second connecting layer 133 can be increased, or the material of the second connecting layer 133 can be changed, so that the second connecting layer 133 has good adsorption force on both the surfaces of the cooling pipe 131 and the heat-conducting block 121.

[0080] like Figures 3 to 5 As shown, the cooling pipe 131 is spaced apart from the side 112, or the cooling pipe 131 is connected to the side 112.

[0081] like Figure 3 and Figure 5 As shown, when the cooling pipe 131 is spaced apart from the side surface 112, the cooling pipe 131 is connected to the third surface 1213, or the cooling pipe 131 is connected to the second surface 1212. This connection method not only cools the mirror body 110 and suppresses thermal deformation of the reflective surface, but also prevents the vibration generated by the cooling pipe 131 from being directly transmitted to the mirror body 110, reducing the impact of vibration on the mirror body 110 and maintaining the stability of the mirror body 110.

[0082] It should be noted that, as Figure 3 As shown, when the cooling pipe 131 is connected to the third surface 1213, the second connecting layer 133 is correspondingly disposed between the third surface 1213 and the cooling pipe 131. Figure 5 As shown, when the cooling pipe 131 is connected to the second surface 1212, the second connecting layer 133 is correspondingly disposed between the second surface 1212 and the cooling pipe 131.

[0083] like Figure 4 As shown, when the cooling pipe 131 is connected to the side 112, a third connecting layer 134 can also be provided between the cooling pipe 131 and the side 112. The third connecting layer 134 and the second connecting layer 133 or the first connecting layer 123 have the same material and thickness. This structure can increase the structural stability of the reflector module 100, and at the same time, improve the cooling efficiency of the mirror body 110.

[0084] like Figure 6 As shown, the working principle of the reflector module 100 is as follows:

[0085] When the reflective surface of the mirror 110 is irradiated by X-rays 10, the heat deposited on the reflective surface will cause the temperature of the mirror 110 to rise. Due to the unevenness of the temperature rise, the reflective surface will deform under heat, thereby affecting the surface shape accuracy of the reflective surface.

[0086] Especially when the center of the light spot 20 and the physical center of the reflective surface are not aligned, the deformation curve and the RMS value of the slope error in the meridional normal direction cannot meet the requirements under the ordinary cooling scheme.

[0087] The reflector module 100 of this application controls the surface shape of the reflective surface by using the groove 113 to suppress the thermal deformation of the mirror body 110, and further uses the cooling component 130 to reduce the temperature of the mirror body 110 to control the surface shape of the reflective surface, and the heating component 120 to heat the mirror body 110 to compensate for the surface shape of the reflective surface. This allows the reflector module 100 to handle high heat loads while simultaneously cooling the mirror body 110 through the cooling component 130 to control the surface shape of the reflective surface and compensating for the surface shape of the reflective surface through the heating component 120.

[0088] In summary, the groove 113 is formed on the mirror body 110 to suppress the thermal deformation of the mirror body 110 and thus control the surface shape of the reflective surface. The cooling component 130 is used to cool the mirror body 110 to control the surface shape of the reflective surface. The heating component 120 is used to heat the mirror body 110 to compensate for the surface shape of the reflective surface. Under the synergistic effect of the groove 113, the cooling component 130 and the heating component 120, the height error RMS value and the slope error RMS value of the reflective surface both meet the preset requirements when the center of the light spot 20 and the physical center of the reflective surface are not consistent.

[0089] like Figure 7 and Figure 8 As shown, the mirror module 100 of this application absorbs 16.6W of thermal power in its mirror body 110, and the RMS value of the height error of the mirror surface is 0.12nm, while the RMS value of the slope error is 4.6nrad. Both the height error and the slope error RMS values ​​are significantly reduced, which is very advantageous for beam transmission in the beamline of a fourth-generation light source.

[0090] Fourth-generation light sources (X-ray lasers) are a new generation of light sources that are being explored after third-generation synchrotron radiation sources. They are significantly superior to third-generation synchrotron radiation sources in terms of brightness, coherence, and temporal structure. Currently, the most commonly used fourth-generation light source devices are synchrotron radiation devices and free-electron laser devices.

[0091] This application also provides a synchrotron radiation device, including the mirror module 100 as described above, which has all the beneficial effects of the mirror module 100 in any of the above embodiments, and will not be described in detail here.

[0092] This application also provides a free-electron laser device, including the mirror module 100 as described above, which has all the beneficial effects of the mirror module 100 in any of the above embodiments, and will not be described in detail here.

[0093] from Figure 7 and Figure 8 The results show that after using the above-mentioned mirror module 100, the surface shape of the mirror, both the height error and the slope error, are reduced by an order of magnitude. The surface shape achieves a height error RMS in the order of 1 nm and a slope error RMS in the order of 100 nrad, which can meet the stringent surface shape requirements of synchrotron radiation sources and free electron laser devices.

[0094] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0095] Although embodiments of this application have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting this application. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of this application.

Claims

1. A reflector module, characterized in that, include: The mirror body has an upper surface and a side surface, the side surface being connected to the upper surface. The upper surface is a reflective surface for light beams. A groove is formed through the side surface, the groove being arranged along a first direction, and the groove is used to suppress thermal deformation of the mirror body. A heating component is connected to the side surface and is located on the side of the groove near the upper surface. The heating component is used to compensate the temperature of the reflective surface. A cooling component, connected to the heating component, transfers heat from the heating component to reduce the temperature of the reflective surface; The heating component is located on the side of the groove near the upper surface; The reflector module further includes a first connecting layer, which connects the mirror body and the heating component; The reflector module further includes a second connection layer, which connects the cooling component and the heating component; The heating assembly includes a heat-conducting block, multiple heating elements, and a heating controller. The first connecting layer connects the heat-conducting block and the side surface, the multiple heating elements are connected to the surface of the heat-conducting block, and the heating controller is electrically connected to the multiple heating elements.

2. The reflector module according to claim 1, characterized in that, The first connecting layer is an indium gallium eutectic solution film with a thickness of 50 micrometers; the second connecting layer is an indium gallium eutectic solution film with a thickness of 50 micrometers.

3. The reflector module according to claim 1, characterized in that, The plurality of heating elements are spaced apart along the first direction and are positioned close to the upper surface.

4. The reflector module according to claim 1, characterized in that, The cooling assembly includes cooling pipes, and the second connecting layer connects the cooling pipes and the heat-conducting block respectively. The cooling pipes are connected to an external cooling system.

5. The mirror module according to any one of claims 1 to 4, characterized in that, The number of the two sides is two, and the two sides are spaced apart on both sides of the upper surface along the second direction. The number of the heating component and the number of the cooling component are two sets. The first direction and the second direction are perpendicular. Two sets of heating components are symmetrically arranged on the two sides along the first direction, and two sets of cooling components are symmetrically arranged on the two heating components along the first direction.

6. A synchrotron radiation device, characterized in that, Includes the mirror module as described in any one of claims 1 to 5.

7. A free-electron laser device, characterized in that, Includes the mirror module as described in any one of claims 1 to 5.

Images