Analytical system, auxiliary analysis device, and analysis method

Abstract

An analysis system, an auxiliary analysis device and an analysis method are disclosed. The analysis method is used to analyze a composition of an analyte on a sample. The analysis method comprises a first heating step, a first mass spectrometry analysis step, a second heating step, a second mass spectrometry analysis step, and an analysis step. In the first heating step and the second heating step, a heating device is used to heat a non-analyte region and an analyte region of the sample, respectively. In the first mass spectrometry analysis step and the second mass spectrometry analysis step, gas generated after the sample is heated is introduced into a gas chromatograph mass spectrometer, and two pieces of analysis information are obtained. In the analysis step, the two pieces of analysis information are compared to generate analysis result information, and the analysis result information comprises a composition of at least a portion of the analyte.

Description

TECHNICAL FIELD

[0001] The present application relates to an analysis system, an auxiliary analysis device and an analysis method, in particular, an analysis system, an auxiliary analysis device and an analysis method cooperating with a gas chromatograph mass spectrometer. BACKGROUND

[0002] When a composition analysis is performed on a foreign matter on a sample (for example, a wafer) by using an existing gas chromatograph mass spectrometer, a problem that a person related to the sample cannot analyze the composition of the foreign matter from a mass spectrum output by the gas chromatograph mass spectrometer often occurs because the person related to the sample is not sure of the specific composition of the sample. SUMMARY

[0003] The present application discloses an analysis system, an auxiliary analysis device and an analysis method, which are mainly used to solve the problem that a person related to a sample cannot analyze the composition of a foreign matter on the sample from a mass spectrum output by a gas chromatograph mass spectrometer when the person related to the sample is not sure of the specific composition of the sample.

[0004] The present application discloses an analysis system for performing a composition analysis on a to-be-analyzed substance of a sample to be analyzed, the analysis system comprising: an auxiliary analysis device and a gas chromatograph mass spectrometer. The auxiliary analysis device comprises: a processing device, a chamber, a stage, a heating device and a fluid carrying module. The chamber comprises at least one movable door which can be operated to communicate the chamber with the outside; the stage is located in the chamber and is used to carry the sample; the heating device is electrically connected to the processing device; the fluid carrying module is in communication with the chamber and is used to connect a fluid supply device; the gas chromatograph mass spectrometer is connected to the fluid carrying module; wherein the processing device can execute a sampling program, and when the processing device executes the sampling program, the following steps are performed: a heating step: controlling the heating device to heat a predetermined position of the sample arranged on the stage so that the composition of at least a part of the sample at the predetermined position is thermally desorbed; a mass spectrum analysis step: controlling the fluid carrying module to act so that a fluid provided by the fluid supply device guides the gas in the chamber into the gas chromatograph mass spectrometer, and controlling the gas chromatograph mass spectrometer to analyze the guided fluid to generate an analysis information; wherein when the processing device performs the composition analysis on the sample, at least two sampling programs are executed in sequence, and then an analysis step is executed, when the processing device executes the sampling program for the first time, in the heating step, the predetermined position is a non-to-be-analyzed region of the sample; when the processing device executes the sampling program for the second time, in the heating step, the predetermined position is a to-be-analyzed region of the sample; and the analysis step is: comparing two pieces of analysis information obtained by executing the two sampling programs to generate an analysis result information, the analysis result information comprising the composition of the composition of at least a part of the to-be-analyzed substance of the sample at the to-be-analyzed region.

[0005] Optionally, the analysis system further comprises an image capturing device and a driving device, the driving device being electrically connected to the processing device, and the processing device being capable of controlling the driving device to actuate the stage and the heating device to move relative to each other, so as to allow the heating device to heat a predetermined position of the sample disposed on the stage; the processing device is further capable of executing a calibration procedure, and when the processing device executes the calibration procedure, the processing device performs the following steps: a moving step of controlling the driving device to actuate the at least one calibration position of the stage to move to the at least one corresponding calibration coordinate; an image capturing step of controlling the image capturing device to capture an image of the stage to generate a captured image; a judging step of judging whether the calibration position is located at the calibration coordinate according to the captured image; and if it is judged that the calibration position is not located at the calibration coordinate, then the calibration coordinate is modified to a coordinate corresponding to the calibration position.

[0006] Optionally, the analysis system further comprises an image capturing device and a driving device, the driving device being electrically connected to the processing device, and the processing device being capable of controlling the driving device to actuate the stage and the heating device to move relative to each other, so as to allow the heating device to heat a predetermined position of the sample disposed on the stage; the processing device is further capable of executing a calibration procedure, and when the processing device executes the calibration procedure, the processing device performs the following steps: a moving step of controlling the driving device to actuate the at least one calibration position of the stage to move to the at least one corresponding calibration coordinate; an image capturing step of controlling the image capturing device to capture an image of the stage to generate a captured image; a judging step of judging whether the calibration position is located at the calibration coordinate according to the captured image; and if it is judged that the calibration position is not located at the calibration coordinate, then the calibration coordinate is modified to a coordinate corresponding to the calibration position.

[0007] Optionally, the auxiliary analysis device further comprises a driving device connected to at least one of the stage and the heating device, and the processing device is electrically connected to the driving device, and the processing device is capable of controlling the driving device to actuate the stage and the heating device to move relative to each other; the processing device is capable of receiving a to-be-analyzed position information, and the processing device is capable of controlling the driving device to actuate the stage and the heating device to move relative to each other according to the to-be-analyzed position information, so as to allow the heating device to heat the non-to-be-analyzed region and the to-be-analyzed region of the sample disposed on the stage in sequence; wherein the processing device is capable of receiving the to-be-analyzed position information transmitted by a remote electronic device, or the processing device is capable of receiving the to-be-analyzed position information transmitted by an input device included in the auxiliary analysis device, and the input device is capable of being operated to generate the to-be-analyzed position information, and the input device is electrically connected to the processing device.

[0008] Optionally, the analysis system further comprises a temperature detecting device electrically connected to the processing device; when the processing device executes the sampling procedure, the processing device further executes a temperature judging step between the heating step and the mass spectrum analyzing step: first controlling the temperature detecting device to detect the temperature of the predetermined position, so that the temperature detecting device generates a temperature detecting information, and then judging whether the temperature of the predetermined position reaches a predetermined temperature according to the temperature detecting information; if it is judged that the temperature of the predetermined position does not reach the predetermined temperature, the heating step is executed again; if it is judged that the temperature of the predetermined position reaches the predetermined temperature, the processing device first controls the heating device to maintain the temperature of the predetermined position as the predetermined temperature, and then controls the heating device to stop heating the predetermined position, and executes the mass spectrum analyzing step.

[0009] Optionally, the temperature detecting device is a thermal image capturing device; in the temperature judging step, the processing device first controls the thermal image capturing device to capture the image of the predetermined position, so that the thermal image capturing device generates a thermal image information, and then judges whether the temperature of the predetermined position reaches the predetermined temperature according to the thermal image information.

[0010] Optionally, the auxiliary analysis equipment further comprises at least one driving device connected to at least one of the heating device and the stage; the heating device comprises an energy beam generator; the processing device can control the driving device to act, so that the energy beam generator and the stage move relative to each other, so that the energy beam generated by the energy beam generator is shot to the predetermined position of the sample arranged on the stage.

[0011] Optionally, the heating device comprises a plurality of heaters; the stage comprises a bearing plane used to bear the sample; each heater can be controlled by the processing device to heat at least one region of the bearing plane; when the processing device executes the composition analysis operation on the sample and executes two sampling procedures in sequence, the processing device controls at least one heater which is not completely same to operate in sequence.

[0012] Optionally, the analysis system further comprises a cooling device comprising a plurality of coolers; the coolers can be controlled by the processing device to reduce the temperature of at least one region of the bearing plane; when the processing device executes the sampling procedure, the processing device controls part of the heaters to act, so that the temperature of the predetermined position of the sample rises to a predetermined temperature, and the processing device further controls part of the coolers to act, so that the temperature of the region of the sample which is not the predetermined position does not rise to the predetermined temperature.

[0013] Optionally, the analysis system further comprises an image capturing device electrically connected to the processing device, wherein the processing device performs an image capturing step and an image analyzing step before performing the sampling procedure and the analysis step twice, the image capturing step comprises controlling the image capturing device to capture an image of all regions of the sample on the stage to generate a captured image, and the image analyzing step comprises analyzing the captured image to determine the region to be analyzed and the region not to be analyzed on the sample, the region to be analyzed at least covers at least a portion of the analyte.

[0014] Optionally, the carrier flow module comprises a fluid conduit, the fluid conduit comprises an inlet, a communication port and an outlet, the fluid conduit has a fluid channel therein, the fluid channel, the inlet, the communication port and the outlet are in communication with each other; the inlet is configured to be connected to the fluid supply device, the communication port is in communication with the chamber, and the outlet is connected to the GC-MS; the processing device is capable of controlling the fluid supply device to actuate the fluid to enter the fluid channel from the inlet at a predetermined speed and flow into the GC-MS from the outlet, and the fluid in the chamber is driven by the fluid to enter the fluid channel from the communication port and enter the GC-MS together with the fluid in the fluid channel.

[0015] An auxiliary analysis device is disclosed for use in connection with a gas chromatograph mass spectrometer to perform a composition analysis operation on a sample. The auxiliary analysis device comprises a processing device electrically connected to a gas chromatograph mass spectrometer; a chamber comprising at least one movable door operable to open the chamber to the outside; a stage in the chamber for holding the sample; a heating device electrically connected to the processing device; and a flow module in communication with the chamber for connecting a fluid supply device to the gas chromatograph mass spectrometer. The processing device is capable of executing a sampling procedure, which comprises a heating step of controlling the heating device to heat a predetermined location on the sample on the stage to thermally desorb at least a portion of the composition of the sample at the predetermined location, and a mass spectrometry analysis step of controlling the flow module to direct a fluid provided by the fluid supply device from the chamber to the gas chromatograph mass spectrometer, and controlling the gas chromatograph mass spectrometer to analyze the fluid directed thereto to obtain an analysis information generated by the gas chromatograph mass spectrometer. The processing device performs the composition analysis operation on the sample by executing at least two sampling procedures and an analysis step. In the first sampling procedure, the predetermined location is a non-analysis region of the sample in the heating step. In the second sampling procedure, the predetermined location is an analysis region of the sample in the heating step. The analysis step comprises comparing the two analysis information obtained from the two sampling procedures to generate an analysis result information comprising the composition of at least a portion of the analysis region of the sample.

[0016] The application discloses an analysis method for analyzing a to-be-analyzed region of a sample, the analysis method comprising: a first heating step of using a processing device to control a heating device to heat a non-to-be-analyzed region of the sample arranged in a chamber, so that at least part of the composition of the sample in the non-to-be-analyzed region is thermally desorbed; the non-to-be-analyzed region does not overlap with the to-be-analyzed region; a first mass spectrum analysis step of using the processing device to control a carrier module, so that the gas in the chamber enters a gas chromatography mass spectrometer, and the gas chromatography mass spectrometer generates a first analysis information accordingly; a second heating step of using the processing device to control the heating device to heat the to-be-analyzed region of the sample arranged in the chamber, so that at least part of the composition of the sample in the to-be-analyzed region is thermally desorbed; a second mass spectrum analysis step of using the processing device to control the carrier module, so that the gas in the chamber enters the gas chromatography mass spectrometer, and the gas chromatography mass spectrometer generates a second analysis information accordingly; and an analysis step of using the processing device to compare the first analysis information and the second analysis information, so as to generate an analysis result information, wherein the analysis result information comprises the composition of at least part of the composition of the to-be-analyzed region.

[0017] Optionally, in the first heating step, the processing device first controls a driving device to move the heating device and a carrier for carrying the sample relative to each other according to a to-be-analyzed position information, and then controls the heating device to heat the non-to-be-analyzed region; in the second heating step, the processing device first controls the driving device to move the heating device and the carrier for carrying the sample relative to each other according to the to-be-analyzed position information, and then controls the heating device to heat the to-be-analyzed region.

[0018] Optionally, in the first heating step, the processing device controls a driving device to move the heating device and a carrier for carrying the sample relative to each other according to a to-be-analyzed position information, so that the heating device can heat the non-to-be-analyzed region of the sample; in the second heating step, the processing device controls the driving device to move the heating device and the carrier relative to each other according to the to-be-analyzed position information, so that the heating device can heat the to-be-analyzed region of the sample; and before the first heating step, the analysis method further comprises: an imaging step of using the processing device to control an image capturing device to capture an image of the sample on the carrier, so as to generate a captured image, and then control a display device to display the captured image; and a position information generating step of using the processing device to convert an input information generated by an input device into the to-be-analyzed position information; wherein the input device can be operated to generate the input information when the display device displays the captured image.

[0019] Optionally, before the first heating step, there is further comprising a heating and image capturing step: using the processing device to control the heating device to heat the non-analyzed region of the sample, and using the processing device to control an image capturing device to capture an image of the non-analyzed region, so that the image capturing device generates an image information; a judging step: using the processing device to determine whether the composition of at least a portion of the non-analyzed region of the sample has been thermally desorbed according to the image information; if the processing device determines that the composition of at least a portion of the non-analyzed region of the sample has been thermally desorbed according to the image information, the processing device will calculate a heating time of the non-analyzed region of the sample according to the image information, and the processing device will then perform the first heating step, and in the first heating step and the second heating step, the processing device controls the heating device to heat the non-analyzed region and the analyzed region of the sample, respectively; if the processing device determines that the composition of at least a portion of the non-analyzed region of the sample has not been thermally desorbed according to the image information, the processing device will perform the heating and image capturing step again.

[0020] Optionally, between the first heating step and the first mass spectrometry analysis step, there is further comprising a first judging step: using the processing device to control a temperature detection device to detect the temperature of the non-analyzed region to generate a first temperature detection information, and using the processing device to determine whether the temperature of the non-analyzed region reaches a predetermined temperature according to the first temperature detection information; if the processing device determines that the temperature of the non-analyzed region does not reach the predetermined temperature, the first heating step is performed again; if the processing device determines that the temperature of the non-analyzed region reaches the predetermined temperature, the processing device controls the heating device to maintain the temperature of the non-analyzed region at the predetermined temperature for a default time, then controls the heating device to stop heating the non-analyzed region, and then performs the first mass spectrometry analysis step; between the second heating step and the second mass spectrometry analysis step, there is further comprising a second judging step: using the processing device to control the temperature detection device to detect the temperature of the analyzed region to generate a second temperature detection information, and using the processing device to determine whether the temperature of the analyzed region reaches the predetermined temperature according to the second temperature detection information; if the processing device determines that the temperature of the analyzed region does not reach the predetermined temperature, the second heating step is performed again; if the processing device determines that the temperature of the analyzed region reaches the predetermined temperature, the processing device controls the heating device to maintain the temperature of the analyzed region at the predetermined temperature for a default time, then controls the heating device to stop heating the analyzed region, and then performs the second mass spectrometry analysis step.

[0021] Optionally, in the second heating step, the processing device controls a cooling device to operate at the same time, so that the temperature of the non-analyzed region of the sample does not rise to the predetermined temperature.

[0022] Optionally, a cleaning step is further included between the first mass spectrometry analysis step and the second mass spectrometry analysis step, in which the processing device controls the carrier module to continuously direct the gas in the chamber out of the chamber for a predetermined time.

[0023] Optionally, in the first heating step, the processing device controls the heating device to heat the non-analysis region to a predetermined temperature; in the second heating step, the processing device controls the heating device to heat the analysis region to the predetermined temperature; the analysis step further includes a judging procedure, in which the processing device judges whether the similarity between the first analysis information and the second analysis information is higher than a predetermined similarity; if the processing device determines that the similarity between the first analysis information and the second analysis information is higher than the predetermined similarity, the processing device will execute an updating procedure before sequentially re-executing the first heating step, the first mass spectrometry analysis step, the second heating step, and the second mass spectrometry analysis step; the updating procedure is to update the predetermined temperature to increase the value of the original predetermined temperature; if the processing device determines that the similarity between the first analysis information and the second analysis information is lower than the predetermined similarity, the processing device will generate the analysis result information.

[0024] In summary, the analysis system, the auxiliary analysis device, and the analysis method of the present application can allow a person skilled in the art to analyze the composition of the analyte on the sample without knowing the composition of the sample.

[0025] For a more complete understanding of the features and technical content of the present application, please refer to the following detailed description and drawings of the present application, but these descriptions and drawings are only used to illustrate the present application, and do not limit the scope of protection of the present application. BRIEF DESCRIPTION OF DRAWINGS

[0026] Figure 1 A block schematic diagram of the analysis system of the present application.

[0027] Figure 2 A schematic diagram of the analysis system of the present application.

[0028] Figure 3 A flowchart of the processing device of the analysis system of the present application performing the composition operation on the sample.

[0029] Figure 4 A schematic diagram of the sample disposed on the stage of the analysis system of the present application.

[0030] Figure 5 A block schematic diagram of another embodiment of the analysis system of the present application.

[0031] Figure 6A flowchart of one embodiment of a process performed by the processing device of the analytical system of the present application to perform a composition job on a sample.

[0032] Figure 7 A flowchart of one embodiment of a process performed by the processing device of the analytical system of the present application to perform a composition job on a sample.

[0033] Figure 8 A flowchart of another embodiment of a process performed by the processing device of the analytical system of the present application to perform a composition job on a sample.

[0034] Figure 9 A top view schematic diagram of one embodiment of a stage of the analytical system of the present application.

[0035] Figure 10 A flowchart of a process performed by the processing device of the analytical system of the present application to perform a calibration procedure.

[0036] Figure 11 A flowchart of another embodiment of a process performed by the processing device of the analytical system of the present application to perform a calibration procedure.

[0037] Figure 12 A schematic diagram of another embodiment of the analytical system of the present application.

[0038] Figure 13 A flowchart of a first embodiment of the analytical method of the present application.

[0039] Figure 14 A flowchart of a second embodiment of the analytical method of the present application.

[0040] Figure 15 A flowchart of a third embodiment of the analytical method of the present application.

[0041] Figure 16 A flowchart of a fourth embodiment of the analytical method of the present application.

[0042] Figure 17 A flowchart of a fifth embodiment of the analytical method of the present application.

[0043] Figure 18 A flowchart of a sixth embodiment of the analytical method of the present application. DETAILED DESCRIPTION

[0044] In the following description, reference is made to the accompanying drawings which form a part hereof, and in which are shown by way of illustration various embodiments for carrying the application. It is to be understood that other embodiments can be used and structural or logical changes can be made without departing from the scope of the present application. The following detailed description, therefore, is not to be taken in a limiting sense, as the scope of the present application is defined by the appended claims.

[0045] Reference will now be made to the drawings in which Figures 1 to 4The analysis system Z of the present application is used to perform a set of composition analysis operations on a sample M to be analyzed. The analysis system Z comprises an auxiliary analysis device A and a gas chromatography-mass spectrometer B. The auxiliary analysis device A comprises a processing device 1, a chamber 2, a carrier 3, a heating device 4, a driving device 5 and a carrier flow module 6. The processing device 1 may, for example, comprise a microprocessor, a circuit board, etc. The driving device 5 may, for example, comprise a motor and related connecting members, but is not limited thereto.

[0046] The chamber 2 comprises a movable door 21 which can be operated to allow the chamber 2 to communicate with the outside. When the movable door 21 is closed, the chamber 2 can be substantially in a substantially closed state, and the gas outside the chamber 2 is not easy to enter the chamber 2. The carrier 3 is located in the chamber 2 and is used to carry the sample M. That is, a person or a mechanical device (such as a robot arm) can first open the movable door 21 and then place the sample M on the carrier 3. In actual applications, the carrier 3 can comprise a related holding mechanism or a limiting mechanism, so as to limit the movement range of the sample M arranged on the carrier 3 relative to the carrier 3.

[0047] The heating device 4 is electrically connected to the processing device 1. The driving device 5 can be connected to the carrier 3, and the driving device 5 is electrically connected to the processing device 1, and the processing device 1 can control the driving device 5 to move the carrier 3 relative to the heating device 4. In different embodiments, the driving device 5 can also be connected to the heating device 4, and the processing device 1 can control the driving device 5 to move the heating device 4 relative to the carrier 3. In another embodiment, the auxiliary analysis device A can also comprise two driving devices 5, and the two driving devices 5 are respectively connected to the carrier 3 and the heating device 4, and the processing device 1 can independently control any one of the driving devices 5 to move the heating device 4 and the carrier 3 relative to each other.

[0048] The carrier flow module 6 is connected to the chamber 2, and the carrier flow module 6 is used to connect a fluid supply device C, and the fluid supply device C can be controlled by the processing device 1 to provide a fluid, such as nitrogen (N2), hydrogen (H2), helium (He), inert gas, etc. carrier gas. In different embodiments, the analysis system Z can also comprise the fluid supply device C. The gas chromatography-mass spectrometer (GC-MS) B is connected to the carrier flow module 6.

[0049] Specifically, the fluid-carrying module 6 can include a fluid conduit 61, which includes an inlet 611, a communication port 612, and an outlet 613. The fluid conduit 61 has a fluid channel 614 therein, which is in communication with the inlet 611, the communication port 612, and the outlet 613. The inlet 611 is configured to be connected to the fluid supply device C, the communication port 612 is configured to be in communication with the chamber 2, and the outlet 613 is configured to be connected to the gas chromatograph mass spectrometer B. The processing device 1 is configured to control the fluid supply device C to actuate the fluid to flow into the fluid channel 614 from the inlet 611 at a predetermined speed, and then to flow into the gas chromatograph mass spectrometer B from the outlet 613. The gas in the chamber 2 can flow into the fluid channel 614 from the communication port 612 according to Bernoulli's principle, and then flow into the gas chromatograph mass spectrometer B along with the fluid in the fluid channel 614.

[0050] In one embodiment, the fluid-carrying module 6 further includes an auxiliary conduit 62, one end of which is connected to the communication port 612, and a channel 621 in the auxiliary conduit 62 is in communication with the fluid channel 614. The other end of the auxiliary conduit 62 is configured to be disposed adjacent to the stage 3.

[0051] The processing device 1 is configured to execute a sampling program, and when the processing device 1 executes the sampling program, the following steps are performed:

[0052] a heating step of controlling the heating device 4 to heat a predetermined position of the sample M disposed on the stage 3, so that at least a portion of the sample M at the predetermined position is subjected to thermal desorption;

[0053] a mass spectrometry step of controlling the fluid-carrying module 6 to actuate the fluid provided by the fluid supply device C to flow from the chamber 2 into the gas chromatograph mass spectrometer B, and controlling the gas chromatograph mass spectrometer B to analyze the fluid flowing in, so as to generate an analysis information. In actual applications, a relevant computer can be configured to control a display to display the analysis information, and a relevant person can view the general composition of the fluid through the display. Specifically, the analysis information can be displayed on the display in the form of a mass spectrum, and the relevant person can know the general composition of the fluid by viewing the mass spectrum. Of course, the analysis information is not limited to only including the mass spectrum and other related data, and the analysis information can also include other data according to requirements.

[0054] In one embodiment, the heating device 4 can include an energy beam generator, and the processing device 1 can be configured to control the driving device 5 and the heating device 4 to actuate in sequence, so that an energy beam (e.g., a laser) generated by the energy beam generator is directed to the predetermined position of the sample M, thereby heating the predetermined position of the sample M.

[0055] In another embodiment, the heating device 4 can also be a heating device 4 comprising a proximity member (not shown, for example, a rod-like structure) and a heater. When the processing device 1 controls the heating device 4 to heat a predetermined position of the sample M, the processing device 1 can first control the driving device 5 to move the proximity member to the vicinity of the predetermined position of the sample M, and then control the heater to operate so that the temperature of the end of the proximity member rises to a predetermined temperature. In this way, the heat energy generated by the proximity member can be transferred to the predetermined position of the sample M, and the temperature of the predetermined position gradually rises to the predetermined temperature.

[0056] It should be noted that the driving device 5 is mainly used to enable the heating device 4 to raise the temperature of the predetermined position of the sample M to a predetermined temperature. Therefore, in an embodiment in which the heating device 4 itself can be controlled by the processing device 1 to accurately heat the predetermined position of the sample M, the analysis system Z can not include the driving device 5.

[0057] When the processing device 1 performs a composition analysis operation on a to-be-analyzed substance W in a to-be-analyzed region M2 of the sample M, at least two sampling procedures are performed in sequence, and then an analysis step is performed. When the processing device 1 performs the sampling procedure for the first time, in the corresponding heating step, the predetermined position is a non-to-be-analyzed region M1 of the sample M. When the processing device 1 performs the sampling procedure for the second time, in the corresponding heating step, the predetermined position is a to-be-analyzed region M2 of the sample M. The analysis step is: comparing two pieces of analysis information B1, B2 obtained by performing the two sampling procedures to generate an analysis result information 11, the analysis result information 11 including the composition of at least a part of the composition of the to-be-analyzed substance W in the to-be-analyzed region M2 of the sample M. The non-to-be-analyzed region M1 does not overlap with the to-be-analyzed region M2, the to-be-analyzed substance is arranged in the to-be-analyzed region M2, and the to-be-analyzed substance is thermally desorbed after being heated when the processing device 1 performs the sampling procedure for the second time.

[0058] That is, as shown in FIG. 6, when the processing device 1 performs a composition analysis operation on the sample M, a heating step S11, a mass spectrometry analysis step S12, a heating step S21, a mass spectrometry analysis step S22, and an analysis step S3 are sequentially performed. The heating step S11 and the mass spectrometry analysis step S22 are steps corresponding to the first sampling procedure performed by the processing device 1. The heating step S21 and the mass spectrometry analysis step S22 are steps corresponding to the second sampling procedure performed by the processing device 1. Figure 3 As shown in FIG. 6, when the processing device 1 performs a composition analysis operation on the sample M, a heating step S11, a mass spectrometry analysis step S12, a heating step S21, a mass spectrometry analysis step S22, and an analysis step S3 are sequentially performed. The heating step S11 and the mass spectrometry analysis step S22 are steps corresponding to the first sampling procedure performed by the processing device 1. The heating step S21 and the mass spectrometry analysis step S22 are steps corresponding to the second sampling procedure performed by the processing device 1.

[0059] Figures 1 to 4 As shown in FIG. 6, when the processing device 1 performs a composition analysis operation on the sample M, a heating step S11, a mass spectrometry analysis step S12, a heating step S21, a mass spectrometry analysis step S22, and an analysis step S3 are sequentially performed. The heating step S11 and the mass spectrometry analysis step S22 are steps corresponding to the first sampling procedure performed by the processing device 1. The heating step S21 and the mass spectrometry analysis step S22 are steps corresponding to the second sampling procedure performed by the processing device 1. Figure 4 ​The schematic top view of the carrier 3 and the sample M is shown. Specifically, when the analysis system Z of the present application is used to perform a composition analysis on a to-be-analyzed substance W on the sample M to be analyzed, the processing device 1 can heat the position on the sample M where the to-be-analyzed substance W is not arranged (i.e. the non-to-be-analyzed region Ml) when performing a first sampling procedure, so that at least a part of the composition of the sample M is thermally desorbed, and the first analysis information B1 is obtained. Then, the processing device 1 can heat the to-be-analyzed substance W on the same sample M (i.e. the to-be-analyzed region M2) when performing another sampling procedure, so that at least a part of the composition of the to-be-analyzed substance W is thermally desorbed, and the second analysis information B2 is obtained. Then, the processing device 1 can use the two pieces of analysis information B1 and B2 to analyze the main composition of the region on the sample M where the to-be-analyzed substance W is not arranged, and the main composition of the region on the sample M where the to-be-analyzed substance W is arranged. In this way, the processing device 1 can obtain the analysis result information 11 containing the composition of the to-be-analyzed substance W by comparing the two pieces of analysis information B1 and B2.

[0060] For example, assuming that the analysis system Z is used to perform a composition analysis on a to-be-analyzed substance W on a circuit board (i.e. the sample M), the processing device 1 can obtain the main composition of the region on the circuit board where the to-be-analyzed substance W is not arranged (i.e. the non-to-be-analyzed region) from the first analysis information B1, and the processing device 1 can obtain the main composition of the circuit board and the to-be-analyzed substance W thereon (i.e. the to-be-analyzed region) from the second analysis information B2. In this way, the processing device 1 can obtain the possible composition of the to-be-analyzed substance W by simply comparing the first analysis information B1 and the second analysis information B2.

[0061] As described above, the analysis system Z of the present application can analyze the main composition of the to-be-analyzed substance W on the sample M without the person concerned knowing the composition of the sample M. In the process of performing a composition analysis on the sample M by the analysis system Z, the person concerned can basically not participate at all. That is, after the person concerned arranges the sample M to be analyzed on the carrier 3, the person concerned only needs to start the analysis system Z, and the analysis system Z can basically automatically analyze the main composition of the to-be-analyzed substance W on the sample M.

[0062] It should be noted that, Figure 4 The shape of the sample M, the position and coverage of the non-to-be-analyzed region Ml, and the position and coverage of the to-be-analyzed region M2 are only one of the exemplary modes, and the actual application is not limited thereto.

[0063] In practical applications, the processing device 1 can receive a position information D to be analyzed, and the processing device 1 can control the driving device 5 according to the position information D to make the stage 3 and the heating device 4 move relative to each other, so that the heating device 4 heats the non-analyzable region M1 and the analyzable region M2 of the sample M set on the stage 3 in sequence. Specifically, the position information D to be analyzed can contain at least one of multiple boundary coordinates of the non-analyzable region M1 corresponding to the sample M currently set on the stage 3 and multiple boundary coordinates of the analyzable region M2 of the sample M, and the processing device 1 can control the heating device 4 to heat which positions of the sample M based on the boundary coordinates contained in the position information D. Of course, the data contained in the position information D to be analyzed is not limited to the above description. The position information D to be analyzed can contain any relevant information sufficient for the processing device 1 to determine the boundary of the non-analyzable region M1 and the boundary of the analyzable region M2 of the sample M.

[0064] In one embodiment, the processing device 1 may be communicatively connected to a remote electronic device E, and the processing device 1 may receive the location information D to be analyzed transmitted by the remote electronic device E; the remote electronic device E may be, for example, a cloud server.

[0065] like Figure 5 and Figure 6 As shown, in one specific embodiment of the example, the auxiliary analysis device A may further include an input device 7, an image capturing device 8, and a display device 9. Before the processing device 1 executes the sampling procedure for the first time, it may first perform the following steps:

[0066] A sample image acquisition step S01: Control the image acquisition device 8 to acquire an image of all areas of the sample M on the stage 3 to generate a sample acquisition image 81.

[0067] Input step S02: Control the display device 9 to display the sample captured image 81, and use the processing device 1 to receive an input information 71 transmitted by the input device 7;

[0068] Step S03: The input information 71 is converted into the location information D to be analyzed using the processing device 1.

[0069] As described above, specifically, after the processing device 1 executes the sample image acquisition step S01, the user can view the image of the sample M currently set on the stage 3 on the display device 9. Then, the user can operate the input device 7 (e.g., including a mouse, keyboard, touch screen, etc.) to select at least one of the non-analyzable area M1 and the analyzable area M2 in the sample acquisition image 81, and the input device 7 can generate the input information 71 accordingly.

[0070] In contrast, in the two heating steps S11, S21 of the two sampling procedures performed by the processing device 1 successively, the processing device 1 controls the driving device 5 to actuate the heating device 4 to heat the non-analyzed region M1 and the analyzed region M2 of the sample M, respectively, according to the analyzed location information D.

[0071] As shown in FIGS. 1A and 1B, in one embodiment, the analyzed location information D can be obtained by the processing device 1 performing a sampling procedure on the sample M. Specifically, when the analysis system Z performs the composition analysis on the analyzed substance W on the sample M, the processing device 1 can perform the sampling procedure and the analysis step S3 successively. Figure 5 Figure 7 As shown in FIGS. 1A and 1B, in one embodiment, the analyzed location information D can be obtained by the processing device 1 performing a sampling procedure on the sample M. Specifically, when the analysis system Z performs the composition analysis on the analyzed substance W on the sample M, the processing device 1 can perform the sampling procedure and the analysis step S3 successively.

[0072] The image capturing step SA1 is to capture an image of all regions of the sample M disposed on the stage 3 by the image capturing device 8 to generate a sample capturing image 81.

[0073] The image analysis step SA2 is to analyze the sample capturing image 81 to determine the analyzed region M2 and the non-analyzed region M1 on the sample M.

[0074] In one specific application, in the image analysis step SA2, the processing device 1 can compare each pixel contained in the sample capturing image 81 and a pre-stored image 12 one by one to determine which pixels in the sample capturing image 81 are different from the corresponding pixels in the pre-stored image 12, thereby determining that the pixels in the sample capturing image 81 correspond to the image of the analyzed substance W. The pre-stored image 12 is an image of any region of the sample M that does not have the image of the analyzed substance W, and the pre-stored image 12 can be pre-stored in the processing device 1. In another specific application, in the image analysis step SA2, for example, machine learning or other methods can be used to determine which part of the sample capturing image 81 corresponds to the image of the analyzed substance W. The manner in which the processing device 1 determines which part of the sample capturing image 81 corresponds to the image of the analyzed substance W in the image analysis step SA2 is not limited to the above manner.

[0075] ​In actual applications, the area of the planned analysis region M2 in the sample capturing image 81 can be smaller than the area of the analyte W in the sample capturing image 81, or the area of the planned analysis region M2 in the sample capturing image 81 can be larger than the area of the analyte W in the sample capturing image 81, according to the heating mode of the heating device 4 on the sample M. For example, if the heating device 4 uses a laser to heat the analysis region M2 of the sample M, in the image analysis step SA2, the processing device 1 can first determine whether the area of the analyte W on the sample M is larger than the area of the sample M irradiated by the laser. If the processing device 1 determines that the area of the analyte W on the sample M is larger than the area of the sample M irradiated by the laser, the processing device 1 can make the area of the planned analysis region M2 in the sample capturing image 81 smaller than the area of the analyte W in the sample capturing image 81. In this way, the heating device 4 can accurately irradiate the analyte W with the laser.

[0076] On the contrary, if the heating device 4 does not use a laser or the like to accurately heat the predetermined position of the sample M, in the image analysis step SA2, the processing device 1 can make the area of the planned analysis region M2 in the sample capturing image 81 larger than the area of the analyte W in the sample capturing image 81, so as to ensure that the analyte W can be heated to undergo thermal desorption when the heating device 4 heats the analysis region M2.

[0077] Please refer to Figure 5 and Figure 8 In different embodiments, the auxiliary analysis apparatus A of the present application can further include a temperature detection device 100 electrically connected to the processing device 1. When the processing device 1 executes the sampling program, a temperature determination step SB2 can be further executed between the heating step SB1 and the mass spectrometric analysis step SB3: first, the temperature detection device 100 detects the temperature of the predetermined position to make the temperature detection device 100 generate a temperature detection information 101, and then determines whether the temperature of the predetermined position reaches a predetermined temperature according to the temperature detection information 101; if it is determined that the temperature of the predetermined position does not reach the predetermined temperature, the heating step SB1 is executed again; if it is determined that the temperature of the predetermined position reaches the predetermined temperature, the temperature of the predetermined position is maintained at the predetermined temperature for a default time by controlling the heating device 4, and then the heating device 4 is controlled to stop heating the predetermined position, and the mass spectrometric analysis step SB3 is executed. It should be noted that when the temperature of the predetermined position reaches the predetermined temperature, the predetermined position will start to undergo thermal desorption. By designing the heating device 4 to first maintain the temperature of the predetermined position at the predetermined temperature for the default time, and then stop heating the predetermined position, the relevant substances can further complete the thermal desorption reaction.

[0078] In one embodiment, the temperature detecting device 100 can be a thermal image capturing device, and in the temperature judging step SB2, the processing device 1 first controls the thermal image capturing device to capture an image of the predetermined position, so that the thermal image capturing device generates a thermal image information corresponding to the image, and then the processing device 1 judges whether the temperature of the predetermined position reaches the predetermined temperature according to the thermal image information.

[0079] Through the design of the temperature detecting device 100 and the temperature judging step SB2, it can ensure that the heating device 4 makes the non-analysis region Ml and the analysis region M2 of the sample M rise to the predetermined temperature in turn when the processing device 1 executes the two sampling procedures in turn, so that the accuracy of the final analysis result information 11 can be improved.

[0080] For example, it is assumed that the sample is heated to 700 degrees, and mainly emits A, B and C organic molecules, and the sample is heated to 720 degrees, and mainly emits A, B, C and D organic molecules. If the processing device 1 executes the first sampling procedure, the heating device 4 heats the predetermined position of the sample to 700 degrees, and the processing device 1 determines that the main components of the non-analysis region Ml of the sample M are A, B and C organic molecules according to the first analysis information B1. Then, the processing device 1 executes the second sampling procedure, the heating device 4 heats the predetermined position of the sample M to 720 degrees, and the processing device 1 determines that the main components of the analysis region M2 of the sample M are A, B, C, D, E and F organic molecules according to the second analysis information B2. Therefore, the processing device 1 can determine that the main components of the analysis object W in the analysis region M2 of the sample M include D, E and F organic molecules when executing the analysis step S3. However, in fact, the organic molecule D may be a component volatilized when the sample is heated to 720 degrees, and the organic molecule D may not belong to the components of the analysis object W.

[0081] As described above, through the design of the temperature detecting device 100 and the temperature judging step SB2, the heating device 4 can heat the predetermined position of the sample M to approximately the same temperature when the processing device 1 executes any sampling procedure, so that the accuracy of the final analysis result can be improved.

[0082] It is worth mentioning that in one of the practical applications, the analysis system Z can be composed of two image capturing devices, which are a normal camera and a thermal image capturing camera, and the processing device 1 can perform at least one sampling procedure before performing the two sampling procedures for analyzing the composition of the analyte W on the sample M. In the heating step of the sampling procedure, the processing device 1 can control the heating device 4 to heat the non-analyzed region M1 of the sample M, and at the same time, control the two image capturing devices 8 to capture images of the sample M at intervals (for example, every 30 seconds, but not limited thereto). The processing device 1 determines the current temperature of the non-analyzed region M1 of the sample M and whether the non-analyzed region M1 of the sample M has begun to volatilize (for example, begins to smoke, the surface morphology begins to change, or the color of the surface begins to change, etc.) according to the images captured by the two image capturing devices 8, so as to determine how long the heating device 4 heats the non-analyzed region M1 and the analyzed region M2 of the sample M in the heating step of the two subsequent sampling procedures, and the specific value of the predetermined temperature in the heating step.

[0083] Please refer to Figure 5 and Figure 9 In one embodiment, the heating device 4 can include a plurality of heaters 41. Each heater 41 can be controlled by the processing device 1 to heat at least one region of a bearing plane 31 of the carrier 3. The bearing plane 31 is used to carry the sample M. When the processing device 1 performs the two sampling procedures for the composition analysis of the sample M, the processing device 1 controls at least one different heater 41 to operate in each sampling procedure.

[0084] As shown in Figure 9 For example, the carrier 3 can include a plurality of flow channels 32, which can not be connected to each other. When any flow channel 32 flows into a fluid at a predetermined temperature, the flow channel 32 becomes one of the heaters 41. That is, the processing device 1 can raise the temperature of different regions of the carrier 3 to the predetermined temperature by flowing the fluid at the predetermined temperature into different flow channels 32. In the drawings of the embodiment, the flow channels 32 are arranged in the carrier 3 in the form of concentric circles, but the arrangement of the flow channels 32 is not limited thereto.

[0085] In another different embodiment, each heater 41 can be configured to raise the temperature of a region of the stage 3 to a predetermined temperature using electromagnetic induction / high frequency heating. For example, each heater 41 can include a metal block (not shown) and a coil (not shown). Each coil is connected to an electromagnetic induction power source. Each heater 41 can be disposed in the stage 3. The processing device 1 can control the electromagnetic induction power source to cause the electromagnetic induction power source to supply current to the coil of one of the heaters 41. The electromagnetic induction between the metal block and the coil with current flowing therethrough can cause the temperature of the metal block to rise to the predetermined temperature.

[0086] As shown in Figure 5 and Figure 9 , the analysis system Z can further include a cooling device 200. The cooling device 200 can include a plurality of coolers 201. Each cooler 201 can be controlled by the processing device 1 to lower the temperature of at least a region of the support plane 31. When the processing device 1 executes the sampling procedure, the processing device 1 controls some of the heaters 41 to operate to raise the temperature of a predetermined location of the sample M to a predetermined temperature. The processing device 1 also controls some of the coolers 201 to operate to prevent the temperature of a region of the sample M other than the predetermined location from rising to the predetermined temperature.

[0087] As shown in Figure 9 , for example, when any of the flow channels 32 of the stage 3 is supplied with a fluid at a predetermined temperature, the flow channel 32 can be one of the coolers 201. When the processing device 1 executes the sampling procedure, the processing device 1 can control some of the flow channels to be supplied with a high-temperature fluid at the predetermined temperature and simultaneously control some of the flow channels to be supplied with a low-temperature fluid. The temperature of a region of the support plane can rise to the predetermined temperature due to the passage of the high-temperature fluid, and the temperature of the remaining regions of the support plane can not rise to the predetermined temperature due to the passage of the low-temperature fluid.

[0088] In another embodiment, the stage 3 can include a plurality of cooling chips. Each cooling chip can be electrically connected to the processing device 1. The processing device 1 can control the polarity of the power supplied to the cooling chip. The cooling chip can operate as a cooler or a heater.

[0089] Please refer to Figure 5 and Figure 10 , in the embodiments in which the drive device 5 is connected to the stage 3 and the heating device 4 includes an energy beam generator or a proximity member. The processing device 1 can further execute a calibration procedure. When the processing device 1 executes the calibration procedure, the processing device 1 can perform the following steps:

[0090] a moving step SC1 : controlling the driving device 5 to actuate so as to move at least one correction position of the stage 3 to a corresponding at least one correction coordinate;

[0091] an image capturing step SC2: controlling the image capturing device 8 to capture an image of the stage 3 so as to generate a captured image 82;

[0092] a judging step SC3: judging whether the correction position is located at the correction coordinate according to the captured image 82;

[0093] If it is judged that the correction position is not located at the correction coordinate, the correction coordinate is corrected to a coordinate corresponding to the correction position. If it is judged that the correction position is located at the correction coordinate, the correction procedure is ended.

[0094] Through the above correction procedure, when the processing device 1 executes the sampling procedure, the heating device 4 can more accurately heat the predetermined position of the sample M, and thus the correctness of the analysis result information 11 obtained in the subsequent analysis step S3 can be improved.

[0095] Please refer to Figure 5 and Figure 11 , and similarly in the embodiments in which the driving device 5 is connected to the heating device 4, and the heating device 4 comprises an energy beam generator or a proximity member. The processing device 1 can also execute a correction procedure, when the processing device 1 executes the correction procedure, the following steps can be executed:

[0096] a moving step SD1 : controlling the driving device 5 to actuate so as to move at least one correction position of the heating device 4 to a corresponding at least one correction coordinate;

[0097] an image capturing step SD2: controlling the image capturing device 8 to capture an image of the heating device 4 so as to generate a captured image 83;

[0098] a judging step SD3: judging whether the correction position is located at the correction coordinate according to the captured image;

[0099] If it is judged that the correction position is not located at the correction coordinate, the correction coordinate is corrected to a coordinate corresponding to the correction position. If it is judged that the correction position is located at the correction coordinate, the correction procedure is ended.

[0100] Through the above correction procedure, when the processing device 1 executes the sampling procedure, the heating device 4 can more accurately heat the predetermined position of the sample M, and thus the correctness of the analysis result information 11 obtained in the subsequent analysis step S3 can be improved.

[0101] Please refer to Figure 12which shows another schematic view of the analysis system of the present application. The carrier fluid module 6A of the present embodiment is different from the carrier fluid module 6 of the aforementioned embodiment. Specifically, the carrier fluid module 6 of the present embodiment comprises a loading conduit 6A1 and an outflow conduit 6A2. One end of the loading conduit 6A1 is connected to the fluid supply device C, and the other end of the loading conduit 6A1 is located in the chamber 2 and is provided with a first electrically-operated valve 6A3. One end of the outflow conduit 6A2 is connected to the gas chromatograph mass spectrometer B, and the other end of the outflow conduit 6A2 is located in the chamber 2 and is provided with a second electrically-operated valve 6A4. Both the first electrically-operated valve 6A3 and the second electrically-operated valve 6A4 are electrically connected to the processing device 1, and the processing device 1 can control the first electrically-operated valve 6A3 and the second electrically-operated valve 6A4 to be independently opened or closed.

[0102] Before the processing device 1 executes the heating step of the sampling program, the processing device 1 can first control the first electrically-operated valve 6A3 and the second electrically-operated valve 6A4 to be closed, so that the gas to be analyzed generated after the sample M is heated can be stored in the chamber 2. After the processing device 1 finishes executing the heating step of the sampling program, the processing device 1 can first open the first electrically-operated valve 6A3, for example, and then control the fluid supply device C to start supplying fluid, so that the fluid fills the chamber 2, and then open the second electrically-operated valve 6A4, so that the fluid mixed with the gas to be analyzed flows into the gas chromatograph mass spectrometer B along the outflow conduit 6A2.

[0103] In another embodiment, the outflow conduit 6A2 can be connected to a related auxiliary flow device (for example, a vacuum pump), and the processing device 1 can control the auxiliary flow device to operate when the second electrically-operated valve 6A4 is opened, so as to increase the speed of the fluid in the chamber 2 flowing into the gas chromatograph mass spectrometer B through the auxiliary flow device. In the embodiment in which the auxiliary flow device comprises a vacuum pump, the processing device 1 can first control the first electrically-operated valve 6A3 to be closed before controlling the second electrically-operated valve 6A4 and the vacuum pump to be opened.

[0104] It should be noted that the carrier fluid module 6 is mainly used to make the fluid supplied by the fluid supply device C flow into the chamber 2 and carry the gas in the chamber 2, so that the gas originally in the chamber 2 enters the gas chromatograph mass spectrometer B, and the components included in the carrier fluid module 6 are not limited to those described in the present embodiment and the aforementioned embodiment.

[0105] It should be particularly noted that the auxiliary analysis device A described above can be independently manufactured, sold and implemented in actual applications, and the auxiliary analysis device A is not limited to being manufactured, sold and implemented together with the analysis system Z.

[0106] Please refer to Figure 13The analysis method of the present application is used to perform a composition analysis on a non-analyzed region of a sample, and comprises the following steps:

[0107] A first heating step SE1: using a processing device to control a heating device to heat a non-analyzed region of a sample arranged in a chamber, so that the composition of at least a portion of the non-analyzed region of the sample is thermally desorbed;

[0108] A first mass spectrometry analysis step SE2: using the processing device to control a carrier module to cause the gas in the chamber to enter a gas chromatograph mass spectrometer, and to cause the gas chromatograph mass spectrometer to generate a first analysis information accordingly;

[0109] A second heating step SE3: using the processing device to control the heating device to heat an analyzed region of the sample arranged in the chamber, so that the composition of at least a portion of the analyzed region of the sample is thermally desorbed;

[0110] A second mass spectrometry analysis step SE4: using the processing module to control the carrier module to cause the gas in the chamber to enter the gas chromatograph mass spectrometer, and to cause the gas chromatograph mass spectrometer to generate a second analysis information accordingly;

[0111] An analysis step SE5: using the processing device to compare the first analysis information and the second analysis information to generate an analysis result information, the analysis result information comprising a composition component of at least a portion of the composition of the analyzed substance.

[0112] The analysis method of the present embodiment can be performed using the analysis system of the foregoing embodiment, but is not limited thereto. For detailed descriptions of the carrier module and the heating device in the first mass spectrometry analysis step SE2 and the second mass spectrometry analysis step SE4, please refer to the foregoing embodiment, which will not be described herein again. The first analysis information, the second analysis information, and the analysis result information of the present embodiment are the same as the analysis information and the analysis result information of the foregoing embodiment, which will not be described herein again.

[0113] In one specific application of the present embodiment, in the first heating step SE1, a driving device can be first controlled to move according to an analyzed position information, so that the heating device and a stage for carrying the sample are relatively moved, and then the heating device is controlled to heat the non-analyzed region; in the second heating step, the driving device is first controlled to move according to the analyzed position information, so that the heating device and the stage for carrying the sample are relatively moved, and then the heating device is controlled to heat the analyzed region. For specific connection relationships of the processing device, the driving device, the stage, and the heating device, and how the processing device obtains the analyzed position information, please refer to the descriptions of the foregoing embodiment, which will not be described herein again.

[0114] The analysis method of the present application is to perform the first heating step SE1 and the first mass spectrum analysis step SE2 to obtain the approximate composition of the sample without the analyte to be analyzed (i.e. the data content contained in the first analysis information), then perform the second heating step SE3 and the second mass spectrum analysis step SE4 to obtain the approximate composition of the sample and the analyte to be analyzed (i.e. the data content contained in the second analysis information), and finally, through the analysis step, the composition of the analyte to be analyzed on the sample is analyzed. In this way, those skilled in the art can obtain the composition of the analyte to be analyzed on the sample without knowing the composition of the sample.

[0115] Referring to Figure 14 The analysis method of the present embodiment is most different from the previous embodiment in that in the first heating step SE1, the processing device controls the driving device according to an analysis position information to relatively move the heating device and the stage, so as to heat the non-analysis region of the sample by the heating device; in the second heating step SE3, the processing device controls the driving device according to the analysis position information to relatively move the heating device and the stage, so as to heat the analysis region of the sample by the heating device. For the specific connection relationship of the processing device, the driving device, the stage and the heating device and how the processing device obtains the analysis position information, please refer to the description of the previous embodiment, which will not be repeated here.

[0116] Another difference between the present embodiment and the previous embodiment is that before the first heating step SE1, the following steps are further included:

[0117] An imaging step SF1: using the processing device to first control an image capturing device to capture the image of the sample on the stage to correspondingly generate a captured image, and then control a display device to display the captured image;

[0118] A position information generating step SF2: using the processing device to convert an input information generated by an input device into the analysis position information; wherein when the display device displays the captured image, the input device can be operated to correspondingly generate the input information.

[0119] In short, relevant personnel can watch the captured image of the sample set on the stage through the display device, and the relevant personnel can determine which regions in the captured image are non-analysis regions and analysis regions by operating the input device.

[0120] Referring to Figure 15 The analysis method of the present embodiment is different from the previous analysis method in that before the first heating step SE1, the following steps are further included:

[0121] a heating and image capturing step SG1 : using a processing device to control a heating device to heat a non-analyzed region of the sample, and simultaneously control an image capturing device to capture an image of the non-analyzed region, so as to generate an image information;

[0122] a judging step SG2: using the processing device to determine whether thermal desorption occurs in the non-analyzed region of the sample according to the image information;

[0123] If the processing device determines that thermal desorption occurs in the non-analyzed region of the sample according to the image information, the processing device calculates a heating time of the non-analyzed region of the sample by the heating device according to the image information, and then executes the first heating step, and in the first heating step and the second heating step, the processing device controls the heating device to heat the non-analyzed region and the analyzed region of the sample for the heating time, respectively. If the processing device determines that thermal desorption does not occur in the non-analyzed region of the sample according to the image information, the processing device executes the heating and image capturing step SG1 again.

[0124] For example, the image capturing device can be a common camera or a thermal image camera, and in the testing step SG, the processing device can control the image capturing device to capture an image of the sample and its surroundings once every 30 seconds (the specific time is not limited to this), so as to generate an image information. The processing device analyzes the image information every time the image capturing device generates an image information, so as to determine whether the heated position of the sample has a change phenomenon such as smoking, surface morphology change or surface color change. When the processing device determines that the heated position of the sample has the above change phenomenon according to the image information, the processing device determines that the composition of at least a part of the non-analyzed region of the sample has been thermally desorbed, and the processing device can calculate the heating time of the sample by the heating device according to the image information, so as to determine how long the heating device needs to heat the sample in the subsequent first heating step and second heating step. In a preferred embodiment, each image information can include the time of capturing the image in addition to the captured image.

[0125] It is worth mentioning that if a thermal image capturing camera is used as the image capturing device, each image information can further include temperature data of each region of the sample, and the processing device can obtain the heating time of the sample by the heating device and the temperature of each region of the sample after being heated from the image information.

[0126] Please refer to Figure 16The analysis method of the embodiment differs from the aforementioned analysis method in that a first determination step SH1 is further included between the first heating step SE1 and the first mass spectrometry analysis step SE2. The processing device is used to control a temperature detection device to detect the temperature of the non-analysis region to generate a first temperature detection information, and then determine whether the temperature of the non-analysis region reaches a predetermined temperature according to the first temperature detection information.

[0127] If the processing device determines that the temperature of the non-analysis region does not reach the predetermined temperature, the first heating step is performed again. If the processing device determines that the temperature of the non-analysis region reaches the predetermined temperature, the heating device is controlled to maintain the temperature of the non-analysis region at the predetermined temperature for a default time, and then the heating device is controlled to stop heating the predetermined position (in this way, it can be ensured that the relevant substances complete the thermal desorption reaction sufficiently), and the first mass spectrometry analysis step is performed.

[0128] A second determination step SH2 is further included between the second heating step SE3 and the second mass spectrometry analysis step SE4. The processing device is used to control the temperature detection device to detect the temperature of the analysis region to generate a second temperature detection information, and then determine whether the temperature of the analysis region reaches a predetermined temperature according to the second temperature detection information.

[0129] If the processing device determines that the temperature of the analysis region does not reach the predetermined temperature, the second heating step SE3 is performed again. If the processing device determines that the temperature of the analysis region reaches the predetermined temperature, the heating device is controlled to maintain the temperature of the analysis region at the predetermined temperature for a default time, and then the heating device is controlled to stop heating the predetermined position (in this way, it can be ensured that the relevant substances complete the thermal desorption reaction sufficiently), and the second mass spectrometry analysis step SE4 is performed. For detailed description of the temperature detection device, please refer to the aforementioned embodiment, which will not be described here.

[0130] As described above, the analysis method of the embodiment can ensure that the heating device heats the non-analysis region and the analysis region of the sample to approximately the same temperature through the design of the first determination step SH1 and the second determination step SH2, so that the correctness of the final analysis result information can be improved.

[0131] In another embodiment, in the second heating step, a cooling device can also be controlled to operate by the processing device to prevent the temperature of the non-analysis region of the sample from rising to the predetermined temperature. For detailed description of the cooling device, please refer to the aforementioned embodiment, which will not be described here.

[0132] Please refer to Figure 17The difference between the present embodiment and the aforementioned analysis method is that a removal step SK is further included between the first mass spectrum analysis step and the second heating step. The carrier gas module is controlled to continuously direct the gas in the chamber out of the chamber for a predetermined time. Through the design of the removal step SK, the gas obtained by the gas chromatograph mass spectrometer in the second mass spectrum analysis step can avoid containing the gas generated by the sample in the first heating step.

[0133] Referring to Figure 18 The difference between the present embodiment and the aforementioned analysis method is that in the first heating step SE1, the heating device is controlled to heat the non-analysis region so that the temperature of the non-analysis region rises to a predetermined temperature; in the second heating step SE3, the heating device is controlled to heat the analysis region so that the temperature of the analysis region rises to the predetermined temperature; and in the analysis step SE5, a judgment procedure SE51 is further included. The processing device is used to judge whether the similarity of the first analysis information and the second analysis information is higher than a predetermined similarity.

[0134] If it is determined that the similarity of the first analysis information and the second analysis information is higher than a predetermined proportion, an updating procedure SE52 is executed. The predetermined temperature is updated to increase the value of the original predetermined temperature, and then the first heating step, the first mass spectrum analysis step, the second heating step, and the second mass spectrum analysis step are sequentially re-executed. That is, when the first heating step and the second heating step are re-executed, the heating device is controlled to make the temperature of the non-analysis region and the temperature of the analysis region rise to the updated predetermined temperature (higher than the original predetermined temperature), respectively. If it is determined that the similarity of the first analysis information and the second analysis information is lower than the predetermined proportion, the analysis result information is generated.

[0135] For example, assume that the composition of at least a portion of the non-analyzed region of the sample thermally desorbs at 700 degrees, and the analyte disposed on the analyzed region thermally desorbs at 720 degrees. If the predetermined temperature is set to 700 degrees, and the first heating step, the first mass spectrometry analysis step, the second heating step, and the second mass spectrometry analysis step are sequentially performed, the processing device will find that the composition contained in the first analysis information is substantially the same as the composition contained in the second analysis information (e.g., up to 95% or more are the same) in the analysis step. At this time, the processing device will first perform the updating procedure to update the predetermined temperature from 700 degrees to a temperature higher than 700 degrees. Assume that the processing device performs the updating procedure to raise the predetermined temperature to 740 degrees. Then, after sequentially performing the first heating step, the first mass spectrometry analysis step, and the second heating step again, the gas chromatograph mass spectrometer will collect gas containing the composition after thermal desorption of the analyte in the second mass spectrometry analysis step. In the subsequent analysis step, the processing device will find that the composition contained in the first analysis information is not the same as the composition contained in the second analysis information, and generate the analysis result information accordingly.

[0136] It should be particularly emphasized that, as previously described, by designing the heating device to heat the non-analyzed region and the analyzed region of the sample to substantially the same temperature in the first heating step and the second heating step, respectively, the accuracy of the final analysis result information can be improved.

[0137] In summary, the analysis system, the auxiliary analysis device, and the analysis method of the present application can allow a person skilled in the art to analyze the composition of the analyte on the sample without knowing the composition of the sample.

[0138] The above description is only the preferred and feasible embodiments of the present application, and does not limit the patent scope of the present application. Therefore, any equivalent technical changes made by applying the content of the specification and drawings are included in the protection scope of the present application.

Claims

1. An analytical system, characterized by The analysis system is used to perform a set of composition analysis operations on a non-analyzed material of a sample to be analyzed, and comprises: an auxiliary analysis device, which comprises: a processing device; a chamber, which comprises at least one movable door operable to communicate the chamber with the outside; a stage located in the chamber, which is used to carry the sample; a heating device electrically connected to the processing device; and a fluid carrying module connected to the chamber, which is used to connect a fluid supply device; and a gas chromatograph mass spectrometer connected to the fluid carrying module; wherein the processing device is capable of executing a sampling procedure, and when the processing device executes the sampling procedure, the following steps are performed: a heating step: controlling the heating device to heat a predetermined position of the sample arranged on the stage, so that the composition of at least a portion of the sample at the predetermined position is thermally desorbed; a mass spectrometry analysis step: controlling the fluid carrying module to act, so that a fluid provided by the fluid supply device is guided from the chamber into the gas chromatograph mass spectrometer, and controlling the gas chromatograph mass spectrometer to analyze the guided fluid to generate an analysis information; wherein the processing device performs the set of composition analysis operations on the sample by executing at least twice the sampling procedure and then performing an analysis step, wherein when the processing device executes the sampling procedure for the first time, in the heating step, the predetermined position is a non-analyzed region of the sample, and when the processing device executes the sampling procedure for the second time, in the heating step, the predetermined position is an analyzed region of the sample, and the analysis step is to compare two pieces of the analysis information obtained by executing the sampling procedure twice to generate an analysis result information, which comprises the composition of at least a portion of the composition of the non-analyzed material of the sample at the analyzed region. The analysis system further comprises an image capturing device and a driving device electrically connected to the processing device, and the processing device is capable of controlling the driving device to act, so that the stage and the heating device are relatively movable to each other, so that the heating device heats the predetermined position of the sample arranged on the stage; and the processing device is further capable of executing a calibration procedure, and when the processing device executes the calibration procedure, the following steps are performed: a moving step: controlling the driving device to act, so that at least a calibration position of the stage is moved to a corresponding at least a calibration coordinate; 2. The analysis system according to claim 1, characterized in that an image capturing step: controlling the image capturing device to capture an image of the stage to generate a captured image; a judging step: judging whether the calibration position is located at the calibration coordinate according to the captured image; and if it is judged that the calibration position is not located at the calibration coordinate, the calibration coordinate is modified to a coordinate corresponding to the calibration position. ​ ​ 3. The analytical system according to claim 1, characterized in that The analysis system further comprises an image capturing device and a driving device electrically connected to the processing device, the processing device being capable of controlling the driving device to move the stage and the heating device relative to each other, so that the heating device heats the predetermined position of the sample disposed on the stage, the processing device being further capable of executing a calibration procedure, the processing device executing the calibration procedure by performing the following steps: a moving step of controlling the driving device to move at least one calibration position of the heating device to a corresponding at least one calibration coordinate; an image capturing step of controlling the image capturing device to capture an image of the heating device to generate a captured image; a judging step of judging whether the calibration position is located at the calibration coordinate according to the captured image; if it is judged that the calibration position is not located at the calibration coordinate, the calibration coordinate is modified to a coordinate corresponding to the calibration position.

4. The analytical system according to claim 1, characterized in that The auxiliary analysis apparatus further comprises a driving device connected to at least one of the stage and the heating device, the processing device being electrically connected to the driving device, and the processing device being capable of controlling the driving device to move the stage and the heating device relative to each other, the processing device being capable of receiving a to-be-analyzed position information, and the processing device being capable of controlling the driving device according to the to-be-analyzed position information to move the stage and the heating device relative to each other, so that the heating device heats the non-to-be-analyzed region and the to-be-analyzed region of the sample disposed on the stage in sequence, wherein the processing device is capable of receiving the to-be-analyzed position information transmitted by a remote electronic device, or the processing device is capable of receiving the to-be-analyzed position information transmitted by an input device included in the auxiliary analysis apparatus, the input device being capable of being operated to generate the to-be-analyzed position information, and the input device being electrically connected to the processing device.

5. The analytical system according to claim 1, characterized in that The analysis system further comprises a temperature detecting device electrically connected to the processing device; The processing device executes the sampling procedure, and between the heating step and the mass spectrum analysis step, the processing device further executes a temperature judging step of first controlling the temperature detecting device to detect the temperature of the predetermined position, so that the temperature detecting device generates a temperature detecting information, and then judging whether the temperature of the predetermined position reaches a predetermined temperature according to the temperature detecting information; if it is judged that the temperature of the predetermined position does not reach the predetermined temperature, the heating step is executed again; if it is judged that the temperature of the predetermined position reaches the predetermined temperature, the processing device first controls the heating device to maintain the temperature of the predetermined position as the predetermined temperature, then controls the heating device to stop heating the predetermined position, and executes the mass spectrum analysis step.

6. The analysis system according to claim 5, characterized in that The temperature detecting device is a thermal image capturing device. In the temperature judging step, the processing device first controls the thermal image capturing device to capture an image of the predetermined position, so that the thermal image capturing device generates a thermal image information corresponding to the image. Then, the processing device judges whether the temperature of the predetermined position reaches the predetermined temperature according to the thermal image information.

7. The analytical system according to claim 1, characterized in that The auxiliary analysis device further comprises at least one driving device connected to at least one of the heating device and the stage. The heating device comprises an energy beam generator. The processing device can control the driving device to drive the energy beam generator and the stage to move relative to each other, so that the energy beam generated by the energy beam generator is directed to the predetermined position of the sample arranged on the stage.

8. The analytical system according to claim 1, characterized in that The heating device comprises a plurality of heaters. The stage comprises a bearing plane for bearing the sample. Each of the heaters can be controlled by the processing device to heat at least one region of the bearing plane. When the processing device performs the sampling procedure twice in succession, the processing device controls at least one of the heaters to operate in succession.

9. The analysis system according to claim 8, characterized in that The analysis system further comprises a cooling device comprising a plurality of coolers. The coolers can be controlled by the processing device to reduce the temperature of at least one region of the bearing plane. When the processing device performs the sampling procedure, the processing device controls part of the heaters to operate, so that the temperature of the predetermined position of the sample rises to a predetermined temperature. The processing device also controls part of the coolers to operate, so that the temperature of the region of the sample other than the predetermined position does not rise to the predetermined temperature.

10. The analytical system according to claim 1, characterized in that The analysis system further comprises an image capturing device electrically connected to the processing device. When the processing device performs the composition analysis on the sample, the processing device first performs an image capturing step and an image analyzing step, and then performs the sampling procedure and the analysis step twice in succession. In the image capturing step, the processing device controls the image capturing device to capture an image of all regions of the sample arranged on the stage, so as to generate a captured image. In the image analyzing step, the processing device analyzes the captured image to determine the region to be analyzed and the region not to be analyzed on the sample. The region to be analyzed at least covers at least a part of the analyte.

11. The analytical system according to claim 1, characterized in that The fluid carrying module comprises a fluid conduit, the fluid conduit comprises an inlet, a communicating port and an outlet, the fluid conduit has a fluid passage therein, the fluid passage, the inlet, the communicating port and the outlet are in communication with each other; the inlet is used to connect with the fluid supply device, the communicating port is in communication with the chamber, and the outlet is used to connect with the gas chromatograph mass spectrometer; the processing device can control the fluid supply device to operate, so that the fluid enters the fluid passage from the inlet at a predetermined speed and flows into the gas chromatograph mass spectrometer from the outlet, and the fluid in the chamber is driven by the fluid to enter the fluid passage from the communicating port and enter the gas chromatograph mass spectrometer together with the fluid in the fluid passage.

12. An auxiliary analysis device, characterized by The auxiliary analysis device is used to connect with a gas chromatograph mass spectrometer to perform a composition analysis operation on an analyte of a sample, and the auxiliary analysis device comprises: a processing device electrically connected to a gas chromatograph mass spectrometer; a chamber comprising at least one movable door that can be operated to communicate the chamber with the outside; a stage in the chamber, the stage is used to carry the sample; a heating device electrically connected to the processing device; a fluid carrying module in communication with the chamber, the fluid carrying module is used to connect a fluid supply device, and the fluid carrying module is used to connect the gas chromatograph mass spectrometer; wherein the processing device can execute a sampling program, and when the processing device executes the sampling program, the following steps are performed: a heating step: controlling the heating device to heat a predetermined position of the sample arranged on the stage to thermally desorb the composition of at least a part of the sample at the predetermined position; a mass spectrometry analysis step: controlling the fluid carrying module to operate, so that a fluid provided by the fluid supply device guides the gas in the chamber into the gas chromatograph mass spectrometer from the chamber, and controlling the gas chromatograph mass spectrometer to analyze the guided fluid to obtain an analysis information generated by the gas chromatograph mass spectrometer; wherein the processing device performs the composition analysis operation on the sample by executing at least twice the sampling program and then executing an analysis step, when the processing device executes the sampling program for the first time, in the heating step, the predetermined position is a non-analyzed region of the sample; when the processing device executes the sampling program for the second time, in the heating step, the predetermined position is an analyzed region of the sample; and the analysis step is: comparing two pieces of the analysis information obtained by executing the sampling program twice to generate an analysis result information, and the analysis result information comprises the composition components of at least a part of the composition of the sample in the analyzed region.

13. An analytical method characterized by, The analysis method is used to analyze the composition components of an analyte of an analyzed region of a sample, and the analysis method comprises: a first heating step: using a processing device to control a heating device to heat a non-analysis region of the sample arranged in a chamber, so that the composition of at least a part of the non-analysis region of the sample is thermally desorbed; a first mass spectrum analysis step: using the processing device to control a carrier module, so that the gas in the chamber enters a gas chromatograph mass spectrometer, and the gas chromatograph mass spectrometer generates a first analysis information accordingly; a second heating step: using the processing device to control the heating device to heat the analysis region of the sample arranged in the chamber, so that the composition of at least a part of the analysis region of the sample is thermally desorbed; a second mass spectrum analysis step: using the processing device to control the carrier module, so that the gas in the chamber enters the gas chromatograph mass spectrometer, and the gas chromatograph mass spectrometer generates a second analysis information accordingly; an analysis step: using the processing device to compare the first analysis information and the second analysis information, so as to generate an analysis result information, which includes the composition of at least a part of the composition of the analysis object.

14. The method of analysis according to claim 13, characterized in that, In the first heating step, the processing device first controls a driving device to move the heating device and a carrier for carrying the sample relative to each other according to an analysis position information, and then controls the heating device to heat the non-analysis region. In the second heating step, the processing device first controls the driving device to move the heating device and the carrier for carrying the sample relative to each other according to the analysis position information, and then controls the heating device to heat the analysis region.

15. The method of analysis according to claim 14, characterized in that, In the first heating step, the processing device controls a driving device to move the heating device and the carrier relative to each other according to an analysis position information, so that the heating device can heat the non-analysis region of the sample. In the second heating step, the processing device controls the driving device to move the heating device and the carrier relative to each other according to the analysis position information, so that the heating device can heat the analysis region of the sample. Before the first heating step, the following steps are further included: an imaging step: using the processing device to control an image capturing device to capture an image of the sample on the carrier, so as to generate a captured image, and then control a display device to display the captured image; an analysis position information generation step: using the processing device to convert an input information generated by an input device into the analysis position information; wherein the input device can be operated to generate the input information when the display device displays the captured image.

16. The method of claim 13, wherein Before the first heating step, the following steps are further included: a heating and image capturing step: using the processing device to control the heating device to heat the non-analyzed region of the sample, and using the processing device to control an image capturing device to capture an image of the non-analyzed region, so that the image capturing device generates an image information; a judgment step: using the processing device to determine whether the composition of at least a portion of the non-analyzed region of the sample has been thermally desorbed according to the image information; if the processing device determines that the composition of at least a portion of the non-analyzed region of the sample has been thermally desorbed according to the image information, the processing device calculates a heating time of the non-analyzed region of the sample by the heating device according to the image information, and the processing device sequentially performs the first heating step, wherein in the first heating step and the second heating step, the processing device controls the heating device to heat the non-analyzed region and the analyzed region of the sample for the heating time, respectively; if the processing device determines that the composition of at least a portion of the non-analyzed region of the sample has not been thermally desorbed according to the image information, the processing device performs the heating and image capturing step again.

17. The method of claim 13, wherein between the first heating step and the first mass spectrum analysis step, a first judgment step is further included: the processing device controls a temperature detection device to detect the temperature of the non-analyzed region to generate a first temperature detection information, and then uses the processing device to determine whether the temperature of the non-analyzed region reaches a predetermined temperature according to the first temperature detection information; if the processing device determines that the temperature of the non-analyzed region does not reach the predetermined temperature, the first heating step is performed again; if the processing device determines that the temperature of the non-analyzed region reaches the predetermined temperature, the processing device controls the heating device to maintain the non-analyzed region at the predetermined temperature for a default time, then controls the heating device to stop heating the non-analyzed region, and sequentially performs the first mass spectrum analysis step; between the second heating step and the second mass spectrum analysis step, a second judgment step is further included: the temperature detection device is controlled to detect the temperature of the analyzed region to generate a second temperature detection information, and then the processing device is used to determine whether the temperature of the analyzed region reaches the predetermined temperature according to the second temperature detection information; if the processing device determines that the temperature of the analyzed region does not reach the predetermined temperature, the second heating step is performed again; if the processing device determines that the temperature of the analyzed region reaches the predetermined temperature, the processing device controls the heating device to maintain the temperature of the analyzed region at the predetermined temperature for a default time, then controls the heating device to stop heating the analyzed region, and performs the second mass spectrum analysis step.

18. The assay method according to claim 17, characterized in that in the second heating step, the processing device controls a cooling device to operate at the same time, so that the temperature of the non-analyzed region of the sample does not rise to the predetermined temperature.

19. The method of claim 13, wherein The method further comprises a removing step between the first mass spectrum analysis step and the second mass spectrum analysis step, wherein the processing device controls the carrier module to continuously guide the gas in the chamber out of the chamber within a predetermined time.

20. The assay of claim 13, wherein, In the first heating step, the processing device controls the heating device to heat the non-analysis region to a predetermined temperature; in the second heating step, the processing device controls the heating device to heat the analysis region to the predetermined temperature; in the analysis step, a judging procedure is further included, wherein the processing device judges whether the similarity between the first analysis information and the second analysis information is higher than a predetermined similarity; If the processing device determines that the similarity between the first analysis information and the second analysis information is higher than the predetermined similarity, the processing device will execute an updating procedure before sequentially re-executing the first heating step, the first mass spectrum analysis step, the second heating step, and the second mass spectrum analysis step; the updating procedure is: updating the predetermined temperature to increase the value of the original predetermined temperature; If the processing device determines that the similarity between the first analysis information and the second analysis information is lower than the predetermined similarity, the processing device will generate the analysis result information.

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