Water return device and magnetron sputtering equipment

Abstract

The application discloses a water returning device and a magnetic control sputtering equipment. The water returning device comprises a water returning pipe, a first connecting end and a second connecting end located at two ends of the water returning pipe. The water returning pipe comprises a water inlet hole and a water pipe water returning hole. The water inlet hole penetrates through the water returning pipe, the first connecting end and the second connecting end. The first connecting end comprises a first outer plate and a first inner plate. The first outer plate and the first inner plate are provided with a first water returning cavity. The edge of the first outer plate is provided with a plurality of first water returning holes. The second connecting end comprises a second outer plate and a second inner plate. The second outer plate and the second inner plate are provided with a second water returning cavity. The second outer plate is provided with a second water returning hole. When water flows back, the water flows out through the first water returning hole, the first water returning cavity, the water pipe water returning hole, the second water returning cavity and the second water returning hole in sequence. Since the height of the water in the sealed shell is improved, the water can cover the entire sealed shell, and air is avoided from being left in the sealed shell, so that the cooling effect on the sputtering cathode is improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of magnetron sputtering technology, and particularly relates to a water return device and a magnetron sputtering equipment. BACKGROUND

[0002] The magnetron sputtering is superior to other thin film deposition technologies because it can produce a large number of thin films at a very low cost, and is very suitable for high-melting-point materials that cannot be evaporated, and is a technology that can form a very dense and well-adhered thin film. The working principle of the magnetron sputtering is that electrons, under the action of an electric field E, collide with argon atoms during the flight to the substrate, causing ionization to produce Ar positive ions and new electrons; the new electrons fly to the substrate, and the Ar positive ions accelerate to the cathode target under the action of the electric field and bombard the target surface with high energy, causing the target material to sputter. The electrons flying to the substrate will cause the temperature of the substrate to rise, which will affect the quality of the film coating. Therefore, a water return device is usually provided in the magnetron sputtering equipment to cool the sputtering cathode. The sputtering cathode includes a sealed shell connected with the water return device. The existing water return device has water return holes usually distributed in the middle of the water return pipe. There is a large space between the uppermost water return hole and the sealed shell. When the uppermost water return hole is covered with water, there is a lot of air in the space between the uppermost water return hole and the sealed shell, which cannot be removed. As a result, the water cannot cover the entire sealed shell, and the cooling effect of the sputtering cathode is poor. SUMMARY

[0003] The technical problem solved by the present application is to provide a water return device that can solve the problem of poor cooling effect of the sputtering cathode due to the water not being able to cover the entire sealed shell.

[0004] To solve the above technical problems, the present application adopts one technical solution, which provides a water return device, including a water return pipe, and a first connecting end and a second connecting end located at both ends of the water return pipe. The water return pipe includes a water inlet hole and a water pipe water return hole. The water inlet hole penetrates through the water return pipe, the first connecting end and the second connecting end. The water inlet hole is used to connect a water inlet pipe. The first connecting end includes a first outer plate and a first inner plate. The first outer plate and the first inner plate have a first water return cavity therebetween. The edge of the first outer plate is provided with a plurality of first water return holes. The second connecting end includes a second outer plate and a second inner plate. The second outer plate and the second inner plate have a second water return cavity therebetween. The second outer plate is provided with a second water return hole. The second water return hole is used to connect a drain pipe. The first water return hole, the first water return cavity, the water pipe water return hole, the second water return cavity and the second water return hole are connected in series. The water flow enters in sequence through the second connecting end, the water return pipe and the first connecting end from the water inlet hole. When the water flow returns, it flows out in sequence through the first water return hole, the first water return cavity, the water pipe water return hole, the second water return cavity and the second water return hole.

[0005] Preferably, the first outer plate and the first inner plate are independent structures, the first inner plate comprises an inner plate part and an extension part, the extension part is located at the outer edge of the inner plate part and extends towards the first outer plate, and the first outer plate and the first inner plate enclose the first water return cavity.

[0006] Preferably, the first outer plate is matched with the sealing shell connected therewith, the first outer plate is clamped in the end of the sealing shell, and the first outer plate is sealingly connected with the sealing shell; and the first water return hole is adjacent to the top of the inner wall of the sealing shell.

[0007] Preferably, the middle part of the first inner plate is provided with a first intermediate hole in communication with the water inlet hole, the periphery of the first intermediate hole is provided with a plurality of petal-shaped protrusions for connecting the first outer plate, and a first side hole is arranged between adjacent petal-shaped protrusions and in communication with the water pipe water return hole.

[0008] Preferably, the water return pipe is an integral structure, the water inlet hole is provided in one, and the water inlet hole is transversely arranged in the middle part of the water return pipe; the water pipe water return hole is provided in a plurality, and the water pipe water return hole is transversely arranged in the pipe wall of the water return pipe; and the plurality of water pipe water return holes are uniformly distributed on the outer edge of the pipe wall of the water return pipe.

[0009] Preferably, the second outer plate and the second inner plate are an integral structure; the second inner plate is connected with the water return pipe, the second outer plate comprises an outer plate part and an extension part, the extension part is arranged at the edge of the outer plate part and extends towards the second inner plate; and the second outer plate and the second inner plate enclose the second water return cavity.

[0010] Preferably, the first water return hole is provided in a plurality and is uniformly distributed on the edge of the first outer plate.

[0011] Preferably, the cross-sectional shape of the first connecting end and the second connecting end is larger than the cross-sectional shape of the water return pipe.

[0012] Preferably, the water return pipe is a double-layer structure comprising a water return inner pipe and a water return outer pipe, the water inlet hole is arranged in the water return inner pipe, and the water return inner pipe and the water return outer pipe have a gap therebetween, and the gap is the water pipe water return hole.

[0013] The application also provides a magnetron sputtering device comprising the water return device.

[0014] The application has the beneficial effect that the first water return hole is arranged at the edge of the first outer plate, thereby reducing the distance between the first water return hole and the sealing shell, increasing the height of water in the sealing shell, and enabling water to fill the entire sealing shell and avoid air remaining in the sealing shell, thereby improving the cooling effect on the sputtering cathode. After the target material in the sealing shell is cooled, water flows out from the first water return hole, the first water return cavity, the water pipe water return hole, the second water return cavity and the second water return hole. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 is a structural schematic diagram of a first connecting end according to an embodiment of the present application;

[0016] Figure 2 is a structural schematic diagram of a second connecting end according to an embodiment of the present application;

[0017] Figure 3 is a front structural schematic diagram of a first connecting end according to an embodiment of the present application;

[0018] Figure 4 is a front structural schematic diagram of a second connecting end according to an embodiment of the present application;

[0019] Figure 5 is a structural schematic diagram of a first inner plate according to an embodiment of the present application;

[0020] Figure 6 is a structural schematic diagram of a return water pipe and a second connecting end according to an embodiment of the present application;

[0021] Figure 7 is a sectional structural schematic diagram in A-A direction; Figure 1

[0022] is a sectional structural schematic diagram in B-B direction; Figure 8 Figure 1 is a schematic diagram of water flow direction according to an embodiment of the present application;

[0023] Figure 9 is a sectional structural schematic diagram of a return water pipe according to another embodiment of the present application.

[0024] DETAILED DESCRIPTION Figure 10 In order to make the present application more comprehensible, the present application will be described in more detail below with reference to the drawings and specific embodiments. The preferred embodiments of the present application are shown in the drawings. However, the present application can be realized in many different forms and is not limited to the embodiments described in the specification. On the contrary, the purpose of providing these embodiments is to make the disclosure of the present application more thorough and comprehensive.

[0025] It should be noted that, unless otherwise defined, all technical and scientific terms used in the specification are the same as those commonly understood by the person skilled in the art of the present application. The terms used in the specification of the present application are only for the purpose of describing the specific embodiments and are not intended to limit the present application. The term "and / or" used in the specification includes any and all combinations of one or more related listed items.

[0026] It should be noted that, unless otherwise defined, all technical and scientific terms used in the specification are the same as those commonly understood by the person skilled in the art of the present application. The terms used in the specification of the present application are only for the purpose of describing the specific embodiments and are not intended to limit the present application. The term "and / or" used in the specification includes any and all combinations of one or more related listed items.

[0027] ​Figures 1-9 The embodiment of the water return device of the present application is shown, including a water return pipe 3, and a first connecting end 1 and a second connecting end 2 located at both ends of the water return pipe 3; the water return pipe 3 includes a water inlet hole 31 and a water pipe water return hole 32, the water inlet hole 31 penetrates through the water return pipe 3, the first connecting end 1 and the second connecting end 2; the water inlet hole 31 is used for connecting a water inlet pipe (not shown in the figure); the first connecting end 1 includes a first outer plate 11 and a first inner plate 12, and a first water return cavity 13 is formed between the first outer plate 11 and the first inner plate 12, and a plurality of first water return holes 111 are arranged on the edge of the first outer plate 11; the second connecting end 2 includes a second outer plate 21 and a second inner plate 22, and a second water return cavity 23 is formed between the second outer plate 21 and the second inner plate 22, and a second water return hole 211 is arranged on the second outer plate 21; the second water return hole 211 is used for connecting a drain pipe (not shown in the figure); the first water return hole 111, the first water return cavity 13, the water pipe water return hole 32, the second water return cavity 23 and the second water return hole 211 are penetrated; the water flow enters in turn through the second connecting end 2, the water return pipe 3 and the first connecting end 1 from the water inlet hole 31, and the water flow flows out in turn through the first water return hole 111, the first water return cavity 13, the water pipe water return hole 32, the second water return cavity 23 and the second water return hole 211.

[0028] In the present application, the first water return hole 111 is arranged at the edge of the first outer plate 11, thereby the distance between the first water return hole 111 and the sealing shell 10 can be reduced, the height of water in the sealing shell 10 is increased, the water enters into the sealing shell 10 from the water inlet hole 31, and because the height of water in the sealing shell 10 is increased, the water can fill the entire sealing shell 10, avoiding air remaining in the sealing shell 10, thereby the cooling effect on the sputtering cathode is improved. After the target material and the like in the sealing shell 10 are cooled, the water flows out from the first water return hole 111, the first water return cavity 13, the water pipe water return hole 32, the second water return cavity 23 and the second water return hole 211.

[0029] The water return pipe 3, the first connecting end 1 and the second connecting end 2 can be an integrated structure, or can be independent structures. Preferably, as shown in Figure 6 the water return pipe 3 and the second connecting end 2 are an integrated structure, thereby the connection and installation of the water return device and the sealing shell 10 can be facilitated. Also, different first connecting ends 1 can be replaced as needed to adapt to different sealing shells 10.

[0030] Preferably, as shown in Figures 1-4As shown, the return pipe 3, the first connecting end 1, and the second connecting end 2 are all cylindrical in shape. The diameter of the return pipe 3 can be the same as or different from the diameters of the first connecting end 1 and / or the second connecting end 2. Preferably, the cross-sectional shapes of the first connecting end 1 and the second connecting end 2 are both larger than the cross-sectional shape of the return pipe 3. That is, the diameter of the return pipe 3 is smaller than the diameters of the first connecting end 1 and the second connecting end 2. This reduces the space occupied by the return pipe 3, saves material, and reduces the weight of the return device.

[0031] The first outer plate 11 and the first inner plate 12 in the first connecting end 1 can be an integral structure or independent structures. Preferably, Figure 1 and Figure 5 As shown, the first outer plate 11 and the first inner plate 12 are independent structures. The first inner plate 12 includes an inner plate portion 124 and an extension portion 125. The inner plate portion 124 is plate-shaped, and the extension portion 125 is located at the outer edge of the inner plate portion 124 and extends toward the direction of the first outer plate 11. The first return water chamber 13 is formed between the first outer plate 11 and the first inner plate 12.

[0032] Preferably, Figure 1 and Figure 9 As shown, the first outer plate 11 is adapted to the sealed housing 10 and is clamped into the end of the sealed housing 10, forming a sealed connection therebetween. The first water return hole 111 is located adjacent to the top of the inner wall of the sealed housing 10. The first outer plate 11 is circular in shape, with the edge of the first outer plate 11 contacting the inner wall of the sealed housing 10. The connection can be sealed with sealant or sealing strips to prevent water leakage.

[0033] At least one first water return hole 111 is provided on the first outer plate 11, with at least one first water return hole 111 located on the upper edge of the first outer plate 11, adjacent to the top of the sealed housing 10. This allows the water in the sealed housing 10 to reach the top of the sealed housing 10, filling the entire sealed housing 10. Preferably, multiple first water return holes 111 are provided, evenly distributed along the edge of the first outer plate 11. This facilitates the rapid outflow of water, improves the efficiency of water circulation, and further enhances the cooling effect on the sputtering cathode.

[0034] Preferably, the middle part of the first inner plate 12 and the first outer plate 11 are provided with a first intermediate hole 121 corresponding to the water inlet hole 31, and the periphery of the first intermediate hole 121 is surrounded by a plurality of petal-shaped protrusions 123, which are used to connect the first outer plate 11, and a first side hole 122 is provided between adjacent petal-shaped protrusions 123, and the first side hole 122 corresponds to the water pipe return hole 32. The petal-shaped protrusions 123 can facilitate the connection of the first outer plate 11 and the first inner plate 12, and different first outer plates 11 can be replaced as needed to meet the needs of different cooling scenarios. Water enters the first return water cavity 13 from the first return water hole 111, and enters the water pipe return hole 32 from the first side hole 122.

[0035] In an embodiment, the return water pipe 3 is a one-piece structure, and the water pipe return hole 32 and the water inlet hole 31 are transversely arranged in the return water pipe 3, and at least one of the water pipe return hole 32 and the water inlet hole 31 is provided. Thereby, the stability of the structure of the return water pipe 3 can be improved. Preferably, the water inlet hole 31 is provided with one, which is transversely arranged in the middle of the water pipe. The water pipe return hole 32 is provided with a plurality of water pipe return holes 32, which are transversely arranged in the pipe wall of the return water pipe 3; the plurality of water pipe return holes 32 are uniformly distributed on the outer edge of the pipe wall of the return water pipe 3. That is, the plurality of water pipe return holes 32 are arranged around the water inlet hole 31. The size of the water pipe return hole 32 can be adjusted as needed to adjust the flow rate when the water pipe return hole 32 returns water.

[0036] In another embodiment, as shown in Figure 10 the return water pipe is a double-layer structure, including a return water inner pipe 310 and a return water outer pipe 320, and the water inlet hole 340 is arranged in the return water inner pipe 310, and the return water inner pipe 310 and the return water outer pipe 320 have a gap therebetween, which is the water pipe return hole 330. The return water inner pipe 310 and the return water outer pipe 320 can be connected by the first connecting end and the second connecting end. This structure can facilitate material selection; it is also convenient to select return water inner pipes 310 and return water outer pipes 320 of different diameters according to different needs, so as to adjust the size of the gap between the return water inner pipe 310 and the return water outer pipe 320, i.e. the size of the water pipe return hole 330, thereby adjusting the flow rate when returning water as needed.

[0037] The purpose of adjusting the flow rate when returning water is to make the water have a more appropriate contact time with the sputtering cathode. If the contact time is too long, the cooling effect will not be good, and if the contact time is too short, the water resources will not be fully utilized, which will cause waste of resources. Therefore, in application, the flow rate when returning water can be adjusted as needed.

[0038] The second outer plate 21 and the second inner plate 22 can be an integral structure or independent structures, preferably, the second outer plate 21 and the second inner plate 22 are an integral structure. The second inner plate 22 is connected to the water return pipe 3, the second outer plate 21 comprises an outer plate portion 212 and an inner extension portion 213, the inner extension portion 213 is arranged at the edge of the outer plate portion 212 and extends to the direction of the second inner plate 22. The second outer plate 21 and the second inner plate 22 enclose to form a second water return cavity 23. The middle part of the second outer plate 21 and the second outer plate 21 is provided with a second intermediate hole 221, the second intermediate hole 221 is in communication with the water inlet hole 31, the middle part of the second inner plate 22 is provided with a second side hole in communication with the water pipe water return hole 32, the water returned from the water pipe water return hole 32 enters the second water return cavity 23 from the second side hole (not shown in the figure) and then flows out from the second water return hole 211.

[0039] On the second connecting end 2, the second water return hole 211 is provided with at least one, preferably, the second water return hole 211 is provided with one. In this way, the returned water can be gathered at the second water return hole 211, and the second water return hole 211 is connected to a drain pipe, so that the water can be conveniently discharged. Avoiding the need to connect multiple drain pipes due to the setting of multiple second water return holes 211.

[0040] Based on the same inventive concept, the application also provides a magnetron sputtering device comprising the above-mentioned water return device.

[0041] Therefore, the application discloses a water return device, which has the advantages that Figure 9 as shown in the figure, Figure 9 wherein the black dashed line J is the water inlet direction, and the black solid line H is the water return direction. The water inlet hole is connected to a water inlet pipe, and the water inlet sequentially passes through the second connecting end, the water return pipe and the first connecting end, enters the sealed shell, cools the sputtering cathode, and when the water returns, sequentially enters the first water return hole, the first water return cavity, the water pipe water return hole, the second water return cavity and the second water return hole from the sealed shell, and finally flows out from the drain pipe connected to the second water return hole. In this way, the air in the sealed shell can be completely discharged, and the sputtering cathode can be efficiently cooled.

[0042] The above is only an embodiment of the application, and does not limit the patent scope of the application, any equivalent structural transformation made by using the content of the specification and drawings, or direct or indirect application in other related technical fields, is also included in the patent protection scope of the application.

Claims

1. A water return device, characterized in that: It includes a return pipe, and a first connecting end and a second connecting end located at both ends of the return pipe; The return pipe includes a water inlet hole and a water pipe return hole, the water inlet hole passes through the return pipe, the first connecting end and the second connecting end; the water inlet hole is used to connect to the water inlet pipe; The first connecting end includes a first outer plate and a first inner plate, a first water return cavity is defined between the first outer plate and the first inner plate, and a plurality of first water return holes are provided on an edge of the first outer plate; the first outer plate is adapted to fit into the sealed housing to which it is connected, the first outer plate is clamped within the end portion of the sealed housing, and the first outer plate is sealedly connected to the sealed housing; at least one of the first water return holes is adjacent to the top of the inner wall of the sealed housing, enabling the height of water in the sealed housing to reach the top of the sealed housing, so that the water fills the entire sealed housing; The second connecting end includes a second outer plate and a second inner plate, a second water return cavity is defined between the second outer plate and the second inner plate, and a second water return hole is provided on the second outer plate; the second water return hole is used to connect to a drain pipe; The first return water hole, the first return water chamber, the water pipe return water hole, the second return water chamber and the second return water hole are connected; water flows in from the water inlet hole through the second connecting end, the return water pipe and the first connecting end in sequence, and when the water flows back, it flows out through the first return water hole, the first return water chamber, the water pipe return water hole, the second return water chamber and the second return water hole in sequence.

2. The water return device according to claim 1, characterized in that: The first outer plate and the first inner plate are both independent structures. The first inner plate includes an inner plate portion and an outer extension portion. The outer extension portion is located at the outer edge of the inner plate portion and extends toward the first outer plate. The first outer plate and the first inner plate enclose the first water return chamber.

3. The water return device according to claim 2, characterized in that: A first middle hole corresponding to the water inlet hole is provided in the middle of the first inner plate, and a plurality of petal-shaped protrusions are provided around the periphery of the first middle hole. The petal-shaped protrusions are used to connect to the first outer plate. A first side hole is provided between adjacent petal-shaped protrusions, and the first side hole is correspondingly connected to the water return hole of the water pipe.

4. The water return device according to claim 1, characterized in that: The return water pipe is an integrated structure, and is provided with one water inlet hole, which is horizontally arranged in the middle of the return water pipe; multiple water pipe return water holes are provided, and the water pipe return water holes are horizontally arranged in the pipe wall of the return water pipe; the multiple water pipe return water holes are evenly distributed on the outer edge of the pipe wall of the return water pipe.

5. The water return device according to claim 1, characterized in that: The second outer plate and the second inner plate are an integral structure; the second inner plate is connected to the return water pipe, the second outer plate includes an outer plate portion and an inner extension portion, the inner extension portion is arranged at the edge of the outer plate portion and extends toward the second inner plate; the second outer plate and the second inner plate enclose to form the second return water chamber.

6. The water return device according to claim 1, characterized in that: There are multiple first water return holes, which are evenly distributed on the edge of the first outer plate.

7. The water return device according to claim 1, characterized in that: The cross-sectional shapes of the first connecting end and the second connecting end are both larger than the cross-sectional shape of the return pipe.

8. The water return device according to claim 1, characterized in that: The return pipe is a double-layer structure, including an inner return pipe and an outer return pipe. The water inlet is provided in the inner return pipe. There is a gap between the inner return pipe and the outer return pipe, and the gap is the water pipe return hole.

9. A magnetron sputtering device, characterized in that: The invention comprises the water return device according to any one of claims 1 to 8.

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