Semiconductor machine device UPS power supply

Abstract

The application discloses a kind of UPS power supply for semiconductor machine equipment, it includes body, shockproof structure, cooling structure, heat dissipation structure, dustproof structure, pull structure and rotating structure;The movement of the shockproof plate drives the movement of the upper circular plate, the movement of the upper circular plate compresses the shockproof spring, and the shockproof spring gives the upper circular plate a spring force, and then gives the shockproof plate a spring force;Open the second electromagnetic valve, pour cold water from the water inlet pipe, and then open the refrigerator, the cooled water is delivered to the circulating condenser pipe by the water pump, and the cold air is discharged through the air-permeable plate to cool the parts inside the upper part, open the first electromagnetic valve, the water in the water tank will flow out from the water outlet pipe;Open the fan, the external wind enters the inside of the body through the upper protective cover, then the inside of the body is heat dissipation treated, finally hot air is discharged from the ventilation plate, under the double-layer effect of cooling structure and heat dissipation structure, the dry and comfortable inside of the body and the suitable temperature are ensured.

Description

TECHNICAL FIELD

[0001] The application relates to the technical field of UPS power supplies, in particular to a UPS power supply for semiconductor machine equipment. BACKGROUND

[0002] A semiconductor is an electronic circuit device composed of semiconductor elements, is an electronic device composed of two basic elements, namely transistors and electronic devices. It plays an important role in the world because it has certain semiconductor properties, strong logic processing and control capabilities, and can greatly improve the performance of the system. The semiconductor can be used for microprocessors in electronic design, which can realize electronic product control and processing, such as computer memory, control circuit and sensor, and can also be used for automobile electronic control system, digital communication system and new wind energy system, etc., to help modern technology progress and improve people's technological life. The UPS is to continue to supply power to the user after power failure, which is one of its functions, and the second function is to protect the user to have a clean power supply and protect the user's equipment; the UPS power supply system is composed of a main circuit, a bypass, a battery and other power input circuits, a rectifier for AC / DC conversion, an inverter for DC / AC conversion, an inverter and bypass output switching circuit, and an energy storage battery; but the existing UPS power supply for semiconductor machine equipment can only perform the conventional heat dissipation function, cannot further reduce the temperature in the equipment on the basis of heat dissipation, and cannot easily carry the device; and the position of the heat dissipation port cannot be dustproofed on one hand, and cannot be cleaned on the other hand, so that the accumulated dust gradually increases, reducing the effect of ventilation and heat dissipation. SUMMARY

[0003] The technical problem to be solved by the application is:

[0004] To solve the above technical problems, the application provides the following technical scheme: a UPS power supply for semiconductor machine equipment, comprising

[0005] As a preferred scheme of the UPS power supply for semiconductor machine equipment, the UPS power supply comprises a machine body, a shockproof structure, a cooling structure, a heat dissipation structure, a dustproof structure, a lifting structure and a rotating structure; a connecting plate is fixedly arranged in the machine body in a transverse direction, a ventilation plate is arranged in the middle of the connecting plate, a shockproof structure is arranged at the upper end of the ventilation plate, a shockproof plate is arranged at the upper end of the shockproof structure, a rotating structure is arranged at the upper end of the shockproof plate in the middle, a cooling structure is arranged at the lower end of the ventilation plate and the bottom of the machine body, a heat dissipation structure is arranged at the top of the machine body, a lifting structure is arranged at the upper side of the left end and the upper side of the right end of the machine body, and a dustproof structure is arranged at the lower end of the lifting structure and at the upper side of the left end and the upper side of the right end of the machine body.

[0006] As a preferred scheme of the UPS power supply for semiconductor machine table equipment, the shockproof structure comprises an upper circular plate, a shockproof telescopic rod, a shockproof spring and a lower circular plate, the shockproof telescopic rod is arranged on the shockproof structure, the shockproof spring is arranged on the outer rod arm of the shockproof telescopic rod, the upper end of the shockproof telescopic rod is provided with the upper circular plate, and the lower end of the shockproof telescopic rod is provided with the lower circular plate.

[0007] As a preferred scheme of the UPS power supply for semiconductor machine table equipment, the cooling structure comprises a water tank, a refrigerating device, a water outlet pipe, a first electromagnetic valve, a water inlet pipe, a second electromagnetic valve, a water pump and a circulating condensing pipe, the water tank is arranged on the cooling structure, the refrigerating device is arranged at the front end of the water tank, the water inlet pipe is arranged at the right front end of the water tank, the second electromagnetic valve is arranged on the pipe arm of the water inlet pipe, the water outlet pipe is arranged at the lower end of the water tank, the first electromagnetic valve is arranged on the pipe arm of the water outlet pipe, the upper end of the water outlet pipe and the inner side of the water inlet pipe are both penetrated into and extended to the inside of the water tank, the water pump is arranged at the right end of the water tank, the water pump and the water tank are connected through the circulating condensing pipe, the pipe opening at the lower left end of the circulating condensing pipe is penetrated into and extended to the inside of the water tank, and the pipe opening at the lower right end of the circulating condensing pipe is penetrated into and extended to the inside of the water pump.

[0008] As a preferred scheme of the UPS power supply for semiconductor machine table equipment, the cooling structure comprises a water tank, a refrigerating device, a water outlet pipe, a first electromagnetic valve, a water inlet pipe, a second electromagnetic valve, a water pump and a circulating condensing pipe, the water tank is arranged on the cooling structure, the refrigerating device is arranged at the front end of the water tank, the water inlet pipe is arranged at the right front end of the water tank, the second electromagnetic valve is arranged on the pipe arm of the water inlet pipe, the water outlet pipe is arranged at the lower end of the water tank, the first electromagnetic valve is arranged on the pipe arm of the water outlet pipe, the upper end of the water outlet pipe and the inner side of the water inlet pipe are both penetrated into and extended to the inside of the water tank, the water pump is arranged at the right end of the water tank, the water pump and the water tank are connected through the circulating condensing pipe, the pipe opening at the lower left end of the circulating condensing pipe is penetrated into and extended to the inside of the water tank, and the pipe opening at the lower right end of the circulating condensing pipe is penetrated into and extended to the inside of the water pump.

[0009] As a preferred scheme of the UPS power supply for semiconductor machine table equipment, the dustproof structure comprises a dustproof sliding cover, a sliding groove, a buckle groove, a ventilation plate, a buckle, an upper dustproof plate and a ventilation opening, the ventilation plate is arranged on the dustproof structure, the upper end and the lower end of the ventilation plate are both provided with the buckle, the left upper side and the right upper side of the machine body are both provided with the ventilation opening, the inner side of the ventilation opening is penetrated into the inner side of the machine body, the upper opening and the lower opening of the ventilation opening are both provided with the buckle groove corresponding to the buckle, the left end and the right end of the ventilation opening are both provided with the sliding groove, the dustproof sliding cover is slidably connected to the sliding groove, and the upper end of the sliding groove at the two ends is provided with the upper dustproof plate.

[0010] As a preferred scheme of the UPS power supply for the semiconductor machine table equipment, the lifting structure comprises an L-shaped left telescopic plate, a bolt, a fixed shaft, a handle, a threaded hole and an L-shaped right telescopic plate, the L-shaped left telescopic plate and the L-shaped right telescopic plate are arranged on the lifting structure, the lower end of the connecting short plate position of the L-shaped left telescopic plate and the lower end of the connecting short plate position of the L-shaped right telescopic plate are both provided with the bolt, the lower end left side of the connecting short plate position of the L-shaped left telescopic plate and the lower end right side of the connecting short plate position of the L-shaped right telescopic plate are both provided with the threaded hole corresponding to the bolt, the right upper end of the L-shaped left telescopic plate and the left upper end of the L-shaped right telescopic plate are both provided with the fixed shaft, and the two fixed shafts are connected through the handle.

[0011] As a preferred scheme of the UPS power supply for the semiconductor machine table equipment, the rotating structure comprises a motor, a rotating shaft, a rotating shaft and a rotating protective shell, the rotating protective shell is arranged on the rotating structure, the motor is arranged in the rotating protective shell, the output end of the motor is fixedly connected with the rotating shaft, and the upper end of the rotating shaft is provided with the rotating shaft.

[0012] As a preferred scheme of the UPS power supply for the semiconductor machine table equipment, the rotating structure comprises a motor, a rotating shaft, a rotating shaft and a rotating protective shell, the rotating protective shell is arranged on the rotating structure, the motor is arranged in the rotating protective shell, the output end of the motor is fixedly connected with the rotating shaft, and the upper end of the rotating shaft is provided with the rotating shaft.

[0013] As a preferred scheme of the UPS power supply for the semiconductor machine table equipment, the rotating structure comprises a motor, a rotating shaft, a rotating shaft and a rotating protective shell, the rotating protective shell is arranged on the rotating structure, the motor is arranged in the rotating protective shell, the output end of the motor is fixedly connected with the rotating shaft, and the upper end of the rotating shaft is provided with the rotating shaft.

[0014] The UPS power supply for the semiconductor machine table equipment has the advantages that the lifting structure is arranged on the machine body, the lifting structure is connected with the rotating structure through the rotating structure, the rotating structure is connected with the cooling structure through the cooling structure, the cooling structure is connected with the shockproof plate through the shockproof plate, the shockproof plate is connected with the cabinet door through the cabinet door, and the cabinet door is connected with the machine body through the machine body.

[0015] The application drives the movement of the upper circular plate by the movement of the shockproof plate, the movement of the upper circular plate compresses the shockproof spring, the shockproof spring reversely gives the upper circular plate an elastic force, and further gives the shockproof plate an elastic force, so as to prevent the external movement from being shocked; the outer part of the heat conduction plate is surrounded by a circulating condensation pipe, the second electromagnetic valve is opened, cold water is poured into the water tank from the water inlet pipe, then the refrigerator is opened, the water cooled by the refrigerator is delivered to the circulating condensation pipe by the water delivery pump, the cold air emitted by the circulating condensation pipe is used to cool the parts above the internal part through the air permeable plate, the first electromagnetic valve is opened, the water in the water tank flows out of the water outlet pipe, so that the water source can be replaced and the next cooling cycle can be performed; the fan is opened, the external air enters the internal part of the machine through the upper protective cover, and then the internal part of the machine is subjected to heat dissipation treatment, finally the hot air is discharged from the ventilation plates on both sides, and the double-layer effect of the cooling structure and the heat dissipation structure ensures that the internal part of the machine is dry and the temperature is appropriate.

[0016] When ventilation is needed, the dustproof sliding cover is only needed to be slid downward to expose the ventilation plate to perform the conventional ventilation work, the dustproof sliding cover is slid upward to cover the ventilation plate to prevent the dust outside from entering the internal part of the machine and damaging the parts, when the dust left on the ventilation plate is too much, the ventilation plate is only needed to be pulled outward, the buckles on the ventilation plate are retracted inward under the extrusion force until the buckles are separated from the buckle grooves, at this time, the ventilation plate can be stored and taken separately to facilitate cleaning and replacement; the motor is opened, the motor drives the rotation of the rotating shaft, the rotation of the rotating shaft drives the rotation of the rotating shaft, the rotation of the rotating shaft drives the rotation of the rotating plate, and further drives the rotation of the power supply body, which is conducive to the observation and detection of the power supply body and facilitates various operations; the cabinet door handle is pulled, the pulling of the cabinet door handle drives the pulling of the cabinet door, the pulling of the cabinet door can observe various conditions in the internal part of the machine, the cabinet door is closed, the cabinet door buckle is matched with the cabinet door buckle groove, the cabinet door is closed tightly, the handle is pulled to drive the movement of the whole device, which facilitates the carrying of the device. BRIEF DESCRIPTION OF DRAWINGS

[0017] Figure 1 It is a structural schematic diagram in the embodiment of the present disclosure.

[0018] Figure 2 It is an internal structure schematic diagram in the embodiment of the present disclosure.

[0019] Figure 3 It is a left view structural schematic diagram in the embodiment of the present disclosure.

[0020] Figure 4 It is a shockproof structure schematic diagram in the embodiment of the present disclosure.

[0021] Figure 5 It is a cooling structure schematic diagram in the embodiment of the present disclosure.

[0022] Figure 6 A schematic diagram of a heat dissipation structure in an embodiment of the present disclosure.

[0023] Figure 7 A schematic diagram of a dustproof structure in an embodiment of the present disclosure.

[0024] Figure 8 A schematic diagram of a lifting structure in an embodiment of the present disclosure.

[0025] Figure 9 A schematic diagram of a rotating structure in an embodiment of the present disclosure.

[0026] Reference signs: 1 - body, 2 - cabinet door, 3 - cabinet door buckle, 4 - shockproof structure, 41 - upper circular plate, 42 - shockproof telescopic rod, 43 - shockproof spring, 44 - lower circular plate, 5 - cooling structure, 51 - water tank, 52 - refrigeration device, 53 - water outlet pipe, 54 - first electromagnetic valve, 55 - water inlet pipe, 56 - second electromagnetic valve, 57 - water delivery pump, 58 - circulating condenser pipe, 6 - heat dissipation structure, 61 - upper protective cover, 62 - protective support plate, 63 - fan, 64 - support cross rod, 65 - lower protective cover, 7 - dustproof structure, 71 - dustproof sliding cover, 72 - sliding groove, 73 - buckle groove, 74 - ventilation plate, 75 - buckle, 76 - upper dustproof plate, 77 - ventilation opening, 8 - lifting structure, 81 - L-shaped left telescopic plate, 82 - bolt, 83 - fixed shaft, 84 - handle, 85 - threaded hole, 86 - L-shaped right telescopic plate, 9 - rotating structure, 91 - motor, 92 - rotating shaft, 93 - rotating shaft, 94 - rotating protective shell, 10 - cabinet door buckle groove, 11 - foot pad, 12 - non-slip pad, 13 - air-permeable plate, 14 - shockproof plate, 15 - connecting plate, 16 - connecting plate groove, 17 - connecting block, 18 - support plate, 19 - rotating plate, 20 - handle, 21 - power supply body, 22 - heat-conducting plate, 23 - cabinet door handle, 24 - hinge. Embodiments

[0027] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific embodiments of the present application will be described in detail below with reference to the accompanying drawings. Embodiments

[0028] Reference Figures 1-4The embodiment provides a UPS power supply for semiconductor machine equipment, which comprises a body 1, a shockproof structure 4, a cooling structure 5, a heat dissipation structure 6, a dustproof structure 7, a lifting structure 8 and a rotating structure 9; a connecting plate 15 is transversely and fixedly arranged in the body 1, a ventilation plate 13 is arranged in the middle of the connecting plate 15, the shockproof structure 4 is arranged at the upper end of the ventilation plate 13, a shockproof plate 14 is arranged at the upper end of the shockproof structure 4, the rotating structure 9 is arranged at the upper end of the shockproof plate 14, the cooling structure 5 is arranged at the lower end of the body 1 and the lower end of the ventilation plate 13, the heat dissipation structure 6 is arranged at the top of the body 1, the lifting structure 8 is arranged at the upper left end and the upper right end of the body 1, and the dustproof structure 7 is arranged at the lower end of the lifting structure 8 and the upper left end and the upper right end of the body 1; the upper end of the shockproof plate 14, the left end and the right end of the rotating structure 9 are all provided with a connecting block 17, the upper end of the two connecting blocks 17 is provided with a supporting plate 18, the recessed position of the supporting plate 18 is provided with a rotating plate 19, the upper end of the rotating plate 19 is provided with a handle 20, the recessed position of the rotating plate 19 is provided with a power body 21, the upper end surface of the connecting plate 15 is provided with a connecting plate groove 16 corresponding to the ventilation plate 13, the lower end of the ventilation plate 13 is provided with a heat conduction plate 22, and the circulating condensing pipe 58 on the cooling structure 5 surrounds the heat conduction plate 22; the front surface of the body 1 is provided with a cabinet door 2, the right front end of the cabinet door 2 is provided with a cabinet door handle 23, the left end of the cabinet door 2 is connected with the left end of the body 1 through a hinge hinge 24, the inner side of the cabinet door 2 is provided with a cabinet door buckle 3, the middle of the right front end of the body 1 is provided with a cabinet door buckle slot 10 corresponding to the cabinet door buckle 3, the lower ends of the two sides of the body 1 are both provided with a foot pad 11, and the lower ends of the foot pads 11 are both provided with anti-skid pads 12; the shockproof structure 4 comprises an upper circular plate 41, a shockproof telescopic rod 42, a shockproof spring 43 and a lower circular plate 44, the shockproof telescopic rod 42 is arranged on the shockproof structure 4, the shockproof spring 43 is arranged on the outer rod arm of the shockproof telescopic rod 42, the upper end of the shockproof telescopic rod 42 is provided with the upper circular plate 41, and the lower end of the shockproof telescopic rod 42 is provided with the lower circular plate 44; the movement of the shockproof plate 14 drives the movement of the upper circular plate 41, the movement of the upper circular plate 41 compresses the shockproof spring 43, the shockproof spring 43 reversely gives the upper circular plate 41 an elastic force, and further gives the shockproof plate 14 an elastic force, so that the external movement is prevented from being shocked. EMBODIMENT

[0029] REFERENCE Figures 5-6The embodiment is based on the previous embodiment, and differs from the previous embodiment in that the cooling structure 5 is provided with a water tank 51, a refrigerator 52, a water outlet pipe 53, a first electromagnetic valve 54, a water inlet pipe 55, a second electromagnetic valve 56, a water pump 57, and a circulating condenser pipe 58. The front end of the water tank 51 is provided with the refrigerator 52. The right front end of the water tank 51 is provided with the water inlet pipe 55. The pipe wall of the water inlet pipe 55 is provided with the second electromagnetic valve 56. The lower end of the water tank 51 is provided with the water outlet pipe 53. The pipe wall of the water outlet pipe 53 is provided with the first electromagnetic valve 54. The upper end of the water outlet pipe 53 and the inner side of one end of the water inlet pipe 55 both extend into the interior of the water tank 51. The right end of the water tank 51 is provided with the water pump 57. The water pump 57 is connected with the water tank 51 through the circulating condenser pipe 58. The left lower end of the circulating condenser pipe 58 extends into the interior of the water tank 51. The right lower end of the circulating condenser pipe 58 extends into the interior of the water pump 57. The exterior of the heat-conducting plate 22 is surrounded by the circulating condenser pipe 58. The second electromagnetic valve 56 is opened, and cold water is poured into the water inlet pipe 55. The cold water enters the water tank 51. Then, the refrigerator 52 is opened. The refrigerated water is transported into the circulating condenser pipe 58 through the water pump 57. The cold air emitted through the air-permeable plate 13 cools the parts above the interior. The first electromagnetic valve 54 is opened. The water in the water tank 51 flows out of the water outlet pipe 53, so that the water source is conveniently replaced for the next cooling cycle. The heat dissipation structure 6 is provided with a protective support plate 62, a fan 63, a support cross rod 64, and a lower protective cover 65. The upper end of the protective support plate 62 is provided with an upper protective cover 61. The upper end of the upper protective cover 61 extends into the upper end of the machine body 1. The support cross rod 64 is arranged in the internal cavity of the protective support plate 62. The lower end of the support cross rod 64 is provided with the fan 63. The lower end of the protective support plate 62 is provided with the lower protective cover 65. Embodiment

[0030] Reference Figures 7-9 The embodiment is based on the previous embodiment, and differs from the previous embodiment in that

[0031] The dustproof structure 7 comprises a dustproof sliding cover 71, a sliding groove 72, a buckle groove 73, a ventilation plate 74, a buckle 75, an upper dustproof plate 76 and a ventilation opening 77, the ventilation plate 74 is arranged on the dustproof structure 7, the upper end and the lower end of the ventilation plate 74 are provided with the buckle 75, the left upper side and the right upper side of the machine body 1 are provided with the ventilation opening 77, one end of the inner side of the ventilation opening 77 penetrates the inner side of the machine body 1, the upper end and the lower end of the ventilation opening 77 are provided with the buckle groove 73 corresponding to the buckle 75, the left end and the right end of the ventilation opening 77 are provided with the sliding groove 72, the dustproof sliding cover 71 is slidably connected to the sliding groove 72, the upper end of the sliding groove 72 at the two ends is provided with the upper dustproof plate 76, when ventilation is needed, the dustproof sliding cover 71 is only needed to be slid downward, the ventilation plate 74 is exposed, and normal ventilation work can be performed, the dustproof sliding cover 71 is slid upward, the ventilation plate 74 can be covered, external dust is prevented from entering the inside of the machine body 1, and damage of parts is caused, when dust left on the ventilation plate 74 is too much, the ventilation plate 74 is only needed to be pulled outward, the buckle 75 on the ventilation plate 74 is inturned under the extrusion force, until the buckle 75 is separated from the buckle groove 73, at this time, the ventilation plate 74 can be stored and taken alone, and cleaning and replacement are facilitated; the lifting structure 8 comprises an L-shaped left telescopic plate 81, a bolt 82, a fixed shaft 83, a handle 84, a threaded hole 85 and an L-shaped right telescopic plate 86, the L-shaped left telescopic plate 81 and the L-shaped right telescopic plate 86 are arranged on the lifting structure 8, the lower end of the connecting short plate position of the L-shaped left telescopic plate 81 and the lower end of the connecting short plate position of the L-shaped right telescopic plate 86 are provided with the bolt 82, the lower end left side of the connecting short plate position of the L-shaped left telescopic plate 81 and the lower end right side of the connecting short plate position of the L-shaped right telescopic plate 86 are provided with the threaded hole 85 corresponding to the bolt 82, the right upper end of the L-shaped left telescopic plate 81 and the left upper end of the L-shaped right telescopic plate 86 are provided with the fixed shaft 83, and the two fixed shafts 83 are connected through the handle 84; the rotating structure 9 comprises a motor 91, a rotating shaft 92, a rotating shaft 93 and a rotating protective shell 94, the rotating protective shell 94 is arranged on the rotating structure 9, the motor 91 is arranged in the rotating protective shell 94, the output end of the motor 91 is fixedly connected with the rotating shaft 92, and the upper end of the rotating shaft 92 is provided with the rotating shaft 93.

Claims

1. A UPS power supply for semiconductor manufacturing equipment, characterized by: Including, body (1), shockproof structure (4), cooling structure (5), heat dissipation structure (6), dustproof structure (7), pull structure (8) and rotation structure (9);The inside of the body (1) is transversely fixedly provided with a connecting plate (15), the middle of the connecting plate (15) is provided with a ventilation plate (13), the upper end of the ventilation plate (13) is provided with a shockproof structure (4), the upper end of the shockproof structure (4) is provided with a shockproof plate (14), the upper end of the shockproof plate (14) is provided with a rotation structure (9), the lower end of the ventilation plate (13) and the bottom end of the inside of the body (1) are provided with a cooling structure (5), the top of the body (1) is provided with a heat dissipation structure (6), the upper side of the left end and the upper side of the right end of the body (1) are provided with a pull structure (8), the upper side of the left end and the upper side of the right end of the body (1) and the lower end of the pull structure (8) are provided with a dustproof structure (7); The shockproof structure (4) includes an upper circular plate (41), a shockproof telescopic rod (42), a shockproof spring (43) and a lower circular plate (44), the shockproof structure (4) is provided with a shockproof telescopic rod (42), the outer rod arm of the shockproof telescopic rod (42) is provided with a shockproof spring (43), the upper end of the shockproof telescopic rod (42) is provided with an upper circular plate (41), and the lower end of the shockproof telescopic rod (42) is provided with a lower circular plate (44); The cooling structure (5) includes a water tank (51), a refrigerator (52), a water outlet pipe (53), a first electromagnetic valve (54), a water inlet pipe (55), a second electromagnetic valve (56), a water pump (57) and a circulating condenser pipe (58), the cooling structure (5) is provided with a water tank (51), the front end of the water tank (51) is provided with a refrigerator (52), the right front end of the water tank (51) is provided with a water inlet pipe (55), and the pipe arm of the water inlet pipe (55) is provided with a second electromagnetic valve (56); The dustproof structure (7) includes a dustproof sliding cover (71), a sliding groove (72), a buckle groove (73), a ventilation plate (74), a buckle (75), an upper dustproof plate (76) and a ventilation opening (77), the dustproof structure (7) is provided with a ventilation plate (74), the upper and lower ends of the ventilation plate (74) are provided with buckles (75), the left upper side and the right upper side of the body (1) are provided with ventilation openings (77), one end of the inner side of the ventilation opening (77) penetrates one end of the inner side of the body (1), the upper port and the lower port of the ventilation opening (77) are provided with buckle grooves (73) corresponding to the buckles (75), the left and right ends of the ventilation opening (77) are provided with sliding grooves (72), the sliding grooves (72) are slidably connected with dustproof sliding covers (71), and the upper ends of the sliding grooves (72) at both ends are provided with upper dustproof plates (76). The lifting structure (8) comprises an L-shaped left telescopic plate (81), a bolt (82), a fixed shaft (83), a handle (84), a threaded hole (85) and an L-shaped right telescopic plate (86), the lifting structure (8) is provided with the L-shaped left telescopic plate (81) and the L-shaped right telescopic plate (86), the lower end of the connecting short plate position of the L-shaped left telescopic plate (81) and the lower end of the connecting short plate position of the L-shaped right telescopic plate (86) are provided with the bolt (82), the lower end left side of the connecting short plate position of the L-shaped left telescopic plate (81) and the lower end right side of the connecting short plate position of the L-shaped right telescopic plate (86) are provided with the threaded hole (85) corresponding to the bolt (82), the right upper end of the L-shaped left telescopic plate (81) and the left upper end of the L-shaped right telescopic plate (86) are provided with the fixed shaft (83), and the two fixed shafts (83) are connected through the handle (84). The rotating structure (9) comprises a motor (91), a rotating shaft (92), a rotating shaft (93) and a rotating protective shell (94), the rotating structure (9) is provided with the rotating protective shell (94), the inside of the rotating protective shell (94) is provided with the motor (91), the output end of the motor (91) is fixedly connected with the rotating shaft (92), and the upper end of the rotating shaft (92) is provided with the rotating shaft (93).

2. The UPS power supply for semiconductor manufacturing equipment according to claim 1, wherein: The heat dissipation structure (6) comprises an upper protective cover (61), a protective support plate (62), a fan (63), a support cross rod (64) and a lower protective cover (65), the heat dissipation structure (6) is provided with the protective support plate (62), the upper end of the protective support plate (62) is provided with the upper protective cover (61), the upper end of the upper protective cover (61) penetrates the upper end of the machine body (1), the inside cavity position of the protective support plate (62) is provided with the support cross rod (64), the lower end of the support cross rod (64) is provided with the fan (63), and the lower end of the protective support plate (62) is provided with the lower protective cover (65).

3. The UPS power supply for semiconductor manufacturing equipment according to claim 1, wherein: The upper end of the shockproof plate (14), the left and right ends of the rotating structure (9) are provided with the connecting block (17), the upper ends of the two connecting blocks (17) are provided with the support plate (18), the recessed position of the support plate (18) is provided with the rotating plate (19), the upper end of the rotating plate (19) is provided with the handle (20), the recessed position of the rotating plate (19) is provided with the power supply body (21), the upper end surface of the connecting plate (15) is provided with the connecting plate groove (16) corresponding to the ventilation plate (13), the lower end of the ventilation plate (13) is provided with the heat conduction plate (22), and the circulating condensing pipe (58) on the cooling structure (5) surrounds the heat conduction plate (22).

4. The UPS power supply for semiconductor manufacturing equipment according to claim 1, wherein: The front end surface of the machine body (1) is provided with a cabinet door (2), the right front end of the cabinet door (2) is provided with a cabinet door handle (23), the left end of the cabinet door (2) is connected with the left end of the machine body (1) through a hinge hinge (24), the inner side of the cabinet door (2) is provided with a cabinet door buckle (3), the right front end of the machine body (1) is provided with a cabinet door buckle slot (10) corresponding to the cabinet door buckle (3), the lower end of the machine body (1) is provided with a foot pad (11) on both sides, and the lower end of the foot pad (11) is provided with an antiskid pad (12).

5. The UPS power supply for semiconductor manufacturing equipment according to claim 1, wherein: The lower end of the water tank (51) is provided with a water outlet pipe (53), the pipe arm of the water outlet pipe (53) is provided with a first electromagnetic valve (54), the upper end of the water outlet pipe (53) and the inner side of the water inlet pipe (55) are both penetrated and extended to the inside of the water tank (51), the right end of the water tank (51) is provided with a water conveying pump (57), the water conveying pump (57) and the water tank (51) are connected through a circulating condensing pipe (58), the pipe opening of the lower left end of the circulating condensing pipe (58) is penetrated and extended to the inside of the water tank (51), and the pipe opening of the lower right end of the circulating condensing pipe (58) is penetrated and extended to the inside of the water conveying pump (57).

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