Galvanometer calibration method and calibration device

Abstract

The application belongs to the field of 3D printing, and relates to a scanning galvanometer position precision measurement and calibration method and a calibration device, wherein the method comprises the following steps: 1) selecting a calibration device for calibrating the position precision of a galvanometer scanning system; 2) adjusting the to-be-calibrated galvanometer scanning system so that the outgoing light of the to-be-calibrated galvanometer scanning system is directed towards the calibration device; 3) controlling the to-be-calibrated galvanometer scanning system so that the outgoing light is scanned along the X direction at equal intervals in the measurement hole of the calibration device and a plurality of scanning lines are acquired, and the to-be-calibrated galvanometer scanning system is calibrated according to the number of scanning lines and the response time of the scanning lines; and 4) controlling the to-be-calibrated galvanometer scanning system so that the outgoing light is scanned along the Y direction at equal intervals in the measurement hole of the calibration device and a plurality of scanning lines are acquired, and the to-be-calibrated galvanometer scanning system is calibrated according to the number of scanning lines and the response time of the scanning lines. The application has the advantages of fast response speed and high sensitivity.

Description

TECHNICAL FIELD

[0001] The present application belongs to the field of 3D printing, and relates to a galvanometer calibration method and a calibration device, in particular to a scanning galvanometer position precision measurement and calibration method and a calibration device. BACKGROUND

[0002] Due to factors such as temperature, mechanical vibration, system reliability, etc., the scanning accuracy of a scanning galvanometer-based laser processing system often needs to be corrected regularly. When the galvanometer is corrected, the deviation between the current system scanning position and the theoretical position needs to be obtained, and the current system scanning position is corrected according to the deviation. For example, the traditional correction is to print a matrix cross calibration point on a correction test board, and then manually measure and calculate the deviation between the theoretical and actual positions, and then generate a correction file through compensation calculation software. This method is not only time-consuming, but also prone to cumulative errors in multi-point measurement, resulting in insufficient calibration accuracy.

[0003] However, reliable and accurate acquisition of laser scanning position information is crucial for the accuracy correction of a laser galvanometer scanning system. SUMMARY

[0004] To solve the above technical problems in the background art, the present application provides a galvanometer calibration method and calibration device with fast response speed and high sensitivity.

[0005] To achieve the above purpose, the present application adopts the following technical solutions:

[0006] A galvanometer calibration method applied to a 3D printing device, characterized in that the method comprises the following steps:

[0007] 1) selecting a calibration device for position precision calibration of a galvanometer scanning system;

[0008] 2) adjusting the galvanometer scanning system to be calibrated so that the outgoing light of the galvanometer scanning system to be calibrated is directed towards the calibration device of step 1);

[0009] 3) controlling the galvanometer scanning system to be calibrated so that the outgoing light scans along the X direction at equal intervals in the measurement hole of the calibration device and obtains a plurality of scanning lines, and the galvanometer scanning system to be calibrated is calibrated according to the number of scanning lines and the response time of the scanning lines;

[0010] 4) controlling the galvanometer scanning system to be calibrated so that the outgoing light scans along the Y direction at equal intervals in the measurement hole of the calibration device and obtains a plurality of scanning lines, and the galvanometer scanning system to be calibrated is calibrated according to the number of scanning lines and the response time of the scanning lines.

[0011] The above step 3) is specifically:

[0012] 3.1) control the to-be-calibrated galvanometer scanning system to scan the diameter of the measurement hole on the calibration device along the y=0 direction to obtain a diameter scanning line, denoted as scanning line 直径 ; the D is the diameter of the measurement hole;

[0013] 3.2) based on the diameter scanning line, multiple scans are performed along the y>0 direction and the y<0 direction respectively with the scanning line distance d and the scanning line length 2D as the scanning conditions to obtain multiple scanning lines, wherein d<<D / 2;

[0014] 3.3) the response time of the scanning line is detected by the photoelectric sensor, the response time being the time when the outgoing light of the to-be-calibrated galvanometer scanning system enters the measurement chamber and is captured by the photoelectric sensor during scanning along the scanning line;

[0015] 3.4) the number N of the scanning lines obtained by step 3.3) when y>0 is counted, and the number M of the scanning lines obtained by step 3.3) when y<0 is counted, and it is judged whether N is equal to M; if yes, step 3.5) is performed; if not, the posture of the to-be-calibrated galvanometer scanning system is coarsely adjusted until N=M;

[0016] 3.5) the to-be-calibrated galvanometer scanning system is finely adjusted according to the response time of the scanning line until the position accuracy calibration of the to-be-calibrated galvanometer scanning system in the X direction is completed.

[0017] The above step 3.2) is specifically:

[0018] based on the diameter scanning line, multiple scans are performed along the y>0 direction and the y<0 direction respectively with the scanning line distance d and the scanning line length 2D as the scanning conditions to obtain multiple scanning lines, from top to bottom, sequentially denoted as scanning line +(nd) , scanning line +(n-1d) , …, scanning line +3d , scanning line +2d , scanning line +d , scanning line 直径 , scanning line -d , scanning line -2d , scanning line -3d , …, scanning line -(n-1d) , and scanning line -(nd) ; wherein the scanning line +(nd) is the scanning line with the scanning interval nd from the scanning line 直径 and along the y>0 direction; the scanning line -(nd) is the scanning line with the scanning interval nd from the scanning line 直径 and along the y<0 direction; wherein d<<D / 2.

[0019] The above step 3.3) is specifically:

[0020] The response time of the scanning lines is detected by the photoelectric sensor in sequence from top to bottom, and the response time is t1, t2, …, tn, tmax, t(n+1), …, tm, respectively; wherein, tmax is the response time of the scanning scanning line. 直径

[0021] The step 3.4) is specifically:

[0022] The number N of the scanning lines corresponding to t1, t2, …, tn is counted, and the number M of the scanning lines corresponding to t(n+1), …, tm is counted; the N=n; the M=m-n; the n and m are natural numbers; it is judged whether the N is equal to the M; if yes, the step 3.5) is performed; if not, the posture of the to-be-calibrated galvanometer scanning system is coarsely adjusted until the N=M.

[0023] The coarse adjustment mode in the step 3.4) is specifically: if the scanning lines are symmetric about the scanning line 直径 a lines upward to the measurement hole, the coordinates of the to-be-calibrated galvanometer scanning system at the center of the measurement hole are offset downward by axd; if the scanning lines are symmetric about the scanning line 直径 b lines downward to the measurement hole, the coordinates of the to-be-calibrated galvanometer scanning system at the center of the measurement hole are offset upward by bxd; the a and b are natural numbers.

[0024] The step 3.5) is specifically:

[0025] It is judged whether the response time t1 is equal to the response time tm, if yes, the position precision calibration of the to-be-calibrated galvanometer scanning system in the X direction is completed; if not, the to-be-calibrated galvanometer scanning system is finely adjusted based on d / x until the response time t1 is equal to the response time tm; the x is a natural number greater than or equal to 2.

[0026] The mode of the step 4) is completely same as that of the step 3).

[0027] A galvanometer calibration device, characterized in that: the galvanometer calibration device comprises a measurement plate, and one or more circular measurement holes are arranged on the measurement plate; when the measurement holes are multiple, the multiple measurement holes are completely same in structure and arranged in a matrix.

[0028] The galvanometer calibration device further comprises measurement chambers; the number of the measurement chambers corresponds to the number of the measurement holes on the measurement plate and is placed at the bottom of the measurement holes.

[0029] Preferably, the measurement plate and the measurement chambers are an integral structure or a split structure; when the measurement plate and the measurement chambers are an integral structure, the measurement chambers are measurement channels opened at the bottom of the measurement holes in the thickness direction of the measurement plate.​

[0030] Preferably, the structure of the measuring chamber is a conical cavity, a spherical cavity, a cylindrical groove, an ellipsoidal shape, a regular polyhedral shape or a saddle shape.

[0031] Preferably, the galvanometer calibration device further comprises an industrial computer, a signal processing unit and a photoelectric sensor; the galvanometer scanning system to be calibrated is arranged on the top of the measuring hole and performs position scanning on the measuring hole; the number of the photoelectric sensors is consistent with the number of the measuring chambers; the photoelectric sensors are arranged in the measuring chambers and monitor the photoelectric signals in the measuring chambers; the photoelectric sensors transmit the photoelectric signals to the industrial computer through the signal processing unit; the industrial computer is connected with the galvanometer scanning system to be calibrated and controls the attitude of the galvanometer scanning system to be calibrated to complete the position calibration of the galvanometer scanning system to be calibrated.

[0032] The present application has the following advantages:

[0033] The present application provides a galvanometer calibration method and a calibration device, wherein the method comprises the following steps: 1) selecting a calibration device for position accuracy calibration of a galvanometer scanning system; 2) adjusting the galvanometer scanning system to be calibrated so that the outgoing light of the galvanometer scanning system to be calibrated is directed towards the calibration device in step 1); 3) controlling the galvanometer scanning system to be calibrated so that the outgoing light is scanned along the X direction at equal intervals in the measuring hole of the calibration device and a plurality of scanning lines are obtained, and the galvanometer scanning system to be calibrated is calibrated according to the number of the scanning lines and the response time of the scanning lines; 4) controlling the galvanometer scanning system to be calibrated so that the outgoing light is scanned along the Y direction at equal intervals in the measuring hole of the calibration device and a plurality of scanning lines are obtained, and the galvanometer scanning system to be calibrated is calibrated according to the number of the scanning lines and the response time of the scanning lines. Since the photoelectric sensor used in the present application is a sensor with fast response speed and high sensitivity, the scanning accuracy of the laser is determined according to the response time of the sensor when the measured laser scans the target point; at the same time, the present application can also use an independent measuring system to complete the position measurement of the scanning galvanometer scanning system without the aid of other measuring instruments, which can be used not only for single galvanometer calibration but also for multi-galvanometer splicing calibration. The present application has the characteristics of fast response speed, high sensitivity and fast scanning speed. BRIEF DESCRIPTION OF DRAWINGS

[0034] Figure 1 is a top view structural schematic diagram of the measuring plate used in the present application;

[0035] Figure 2 is a structural principle diagram of the scanning galvanometer position accuracy measurement calibration device provided by the present application;

[0036] Figure 3 is a schematic diagram of the equal-interval row-by-row scanning of the measuring hole along the x direction in the calibration method provided by the present application;

[0037] Wherein:

[0038] 1-measuring plate; 2-measuring hole; 3-measuring chamber; 4-photoelectric sensor; 5-signal processing unit; 6-industrial computer; 7-vibrating mirror scanning system to be calibrated. DETAILED DESCRIPTION

[0039] The present application provides a vibrating mirror calibration method, which comprises the following steps:

[0040] 1) selecting a calibration device for position accuracy calibration of a vibrating mirror scanning system;

[0041] 2) adjusting the vibrating mirror scanning system to be calibrated so that the outgoing light of the vibrating mirror scanning system to be calibrated is directed towards the calibration device of step 1);

[0042] 3) controlling the vibrating mirror scanning system to be calibrated so that the outgoing light is scanned along the X direction at equal intervals in the measuring hole of the calibration device and a plurality of scanning lines are obtained, and the vibrating mirror scanning system to be calibrated is calibrated in turn according to the number of scanning lines and the response time of the scanning lines;

[0043] Wherein, the vibrating mirror scanning system to be calibrated is calibrated in turn according to the number of scanning lines and the response time of the scanning lines means that the vibrating mirror scanning system to be calibrated is calculated for deviation in turn according to the number of scanning lines and the response time of the scanning lines, and then the vibrating mirror scanning system to be calibrated is calibrated based on the obtained deviation. Step (3) specifically comprises:

[0044] 3.1) controlling the vibrating mirror scanning system to be calibrated to scan the diameter of the measuring hole on the calibration device along y=0 with scanning line length 2D, obtaining a diameter scanning line, denoted as scanning line 直径 ; D is the diameter of the measuring hole;

[0045] 3.2) taking the diameter scanning line as a reference, taking the scanning line distance d and the scanning line length 2D as scanning conditions, and performing multiple scans along the direction of y>0 and the direction of y<0 respectively, obtaining a plurality of scanning lines, wherein d<<D / 2; Exemplarily, the multiple scanning mode of the present application can be performed in the following manner: taking the diameter scanning line as a reference, taking the scanning line distance d and the scanning line length 2D as scanning conditions, and performing multiple scans along the direction of y>0 and the direction of y<0 respectively, obtaining a plurality of scanning lines, from top to bottom, denoted as scanning line +(nd) , scanning line +(n-1d) , …, scanning line +3d , scanning line +2d , scanning line +d , scanning line 直径 , scanning line -d , scanning line -2d , scanning line -3d , …, scanning line -(n-1d) and scanning line-(nd) Among them, scan lines +(nd) From the scan line 直径 Starting along the direction y > 0, scan lines with a spacing of nd are scanned; scan lines -(nd) From the scan line 直径 Starting along the direction y < 0, scan lines with a spacing of nd are scanned; where d << D / 2.

[0046] 3.3) The response time of each scan line is detected by a photoelectric sensor. The response time is the time it takes for the emitted light from the galvanometer scanning system to enter the measurement chamber and be captured by the photoelectric sensor as it scans along the scan line. From top to bottom, the response times are t1, t2, ..., tn, tmax, t(n+1), ..., tm; where tmax is the response time of the scan line. 直径 Response time, such as Figure 3 As shown. Obviously, t1 and tm are the critical points where the photoelectric sensor can detect the scan line. That is to say, the scan lines scanned before the scan line corresponding to t1 and the scan lines scanned after the scan line corresponding to tm do not enter the measuring hole and are not detected by the photoelectric sensor.

[0047] 3.4) Count the number of scan lines N obtained in step 3.3) when y > 0 and the number of scan lines M obtained in step 3.3) when y < 0, and determine whether N and M are equal. If they are equal, proceed to step 3.5). If they are not equal, coarsely adjust the attitude of the galvanometer scanning system to be calibrated until N = M. For example, the corresponding statistics and judgments can be performed as follows: Count the number of scan lines N corresponding to t1, t2, ..., tn and the number of scan lines M corresponding to t(n+1), ..., tm; N = n; M = mn; n and m are both natural numbers; determine whether N and M are equal. If they are equal, proceed to step 3.5). If they are not equal, coarsely adjust the attitude of the galvanometer scanning system to be calibrated until N = M. It can be understood that the number of scan lines around y = 0 is equal, that is, the scan lines corresponding to y > 0 and the scan lines corresponding to y < 0 are symmetrically distributed about y = 0. Meanwhile, during coarse adjustment, the present invention exemplarily employs the following method: if regarding the scan line 直径 If the symmetrical scan line is offset upwards by *a* lines relative to the measurement aperture, then the coordinates of the galvanometer scanning system to be calibrated will be offset downwards by *a*×*d* at the center of that measurement aperture; if the scan line... 直径 If the symmetrical scan lines are deflected downwards by b lines for the measurement aperture, then the coordinates of the scanning system of the galvanometer to be calibrated at the center of the measurement aperture will be shifted upwards by b×d; a and b are both natural numbers.

[0048] 3.5) Fine adjustment is made to the to-be-calibrated galvanometer scanning system according to the response time of the scanning line until the position accuracy calibration of the to-be-calibrated galvanometer scanning system in the X direction is completed. Specifically, it can be judged whether the response time t1 is equal to the response time tm. If yes, the position accuracy calibration of the to-be-calibrated galvanometer scanning system in the X direction is completed. If not, the to-be-calibrated galvanometer scanning system is fine adjusted with d / x as the reference until the response time t1 is equal to the response time tm. x is a natural number greater than or equal to 2. For example, if the response time t1 is not equal to the response time tm, that is, 0 < |t1-tm| < τ, where τ is an error upper limit (τ < the response time tmax when the scanning diameter is τ), it indicates that the galvanometer coordinates and the measurement system coordinates have deviation at this time, and the to-be-calibrated galvanometer scanning system is fine adjusted with d / x as the reference until the response time t1 is equal to the response time tm. Meanwhile, this step can be iterated until the response time t1 is equal to the response time tm.

[0049] 4) The to-be-calibrated galvanometer scanning system is controlled to make the outgoing light scan along the Y direction at equal intervals in the measurement hole of the calibration device and acquire a plurality of scanning lines, and the to-be-calibrated galvanometer scanning system is calibrated according to the number of scanning lines and the response time of the scanning line. The mode of step 4) is completely the same as that of step 3), only the direction is different, and here, it will not be repeated.

[0050] Referring to Figure 1 , the calibration device provided by the present application, the calibration device comprises a measurement plate 1, and one or more circular measurement holes 2 are arranged on the measurement plate 1; when the measurement holes 2 are a plurality of measurement holes, the plurality of measurement holes 2 are completely the same in structure and are arranged in a matrix. The centers of the measurement holes 2 on the measurement plate 1 are determined according to the array of the required acquisition points, and all the measurement holes on the full surface have high consistency. Meanwhile, referring to Figure 2 , the calibration device provided by the present application further comprises a measurement chamber 3; the number of the measurement chambers 3 corresponds to the number of the measurement holes 2 on the measurement plate 1 and is arranged at the bottom of the measurement holes 2; preferably, the measurement plate 1 and the measurement chamber 3 are an integral structure or a split structure; when the measurement plate 1 and the measurement chamber 3 are an integral structure, the measurement chamber 3 is a measurement channel opened at the bottom of the measurement hole 2 along the thickness direction of the measurement plate 1. For example, the present application adopts a split structure. Whether it is a split structure or an integral structure, the structure of the measurement chamber 3 used by the present application is a conical cavity, a spherical cavity, a cylindrical groove, an ellipsoidal type, a regular polyhedral type or a saddle type, that is, the laser can be reflected in the measurement chamber 3 and finally be detected by the photoelectric sensor 4 at the bottom of the measurement chamber 3. Compared with the PSD position sensor, the photoelectric detector can detect higher energy density laser, so as to more effectively and stably measure the laser position.

[0051] Referring to Figure 2The galvanometer calibration device provided by the present invention further includes an industrial control computer 6, a signal processing unit 5, and a photoelectric sensor 4; the galvanometer scanning system 7 to be calibrated is placed on top of the measuring hole 2 and performs position scanning on the measuring hole 2; the number of photoelectric sensors 4 is consistent with the number of measuring chambers 3; the photoelectric sensors 4 are placed in the measuring chambers 3 and monitor the photoelectric signals in the measuring chambers 3, and the photoelectric sensors 4 transmit the photoelectric signals to the industrial control computer 6 through the signal processing unit 5; the industrial control computer 6 is connected to the galvanometer scanning system 7 to be calibrated and controls the attitude of the galvanometer scanning system 7 to complete the position calibration of the galvanometer scanning system 7 to be calibrated.

[0052] For example, the diameter of measuring hole 2 can be Below measuring hole 2 is... Figure 2 Measurement chamber 3 is shown.

[0053] The working principle of this invention is:

[0054] After the scanning laser emitted from the galvanometer scanning system 7 to be calibrated shines into the measuring hole 2, the scanning laser will scatter after passing through the cavity of the measuring chamber 3. The photoelectric sensor 4 located at the bottom of the measuring chamber 3 detects the response time of the scattered light generated when the scanning laser shines into the measuring chamber 3 through the measuring hole 2. The output signal of the photoelectric sensor 4 at the bottom of each measuring chamber 3 is transmitted to the signal processing unit 5 for processing. The industrial control computer 6 controls the acquisition and data interaction of the signal processing unit 5, and transmits the acquired coordinates to the galvanometer scanning system to complete the coordinate iteration and update correction of the scanning system accuracy. This invention uses the positional and dimensional accuracy of the galvanometer calibration equipment as the measurement benchmark. During calibration, the galvanometer scanning accuracy is made consistent with the accuracy of the calibration equipment. Before performing the measurement, the measuring plate is placed on the working plane and a simple position alignment is performed. The directional red light of the laser system itself can be used for alignment. The more accurate the initial alignment, the shorter the measurement time.

Claims

1. A method for galvanometer calibration, applied to 3D printing equipment, characterized in that: The method includes the following steps: 1) Select calibration equipment for calibrating the positional accuracy of the galvanometer scanning system; 2) Adjust the galvanometer scanning system (7) to be calibrated so that the emitted light from the galvanometer scanning system (7) is directed toward the calibration equipment described in step 1); 3) Control the scanning system (7) of the galvanometer to be calibrated so that the emitted light scans at equal intervals along the X direction within the measurement aperture (2) of the calibration equipment and acquires multiple scan lines. The scanning system (7) of the galvanometer to be calibrated is then calibrated sequentially according to the number of scan lines and the response time of the scan lines; specifically: 3.1) Control the scanning system (7) of the galvanometer to be calibrated to scan the diameter of the measuring hole (2) on the calibration equipment along y=0 with a scanning line length of 2D, and obtain the diameter scanning line, which is denoted as the scanning line. 直径 D is the diameter of the measuring hole (2); 3.2) Using the diameter scan line as a reference, and the scan line distance d and scan line length 2D as scan conditions, perform multiple scans along the direction of y>0 and the direction of y<0 respectively to obtain multiple scan lines, where d<<D / 2; 3.3) The response time of the scan line is detected by the photoelectric sensor (4), which is the time when the emitted light of the galvanometer scanning system (7) to be calibrated enters the measurement chamber and is captured by the photoelectric sensor when it scans along the scan line; 3.4) Count the number of scan lines N obtained in step 3.3) when y > 0 and the number of scan lines M obtained in step 3.3) when y < 0, and determine whether N is equal to M; if they are equal, proceed to step 3.5); if they are not equal, coarsely adjust the attitude of the galvanometer scanning system (7) to be calibrated until N = M; 3.5) Fine-tune the galvanometer scanning system (7) to be calibrated according to the response time of the scan line until the position accuracy calibration of the galvanometer scanning system (7) to be calibrated in the X direction is completed; 4) Control the scanning system (7) of the galvanometer to be calibrated so that the emitted light scans at equal intervals along the Y direction in the measurement hole (2) of the calibration device and obtains multiple scan lines. According to the number of scan lines and the response time of the scan lines, the scanning system (7) of the galvanometer to be calibrated is calibrated in sequence, and the specific method is the same as step 3).

2. The method according to claim 1, characterized in that: Step 3.2) specifically involves: Using the diameter scan line as a reference, with a scan line distance d and a scan line length of 2D, multiple scans are performed along the directions y>0 and y<0 respectively, resulting in multiple scan lines. These scan lines are sequentially denoted as scan lines from top to bottom. +（nd） Scan lines +（n-1d） ... scan lines +3d Scan lines +2d Scan lines +d Scan lines 直径 Scan lines -d Scan lines -2d Scan lines -3d ... scan lines -（n-1d） and scan lines -（nd） ; wherein, the scan line +（nd） From the scan line 直径 Starting from and along the direction y > 0, scan lines with a spacing of nd are scanned; the scan lines -（nd） From the scan line 直径 Starting along the direction y < 0, scan lines with a spacing of nd are scanned; where d << D / 2.

3. The method according to claim 2, characterized in that: Step 3.3) specifically refers to: The response times of the scan lines are detected by photoelectric sensor (4) respectively. From top to bottom, the response times are t1, t2, ..., tn, tmax, t(n+1), ..., tm; where tmax is the response time of the scan line. 直径 Response time.

4. The method according to claim 3, characterized in that: Step 3.4) specifically involves: The number of scan lines N corresponding to the response times t1, t2, ..., tn, and the number of scan lines M corresponding to the response times t(n+1), ..., tm, are calculated respectively. The N=n; the M=mn; n and m are both natural numbers; determine whether N is equal to M; if they are equal, proceed to step 3.5); if they are not equal, coarsely adjust the attitude of the galvanometer scanning system (7) to be calibrated until N=M.

5. The method according to claim 4, characterized in that: The coarse adjustment method in step 3.4) is specifically as follows: if regarding the scan line 直径 If the symmetrical scan line is offset upwards by a line for the measuring hole (2), then the coordinates of the galvanometer scanning system (7) to be calibrated at the center of the measuring hole will be offset downwards by a×d; if the scan line is about 直径 If the symmetrical scanning line is deflected downward by b lines for the measuring hole (2), then the coordinates of the galvanometer scanning system (7) to be calibrated at the center of the measuring hole will be shifted upward by b×d; where a and b are both natural numbers.

6. The method according to claim 5, characterized in that: Step 3.5) specifically refers to: Determine whether the response time t1 and the response time tm are equal. If they are equal, the position accuracy calibration of the galvanometer scanning system (7) to be calibrated in the X direction is completed. If they are not equal, the galvanometer scanning system (7) to be calibrated is fine-tuned based on d / x until the response time t1 and the response time tm are equal. The x is a natural number greater than or equal to 2.

7. A galvanometer calibration apparatus for implementing the method as described in any one of claims 1-6, characterized in that: The galvanometer calibration device includes a measuring plate (1) and a measuring chamber (3). The measuring plate (1) is provided with one or more circular measuring holes (2). When there are multiple measuring holes (2), the multiple measuring holes (2) have the same structure and are arranged in a matrix. The number of measuring chambers (3) corresponds to the number of measuring holes (2) on the measuring plate (1) and is placed at the bottom of the measuring holes (2). The galvanometer calibration equipment also includes an industrial computer (6), a signal processing unit (5), and photoelectric sensors (4); the galvanometer scanning system (7) to be calibrated is placed on top of the measuring hole (2) and performs position scanning on the measuring hole (2); the number of photoelectric sensors (4) is the same as the number of measuring chambers (3); the photoelectric sensors (4) are placed in the measuring chamber (3) and monitor the photoelectric signals in the measuring chamber (3), and the photoelectric sensors (4) transmit the photoelectric signals to the industrial computer (6) through the signal processing unit (5); the industrial computer (6) is connected to the galvanometer scanning system (7) to be calibrated and controls the attitude of the galvanometer scanning system (7) to complete the position calibration of the galvanometer scanning system (7).

8. The galvanometer calibration device according to claim 7, characterized in that: The measuring plate (1) and the measuring chamber (3) are either an integral structure or a separate structure; when the measuring plate (1) and the measuring chamber (3) are an integral structure, the measuring chamber (3) is a measuring channel opened at the bottom of the measuring hole (2) along the thickness direction of the measuring plate (1).

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