Automatic cleaning device and method for semiconductor chip box

Abstract

The present invention proposes an automatic cleaning device for a semiconductor chip box, comprising a machine, a cleaning tape and a pressing assembly, and also comprising a turntable, a chip box placement rack, a first clamp assembly, a purge assembly, a push rod assembly, a dust collection assembly, a table camera inspection assembly, a second clamp assembly and a chip box recovery rack; the turntable is radially provided with a plurality of placement holes, the chip box placement rack, the first clamp assembly, the purge assembly, the dust collection assembly, the table camera inspection assembly, the second clamp assembly and the chip box recovery rack are all arranged on the upper surface of the machine, and are arranged in sequence around the turntable; the push rod assembly is arranged below the turntable, and is located directly below the placement hole between the purge assembly and the dust collection assembly, and directly below the pressing assembly; the top of the push rod assembly is provided with a first vacuum adsorption hole. The automatic cleaning device of the present invention integrates tape cleaning, nitrogen purge and dust collection triple cleaning, and is equipped with a camera to detect the degree of cleaning, without manual inspection, and has a good cleaning effect.

Description

Technical Field

[0001] The invention relates to the field of semiconductor chips, and in particular to an automatic cleaning device for a semiconductor chip box. Background Art

[0002] In the production process of semiconductor chip products, a large number of chip boxes are used to store or transport the products. The chip boxes use gel film, which is expensive. During use, the film surface may be contaminated by the environment, personnel, products, etc. When the chip boxes are reused, it may cause contamination to the product, thereby affecting the product appearance and device performance.

[0003] In order to save material costs, increase the number of times materials are used, and ensure product quality, the membrane surface needs to be thoroughly cleaned before use. At present, a special cleaning tape (CN110931350A) is used to adhere the dirty particles on the membrane surface, or nitrogen purging (CN214918795U) is used for cleaning. This method has low cleaning efficiency, consumes a lot of manpower, and is prone to secondary pollution during operation. Due to differences in manual adhesion strength and angle, the cleaning effect is also difficult to ensure stability and consistency. After cleaning, the membrane surface needs to be manually inspected one by one through strong lights, microscopes, etc. to confirm whether the cleaning purpose has been achieved and whether damage and other abnormalities have occurred. There are disadvantages of low inspection efficiency and missed inspection of the membrane surface. Summary of the invention

[0004] In view of this, the present invention proposes an automatic cleaning device for a semiconductor chip box, which adopts multiple cleaning methods, has a good cleaning effect, and does not require manual inspection.

[0005] The technical solution of the present invention is implemented as follows: the present invention provides an automatic cleaning device for a semiconductor chip box, comprising a machine table, a cleaning tape and a pressing assembly, wherein the cleaning tape is located above the machine table and connected to the machine table, and the pressing assembly is located above the cleaning tape and connected to the machine table; further comprising a turntable, a chip box placement rack, a first clamp assembly, a purge assembly, a first ejector assembly, a dust suction assembly, a table camera inspection assembly, a second clamp assembly and a recycling chip box placement rack; the turntable is embedded in the surface of the machine table, and a plurality of placement holes are radially arranged on the turntable for placing the chip box; the chip box placement rack, the first clamp assembly, the purge assembly, the dust suction assembly, the table camera inspection assembly, the second clamp assembly and the recycling The chip box receiving racks are all arranged on the upper surface of the machine table and are arranged in sequence around the turntable; the first clamp assembly is used to place the chip box in the chip box receiving rack in the placement hole and open it; the second clamp assembly is used to close the chip boxes in the placement hole and place them in the chip box recycling rack; the table camera inspection assembly is used to detect the degree of cleanliness; the first push rod assembly is arranged under the turntable and is located directly below the placement hole between the purge assembly and the dust suction assembly, and directly below the press-down assembly; the first push rod assembly is provided with a first vacuum adsorption hole on the top; the first push rod assembly lifts the chip box in the placement hole, and the press-down assembly presses down the cleaning tape to make it contact with the chip box to clean the chip box.

[0006] On the basis of the above technical scheme, preferably, it also includes a mounting plate, a tape feed disk, a first fixed pulley, a second fixed pulley, a tape recovery disk and a tape paper recovery disk, wherein the mounting plate is arranged above the machine and close to the first push rod assembly; the tape feed disk, the first fixed pulley, the second fixed pulley, the tape recovery disk and the tape paper recovery disk are all arranged on the side of the mounting plate close to the turntable; the first fixed pulley, the second fixed pulley and the pressing assembly are all located on the same side of the cleaning tape, and the tape paper recovery disk is connected to the tape feed disk by a gear belt, which is used to recover the protective film on the cleaning tape.

[0007] On the basis of the above technical solution, preferably, a movable slide wheel group is further provided between the tape feed disk and the first fixed pulley, the movable slide wheel group is connected to the mounting plate, and is arranged on the same side of the cleaning tape as the first fixed pulley, for tightening the cleaning tape.

[0008] On the basis of the above technical solution, preferably, an under-table identification component is provided under the turntable, and the under-table identification component is located between the first clamp component and the purge component and directly below the placement hole, for identifying the label characters at the bottom of the chip box.

[0009] On the basis of the above technical scheme, preferably, the first clamp assembly and the second clamp assembly both include a vertical electric cylinder slide, a horizontal electric cylinder slide, a clamp cylinder and a clamp, the vertical electric cylinder slide is connected to the machine, the horizontal electric cylinder slide is slidably connected to the vertical electric cylinder slide, the clamp cylinder is connected to the horizontal electric cylinder slide, the clamp is connected to the clamp cylinder, there are two clamps, and they are arranged opposite to each other; a second vacuum adsorption hole is provided at the bottom of the clamp.

[0010] On the basis of the above technical solution, preferably, a tightening assembly is further provided on the upper surface of the machine platform, and the tightening assembly is arranged below the first clamp assembly and is used to tighten the chip box in the placement hole.

[0011] On the basis of the above technical solution, preferably, a recycling port is provided on the upper surface of the machine platform, the recycling port is located between the turntable and the recycling chip box placement rack, and a recycling box is provided below the recycling port.

[0012] On the basis of the above technical solution, preferably, a pressure rod is further provided on the upper surface of the machine platform, and the pressure rod is located below the dust suction component, and the dust suction component presses the chip box in the placement hole when working.

[0013] On the basis of the above technical solution, preferably, the dust collection assembly includes a slide cylinder and a dust collection hood, the slide cylinder is connected to the machine platform, the dust collection hood is connected to the bottom of the slide cylinder, and the dust collection hood is connected to a vacuum pump.

[0014] On the basis of the above technical solution, preferably, the bottom of the recycling chip box placement rack is rotatably connected to the machine platform, and the recycling chip box placement rack is a multi-layer structure, and two chip boxes can be placed on each layer.

[0015] The automatic cleaning device for a semiconductor chip box of the present invention has the following beneficial effects compared with the prior art:

[0016] (1) The automatic cleaning equipment for the semiconductor chip box of the present invention combines the triple cleaning of tape cleaning, nitrogen blowing and vacuuming, and is equipped with a camera to detect the degree of cleaning, without the need for manual inspection, and has good cleaning effect and fast speed.

[0017] (2) The present invention sets an under-counter recognition component to recognize the label characters on the bottom of the chip box to determine whether the chip box meets the requirement of the number of times of reuse.

[0018] (3) The cleaning tape adopts the hanging plate operation mode to realize the automation of feeding and recycling waste, which ensures the cleanliness of the working environment and the cleanliness of the cleaning tape and avoids secondary pollution.

[0019] (4) The present invention can automatically detect the degree of cleanliness by setting up a table camera inspection component, and place the chip boxes that are qualified or unqualified in the qualified area and unqualified area of ​​the recycling chip box placement rack through the second clamp component, which can effectively avoid contamination caused by human operation.

[0020] (5) The present invention adds an exhaust fan and a dust suction fan inside the equipment box, which effectively ensures the cleanliness inside the equipment and avoids secondary contamination after the pollutants are exposed to the environment.

[0021] (6) The equipment of the present invention has a simple structure and occupies a small area. The automatic loading and unloading function can release production capacity. It is easy for personnel to operate and maintain. Through human-computer interaction and program settings, the air pressure, stepping, cleaning times, etc. can be adjusted according to the product type. No manual intervention is required after replacing the compatible fixture. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0023] Figure 1 A three-dimensional diagram of an automatic cleaning device for a semiconductor chip box of the present invention;

[0024] Figure 2 A rear view of the automatic cleaning device for a semiconductor chip box of the present invention;

[0025] Figure 3 for Figure 1 A magnified view of part A;

[0026] Figure 4 for Figure 1 A magnified view of part B;

[0027] Figure 5 A top view of a turntable of the automatic cleaning device of the present invention;

[0028] Figure 6 This is a diagram of the cleaning belt transmission structure of the automatic cleaning device of the present invention;

[0029] Figure 7 A three-dimensional diagram of a first push rod assembly of the automatic cleaning device of the present invention;

[0030] Figure 8 It is a three-dimensional diagram of the dust collection component of the automatic cleaning device of the present invention.

[0031] In the figure, 1-machine table, 2-cleaning tape, 3-pressing assembly, 31-silicone pressing block, 4-turntable, 41-placing hole, 411-box body placing hole, 412-box cover placing hole, 42-under-table identification assembly, 5-chip box placement rack, 6-first clamp assembly, 7-purge assembly, 8-first push rod assembly, 81-first vacuum adsorption hole, 82-push rod cylinder, 83-push rod, 9-dust suction assembly, 91-slide cylinder, 92-dust hood, 10-table camera inspection assembly, 11-second clamp assembly, 12-recovery chip box placement rack, 13-mounting plate, 14-tape feeding reel, 15-first fixed pulley , 16-second fixed pulley, 17-tape recovery disk, 18-tape paper recovery disk, 19-movable slide rail wheel group, 61-vertical electric cylinder slide, 62-horizontal electric cylinder slide, 63-claw cylinder, 64-claw, 641-second vacuum adsorption hole, 20-tightening assembly, 21-recovery port, 22-recovery box, 23-pressure rod, 131-tape feeding motor, 132-tape taking-up motor, 181-gear belt assembly, 191-slide rail, 192-slider, 193-pulley, 43-second push rod assembly 100-mounting table, 101-housing, 102-exhaust fan, 103-dust suction fan, 44-cam divider. DETAILED DESCRIPTION

[0032] The following will be combined with the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0033] In the description of the invention, it is necessary to understand that the directions or positional relationships indicated by "top, bottom, above, below" etc. are based on the directions or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the equipment or elements referred to must have a specific direction, be constructed and operate in a specific direction. In addition, the terms "first, second" etc. are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated, and "plurality" means two or more.

[0034] In order to save manpower and improve cleaning speed and cleaning effect, the present invention provides an automatic cleaning device for semiconductor chip boxes that integrates tape cleaning, nitrogen purging, dust removal and camera detection. Figure 1-8As shown, the equipment includes a machine 1, a cleaning tape 2, a pressing assembly 3, a turntable 4, a chip box placement rack 5, a first clamp assembly 6, a purge assembly 7, a first push rod assembly 8, a dust suction assembly 9, a table camera inspection assembly 10, a second clamp assembly 11 and a recycling chip box placement rack 12.

[0035] Among them, the cleaning tape 2 is located above the machine 1 and is connected to the machine 1. The pressing component 3 is a pressing cylinder. A silicone pressing block 31 is provided at one end of the pressing component 3 close to the turntable 4. The pressing component 3 is located above the cleaning tape 2 and is connected to the machine 1.

[0036] The turntable 4 is circular, embedded in the surface of the machine 1, and rotatably connected to the machine 1 and driven to rotate by a motor; a plurality of placement holes 41 are radially arranged on the turntable 4 for placing chip boxes.

[0037] The chip box placement rack 5, the first clamp assembly 6, the purge assembly 7, the dust collection assembly 9, the table camera inspection assembly 10, the second clamp assembly 11 and the recycling chip box placement rack 12 are all arranged on the upper surface of the machine 1 and are arranged in sequence around the turntable 4.

[0038] A mounting platform 100 is provided below the machine 1, and the machine 1 and the mounting platform 100 are connected by connecting plates 102 around them. The first push rod assembly 8 is provided on the mounting platform 100 below the turntable 4, and is located directly below the placement hole 41 between the purge assembly 7 and the dust suction assembly 9, and directly below the pressing assembly 3; the first push rod assembly 8 includes a push rod cylinder 82 and a push rod 83 that can move vertically, the push rod 83 is connected to the telescopic end at the top of the push rod cylinder 82, and a first vacuum adsorption hole 81 is provided at the top of the push rod 83, and the first vacuum adsorption hole 81 is connected to a vacuum pump, so that the chip box is firmly fixed at the top of the first push rod assembly 8.

[0039] The chip box placement rack 5 is a multi-layer frame structure, with a chip box placed on each layer; the first clamp assembly 6 is used to place the chip box in the chip box placement rack 5 in the placement hole 41 and open it; the purge assembly 7 is a nitrogen purge, which blows away the particles and dirt in the chip box to complete the first cleaning; the first push rod assembly 8 passes through the placement hole 41, lifts up the chip box in the placement hole 41, and fixes the chip box on the top through the first vacuum adsorption hole 81, and the pressing assembly 3 presses down the cleaning tape 2 to make it contact with the chip box to clean the chip box. The dust suction assembly 9 is used to suck away the dirty particles remaining in the chip box; the table camera inspection assembly 10 is a visual inspection AOI camera, which is used to detect the degree of cleanliness; after the cleaning degree is qualified, the second clamp assembly 11 closes the chip box in the placement hole 41 and places it in the recycling chip box placement rack 12 to complete the cleaning work.

[0040] In a specific embodiment, it also includes a mounting plate 13, a tape feed disk 14, a first fixed pulley 15, a second fixed pulley 16, a tape recovery disk 17 and a tape paper recovery disk 18 that are matched with the cleaning tape 2. The mounting plate 13 is arranged above the machine 1 and is welded to the machine 1. The mounting plate 13 is close to the first push rod assembly 8, and the tape feed disk 14, the first fixed pulley 15, the second fixed pulley 16, the tape recovery disk 17 and the tape paper recovery disk 18 are all arranged on one side of the mounting plate 13 close to the turntable 4, and are all rotatably connected to the mounting plate 13; the first fixed pulley 15, the second fixed pulley 16 and the pressing assembly 3 are all located on the same side of the cleaning tape 2.

[0041] A tape feeding motor 131 and a tape taking-up motor 132 are provided on the side of the mounting plate 13 away from the turntable 4, which are connected to the tape feeding reel 14 and the tape recovery reel 17 respectively, and are driving devices. The tape recovery reel 18 is connected to the tape feeding reel 14 through a gear belt assembly 181, and is used to recover the protective film on the cleaning tape 2. The gear belt assembly 181 is provided on the side of the mounting plate 13 away from the turntable 4.

[0042] In order to tighten the tape, a movable slide wheel set 19 is further provided between the tape feed disk 14 and the first fixed pulley 15. The movable slide wheel set 19 is connected to the mounting plate 13 and is arranged on the same surface of the cleaning tape 2 as the first fixed pulley 15. Specifically, the tape paper recovery disk 18, the tape feed disk 14, the movable slide wheel set 19, the first fixed pulley 15, the second fixed pulley 16, and the tape recovery disk 17 are connected through the cleaning tape 2. The movable slide wheel set 19 includes a slide rail 191, a slider 192, and a pulley 193. The slide rail 191 is bolted to the mounting plate 13, the slider 192 is slidably connected to the slide rail 191, the pulley 193 is threadedly connected to the slider 192, and a locking member is provided on the slider 192 to fix the slider 192 to the slide rail 191. The locking member is a screw.

[0043] In a specific embodiment, a recycling port 21 is provided on the upper surface of the machine 1, and the recycling port 21 is located between the turntable 4 and the recycling chip box placement rack 12. A recycling box 22 is provided on the mounting table 100 below the recycling port 21 for recycling unqualified chip boxes.

[0044] As the number of times the chip box is used increases, its wear and tear is more serious and it is classified as a defective product. Therefore, it is necessary to select the chip boxes that have been used too many times. The bottom of the chip box is affixed with label characters indicating the number of times it has been used, so it can be identified by a camera. In this embodiment, an under-table identification component 42 is provided under the turntable 4. The under-table identification component 42 is located between the first fixture component 6 and the purge component 7, and is located directly below the placement hole 41. The under-table identification component 42 includes an AOI camera and an inkjet printer, which are used to identify the label characters and inkjet codes at the bottom of the chip box.

[0045] In a specific embodiment, the first clamp assembly 6 and the second clamp assembly 11 both include a vertical electric cylinder slide 61, a horizontal electric cylinder slide 62, a clamping claw cylinder 63 and a clamping claw 64. The vertical electric cylinder slide 61 is connected to the machine 1, the horizontal electric cylinder slide 62 is slidably connected to the vertical electric cylinder slide 61, the clamping claw cylinder 63 is connected to the horizontal electric cylinder slide 62, and the clamping claw 64 is connected to the clamping claw cylinder 63. There are two clamping claws 64, which are arranged opposite to each other; a second vacuum adsorption hole 641 is provided at the bottom of the clamping claw 64. The vertical electric cylinder slide 61 and the horizontal electric cylinder slide 62 can realize the vertical reciprocating movement and horizontal reciprocating movement of the clamping claw 64, and the clamping claw cylinder 63 realizes the clamping and releasing of the clamping claw 64. The clamping claw 64 of the first clamp assembly 6 is located between the chip box placement rack 5 and the turntable 4, and the clamping claw 64 of the second clamp assembly 11 is located between the recycling chip box placement rack 12 and the turntable 4. The second vacuum adsorption hole 641 can adsorb the cover of the chip box, and the clamping claw 64 can realize the actions of clamping, opening and closing the cover under the cooperation of the vertical electric cylinder slide 61, the horizontal electric cylinder slide 62 and the clamping claw cylinder 63.

[0046] In a specific embodiment, the placement hole 41 includes a box body placement hole 411 and a box cover placement hole 412 . The chip box is placed in the box body placement hole 411 , and the box cover after opening is placed in the box cover placement hole 412 .

[0047] In order to fix the chip box in the placement hole 41 when the cover is opened, a tightening assembly 20 is further provided on the upper surface of the machine 1. The tightening assembly 20 is a tightening cylinder arranged below the first clamp assembly 6 for tightening the chip box in the placement hole 41.

[0048] In order to prevent the chip box from being sucked out of the placement hole 41 when the dust suction component 9 is working, the present embodiment provides a pressure rod 23 on the upper surface of the machine 1, and the pressure rod 23 is located below the dust suction component 9 and above the turntable 4; when the dust suction component 9 is working, the pressure rod 23 can press the chip box in the placement hole 41 to prevent it from being sucked out.

[0049] In order to facilitate the collection of particles or stains sucked by the dust collection component 9, the dust collection component 9 of this embodiment includes a slide cylinder 91 and a dust cover 92, and the shape of the dust cover 92 matches the shape of the chip box. The slide cylinder 91 is connected to the machine 1, and the dust cover 92 is connected to the bottom of the slide cylinder 91. The dust cover 92 is connected to a vacuum pump. The slide cylinder 91 drives the dust cover 92 to reciprocate vertically to selectively absorb dust or particles in the chip box.

[0050] In order to facilitate the distinction between clean and unqualified chip boxes, the bottom of the recycling chip box placement rack 12 of this embodiment is rotatably connected to the machine 1. The recycling chip box placement rack 12 is a multi-layer structure, and each layer can hold two chip boxes, which are respectively used to place qualified and unqualified chip boxes.

[0051] In order to facilitate the second clamp assembly 11 to clamp the chip box, the present embodiment is provided with a second push rod assembly 43, which is located below the turntable 4 and close to the second clamp assembly 11. The second push rod assembly 43 has the same structure as the first push rod assembly 8, and the chip box is firmly fixed on the top of the second push rod assembly 43.

[0052] Specifically, a housing 101 is disposed outside the machine 1 , and an exhaust fan 102 and a dust suction fan 103 are disposed on the housing 101 .

[0053] The cleaning method of the present invention is as follows: when the chip box in the placement hole 41 on the turntable 4 runs to the right below the pressing assembly 3, the first push rod assembly 8 below the turntable 4 drives the push rod 83 to rise, passes through the turntable 4 to lift the chip box, and makes it close to one side of the cleaning tape. Since there is a vacuum inside the push rod 83, the bottom of the chip box can be effectively adsorbed; after the push rod 83 is in place, the pressing assembly 3 above the cleaning tape 2 drives the silicone pressure block 31 to press down to compact the cleaning tape 2 in the chip box to adsorb dirty particles, and then after the pressing assembly 3 rises back to its position, the first push rod assembly 8 is also retracted to drag the chip box back to the placement hole 41, and the cleaning work is completed. Then the tape feeding motor 131 and the tape taking-up motor 132 run simultaneously to drive the tape feeding disk 14 and the tape recovery disk 17 to move the cleaning tape 2 a step distance to wait for the cleaning of the next chip box, and the tape paper recovery disk 18 recovers the protective film on the cleaning tape 2.

[0054] After the equipment is turned on, the first clamp assembly 6 installed on the upper surface of the machine 1 clamps the chip box in the chip box placement rack 5 and runs it to the box body placement hole 411 on the upper surface of the turntable 4. The tightening assembly 20 holds the chip box to prevent shaking, and the second vacuum adsorption hole 641 at the bottom of the clamp 64 sucks the box cover and places it in the box cover placement hole 412.

[0055] Chip box identification method: the turntable 4 rotates at an angle through the cam divider 44, and rotates the chip box to the under-table identification component 42. The AOI camera of the under-table identification component 42 determines whether the chip box meets the number of reuse requirements by identifying the label characters. When the maximum number of times is reached, it is determined to be an unqualified product and no subsequent cleaning work is performed; the turntable 4 drives the unqualified chip box to rotate to the recycling chip box placement rack 12, and the second clamp component 11 clamps it and throws it into the recycling box 22 under the recycling port 21. If the number of reuses is met, the inkjet printer sprays the code mark, and then drives the chip box to the purge component 7 through the turntable 4.

[0056] Nitrogen purge: The purge component 7 uses nitrogen to blow away the particles and dirt in the chip box to complete the initial cleaning.

[0057] Tape cleaning: After cleaning, the turntable 4 drives the chip box to the bottom of the pressing assembly 3. The first push rod assembly 8 under the turntable 4 drives the push rod 83 to rise, passes through the turntable 4 to lift the chip box, and makes it close to the side of the cleaning tape. Since there is a vacuum in the push rod 83, it can effectively adsorb the bottom of the chip box; after the push rod 83 is in place, the pressing assembly 3 above the cleaning tape 2 drives the silicone pressure block 31 to press down to compact the cleaning tape 2 in the chip box to adsorb dirty particles. Then, after the pressing assembly 3 rises back to its position, the first push rod assembly 8 is also retracted to drag the chip box back to the placement hole 41, and the cleaning work is completed. Then, the tape feeding motor 131 and the tape taking-up motor 132 run simultaneously to drive the tape feeding reel 14 and the tape recovery reel 17 to move the cleaning tape 2 a step distance to wait for the next chip box to be cleaned, and the tape paper recovery reel 18 recovers the protective film on the cleaning tape 2.

[0058] Vacuuming: After cleaning with the cleaning tape, the turntable 4 drives the chip box to the dust collection assembly 9, and the slide cylinder 91 drives the dust cover 92 to descend and contact the chip box to suck away the remaining dirty particles in the box. During the vacuuming process, the chip box is limited by the pressure rod 23 to prevent the chip box from being sucked up by the dust cover 92. After a few seconds, the slide cylinder 91 returns to its position and the vacuuming stops.

[0059] Sorting of chip boxes: After vacuuming, the turntable 4 drives the chip box to the table camera inspection component 10. The table camera inspection component 10 installed on the machine 1 inspects the dirt, particles, fibers, etc. in the cleaned chip box, and makes judgments based on the set parameter range and key area size. When the inspection is qualified, the turntable 4 drives the chip box to the recycling chip box placement rack 12, and the second clamp assembly 11 moves to the top of the box cover, the second clamp assembly 11 moves to the top of the box cover, sucks up the box cover and moves it to the top of the chip box body to cover the box cover. Then the second push rod assembly 43 rises to lift the chip box, and then the second clamp assembly 11 clamps the chip box and places it in the qualified slot area on the recycling chip box placement rack 12, and then the second push rod assembly 43 falls back. Each layer of the recycling chip box placement rack 12 has two placement areas, one is the qualified slot area and the other is the unqualified slot area. When the system believes that the chip box does not meet the standards, the recycling chip box placement rack 12 will rotate 180°, and then the second clamp assembly 11 will place the unqualified chip box in the unqualified slot, and then rotate back to its original position.

[0060] The above-mentioned working process is continuously circulated according to the number of layers on the chip box placement rack 5. When the chip box placement rack 5 and the corresponding chip box are cleaned, the equipment stops working. In this process, since the equipment is protected by the box shell 101, the box shell 101 is provided with an exhaust fan 102 and a dust suction fan 103, which ensures the cleanliness of the air during the operation of the equipment.

[0061] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. An automatic cleaning device for a semiconductor chip box, comprising a machine platform (1), a cleaning tape (2) and a pressing assembly (3), wherein the cleaning tape (2) is located above the machine platform (1) and connected to the machine platform (1), and the pressing assembly (3) is located above the cleaning tape (2) and connected to the machine platform (1); Features: It also includes a turntable (4), a chip box placement rack (5), a first clamp assembly (6), a purge assembly (7), a first ejector assembly (8), a dust collection assembly (9), a table camera inspection assembly (10), a second clamp assembly (11) and a chip box recovery placement rack (12); The turntable (4) is embedded in the surface of the machine platform (1), and a plurality of placement holes (41) are radially provided on the turntable (4), including a box body placement hole (411) and a box cover placement hole (412), for placing a chip box; The chip box placement rack (5), the first clamp assembly (6), the purge assembly (7), the dust collection assembly (9), the table camera inspection assembly (10), the second clamp assembly (11) and the chip box recovery placement rack (12) are all arranged on the upper surface of the machine (1) and are arranged in sequence around the turntable (4); The first clamp assembly (6) is used to place the chip box in the chip box placement rack (5) in the placement hole (41) and open it; The second fixture component (11) is used to close the chip box in the placement hole (41) and place it in the recycling chip box placement rack (12); the table camera inspection component (10) is used to detect the degree of cleanliness; The first push rod assembly (8) is arranged below the turntable (4), and is located directly below the placement hole (41) between the purge assembly (7) and the dust suction assembly (9), and directly below the press-down assembly (3); a first vacuum adsorption hole (81) is provided at the top of the first push rod assembly (8); The first push rod assembly (8) lifts up the chip box in the placement hole (41), and the pressing assembly (3) presses down the cleaning tape (2) to make it contact with the chip box, so as to clean the chip box; It also includes a mounting plate (13), a tape feeding reel (14), a first fixed pulley (15), a second fixed pulley (16), a tape recovery reel (17) and a tape paper recovery reel (18), which are used to recover the protective film on the cleaning tape (2); A movable slide wheel set (19) is also provided between the tape feeding reel (14) and the first fixed pulley (15) for tightening the cleaning tape (2); An under-table recognition component (42) is provided below the turntable (4) for recognizing the label characters on the bottom of the chip box; The first clamp assembly (6) and the second clamp assembly (11) both comprise a vertical electric cylinder slide (61), a horizontal electric cylinder slide (62), a clamping claw cylinder (63) and a clamping claw (64); a second vacuum adsorption hole (641) is provided at the bottom of the clamping claw (64); Each layer of the recycling chip box placement rack (12) has two placement areas, one is a qualified slot area, and the other is an unqualified slot area. When the system determines that the chip box does not meet the standards, the recycling chip box placement rack (12) will rotate 180 degrees, and then the second clamp component (11) will place the unqualified chip box in the unqualified slot, and then rotate back to its original position.

2. An automatic cleaning device for a semiconductor chip box as claimed in claim 1, Features: The mounting plate (13) is arranged above the machine platform (1) and close to the first push rod assembly (8); the tape feed reel (14), the first fixed pulley (15), the second fixed pulley (16), the tape recovery reel (17) and the tape paper recovery reel (18) are all arranged on a side of the mounting plate (13) close to the turntable (4); the first fixed pulley (15), the second fixed pulley (16) and the pressing assembly (3) are all located on the same side of the cleaning tape (2); the tape paper recovery reel (18) is connected to the tape feed reel (14) via a gear belt.

3. An automatic cleaning device for a semiconductor chip box as claimed in claim 2, Features: The movable slide rail wheel set (19) is connected to the mounting plate (13), and is arranged on the same surface of the cleaning tape (2) as the first fixed pulley (15).

4. An automatic cleaning device for a semiconductor chip box as claimed in claim 1, Features: The under-table identification component (42) is located between the first clamp component (6) and the purge component (7), and is located directly below the placement hole (41).

5. An automatic cleaning device for a semiconductor chip box as claimed in claim 1, Features: The vertical electric cylinder slide (61) is connected to the machine platform (1), the horizontal electric cylinder slide (62) is slidably connected to the vertical electric cylinder slide (61), the clamping claw cylinder (63) is connected to the horizontal electric cylinder slide (62), and the clamping claw (64) is connected to the clamping claw cylinder (63), and there are two clamping claws (64) which are arranged opposite to each other.

6. An automatic cleaning device for a semiconductor chip box as claimed in claim 1, Features: The upper surface of the machine platform (1) is also provided with a tightening assembly (20), which is arranged below the first clamp assembly (6) and is used to tighten the chip box in the placement hole (41).

7. An automatic cleaning device for a semiconductor chip box as claimed in claim 1, Features: The upper surface of the machine (1) is provided with a recycling port (21), the recycling port (21) is located between the turntable (4) and the recycling chip box placement rack (12), and a recycling box (22) is provided below the recycling port (21).

8. An automatic cleaning device for a semiconductor chip box as claimed in claim 1, Features: The upper surface of the machine platform (1) is also provided with a pressing rod (23), the pressing rod (23) being located below the dust suction component (9), and the dust suction component (9) presses the chip box in the placement hole (41) when in operation.

9. An automatic cleaning device for a semiconductor chip box as claimed in claim 1, Features: The dust collection component (9) comprises a slide cylinder (91) and a dust collection hood (92); the slide cylinder (91) is connected to the machine platform (1); the dust collection hood (92) is connected to the bottom of the slide cylinder (91); and the dust collection hood (92) is connected to a vacuum pump.

10. An automatic cleaning device for a semiconductor chip box as claimed in claim 1, Features: The bottom of the recycling chip box placement rack (12) is rotatably connected to the machine platform (1), and the recycling chip box placement rack (12) is a multi-layer structure, and each layer can hold two chip boxes.

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