Calibration method and device for worktable gb matrix

Abstract

The application provides a workpiece table GB matrix calibration method and device, and relates to the technical field of workpiece tables. The workpiece table comprises at least one motor. The method comprises the following steps: acquiring an output point coordinate of the motor; acquiring an actual mass center coordinate of the workpiece table; obtaining an actual output matrix of the workpiece table according to the output point coordinate of the motor and the actual mass center coordinate of the workpiece table; and obtaining a calibrated GB matrix according to the actual output matrix of the workpiece table. The technical scheme provided by the application can more simply and accurately calibrate the GB matrix.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of workpiece table, in particular to a workpiece table GB matrix calibration method and device. BACKGROUND

[0002] GB (Gain Balance) matrix converts the force and torque on each axis of the workpiece table to each motor. Currently, the workpiece table is a 6-DOF (Degree of Freedom) system, and controlling the workpiece table in different DOF may cause coupling. For example, if the position or direction of one of the motors is not accurate enough, it will not only act in the intended DOF, but also in other DOFs. Therefore, the GB matrix of the workpiece table needs to be calibrated to reduce the coupling.

[0003] The existing GB matrix calibration method is mostly complex and cannot obtain accurate calibration results. SUMMARY

[0004] To solve the above problems in the prior art, the present application provides a workpiece table GB matrix calibration method and device, which can more simply and accurately calibrate the GB matrix.

[0005] To achieve the above purpose, the technical solution of the present application is as follows:

[0006] In a first aspect, the present application provides a workpiece table GB matrix calibration method, the workpiece table comprising at least one motor, and the method comprising:

[0007] obtaining the output point coordinates of the motor;

[0008] obtaining the actual centroid coordinates of the workpiece table;

[0009] obtaining the actual output matrix of the workpiece table according to the output point coordinates of the motor and the actual centroid coordinates of the workpiece table;

[0010] obtaining the calibrated GB matrix according to the actual output matrix of the workpiece table.

[0011] Preferably, the actual centroid coordinates of the workpiece table are obtained, specifically comprising:

[0012] obtaining the theoretical centroid coordinates of the workpiece table;

[0013] obtaining the controller output value of the DOF of the workpiece table;

[0014] obtaining the actual value of the DOF output of the workpiece table;

[0015] The actual centroid coordinate of the workpiece table is obtained according to the theoretical centroid coordinate of the workpiece table, the controller output value of the degree of freedom of the workpiece table and the actual value of the output force of the degree of freedom of the workpiece table.

[0016] Preferably, the workpiece table comprises an X axis, a Y axis and a Z axis; the controller output value of the degree of freedom of the workpiece table comprises a torque controller output value around the X axis, a torque controller output value around the Y axis and a torque controller output value around the Z axis; the actual value of the output force of the degree of freedom of the workpiece table comprises an actual value of the output force in the X direction, an actual value of the output force in the Y direction and an actual value of the output force in the Z direction; and the actual centroid coordinate of the workpiece table is obtained according to the theoretical centroid coordinate of the workpiece table, the controller output value of the degree of freedom of the workpiece table and the actual value of the output force of the degree of freedom of the workpiece table, comprising:

[0017] The following equation is solved to obtain the actual centroid coordinate of the workpiece table:

[0018] Tc x =(c-cf)*F y +(bf-b)*F z

[0019] Tc y =(cf-c)*F x +(a-af)*F z

[0020] Tc z =(b-bf)*F x +(af-a)*F y

[0021] wherein (af, bf, cf) is the actual centroid coordinate of the workpiece table; (a, b, c) is the theoretical centroid coordinate of the workpiece table; F x is the actual value of the output force in the X direction, F y is the actual value of the output force in the Y direction, F z is the actual value of the output force in the Z direction; Tc x is the torque controller output value around the X axis, Tc y is the torque controller output value around the Y axis, Tc z is the torque controller output value around the Z axis.

[0022] Preferably, the actual output torque matrix of the workpiece table is obtained according to the output force point coordinate of the motor and the actual centroid coordinate of the workpiece table, comprising:

[0023] The output point coordinates of the motor and the actual mass center coordinates of the workpiece table are substituted into a preset matrix to obtain an actual output matrix of the workpiece table; wherein the preset matrix is obtained according to the output point coordinates of the motor and the theoretical mass center coordinates of the workpiece table.

[0024] Preferably, the method further comprises:

[0025] The actual output matrix of the workpiece table is calculated to obtain the calibrated GB matrix.

[0026] In a second aspect, an embodiment of the present application provides a workpiece table GB matrix calibration device, the workpiece table comprising at least one motor, the device comprising:

[0027] A first coordinate acquisition unit is configured to acquire the output point coordinates of the motor.

[0028] A second coordinate acquisition unit is configured to acquire the actual mass center coordinates of the workpiece table.

[0029] An actual output matrix acquisition unit is configured to obtain the actual output matrix of the workpiece table according to the output point coordinates of the motor and the actual mass center coordinates of the workpiece table.

[0030] A calibration unit is configured to obtain a calibrated GB matrix according to the actual output matrix of the workpiece table.

[0031] Preferably, the second coordinate acquisition unit comprises:

[0032] A third coordinate acquisition unit is configured to acquire the theoretical mass center coordinates of the workpiece table.

[0033] A first degree of freedom output acquisition unit is configured to acquire the controller output value of the degree of freedom of the workpiece table.

[0034] A second degree of freedom output acquisition unit is configured to acquire the actual value of the degree of freedom output of the workpiece table.

[0035] A second coordinate acquisition subunit is configured to obtain the actual mass center coordinates of the workpiece table according to the theoretical mass center coordinates of the workpiece table, the controller output value of the degree of freedom of the workpiece table, and the actual value of the degree of freedom output of the workpiece table.

[0036] Preferably, the workpiece table comprises an X-axis, a Y-axis and a Z-axis; the controller output values of the degrees of freedom of the workpiece table comprise a torque controller output value around the X-axis, a torque controller output value around the Y-axis and a torque controller output value around the Z-axis; the actual values of the output forces of the degrees of freedom of the workpiece table comprise an actual value of an output force in the X-direction, an actual value of an output force in the Y-direction and an actual value of an output force in the Z-direction; the second coordinate acquisition subunit obtains the actual centroid coordinates of the workpiece table in the following manner:

[0037] Solve the following equations to obtain the actual centroid coordinates of the workpiece table:

[0038] Tc x = (c-cf) * F y + (bf-b) * F z

[0039] Tc y = (cf-c) * F x + (a-af) * F z

[0040] Tc z = (b-bf) * F x + (af-a) * F y

[0041] Where (af, bf, cf) are the actual centroid coordinates of the workpiece table; (a, b, c) are the theoretical centroid coordinates of the workpiece table; F x is the actual value of the output force in the X-direction, F y is the actual value of the output force in the Y-direction, F z is the actual value of the output force in the Z-direction; Tc x is the torque controller output value around the X-axis, Tc y is the torque controller output value around the Y-axis, Tc z is the torque controller output value around the Z-axis.

[0042] Preferably, the actual output force matrix acquisition unit obtains the actual output force matrix of the workpiece table in the following manner:

[0043] Substitute the output force point coordinates of the motor and the actual centroid coordinates of the workpiece table into a preset matrix to obtain the actual output force matrix of the workpiece table; wherein the preset matrix is obtained according to the output force point coordinates of the motor and the theoretical centroid coordinates of the workpiece table.

[0044] Preferably, the calibration unit obtains the calibrated GB matrix in the following manner:

[0045] Calculate the inverse matrix of the actual output matrix of the worktable to obtain the calibrated GB matrix.

[0046] The worktable GB matrix calibration method and device provided by the embodiment of the application can calibrate the worktable GB matrix according to the motor position of the worktable and the actual centroid position of the worktable, and the technical solution provided by the embodiment of the application is simpler than the prior art and can obtain more accurate calibration results. BRIEF DESCRIPTION OF DRAWINGS

[0047] The scope of the present disclosure can be better understood by reading the following detailed description of exemplary embodiments when read in conjunction with the attached drawings in which:

[0048] Figure 1 The method flowchart of the embodiment of the application is shown in the figure.

[0049] Figure 2 The device structure diagram of the embodiment of the application is shown in the figure. DETAILED DESCRIPTION

[0050] In order to make the purpose, technical scheme and advantages of the application clearer, the implementation method of the application will be described in detail below in conjunction with the drawings and embodiments, so that the implementation process of the application can be fully understood and implemented by applying technical means to solve technical problems and achieve technical effects.

[0051] In the following description, many specific details are set forth in order to provide a thorough understanding of the application, but the application can also be implemented in other ways different from those described herein, therefore, the scope of protection of the application is not limited by the specific embodiments disclosed below.

[0052] Example One

[0053] The embodiment of the application provides a worktable GB matrix calibration method, and the worktable comprises at least one motor, such as Figure 1 As shown in the figure, the method provided by the embodiment of the application comprises steps S101, S102, S103 and S104, and the specific contents of these steps are described in detail as follows:

[0054] Step S101, acquiring the output point coordinates of the motor;

[0055] In the embodiment, the workpiece table comprises a coarse motion table and a fine motion table, wherein the coarse motion table comprises motors X1, X2, Y1 and Y2. The embodiment takes the GB matrix calibration of the coarse motion table as an example, and the GB matrix calibration of the fine motion table is the same as that of the coarse motion table.

[0056] Specifically, for each motor of the coarse motion table, the output point coordinate of the motor is known, and the theoretical mass center coordinate of the coarse motion table is known, which can be obtained by looking up a table.

[0057] For example, the Y direction coordinate of the X1 motor of the coarse motion table can be represented by L_X1_Y, and other distances are represented in a similar manner.

[0058] In step S102, the actual mass center coordinate of the workpiece table is obtained.

[0059] In the embodiment, the actual mass center coordinate of the workpiece table is obtained by obtaining the theoretical mass center coordinate of the workpiece table, obtaining the controller output value of the degree of freedom of the workpiece table, obtaining the actual value of the output of the degree of freedom of the workpiece table, and obtaining the actual mass center coordinate of the workpiece table according to the theoretical mass center coordinate of the workpiece table, the controller output value of the degree of freedom of the workpiece table and the actual value of the output of the degree of freedom of the workpiece table.

[0060] In the embodiment, the workpiece table comprises an X axis, a Y axis and a Z axis, the controller output value of the degree of freedom of the workpiece table comprises a torque controller output value around the X axis, a torque controller output value around the Y axis and a torque controller output value around the Z axis, the actual value of the output of the degree of freedom of the workpiece table comprises an actual value of the output in the X direction, an actual value of the output in the Y direction and an actual value of the output in the Z direction, and the actual mass center coordinate of the workpiece table is obtained according to the theoretical mass center coordinate of the workpiece table, the controller output value of the degree of freedom of the workpiece table and the actual value of the output of the degree of freedom of the workpiece table by solving the following equation:

[0061] Tc x = (c-cf) * F y + (bf-b) * F z

[0062] Tc y = (cf-c) * F x + (a-af) * F z

[0063] Tc z = (b-bf) * F x + (af-a) * F y

[0064] Wherein, (af, bf, cf) is the actual mass center coordinate of the worktable; (a, b, c) is the theoretical mass center coordinate of the worktable; F x is the actual value of the output in the X direction, F y is the actual value of the output in the Y direction, F z is the actual value of the output in the Z direction; Tc x is the torque controller output value around the X axis, Tc y is the torque controller output value around the Y axis, Tc z is the torque controller output value around the Z axis.

[0065] Specifically, taking the coarse motion table as an example, the theoretical mass center coordinate of the coarse motion table can be obtained by looking up the table. The output process of the coarse motion table is as follows: the six-degree-of-freedom error first enters the controller, and the six-degree-of-freedom output is output by the controller, which is then distributed to each motor of the coarse motion table through the theoretical output matrix (i.e. the inverse of the theoretical GB matrix), and then the output of the motor is converted into actual six-degree-of-freedom output through the inverse of the actual GB matrix, which acts on the worktable to produce displacement in each degree of freedom. That is, the theoretical six-degree-of-freedom output calculated by the controller has the following relationship with the actual six-degree-of-freedom output:

[0066]

[0067] Wherein, F x , F y , F z , T x , T y , T z is the actual six-degree-of-freedom output; Fc x , Fc y , Fc z , Tc x , Tc y , Tc z is the controller six-degree-of-freedom output, i.e. the above-mentioned torque controller output value around the X axis, torque controller output value around the Y axis, torque controller output value around the Z axis; B is the set value of the actual output matrix of the coarse motion table; A is the set value of the theoretical output matrix of the coarse motion table.

[0068] Suppose the theoretical mass center coordinate of the coarse motion table is (a, b, c), the actual mass center coordinate of the coarse motion table is (af, bf, cf), the Y direction coordinate of the output point of the X1 motor of the coarse motion table is "L_X1_Y", and the distances of the other motors are defined according to this standard, then the set value of the theoretical output matrix A matrix of the coarse motion table is:

[0069]

[0070] The set value of the actual output matrix B of the coarse stage is:

[0071]

[0072] The relationship between the calculated theoretical six-degree-of-freedom output and the actual six-degree-of-freedom output is:

[0073]

[0074] (B*A -1 ) -1 After simplification, we have:

[0075]

[0076] In the closed-loop floating state, if the GB matrix is optimal, the values of T x , T y , and T z should all be zero. The closed-loop floating state is the initial state of the worktable, in which the output of each degree of freedom is obtained without movement. According to this principle, the above simplified matrix, and the relationship between the theoretical six-degree-of-freedom output and the actual six-degree-of-freedom output, we can obtain a system of three equations:

[0077] Tc x = (c-cf) * F y + (bf-b) * F z

[0078] Tc y = (cf-c) * F x + (a-af) * F z

[0079] Tc z = (b-bf) * F x + (af-a) * F y

[0080] Solving these three equations, we can obtain the actual centroid position coordinates (af, bf, cf) of the coarse stage.

[0081] In practical applications, the theoretical value of the vertical centroid position is not much different from the actual value. Therefore, in this embodiment, c = cf, and the above system of equations can be simplified as:

[0082] Tc x = (bf-b) * F z

[0083] Tc y = (a-af) * F z

[0084] Solving the equation set, the actual mass center position coordinates (af, bf, cf) of the coarse motion stage can also be obtained.

[0085] In step S103, the actual output matrix of the workpiece stage is obtained according to the output point coordinates of the motor and the actual mass center coordinates of the workpiece stage.

[0086] In the embodiment, the actual output matrix of the workpiece stage is obtained according to the output point coordinates of the motor and the actual mass center coordinates of the workpiece stage, which includes: substituting the output point coordinates of the motor and the actual mass center coordinates of the workpiece stage into a preset matrix to obtain the actual output matrix of the workpiece stage; wherein the preset matrix is obtained according to the output point coordinates of the motor and the theoretical mass center coordinates of the workpiece stage.

[0087] In the embodiment, the preset matrix is the set value of the B matrix in step S102, which is based on the output point coordinates of each motor of the coarse motion stage and the theoretical mass center coordinates of the coarse motion stage, and is obtained according to the torque balance principle.

[0088] Specifically, the output of each degree of freedom of the coarse motion stage is generated by the resultant force of each motor in the degree of freedom. For example, the output in the X direction is generated by the X direction output of each motor, but only X1 and X2 motors have X direction output, so the X direction output is the sum of the X direction output of X1 and X2 motors. For torque, torque is equal to force multiplied by force arm, for example, for torque Tc x According to the relative position of a certain motor and the mass center of the coarse motion stage, the output of two Y direction motors and all Z direction outputs will affect it, so the above forces are multiplied by the respective force arms, which is the torque around the X axis. According to the above theory, the relationship between the six degree of freedom output and the output of each motor can be obtained, that is, the above preset matrix.

[0089] Specifically, the output point coordinates L_X1_Y, L_Y1_Y, L_X2_Y, L_Y2_Y, L_X1_X, L_Y1_X, L_X2_X, L_Y2_X of each motor obtained in step S101 and the actual mass center coordinates (af, bf, cf) of the coarse motion stage obtained in step S102 are brought into the set value of the B matrix in step S102, that is, the specific numerical value of the actual output matrix of the coarse motion stage is obtained.

[0090] In step S104, the calibrated GB matrix is obtained according to the actual output matrix of the workpiece stage.

[0091] In the embodiment, the calibrated GB matrix is obtained according to the actual output matrix of the workpiece stage, which includes: calculating the inverse matrix of the actual output matrix of the workpiece stage to obtain the calibrated GB matrix.

[0092] Specifically, the specific value of the actual output matrix of the coarse stage obtained in step S103 is inversed, and the specific value of the calibrated GB matrix is obtained.

[0093] The worktable GB matrix calibration method provided by the embodiment of the application obtains the actual output matrix of the worktable according to the motor output point coordinates and the actual centroid coordinates of the worktable, and obtains the calibrated GB matrix according to the actual output matrix of the worktable, so that the worktable GB matrix can be calibrated according to only the motor position of the worktable and the actual centroid position of the worktable, and compared with the prior art, the technical solution provided by the embodiment of the application is simpler and can obtain more accurate calibration results.

[0094] Example Two

[0095] Corresponding to the method embodiment, the application further provides a worktable GB matrix calibration device, the worktable comprising at least one motor, such as Figure 2 As shown in the figure, the device comprises:

[0096] A first coordinate acquisition unit 201 is configured to acquire the motor output point coordinates.

[0097] A second coordinate acquisition unit 202 is configured to acquire the actual centroid coordinates of the worktable.

[0098] An actual output matrix acquisition unit 203 is configured to acquire the actual output matrix of the worktable according to the motor output point coordinates and the actual centroid coordinates of the worktable.

[0099] A calibration unit 204 is configured to acquire the calibrated GB matrix according to the actual output matrix of the worktable.

[0100] In the embodiment, the second coordinate acquisition unit 202 comprises:

[0101] A third coordinate acquisition unit is configured to acquire the theoretical centroid coordinates of the worktable.

[0102] A first degree of freedom output acquisition unit is configured to acquire the controller output value of the degree of freedom of the worktable.

[0103] A second degree of freedom output acquisition unit is configured to acquire the actual value of the degree of freedom output of the worktable.

[0104] A second coordinate acquisition subunit is configured to acquire the actual centroid coordinates of the worktable according to the theoretical centroid coordinates of the worktable, the controller output value of the degree of freedom of the worktable and the actual value of the degree of freedom output of the worktable.

[0105] In this embodiment, the worktable includes an X axis, a Y axis and a Z axis; the controller output values of the degrees of freedom of the worktable include a torque controller output value around the X axis, a torque controller output value around the Y axis and a torque controller output value around the Z axis; the actual values of the output forces of the degrees of freedom of the worktable include an actual value of an output force in the X direction, an actual value of an output force in the Y direction and an actual value of an output force in the Z direction; and the second coordinate acquisition subunit obtains the actual centroid coordinates of the worktable in the following manner:

[0106] Solve the following equation to obtain the actual centroid coordinates of the worktable:

[0107] Tc x = (c-cf) * F y + (bf-b) * F z

[0108] Tc y = (cf-c) * F x + (a-af) * F z

[0109] Tc z = (b-bf) * F x + (af-a) * F y

[0110] where (af, bf, cf) are the actual centroid coordinates of the worktable; (a, b, c) are the theoretical centroid coordinates of the worktable; F x is the actual value of the output force in the X direction, F y is the actual value of the output force in the Y direction, F z is the actual value of the output force in the Z direction; Tc x is the torque controller output value around the X axis, Tc y is the torque controller output value around the Y axis, and Tc z is the torque controller output value around the Z axis.

[0111] In this embodiment, the actual output force matrix acquisition unit 203 obtains the actual output force matrix of the worktable in the following manner:

[0112] Substitute the output point coordinates of the motor and the actual centroid coordinates of the worktable into a preset matrix to obtain the actual output force matrix of the worktable; wherein the preset matrix is obtained according to the output point coordinates of the motor and the theoretical centroid coordinates of the worktable.

[0113] In this embodiment, the calibration unit 204 obtains the calibrated GB matrix in the following manner:

[0114] calculating an inverse matrix of the actual output matrix of the worktable to obtain the calibrated GB matrix.

[0115] The working principle, working process and the like of the device relate to the content of the specific implementation of the worktable GB matrix calibration method provided by the application, and the same technical content will not be described in detail here.

[0116] The worktable GB matrix calibration device provided by the embodiment of the application obtains the actual output matrix of the worktable according to the motor output point coordinates and the actual centroid coordinates of the worktable, and obtains the calibrated GB matrix according to the actual output matrix of the worktable, so that the application can calibrate the worktable GB matrix only according to the motor position of the worktable and the actual centroid position of the worktable, and compared with the prior art, the technical solution provided by the embodiment of the application is simpler and can obtain more accurate calibration results.

[0117] Example Three

[0118] According to the embodiment of the application, a storage medium is also provided, and program code is stored on the storage medium, and the program code is executed by a processor to implement the worktable GB matrix calibration method according to any one of the above embodiments.

[0119] Example Four

[0120] According to the embodiment of the application, an electronic device is also provided, and the electronic device includes a memory and a processor, and program code executable on the processor is stored on the memory, and the program code is executed by the processor to implement the worktable GB matrix calibration method according to any one of the above embodiments.

[0121] The worktable GB matrix calibration method, device, storage medium and electronic device provided by the embodiment of the application obtain the actual output matrix of the worktable according to the motor output point coordinates and the actual centroid coordinates of the worktable, and obtain the calibrated GB matrix according to the actual output matrix of the worktable, so that the application can calibrate the worktable GB matrix only according to the motor position of the worktable and the actual centroid position of the worktable, and compared with the prior art, the technical solution provided by the embodiment of the application is simpler and can obtain more accurate calibration results.

[0122] In several embodiments provided in the present application, it should be understood that the disclosed apparatus and method can be implemented in other manners. For example, the described apparatus embodiments are merely schematic. The division of the units is merely logical function division. There can be another division manner in actual implementation. For example, a plurality of units or components can be combined or integrated into another system, or some features can be ignored or not executed. In this way, the actual division of the units can be different from the logical function division.

[0123] The units described as separated components can or can not be physically separated, and the components displayed as units can or can not be physical units, i.e., can be located in one place or can be distributed on a plurality of network units. Some or all of the units can be selected according to actual needs to achieve the purposes of the embodiments of the present application.

[0124] In addition, each functional unit in the various embodiments of the present application can be integrated in one processing unit, or each unit can exist physically, or two or more units can be integrated in one unit. The integrated unit can be implemented in the form of hardware or in the form of a software functional unit.

[0125] If the integrated unit is implemented in the form of a software functional unit and sold or used as an independent product, it can be stored in a computer readable storage medium. Based on such an understanding, the technical solutions of the present application essentially or substantially, or all or part of the technical solutions, can be embodied in the form of a software product. The computer software product is stored in a storage medium, and includes a number of instructions for causing an electronic device (which can be a personal computer, a server, or a network device, etc.) to perform all or part of the steps of the methods in the various embodiments of the present application. The aforementioned storage medium includes: a U disk, a mobile hard disk, a read-only memory (ROM, Read-Only Memory), a random access memory (RAM, Random Access Memory), a magnetic disk or an optical disk, and various other media that can store program codes.

[0126] Although the disclosed embodiments of the present application are as above, the content described is only for the convenience of understanding the embodiments adopted by the present application, and is not intended to limit the present application. Any person skilled in the art of the present application can make any modification and change in the implementation form and details without departing from the spirit and scope of the present application. The protection scope of the present application shall be subject to the scope defined by the appended claims.

Claims

1. A calibration method for a workpiece stage GB matrix, characterized in that, The workpiece stage includes at least one motor, and the method includes: Obtain the coordinates of the motor's output point; Obtain the actual centroid coordinates of the workpiece stage; The actual output matrix of the workpiece stage is obtained based on the output point coordinates of the motor and the actual centroid coordinates of the workpiece stage. Based on the actual output matrix of the workpiece stage, obtain the calibrated GB matrix; The step of obtaining the actual centroid coordinates of the workpiece stage specifically includes: obtaining the theoretical centroid coordinates of the workpiece stage; obtaining the controller output values ​​of the degrees of freedom of the workpiece stage; obtaining the actual values ​​of the output forces of the degrees of freedom of the workpiece stage; and obtaining the actual centroid coordinates of the workpiece stage based on the theoretical centroid coordinates of the workpiece stage, the controller output values ​​of the degrees of freedom of the workpiece stage, and the actual values ​​of the output forces of the degrees of freedom of the workpiece stage. The workpiece stage includes an X-axis, a Y-axis, and a Z-axis; the controller output values ​​for the degrees of freedom of the workpiece stage include: torque controller output values ​​around the X-axis, torque controller output values ​​around the Y-axis, and torque controller output values ​​around the Z-axis; the actual values ​​of the output forces of the degrees of freedom of the workpiece stage include: actual values ​​of the output forces in the X-direction, actual values ​​of the output forces in the Y-direction, and actual values ​​of the output forces in the Z-direction; obtaining the actual centroid coordinates of the workpiece stage based on its theoretical centroid coordinates, the controller output values ​​for the degrees of freedom of the workpiece stage, and the actual values ​​of the output forces of the degrees of freedom of the workpiece stage includes: solving the following equations to obtain the actual centroid coordinates of the workpiece stage: in, The coordinates of the actual centroid of the workpiece stage; The theoretical centroid coordinates of the workpiece stage; This is the actual value of the force output in the X direction. This is the actual value of the force output in the Y direction. This is the actual value of the force output in the Z direction; The output value of the torque controller about the X-axis. The output value of the torque controller around the Y-axis. The output value of the torque controller around the Z-axis; The theoretical six-degree-of-freedom output and the actual six-degree-of-freedom output have the following relationship: in, , , , , , For actual six degrees of freedom output; , , , , , The controller outputs force in six degrees of freedom, namely the torque controller output value around the X-axis, the torque controller output value around the Y-axis, and the torque controller output value around the Z-axis. This is the set value of the actual output force matrix of the workpiece stage; This is the set value of the theoretical output matrix of the workpiece stage; The step of obtaining the calibrated GB matrix based on the actual output matrix of the workpiece stage includes: calculating the inverse matrix of the actual output matrix of the workpiece stage to obtain the calibrated GB matrix.

2. The calibration method for the GB matrix of the workpiece stage according to claim 1, characterized in that, The step of obtaining the actual output matrix of the workpiece stage based on the output point coordinates of the motor and the actual centroid coordinates of the workpiece stage includes: The actual output force matrix of the workpiece stage is obtained by substituting the output point coordinates of the motor and the actual centroid coordinates of the workpiece stage into a preset matrix; wherein the preset matrix is ​​obtained based on the output point coordinates of the motor and the theoretical centroid coordinates of the workpiece stage.

3. A calibration device for a GB matrix of a workpiece stage, characterized in that, The workpiece stage includes at least one motor, and the device includes: The first coordinate acquisition unit is used to acquire the coordinates of the output point of the motor; The second coordinate acquisition unit is used to acquire the actual centroid coordinates of the workpiece stage. The actual output matrix acquisition unit is used to obtain the actual output matrix of the workpiece stage based on the output point coordinates of the motor and the actual centroid coordinates of the workpiece stage. The calibration unit is used to obtain the calibrated GB matrix based on the actual output force matrix of the workpiece stage. The second coordinate acquisition unit includes: a third coordinate acquisition unit for acquiring the theoretical centroid coordinates of the workpiece stage; a first degree-of-freedom output force acquisition unit for acquiring the controller output value of the degree of freedom of the workpiece stage; a second degree-of-freedom output force acquisition unit for acquiring the actual value of the degree-of-freedom output force of the workpiece stage; and a second coordinate acquisition subunit for obtaining the actual centroid coordinates of the workpiece stage based on the theoretical centroid coordinates of the workpiece stage, the controller output value of the degree of freedom of the workpiece stage, and the actual value of the degree-of-freedom output force of the workpiece stage. The workpiece stage includes an X-axis, a Y-axis, and a Z-axis; the controller output values ​​for the degrees of freedom of the workpiece stage include: torque controller output values ​​around the X-axis, torque controller output values ​​around the Y-axis, and torque controller output values ​​around the Z-axis; the actual values ​​of the output forces of the degrees of freedom of the workpiece stage include: actual values ​​of the output forces in the X-direction, actual values ​​of the output forces in the Y-direction, and actual values ​​of the output forces in the Z-direction; the second coordinate acquisition subunit obtains the actual centroid coordinates of the workpiece stage in the following manner: solving the following equations to obtain the actual centroid coordinates of the workpiece stage: in, The coordinates of the actual centroid of the workpiece stage; The theoretical centroid coordinates of the workpiece stage; This is the actual value of the force output in the X direction. This is the actual value of the force output in the Y direction. This is the actual value of the force output in the Z direction; The output value of the torque controller about the X-axis. The output value of the torque controller around the Y-axis. The output value of the torque controller around the Z-axis; The theoretical six-degree-of-freedom output and the actual six-degree-of-freedom output have the following relationship: in, , , , , , For actual six degrees of freedom output; , , , , , The controller outputs force in six degrees of freedom, namely the torque controller output value around the X-axis, the torque controller output value around the Y-axis, and the torque controller output value around the Z-axis. This is the set value of the actual output force matrix of the workpiece stage; This is the set value of the theoretical output matrix of the workpiece stage; The calibration unit obtains the calibrated GB matrix by calculating the inverse of the actual output matrix of the workpiece stage.

4. The calibration device for the GB matrix of the workpiece stage according to claim 3, characterized in that, The actual output matrix acquisition unit obtains the actual output matrix of the workpiece stage in the following manner: The actual output force matrix of the workpiece stage is obtained by substituting the output point coordinates of the motor and the actual centroid coordinates of the workpiece stage into a preset matrix; wherein the preset matrix is ​​obtained based on the output point coordinates of the motor and the theoretical centroid coordinates of the workpiece stage.

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