Cleaning apparatus and method for aluminum nitride substrates

Abstract

The present application relates to the technical field of aluminum nitride substrate cleaning, and particularly relates to an aluminum nitride substrate cleaning device and method. The device comprises contact frames, sliding seats, lifting frames, connecting springs and mounting plates. Two contact frames are connected to the left and right sides of the top of the mounting frame. Multiple sliding seats are connected to the upper part of the mounting frame in a sliding manner. A lifting frame for driving the aluminum nitride substrate to move up and down for cleaning is connected to each sliding seat. A connecting spring is connected between the lifting frame and the adjacent sliding seat. A mounting plate is connected to the bottom of the lifting frame. The present application can put multiple aluminum nitride substrates into the placing frame in sequence, then drive the aluminum nitride substrate to rotate through the synchronous belt assembly. Under the cooperation of the contact rod and the contact frame, the aluminum nitride substrate can move up and down intermittently for acid pickling and cleaning in sequence. The acid pickling solvent and pure water can be shaken to increase the contact area with the acid pickling solvent and pure water, thereby improving the cleaning effect.

Description

Technical Field

[0001] This invention relates to the technical field of aluminum nitride substrate cleaning, and more particularly to a cleaning device and method for aluminum nitride substrates. Background Technology

[0002] Aluminum nitride substrates are insulating ceramic substrates with high thermal and electrical conductivity. They also have a low coefficient of thermal expansion and high oxidation resistance, making them a suitable choice for a variety of semiconductors.

[0003] Currently, specialized cleaning machines are typically used to clean aluminum nitride substrates. These machines use rotating rollers to transport the substrates, allowing them to enter the cleaning process. However, during this slow movement, the contact area between the substrate and the cleaning agent inside the machine is limited, and a portion of the substrate's bottom remains in constant contact with the rollers. This makes it difficult to thoroughly clean the bottom of the substrate, resulting in poor cleaning performance. Summary of the Invention

[0004] In view of this, the present invention provides a cleaning device and method for aluminum nitride substrates, which can overcome the shortcomings of existing cleaning machines, such as limited contact area between aluminum nitride substrates and cleaning agents, difficulty in cleaning the bottom of aluminum nitride substrates, and poor cleaning effect.

[0005] Technical solution

[0006] A cleaning device for aluminum nitride substrates includes a base plate, a mounting frame, and a storage tank. The mounting frame is connected to the top of the base plate, and two storage tanks for storing pickling solvent and pure water are connected to the front and rear sides of the top of the base plate. The device also includes a contact frame, a sliding seat, a lifting frame, a connecting spring, a mounting plate, contact rods, protrusions, a drive assembly, a placement mechanism, and a lifting mechanism. Two contact frames are connected to the left and right sides of the front and rear sides of the top of the mounting frame. Multiple sliding seats are slidably connected to the upper part of the mounting frame, and a lifting frame for moving the aluminum nitride substrate up and down for cleaning is slidably connected to each sliding seat. A connecting spring connects each lifting frame to its adjacent sliding seat. A mounting plate is connected to the bottom of each lifting frame, and contact rods are connected to the front and rear sides of the mounting plate. The contact rods rotate and contact the contact frames, which then press the contact rods downwards. Protrusions are connected to the front and rear sides of the sliding seats. The drive assembly drives the sliding seats to rotate. The placement mechanism places the aluminum nitride substrate, and the lifting mechanism lifts the aluminum nitride substrate for cleaning.

[0007] Preferably, the drive assembly includes a first motor and a timing belt assembly. The first motor is connected to the top left side of the mounting bracket, and the timing belt assembly is mounted on the upper part of the mounting bracket. The timing pulley on the left side of the timing belt assembly is connected to the output shaft of the first motor. When the timing belt of the timing belt assembly rotates, it will contact the protrusion to drive the protrusion to rotate.

[0008] Preferably, the placement mechanism includes a connecting frame, a placement frame, a limiting block, a magnet, a protruding plate, a guide block, and a limiting rod. The bottom of the mounting plate is connected to a connecting frame, and a placement frame for placing an aluminum nitride substrate is slidably connected inside the connecting frame. Multiple sets of limiting blocks for limiting the aluminum nitride substrate are symmetrically connected vertically inside the placement frame, with two limiting blocks in each set. Magnets are connected to the front and rear sides of the top of the connecting frame, and a protruding plate for limiting the placement frame is rotatably connected to each magnet. The protruding plate is made of iron and blocks the front and rear sides of the placement frame. A guide block for guiding the aluminum nitride substrate is connected to the top of each limiting block, and a limiting rod for limiting the aluminum nitride substrate is connected between the two limiting blocks in the same set.

[0009] Preferably, the lifting mechanism includes a limit ring, a sliding frame, a return spring, and a pull rope. Limit rings are symmetrically connected to the left and right sides of the lower part of the connecting frame. Sliding frames for lifting the aluminum nitride substrate are slidably connected to the connecting frame. A return spring is connected between the limit ring and the adjacent sliding frame. Pull ropes are symmetrically connected between the top of the sliding frame and the bottom of the sliding seat.

[0010] Preferably, it also includes a blower mechanism for drying the aluminum nitride substrate. The blower mechanism includes a mounting base, a sliding plate, a second motor, a screw, a hollow frame, and an air pump. Mounting bases are connected to the top left rear side and top right front side of the base plate. Sliding plates are slidably connected to the mounting bases. The second motor is connected to the upper part of the mounting base. A screw is connected to the output shaft of the second motor. The screw is threadedly connected to the adjacent sliding plate. A hollow frame is connected to the bottom of the sliding plate. An air pump is connected to the hollow frame. The air outlet of the air pump communicates with the hollow frame.

[0011] Preferably, it also includes a shovel for cleaning the top of the mounting bracket. Shovels are symmetrically connected to the lower parts of both sides of the sliding seat, and the shovels are in contact with the top of the mounting bracket.

[0012] Preferably, it also includes a pushing mechanism, which includes a fixed plate, a sliding rod, a connecting block, a compression spring, and an inclined plate. The top of each sliding plate is connected to a fixed plate, and each fixed plate is slidably connected to a sliding rod. The end of each sliding rod away from the fixed plate is connected to a connecting block, and a compression spring is connected between the connecting block and its adjacent fixed plate. The compression spring is wrapped around the outside of the sliding rod. On the side of each connecting block away from the fixed plate, there are two inclined plates symmetrically connected to push the connecting frame to move and align.

[0013] The present invention also provides a cleaning method for an aluminum nitride substrate cleaning device, comprising the following steps: First, multiple aluminum nitride substrates are placed sequentially into a placement frame. Then, a first motor drives a synchronous belt assembly to rotate, which in turn drives a contact rod, a placement frame, and aluminum nitride substrates to rotate. The contact rod contacts multiple protrusions of a contact frame in sequence, thereby driving the placement frame and the aluminum nitride substrates inside it to move up and down intermittently, allowing the aluminum nitride substrates to be acid-washed with pickling solvent and then cleaned with pure water in sequence. Whenever the mounting plate moves downward, it drives a sliding frame to move upward relative to the connecting frame, thereby slightly lifting the aluminum nitride substrates in the placement frame and cleaning the contact area between the aluminum nitride substrates and the placement frame.

[0014] The beneficial effects of this invention are:

[0015] 1. This invention allows multiple aluminum nitride substrates to be placed sequentially into a placement frame, and then driven to rotate by a synchronous belt assembly. With the cooperation of the contact rod and the contact frame, the aluminum nitride substrates can be moved up and down intermittently to perform pickling and cleaning in sequence. It can also cause the pickling solvent and pure water to slosh, increasing the contact area with the pickling solvent and pure water and improving the cleaning effect.

[0016] 2. When the connecting frame of the present invention moves downward, it can drive the aluminum nitride substrate downward into the liquid storage tank for cleaning. At the same time, it can drive the sliding frame to move upward relative to the connecting frame, thereby slightly lifting the aluminum nitride substrate in the placement frame, so that the contact part between the aluminum nitride substrate and the placement frame can also be cleaned, thus improving the cleaning effect.

[0017] 3. The present invention drives the screw to rotate via the second motor, which can move the hollow frame inward to the outside of the connecting frame. Then, by blowing air through the air pump, the air blown at the hollow frame can dry the cleaned aluminum nitride substrate, and can also make the pure water adhering to the aluminum nitride substrate drip back into the storage tank, avoiding waste.

[0018] 4. When the sliding plate of the present invention moves inward, it can drive the inclined plate to move inward. The inclined plate can push the connecting frame to move slightly, so that the connecting frame can be aligned with the hollow frame, preventing the connecting frame from blocking the movement of the hollow frame, and allowing the hollow frame to move accurately to the outside of the connecting frame. Attached Figure Description

[0019] Figure 1 This is a three-dimensional structural diagram of the present invention.

[0020] Figure 2 This is a three-dimensional structural diagram of the sliding seat of the present invention.

[0021] Figure 3 This is a three-dimensional structural diagram of the first motor and synchronous belt assembly of the present invention.

[0022] Figure 4This is a schematic diagram of the first three-dimensional structure of the placement mechanism of the present invention.

[0023] Figure 5 This is a schematic diagram of a second three-dimensional structure of the placement mechanism of the present invention.

[0024] Figure 6 This is a three-dimensional structural diagram of the lifting mechanism of the present invention.

[0025] Figure 7 This is a three-dimensional structural diagram of the blower mechanism of the present invention.

[0026] Figure 8 This is a schematic diagram of the specific structure of the blower mechanism of the present invention.

[0027] Figure 9 This is a three-dimensional structural diagram of the sliding seat and shovel plate of the present invention.

[0028] Figure 10 This is a three-dimensional structural diagram of the actuating mechanism of the present invention.

[0029] Explanation of reference numerals in the attached drawings: 1: Base plate, 2: Mounting bracket, 3: Liquid storage tank, 4: Contact bracket, 5: Sliding seat, 6: Lifting bracket, 7: Connecting spring, 8: Mounting plate, 9: Contact rod, 10: Protrusion, 11: First motor, 12: Synchronous belt assembly, 13: Placement mechanism, 131: Connecting frame, 132: Placement frame, 133: Limiting block, 134: Magnet, 135: Protrusion plate, 136: Guide block, 137: Limiting rod, 1 4: Lifting mechanism; 141: Limiting ring; 142: Sliding frame; 143: Return spring; 144: Pull rope; 15: Blowing mechanism; 151: Mounting base; 152: Sliding plate; 153: Second motor; 154: Screw; 155: Hollow frame; 156: Air pump; 16: Shovel plate; 17: Pushing mechanism; 171: Fixed plate; 172: Sliding rod; 173: Connecting block; 174: Compression spring; 175: Inclined plate. Implementation

[0030] The embodiments of the present invention will be described below with reference to the accompanying drawings.

[0031] Example: A cleaning device for aluminum nitride substrates, such as... Figures 1-6As shown, the system includes a base plate 1, a mounting bracket 2, a liquid storage tank 3, a contact bracket 4, a sliding seat 5, a lifting bracket 6, a connecting spring 7, a mounting plate 8, a contact rod 9, a protrusion 10, a first motor 11, a synchronous belt assembly 12, a placement mechanism 13, and a lifting mechanism 14. The mounting bracket 2 is welded to the top of the base plate 1. Two liquid storage tanks 3 are connected to the front and rear sides of the top of the base plate 1. The liquid storage tanks 3 can hold pickling solvent or pure water. Two contact brackets 4 are welded to the left and right sides of the front and rear sides of the top of the mounting bracket 2. Each contact bracket 4 has multiple protrusions. Multiple sliding seats 5 are slidably connected to the upper part of the mounting bracket 2 at intervals. The sliding seats 5 can rotate along a rectangular trajectory on the mounting bracket 2. Each sliding seat 5 is slidably connected to a lifting bracket 6. Each adjacent sliding seat 5 is connected to a connecting spring 7. The bottom of the lifting frame 6 is connected to a mounting plate 8. The front and rear sides of the mounting plate 8 are connected to contact rods 9. When the contact rod 9 rotates to contact the protrusion of the contact frame 4, the contact frame 4 can squeeze the contact rod 9 to move downward. The front and rear sides of the sliding seat 5 are welded with protrusions 10. The top left side of the mounting frame 2 is bolted to a first motor 11. The upper part of the mounting frame 2 is equipped with a synchronous belt assembly 12. The synchronous pulley on the left side of the synchronous belt assembly 12 is connected to the output shaft of the first motor 11. The rotation of the synchronous belt of the synchronous belt assembly 12 will contact the protrusion 10, thereby driving the protrusion 10 and the sliding seat 5 to rotate. The mounting plate 8 is provided with a placement mechanism 13, and the placement mechanism 13 is provided with a lifting mechanism 14.

[0032] like Figure 1 , Figure 4 and Figure 5 As shown, the placement mechanism 13 includes a connecting frame 131, a placement frame 132, a limiting block 133, a magnet 134, a protruding plate 135, a guide block 136, and a limiting rod 137. The bottom of the mounting plate 8 is welded with a connecting frame 131, and the placement frame 132 is slidably connected within each connecting frame 131. Multiple aluminum nitride substrates can be sequentially placed into the placement frame 132. Multiple sets of limiting blocks 133 are symmetrically connected vertically within the placement frame 132, with two blocks in each set. The limiting blocks 133 can limit the movement of the aluminum nitride substrates. The top and front / back sides of the connecting frame 131 are connected to... There is a magnet 134, and each magnet 134 is rotatably connected to a protrusion 135. The protrusion 135 is made of iron. The magnet 134 can attract the protrusion 135 through magnetic force, thereby fixing the position of the protrusion 135. The protrusion 135 blocks the front and rear sides of the placement frame 132, thereby limiting the placement frame 132. Each limiting block 133 has a guide block 136 welded to its top. Each pair of limiting blocks 133 in the same group is connected to a limiting rod 137. The limiting rod 137 can separate each aluminum nitride substrate and also limit and fix the aluminum nitride substrate to prevent the aluminum nitride substrate from tilting.

[0033] like Figure 1 and Figure 6As shown, the lifting mechanism 14 includes a limit ring 141, a sliding frame 142, a return spring 143, and a pull rope 144. Limit rings 141 are symmetrically welded to the left and right sides of the lower part of the connecting frame 131. Sliding frames 142 are slidably connected to the connecting frame 131. The upward movement of the sliding frame 142 can lift the aluminum nitride substrate, so that the contact part between the aluminum nitride substrate and the placement frame 132 can be cleaned. A return spring 143 is connected between the limit ring 141 and the adjacent sliding frame 142. Pull ropes 144 are symmetrically connected between the top of the sliding frame 142 and the bottom of the sliding seat 5.

[0034] Initially, the pull rope 144 is in a relaxed state. First, the pickling solvent and pure water are placed alternately in the four storage tanks 3. Then, the convex plate 135 on one side is rotated upwards by 180 degrees, causing the convex plate 135 to loosen the placement frame 132. Then, the placement frame 132 can be pulled outwards, and multiple aluminum nitride substrates are placed into the placement frame 132 in sequence. The guide block 136 can guide the aluminum nitride substrates, allowing them to fit better into the placement frame 132. The limiting block 133 can limit the aluminum nitride substrates, and the limiting rod 137 can limit and separate each aluminum nitride substrate to prevent it from tilting. Then, the placement frame 132 is pushed back to its original position, and the convex plate 135 is rotated downwards by 180 degrees. The magnet 134 uses magnetic force to fix the position of the protrusion 135, causing the protrusion 135 to block the placement frame 132 again, thereby limiting and fixing the placement frame 132. Then, the first motor 11 drives the synchronous belt assembly 12 to rotate. When the synchronous belt of the synchronous belt assembly 12 contacts the protrusion 10, it can push the protrusion 10 to rotate. The protrusion 10 can drive the sliding seat 5, the lifting frame 6, the mounting plate 8, and the contact rod 9 to rotate, thereby driving the placement frame 132 and its internal aluminum nitride substrate to rotate. When the contact rod 9 contacts the protruding part of the contact frame 4, the contact frame 4 will squeeze the contact rod 9 downward, driving the mounting plate 8 and the lifting frame 6 to move downward. The connecting spring 7 is compressed, and the mounting plate 8 can... The placement frame 132 and the aluminum nitride substrate inside it move downwards, allowing the aluminum nitride substrate to enter one of the storage tanks 3. When the contact rod 9 separates from the protrusion of the contact frame 4, the connecting spring 7 returns to its original state, which can drive the mounting plate 8, the lifting frame 6, and the contact rod 9 to move upwards and reset. The mounting plate 8 can drive the placement frame 132 and the aluminum nitride substrate inside it to move upwards. Subsequently, the contact rod 9 will contact multiple protrusions of the contact frame 4 in sequence, thereby driving the placement frame 132 and the aluminum nitride substrate inside it to move up and down intermittently. This allows the aluminum nitride substrate to be pickled with pickling solvent and then cleaned with pure water in sequence. During the cleaning process, the aluminum nitride substrate can move up and down in the pickling solvent and pure water. This increases the contact area with pickling solvent and pure water, improving the cleaning effect. Simultaneously, when the mounting plate 8 moves downwards, it drives the connecting frame 131 downwards. The connecting frame 131, through the limiting ring 141 and the return spring 143, drives the sliding frame 142 downwards, tauting the pull rope 144. At this time, the mounting plate 8 drives the limiting ring 141 to continue moving downwards. Under the action of the pull rope 144, the sliding frame 142 cannot move downwards, and the return spring 143 is compressed, causing the sliding frame 142 to move upwards relative to the connecting frame 131. This allows the aluminum nitride substrate inside the placement frame 132 to be slightly lifted upwards, enabling the contact area between the aluminum nitride substrate and the placement frame 132 to be cleaned, thus improving the cleaning effect.When the timing belt of the timing belt assembly 12 separates from the bump 10, the sliding seat 5 stops sliding, causing the placement frame 132 and the aluminum nitride substrate inside it to stop moving. Then, the cleaned aluminum nitride substrate can be taken out, and a new batch of aluminum nitride substrates can be placed in. Repeating the above operation can automatically clean the new aluminum nitride substrates.

[0035] like Figure 1 , Figure 7 and Figure 8 As shown, it also includes a blower mechanism 15, which includes a mounting base 151, a sliding plate 152, a second motor 153, a screw 154, a hollow frame 155, and an air pump 156. Mounting bases 151 are welded to the top left rear side and top right front side of the base plate 1. Sliding plates 152 are slidably connected to each mounting base 151. The second motor 153 is bolted to the upper part of each mounting base 151, and a screw 154 is connected to the output shaft of each second motor 153. Each screw 154 is threadedly connected to its adjacent sliding plate 152. Each sliding plate 152 has a hollow frame 155 connected to its bottom. The screw 154 is driven to rotate by the second motor 153, which can drive the hollow frame 155 to move inward to the outside of the connecting frame 131. Each hollow frame 155 is bolted with an air pump 156. The air outlet of the air pump 156 is connected to the hollow frame 155. By blowing air through the air pump 156, the air at the hollow frame 155 can be dried to dry the aluminum nitride substrate.

[0036] After the placement frame 132 and the aluminum nitride substrate inside it stop moving, the screw 154 can be driven to rotate by the second motor 153, which will drive the sliding plate 152 to move inward. The sliding plate 152 can drive the hollow frame 155 to move inward, so that the hollow frame 155 can be located outside the connecting frame 131. Then, by blowing air through the air pump 156, the air blowing at the hollow frame 155 can dry the cleaned aluminum nitride substrate, and the pure water adhering to the aluminum nitride substrate can drip down back into the storage tank 3.

[0037] like Figure 9 As shown, it also includes a scraper plate 16. The lower parts of the left and right sides of the sliding seat 5 are symmetrically welded with scraper plates 16, and the scraper plates 16 are in contact with the top of the mounting frame 2. When the sliding seat 5 rotates, it can drive the scraper plate 16 to rotate. The scraper plate 16 can scrape off the impurities stuck to the top of the mounting frame 2 and prevent the impurities from affecting the rotation of the sliding seat 5.

[0038] like Figure 1 and Figure 10As shown, it also includes a pushing mechanism 17, which includes a fixed plate 171, a sliding rod 172, a connecting block 173, a compression spring 174, and an inclined plate 175. The top of the sliding plate 172 is welded with a fixed plate 171, and the fixed plate 172 is slidably connected to the fixed plate 171. The end of the sliding rod 172 away from the fixed plate 171 is connected to a connecting block 173. The connecting block 173 and its adjacent fixed plate 171 are connected with a compression spring 174. The compression spring 174 is wrapped around the outside of the sliding rod 172. Two inclined plates 175 are symmetrically welded to the side of the connecting block 173 away from the fixed plate 171.

[0039] When the sliding plate 152 moves inward, it can drive the fixed plate 171, sliding rod 172, connecting block 173 and inclined plate 175 to move inward. When the inclined plate 175 contacts the connecting frame 131, it can push the connecting frame 131 to move slightly, so that the connecting frame 131 can be aligned with the hollow frame 155, preventing the connecting frame 131 from blocking the movement of the hollow frame 155. After the connecting frame 131 is aligned, the sliding rod 172, connecting block 173 and inclined plate 175 stop moving. The sliding plate 152 can drive the fixed plate 171 to continue to move inward. The compression spring 174 is compressed, so that the hollow frame 155 can be accurately moved to the outside of the connecting frame 131.

[0040] like Figures 1-6 As shown, the present invention also provides a cleaning method for an aluminum nitride substrate cleaning device, comprising the following steps: First, multiple aluminum nitride substrates are sequentially placed into a placement frame 132. Then, a first motor 11 drives a synchronous belt assembly 12 to rotate, which can drive the contact rod 9, the placement frame 132, and the aluminum nitride substrates to rotate. The contact rod 9 will sequentially contact multiple protrusions of the contact frame 4, thereby driving the placement frame 132 and the aluminum nitride substrates inside it to move up and down intermittently, so that the aluminum nitride substrates can be sequentially acid-washed with pickling solvent and cleaned with pure water. Whenever the mounting plate 8 moves downward, it can drive the sliding frame 142 to move upward relative to the connecting frame 131, thereby slightly lifting the aluminum nitride substrates in the placement frame 132, so that the contact parts between the aluminum nitride substrates and the placement frame 132 can be cleaned.

[0041] The above description is merely an embodiment of the present invention and is not intended to limit the present invention. All equivalent substitutions made within the principles of the present invention should be included within the scope of protection of the present invention. Contents not described in detail in this invention are existing technologies known to those skilled in the art.

Claims

1. A cleaning device for aluminum nitride substrates, comprising a base plate (1), a mounting frame (2), and a storage tank (3), wherein the mounting frame (2) is connected to the top of the base plate (1), and two storage tanks (3) for storing pickling solvent and pure water are connected to the front and rear sides of the top of the base plate (1), characterized in that, It also includes a contact frame (4), a sliding seat (5), a lifting frame (6), a connecting spring (7), a mounting plate (8), a contact rod (9), a protrusion (10), a drive assembly, a placement mechanism (13), and a lifting mechanism (14). Two contact frames (4) are connected to the left and right sides of the top front and rear sides of the mounting frame (2). Multiple sliding seats (5) are slidably connected to the upper part of the mounting frame (2). Each sliding seat (5) is slidably connected to a lifting frame (6) for moving the aluminum nitride substrate up and down for cleaning. The lifting frame (6) is connected to the adjacent sliding seat (4). 5) are connected by connecting springs (7), and the bottom of the lifting frame (6) is connected by mounting plates (8). The front and rear sides of the mounting plate (8) are connected by contact rods (9). The contact rods (9) will contact the contact frame (4) as the sliding seat (5) slides. The contact frame (4) is used to squeeze the contact rods (9) to move downward. The front and rear sides of the sliding seat (5) are connected by protrusions (10). The driving component is used to drive the sliding seat (5) to rotate. The placement mechanism (13) is used to place the aluminum nitride substrate. The lifting mechanism (14) is used to lift the aluminum nitride substrate for cleaning. The drive assembly includes a first motor (11) and a timing belt assembly (12). The first motor (11) is connected to the top left side of the mounting bracket (2), and the timing belt assembly (12) is mounted on the upper part of the mounting bracket (2). The timing pulley on the left side of the timing belt assembly (12) is connected to the output shaft of the first motor (11). The timing belt of the timing belt assembly (12) rotates and contacts the protrusion (10) to drive the protrusion (10) to rotate. The placement mechanism (13) includes a connecting frame (131); The lifting mechanism (14) includes a limit ring (141), a sliding frame (142), a reset spring (143), and a pull rope (144). The lower left and right sides of the connecting frame (131) are symmetrically connected with limit rings (141). The connecting frame (131) is slidably connected with a sliding frame (142) for lifting the aluminum nitride substrate upward. The limit ring (141) and its adjacent sliding frame (142) are connected with a reset spring (143). The top of the sliding frame (142) and the bottom of the sliding seat (5) are symmetrically connected with pull ropes (144).

2. The cleaning equipment for an aluminum nitride substrate according to claim 1, characterized in that, The placement mechanism (13) also includes a placement frame (132), a limiting block (133), a magnet (134), a protruding plate (135), a guide block (136), and a limiting rod (137). The bottom of the mounting plate (8) is connected to a connecting frame (131). The connecting frame (131) is slidably connected to a placement frame (132) for placing the aluminum nitride substrate. The placement frame (132) is symmetrically connected with multiple sets of limiting blocks (133) for limiting the aluminum nitride substrate. Each set of limiting blocks (133) has two blocks. Magnets (134) are connected to the front and rear sides of the top of the connecting frame (131). Each magnet (134) is rotatably connected to a protruding plate (135) for limiting the placement frame (132). The protruding plate (135) is made of iron and blocks the front and rear sides of the placement frame (132). Each limiting block (133) is connected to a guide block (136) for guiding the aluminum nitride substrate. Each of the two limiting blocks (133) in the same group is connected to a limiting rod (137) for limiting the aluminum nitride substrate.

3. The cleaning equipment for aluminum nitride substrates according to claim 1, characterized in that, It also includes a blower mechanism (15) for drying aluminum nitride substrates. The blower mechanism (15) includes a mounting base (151), a sliding plate (152), a second motor (153), a screw (154), a hollow frame (155), and an air pump (156). The mounting base (1) is connected to the top left rear side and the top right front side. The mounting base (151) is slidably connected to the sliding plate (152). The second motor (153) is connected to the upper part of the mounting base (151). The output shaft of the second motor (153) is connected to the screw (154). The screw (154) is threadedly connected to the adjacent sliding plate (152). The bottom of the sliding plate (152) is connected to the hollow frame (155). The air pump (156) is connected to the hollow frame (155). The air outlet of the air pump (156) is connected to the hollow frame (155).

4. The cleaning equipment for an aluminum nitride substrate according to claim 3, characterized in that, It also includes a shovel (16) for cleaning the top of the mounting bracket (2). The lower parts of the left and right sides of the sliding seat (5) are symmetrically connected with shovels (16), and the shovels (16) are in contact with the top of the mounting bracket (2).

5. The cleaning equipment for an aluminum nitride substrate according to claim 4, characterized in that, It also includes a pushing mechanism (17), which includes a fixed plate (171), a sliding rod (172), a connecting block (173), a compression spring (174), and an inclined plate (175). The top of the sliding plate (152) is connected to the fixed plate (171), and the fixed plate (171) is slidably connected to the sliding rod (172). The end of the sliding rod (172) away from the fixed plate (171) is connected to the connecting block (173). The connecting block (173) and the adjacent fixed plate (171) are connected to the compression spring (174). The compression spring (174) is wrapped around the outside of the sliding rod (172). The side of the connecting block (173) away from the fixed plate (171) is symmetrically connected to two inclined plates for pushing the connecting frame (131) to move and align. 175), when the sliding plate (152) moves inward, it can drive the fixed plate (171), sliding rod (172), connecting block (173) and inclined plate (175) to move inward. When the inclined plate (175) contacts the connecting frame (131), it can push the connecting frame (131) to move slightly, so that the connecting frame (131) can be aligned with the hollow frame (155) to prevent the connecting frame (131) from blocking the movement of the hollow frame (155). When the connecting frame (131) is aligned, the sliding rod (172), connecting block (173) and inclined plate (175) stop moving. The sliding plate (152) can drive the fixed plate (171) to continue to move inward. The compression spring (174) is compressed, so that the hollow frame (155) can be accurately moved to the outside of the connecting frame (131).

6. A cleaning method using the cleaning equipment for an aluminum nitride substrate according to any one of claims 1-5, characterized in that, Includes the following steps: First, multiple aluminum nitride substrates are placed into the placement frame (132) in sequence. Then, the synchronous belt assembly (12) is driven to rotate by the first motor (11), which can drive the contact rod (9), the placement frame (132) and the aluminum nitride substrate to rotate. The contact rod (9) will contact multiple protrusions of the contact frame (4) in sequence, thereby driving the placement frame (132) and the aluminum nitride substrate inside it to move up and down intermittently, so that the aluminum nitride substrate can be pickled with pickling solvent and cleaned with pure water in sequence. Whenever the mounting plate (8) moves down, it can drive the sliding frame (142) to move up relative to the connecting frame (131), thereby lifting the aluminum nitride substrate in the placement frame (132) slightly upward, so that the contact part between the aluminum nitride substrate and the placement frame (132) can be cleaned.

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