A sheet-type temperature sensor and a manufacturing method thereof

Abstract

The present application relates to a kind of wafer temperature sensor and its manufacturing method.The wafer temperature sensor specifically includes the sheath that can be heat-conducting, the cavity of the sheath is used to place the temperature sensing device insulated by insulator;The temperature sensing device is used to convert temperature variable into electrical signal output, including temperature sensor element and circuit board;The circuit board one end is electrically connected with temperature sensor element, and the other end is provided with lead-out wire to connect external device.The present application can effectively enhance the compression strength of wafer sensor, improve the heat conduction performance of sensor, while controlling the water vapor content in temperature sensor.

Description

Technical Field

[0001] This invention relates to the field of temperature detection, and in particular to a thin-film temperature sensor and its manufacturing method. Background Technology

[0002] Measuring temperatures within confined spaces is essential in many fields, particularly in machinery manufacturing, electrical equipment, and weaponry. Monitoring the temperature of gaps between components is crucial for ensuring product quality and reliability. These gaps are typically very small, with intervals on the order of millimeters, making it difficult for ordinary sensors to be placed within them for measurement. This is especially true when measuring narrow gaps under pressure, where traditional sensors are simply ineffective. Due to the significant technical challenges of measuring such narrow gaps, some application areas have struggled to solve this problem despite decades of effort. Through years of experience and research, thin-film metal temperature sensors have been developed, possessing unique characteristics such as compressive strength, low moisture content, and rapid heat conduction, making them suitable for temperature detection in confined spaces.

[0003] Currently, commonly used sensors for measuring narrow gaps generally use armored thermocouples, armored resistance temperature detectors (RTDs), or non-metallic RTDs. Their respective disadvantages are: 1. They measure temperature at a point rather than on a surface; 2. They are circular temperature measuring rods, and the temperature contact surface is a line rather than a surface; 3. Non-metallic materials have low compressive strength. Metallic thin-film temperature sensors solve all of the above disadvantages. Summary of the Invention

[0004] The technical problem to be solved by the present invention is to provide a thin-film temperature sensor and its manufacturing method, which can effectively measure the temperature of narrow gaps and has the advantages of high compressive strength, low water vapor content and rapid heat conduction.

[0005] The technical solution adopted by the present invention to solve its technical problem is as follows: a thin-film temperature sensor is provided, including a heat-conducting sheath, the cavity of which is used to house a temperature sensing device that is insulated by an insulating material; the temperature sensing device is used to convert temperature variables into electrical signal output, including a temperature sensor element and a circuit board; one end of the circuit board is electrically connected to the temperature sensor element, and the other end is provided with a lead wire to connect to an external device.

[0006] Furthermore, the cavity of the sheath is a wedge-shaped structure that gradually expands from the first end to the last end. The temperature sensing device is pushed into the sheath from the last end by external force, and an interference fit is formed between the sheath and the temperature sensing device which is wrapped and insulated by insulating material.

[0007] Furthermore, the sheath has an encapsulation structure at both ends to control moisture content.

[0008] Furthermore, the temperature sensor element is a thin-film temperature sensor made of metal.

[0009] Furthermore, the circuit board is a double-sided circuit board, and each side of the double-sided circuit board is provided with wiring terminals for electrical connection to different pins of the temperature sensor element.

[0010] Furthermore, the cavity of the sheath has a wedge-shaped structure of 15° to 25°.

[0011] Furthermore, the sheath is rectangular in shape.

[0012] Furthermore, the sheath is made of metal.

[0013] Furthermore, the sheath is made of a corrosion-resistant and high-temperature-resistant material.

[0014] The present invention also provides a method for manufacturing the above-mentioned thin-film temperature sensor, comprising the following steps:

[0015] (1) Make a temperature sensing device, electrically connect one end of the circuit board to the temperature sensor element, and set the other end to the lead wire to connect to the external device.

[0016] (2) Select a thermally conductive material to make a sheath, and the sheath has a wedge-shaped cavity inside for placing the temperature sensing device;

[0017] (3) After the temperature sensing device is wrapped with insulating material, it is pushed in from the end of the sheath, and the temperature sensing device is fully inserted into the sheath to form an interference fit.

[0018] (4) The two ends of the sheath are sealed.

[0019] Beneficial effects

[0020] Due to the adoption of the above technical solution, the present invention has the following advantages and positive effects compared with the prior art: The present invention pushes the thin-film sensor that has been wrapped with insulation into the wedge-shaped cavity of the sheath, so that the two are interference fit, and further encapsulates both ends of the sheath, so that the thin-film temperature sensor can effectively measure the temperature of narrow gaps, and has the advantages of high compressive strength, low moisture content and rapid heat conduction. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the structure of the first embodiment of the present invention;

[0022] Figure 2 This is a schematic diagram illustrating the working principle of the second embodiment of the present invention. Detailed Implementation

[0023] The present invention will be further illustrated below with reference to specific embodiments. It should be understood that these embodiments are for illustrative purposes only and are not intended to limit the scope of the invention. Furthermore, it should be understood that after reading the teachings of this invention, those skilled in the art can make various alterations or modifications to the invention, and these equivalent forms also fall within the scope defined by the appended claims.

[0024] The first embodiment of the present invention relates to a thin-film temperature sensor, such as... Figure 1 As shown, the device includes a thermally conductive sheath 2, the cavity of which houses a temperature sensing device insulated by an insulating material 4. The temperature sensing device, which converts temperature variations into electrical signals, includes a temperature sensor element 1 and a circuit board 3. One end of the circuit board 3 is electrically connected to the temperature sensor element 1, and the other end has a lead wire 5 for connecting to an external device.

[0025] The cavity of the sheath 2 is a wedge-shaped structure that gradually expands from the first end to the last end. The temperature sensing device, which is wrapped and insulated by the insulating material 4, is pushed in from the last end of the sheath 2 by external force, and the two form an interference fit. The first end 6 and the last end 7 of the sheath 2 adopt an encapsulation structure to control the moisture content.

[0026] In some preferred embodiments of this invention, the temperature sensor element 1 is a thin-film metal temperature sensor, and the circuit board 3 is a double-sided circuit board with terminals on both sides connected to different pins of the temperature sensor element. The sheath 2 is rectangular in shape and is made of corrosion-resistant and high-temperature-resistant metal material through hot pressing and metal processing. This allows the thin-film temperature sensor to have a longer service life when used to measure objects with a certain degree of corrosiveness.

[0027] Specifically, the sheath 2 has a rectangular shape with dimensions of 435*18*3.2 mm (length*width*thickness), and the cavity has a wedge-shaped structure of 15°–25°, made of 316L or 904L stainless steel. When the sheath 2 with the above parameters was tested, its compressive strength, low moisture content, and rapid heat conduction were measured as follows: significant compressive strength (planar static pressure not less than 0.28 MPa), low moisture content (not more than 2000 ppm), and rapid heat conduction (thermal response time τ0.5 less than 15 seconds). Existing temperature measurement methods cannot achieve these three technical indicators.

[0028] The second embodiment of the present invention relates to a method for manufacturing the above-mentioned thin-film temperature sensor, specifically including the following steps:

[0029] (1) Make a temperature sensing device, connect one end of the circuit board 3 to the temperature sensor element 1 electrically, and set the other end of the lead wire 5 to connect to an external device.

[0030] (2) Select a thermally conductive material to make a sheath 2. Inside the sheath 2 is a wedge-shaped cavity for placing a temperature sensing device.

[0031] (3) Figure 2 As shown, after the temperature sensing device is wrapped with insulating material 4 for insulation, it is pushed in from the end of the sheath 2 so that the temperature sensing device is completely inserted into the sheath 2 to form an interference fit.

[0032] (4) The first end 6 and the last end 7 of the sheath 2 are sealed.

[0033] In summary, this invention achieves the function of effectively measuring the temperature of narrow gaps by pushing the already insulated thin-film sensor element into the wedge-shaped cavity of the sheath with a certain external force to form an interference fit, and by encapsulating the first and second ends of the sheath. This gives the thin-film temperature sensor the characteristics of high compressive strength, low moisture content and rapid heat conduction.

Claims

1. A thin-film temperature sensor, characterized in that, include: A thermally conductive sheath, the cavity of which is a wedge-shaped structure that gradually widens from one end to the other, is used to house a temperature sensing device that is insulated by an insulating material. The temperature sensing device is pushed into the sheath from the end by an external force. The sheath is made of metal and forms an interference fit with the temperature sensing device. The beginning and end of the sheath are encapsulated to control moisture content. The temperature sensing device is used to convert temperature variables into electrical signal outputs and includes a temperature sensor element and a circuit board. One end of the circuit board is electrically connected to the temperature sensor element, and the other end is provided with a lead wire to connect to an external device.

2. The thin-film temperature sensor according to claim 1, characterized in that, The temperature sensor element is a thin metal sheet-shaped temperature sensor.

3. The thin-film temperature sensor according to claim 1, characterized in that, The circuit board is a double-sided circuit board, and each side of the double-sided circuit board is provided with wiring terminals for electrical connection to different pins of the temperature sensor element.

4. The thin-film temperature sensor according to claim 1, characterized in that, The cavity of the sheath is a wedge-shaped structure with an angle of 15° to 25°.

5. The thin-film temperature sensor according to claim 1, characterized in that, The sheath is rectangular in shape.

6. The thin-film temperature sensor according to claim 1, characterized in that, The sheath is made of corrosion-resistant and high-temperature-resistant materials.

7. A method for manufacturing a thin-film temperature sensor as described in any one of claims 1-6, characterized in that, Includes the following steps: (1) Make a temperature sensing device, connect one end of the circuit board to the temperature sensor element electrically, and set the other end to the lead wire to connect to the external device; (2) Select a thermally conductive material to make a sheath, and the sheath has a wedge-shaped cavity inside for placing the temperature sensing device; (3) After the temperature sensing device is wrapped with insulating material, it is pushed in from the end of the sheath, and the temperature sensing device is completely inserted into the sheath to form an interference fit. (4) The two ends of the sheath are sealed.

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