Cantilevered probe card and its carrier

Abstract

A cantilever probe card and a carrier thereof are disclosed. The carrier includes a carrier body, a metal carrier sheet and a plurality of coarse adjustment members. The metal carrier sheet is mounted to the carrier body and has a carrier surface. The coarse adjustment members are spaced apart from each other between the carrier body and the metal carrier sheet. Each of the coarse adjustment members is independently operable along a test direction to change a distance between the carrier surface and the carrier body. The carrier surface includes a plurality of mounting regions spaced apart from each other, and at least two of the mounting regions form a mounting step in the test direction. The carrier is capable of deforming the metal carrier sheet by at least one of the coarse adjustment members to reduce the mounting step in the test direction. Accordingly, the mounting regions have more consistent heights along the test direction.

Description

Technical Field

[0001] This invention relates to a probe card, and more particularly to a cantilever probe card and its carrier. Background Technology

[0002] Existing cantilever probe cards are all being improved to make the tips of all cantilever probes coplanar. However, any component in an existing cantilever probe card may be a factor that prevents the achievement of the above goal (e.g., a carrier included in an existing cantilever probe card is formed by assembling multiple components, and the assembly of the multiple components is prone to tolerance accumulation).

[0003] Therefore, the inventor believed that the above-mentioned defects could be improved, and thus devoted himself to research and applied scientific principles, and finally proposed an invention that is reasonably designed and effectively improves the above-mentioned defects. Summary of the Invention

[0004] The purpose of this invention is to provide a cantilever probe card and its carrier, which can effectively improve the defects that may occur in existing cantilever probe cards.

[0005] This invention discloses a cantilever probe card, comprising: a support base, including: a body; a metal support plate mounted on the support base and having a support surface; and a plurality of coarse adjustment members disposed at intervals between the support base and the metal support plate; wherein each coarse adjustment member can operate independently along a test direction to change the distance between the support surface and the support base; and a plurality of probe modules disposed at intervals on a plurality of mounting areas on the support surface; wherein at least two of the plurality of mounting areas form a mounting height difference in the test direction; wherein the support base can deform the metal support plate by at least one coarse adjustment member to reduce the mounting height difference in the test direction.

[0006] Preferably, the support includes a limiting mechanism corresponding to the seat body and the metal support plate, and the distance between the support surface and the seat body can be limited within a predetermined range by the limiting mechanism.

[0007] Preferably, one end of each coarse adjustment member is inserted into the seat body along the test direction, and the other end of each coarse adjustment member abuts against the metal support plate along the test direction.

[0008] Preferably, each coarse adjustment component includes: a push rod having a guide surface at one end and passing through the base along the test direction, and the other end of the push rod abutting against a metal support plate along the test direction; and a drive shaft passing through the base in a direction perpendicular to the test direction; wherein the drive shaft abuts against the guide surface to drive the push rod to move along the test direction.

[0009] Preferably, each probe module includes: a support plate mounted on a corresponding mounting area; a substrate disposed on the support plate; wherein the substrate is non-planar and has a warpage in the test direction; a plurality of cantilever probes, one end of which is connected to the substrate, and the other end of each cantilever probe is a tip; and a plurality of fine adjustment members disposed at intervals between the support plate and the substrate; wherein each fine adjustment member can operate independently along the test direction to change the distance between the support plate and the substrate; wherein in each probe module, the substrate can be deformed by at least one fine adjustment member to reduce the warpage of the substrate in the test direction.

[0010] Preferably, the substrate includes a warped portion that is recessed toward the support plate; at least one fine adjustment member is positioned corresponding to the warped portion and can push against the warped portion to force it to deform away from the support plate.

[0011] Preferably, in each probe module, each cantilever probe includes: a welding section having a first end and a second end located on opposite sides, and the first end being welded to a substrate; a test section spaced apart from the welding section in a direction perpendicular to the test direction, and the test section having a tip and an outer edge and an inner edge located on opposite sides; two outer elastic arms, each having its two ends connected to the second end of the welding section and the inner edge of the test section respectively, and the two outer elastic arms being arranged spaced apart from each other; and a focusing portion connected to the inner edge and located between the tip and the two outer elastic arms; wherein the focusing portion forms a plurality of focus points on the side away from the two outer elastic arms; wherein the tip and the plurality of focus points can each form an observation point during the observation operation of a detection device to determine the position of the tip.

[0012] Preferably, in each cantilever probe, the end of the focusing portion away from the inner edge is connected to an adjacent outer elastic arm to jointly surround and form a closed space.

[0013] Preferably, one of the two external elastic arms is adjacent to the needle tip and is defined as a first external elastic arm, while the other of the two external elastic arms is defined as a second external elastic arm, and the length of the first external elastic arm is greater than the length of the second external elastic arm.

[0014] This invention also discloses a carrier for a cantilever probe card, comprising: a base; a metal carrier plate mounted on the base and having a bearing surface; and a plurality of coarse adjustment members disposed at intervals between the base and the metal carrier plate; wherein each coarse adjustment member can operate independently along a test direction to change the distance between the bearing surface and the base; wherein the bearing plate contains a plurality of mounting areas disposed at intervals, and at least two of the plurality of mounting areas form a mounting height difference in the test direction; wherein the carrier can deform the metal carrier plate by at least one coarse adjustment member to reduce the mounting height difference in the test direction.

[0015] In summary, the cantilever probe card and its carrier disclosed in the embodiments of the present invention, through multiple independently operable coarse adjustment components, effectively reduce the installation height difference that may occur between the carrier and at least two installation areas of the metal carrier sheet during the assembly process, thereby enabling multiple probe modules to be installed in multiple installation areas with more consistent height along the test direction.

[0016] To further understand the features and technical content of this invention, please refer to the following detailed description and accompanying drawings. However, these descriptions and drawings are only for illustrating the invention and are not intended to limit the scope of protection of the invention in any way. Attached Figure Description

[0017] Figure 1 This is a three-dimensional schematic diagram of the cantilever probe card according to Embodiment 1 of the present invention.

[0018] Figure 2 for Figure 1 A schematic diagram of its breakdown.

[0019] Figure 3 for Figure 1 A side view diagram.

[0020] Figure 4 for Figure 2 An enlarged schematic diagram of region IV.

[0021] Figure 5 for Figure 4 A diagram illustrating the changes.

[0022] Figure 6 for Figure 4 Another variation of the diagram is shown.

[0023] Figure 7 for Figure 2 A three-dimensional schematic diagram of the probe module.

[0024] Figure 8 for Figure 7 A side view diagram.

[0025] Figure 9 for Figure 7 A schematic diagram of its breakdown.

[0026] Figure 10 for Figure 9 A magnified diagram of region X.

[0027] Figure 11 for Figure 10 A diagram illustrating the changes.

[0028] Figure 12 This is a three-dimensional schematic diagram of the probe module according to Embodiment 2 of the present invention.

[0029] Figure 13 for Figure 12 A planar schematic diagram of the cantilever probe.

[0030] Figure 14 for Figure 13 A schematic diagram of a cantilever probe used to press against the object to be measured.

[0031] Figure 15 This is a planar schematic diagram of the cantilever probe according to Embodiment 3 of the present invention. Detailed Implementation

[0032] The following specific embodiments illustrate the implementation of the "cantilever probe card and its carrier" disclosed in this invention. Those skilled in the art can understand the advantages and effects of this invention from the content disclosed in this specification. This invention can be implemented or applied through other different specific embodiments, and various details in this specification can also be modified and changed based on different viewpoints and applications without departing from the concept of this invention. Furthermore, the accompanying drawings of this invention are for simple illustrative purposes only and are not depictions of actual dimensions; this is stated beforehand. The following embodiments will further describe the relevant technical content of this invention in detail, but the disclosed content is not intended to limit the scope of protection of this invention.

[0033] It should be understood that while terms such as "first," "second," and "third" may be used in this document to describe various components or signals, these components or signals should not be limited by these terms. These terms are primarily used to distinguish one component from another, or one signal from another. Furthermore, the term "or" as used herein should, as appropriate, include any combination of one or more of the related listed items.

[0034] [Example 1]

[0035] Please see Figures 1 to 11 As shown, this is an embodiment of the present invention. Figure 1 and Figure 2As shown, this embodiment discloses a cantilever probe card 100, which includes a carrier 1 and a plurality of probe modules 2, wherein the plurality of probe modules 2 are disposed at intervals on a bearing surface 121 of the carrier 1. It should be noted that the cantilever probe card 100 in this embodiment is described with the carrier 1 and the plurality of probe modules 2, but the present invention is not limited thereto. For example, in other embodiments of the present invention not shown, the carrier 1 or any one of the probe modules 2 may be used alone (e.g., for sale) or in combination with other components.

[0036] like Figure 2 and Figure 3 As shown, in this embodiment, the support base 1 includes a base 11, a metal support plate 12 mounted on the base 11, a limiting mechanism 13 corresponding to the base 11 and the metal support plate 12, and a plurality of coarse adjustment members 14 spaced apart from each other between the base 11 and the metal support plate 12. However, the present invention is not limited thereto. For example, in other embodiments of the present invention not shown, the limiting mechanism 13 may be omitted or replaced by other components.

[0037] More specifically, in this embodiment, the base 11 includes a frame 111 and a circuit board 112 disposed on the frame 111, and the metal carrier plate 12 is mounted on the circuit board 112. However, in other embodiments of the present invention not shown, the base 11 may also be a single-piece structure according to design requirements.

[0038] Furthermore, in this embodiment, the bearing surface 121 is the outer surface of the metal bearing sheet 12. The bearing surface 121 defines a plurality of mounting areas 122 that are separately arranged from each other, and at least two of the plurality of mounting areas 122 (e.g., Figure 3 The two mounting areas 122, located in the center and on the outermost side, form a mounting height difference (e.g., in a test direction T, such as the normal direction of the bearing surface 121) in a test direction T. Figure 3 The dashed line represents the state in which the metal carrier plate 12 is not abutted by the plurality of coarse adjustment members 14 and has the installation drop, while the plurality of probe modules 2 are arranged at intervals on the plurality of installation areas 122.

[0039] Each of the coarse adjustment elements 14 can operate independently along the test direction T to change the distance between the bearing surface 121 and the base 11, and the distance between the bearing surface 121 and the base 11 can be limited within a predetermined range by the limiting mechanism 13. For example, the limiting mechanism 13 may include a plurality of screws mounted on the area surrounding the base 11 and the metal bearing plate 12, so that the metal bearing plate 12 can only move relative to the base 11 along the test direction T.

[0040] Furthermore, the plurality of coarse adjustment members 14 are preferably evenly arranged corresponding to the metal carrier plate 12, so that the plurality of mounting areas 122 of the metal carrier plate 12 can fall within the range that can be affected or adjusted by the plurality of coarse adjustment members 14.

[0041] As described above, the support 1 can deform the metal support piece 12 by at least one of the coarse adjustment members 14 to reduce the installation height difference in the test direction T. For example, the support 1 can adjust at least one of the coarse adjustment members 14, whose positions correspond to the installation height difference, so that the metal support piece 12 deforms in at least two corresponding installation areas 122 to reduce the installation height difference.

[0042] It should be further noted that, since the multiple coarse adjustment components 14 adopt approximately the same structure in this embodiment, for ease of explanation, only the structure of a single coarse adjustment component 14 will be described below, but the present invention is not limited thereto. For example, in other embodiments of the present invention not shown, the structures of the multiple coarse adjustment components 14 may also differ slightly. Furthermore, the structure of the coarse adjustment component 14 can be adjusted and varied according to design requirements. Only some embodiments of the coarse adjustment component 14 are listed below, but the present invention is not limited thereto.

[0043] like Figure 2 , Figure 4 ,and Figure 5 As shown, the coarse adjustment component 14 can be a single-piece structure, with one end of the coarse adjustment component 14 passing through the base 11 along the test direction T, and the other end of the coarse adjustment component 14 abutting against the metal support plate 12 along the test direction T. The coarse adjustment component 14 can be as follows: Figure 4 The spring shown is used to achieve an automatic adjustment function through its elasticity; or, the coarse adjustment member 14 can also be as follows: Figure 5 The screw shown is used to achieve adjustment by being rotated.

[0044] like Figure 6As shown, the coarse adjustment component 14 can be a multi-piece structure, and the coarse adjustment component 14 includes a push rod 141 and a drive shaft 142 corresponding to the push rod 141. One end of the push rod 141 has a guide surface 143 and passes through the base 11 along the test direction T, and the other end of the push rod 141 abuts against the metal support plate 12 along the test direction T. Furthermore, the drive shaft 142 passes through the base 11 in a direction perpendicular to the test direction T, and the drive shaft 142 abuts against the guide surface 143, thereby driving the push rod 141 to move along the test direction T. It should be noted that the drive shaft 142 can be as follows: Figure 6 The invention includes a spring, which enables automatic adjustment based on its elasticity; or, in other embodiments not shown in the invention, the coarse adjustment element 14 may also be a screw, which enables adjustment by being rotated.

[0045] Accordingly, the carrier 1 disclosed in this embodiment effectively reduces the installation drop difference that may occur between the carrier 1 and at least two mounting areas 122 of the metal carrier piece 12 during the assembly process by means of a plurality of coarse adjustment members 14 that can operate independently, thereby enabling a plurality of probe modules 2 to be mounted in a plurality of mounting areas 122 with more consistent height along the test direction T.

[0046] The above describes the structure of the support 1. The following section describes the structural design of the plurality of probe modules 2. Since the plurality of probe modules 2 employ approximately the same structure in this embodiment, for ease of explanation, only the structure of a single probe module 2 will be described below; however, the present invention is not limited thereto. For example, in other embodiments not shown in this invention, the structures of the plurality of probe modules 2 may differ slightly.

[0047] like Figure 2 and Figures 7 to 9 As shown, the probe module 2 in this embodiment includes a support plate 21, a base plate 22 disposed on the support plate 21, a plurality of cantilever probes 23 connected to the base plate 22, a restraint mechanism 24 corresponding to the support plate 21 and the base plate 22, and a plurality of fine adjustment members 25 disposed at intervals between the support plate 21 and the base plate 22. However, the present invention is not limited thereto. For example, in other embodiments of the present invention not shown, the restraint mechanism 24 may be omitted or replaced by other components.

[0048] More specifically, the support plate 21 is mounted on the bearing surface 121 (e.g., corresponding to the mounting area 122), and the support plate 21 is used to support the thin substrate 22, which is prone to warping. The substrate 22 is non-planar and has a warping drop G221 formed in the test direction T; for example, the substrate 22 includes a warped portion 221 that is recessed toward the support plate 21 to form the warping drop G221.

[0049] One end of each cantilever probe 23 is connected to the substrate 22, and the other end of each cantilever probe 23 is a needle tip 2321. In this embodiment, the multiple cantilever probes 23 adopt a substantially the same structure, but in other embodiments of the present invention not shown, the structure of the multiple cantilever probes 23 may also be slightly different.

[0050] Each of the fine adjustment elements 25 can operate independently along the test direction T to change the distance between the support plate 21 and the substrate 22, and the distance between the support plate 21 and the substrate 22 can be limited within a predetermined range by the restraint mechanism 24. For example, the limiting mechanism 13 may include a plurality of screws mounted on the periphery of the support plate 21 and the substrate 22 so that the substrate 22 can only move relative to the support plate 21 along the test direction T.

[0051] Furthermore, the plurality of fine adjustment members 25 are preferably uniformly arranged corresponding to the substrate 22 so that all areas of the substrate 22 fall within the range that can be affected or adjusted by the plurality of fine adjustment members 25. For example, when the substrate 22 produces the warpage 221 in any area, the position of at least one of the plurality of fine adjustment members 25 can correspond to the warpage 221.

[0052] As described above, the substrate 22 can be deformed by at least one of the fine adjustment members 25 to reduce the warpage G221 of the substrate 22 in the test direction T. For example, the position of at least one of the fine adjustment members 25 corresponds to the warped portion 221 and can push against the warped portion 221 to force it to deform in a direction away from the support plate 21, thereby effectively reducing the warpage G221 caused by the warped portion 221.

[0053] It should be further noted that, since the multiple fine adjustment components 25 adopt approximately the same structure in this embodiment, for ease of explanation, only the structure of a single fine adjustment component 25 will be described below, but the present invention is not limited thereto. For example, in other embodiments of the present invention not shown, the structures of the multiple fine adjustment components 25 may also differ slightly. Furthermore, the structure of the fine adjustment component 25 can be adjusted and varied according to design requirements. Only some embodiments of the fine adjustment component 25 are listed below, but the present invention is not limited thereto.

[0054] like Figures 9 to 11 As shown, the fine adjustment member 25 can be a single piece, and one end of the fine adjustment member 25 passes through the support plate 21 along the test direction T, and the other end of the fine adjustment member 25 abuts against the substrate 22 along the test direction T.

[0055] More specifically, the fine adjustment element 25 can be as follows: Figure 10 The spring shown enables an automatic adjustment function through its elasticity (e.g., at least one of the fine adjustment members 25, whose position corresponds to the warped portion 221, can elastically push against the warped portion 221); or, the fine adjustment member 25 may also be as follows: Figure 11 The screw shown is used to achieve an adjustment function by being rotated (e.g., at least one of the fine adjustment members 25 whose position corresponds to the warp 221 can be adjusted to push against the warp 221).

[0056] Accordingly, Figure 2 and Figures 7 to 9 As shown, the probe module 2 disclosed in this embodiment effectively reduces the warpage G221 that may occur due to the non-planar shape of the substrate 22 by means of multiple fine adjustment members 25 that can operate independently, thereby enabling multiple cantilever probes 23 to be mounted on the substrate 22 at a more consistent height along the test direction T.

[0057] Furthermore, in this embodiment, the cantilever probe card 100 can effectively improve the coplanarity of the tips 2321 of all the cantilever probes 23 of the cantilever probe card 100 by using multiple coarse adjustment members 14 of the carrier 1 in conjunction with multiple fine adjustment members 25 of each probe module 2. The size of the fine adjustment member 25 is smaller than that of the coarse adjustment member 14, and the maximum adjustment range of the fine adjustment member 25 in the test direction T (e.g., 100 micrometers) is preferably 0.5% to 5% of the maximum adjustment range of the coarse adjustment member 14 in the test direction T (e.g., 2000 micrometers), but the present invention is not limited thereto.

[0058] Furthermore, in the carrier 1 of this embodiment, the seat 11 (e.g., the frame 111 and the circuit board 112) and the metal carrier plate 12 are each circular in structure, and the support plate 21 and the substrate 22 of each probe module 2 are each rectangular in structure, but they can be adjusted and changed according to design requirements and are not limited to the drawings.

[0059] [Example 2]

[0060] Please see Figures 12 to 14 As shown, this is Embodiment 2 of the present invention. Since this embodiment is similar to Embodiment 1 above, the similarities between the two embodiments will not be repeated. The main difference between this embodiment and Embodiment 1 above lies in the structure of the cantilever probe 23.

[0061] In this embodiment, the cantilever probe 23 is a single-piece structure integrally formed, and the cross-section of the cantilever probe 23 is mostly rectangular. In this embodiment, the cantilever probe 23 includes a welding section 231, a testing section 232, two outer elastic arms 233 connecting the welding section 231 and the testing section 232, at least one inner elastic arm 234 located between the two outer elastic arms 233, and a pair of focusing portions 235 connected to the testing section 232; however, the invention is not limited thereto. For example, in other embodiments of the invention not shown, the cantilever probe 23 may omit the focusing portion 235 and / or at least one inner elastic arm 234.

[0062] Furthermore, the welding segment 231 has a first end 2311 and a second end 2312 located on opposite sides, and the cantilever probe 23 is welded to the substrate 22 with the first end 2311 of the welding segment 231. Moreover, the test segment 232 and the welding segment 231 are arranged at intervals in the configuration direction D, which in this embodiment is substantially parallel to the surface of the substrate 22. The test segment 232 has a tip 2321 and an outer edge 2322 and an inner edge 2323 located on opposite sides of the tip 2321. The tip 2321 has a width of no more than 5 micrometers (μm) in the configuration direction D.

[0063] It should be further noted that the second end 2312 of the welding segment 231 has a layout edge 2313 that is not parallel to the configuration direction D (or not parallel to the substrate 22), so that the inner edge 2323 and the layout edge 2313 are spaced at different distances in the configuration direction D. In this embodiment, the layout edge 2313 is inclined and forms a layout angle σ2313 between 10 degrees and 85 degrees with the configuration direction D parallel to the surface of the substrate 22, but the invention is not limited thereto. For example, in other embodiments not shown in this invention, the layout edge 2313 may be stepped.

[0064] Each of the external elastic arms 233 is connected at both ends to the second end 2312 of the welding segment 231 (e.g., the layout edge 2313) and the inner edge 2323 of the test segment 232, and the two external elastic arms 233 are arranged at intervals along a direction perpendicular to the test direction T. More specifically, each external elastic arm 233 in this embodiment is straight and its length is at least 1.5 times the length of the test segment 232, but the invention is not limited thereto.

[0065] Furthermore, one of the two external elastic arms 233 is adjacent to the needle tip 2321 and is defined as a first external elastic arm 233a, while the other of the two external elastic arms 233 is defined as a second external elastic arm 233b, and the length of the first external elastic arm 233a is greater than the length of the second external elastic arm 233b. Preferably, the length difference between the first external elastic arm 233a and the second external elastic arm 233b is between 10 micrometers and 200 micrometers, but the invention is not limited thereto.

[0066] In this embodiment, each of the external elastic arms 233 is positioned at a first angle σ1 between 0 and 75 degrees with respect to the configuration direction D, and the test segment 232 is positioned at a second angle σ2 between 45 and 150 degrees with respect to respect to the external elastic arms 233. When the tip 2321 of each cantilever probe 23 presses against a test object 300 along the test direction T, the test segment 232 can rotate toward a position perpendicular to the configuration direction D of the tip 2321.

[0067] In this embodiment, at least one inner elastic arm 234 is described as one, but in other embodiments not shown in this invention, the number of inner elastic arms 234 may be multiple. At least one inner elastic arm 234 has its two ends connected to the second end 2312 of the welding segment 231 (e.g., the layout edge 2313) and the inner edge 2323 of the test segment 232, respectively, and at least one inner elastic arm 234 is arranged at intervals from two outer elastic arms 233 along the test direction T.

[0068] The focusing portion 235 is located between the needle tip 2321 and the two external elastic arms 233, with one end connected to the inner edge 2323 of the test section 232, while the other end is a free end. In other words, the focusing portion 235 is approximately located within the space enclosed by the inner edge 2323 of the test section 232 and one of the external elastic arms 233 adjacent to the needle tip 2321.

[0069] More specifically, the focusing portion 235 is located on the side away from the two external elastic arms 233 (e.g.: Figure 13 The upper side of the focusing section 235 has a plurality of focus points 2351, and the tip 2321 and an adjacent focus point 2351 are preferably separated by a preset distance of 100 micrometers to 400 micrometers in the configuration direction D, while the distance between any two adjacent focus points 2351 is different from the preset distance.

[0070] As described above, the needle tip 2321 and the plurality of focus points 2351 can each form an observation point during the observation operation of a detection device 200 (e.g., a camera) to determine the position of the needle tip 2321 (that is, by inferring the actual position of the needle tip 2321 from the plurality of observation points corresponding to the plurality of focus points 2351). Accordingly, the cantilever probe card 100 and the cantilever probe 23 disclosed in the embodiments of the present invention can effectively reduce the probability of the detection device 200 misjudging the position of the needle tip 2321 by the configuration of the focusing part 235.

[0071] Furthermore, when the needle tip 2321 can be as follows Figure 13 When the inner edge 2323 is closer to the outer edge 2322 than the inner edge 2323, the inner edge 2323 of the test segment 232 preferably has a notch 2324 formed between the needle tip 2321 and an adjacent focus point 2351, so as to disperse the stress borne by the test segment 232 and reduce the probability of the test segment 232 breaking.

[0072] [Example 3]

[0073] Please see Figure 15 As shown, this is Embodiment 3 of the present invention. Since this embodiment is similar to Embodiments 1 and 2 above, the similarities between the above embodiments will not be repeated. The main difference between this embodiment and Embodiments 1 and 2 above lies in the structure of the cantilever probe 23.

[0074] In this embodiment, the two outer elastic arms 233 may have equal lengths (e.g., the welding segment 231 does not have the layout edge 2313), and each outer elastic arm 233 is generally parallel to the configuration direction D, and is located away from one end of the focusing portion 235 of the inner edge 2323 (e.g., ...). Figure 15 The left end of the focusing section 235 is connected to an adjacent external elastic arm 233 to jointly enclose and form a closed space, thereby effectively reducing the noise that the focusing section 235 may generate.

[0075] [Technical Effects of the Embodiments of the Invention]

[0076] In summary, the cantilever probe card and its carrier disclosed in the embodiments of the present invention, through multiple independently operable coarse adjustment components, effectively reduce the installation height difference that may occur between the carrier and at least two installation areas of the metal carrier sheet during the assembly process, thereby enabling multiple probe modules to be installed in multiple installation areas with more consistent height along the test direction.

[0077] Furthermore, the cantilever probe card and its probe module disclosed in the embodiments of the present invention effectively reduce the warpage that may occur due to the non-planar shape of the substrate by means of multiple fine adjustment components that can operate independently, thereby enabling multiple cantilever probes to be mounted on the substrate at a more uniform height along the test direction.

[0078] The content disclosed above is only a preferred and feasible embodiment of the present invention, and is not intended to limit the patent scope of the present invention. Therefore, all equivalent technical changes made based on the content of the present invention specification and drawings are included within the patent scope of the present invention.

Claims

1. A cantilever probe card, characterized in that, The cantilever probe card includes: A support, comprising: A single entity; A metal support plate is mounted on the base and has a support surface; and Multiple coarse adjustment elements are spaced apart from each other between the base and the metal support plate; wherein each coarse adjustment element can operate independently along a test direction to change the distance between the support surface and the base; and Multiple probe modules are disposed at intervals on multiple mounting areas of the bearing surface; wherein at least two of the multiple mounting areas form a mounting height difference in the test direction; The support base can deform the metal support plate by at least one of the coarse adjustment members, so as to reduce the installation drop in the test direction; Each of the aforementioned coarse adjustment components includes: A push rod, one end of which has a guide surface and passes through the base along the test direction, and the other end of the push rod abuts against the metal support plate along the test direction; and A drive shaft is inserted into the housing along a direction perpendicular to the test direction; wherein the drive shaft abuts against the guide surface to drive the push rod to move along the test direction.

2. The cantilever probe card according to claim 1, characterized in that, The support includes a limiting mechanism corresponding to the seat body and the metal support plate, and the distance between the support surface and the seat body can be limited within a predetermined range by the limiting mechanism.

3. The cantilever probe card according to claim 2, characterized in that, One end of each of the coarse adjustment components is inserted into the housing along the test direction, and the other end of each of the coarse adjustment components abuts against the metal support plate along the test direction.

4. The cantilever probe card according to claim 1, characterized in that, Each of the probe modules includes: A support plate is installed on the corresponding installation area; A substrate is disposed on the support plate; wherein the substrate is non-planar and has a warpage difference in the test direction; Multiple cantilever probes, one end of which is connected to the substrate, and the other end of each cantilever probe is a needle tip; and Multiple fine adjustment elements are spaced apart between the support plate and the substrate; wherein each fine adjustment element can operate independently along the test direction to change the distance between the support plate and the substrate; In each of the probe modules, the substrate can be deformed by at least one of the fine adjustment elements to reduce the warpage of the substrate in the test direction.

5. The cantilever probe card according to claim 4, characterized in that, The substrate includes a warped portion that is recessed toward the support plate to reduce the warping difference; at least one of the fine adjustment members is positioned corresponding to the warped portion and can push against the warped portion to force it to deform away from the support plate.

6. The cantilever probe card according to claim 4, characterized in that, In each of the probe modules, each of the cantilever probes includes: A welding segment has a first end and a second end located on opposite sides, and the first end is welded to the substrate; A test segment is provided at a distance from the welding segment in a direction perpendicular to the test direction, and the test segment has the needle tip and an outer edge and an inner edge located on opposite sides; Two external elastic arms, each with its two ends connected to the second end of the welding segment and the inner edge of the test segment, are arranged at intervals between each other; and A pair of focusing portions are connected to the inner edge and located between the needle tip and the two outer elastic arms; wherein the focusing portions have a plurality of focusing points on the side away from the two outer elastic arms; The needle tip and the plurality of focus points can each form an observation point during the observation operation of a detection device, so as to determine the position of the needle tip.

7. The cantilever probe card according to claim 6, characterized in that, In each of the cantilever probes, the end of the focusing portion away from the inner edge is connected to an adjacent outer elastic arm to collectively enclose and form a closed space.

8. The cantilever probe card according to claim 6, characterized in that, One of the two external elastic arms is adjacent to the needle tip and is defined as a first external elastic arm, while the other of the two external elastic arms is defined as a second external elastic arm, and the length of the first external elastic arm is greater than the length of the second external elastic arm.

9. A carrier for a cantilever probe card, characterized in that, The carrier of the cantilever probe card includes: A single entity; A metal support plate is mounted on the base and has a support surface; and Multiple coarse adjustment components are spaced apart from each other between the base and the metal support plate; wherein each of the coarse adjustment components can operate independently along a test direction to change the distance between the support surface and the base; wherein the support surface contains multiple mounting areas spaced apart from each other, and at least two of the multiple mounting areas form a mounting height difference in the test direction; The support base can deform the metal support plate by at least one of the coarse adjustment members, so as to reduce the installation drop in the test direction; Each of the aforementioned coarse adjustment components includes: A push rod, one end of which has a guide surface and passes through the base along the test direction, and the other end of the push rod abuts against the metal support plate along the test direction; and A drive shaft is inserted into the housing along a direction perpendicular to the test direction; wherein the drive shaft abuts against the guide surface to drive the push rod to move along the test direction.

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