A semiconductor process flow management method, device and equipment

Abstract

The present disclosure provides a method, device and equipment for managing a semiconductor process flow, belonging to the field of semiconductor technology. In response to a data modification instruction, modification indication information for modifying parameters in a semiconductor process flow is obtained; the target path and target site to which the modified parameter belongs are determined based on the modification indication information, and a first keyword in the modified parameter is extracted; a second keyword search matching the first keyword is performed in the parameters related to each site in the same or different paths as the target path, and the associated site and the path where it is located associated with the modified parameter are determined; the associated site and the path where it is located are output as associated data, and whether the modified parameter is modified is determined based on the user's instructions. The method provided by the present disclosure solves the problem that manual searching is time-consuming, complicated to operate, and there will be omissions if the types and quantities of the modified contents are large.

Description

Technical Field

[0001] The present disclosure relates to the field of semiconductors, and in particular to a method, apparatus, and equipment for managing a semiconductor process flow. Background Art

[0002] In the semiconductor industry, the journey from single semiconductor wafer to finished product involves numerous steps. These steps are controlled by a manufacturing execution system (MES), which establishes and executes corresponding process flows. Generally speaking, a complete control process, such as production or testing, requires the collaboration of multiple production control departments. This process involves numerous parameters, requiring their establishment. Managing and updating these parameters is currently a complex and labor-intensive task. Summary of the Invention

[0003] The present disclosure provides a method, device and equipment for managing semiconductor process flows, which solves the current problem of how users can efficiently and simply manage process flows in semiconductor production. For example, it can solve the problem of manually searching whether the modified parameters are related to other process flows before modifying common parameters. Manual searching is time-consuming and complicated to operate. If the types of modified contents are large and the number is large, manual searching may result in omissions.

[0004] In a first aspect, the present disclosure provides a method for managing a semiconductor process flow, the method comprising:

[0005] In response to the data modification instruction, obtaining modification instruction information for modifying parameters in a semiconductor process flow, wherein the semiconductor process flow includes paths corresponding to different control nodes, wherein a plurality of independent process sub-flows executed by each control node are respectively regarded as sites and the paths are obtained by sorting them in an execution order;

[0006] Determining the target path and target site to which the modified parameter belongs according to the modification instruction information, and extracting the first keyword in the modified parameter;

[0007] Searching for a second keyword that matches the first keyword in parameters related to each site in the same or different path as the target path, and determining associated sites associated with the modified parameters and the paths on which they are located;

[0008] The associated site and the path where the site is located are output as associated data, and whether to modify the modified parameter is determined according to the user's instruction.

[0009] In a possible implementation, predetermining the type of parameters related to each site in different paths, determining modification items corresponding to different types of parameters, configuring keywords corresponding to different modification items, and extracting the first keyword from the modified parameters include:

[0010] Determine a modification item corresponding to the current modification, wherein the modification item includes a modification action and modification parameters;

[0011] From the keywords corresponding to the different modification items, a first keyword corresponding to the modification item corresponding to the current modification is determined.

[0012] In one possible implementation, searching for a second keyword matching the first keyword in parameters related to each site in the same or different path as the target path, and determining associated sites associated with the modified parameters and the paths on which they are located, includes:

[0013] According to the site and path to which the searched second keyword belongs, the associated site and the path where the associated site is associated with the modified parameter are determined.

[0014] In one possible implementation, the method further includes:

[0015] When it is determined according to the search results that there is no associated site associated with the modified parameter, the modification indication information is sent to a corresponding control node, so that the control node modifies the parameter according to the modification indication information.

[0016] In a possible implementation, determining whether to modify the modified parameter according to a user instruction includes:

[0017] Upon receiving the instruction information of the user confirming to modify the modified parameter, the modification instruction information is sent to the corresponding control node, so that the control node modifies the parameter according to the modification instruction information;

[0018] When the user confirmation instruction information for modifying the modified parameters is not received, the interception interface is displayed and the modification of the modified parameters according to the modification instruction information is suspended.

[0019] In a possible implementation, the associated sites and their paths include:

[0020] a path identical to the target path and a site different from the target site associated with the modified parameters;

[0021] a path different from the target path and a site different from the target site associated with the modified parameters;

[0022] A path different from the target path and a site identical to the target site are associated with the modified parameters.

[0023] In a possible implementation, outputting the associated site and the path where it is located as associated data includes:

[0024] An association report is generated and outputted based on the associated sites and their paths. The association report includes the modified item and the corresponding first keyword, the target path and target site, and the associated sites associated with the modified item and their paths.

[0025] In one possible implementation, the method further includes:

[0026] When it is determined that there is no corresponding modification item for the current modification, a new modification item in the current modification is determined according to the type of the modified parameter, and a corresponding first keyword is configured for the new modification item.

[0027] In a possible implementation manner, determining the target path and target site to which the modified parameter belongs according to the modification instruction information, and extracting the first keyword from the modified parameter includes:

[0028] The modification indication information is globally traversed, and first keywords are extracted from the modified parameters in the modification indication information one by one according to a preset order.

[0029] In a possible implementation, sending the modification indication information to the corresponding control node includes:

[0030] The modification indication information is globally traversed again, and after determining that the modification indication information has not changed, the modification indication information is sent to the corresponding control node.

[0031] In one possible implementation, the method further includes:

[0032] Receive user's instruction information for deleting data, determine a data cleaning cycle according to the instruction information, and delete related reports that have not been used for more than a set period of time during the data cleaning cycle.

[0033] In a second aspect, the present disclosure provides a semiconductor process flow management device, the device comprising:

[0034] a modification instruction information acquisition module, configured to acquire modification instruction information for modifying parameters in a semiconductor process flow in response to a data modification instruction, wherein the semiconductor process flow includes paths corresponding to different control nodes, wherein a plurality of independent process sub-flows executed by each control node are respectively regarded as sites, and the paths are obtained by sorting them in an execution order;

[0035] a first keyword extraction module, configured to determine a target path and a target site to which the modified parameter belongs according to the modification instruction information, and to extract a first keyword from the modified parameter;

[0036] a module for determining associated data, configured to search for a second keyword matching the first keyword in parameters related to each site in a path that is the same as or different from the target path, and determine associated sites associated with the modified parameters and the paths on which they are located;

[0037] The module for determining the modified parameters is used to output the associated sites and the paths where they are located as associated data, and determine whether to modify the modified parameters according to the user's instructions.

[0038] In a third aspect, the present disclosure provides a semiconductor process flow management device, the device comprising:

[0039] At least one processor; and a memory communicatively connected to the at least one processor; wherein the memory stores instructions executable by the at least one processor, and the instructions are executed by the at least one processor to enable the at least one processor to perform any one of the methods for managing a semiconductor process flow.

[0040] In a fourth aspect, the present disclosure provides a computer storage medium storing a computer program, wherein the computer program is used to enable a computer to execute any one of the methods for managing a semiconductor process flow.

[0041] The present disclosure provides a management method, device and equipment for a semiconductor process flow. By extracting a first keyword based on modification indication information and performing a keyword search from each site in each path, the associated site associated with the modified parameter and the path where it is located are determined. This solves the current problem that users need to manually search whether the modified parameter is associated with other process flows before modifying the shared parameter. Manual search is time-consuming and complicated to operate. If the types of modified content are large and the number is large, manual search may result in omissions. BRIEF DESCRIPTION OF THE DRAWINGS

[0042] Figure 1 Schematic diagram of an application scenario of an embodiment of a semiconductor process flow management method according to the present disclosure;

[0043] Figure 2 1 is a flow chart of an embodiment of a method for managing a semiconductor process flow according to the present disclosure;

[0044] Figure 3 A schematic diagram of a path of an embodiment of a semiconductor process flow management method according to the present disclosure;

[0045] Figure 4 A schematic diagram of a path of an embodiment of a semiconductor process flow management method according to the present disclosure;

[0046] Figure 5A schematic diagram of an associated report according to an embodiment of a semiconductor process flow management method disclosed herein;

[0047] Figure 6 A schematic diagram of data presetting according to an embodiment of a semiconductor process flow management method disclosed herein;

[0048] Figure 7 A user operation diagram of an embodiment of a semiconductor process flow management method according to the present disclosure;

[0049] Figure 8 1 is a schematic diagram of a specific process of an embodiment of a semiconductor process flow management method according to the present disclosure;

[0050] Figure 9 is a schematic diagram of an embodiment of a semiconductor process flow management device according to the present disclosure;

[0051] Figure 10 Schematic diagram of an embodiment of a semiconductor process flow management device according to the present disclosure.

[0052] In order to more clearly illustrate the embodiments of the present disclosure or the technical solutions in the traditional technology, the following briefly introduces the drawings required for use in the embodiments. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work. DETAILED DESCRIPTION

[0053] The following will clearly and thoroughly describe the technical solutions in the embodiments of the present disclosure in conjunction with the accompanying drawings. Obviously, the described embodiments are only a portion of the embodiments of the present disclosure, not all of them. All other embodiments derived by persons of ordinary skill in the art based on the embodiments of the present disclosure without inventive effort are within the scope of protection of the present disclosure.

[0054] like Figure 1The application scenario of a semiconductor process flow management method provided by an embodiment of the present disclosure is shown, and the scenario includes: a server 101, a database 102, and a semiconductor system (semiconductor system 103_1, semiconductor system 103_2, and semiconductor system 103_N shown in the figure). The semiconductor includes multiple control nodes, and the control nodes correspond to the paths in the process flow. Each independent process executed by the control node is a corresponding site. Among them, a complete process flow in the semiconductor field, such as a production or test process, includes paths of different control nodes, and each independent process is a site. The same ID or the same parameters in the process flow and control nodes of the embodiment of the present disclosure will be shared, that is, only the same parameters are built, which can be used in multiple process flows, reducing the burden on users and systems; the server 101 uses the semiconductor process flow management method provided by the present disclosure to determine the relevance of each site in each path; the database 102 stores data and programs of the semiconductor process flow management method of the server 101. At present, through the method of the embodiment of the present disclosure, when modifying the common parameters, the first keyword can be extracted based on the modification information provided by the user, and related data can be automatically generated for user confirmation. This can not only reduce the risk of users mistakenly modifying the common parameters, but also save users' time in querying the association, reduce the risk of missed searches, and avoid the need to manually search whether the modified parameters are related to other process flows. Manual search is time-consuming and complicated to operate, especially when the types of modification content are many and the number is large, and manual search may result in omissions.

[0055] In order to solve the problem that manual query and search of related data takes a long time and is prone to omission, the present disclosure provides a semiconductor process flow management method, such as Figure 2 As shown, the method includes:

[0056] S201: In response to a data modification instruction, modification indication information for modifying parameters in a semiconductor process flow is obtained, wherein the semiconductor process flow includes paths corresponding to different control nodes, wherein a plurality of independent process sub-flows executed by each control node are respectively regarded as sites, and the paths are obtained by sorting them in an execution order.

[0057] The semiconductor production or testing process includes multiple execution paths, each path includes many control nodes, and each node may also include multiple test sites.

[0058] Each control node corresponds to a different path, and each path includes multiple independently executable process flows, called sites. These independently executable process flows are sorted in order of execution to form a path. For example, the semiconductor production process includes multiple control nodes, such as the wear resistance control node, which also includes multiple sites, such as physical heat treatment.

[0059] The data modification instruction is modification information provided by the user, and the modification information includes the process flow that the user wants to modify and its corresponding parameters.

[0060] S202: Determine the target path and target site to which the modified parameter belongs according to the modification instruction information, and extract the first keyword in the modified parameter.

[0061] The keywords are pre-configured. The types of relevant parameters of each site in different paths are pre-determined, the modification items corresponding to different types of relevant parameters are determined, and the keywords corresponding to different modification items are configured. Different modification items correspond to different keywords. For example, if the modification item that needs to be modified and adjusted is a machine, the pre-configured keywords can be machine information. Of course, the keywords here are not limited to this and can be selected according to actual needs.

[0062] In the process of extracting the first keyword, in order to avoid missing data, it is necessary to globally traverse the modification indication information in the data provided by the user, and extract the first keyword from the modified parameters in the modification indication information one by one in a preset order.

[0063] In a possible implementation, when it is determined that no corresponding modification item exists in the current modification, a new modification item in the current modification is determined according to the type of the modified parameter, and a corresponding first keyword is configured for the new modification item.

[0064] S203: Searching for a second keyword that matches the first keyword in parameters related to each site in the same or different path as the target path, and determining associated sites associated with the modified parameters and the paths where they are located.

[0065] In a possible implementation, after determining a first keyword corresponding to a modification item in the modification information provided by the user, searching for a second keyword matching the first keyword in parameters related to each site in the same or different path as the target path;

[0066] According to the site and path to which the searched second keyword belongs, the associated site and the path where the associated site is associated with the modified parameter are determined.

[0067] The first keyword is extracted from the modification parameters in the modification data provided by the user, and the second keyword is searched from various sites in the same or different paths as the target path.

[0068] S204: Output the associated site and the path where it is located as associated data, and determine whether to modify the modified parameter according to the user's instruction.

[0069] The associated data is displayed on the user interface. When the user determines that modifying the modification parameters shown in the user profile will not affect the associated site and the path where it is located, the user can determine to modify the modified parameters accordingly, or choose not to modify the modified parameters.

[0070] In one possible embodiment, when it is determined based on the search results that there is no associated site associated with the modified parameter, the modification indication information is sent to the corresponding control node so that the control node modifies the parameter according to the modification indication information. In this case, in order to avoid user confusion or misoperation, no prompts will be given to the user in the user interface.

[0071] The present disclosure provides a method for managing a semiconductor process flow, which performs keyword search in relevant parameters of each site in each path according to modification indication information to determine the associated sites and the paths where the associated sites are associated with the modified parameters. This solves the problem that users currently need to manually search whether the modified parameters are associated with other process flows before modifying common parameters. Manual search is time-consuming and complicated to operate. If the types of modified contents are large and the number is large, manual search may result in omissions.

[0072] The first keyword in the modified parameter in S202 can be extracted by the following implementation:

[0073] Determine a modification item corresponding to the current modification, where the modification item includes a modification action and modification parameters.

[0074] From the keywords corresponding to the different modification items, a first keyword corresponding to the modification item corresponding to the current modification is determined.

[0075] The associated sites and their paths in S203 above include:

[0076] like Figure 3 and Figure 4 As shown, the sites on path A are: 1) site A1→2) site A2→3) site A3→4) site A2; the sites on path B are: 5) site A1→6) site B2→7) site A3→8) site B4; wherein path A includes the same site A2.

[0077] If it is determined that the target path to which the modified parameter belongs is path A and the target site is 2) site A2, then the path associated with it is determined to be path A and the associated site is 4) site A2. When the user needs to modify 2) site A2, the associated site 4) site A2 and the path A where it is located will be output as associated data, and whether to modify the modified parameter is determined according to the user's instructions.

[0078] If it is determined that the target path to which the modified parameter belongs is path A, and the target site is 3) site A3, since there is no identical site and no identical keyword, it is determined based on the search results that there is no associated site associated with 3) site A3, the modification indication information is sent to the corresponding 3) site A3 so that it modifies the parameters according to the modification indication information.

[0079] If it is determined that the target path to which the modified parameter belongs is path A and the target site is 1) site A1, then the path associated with it is determined to be path B and the associated site is 5) site A1. When the user modifies the data of 1) site A1 in path A, the first keyword in 1) site A1 is extracted, and the second keyword matching the first keyword is searched in each path, and it will be prompted that there is an associated site 5) site A1 in path B.

[0080] The above process reduces the risk of users mistakenly modifying shared data to a certain extent, saves users' time in querying related data, and reduces the risk of missed searches.

[0081] In a possible implementation, after determining the associated site and the path where the associated site resides, outputting the associated site and the path where the associated site resides as associated data includes:

[0082] An association report is generated and outputted based on the associated sites and their paths. The association report includes the modified item and the corresponding first keyword, the target path and target site, and the associated sites associated with the modified item and their paths.

[0083] Automatically generate related data based on the modification instructions provided by the user, such as Figure 5 As shown, the searched associated sites and their paths are generated into an associated report 501. When there are multiple associations, multiple associated reports are generated and displayed on the user interface for user reference. When a user modifies the content of multiple items or modifies a large amount of data, the system can export the report much faster than manual review.

[0084] The determination of whether to modify the modified parameter according to the user's instruction in S204 can be specifically implemented as follows:

[0085] Upon receiving the instruction information of the user confirming to modify the modified parameter, the modification instruction information is sent to the corresponding control node, so that the control node modifies the parameter according to the modification instruction information;

[0086] When the user confirmation instruction information for modifying the modified parameters is not received, the interception interface is displayed and the modification of the modified parameters according to the modification instruction information is suspended.

[0087] A pop-up window will prompt the user to choose. Only when the user confirms the synchronization of the associated paths will the application be submitted. Otherwise, the application will be stopped at the submission page, which to some extent prevents risks. Once the user confirms the modification of the current modification instruction information, the instruction modification information is submitted to the corresponding control node and modified by a dedicated personnel, rather than by the user.

[0088] Before sending the modification instruction information to the control node, the modification instruction information needs to be re-traversed globally to confirm that the modification instruction information has not changed. Then the modification instruction information is sent to the corresponding control node. Because users may modify the information before submission, the modification instruction information is re-traversed and checked before each submission until it is successfully submitted to the control node.

[0089] In a possible implementation, user instruction information for deleting data is received, a data cleaning cycle is determined based on the instruction information, and associated reports that have not been used for a set period of time are deleted at intervals between the data cleaning cycles.

[0090] The semiconductor process flow management method disclosed in the embodiments of the present disclosure mainly includes two parts: data preset and user operation:

[0091] 1) Data preset

[0092] like Figure 6 As shown, first predetermine the type of relevant parameters of each site in different paths, determine the modification items corresponding to different types of relevant parameters, and configure keywords corresponding to different modification items. According to the configured keywords, it can be determined which sites and their associated paths will be affected if the modification items of each site in the corresponding target path are modified.

[0093] In one possible implementation, the data preset process can also first extract the modifiable fields of each project, and then extract the fields whose modifications will affect other paths, configure their own dedicated associated reports for these fields (the keywords of each report are different and need to be configured in advance), and form a database with these associated reports. That is, if the system retrieves keywords that modify these fields, it will use the keywords to search the database for associated reports and bring them out.

[0094] The configuration process is performed by professionals, who will continuously reconfigure keywords or add new keywords based on user needs.

[0095] 2) User Operation

[0096] like Figure 7As shown, first, the user needs to input modification instruction information, and then the first keyword is extracted from the modification instruction information through the semiconductor process flow management method provided by the embodiment of the present disclosure, and searched at each site in each path. When it is determined to be associated with other data, an associated report is generated and displayed on the user interface. Finally, the user determines whether to make modifications.

[0097] The specific process of the semiconductor process flow management method provided by the embodiment of the present disclosure is as follows: Figure 8 As shown:

[0098] Step 1: receiving modification instruction information input by a user for modifying parameters in a semiconductor process flow;

[0099] Step 2: Determine the modification item corresponding to the current modification, wherein the modification item includes a modification action and a modification parameter; determine the first keyword corresponding to the modification item corresponding to the current modification from the keywords corresponding to different modification items;

[0100] Step 3: Searching for a second keyword that matches the first keyword in parameters related to each site in the same or different path as the target path in the modification instruction information; determining the associated site and the path associated with the modified parameter based on the site and path to which the searched second keyword belongs, and generating an associated report;

[0101] Step 4: upon receiving the instruction information from the user confirming to modify the modified parameter, the modification instruction information is sent to the corresponding control node, so that the control node modifies the parameter according to the modification instruction information;

[0102] When the user confirmation instruction information for modifying the modified parameters is not received, the interception interface is displayed and the modification of the modified parameters according to the modification instruction information is suspended.

[0103] Based on the same inventive concept, the embodiment of the present disclosure provides a semiconductor process flow management device 900, such as Figure 9 As shown, the device includes:

[0104] a modification instruction information acquisition module 901 for acquiring modification instruction information for modifying parameters in a semiconductor process flow in response to a data modification instruction, wherein the semiconductor process flow includes paths corresponding to different control nodes, wherein a plurality of independent process sub-flows executed by each control node are respectively regarded as sites, and the paths are obtained by sorting them in an execution order;

[0105] A first keyword extraction module 902 is configured to determine the target path and target site to which the modified parameter belongs according to the modification instruction information, and to extract the first keyword from the modified parameter;

[0106] Determine associated data module 903, configured to search for a second keyword matching the first keyword in parameters related to each site in the same or different path as the target path, and determine associated sites associated with the modified parameters and the paths on which they are located;

[0107] The module 904 for determining the modified parameters is configured to output the associated sites and the paths where they are located as associated data, and determine whether to modify the modified parameters according to a user's instruction.

[0108] In one possible implementation, the first keyword extraction module predetermines the type of parameters related to each site in different paths, determines modification items corresponding to different types of related parameters, configures keywords corresponding to different modification items, and extracts the first keyword from the modified parameters, including:

[0109] Determine a modification item corresponding to the current modification, wherein the modification item includes a modification action and modification parameters;

[0110] From the keywords corresponding to the different modification items, a first keyword corresponding to the modification item corresponding to the current modification is determined.

[0111] In one possible implementation, the module for determining associated data is configured to search for a second keyword matching the first keyword in parameters associated with each site in a path that is the same as or different from the target path, and determine associated sites associated with the modified parameters and the paths on which they are located, including:

[0112] According to the site and path to which the searched second keyword belongs, the associated site and the path where the associated site is associated with the modified parameter are determined.

[0113] In a possible implementation, the parameter modification determination module is configured to send the modification indication information to a corresponding control node when determining, based on the search results, that there is no associated site associated with the modified parameter, so that the control node modifies the parameter according to the modification indication information.

[0114] In a possible implementation, the module for determining the parameter modification determines whether to modify the modified parameter according to a user's instruction, including:

[0115] Upon receiving the instruction information of the user confirming to modify the modified parameter, the modification instruction information is sent to the corresponding control node, so that the control node modifies the parameter according to the modification instruction information;

[0116] When the user confirmation instruction information for modifying the modified parameters is not received, the interception interface is displayed and the modification of the modified parameters according to the modification instruction information is suspended.

[0117] In a possible implementation, determining the associated site and its path in the associated data module includes:

[0118] a path identical to the target path and a site different from the target site associated with the modified parameters;

[0119] a path different from the target path and a site different from the target site associated with the modified parameters;

[0120] A path different from the target path and a site identical to the target site are associated with the modified parameters.

[0121] In a possible implementation, the determining module for associated data outputting the associated site and the path thereof as associated data includes:

[0122] An association report is generated and outputted based on the associated sites and their paths. The association report includes the modified item and the corresponding first keyword, the target path and target site, and the associated sites associated with the modified item and their paths.

[0123] In a possible implementation, the module for determining associated data is used to:

[0124] When it is determined that there is no corresponding modification item for the current modification, a new modification item in the current modification is determined according to the type of the modified parameter, and a corresponding first keyword is configured for the new modification item.

[0125] In a possible implementation, the first keyword extraction module determines the target path and target site to which the modified parameter belongs according to the modification instruction information, and extracts the first keyword from the modified parameter, including:

[0126] The modification indication information is globally traversed, and first keywords are extracted from the modified parameters in the modification indication information one by one according to a preset order.

[0127] In a possible implementation, determining that the parameter modification module sends the modification indication information to the corresponding control node includes:

[0128] The modification indication information is globally traversed again, and after determining that the modification indication information has not changed, the modification indication information is sent to the corresponding control node.

[0129] In one possible implementation, the data deletion module is configured to:

[0130] Receive user's instruction information for deleting data, determine a data cleaning cycle according to the instruction information, and delete related reports that have not been used for more than a set period of time during the data cleaning cycle.

[0131] Based on the same concept, the present disclosure provides a semiconductor process flow management device, such as Figure 6 As shown, the device includes at least one processor; and a memory communicatively connected to the at least one processor; wherein the memory stores instructions that can be executed by the at least one processor, and the instructions are executed by the at least one processor to enable the at least one processor to execute any semiconductor process flow management method in the above-mentioned embodiments.

[0132] Refer to the following Figure 10 The electronic device 130 according to this embodiment of the present disclosure will be described. Figure 10 The electronic device 130 shown is merely an example and should not limit the functionality and scope of use of the embodiments of the present disclosure.

[0133] like Figure 10 As shown, the electronic device 130 is a general electronic device. Components of the electronic device 130 may include, but are not limited to, the at least one processor 131, the at least one memory 132, and a bus 133 connecting different system components (including the memory 132 and the processor 131).

[0134] The processor 131 is configured to read and execute instructions in the memory 132 , so that the at least one processor can execute the method for generating associated data in the embodiment of the present disclosure, which will not be repeated here.

[0135] Bus 133 represents one or more of several types of bus structures, including a memory bus or memory controller, a peripheral bus, and a processor or local bus using any of a variety of bus architectures.

[0136] The memory 132 may include a readable medium in the form of a volatile memory, such as a random access memory (RAM) 1321 and / or a cache memory 1322 , and may further include a read-only memory (ROM) 1323 .

[0137] The memory 132 may also include a program / utility 1325 having a set (at least one) of program modules 1324, such program modules 1324 including, but not limited to, an operating system, one or more application programs, other program modules, and program data, each of which or some combination may include an implementation of a network environment.

[0138] The electronic device 130 may also communicate with one or more external devices 134 (e.g., a keyboard, pointing device, etc.), one or more devices that enable a user to interact with the electronic device 130, and / or any device that enables the electronic device 130 to communicate with one or more other electronic devices (e.g., a router, a modem, etc.). Such communication may occur via an input / output (I / O) interface 135. Furthermore, the electronic device 130 may also communicate with one or more networks (e.g., a local area network (LAN), a wide area network (WAN), and / or a public network such as the Internet) via a network adapter 136. As shown, the network adapter 136 communicates with other modules of the electronic device 130 via a bus 133. It should be understood that, although not shown, other hardware and / or software modules may be used in conjunction with the electronic device 130, including but not limited to microcode, device drivers, redundant processors, external disk drive arrays, RAID systems, tape drives, and data backup storage systems.

[0139] In some possible embodiments, various aspects of a semiconductor process flow management method provided by the present disclosure may also be implemented in the form of a program product, which includes program code. When the program product is run on a computer device, the program code is used to enable the computer device to execute the steps of a semiconductor process flow management method according to various exemplary embodiments of the present disclosure described above in this specification.

[0140] In addition, the present disclosure further provides a computer-readable storage medium, wherein the computer storage medium stores a computer program, wherein the computer program is used to enable a computer to execute the method described in any one of the above embodiments.

[0141] These computer program instructions may also be stored in a computer readable memory that can direct a computer or other programmable data processing device to work in a specific manner, so that the instructions stored in the computer readable memory produce an article of manufacture comprising an instruction device that implements the process Figure 1 a process or multiple processes and / or boxes Figure 1 The function specified in one or more boxes.

[0142] These computer program instructions can also be loaded onto a computer or other programmable data processing device so that a series of operating steps are executed on the computer or other programmable device to produce a computer-implemented process, thereby providing the instructions executed on the computer or other programmable device for implementing the process. Figure 1 a process or multiple processes and / or boxes Figure 1 A step that specifies a function in one or more boxes.

[0143] Although the preferred embodiments of the present disclosure have been described, those skilled in the art may make additional changes and modifications to these embodiments once they have learned the basic creative concepts. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments and all changes and modifications that fall within the scope of the present disclosure.

[0144] Obviously, those skilled in the art may make various changes and modifications to the present disclosure without departing from the spirit and scope of the present disclosure. Thus, if these modifications and variations of the present disclosure fall within the scope of the claims of the present disclosure and their equivalents, the present disclosure is intended to include these modifications and variations.

Claims

1. A semiconductor process management method, characterized in that: The method comprises: In response to the data modification instruction, obtaining modification instruction information for modifying parameters in a semiconductor process flow, wherein the semiconductor process flow includes paths corresponding to different control nodes, wherein a plurality of independent process sub-flows executed by each control node are respectively regarded as sites and the paths are obtained by sorting them in an execution order; Determine the target path and target site to which the modified parameter belongs based on the modification indication information, and extract the first keyword from the modified parameter; when extracting the first keyword, perform a global traversal of the modification indication information, and extract the first keyword from the modified parameters in the modification indication information one by one in a preset order; the keywords are pre-configured, and the types of parameters related to each site in different paths are pre-determined, and modification items corresponding to different types of related parameters are determined, and keywords corresponding to different modification items are configured, with different modification items corresponding to different keywords; Searching for a second keyword that matches the first keyword in parameters related to each site in the same or different path as the target path, and determining associated sites associated with the modified parameters and the paths on which they are located; The associated site and the path where the site is located are output as associated data, and whether to modify the modified parameter is determined according to the user's instruction.

2. The method according to claim 1, characterized in that Predetermining the type of parameters related to each site in different paths, determining modification items corresponding to different types of parameters, configuring keywords corresponding to different modification items, and extracting the first keyword from the modified parameters, including: Determine a modification item corresponding to the current modification, wherein the modification item includes a modification action and modification parameters; From the keywords corresponding to the different modification items, a first keyword corresponding to the modification item corresponding to the current modification is determined.

3. The method according to claim 1 or 2, characterized in that Searching for a second keyword that matches the first keyword in parameters related to each site in the same or different path as the target path, and determining associated sites associated with the modified parameters and the paths where they are located, includes: According to the site and path to which the searched second keyword belongs, the associated site and the path where the associated site is associated with the modified parameter are determined.

4. The method according to claim 1, wherein Also includes: When it is determined according to the search results that there is no associated site associated with the modified parameter, the modification indication information is sent to a corresponding control node, so that the control node modifies the parameter according to the modification indication information.

5. The method according to claim 1, wherein Determining whether to modify the modified parameters according to the user's instruction includes: Upon receiving the instruction information of the user confirming to modify the modified parameter, the modification instruction information is sent to the corresponding control node, so that the control node modifies the parameter according to the modification instruction information; When the user confirmation instruction information for modifying the modified parameters is not received, the interception interface is displayed and the modification of the modified parameters according to the modification instruction information is suspended.

6. The method according to claim 1, wherein The associated sites and their paths include: a path identical to the target path and a site different from the target site associated with the modified parameters; a path different from the target path and a site different from the target site associated with the modified parameters; A path different from the target path and a site identical to the target site are associated with the modified parameters.

7. The method according to claim 1, characterized in that Outputting the associated site and the path where it is located as associated data includes: An association report is generated and outputted based on the associated sites and their paths. The association report includes the modified item and the corresponding first keyword, the target path and target site, and the associated sites associated with the modified item and their paths.

8. The method according to claim 2, characterized in that Also includes: When it is determined that there is no corresponding modification item for the current modification, a new modification item in the current modification is determined according to the type of the modified parameter, and a corresponding first keyword is configured for the new modification item.

9. The method according to claim 1, characterized in that The step of determining the target path and target site to which the modified parameter belongs according to the modification instruction information, and extracting the first keyword from the modified parameter includes: The modification indication information is globally traversed, and first keywords are extracted from the modified parameters in the modification indication information one by one according to a preset order.

10. The method according to claim 5, characterized in that Sending the modification indication information to the corresponding control node includes: The modification indication information is globally traversed again, and after determining that the modification indication information has not changed, the modification indication information is sent to the corresponding control node.

11. The method according to claim 7, characterized in that Also includes: Receive user's instruction information for deleting data, determine a data cleaning cycle according to the instruction information, and delete related reports that have not been used for more than a set period of time during the data cleaning cycle.

12. A semiconductor process flow management device, characterized in that: The device comprises: a modification instruction information acquisition module, configured to acquire modification instruction information for modifying parameters in a semiconductor process flow in response to a data modification instruction, wherein the semiconductor process flow includes paths corresponding to different control nodes, wherein a plurality of independent sub-process flows executed by each control node are respectively regarded as sites and the paths are obtained by sorting them in an execution order; A first keyword extraction module is configured to determine, based on the modification indication information, a target path and a target site to which the modified parameter belongs, and extract the first keyword from the modified parameter. When extracting the first keyword, the first keyword extraction module performs a global traversal of the modification indication information and extracts the first keyword from the modified parameter in the modification indication information one by one in a preset order. The keywords are pre-configured, and the types of parameters related to each site in different paths are pre-determined. Modification items corresponding to different types of related parameters are determined, and keywords corresponding to different modification items are configured, with different modification items corresponding to different keywords. a module for determining associated data, configured to search for a second keyword matching the first keyword in parameters related to each site in a path that is the same as or different from the target path, and determine associated sites associated with the modified parameters and the paths on which they are located; The module for determining the modified parameters is used to output the associated sites and the paths where they are located as associated data, and determine whether to modify the modified parameters according to the user's instructions.

13. A semiconductor process flow management device, characterized in that: The device comprises: At least one processor; and a memory communicatively connected to the at least one processor; wherein the memory stores instructions executable by the at least one processor, the instructions being executed by the at least one processor to enable the at least one processor to perform the method according to any one of claims 1 to 11.

14. A computer storage medium, characterized in that The computer storage medium stores a computer program, and the computer program is used to enable a computer to execute the method according to any one of claims 1 to 11.

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