A multi-arc ion plating apparatus for PVD tool spray coating

Abstract

The present application relates to the technical field of coating equipment, in particular to a multi-arc ion coating equipment for PVD cutter spraying coating, which comprises a coating device, the coating device comprises a base, and a controller is fixedly installed at the top end of the base; the limiting component is made to leave the position directly below the fixed column by rotating, the connecting column is extruded upward in the fixed column through the inserting rod, then the connecting column is rotated to make the sliding block slide in the guide groove through the inserting rod, at this moment, the supporting force of the telescopic rod and the elasticity of the first spring are matched to facilitate taking out the inserting rod from the fixed column, then the connecting component, the limiting component, the connecting frame, the positioning component and the bearing basket are taken out from the coating box to facilitate taking out the cutters hung on the hooks in turn and making them regular, at the same time, the cutters without coating are arranged in the coating box to be coated, the downtime of the device is reduced, and the coating efficiency of the device for cutters is improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of coating equipment, in particular to a multi-arc ion coating equipment for PVD cutter spray coating. BACKGROUND

[0002] Generally speaking, vacuum coating machines are used for coating in high vacuum, including vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition and many others. The main idea is to divide into evaporation and sputtering two ways. Compared with ordinary ion plating coating machine, multi-arc ion coating deposition rate is fast, high efficiency; using numerical control vacuum coating machine processing quality is stable, reduce labor.

[0003] In the prior art, the Chinese patent with application number 201821782377.7 provides a high-temperature-resistant multi-arc ion vacuum coating machine, relating to the technical field of vacuum coating. The high-temperature-resistant multi-arc ion vacuum coating machine comprises a base, a lower shell, an upper shell, a shaft, a connecting block, a heat-resistant layer, an ejection mechanism, a dismounting mechanism and a fixing mechanism. The bottom of the lower shell is fixedly connected with the top of the base. The upper shell is located above the lower shell. The right side of the shaft is fixedly connected with the top of the left side of the lower shell. The high-temperature-resistant multi-arc ion vacuum coating machine is provided with a dismounting mechanism. Through the action of the dismounting mechanism, the upper shell and the lower shell can be easily opened from the right side. Then, the connecting block and the shaft are provided, so that the upper shell can be easily turned to the left side through the shaft after the device is opened. Therefore, the device is convenient to open, which solves the problem that some existing devices are not convenient to open during use, thereby making it inconvenient to clean the inside of the device.

[0004] The above-mentioned multi-arc ion vacuum coating machine is provided with a dismounting mechanism. Through the action of the dismounting mechanism, the upper shell can be easily turned to the left side through the shaft after the device is opened. Therefore, the device is convenient to open during use, but the multi-arc ion vacuum coating machine still has the following deficiencies in actual use, such as: when using the device to store the coated cutters in an orderly manner, the coated cutters need to be taken out one by one from the inside of the multi-arc ion vacuum coating machine, which takes a lot of time. At this moment, the multi-arc ion vacuum coating machine is in a shutdown state and cannot work normally, thereby affecting the coating efficiency of the multi-arc ion vacuum coating machine on the cutters.

[0005] Therefore, we propose a multi-arc ion coating equipment for PVD cutter spray coating to solve the above problems. SUMMARY

[0006] In view of the deficiencies of the prior art, the present application provides a multi-arc ion plating device for PVD cutter spraying coating, which solves the technical problem that when the finished cutter is stored and regularized, it needs to be taken out one by one from the multi-arc ion vacuum plating machine, which takes a lot of time, and at this moment, the multi-arc ion vacuum plating machine is in a shutdown state and cannot work normally, thereby affecting the plating efficiency of the multi-arc ion vacuum plating machine.

[0007] In order to achieve the above-mentioned purpose, the present application adopts the following technical solutions:

[0008] A multi-arc ion plating device for PVD cutter spraying coating, comprising a plating device, the plating device comprises a base, and a controller is fixedly installed at the top end of the base, a plating box is fixedly installed at the top end of the base, and a hinged door is hinged to the outside of the plating box, a fixed column is fixedly installed inside the plating box, and a connecting assembly is arranged at the bottom end of the fixed column, a ejection assembly is fixedly installed inside the fixed column, a limiting assembly is sleeved outside the connecting assembly, a connecting frame is fixedly installed outside the connecting assembly, and a positioning assembly is fixedly installed at the top end of the connecting frame, and a bearing basket is fixedly installed outside the connecting assembly.

[0009] Preferably, the connecting assembly comprises a connecting column, which is arranged at the bottom end of the fixed column, a plug rod is fixedly installed at the top end of the connecting column, a sliding block is fixedly installed outside the plug rod, a guide groove is formed in the inside of the fixed column, the ejection assembly comprises a telescopic rod, which is fixedly installed inside the fixed column, a first spring is sleeved outside the telescopic rod, and a top plate is fixedly installed at the bottom end of the telescopic rod.

[0010] Preferably, the outer diameter of the plug rod is matched with the inner diameter of the fixed column, the outer diameter of the sliding block is matched with the inner diameter of the guide groove, and the sliding block and the guide groove are arranged in two groups and are arrayed around the central axis of the connecting column.

[0011] Preferably, the telescopic rod and the first spring are arrayed around the central axis of the fixed column, and the bottom end of the top plate abuts against the top end of the plug rod.

[0012] Preferably, the limiting assembly comprises a turntable, which is sleeved outside the connecting column, a limiting ring is fixedly installed on the inner wall of the turntable, a frame is fixedly installed inside the connecting column, a threaded cap is inserted into the inside of the frame through a bearing, a threaded column is inserted into the inside of the threaded cap, a circular gear is fixedly installed outside the threaded cap, and a limiting block is fixedly installed at the bottom end of the threaded column.

[0013] Preferably, the limiting ring has a "T" shaped structure in transverse section, and a rotating groove matched with the limiting ring is formed in the inside of the connecting column.

[0014] Preferably, the rotating disc is engaged with the circular gear through the teeth, the threaded cap is engaged with the threaded column through the threads, and the inside of the connecting column is provided with a sliding groove matched with the limiting block.

[0015] Preferably, the connecting frame comprises a disc, the disc is fixedly installed on the outside of the connecting column, the inside of the disc is provided with a connecting rod, the bottom end of the connecting rod is fixedly installed with a hook, the positioning assembly comprises a U-shaped frame, the U-shaped frame is fixedly installed on the top end of the disc, the inside of the U-shaped frame is provided with a positioning rod, the inside of the U-shaped frame is fixedly installed with a limiting strip, and the outside of the positioning rod is sleeved with a second spring.

[0016] Preferably, the bottom end of the positioning rod is of an inclined structure, the inside of the connecting rod is provided with a groove matched with the positioning rod, and the bottom end of the second spring is fixedly installed on the upper surface of the disc.

[0017] Preferably, the limiting strip is provided with two groups and is arrayed in the center axis of the positioning rod, and the inside of the positioning rod is provided with a sliding groove matched with the limiting strip.

[0018] The beneficial effects of the present application are:

[0019] 1) In the connecting assembly, the rotating limiting assembly is away from the directly below of the fixed column, the connecting column is extruded upward in the inside of the fixed column through the inserting rod, then the connecting column is rotated to drive the sliding block to slide in the inside of the guide groove through the inserting rod, at this moment, the supporting force of the telescopic rod and the elastic force of the first spring are matched to facilitate the inserting rod to be taken out from the inside of the fixed column, then the connecting assembly, the limiting assembly, the connecting frame, the positioning assembly and the bearing basket are taken out from the inside of the coating box, so that the subsequent knives hung on the hooks are taken out in turn and are regularized, at the same time, the knives without coating are arranged in the inside of the coating box to be coated, the downtime of the device is reduced, and the coating efficiency of the device on the knives is improved.

[0020] 2) In the positioning assembly, the positioning rod is pulled away from the inside of the connecting rod, the connecting rod is taken out from the inside of the disc, so that the workers take out the knives hung outside the hooks in turn, the damaged hooks are replaced, and the new connecting rod is inserted into the inside of the disc, so that the positioning rod is inserted into the inside of the connecting rod, and the stability of the connecting rod installed in the inside of the disc is improved. BRIEF DESCRIPTION OF DRAWINGS

[0021] Figure 1 It is a structural front view of the present application;

[0022] Figure 2 It is a structural front view of the present application;

[0023] Figure 3 It is a front perspective schematic diagram of the structure of the fixing column and the connecting assembly of the present invention;

[0024] Figure 4 This is a front perspective schematic diagram of the structure of the fixing column and the connecting frame of the present invention;

[0025] Figure 5 It is a partial cross-sectional perspective diagram of the structure of the fixed column and the disc of the present invention;

[0026] Figure 6 This is an exploded perspective view of the structure of the connecting column and the turntable of the present invention;

[0027] Figure 7 It is a partial cross-sectional perspective diagram of the structure of the connecting column and the rotating disk of the present invention;

[0028] Figure 8 This is a partially sectional perspective diagram of the exploded front view of the structure of the fixing column and the insertion rod of the present invention;

[0029] Figure 9 For the present invention Figure 5 The structure of A in the middle is enlarged;

[0030] Figure 10 For the present invention Figure 7 The structure of B is enlarged.

[0031] In the picture:

[0032] 1. Coating device; 110. Base; 120. Controller; 130. Coating box; 140. Opening and closing door;

[0033] 2. Fixed column;

[0034] 3. Connecting assembly; 310. Connecting column; 320. Insertion rod; 330. Slider; 340. Guide groove;

[0035] 4. Ejector assembly; 410. Telescopic rod; 420. First spring; 430. Ejector plate;

[0036] 5. Limiting assembly; 510. Turntable; 520. Limiting ring; 530. Frame; 540. Threaded cap; 550. Threaded column; 560. Circular gear; 570. Limiting block;

[0037] 6. Connecting frame; 610. Disc; 620. Connecting rod; 630. Hook;

[0038] 7. Positioning assembly; 710. U-shaped frame; 720. Positioning rod; 730. Limiting bar; 740. Second spring;

[0039] 8. Carrying basket. DETAILED DESCRIPTION

[0040] The embodiment of the present application provides a multi-arc ion plating device for PVD cutter spraying coating, and solves the technical problem that when the cutter with completed plating is stored and regularized, the cutter with completed plating needs to be taken out from the multi-arc ion vacuum plating machine one by one, thereby a large amount of time is consumed, the multi-arc ion vacuum plating machine is in a shutdown state and cannot work normally, and thereby the plating efficiency of the multi-arc ion vacuum plating machine on the cutter is affected.

[0041] In order to solve the above technical problems, the technical scheme in the embodiment of the present application is as follows: the rotating disc 510 is rotated to be engaged with the circular gear 560 through threads, at the same time, the circular gear 560 drives the threaded cap 540 to be engaged with the threaded column 550 through threads, and the threaded column 550 is limited by the limiting block 570, at this moment, the threaded column 550 moves downward, at this moment, the threaded column 550 is away from the position directly below the fixed column 2, the connecting column 310 is extruded upward in the fixed column 2 through the inserting rod 320, then the connecting column 310 is rotated to drive the sliding block 330 to slide in the guide groove 340 through the inserting rod 320, at this moment, the supporting force of the telescopic rod 410 and the elastic force of the first spring 420 are matched to extrude the inserting rod 320 downward by the top plate 430, so that the inserting rod 320 can be taken out from the fixed column 2, then the connecting assembly 3, the limiting assembly 5, the connecting frame 6, the positioning assembly 7 and the bearing basket 8 are taken out from the plating box 130, so that the cutter hung on the hook 630 can be taken out and regularized subsequently, the bearing basket 8 is arranged to facilitate the storage of the falling cutter, then the cutter without plating can be arranged in the plating box 130 to be plated, the downtime of the device is reduced, and the plating efficiency of the device on the cutter is improved; the limiting strip 730 limits the positioning rod 720, then the positioning rod 720 is pulled to be separated from the inside of the connecting rod 620, the connecting rod 620 is taken out from the disc 610, so that the cutter hung on the outside of the hook 630 can be taken out by the worker, and the damaged hook 630 can be replaced, and the new connecting rod 620 is inserted into the disc 610, the slope of the positioning rod 720 and the elastic force of the second spring 740 make the positioning rod 720 inserted into the connecting rod 620, thereby the stability of the connecting rod 620 installed in the disc 610 is improved.

[0042] In order to better understand the above technical scheme, the above technical scheme will be described in detail in combination with the drawings of the specification and the specific embodiments.

[0043] Embodiment 1: please refer to Figures 1-10The present invention provides a multi-arc ion plating device for PVD tool spray coating, comprising a coating device 1, the coating device 1 comprising a base 110, and a controller 120 is fixedly installed on the top of the base 110, a coating box 130 is fixedly installed on the top of the base 110, and an opening and closing door 140 is hinged on the outside of the coating box 130, a fixed column 2 is fixedly installed inside the coating box 130, and a connecting component 3 is provided at the bottom end of the fixed column 2, an ejection component 4 is fixedly installed inside the fixed column 2, a limiting component 5 is sleeved on the outside of the connecting component 3, a connecting frame 6 is fixedly installed on the outside of the connecting component 3, and a positioning component 7 is fixedly installed on the top of the connecting frame 6, and a carrying basket 8 is fixedly installed on the outside of the connecting component 3.

[0044] See also Figures 1-8 When the device is working, the staff connects the device to an external power supply through a wire so that the external power supply provides power support for the device, opens the opening and closing door 140, rotates the limit component 5 to make the limit component 5 leave the bottom of the fixed column 2, and then rotates the connecting component 3. At the same time, the elastic force of the ejection component 4 is used to remove the connecting component 3 from the inside of the fixed column 2, so that the connecting component 3 drives the connecting frame 6 to remove the coated tool from the inside of the coating box 130, so that the tools hanging on the connecting frame 6 can be removed in turn and arranged in order. At the same time, it is convenient to arrange the uncoated tools inside the coating box 130 for coating, reducing the downtime of the device and thus improving the coating efficiency of the device on the tools.

[0045] Example 2: Please refer to Figure 2 、 Figure 3 、 Figure 4 、 Figure 5 、 Figure 6 、 Figure 7 、 Figure 8 and Figure 10 The cam 330 is fixed on the top of the fixing post 2, and the cam 330 is fixed on the outside of the fixing post 2. The cam 330 is fixed on the outside of the fixing post 2, and a guide groove 340 is provided inside the fixing post 2. The ejection assembly 4 includes a telescopic rod 410, and the telescopic rod 410 is fixedly installed inside the fixing post 2. A first spring 420 is sleeved on the outside of the telescopic rod 410, and a top plate 430 is fixedly installed on the bottom end of the telescopic rod 410. The outer diameter of the plug rod 320 is adapted to the inner diameter of the fixing post 2, and the outer diameter of the slider 330 is adapted to the inner diameter of the guide groove 340. There are two groups of sliders 330 and guide grooves 340 and they are distributed in an array with the central axis of the connecting post 310. The telescopic rod 410 and the first spring 420 are distributed in an array with the central axis of the fixing post 2, and the bottom end of the top plate 430 conflicts with the top end of the plug rod 320.

[0046] The device works, rotating the limiting component 5 makes the limiting component 5 leave the front of the fixed column 2, the connecting column 310 is extruded upward in the fixed column 2 through the inserting rod 320, then the connecting column 310 is rotated to make the connecting column 310 drive the sliding block 330 to slide in the guide groove 340 through the inserting rod 320, at this moment, the supporting force of the telescopic rod 410 and the elastic force of the first spring 420 are matched to make the top plate 430 extrude the inserting rod 320 downward, so as to facilitate taking out the inserting rod 320 from the inside of the fixed column 2, then the connecting component 3, the limiting component 5, the connecting frame 6, the positioning component 7 and the bearing basket 8 are taken out from the inside of the coating box 130, so as to facilitate taking out the knives hung on the hooks 630 in turn and regularizing them, at the same time, it is convenient to arrange the knives without coating in the inside of the coating box 130 to coat them, reduce the downtime of the device, and thus improve the coating efficiency of the device on the knives.

[0047] Embodiment 3: please refer to Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 and Figure 10 The limiting component 5 comprises a rotating disc 510, and the rotating disc 510 is sleeved outside the connecting column 310, the inner wall of the rotating disc 510 is fixedly installed with a limiting ring 520, the inside of the connecting column 310 is fixedly installed with a frame 530, the inside of the frame 530 is inserted with a threaded cap 540 through a bearing, the inside of the threaded cap 540 is inserted with a threaded column 550, the outside of the threaded cap 540 is fixedly installed with a circular gear 560, the bottom end of the threaded column 550 is fixedly installed with a limiting block 570, the transverse section of the limiting ring 520 is a “T” shaped structure, the inside of the connecting column 310 is provided with a rotating groove matched with the limiting ring 520, the rotating disc 510 is engaged with the circular gear 560 through the teeth, the threaded cap 540 is engaged with the threaded column 550 through the thread, and the inside of the connecting column 310 is provided with a sliding groove matched with the limiting block 570.

[0048] When the device works, the rotating disc 510 is engaged with the circular gear 560 through the thread, and the rotating disc 510 is stably rotated in the connecting column 310 through the limiting ring 520, at the same time, the circular gear 560 drives the threaded cap 540 and the threaded column 550 to be engaged through the thread, and the threaded column 550 is limited by the limiting block 570, at this moment, the threaded column 550 moves upward, at this moment, the top end of the threaded column 550 abuts against the bottom end of the fixed column 2, thereby improving the stability of the inserting rod 320 clamped in the inside of the fixed column 2, and preventing the phenomenon that the inserting rod 320 falls off from the inside of the fixed column 2.

[0049] Embodiment 4: please refer to Figure 3 , Figure 4 , Figure 5 and Figure 9The connecting frame 6 comprises a disc 610 fixedly installed on the outer side of the connecting column 310, a connecting rod 620 inserted in the disc 610, and a hook 630 fixedly installed at the bottom end of the connecting rod 620. The positioning assembly 7 comprises a U-shaped frame 710 fixedly installed at the top end of the disc 610, a positioning rod 720 inserted in the U-shaped frame 710, a limiting strip 730 fixedly installed in the U-shaped frame 710, a second spring 740 sleeved on the outer side of the positioning rod 720, and a groove formed in the connecting rod 620 and matched with the positioning rod 720. The bottom end of the second spring 740 is fixedly installed on the upper surface of the disc 610. The limiting strip 730 is arranged in two groups and arrayed around the center axis of the positioning rod 720. A sliding slot matched with the limiting strip 730 is formed in the positioning rod 720.

[0050] In the working process of the device, the limiting strip 730 limits the positioning rod 720, then the positioning rod 720 is pulled to be separated from the connecting rod 620, the connecting rod 620 is taken out from the disc 610, the damaged hook 630 is replaced, the new connecting rod 620 is inserted into the disc 610, and the connecting rod 620 is stably installed in the disc 610 due to the slope of the positioning rod 720 and the elastic force of the second spring 740.

[0051] Working principle: the user will be external power supply with the device and then open the switch, open the door 140 will be plated with the cutter in turn hung in the hook 630 below the plating box 130 inside, then turn off the door 140, make the plating box 130 in a sealed state, through the controller 120 control plating box 130 on the cutter plating, when the plating box 130 on the cutter plating is completed, open the door 140, rotate the turntable 510 makes it with the circular gear 560 through the thread meshing, at the same time the circular gear 560 drive screw cap 540 and screw column 550 through the thread meshing, and the screw column 550 is limited by the limiting block 570 limit, at this moment the screw column 550 moves downward, at this moment the screw column 550 leaves the fixed column 2 directly below, the connecting column 310 is extruded upward in the fixed column 2 through the plug rod 320, then rotate the connecting column 310, make the connecting column 310 drive the sliding block 330 slide in the guide groove 340 through the plug rod 320, at this moment through the support force of the telescopic rod 410 and the elastic force of the first spring 420 cooperate, make the top plate 430 extrude the plug rod 320 downward, facilitate the plug rod 320 from the fixed column 2 inside to take out, then take out the connecting assembly 3, limiting assembly 5, connecting frame 6, positioning assembly 7 and bearing basket 8 from the inside of the plating box 130, in order to facilitate the cutter hung in the hook 630 in turn to take off and make it neat, through the setting of bearing basket 8, facilitate the cutter to fall is stored, then facilitate the cutter without plating is arranged in the inside of the plating box 130 to be plated, reduce the downtime of the device, thereby improving the plating efficiency of the cutter of the device, through the limiting of the limiting strip 730 to the positioning rod 720, then pull the positioning rod 720 makes the positioning rod 720 from the inside of the connecting rod 620, take out the connecting rod 620 from the inside of the disc 610, in order to facilitate the worker to take off the cutter hung outside the hook 630 in turn, and facilitate the damaged hook 630 to replace the purpose, and the new connecting rod 620 is inserted in the inside of the disc 610, because the inclined surface of the positioning rod 720 and the elastic force of the second spring 740, make the positioning rod 720 is inserted in the inside of the connecting rod 620, thereby improving the stability of the connecting rod 620 installed in the inside of the disc 610.

[0052] The above shows and describes the basic principles, main features and advantages of the present application. Those skilled in the art should understand that the present application is not limited to the above embodiments, and the above embodiments and descriptions in the specification are only to illustrate the principles of the present application. Without departing from the spirit and scope of the present application, various changes and improvements can be made to the present application, and these changes and improvements all fall within the scope of the present application. The scope of protection of the present application is defined by the appended claims and their equivalents.

Claims

1. A multi-arc ion plating device for PVD tool spray coating, characterized by: It includes a coating device (1); The coating device (1) comprises a base (110), and a controller (120) is fixedly mounted on the top of the base (110); A coating box (130) is fixedly mounted on the top of the base (110), and an opening and closing door (140) is hingedly connected to the outside of the coating box (130); a fixing column (2) is fixedly mounted inside the coating box (130), and a connecting assembly (3) is provided at the bottom end of the fixing column (2); The connecting assembly (3) includes a connecting column (310), and the connecting column (310) is arranged at the bottom end of the fixed column (2); a plug rod (320) is fixedly installed on the top end of the connecting column (310); a slider (330) is fixedly installed on the outside of the plug rod (320); a guide groove (340) is provided inside the fixed column (2); the ejection assembly (4) includes a telescopic rod (410), and the telescopic rod (410) is fixedly installed inside the fixed column (2); a first spring (420) is sleeved on the outside of the telescopic rod (410); and a top plate (430) is fixedly installed on the bottom end of the telescopic rod (410); An ejection assembly (4) is fixedly mounted inside the fixed column (2), a limiting assembly (5) is sleeved on the outside of the connecting assembly (3), a connecting frame (6) is fixedly mounted on the outside of the connecting assembly (3), a positioning assembly (7) is fixedly mounted on the top of the connecting frame (6), and a carrying basket (8) is fixedly mounted on the outside of the connecting assembly (3); The connecting frame (6) includes a disc (610), and the disc (610) is fixedly mounted on the outside of the connecting column (310), a connecting rod (620) is inserted into the inside of the disc (610), and a hook (630) is fixedly mounted on the bottom end of the connecting rod (620), and the positioning assembly (7) includes a U-shaped frame (710), and the U-shaped frame (710) is fixedly mounted on the top end of the disc (610), a positioning rod (720) is inserted into the inside of the U-shaped frame (710), a limiting strip (730) is fixedly mounted inside the U-shaped frame (710), and a second spring (740) is sleeved on the outside of the positioning rod (720); The bottom end of the positioning rod (720) is in an inclined structure, the interior of the connecting rod (620) is provided with a groove adapted to the positioning rod (720), the bottom end of the second spring (740) is fixedly mounted on the upper surface of the disc (610), two groups of the limiting bars (730) are provided and are distributed in an array around the central axis of the positioning rod (720), and the interior of the positioning rod (720) is provided with a sliding groove adapted to the limiting bars (730).

2. The multi-arc ion plating device according to claim 1, characterized in that: The outer diameter of the insertion rod (320) is compatible with the inner diameter of the fixed column (2), and the outer diameter of the slider (330) is compatible with the inner diameter of the guide groove (340). Two groups of the sliders (330) and the guide grooves (340) are provided and are distributed in an array around the central axis of the connecting column (310).

3. The multi-arc ion plating device according to claim 2, characterized in that: The telescopic rod (410) and the first spring (420) are distributed in an array pattern around the central axis of the fixed column (2), and the bottom end of the top plate (430) is in contact with the top end of the insertion rod (320).

4. The multi-arc ion plating equipment according to claim 1, characterized in that: The limiting assembly (5) comprises a rotating disk (510), and the rotating disk (510) is sleeved on the outside of the connecting column (310), a limiting ring (520) is fixedly installed on the inner wall of the rotating disk (510), a frame (530) is fixedly installed inside the connecting column (310), and a threaded cap (540) is inserted into the inside of the frame (530) through a bearing, a threaded column (550) is inserted into the inside of the threaded cap (540), a circular gear (560) is fixedly installed on the outside of the threaded cap (540), and a limiting block (570) is fixedly installed at the bottom end of the threaded column (550).

5. The multi-arc ion plating equipment according to claim 4, characterized in that: The cross section of the limiting ring (520) is in a "T"-shaped structure, and a rotation groove adapted to the limiting ring (520) is provided inside the connecting column (310).

6. The multi-arc ion plating equipment according to claim 5, characterized in that: The rotating disk (510) and the circular gear (560) are meshed with each other through teeth, the threaded cap (540) and the threaded column (550) are meshed with each other through threads, and a sliding groove adapted to the limit block (570) is provided inside the connecting column (310).

Images