A highly reliable shutdown control device for a grinding machine

Abstract

The present invention discloses a high-reliability grinding machine shutdown control device, which includes a frequency measurement system grinding machine control circuit module, a connection port, two serially connected grinding machine shutdown controllers, and a grinding machine; the frequency measurement system control circuit module is connected to the two serially connected grinding machine shutdown controllers through the connection port, and the grinding machine is electrically connected to the two serially connected grinding machine shutdown controllers; the grinding machine shutdown controller is a solid-state relay or an optocoupler; the frequency measurement system control circuit module includes a grinding machine control output self-check module, a grinding machine control self-check module, and a shutdown grinding machine control module; the present invention provides a control device for shutting down a grinding machine applicable to an on-line frequency measurement system for quartz wafer grinding, which has high reliability, a simple and reasonable structure, is easy to manufacture, and is based on dual-channel control and has a self-check function.

Description

Technical Field

[0001] The present invention relates to the field of control devices, and more specifically, to a highly reliable shutdown control device for a grinding machine. Background Art

[0002] The frequency grinding of quartz wafers is an important process in the production process of quartz crystal oscillators. The wafers are thinned by cutting with a grinding machine. At present, commercially available online frequency measurement systems on the market (such as the ALC online frequency monitor of TRANSAT Company in the United States) monitor the thickness of the wafers in real time by dynamically measuring the resonance frequency of the wafers. When the thickness of the wafers reaches a preset value, the online frequency measurement system sends a shutdown signal to stop the grinding machine.

[0003] At present, in factories, the online frequency measurement system controls the shutdown of the grinding machine through an optocoupler or a solid-state relay. When a failure occurs in the optocoupler or the solid-state relay during the grinding of quartz wafers, the current frequency measurement system cannot detect the failure of the device, which is very likely to cause over-frequency accidents for the entire batch of wafers. At the same time, when the shutdown control line of the grinding machine is not connected or is in poor contact, the current frequency measurement system also cannot detect the problem of the control line not being connected or in poor contact, which is also very likely to cause over-frequency accidents for the entire batch of wafers.

[0004] For other grinding machine measurement and control systems involving thickness cutting such as magnetic steel sheets, ceramic sheets, and sapphire, there are also the same potential risks. With the continuous improvement of the requirements for production efficiency, qualification rate, and automation level in the current precision machining field, there is an urgent need for a highly reliable shutdown control device for a grinding machine. Summary of the Invention

[0005] The present invention overcomes the deficiencies of the prior art and provides a control device and method for shutting down a grinding machine applicable to an online frequency measurement system for grinding quartz wafers, which has high reliability, a simple and reasonable structure, is easy to manufacture, is based on dual-channel control, and has a self-checking function.

[0006] In order to solve the above technical problems, the technical solution of the present invention is as follows:

[0007] A highly reliable grinding machine shutdown control device includes a frequency measurement system grinding machine control circuit module, a connection port, two series-connected grinding machine shutdown controllers, and a grinding machine; the frequency measurement system control circuit module is connected to the two series-connected grinding machine shutdown controllers through the connection port, and the grinding machine is electrically connected to the two series-connected grinding machine shutdown controllers; the grinding machine shutdown controller is a solid-state relay or an optocoupler; the frequency measurement system control circuit module includes a grinding machine control output self-check module, a grinding machine control self-check module, and a shutdown grinding machine control module; the shutdown grinding machine control module and the grinding machine control self-check module perform control communication through a triode. The control communication is that after the shutdown grinding machine control module is turned on and works, it outputs a low level at the IO port, making the optocoupler controlled by the IO port conduct, generating a low-voltage value at the B pole of the triode, thereby turning on the triode, and making the input level of the IO port of the grinding machine control self-check module change from high level to low level, so as to judge the condition of the control circuit; a series-connected identification lamp and a first current-limiting resistor are arranged between the grinding machine control output self-check module and the grinding machine control self-check module. The identification lamp is an LED lamp in parallel and an external indicator lamp, used to display the condition of the circuit.

[0008] Further, the connection port adopts DB9, that is, serial port pins.

[0009] Further, one series-connected grinding machine shutdown controller is connected to pins 1 and 9 of the connection port as an output port; the other series-connected grinding machine shutdown controller is connected to pins 2 and 8 of the connection port as an output port.

[0010] Further, the grinding machine control output self-check module and the shutdown grinding machine control module are provided with pull-down resistors to clamp the uncertain signal at a low level and maintain the balance between driving ability and power consumption.

[0011] Further, the pull-down resistor adopts 10K ohms.

[0012] Further, the output current of the self-check control device is controlled at 10 to 12 mA.

[0013] A method for a highly reliable grinding machine shutdown control device includes a power-on self-check detection step, a grinding work step, a detection step of the grinding machine control loop function, and an on-line frequency measurement step;

[0014] The specific steps of the power-on self-check detection step are as follows:

[0015] 101) The grinding machine control self-check output port 1 outputs a low level, the relay in the self-check output circuit module 1 conducts, the grinding machine control self-check output port 2 outputs a low level, and the relay in the self-check output circuit module 2 conducts;

[0016] 102) The grinding machine stop control port 1 outputs a high level, the optocoupler of the grinding machine stop control circuit module 1 is not conducting, the grinding machine stop control port 2 outputs a high level, and the optocoupler of the grinding machine stop control circuit module 2 is not conducting;

[0017] 103) Delay for 100 ms and wait for the signal to stabilize;

[0018] 104) Read the level of the grinding machine control self-check input port 1 and record it as Flag11, read the level of the grinding machine control self-check input port 2 and record it as Flag12;

[0019] 105) Delay for 100 ms to eliminate signal interference;

[0020] 106) Read the level of the grinding machine control self-check input port 1 again and record it as Flag21, read the level of the grinding machine control self-check input port 2 again and record it as Flag22;

[0021] 107) Judge whether Flag11 is equal to Flag21 and whether the value is true; judge whether Flag12 is equal to Flag22 and whether the value is true;

[0022] 108) If the conditions described in step 107) are all true, the grinding machine control port 1 outputs a low level, and the grinding machine control port 2 outputs a low level. Judge whether Flag11 is not equal to Flag21, if not, the self-check fails and the touch screen grinding machine control circuit module 1 is damaged. Judge whether Flag12 is not equal to Flag22, if not, the self-check fails and the touch screen prompts that the grinding machine control circuit module 2 is damaged.

[0023] 109) On the premise that the conditions described in step 107) are all true, delay for 100 ms and wait for the signal to stabilize;

[0024] 110) After step 109), read the level of the grinding machine control self-check input port 1 and record it as Flag31; read the level of the grinding machine control self-check input port 1 and record it as Flag32;

[0025] 111) After step 110), delay for 100 ms to eliminate signal interference;

[0026] 112) Read the level of the grinding machine control self-check input port 1 again and record it as Flag41; read the level of the grinding machine control self-check input port 2 again and record it as Flag42;

[0027] 113) Judge whether Flag31 is equal to Flag41 and whether the value is true; judge whether Flag32 is equal to Flag42 and whether the value is true;

[0028] 114) If the conditions described in step 113) are met, the self-check is successful and the frequency measuring instrument grinding machine control module can work normally; otherwise, the self-check fails. Determine whether Flag31 is not equal to Flag41 is not true, then the touch screen prompts that the grinding machine control module 1 is damaged; if only Flag32 is not equal to Flag42 is not true, then the touch screen prompts that the grinding machine control module 2 is damaged;

[0029] When the "Grinding" button on the main interface of the frequency measuring instrument is pressed, the detection steps for the function of the grinding machine control circuit before starting grinding and when the quartz wafer grinding reaches the target frequency and stops are the same. The specific steps are as follows:

[0030] 201) The grinding machine stop control port 1 outputs a high level, and the optocoupler of the grinding machine stop control module 1 is not turned on; the grinding machine stop control port 2 outputs a high level, and the optocoupler of the grinding machine stop control module 2 is not turned on;

[0031] 202) Delay for 100 ms to wait for the signal to stabilize;

[0032] 203) Read the level of the grinding machine control self-check input port 1 and record it as Flag11; read the level of the grinding machine control self-check input port 2 and record it as Flag12;

[0033] 204) Delay for 100 ms to eliminate signal interference;

[0034] 205) Read the level of the grinding machine control self-check input port 1 again and record it as Flag21; read the level of the grinding machine control self-check input port 2 again and record it as Flag22;

[0035] 206) Determine whether Flag11 is equal to Flag21 and whether the value is true; determine whether Flag12 is equal to Flag22 and whether the value is true;

[0036] 207) If all the conditions described in step 206) are met and are true, the grinding machine control port 1 outputs a low level; the grinding machine control port 2 outputs a low level; if it is determined that Flag11 is not equal to Flag21 and is not true, the grinding machine control circuit 1 is abnormal and the touch screen prompts an abnormality; if only Flag12 is not equal to Flag22 and is not true, the grinding machine control circuit 2 is abnormal and the touch screen prompts an abnormality;

[0037] 208) If all the conditions described in step 206) are met and are true, delay for 100 ms to wait for the signal to stabilize;

[0038] 209) After step 208), read the level of the grinding machine control self-check input port 1 and record it as Flag31; read the level of the grinding machine control self-check input port 2 and record it as Flag32;

[0039] 210) After step 209), delay for 100 ms for signal interference cancellation;

[0040] 211) After step 210), read the level of the input port 1 of the grinder control self-check again, denoted as Flag41, and read the level of the input port 2 of the grinder control self-check again, denoted as Flag42;

[0041] 212) Judge whether Flag31 is equal to Flag41 and the value is true; judge whether Flag32 is equal to Flag42 and the value is true;

[0042] 213) If all the conditions described in step 212) are satisfied and are true, the grinder control loop is normal; if it is judged that Flag31 is not equal to Flag41 and is not true, the grinder control loop 1 is abnormal and the touch screen prompts an abnormality; if only Flag32 is not equal to Flag42 and is not true, the grinder control loop 2 is abnormal and the touch screen prompts an abnormality;

[0043] Steps for on-line frequency measurement are as follows:

[0044] 301) Judge whether the control line of the grinder has been detected during the grinding process;

[0045] 302) If the condition described in step 301) is satisfied, the control line detection will not be carried out during this on-line frequency measurement process; if the condition described in step 301) is not satisfied, set the detection flag position of the grinder control line during the grinding process to 1 and perform the operation of step 303);

[0046] 303) Judge whether the current quartz wafer frequency exceeds 60% of the grinding frequency and has not reached the target frequency;

[0047] 304) If the condition of step 303) is satisfied, read the level of the input port 1 of the grinder control self-check, which is Flag1, and read the level of the input port 2 of the grinder control self-check, which is Flag2; if the condition described in step 303) is not satisfied, the control line detection will not be carried out during this on-line frequency measurement process;

[0048] 305) If Flag1 is 1, set the system operation status to abnormal for the grinder control loop 1; if Flag2 is 1, set the system operation status to abnormal for the grinder control loop 2. The buzzer of the frequency meter alarms, the touch screen prompts an abnormality, and at the same time, the grinder control port sends out a stop pulse signal; if both Flag1 and Flag2 are 0, end the detection process and the grinder control loop is normal.

[0049] The advantages of the present invention compared with the prior art are as follows: During the grinding process of the device of the present invention, as long as any one of the following situations occurs, the grinding machine will stop grinding and shut down automatically: the components of the grinding machine control module inside the frequency meter are damaged, the control connection of the grinding machine is not connected, the external grinding machine control module is damaged, or the interface module is damaged or the controlled module falls off during the grinding process.

[0050] The present invention controls two series-connected optocouplers and two series-connected solid-state relays, thereby reducing the probability of inability to stop the machine to an extremely low level. That is, on the machine controlled by the optocoupler, two series-connected optocouplers are respectively controlled, and on the machine controlled by the solid-state relay, two series-connected solid-state relays are respectively controlled.

[0051] The present invention can effectively prevent overclocking problems caused by damage to the internal module of the frequency meter, external wiring, and damage to external control components during the grinding process through system power-on self-check, grinding machine control loop detection when starting grinding, grinding machine control loop detection during the grinding process, and grinding machine control loop detection when grinding reaches the target frequency. It can effectively prevent overclocking accidents caused by damage to the internal module of the on-line frequency measurement system, faults in the grinding machine control system, or external wiring, etc. during the grinding process. Brief Description of the Drawings

[0052] Figure 1 It is a schematic structural diagram of the series-connected solid-state relay of the control device of the present invention;

[0053] Figure 2 It is a schematic structural diagram of the series-connected optocoupler of the control device of the present invention;

[0054] Figure 3 It is a schematic internal structure diagram of the solid-state relay of the control device of the present invention;

[0055] Figure 4 It is a schematic internal structure diagram of the series-connected optocoupler of the control device of the present invention;

[0056] Figure 5 It is a schematic structural diagram of the control circuit of the control device of the present invention;

[0057] Figure 6 It is a schematic diagram of the old version circuit structure of the control device of the present invention;

[0058] Figure 7 It is a flowchart of the power-on self-check of the grinding machine control module of the control device of the present invention;

[0059] Figure 8 It is a flowchart of the self-check of the grinding machine control loop of the control device of the present invention;

[0060] Figure 9This is the detection flow chart of the grinding machine control loop during the online frequency measurement of the control device of the present invention. Detailed implementation manners

[0061] The present invention will be further described below in conjunction with the accompanying drawings and specific implementation manners.

[0062] As Figures 1 to 4 shown, a highly reliable grinding machine shutdown control device includes a frequency measurement system grinding machine control circuit module, a connection port, two series-connected grinding machine shutdown controllers, and a grinding machine. The frequency measurement system grinding machine control circuit module is connected to the two series-connected grinding machine shutdown controllers through the connection port. This enables dual protection when a photoelectric coupler or solid-state relay fails during the grinding of quartz wafers, reducing the possibility of overclocking accidents for the entire wafer batch; at the same time, when the grinding machine shutdown control line is not connected or has poor contact, it can also be detected in a timely manner, effectively avoiding the occurrence of overclocking accidents for the entire wafer batch. The connection port uses a DB9 interface. One of the series-connected grinding machine shutdown controllers is connected to pins 1 and 9 of the connection port as an output port; the other series-connected grinding machine shutdown controller is connected to pins 2 and 8 of the connection port as an output port. The grinding machine is electrically connected to the two series-connected grinding machine shutdown controllers. The grinding machine shutdown controller is a solid-state relay or a photoelectric coupler. The frequency measurement system grinding machine control circuit module includes a grinding machine control output self-checking module, a grinding machine control self-checking module, and a shutdown grinding machine control module; the shutdown grinding machine control module and the grinding machine control self-checking module conduct control communication through a triode. The control communication is that after the stop control module is turned on, a low level is output at the IO port, causing the optocoupler controlled by the IO port to conduct, generating a low voltage value at the B pole of the triode, thereby turning on the triode and causing the input level of the IO port of the grinding machine control self-checking module to change from high level to low level, so as to judge the status of the control circuit. A series-connected identification lamp and a first current-limiting resistor are provided between the grinding machine control output self-checking module and the grinding machine control self-checking module. The first current-limiting resistor uses 600 to 720 ohms. The grinding machine control output self-checking module and the shutdown grinding machine control module are provided with pull-down resistors to clamp the uncertain signal at a low level and maintain the balance between driving ability and power consumption. The pull-down resistor uses 10K ohms. The identification lamp is a parallel-connected LED lamp and an external indicator lamp to display the status of the circuit. The output current of the entire self-checking device is controlled within 10 to 12 mA.

[0063] Specific embodiment of the self-check of the grinding machine control circuit module during the startup of the frequency measurement system, as Figure 5As shown in the figure, the IO port of the MCU (Microcontroller Unit) of the grinding machine control output self-check module is connected to the left side of R24. UOUT2 is the external drive port DB9. Pin 1 of UOUT2 is the action output +1, and pin 9 is the action output -1. P6 and LED D10 are in parallel and are external indicator lights used to display the status of the frequency measurement system self-check and whether the internal circuit is working properly. The output of U8 is connected to the IO port of the MCU port of the grinding machine control self-check module through the pull-up resistor R28, and the left side of R37 is connected to the IO port of the MCU that shuts down the grinding machine control module. The entire control circuit mainly controls three loads, namely UOUT2, D10 (in parallel with P6), and U8, by controlling the on and off of the Q9 triode to start the hardware self-check function.

[0064] When the entire instrument is powered on, the MCUs of each module start working, and the self-check starts. The IO port of the MCU of the grinding machine control output self-check module outputs a low level. The left side of the optocoupler U6 conducts, and then the right side of the optocoupler conducts. 12.4V is connected to the base of the Q6 triode through R22. At this time, the Q6 triode conducts, and the coil of the relay JDQ3 is energized, and then the normally open contact of the relay is closed, connecting 12.4V to the node of the action output -1.

[0065] Then the IO port of the MCU that shuts down the grinding machine control module outputs a low level. The left side of the optocoupler U10 conducts, and then the right side of the optocoupler also conducts. 12.4V is connected to the base of the Q9 triode through R35. The Q9 triode conducts, and then the three loads are to be conducted. The left side of the optocoupler U8 conducts first, and then the right side of the optocoupler conducts. The 3.3V on the right side of the optocoupler is connected to the ground through the R28 resistor. At this time, the input level of the IO port of the MCU port of the grinding machine control self-check module changes from the high level when the optocoupler U2 is not conducting to the low level. Such a state judges that the control circuit is normal. Otherwise, an alarm is issued, indicating that there is a problem with the circuit itself. The IO port of the MCU of the grinding machine control output self-check module returns to the high level, and the IO port of the MCU that shuts down the grinding machine control module returns to the high level.

[0066] The functions of the right part and the left part of the circuit are the same. In this embodiment, pins 1 and 9 of DB9 are used as one output port, and pins 2 and 8 are used as another output port to separately control two series-connected rear-end loads, thus reducing the probability of inability to stop to an extremely low level. Among them, R26 and R39 are 10K pull-down resistors, R31 is a 680 current-limiting resistor, and R20 is a 10 current-limiting resistor. The output current of the circuit is 11.2mA.

[0067] Example of self - checking for the control circuit of the frequency - measuring system's grinding machine. Normally start the instrument, arrange the wafers, lower the upper grinding plate, and prepare for grinding. Shut down the MCU of the grinding machine control module, and the IO port outputs a low level. The left side of the optocoupler U10 conducts, and then the right side of the optocoupler conducts. 12.4V is connected to the base of the Q9 triode through R35, turning on the Q9 triode.

[0068] If the DB9 port is properly connected to the DB9 of the external grinding machine and the chips inside the grinding machine are working properly, after Q9 conducts, all the loads controlled by Q9 will be powered on and conduct. That is, the left side of the optocoupler of U8 conducts, so the right side of the optocoupler of U8 also conducts. The input level of the IO port of the MCU port of the grinding machine control self - checking module changes from the high level when the optocoupler of U8 was not conducting to the low level. In this way, with normal connection and normal components, grinding can start.

[0069] If DB9 is not connected, during the above process, the input level of the IO port of the MCU port of the grinding machine control self - checking module will not change from high level to low level, and the touch screen will prompt "Abnormal connection of the control port".

[0070] If DB9 is connected, but during the above process, the input level of the IO port of the MCU port of the grinding machine control self - checking module does not change from high level to low level, it is possible that the chips inside the grinding machine are damaged or the internal control circuit of the grinding machine is damaged, and the grinding machine will not be started.

[0071] When the machine starts normal grinding, a hardware self - check will be started during the grinding process, mainly to detect whether the control circuit of the grinding machine is normal. The specific implementation is to read the level of the grinding machine control self - checking input port 1 and the level of the grinding machine control self - checking input port 2. If both level values are 0, the circuit is normal. If any one of the read level values is 1, it means that one of the circuits is broken, and grinding will be stopped, and a warning will be prompted on the touch screen.

[0072] When there is no problem during the grinding process, but the shutdown controller (solid - state relay or optocoupler) of the grinding machine is damaged during the grinding process, and the pin connecting the shutdown controller of the grinding machine and the grinding machine is short - circuited due to breakdown. At this time, if there is only one solid - state relay or one optocoupler on the grinding machine table, this grinding machine is not controlled by the monitoring instrument for shutdown, and will always be in the normal grinding state. Even if the instrument alarms exceeding the grinding frequency, when the operator presses the "Emergency Pause" button of the grinding machine when they notice, the wafers will surely have been over - clocked.

[0073] Another situation is that the pins connecting the shutdown controller of the grinding machine and the monitoring instrument are broken down, and the switch control of the grinding machine is not controlled by the instrument, making it difficult to effectively protect the machine.

[0074] However, in this embodiment, two grinder shutdown controllers are used. In the case where the pin connecting one of the grinder shutdown controllers to the grinder is short-circuited due to breakdown, one path is out of control. However, the other path is connected in series with the grinder power-on / off module, and the grinder can still be stopped normally.

[0075] Another situation is that the pins of the grinder power-on / off module and the monitoring instrument are broken down due to breakdown. The damaged path cannot be controlled, but there is still another path to ensure the normal shutdown of the grinder, playing a very good protective role.

[0076] Emergencies also include the disconnection of the pin connecting the grinder shutdown controller to the grinder, in which case the grinder will stop directly. Or the disconnection of the pins of the grinder shutdown controller and the monitoring instrument, in which case the single control module cannot control the normal shutdown of the grinder either, but there is still one path that can stop it normally.

[0077] Therefore, in the case where the grinder shutdown controller (solid-state relay and optocoupler) is damaged, using the solution of the present invention can greatly increase the probability of the normal shutdown of the grinder and greatly reduce the overclocking accidents caused by the damage of the grinder shutdown controller (solid-state relay and optocoupler).

[0078] As Figure 6 shown, the previously designed instrument circuit can output to drive the load normally and can also detect the quality of its own circuit, but it cannot judge whether the external load is normal and cannot detect whether the external load has fallen off. As Figure 3 shown, UOUT1 is the external drive port DB9. The 1st pin of UOUT1 is the positive output, and the 9th pin is the negative output. P4 and the LED are connected in parallel and are the externally connected indicator lights. The output of U2 is connected to the pull-up resistor R4 to the IO port of the MCU port of the control self-check module, and the left side of R14 is connected to the IO port of the MCU of the stop control module. When the power is turned on, the MCUs of each module start the self-check work. The IO port of the MCU of the stop control module outputs a low level. The left side of the optocoupler U4 conducts, and then the right side of the optocoupler conducts. 12.4V is connected to the base of the triode Q3 through R12, turning on the triode Q3. Next, the left side of the optocoupler U2 is turned on, and then the right side of the optocoupler conducts. The 3.3V on the right side of the optocoupler is connected to the ground through the resistor R4. The input level of the IO port of the MCU port of the control self-check module changes from the high level when the optocoupler U2 was not conducting to the low level. Such a state determines that the entire control circuit is normal, otherwise there is a problem with the alarm circuit itself, so that the IO port of the MCU of the control output self-check module returns to the high level, and the IO port of the MCU of the stop control module returns to the high level.

[0079] When the entire instrument is powered on, the grinding machine control circuit module has a self-checking function. During the operation of the entire instrument, including the detection during power-on self-check, the detection before the "grinding" button is pressed, the detection during the grinding process, and the detection when the grinding reaches the target frequency. Through these four steps of detection, the operating status of the instrument can be understood in real time to ensure that the frequency measurement system does not overclock during the grinding process.

[0080] As Figure 7 shown, during the power-on self-check detection, the specific steps of the self-check process of the grinding machine control circuit module are as follows:

[0081] 101) The grinding machine control self-check output port 1 outputs a low level, the relay in the self-check output circuit module 1 conducts, the grinding machine control self-check output port 2 outputs a low level, and the relay in the self-check output circuit module 2 conducts;

[0082] 102) The grinding machine stop control port 1 outputs a high level, the optocoupler in the grinding machine stop control circuit module 1 does not conduct, the grinding machine stop control port 2 outputs a high level, and the optocoupler in the grinding machine stop control circuit module 2 does not conduct;

[0083] 103) Delay for 100 ms to wait for the signal to stabilize;

[0084] 104) Read the level of the grinding machine control self-check input port 1 and record it as Flag11, read the level of the grinding machine control self-check input port 2 and record it as Flag12;

[0085] 105) Delay for 100 ms to eliminate signal interference;

[0086] 106) Read the level of the grinding machine control self-check input port 1 again and record it as Flag21, read the level of the grinding machine control self-check input port 2 again and record it as Flag22;

[0087] 107) Judge whether Flag11 is equal to Flag21 and the value is true; judge whether Flag12 is equal to Flag22 and the value is true;

[0088] 108) If the conditions described in step 107) are all true, the grinding machine control port 1 outputs a low level, and the grinding machine control port 2 outputs a low level. If Flag11 is not equal to Flag21, the self-check fails, and the touch screen grinding machine control circuit module 1 is damaged. If Flag12 is not equal to Flag22, the self-check fails, and the touch screen prompts that the grinding machine control circuit module 2 is damaged.

[0089] 109) On the premise that the conditions described in step 107) are all true, delay for 100 ms to wait for the signal to stabilize;

[0090] 110) After step 109), read the level of the grinding machine control self-check input port 1, denoted as Flag31; read the level of the grinding machine control self-check input port 1, denoted as Flag32;

[0091] 111) After step 110), delay for 100 ms for signal interference cancellation;

[0092] 112) Read the level of the grinding machine control self-check input port 1 again, denoted as Flag41; read the level of the grinding machine control self-check input port 2 again, denoted as Flag42;

[0093] 113) Determine whether Flag31 is equal to Flag41 and the value is true; determine whether Flag32 is equal to Flag42 and the value is true;

[0094] 114) If the conditions described in step 113) are met, the self-check is successful and the frequency meter grinding machine control module can work normally; otherwise, the self-check fails. If Flag31 is not equal to Flag41, the touch screen prompts that the grinding machine control module 1 is damaged; if only Flag32 is not equal to Flag42, the touch screen prompts that the grinding machine control module 2 is damaged.

[0095] As Figure 8 shown, when the "Grinding" button on the main interface of the frequency meter is pressed, the detection steps for the function of the grinding machine control circuit before starting grinding and when the quartz wafer grinding reaches the target frequency and stops are the same. The specific steps are as follows:

[0096] 201) The grinding machine stop control port 1 outputs a high level, and the optocoupler of the grinding machine stop control module 1 is not conducting; the grinding machine stop control port 2 outputs a high level, and the optocoupler of the grinding machine stop control module 2 is not conducting;

[0097] 202) Delay for 100 ms to wait for the signal to stabilize;

[0098] 203) Read the level of the grinding machine control self-check input port 1, denoted as Flag11; read the level of the grinding machine control self-check input port 2, denoted as Flag12;

[0099] 204) Delay for 100 ms for signal interference cancellation;

[0100] 205) Read the level of the grinding machine control self-check input port 1 again, denoted as Flag21; read the level of the grinding machine control self-check input port 2 again, denoted as Flag22;

[0101] 206) Determine whether Flag11 is equal to Flag21 and the value is true; determine whether Flag12 is equal to Flag22 and the value is true;

[0102] 207) If all the conditions described in step 206) are true, the grinding machine control port 1 outputs a low level; the grinding machine control port 2 outputs a low level; if it is determined that Flag11 is not equal to Flag21, the grinding machine control loop 1 is abnormal, and the touch screen prompts an abnormality; if only Flag12 is not equal to Flag22, the grinding machine control loop 2 is abnormal, and the touch screen prompts an abnormality;

[0103] 208) If all the conditions described in step 206) are true, delay for 100 ms to wait for the signal to stabilize;

[0104] 209) After step 208), read the level of the grinding machine control self-check input port 1 and record it as Flag31; read the level of the grinding machine control self-check input port 2 and record it as Flag32;

[0105] 210) After step 209), delay for 100 ms to eliminate signal interference;

[0106] 211) After step 210), read the level of the grinding machine control self-check input port 1 again and record it as Flag41, and read the level of the grinding machine control self-check input port 2 again and record it as Flag42;

[0107] 212) Determine whether Flag31 is equal to Flag41 and whether the value is true; determine whether Flag32 is equal to Flag42 and whether the value is true;

[0108] 213) If all the conditions described in step 212) are true, the grinding machine control loop is normal; if it is determined that Flag31 is not equal to Flag41, the grinding machine control loop 1 is abnormal, and the touch screen prompts an abnormality; if only Flag32 is not equal to Flag42, the grinding machine control loop 2 is abnormal, and the touch screen prompts an abnormality;

[0109] During the detection of the grinding machine control loop, the frequency meter will detect the control loop of the grinding machine. If the control line is not connected or the grinding machine control module is abnormal, the frequency meter will give an alarm prompt. If the control line is connected normally, the online frequency measurement process will be entered.

[0110] As Figure 9 shown, during the online frequency measurement process of the grinding machine control loop detection, during the online frequency measurement process, it will detect whether the grinding machine control loop is normal. Real-time detection during the grinding process can prevent overclocking problems caused by faults in the grinding machine control line or control loop during the grinding process. The specific steps are as follows:

[0111] 301) Determine whether the grinding machine control line has been detected during the grinding process;

[0112] 302) If the conditions described in step 301) are met, the control line detection will not be performed during this online frequency measurement process; if the conditions described in step 301) are not met, set the grinding machine control line detection flag to 1 during the grinding process and perform the operation in step 303).

[0113] 303) Determine whether the current quartz wafer frequency exceeds 60% of the grinding frequency and has not reached the target frequency.

[0114] 304) If the conditions in step 303) are met, read the level of the grinding machine control self-check input port 1, which is Flag1, and read the level of the grinding machine control self-check input port 2, which is Flag2; if the conditions described in step 303) are not met, the control line detection will not be performed during this online frequency measurement process.

[0115] 305) If Flag1 is 1, set the system operation status to abnormal for grinding machine control loop 1; if Flag2 is 1, set the system operation status to abnormal for grinding machine control loop 2. The buzzer of the frequency meter will alarm, and the touch screen will prompt an abnormality. At the same time, a stop pulse signal will be sent from the grinding machine control port; if both Flag1 and Flag2 are 0, end the detection process, and the grinding machine control loop is normal.

[0116] The above is only the preferred embodiment of the present invention. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present invention, several improvements and refinements can be made, and these improvements and refinements should also be regarded as within the protection scope of the present invention.

Claims

1. A highly reliable shutdown control device for a grinding machine, characterized in that, It includes a frequency measurement system, a grinding machine control circuit module, a connection port, two series-connected grinding machine shutdown controllers, and a grinding machine; the grinding machine is electrically connected to the two series-connected grinding machine shutdown controllers; the grinding machine shutdown controller is a solid-state relay or an optocoupler; the control method of the highly reliable grinding machine shutdown control device includes a power-on self-check detection step: the specific steps of the power-on self-check detection step are as follows: 101) The grinding machine control self-check output port 1 outputs a low level, the relay in the self-check output circuit module 1 conducts, the grinding machine control self-check output port 2 outputs a low level, and the relay in the self-check output circuit module 2 conducts; 102) The grinding machine control port 1 outputs a high level, the optocoupler in the grinding machine stop control circuit module 1 does not conduct, the grinding machine control port 2 outputs a high level, and the optocoupler in the grinding machine stop control circuit module 2 does not conduct; 103) Delay for 100 ms to wait for the signal to stabilize; 104) Read the level of the grinding machine control self-check input port 1 and record it as Flag11, read the level of the grinding machine control self-check input port 2 and record it as Flag12; 105) Delay for 100 ms to eliminate signal interference; 106) Read the level of the grinding machine control self-check input port 1 again and record it as Flag21, read the level of the grinding machine control self-check input port 2 again and record it as Flag22; 107) Judge whether Flag11 is equal to Flag21 and the value is true; judge whether Flag12 is equal to Flag22 and the value is true; 108) If the conditions described in step 107) are all true, the grinding machine control port 1 outputs a low level, the grinding machine control port 2 outputs a low level. If it is judged that Flag11 is not equal to Flag21, the self-check fails, and the touch screen grinding machine control circuit module 1 is damaged. If it is judged that Flag12 is not equal to Flag22, the self-check fails, and the touch screen prompts that the grinding machine control circuit module 2 is damaged. 109) On the premise that the conditions described in step 107) are all true, delay for 100 ms to wait for the signal to stabilize; 110) After step 109), read the level of the grinding machine control self-check input port 1 and record it as Flag31; read the level of the grinding machine control self-check input port 1 and record it as Flag32; 111) After step 110), delay for 100 ms to eliminate signal interference; 112) Read the level of the grinding machine control self-check input port 1 again and record it as Flag41; read the level of the grinding machine control self-check input port 2 again and record it as Flag42; 113) Judge whether Flag31 is equal to Flag41 and the value is true; judge whether Flag32 is equal to Flag42 and the value is true; 114) If the conditions described in step 113) are all true, the self-check is successful, and the frequency measurement instrument grinding machine control module can work normally; otherwise, the self-check fails. If it is judged that Flag31 is not equal to Flag41, the touch screen prompts that the grinding machine control module 1 is damaged; If only the condition that Flag32 is equal to Flag42 is not true, the touch screen will prompt that the grinder control module 2 is damaged; The frequency measurement system grinder control circuit module includes a grinder control output self-check module, a grinder control self-check module, and a shutdown grinder control module; The control method of the highly reliable grinder shutdown control device further includes a detection step for the function of the grinder control loop. When the "Grinding" button on the main interface of the frequency meter is pressed, before starting grinding and when the quartz wafer grinding reaches the target frequency and stops, the detection steps for the function of the grinder control loop are the same. The specific steps are as follows: 201) The grinder control port 1 outputs a high level, and the optocoupler of the grinder stop control module 1 is not turned on; the grinder control port 2 outputs a high level, and the optocoupler of the grinder stop control module 2 is not turned on; 202) Delay for 100 ms to wait for the signal to stabilize; 203) Read the level of the grinder control self-check input port 1 and record it as Flag11; read the level of the grinder control self-check input port 2 and record it as Flag12; 204) Delay for 100 ms to eliminate signal interference; 205) Read the level of the grinder control self-check input port 1 again and record it as Flag21; read the level of the grinder control self-check input port 2 again and record it as Flag22; 206) Judge whether Flag11 is equal to Flag21 and whether the value is true; judge whether Flag12 is equal to Flag22 and whether the value is true; 207) If the conditions described in step 206) are all true, the grinder control port 1 outputs a low level; the grinder control port 2 outputs a low level; if it is judged that Flag11 is not equal to Flag21, the grinder control loop 1 is abnormal, and the touch screen will prompt an abnormality; If only Flag12 is not equal to Flag22, the grinder control loop 2 is abnormal, and the touch screen will prompt an abnormality; 208) If the conditions described in step 206) are all true, delay for 100 ms to wait for the signal to stabilize; 209) After step 208), read the level of the grinder control self-check input port 1 and record it as Flag31; read the level of the grinder control self-check input port 2 and record it as Flag32; 210) After step 209), delay for 100 ms to eliminate signal interference; 211) After step 210), read the level of the grinder control self-check input port 1 again and record it as Flag41, and read the level of the grinder control self-check input port 2 again and record it as Flag42; 212) Judge whether Flag31 is equal to Flag41 and whether the value is true; judge whether Flag32 is equal to Flag42 and whether the value is true; 213) If the conditions described in step 212) are all true, the grinder control loop is normal; if it is judged that Flag31 is not equal to Flag41, the grinder control loop 1 is abnormal, and the touch screen will prompt an abnormality; If only Flag32 is not equal to Flag42, the grinder control loop 2 is abnormal, and the touch screen will prompt an abnormality; The frequency measurement system's grinder control circuit module is connected to two series-connected grinder shutdown controllers through a connection port. The control method of the high-reliability grinder shutdown control device further includes an online frequency measurement step. The specific steps of the online frequency measurement step are as follows: 301) Determine whether the grinder control line has been detected during the grinding process. 302) If the condition described in step 301) is met, the control line will not be detected during this online frequency measurement process; if the condition described in step 301) is not met, set the grinder control line detection flag position to 1 during the grinding process and perform the operation in step 303). 303) Determine whether the current quartz wafer frequency exceeds 60% of the grinding frequency and has not reached the target frequency. 304) If the condition in step 303) is met, read the level of the grinder control self-check input port 1, which is Flag1, and read the level of the grinder control self-check input port 2, which is Flag2. If the condition described in step 303) is not met, the control line will not be detected during this online frequency measurement process. 305) If Flag1 is 1, set the system operation status to abnormal for grinder control loop 1; if Flag2 is 1, set the system operation status to abnormal for grinder control loop 2. The frequency meter buzzer alarms, and the touch screen prompts an abnormality. At the same time, the grinder control port 1 and the grinder control port 2 send out shutdown pulse signals; if both Flag1 and Flag2 are 0, end the detection process, and the grinder control loop is normal. The shutdown grinder control module and the grinder control self-check module are controlled and communicated through a triode. The control communication is that after the stop control module is turned on and works, it outputs a low level at the IO port, making the optocoupler controlled by the IO port turn on, generating a low-voltage value at the B pole of the triode, thereby turning on the triode, and making the input level of the IO port of the grinder control self-check module change from high level to low level, so as to judge the condition of the control circuit. A series-connected identification lamp and a first current-limiting resistor are set between the grinder control output self-check module and the grinder control self-check module.

2. The shutdown control device for a highly reliable grinding machine according to claim 1, characterized in that The connection port uses DB9 serial port pins.

3. The shutdown control device for a highly reliable grinding machine according to claim 2, characterized in that, One of the series-connected grinder shutdown controllers is connected to pins 1 and 9 of the connection port as an output port; the other series-connected grinder shutdown controller is connected to pins 2 and 8 of the connection port as an output port.

4. A highly reliable grinding machine shutdown control device according to claim 1, characterized in that, The grinder control output self-check module and the shutdown grinder control module are provided with pull-down resistors to clamp the uncertain signal at a low level and maintain the balance between driving ability and power consumption.

5. The shutdown control device for a highly reliable grinding machine according to claim 4, characterized in that, The pull-down resistor uses 10K ohms.

6. A highly reliable shutdown control device for a grinding machine according to claim 5, characterized in that, The output current of the frequency measurement system's grinder control circuit module is controlled at 10 to 12 mA.

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