Quartz oscillating plate deformation measuring device and measuring method

Abstract

The application provides a quartz pendulum plate deformation measuring device and a measuring method, and relates to the technical field of quartz acceleration devices. The quartz pendulum plate deformation measuring device comprises a polar plate, a pendulum plate fixing clamp, a first translation platform, a second translation platform and a capacitance measuring assembly. The pendulum plate fixing clamp is suitable for fixing the quartz pendulum plate; the polar plate is arranged on the first translation platform, and the pendulum plate fixing clamp is arranged on the second translation platform, wherein the surface of the polar plate is parallel to the quartz pendulum plate; the second translation platform moves along a first direction to drive the pendulum plate fixing clamp to move towards or away from the polar plate, wherein the first direction is perpendicular to the surface of the polar plate; and the capacitance measuring assembly is electrically connected with the polar plate and the quartz pendulum plate and is suitable for measuring the capacitance between the polar plate and the quartz pendulum plate. The quartz pendulum plate deformation measuring device provided by the application can measure the deformation of the quartz pendulum plate alone, and the quartz pendulum plate is not damaged during the measuring process, the detection efficiency is high, and the detection precision is good.

Description

Technical Field

[0001] This invention relates to the field of quartz accelerometer technology, and in particular to a quartz pendulum deformation measuring device and method. Background Technology

[0002] Quartz accelerometers, with their simple structure, small size, low power consumption, good manufacturability, and high sensitivity, play a crucial role in the navigation, guidance, and control systems of various strategic and tactical weapons as an important component of inertial navigation and measurement equipment. A quartz accelerometer mainly consists of upper and lower torque converters, a pendulum assembly, and a servo circuit. The pendulum assembly is the key sensitive element of the quartz accelerometer, comprising a quartz pendulum plate. The quartz pendulum plate is a brittle material with disadvantages such as low plasticity, fragility, and susceptibility to microcracks. Because a gold film is deposited on the quartz pendulum plate, the film stress generated by the gold film causes deformation of the quartz pendulum plate. Furthermore, factors such as long-term storage conditions, temperature changes due to the quartz pendulum plate being powered on, and vibrations during transportation can alter the microstructure of the gold film, residual stress within the film, and the structure of the quartz pendulum plate, leading to deformation and affecting the measurement accuracy and reliability of the quartz accelerometer. Therefore, deformation measurement of the quartz pendulum plate is necessary to improve the manufacturing process, ensure the quality of the quartz pendulum plate, and guarantee the reliability of the quartz accelerometer.

[0003] In the existing technology, the deformation measurement of a quartz pendulum is usually achieved by long-term testing of the overall parameters of a quartz accelerometer to reflect the stability of various components, including the quartz pendulum. This method is complex to operate, has a long cycle, and introduces the influencing factors of other components, resulting in multiple sources of error and making it difficult to accurately evaluate the quality of the quartz pendulum. Summary of the Invention

[0004] In order to solve at least one of the technical problems existing in the background art, the present invention provides a quartz pendulum deformation measuring device, which can measure the deformation of the quartz pendulum independently, without damaging the quartz pendulum during the measurement process, and has high detection efficiency and good detection accuracy.

[0005] A second aspect of the present invention provides a method for measuring the deformation of a quartz pendulum.

[0006] A first aspect of the present invention provides a quartz pendulum deformation measuring device, comprising:

[0007] Electrode plates;

[0008] Quartz pendulum fixing clamp, suitable for fixing quartz pendulums;

[0009] A first translational platform and a second translational platform, wherein the electrode plate is disposed on the first translational platform and the pendulum fixing fixture is disposed on the second translational platform, wherein the plate surface of the electrode plate is parallel to the quartz pendulum;

[0010] The second translational platform moves along a first direction to drive the swing plate fixing clamp to move toward or away from the electrode plate, wherein the first direction is perpendicular to the surface of the electrode plate;

[0011] A capacitance measuring component is electrically connected to the electrode plate and the quartz pendulum, and is adapted to measure the capacitance between the electrode plate and the quartz pendulum, wherein the electrode plate forms a first electrode and the quartz pendulum forms a second electrode.

[0012] The quartz pendulum deformation measuring device provided in the first aspect of the present invention uses a capacitance method to measure the deformation of the quartz pendulum by setting an electrode plate and forming a capacitor structure with the quartz pendulum. It does not contact the quartz pendulum, thus avoiding damage to the quartz pendulum, and has high detection efficiency and good detection accuracy. Specifically, the quartz pendulum deformation measuring device includes an electrode plate, a pendulum fixing fixture, a first translational platform, a second translational platform, and a capacitance measuring component. The quartz pendulum is fixed on the pendulum fixing fixture, the electrode plate is disposed on the first translational platform, and the pendulum fixing fixture is disposed on the second translational platform. The surface of the electrode plate is parallel to the quartz pendulum, thus forming a capacitor structure between the electrode plate and the quartz pendulum. When the quartz pendulum deforms, the distance between the quartz pendulum and the electrode plate changes, and consequently, the capacitance between the quartz pendulum and the electrode plate also changes. That is, the quartz pendulum deformation measuring device provided in this embodiment converts the physical deformation of the quartz pendulum into a change in capacitance. The change in capacitance characterizes the deformation of the quartz pendulum. The capacitor structure is sensitive to changes in small displacements, thus improving the efficiency and accuracy of quartz pendulum deformation measurement. Furthermore, in the actual measurement process, the second translational platform can carry the quartz pendulum on the pendulum fixing fixture to move towards or away from the electrode plate, causing the second translational platform to move to the first position. At this point, the capacitance between the quartz pendulum and the electrode plate is measured. Then, the second translational platform is moved to the second position, and the capacitance between the quartz pendulum and the electrode plate is measured again. By calculating the ratio between the change in capacitance and the displacement of the quartz pendulum, the capacitance measurement sensitivity of the quartz pendulum deformation measuring device can be obtained. Then, the second translational platform is fixed at a preset position, keeping the relative position between the quartz pendulum and the electrode plate constant. At this time, the capacitance between the quartz pendulum and the electrode plate can be measured multiple times in a time-sharing manner to obtain the capacitance change pattern. Based on the capacitance change and the capacitance measurement sensitivity, the distance change between the quartz pendulum and the electrode plate can be calculated. This distance change corresponds to the deformation value of the quartz pendulum. Therefore, using the quartz pendulum deformation measuring device provided in this embodiment of the invention, the deformation of the quartz pendulum can be measured independently without damaging the quartz pendulum during the measurement process, resulting in high detection efficiency and good detection accuracy.

[0013] According to one embodiment of the present invention, the second translational platform includes a first fine-tuner adapted to adjust the distance between the second translational platform and the first translational platform.

[0014] According to one embodiment of the present invention, the quartz pendulum deformation measuring device further includes a first fixed bracket and a second fixed bracket, wherein the first fixed bracket is disposed on the first translational platform and the second fixed bracket is disposed on the second translational platform;

[0015] The electrode plate is mounted on the first fixed bracket, and the swing plate fixing clamp is mounted on the second fixed bracket.

[0016] According to one embodiment of the present invention, the swing plate fixing fixture includes a fixture body and a rotating platform, the rotating platform being disposed on the second fixing bracket, and the fixture body being disposed on the rotating platform;

[0017] The rotating platform is adapted to drive the fixture body to rotate.

[0018] According to one embodiment of the present invention, the first translational platform moves along a first direction to drive the electrode plate toward or away from the swing plate fixing clamp;

[0019] The first translational platform includes a first locking element, which is adapted to lock and position the first translational platform;

[0020] The swing plate fixing fixture includes a lever, a second fine adjuster, a second locking element, and a third locking element;

[0021] The lever is disposed on the rotating platform and is adapted to drive the rotating platform to rotate.

[0022] The second fine-tuner is adapted to drive the rotary table to rotate;

[0023] The second locking member and the third locking member are adapted to lock and position the rotating table.

[0024] According to one embodiment of the present invention, the capacitance measurement component includes a shielded wire, a capacitance measurement chip, and a signal processing terminal;

[0025] The capacitance measurement chip is electrically connected to the electrode plate and the quartz pendulum via the shielding wire, and the capacitance measurement chip is electrically connected to the signal processing terminal.

[0026] A second aspect of the present invention provides a method for measuring the deformation of a quartz pendulum based on the quartz pendulum deformation measuring device in any of the first aspects described above, comprising:

[0027] Determine the target distance d0 between the quartz pendulum and the electrode plate;

[0028] The second translational platform is adjusted to drive the pendulum fixing clamp to move along the first direction so that the distance between the quartz pendulum and the electrode plate is the target distance d0, and the capacitance measuring component measures the N capacitances C between the quartz pendulum and the electrode plate.

[0029] Based on the N capacitances C, obtain multiple sets of capacitance changes ΔC;

[0030] Based on the multiple sets of capacitance changes ΔC, the set of deformation values ​​of the quartz pendulum is determined.

[0031] According to an embodiment of the present invention, the step of determining the target distance d0 between the quartz pendulum and the electrode plate includes:

[0032] Determine a preset distance d between the quartz pendulum and the electrode plate, and determine the capacitance C between the quartz pendulum and the electrode plate based on the preset distance d;

[0033] Determine the preset offset distance Δd of the quartz pendulum, and based on the preset offset distance Δd, determine the capacitance change ΔC between the quartz pendulum and the electrode plate;

[0034] Based on the preset offset distance Δd and the capacitance change ΔC, the capacitance measurement sensitivity S = ΔC / Δd is determined.

[0035] Based on the capacitance measurement sensitivity S, the target distance d0 between the quartz pendulum and the electrode is determined.

[0036] According to one embodiment of the present invention, the method further includes:

[0037] Based on the capacitance measurement sensitivity S, the measurement range, resolution, and capacitance sampling rate of the capacitance measurement component are determined.

[0038] According to an embodiment of the present invention, the step of determining a preset distance d between the quartz pendulum and the electrode, and determining the capacitance C between the quartz pendulum and the electrode based on the preset distance d, includes:

[0039] Obtain the structural and physical parameters of the quartz pendulum;

[0040] Based on the structural and physical parameters, the preset distance d and the electrical capacity C are determined using the finite element simulation analysis method.

[0041] According to the second aspect of the present invention, the method for measuring the deformation of a quartz pendulum is based on the capacitance structure formed between the quartz pendulum and the electrode. The physical deformation of the quartz pendulum is converted into a change in capacitance using the capacitance method to characterize the deformation of the quartz pendulum. Specifically, firstly, a target distance d0 between the quartz pendulum and the electrode is determined. Then, a second translational platform is adjusted to move the pendulum fixing fixture along a first direction, i.e., towards or away from the electrode, so that the distance between the quartz pendulum and the electrode is the target distance d0. Then, N capacitances C between the quartz pendulum and the electrode are measured using a capacitance measuring component. Due to the deformation of the quartz pendulum, the distance between the quartz pendulum and the electrode changes, resulting in a change in the capacitance between the quartz pendulum and the electrode. Therefore, the values ​​of the N capacitances are different. Further, based on the N capacitances C, multiple sets of capacitance changes ΔC are obtained. Then, based on the multiple sets of capacitance changes ΔC, a set of deformation values ​​of the quartz pendulum can be obtained. The quartz pendulum deformation measurement method provided in this invention can measure the deformation of the quartz pendulum independently without damaging it during the measurement process, and has high detection efficiency and good detection accuracy. Attached Figure Description

[0042] To more clearly illustrate the technical solutions in this invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0043] Figure 1 This is a schematic diagram of the structure of the quartz pendulum deformation measuring device provided in an embodiment of the present invention. Figure 1 ;

[0044] Figure 2 This is a schematic diagram of the structure of the quartz pendulum deformation measuring device provided in an embodiment of the present invention. Figure 2 ;

[0045] Figure 3 This is a schematic diagram of the structure of the quartz pendulum deformation measuring device provided in an embodiment of the present invention. Figure 3 ;

[0046] Figure 4 This is a schematic diagram of the structure of the swing plate fixing fixture provided in an embodiment of the present invention;

[0047] Figure 5 This is a schematic diagram of the structure of the quartz pendulum provided in an embodiment of the present invention;

[0048] Figure 6 This is a schematic diagram of the structure of the quartz pendulum deformation measuring device provided in an embodiment of the present invention. Figure 4 ;

[0049] Figure 7 This is a schematic flowchart of the quartz pendulum deformation measurement method provided in an embodiment of the present invention.

[0050] Figure label:

[0051] 10. Electrode plate; 110. First fixed bracket;

[0052] 20. Swing plate fixing fixture; 210. Second fixing bracket; 220. Fixture body; 221. Lever; 230. Rotary table; 240. Second fine adjuster; 250. Second locking element; 260. Third locking element;

[0053] 30. First translational platform; 310. First locking component;

[0054] 40. Second translational platform; 410. First fine-tuner;

[0055] 510. Shielded wire; 520. Capacitance measurement chip; 530. Signal processing terminal;

[0056] 610. Quartz flexible beam; 620. Coating at the flexible beam; 630. Quartz substrate for the swing tongue; 640. Coating for the swing tongue; 650. Quartz ring substrate; 660. Coating for the three protrusions. Detailed Implementation

[0057] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this invention. All other embodiments obtained by those skilled in the art based on the embodiments of this invention without creative effort are within the scope of protection of this invention.

[0058] In the description of the embodiments of the present invention, it should be noted that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the embodiments of the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the embodiments of the present invention. In addition, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0059] In the description of the embodiments of the present invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "connected" and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of the present invention based on the specific circumstances.

[0060] In embodiments of the present invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0061] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0062] like Figures 1 to 6 As shown, a first aspect embodiment of the present invention provides a quartz pendulum deformation measuring device, including an electrode plate 10, a pendulum fixing clamp 20, a first translational platform 30, a second translational platform 40, and a capacitance measuring component. The pendulum fixing clamp 20 is adapted to fix the quartz pendulum; the electrode plate 10 is disposed on the first translational platform 30, and the pendulum fixing clamp 20 is disposed on the second translational platform 40, wherein the plate surface of the electrode plate 10 is parallel to the quartz pendulum; the second translational platform 40 moves along a first direction to drive the pendulum fixing clamp 20 to move toward or away from the electrode plate 10, wherein the first direction is perpendicular to the plate surface of the electrode plate 10; the capacitance measuring component is electrically connected to the electrode plate 10 and the quartz pendulum, and is adapted to measure the capacitance between the electrode plate 10 and the quartz pendulum, wherein the electrode plate 10 forms a first electrode, and the quartz pendulum forms a second electrode.

[0063] The electrode plate 10 can be made of metal, or it can be made of a non-metallic material with a metal coating on the surface. For example... Figure 5 As shown, the structure of a quartz pendulum typically includes a quartz flexible beam 610, a coating 620 on the flexible beam, a quartz base 630 for the pendulum tongue, a coating 640 for the pendulum tongue, a quartz ring base 650, and a three-protrusion coating 660. Among these, the thickness of the quartz flexible beam 610 is typically only tens of micrometers, and it is a key component for sensitively detecting quality and thus generating flexible displacement.

[0064] The quartz accelerometer also includes a torque coil, which is glued to the quartz pendulum. Together with the coil frame and the quartz pendulum, they form a pendulum assembly to detect mass and sense external acceleration input. When there is external acceleration input, the quartz pendulum is subjected to inertial force and moves away from its equilibrium position. At this time, the differential capacitance formed by the upper and lower surfaces of the quartz pendulum and the upper and lower torque converter end faces will change. This electrical signal is output to the servo circuit through the terminal. The acceleration output by the quartz accelerometer is proportional to this current signal. Simultaneously, the amplified feedback current signal is output to the torque coil. The Ampere force experienced by the current-carrying wire in the magnetic field, through a push-pull action, returns the quartz pendulum to its equilibrium position.

[0065] like Figure 2 and Figure 4 As shown, the quartz pendulum is fixed at the center of the pendulum fixing fixture 20. The pendulum fixing fixture 20 can not only fix the quartz pendulum, but also serve as a distance calibration device during the measurement process. The pendulum fixing fixture 20 is made of quartz glass and has a hole of a certain size in the middle to prevent the quartz pendulum from being damaged by collision during the test. There are grooves around the hole on the pendulum fixing fixture 20 that match the size of the quartz pendulum, which can position the quartz pendulum. Washers can be added to the grooves to prevent stress concentration caused by the clamping force on the quartz pendulum from damaging the quartz pendulum or affecting the measurement results.

[0066] The second translational platform 40 can slide linearly, and a slide rail structure can be included on the second translational platform 40.

[0067] The quartz pendulum deformation measuring device provided in the first aspect embodiment of the present invention uses a capacitance method to measure the deformation of the quartz pendulum by setting an electrode plate 10 and forming a capacitor structure with the quartz pendulum. It does not contact the quartz pendulum, thus avoiding damage to the quartz pendulum, and has high detection efficiency and good detection accuracy. Specifically, the quartz pendulum deformation measuring device includes an electrode plate 10, a pendulum fixing clamp 20, a first translational platform 30, a second translational platform 40, and a capacitance measuring component. The quartz pendulum is fixed on the pendulum fixing clamp 20, the electrode plate 10 is disposed on the first translational platform 30, and the pendulum fixing clamp 20 is disposed on the second translational platform 40. The surface of the electrode plate 10 is parallel to the quartz pendulum. In this way, the electrode plate 10 and the quartz pendulum can form a capacitor structure. When the quartz pendulum deforms, the distance between the quartz pendulum and the electrode plate 10 changes, and consequently, the capacitance between the quartz pendulum and the electrode plate 10 also changes. That is, the quartz pendulum deformation measuring device provided in this embodiment converts the physical deformation of the quartz pendulum into a change in capacitance. The change in capacitance characterizes the deformation of the quartz pendulum. The capacitor structure is sensitive to changes in small displacements, thus improving the efficiency and accuracy of quartz pendulum deformation measurement. Furthermore, in the actual measurement process, the second translational platform 40 can carry the quartz pendulum on the pendulum fixing fixture 20 to move towards or away from the electrode plate 10, so that the second translational platform 40 moves to the first position and the capacitance between the quartz pendulum and the electrode plate 10 is measured at this time. Then, the second translational platform 40 is moved to the second position and the capacitance between the quartz pendulum and the electrode plate 10 is measured at this time. By calculating the ratio between the change in capacitance and the displacement of the quartz pendulum, the capacitance measurement sensitivity of the quartz pendulum deformation measuring device can be obtained. Then, the second translational platform 40 is fixed at a preset position so that the relative position between the quartz pendulum and the electrode plate 10 remains unchanged. At this time, the capacitance between the quartz pendulum and the electrode plate 10 can be measured multiple times in a time-sharing manner to obtain the capacitance change law. Based on the capacitance change value and the capacitance measurement sensitivity, the distance change between the quartz pendulum and the electrode plate 10 can be calculated. The distance change corresponds to the deformation value of the quartz pendulum. Therefore, the quartz pendulum deformation measuring device provided in this embodiment of the invention can measure the deformation of the quartz pendulum independently, without damaging the quartz pendulum during the measurement process, and has high detection efficiency and good detection accuracy.

[0068] like Figures 1 to 3As shown, in an embodiment of the present invention, the second translational platform 40 includes a first fine-tuning device 410, adapted to adjust the distance between the second translational platform 40 and the first translational platform 30. By rotating the first fine-tuning device 410, the distance, direction, and speed of the movement of the second translational platform 40 can be precisely controlled, ensuring the high accuracy of the distance between the quartz pendulum and the electrode plate 10, reducing errors, and improving measurement accuracy. In an embodiment of the present invention, the quartz pendulum deformation measuring device further includes a first fixed bracket 110 and a second fixed bracket 210. The first fixed bracket 110 is disposed on the first translational platform 30, and the second fixed bracket 210 is disposed on the second translational platform 40; the electrode plate 10 is mounted on the first fixed bracket 110, and the pendulum fixing clamp 20 is mounted on the second fixed bracket 210. The electrode plate 10 is installed on the first translational platform 30 via the first fixed bracket 110, and the swing plate fixing fixture 20 is installed on the second translational platform 40 via the second fixed bracket 210. This effectively ensures the installation reliability and stability of the electrode plate 10 and the swing plate fixing fixture 20, and avoids the electrode plate 10 and the swing plate fixing fixture 20 from tilting or shaking, which would affect the measurement accuracy.

[0069] The first fixed bracket 110 and the second fixed bracket 210 can be made of metal, alloy, or plastic with good rigidity and strength. The first fixed bracket 110 and the second fixed bracket 210 can be L-shaped brackets or inverted T-shaped brackets. The embodiments of the present invention do not make specific limitations.

[0070] like Figures 1 to 4 As shown, in an embodiment of the present invention, the quartz pendulum fixing fixture 20 includes a fixture body 220 and a rotating platform 230. The rotating platform 230 is disposed on the second fixing bracket 210, and the fixture body 220 is disposed on the rotating platform 230. The rotating platform 230 is adapted to drive the fixture body 220 to rotate. The quartz pendulum is fixed on the fixture body 220, and the fixture body 220 is disposed on the rotating platform 230. By rotating the rotating platform 230, the fixture body 220 and the quartz pendulum can be driven to rotate, so as to adjust the angle of the quartz pendulum.

[0071] A lever 221 can be installed on the rotary table 230. By moving the lever 221, the rotary table 230 can be rotated, which is convenient and quick. The rotary table 230 can also be electrically controlled, which provides higher rotation accuracy and efficiency.

[0072] like Figure 4As shown, in an embodiment of the present invention, the first translational platform 30 moves along a first direction to drive the electrode plate 10 toward or away from the quartz pendulum fixing clamp 20. The first translational platform 30 includes a first locking member 310, adapted to lock and position the first translational platform 30. The quartz pendulum fixing clamp 20 includes a lever 221, a second fine adjuster 240, a second locking member 250, and a third locking member 260. The lever 221 is disposed on the rotating table 230 and adapted to drive the rotating table 230 to rotate. The second fine adjuster 240 is adapted to drive the rotating table 230 to rotate. The second locking member 250 and the third locking member 260 are adapted to lock and position the rotating table 230. The first translational platform 30 can also slide linearly to adjust the distance between the electrode plate 10 and the quartz pendulum. When the position of the electrode plate 10 is determined, the first locking member 310 abuts against the first translational platform 30, fixing the first translational platform 30 in that position and preventing the first translational platform 30 from continuing to slide. The lever 221 on the fixture body 220 can be manually moved to rotate the fixture body 220 significantly. Then, the second fine-tuning device 240 can be used to make small-amplitude fine-tuning adjustments to the rotating stage 230, making the angle positioning of the quartz pendulum more accurate. After the angle of the quartz pendulum is adjusted, the second locking member 250 is pressed against the rotating stage 230 to prevent the rotating stage 230 from continuing to rotate. The third locking member 260 is pressed against the second fine-tuning device 240 to prevent the second fine-tuning device 240 from making fine adjustments to the rotating stage 230, thereby preventing the rotating stage 230 from continuing to rotate. This effectively ensures the positioning accuracy and improves the accuracy of the measurement results.

[0073] like Figure 6 As shown, in an embodiment of the present invention, the capacitance measurement component includes a shielding wire 510, a capacitance measurement chip 520, and a signal processing terminal 530. The capacitance measurement chip 520 is electrically connected to the electrode plate 10 and the quartz pendulum via the shielding wire 510, and is also electrically connected to the signal processing terminal 530. The shielding wire 510, the electrode plate 10, the quartz pendulum, and the capacitance measurement chip 520 form a closed loop. The capacitance measurement chip 520 can sense the capacitance between the quartz pendulum and the electrode plate 10 and transmit the capacitance value to the signal processing terminal 530. The signal processing terminal 530 can record the value and perform analysis.

[0074] The capacitance measurement chip 520 can be the AD7747 chip manufactured by Analog Devices, and the signal processing terminal 530 can be a computer, cloud processor, etc.

[0075] like Figure 7 As shown, a second aspect of the present invention provides a method for measuring the deformation of a quartz pendulum based on the quartz pendulum deformation measuring device in any of the first aspects described above, comprising:

[0076] Step 100: Determine the target distance d0 between the quartz pendulum and the electrode plate 10;

[0077] Step 200: Adjust the second motion platform to drive the pendulum fixing clamp 20 to move along the first direction so that the distance between the quartz pendulum and the electrode plate 10 is the target distance d0, and measure the N capacitances C between the quartz pendulum and the electrode plate 10 through the capacitance measuring component.

[0078] Step 300: Based on N capacitances C, obtain multiple sets of capacitance changes ΔC;

[0079] Step 400: Based on multiple sets of capacitance changes ΔC, determine the set of deformation values ​​of the quartz pendulum.

[0080] In step 100, the target distance d0 is the optimal distance determined based on the test parameters of the quartz pendulum deformation measuring device. If the target distance is too long or too short, it will not be conducive to the acquisition of capacitance. The test parameters may include capacitance measurement sensitivity, capacitance measurement range, etc.

[0081] In step 200, after determining the target distance d0 between the quartz pendulum and the electrode 10, the quartz pendulum is adjusted to the corresponding position by sliding the second translational platform 40. Then, the capacitance C between the quartz pendulum and the electrode 10 is measured by the capacitance measuring component. This process is time-division and multiple measurements. As the quartz pendulum deforms, the distance between the quartz pendulum and the electrode 10 will change, and correspondingly, the capacitance C will also change. Therefore, the values ​​of N capacitance C are different.

[0082] In step 300, the difference between two adjacent capacitance values ​​C can be calculated to obtain the capacitance change ΔC, or the capacitance value within a specific time period can be selected to obtain the capacitance change ΔC. The method for obtaining the capacitance change ΔC is not limited to these two methods and can be determined according to actual needs.

[0083] In step 400, after obtaining multiple sets of capacitance changes ΔC, the deformation of multiple sets of quartz pendulums can be further calculated. Then, the deformation pattern of the quartz pendulums can be analyzed based on the variation of the deformation values. With sufficient data, the problem of inaccurate measurement results caused by random errors can be effectively avoided.

[0084] Furthermore, the expression for the relationship between the capacitance change ΔC and the displacement of the quartz pendulum-plate 10 is as follows:

[0085]

[0086] Where ε0 is the vacuum permittivity, ε r Let S be the relative permittivity, S be the area of ​​the plate 10 facing each other, ΔC be the change in capacitance, and d1 and d2 be the planar distance between the quartz pendulum and the plate 10 before and after the quartz pendulum is deformed, respectively. Let δ be the change in the planar distance, then we have:

[0087]

[0088] The deformation of the quartz pendulum is calculated using the capacitance change ΔC. Under the premise of minute deformation of the quartz pendulum, the relationship between the capacitance change ΔC and the displacement of the quartz pendulum-plate 10 is approximately linear, as calculated below:

[0089]

[0090] Where, since δ << d1, d2, d ≈ d1 ≈ d2, and C0 is the initial capacitance measurement value, then

[0091]

[0092] Based on the capacitance change ΔC and the deformation of the quartz pendulum, the residual stress of the quartz pendulum, i.e., the difference in internal stress between the two sides of the coated metal film, Δσ, is determined. f Calculations are performed. The expression for calculating residual stress, derived based on the Stoney formula, is as follows:

[0093]

[0094] Where w is the maximum deformation of the quartz pendulum, m is the mass of the quartz pendulum, g is the gravitational acceleration, and L is the length of the flexible beam. m L is the distance between the farthest end of the mass suspended by the quartz pendulum and the fixed end of the cantilever beam. G t is the distance from the center of mass of the suspended mass to the fixed end. s t represents the thickness of the quartz substrate at the flexible beam. f Thickness of the coated metal film, W s W is the equivalent width of the quartz substrate at the flexible beam. f Δσ is the equivalent width of the membrane at the flexible beam. f E represents the stress difference between the two thin films; s With ν s These are the elastic modulus and Poisson's ratio of the quartz substrate, respectively.

[0095] In an embodiment of the present invention, the step of determining the target distance d0 between the quartz pendulum and the electrode plate 10 includes:

[0096] Determine the preset distance d between the quartz pendulum and the electrode 10, and based on the preset distance d, determine the capacitance C between the quartz pendulum and the electrode 10;

[0097] Determine the preset offset distance Δd of the quartz pendulum, and based on the preset offset distance Δd, determine the capacitance change ΔC between the quartz pendulum and the electrode 10;

[0098] Based on the preset offset distance Δd and the capacitance change ΔC, the capacitance measurement sensitivity S = ΔC / Δd is determined;

[0099] Based on the capacitance measurement sensitivity S, the target distance d0 between the quartz pendulum and the electrode 10 is determined.

[0100] Following the steps described above, by adjusting the distance between the quartz pendulum and the electrode 10 twice and collecting the corresponding capacitance C, the capacitance measurement sensitivity S of the quartz pendulum deformation measuring device can be determined by the change in capacitance and the difference in distance between the two measurements, i.e., S = ΔC / Δd.

[0101] In embodiments of the present invention, the method further includes:

[0102] Based on the capacitance measurement sensitivity S, the measurement range, resolution, and capacitance sampling rate of the capacitance measurement component are determined.

[0103] The capacitance measurement sensitivity S is an important parameter of the quartz pendulum deformation measurement device. Therefore, determining the measurement range, resolution and capacitance sampling rate of the capacitance measurement component based on the capacitance measurement sensitivity S can make the various measurement parameters reasonably matched, so as to make the measurement data more accurate.

[0104] In addition, the capacitance measurement chip 520 can be selected appropriately based on the capacitance measurement sensitivity S.

[0105] In an embodiment of the present invention, the step of determining a preset distance d between the quartz pendulum and the electrode 10, and determining the capacitance C between the quartz pendulum and the electrode 10 based on the preset distance d, includes:

[0106] Obtain the structural and physical parameters of the quartz pendulum;

[0107] Based on structural and physical parameters, the preset distance d and capacitance C are determined using finite element simulation analysis.

[0108] The structural and physical parameters of the quartz pendulum also affect the measurement results. Therefore, before determining the preset distance d and capacitance C, it is necessary to collect and analyze the structural and physical parameters of the quartz pendulum to ensure that the setting of the measurement parameters is fully consistent with the quartz pendulum, so as to ensure the measurement accuracy.

[0109] According to the second aspect of the present invention, the method for measuring the deformation of a quartz pendulum is based on the capacitance structure formed between the quartz pendulum and the electrode 10. The physical deformation of the quartz pendulum is converted into a change in capacitance using the capacitance method to characterize the deformation of the quartz pendulum. Specifically, firstly, a target distance d0 between the quartz pendulum and the electrode 10 is determined. Then, the second translational platform 40 is adjusted to drive the pendulum fixing clamp 20 to move along a first direction, i.e., towards or away from the electrode 10, so that the distance between the quartz pendulum and the electrode 10 is the target distance d0. Then, N capacitances C between the quartz pendulum and the electrode 10 are measured using a capacitance measuring component. Due to the deformation of the quartz pendulum, the distance between the quartz pendulum and the electrode 10 changes, resulting in a change in the capacitance between the quartz pendulum and the electrode 10. Therefore, the values ​​of the N capacitances are different. Further, based on the N capacitances C, multiple sets of capacitance changes ΔC are obtained. Then, based on the multiple sets of capacitance changes ΔC, a set of deformation values ​​of the quartz pendulum can be obtained. The quartz pendulum deformation measurement method provided in this invention can measure the deformation of the quartz pendulum independently without damaging it during the measurement process, and has high detection efficiency and good detection accuracy.

[0110] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A device for measuring the deformation of a quartz pendulum, characterized in that, include: Electrode plates; Quartz pendulum fixing clamp, suitable for fixing quartz pendulums; A first translational platform and a second translational platform, wherein the electrode plate is disposed on the first translational platform and the pendulum fixing fixture is disposed on the second translational platform, wherein the plate surface of the electrode plate is parallel to the quartz pendulum; The second translational platform moves along a first direction to drive the swing plate fixing clamp to move toward or away from the electrode plate, wherein the first direction is perpendicular to the surface of the electrode plate; A capacitance measurement assembly is electrically connected to the electrode plate and the quartz pendulum, and is adapted to measure the capacitance between the electrode plate and the quartz pendulum, wherein the electrode plate forms a first electrode and the quartz pendulum forms a second electrode; The quartz pendulum deformation measuring device further includes a first fixed bracket and a second fixed bracket. The first fixed bracket is disposed on the first translational platform, and the second fixed bracket is disposed on the second translational platform. The electrode plate is mounted on the first fixed bracket, and the pendulum fixing clamp is mounted on the second fixed bracket. The swing plate fixing fixture includes a fixture body and a rotating platform. The rotating platform is disposed on the second fixing bracket, and the fixture body is disposed on the rotating platform. The rotating platform is adapted to drive the fixture body to rotate. The first translational platform moves along a first direction to drive the electrode plate toward or away from the swing plate fixing fixture; the first translational platform includes a first locking member adapted to lock and position the first translational platform; the swing plate fixing fixture includes a lever, a second fine adjuster, a second locking member, and a third locking member; the lever is disposed on the rotating table and adapted to drive the rotating table to rotate; the second fine adjuster is adapted to drive the rotating table to rotate; the second locking member and the third locking member are adapted to lock and position the rotating table.

2. The quartz pendulum deformation measuring device according to claim 1, characterized in that, The second translational platform includes a first fine-tuner adapted to adjust the distance between the second translational platform and the first translational platform.

3. The quartz pendulum deformation measuring device according to any one of claims 1 to 2, characterized in that, The capacitance measurement component includes a shielded wire, a capacitance measurement chip, and a signal processing terminal. The capacitance measurement chip is electrically connected to the electrode plate and the quartz pendulum via the shielding wire, and the capacitance measurement chip is electrically connected to the signal processing terminal.

4. A method for measuring the deformation of a quartz pendulum based on the quartz pendulum deformation measuring device according to any one of claims 1 to 3, characterized in that, include: Determine the target distance d0 between the quartz pendulum and the electrode plate; The second translational platform is adjusted to drive the pendulum fixing clamp to move along the first direction so that the distance between the quartz pendulum and the electrode plate is the target distance d0, and the capacitance measuring component measures the N capacitances C between the quartz pendulum and the electrode plate. Based on the N capacitance values ​​C, multiple sets of capacitance changes are obtained. C; Based on the multiple sets of capacitance changes C, determine the set of deformation values ​​of the quartz pendulum; The step of determining the target distance d0 between the quartz pendulum and the electrode includes: Determine a preset distance d between the quartz pendulum and the electrode plate, and determine the capacitance C between the quartz pendulum and the electrode plate based on the preset distance d; Determine the preset offset distance of the quartz pendulum. d, based on the preset offset distance d. Determine the capacitance change between the quartz pendulum and the electrode. C; Based on the preset offset distance d and the change in capacitance C, Determine the capacitance measurement sensitivity S= C / d; Based on the capacitance measurement sensitivity S, the target distance d0 between the quartz pendulum and the electrode is determined.

5. The method for measuring the deformation of a quartz pendulum according to claim 4, characterized in that, The method also includes: Based on the capacitance measurement sensitivity S, the measurement range, resolution, and capacitance sampling rate of the capacitance measurement component are determined.

6. The method for measuring the deformation of a quartz pendulum according to claim 4, characterized in that, The step of determining a preset distance d between the quartz pendulum and the electrode, and determining the capacitance C between the quartz pendulum and the electrode based on the preset distance d, includes: Obtain the structural and physical parameters of the quartz pendulum; Based on the structural and physical parameters, the preset distance d and the electrical capacity C are determined using the finite element simulation analysis method.

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