Dual laser beam galvanometer system with built-in hot and cold exchange channels

Abstract

The present invention discloses an even-numbered laser beam galvanometer system with a cold and hot exchange flow channel, which includes a device base and a plurality of laser beam galvanometer units, wherein a laser input channel, a laser beam galvanometer unit, and a laser output channel form a laser working group, the number of laser working groups is even and is in two groups distributed left and right or four groups distributed in pairs left and right, and the even-numbered laser beam galvanometer system also includes a cold and hot exchange flow channel, a QBH collimator, and a multi-beam partition dynamic allocation unit. On the one hand, in the same partition, the present invention allows each laser beam to collaboratively perform the current scanning task, and when a laser beam fails, the scanning path can be automatically planned and switched without stopping; on the other hand, a multi-beam partition intelligent dynamic redistribution strategy is implemented to reduce the splicing boundaries between partitions, and at the same time, the QBH collimator used can have a smaller thermal lens effect, and under the heat exchange performed by the cold and hot exchange flow channel, the optical thermal stability and the adjustment accuracy of dynamic focusing are improved.

Description

[0001] This application is a divisional application with the application date of June 26, 2023, application number 202310752618.2, and name of a dual laser beam galvanometer system. Technical Field

[0002] The invention belongs to the technical field of laser galvanometers, and in particular relates to an even-number laser beam galvanometer system with a cold and hot exchange flow channel. Background Art

[0003] Simply speaking, a galvanometer is a scanning galvanometer used in the laser industry. Its professional term is a high-speed scanning galvanometer (also called a Galvo scanning system). At present, the commonly used laser beam galvanometer system mainly includes a device base with a laser input channel and a laser output channel, a dynamic focusing module, a reflector adjustment module, and a co-rotating reflector module. After a single laser beam is injected from the laser input channel, it is adjusted by the dynamic focusing module and the reflector adjustment module, and the beam is reflected to the two flip reflector units of the co-rotating reflector module. The two flip reflector units flip back and forth around the Z-axis and Y-axis directions respectively and reflect the light path to the laser output channel and scan and cover the welding surface of the coordinate system formed by the X-axis and the Y-axis to complete plane or 3D welding (combined with the lifting and lowering movement on the Z-axis formed by the dynamic focusing module).

[0004] However, with the requirements for laser processing efficiency, multiple laser beams need to be used for partition scanning and synchronous processing. Therefore, multiple laser galvanometer systems need to be arranged in the same closed cavity. The conventional layout has the following defects:

[0005] 1) Each laser beam forms a partition. For one scanning head, the more laser beams there are, the more partitions there are. Therefore, the more splicing boundaries between partitions, the more the precision and efficiency of molding will be affected.

[0006] 2) Each partition is only equipped with one laser beam. Once a laser galvanometer system fails, the current molding process can only be abandoned and the machine must be shut down for processing. Laser processing can only be performed after the failure is eliminated. Therefore, the practicability is insufficient.

[0007] 3) The addition of multiple laser galvanometer systems will inevitably greatly increase the volume of the entire system, which is not conducive to the miniaturization design of the overall structure;

[0008] 4) During the scanning process, since the optical lenses and internal circuit boards and other components are all built-in, the built-in components cannot dissipate heat well, which directly leads to poor optical thermal stability and obvious deficiencies in the adjustment accuracy of dynamic focus. Summary of the invention

[0009] The technical problem to be solved by the present invention is to overcome the deficiencies of the prior art and provide an improved double-number laser beam galvanometer system with its own cold and hot exchange flow channels.

[0010] In order to solve the above technical problems, the present invention adopts the following technical scheme: an even-numbered laser beam galvanometer system with its own cold and hot exchange flow channel, which comprises a base having a laser input channel and a laser output channel, and a plurality of laser beam galvanometer units installed in the base, wherein the laser input channel, the laser beam galvanometer unit, and the laser output channel form a laser working group, in particular, a positioning base is installed at the center of the inner wall at the bottom of the base, the number of the laser working groups is even and they are in two groups distributed on the left and right or four groups distributed in pairs on the left and right, wherein the left and right two groups of laser working groups are partially symmetrically and partially mirror-imaged on the left and right sides of the positioning base with the center of the positioning base as the reference and are staggered in the length and width directions of the base; the scanning area formed by each of the laser working groups from the laser output channel can cover the entire working surface, and the vertical projection area formed is smaller than the scanning processing area; the even-numbered laser beam galvanometer system also comprises It includes a heat exchange flow channel interconnected with the inside of the device seat and the positioning seat, a QBH collimator connected to each laser input channel, and a multi-beam partition dynamic allocation unit connected to each laser working group, wherein the multi-beam partition dynamic allocation unit can be pre-read based on the scanning graphic data of the entire working surface, and perform real-time regional decomposition according to the number of laser working groups in the activated working state to form a processing cycle required to complete the current scanning path, and then the laser beam in the activated working state performs multi-beam laser scanning processing without splicing and comprehensively in each corresponding partition according to the partition dynamic instruction, and during the execution of the processing task by the entire system, the state of one or more scanning laser beams is changed from the activated working state to the inactivated working state, and the instruction position of the state transition point is immediately stored, and when other laser beams are idle in the area, they will continue to complete the remaining work of the laser beam with the above-mentioned state change.

[0011] In some specific embodiments, the partition dynamic instructions are based on the correction and adjustment of parameters such as airflow, plasma generated by laser processing, uniform distribution of laser energy obtained by the block, and the completion of processing by the entire system at the same or nearly the same time point. In this way, the accuracy of the scanning path is more effectively improved, and the processing precision is improved.

[0012] According to a specific implementation and preferred aspect of the present invention, a beam sensor is formed on each laser working group, wherein the beam sensor is used to monitor whether the optical path is normal, and the beam sensor is connected to the multi-beam partition dynamic allocation unit. In other words, each scanning laser beam is provided with a status feedback of whether it can work normally. If it can work normally, it is in an active state in the entire control system (the system can normally assign processing instructions), and if it cannot work normally, it is in an inactive state (the system will not assign processing instructions).

[0013] According to another specific implementation and preferred aspect of the present invention, the laser beams passing through each laser input channel are parallel to each other, and the laser beams reflected to the right and to the left by the left-right symmetrical and mirrored laser working group through the corresponding reflector adjustment module remain concentric. In other words, before the light beams reflected by the reflector reach the vibrating lens, the corresponding two laser beams are concentric. Therefore, this setting can make the two laser beams have better focus spot consistency and improve the positioning accuracy of the initial zero point. At the same time, the concentric relationship can also be used to perform bidirectional verification of the optical path during the beam adjustment.

[0014] In some specific embodiments, there are two laser working groups, and the laser input channels, dynamic focusing modules, and reflector adjustment modules are arranged symmetrically, wherein the two laser output channels are obliquely mirrored about the center of the orthographic projection of the positioning seat in the vertical direction, and are staggered in the length and width directions of the device seat, and the two co-rotating reflector modules are arranged correspondingly to the laser output channels. Alternatively, there are four laser working groups, and they are distributed on the left and right sides of the positioning seat in pairs, wherein the four laser output channels are distributed in a parallelogram in the vertical direction, and the center of the orthographic projection of the positioning seat coincides with the intersection of the diagonal lines of the parallelogram; the four co-rotating reflector modules are arranged correspondingly to the laser output channels.

[0015] According to another specific implementation and preferred aspect of the present invention, each of the dynamic focusing modules includes a focusing seat, a mirror seat slidably mounted on the focusing seat via a slide rail extending along the Z-axis direction, a focusing lens horizontally mounted on the mirror seat, and a power device that drives the mirror seat to reciprocate along the Z-axis direction, wherein the center line of the focusing lens in the thickness direction remains parallel to the Z-axis direction and moves synchronously with the mirror seat. In some specific embodiments, an optical lens is further provided between the focusing lens and the reflector of the reflector adjustment module, wherein the centers of the focusing lens, the optical lens, and the reflector are arranged to coincide on the Z-axis. At the same time, the focusing lens is a concave lens with upper and lower concave surfaces, the optical lens is a convex lens with upper and lower convex surfaces, and the reflector is a plane reflector. By designing each lens from top to bottom, the light beam can be effectively converged, so that the light beam output from the laser output channel is relatively concentrated for welding, so as to improve the welding efficiency and effect.

[0016] According to another specific implementation and preferred aspect of the present invention, the co-rotating reflector module includes a first flip reflector unit and a second flip reflector unit, the first flip reflector unit and the second flip reflector unit are flipped synchronously and at the same speed, and the centers of the first flip reflector unit and the reflector of the reflector adjustment module are kept aligned and the distance is kept unchanged on the Y axis; and the centers of the reflectors of the first flip reflector unit and the second flip reflector unit are kept aligned and the distance is kept unchanged on the X axis. At the same time, during the synchronous and synchronous flipping of the first flip reflector unit and the second flip reflector unit, the centers of the reflectors are aligned and the distance is kept unchanged, which not only realizes the motion coverage of the processing surface formed by the X-axis and the Y-axis, but also more accurately scans the light beam to the processing surface, so as to continue to complete the high-precision focusing and welding processing of the product.

[0017] In some specific embodiments, the first flip reflector unit includes a first power member whose driving shaft extends along the Z-axis direction, and a first flip mirror fixedly connected to the driving shaft via a first clamp, wherein the inner side surface of the first flip mirror is a planar reflector surface, and is a reflector facing the reflector adjustment module; the second flip reflector unit includes a second power member whose flip shaft extends along the Y-axis direction, and a second flip mirror fixedly connected to the flip shaft via a second clamp, wherein the reflector surface of the second flip mirror is a plane, the reflector surface of the second flip mirror faces the reflector surface of the first flip mirror, and the reflector surfaces of the two are in an intersecting arrangement.

[0018] According to another specific implementation and preferred aspect of the present invention, the dual laser beam galvanometer system further includes a heat exchange channel interconnected with the interior of the device seat. In some specific embodiments, a heat exchange channel interconnected with the interior of the device seat is formed on the positioning seat. Specifically, the heat exchange channel mainly dissipates heat (heat exchange) for optical components, drive components, and control chips, etc. after the inflow of cooling fluid, thereby improving the optical thermal stability and the driving accuracy of the driver.

[0019] According to another specific implementation and preferred aspect of the present invention, the reflector adjustment module reflects the light path along the Z-axis direction and forms a light path along the Y-axis direction to the corresponding first flip reflector unit, and the reflector adjustment module includes an adjustment mold base, a plane reflector installed on the adjustment mold base and capable of adjusting the tilt angle around the X-axis.

[0020] In some specific embodiments, the dynamic focusing module of each laser working group reciprocates along the Z-axis direction, and the co-rotating reflector module can emit the laser from the laser output channel to form a welding surface coverage of the coordinate system formed by the X-axis and the Y-axis, thereby forming 3D movement in the three-dimensional coordinate system formed by X, Y, and Z for welding. At the same time, under the optical path adjustment of the reflector adjustment module, 3D welding can be performed in parallel with the injection and emission of the light beam.

[0021] Due to the implementation of the above technical solution, the present invention has the following advantages compared with the prior art:

[0022] The existing laser beam galvanometer system forms partition welding, which not only has many splicing boundaries between partitions and low forming accuracy and efficiency, but also once a laser galvanometer system fails, the current forming process can only be abandoned and shut down for processing, which is not practical enough. At the same time, if the layout of multiple laser beam galvanometer units is unreasonable, the size will be large and the operation will be inconvenient. In addition, the built-in components cannot dissipate heat well, which directly leads to poor optical thermal stability and obviously insufficient dynamic focusing adjustment accuracy. The present invention cleverly solves various deficiencies of the existing structure by overall design of the structure and beam control of the galvanometer system. The system is adopted. First, each laser beam galvanometer unit is reasonably arranged by taking the positioning seat as the installation reference. Then, under the control of the partition dynamic instruction of the multi-beam partition dynamic allocation unit, each co-rotating reflector module performs multi-beam laser scanning processing without splicing and comprehensively in each corresponding partition. At the same time, the partition dynamic instruction can also be adjusted in real time according to the number of laser working groups in the activated working state. Therefore, compared with the existing structure, the present invention, on the one hand, in the same partition, each laser beam cooperates to perform the current scanning task, and the forming efficiency is greatly improved. When a laser beam fails, the scanning path can be automatically switched without stopping, and the plan can be automatically re-planned. Only relying on one laser beam, all scanning processing work can still be completed, which greatly increases the reliability of the scanning processing process; on the other hand, a multi-beam partition intelligent dynamic redistribution strategy is implemented, and multiple laser beams are arranged in each partition without splicing, so that the splicing boundaries between partitions are greatly reduced, which is conducive to improving the welding forming accuracy and efficiency. At the same time, the QBH collimator used can play a smaller thermal lens effect, and under the heat exchange of the cold and hot exchange flow channel, the optical thermal stability and the adjustment accuracy of dynamic focusing are improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 Schematic diagram of the front view of the dual laser beam galvanometer system of Example 1 (dual laser beams);

[0024] Figure 2 for Figure 1 A right side schematic diagram of

[0025] Figure 3 for Figure 1 A top view schematic diagram of

[0026] Figure 4 for Figure 1 Schematic diagram of the local structure;

[0027] Figure 5 for Figure 4 A schematic cross-sectional view of the central rotating reflector module;

[0028] Figure 6 Schematic diagram of the three-dimensional structure of the double-number laser beam galvanometer system of Example 2 (four laser beams);

[0029] Figure 7 for Figure 6 A schematic cross-sectional view of the central rotating reflector module;

[0030] Among them: 1. Device base; 10. Laser input channel; 11. Laser output channel;

[0031] A, laser beam galvanometer unit; 2, dynamic focusing module; 20, focusing seat; 21, linear slide rail; 22, mirror seat; 23, focusing lens; 24, driver; 3, reflector adjustment module; 30, adjustment mold seat; 31, reflector; 4, co-rotating reflector module; 41, first flip reflector unit; 410, first power member; 411, first clamp seat; 412, first flip mirror; 42, second flip reflector unit; 420, second power member; 421, second clamp seat; 422, second flip mirror; 5, optical lens; 6, QBH collimator;

[0032] B. Positioning seat. DETAILED DESCRIPTION

[0033] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the present invention is described in detail below in conjunction with the accompanying drawings and specific embodiments. In the following description, many specific details are set forth to facilitate a full understanding of the present invention. However, the present invention can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present invention, so the present invention is not limited by the specific embodiments disclosed below.

[0034] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0035] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present invention, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0036] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0037] In the invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0038] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used herein are for illustrative purposes only and are not intended to be the only implementation method.

[0039] Example 1

[0040] like Figures 1 to 5As shown, the dual laser beam galvanometer system involved in the present embodiment includes a base 1 with a laser input channel 10 and a laser output channel 11 which are parallel to each other at the top and bottom respectively, two laser beam galvanometer units A installed in the base 1, a positioning base B, and a multi-beam partition dynamic allocation unit, wherein each laser beam galvanometer unit A includes a dynamic focusing module 2 which is adjusted along the Z-axis direction; a reflector adjustment module 3; a co-rotating reflector module 4 which forms X and Y-axis scanning; and an optical lens 5 located between the reflector adjustment module 3 and the dynamic focusing module 2, wherein the laser input channel 10, the laser beam galvanometer unit A, and the laser output channel 11 form a laser working group, that is, two laser working groups are formed in the base 1.

[0041] In some specific embodiments, the base 1 is in the shape of a rectangular parallelepiped extending up and down, the positioning base B is located at the center of the bottom inner wall of the base 1, and the two laser working groups are distributed on the left and right sides of the positioning base B, wherein the scanning area formed by each laser working group from the laser output channel 11 can cover the entire working surface.

[0042] The laser input channels 10, dynamic focusing modules 2, and reflector adjustment modules 3 of the two laser working groups are arranged symmetrically on the left and right; the two laser output channels 11 are symmetrical about the center of the orthographic projection of the positioning seat B in the orthographic projection in the up and down directions, and are staggered in the length and width directions of the device seat 1; the two co-rotating reflector modules 4 are arranged corresponding to the laser output channels 11.

[0043] Specifically, the dynamic focusing module 2 of each laser working group reciprocates along the Z-axis direction, and the co-rotating mirror module 4 can emit the laser from the laser output channel 11 and form a welding surface coverage of the coordinate system formed by the X-axis and the Y-axis, thereby forming a 3D motion in the three-dimensional coordinate system formed by X, Y, and Z for welding. At the same time, under the optical path adjustment of the mirror adjustment module 3, 3D welding is completed in parallel with the injection and emission of the light beam.

[0044] Taking the laser working group on the left as an example, the following detailed explanation is given: the dynamic focusing module 2 of the laser working group on the left is set close to the laser input channel 10, the reflector adjustment module 3 is installed below the dynamic focusing module 2 and located at the bottom of the left side, and the co-rotating reflector module 4 is located above the laser output channel 11.

[0045] The dynamic focusing module 2 includes a focusing seat 20, a mirror seat 22 slidably mounted on the focusing seat 20 through a linear slide 21, a focusing lens 23 horizontally mounted on the mirror seat 22, and a power device 24 that drives the mirror seat 22 to reciprocate along the Z-axis direction (the mirror seat 22 moves up and down along the length of the linear slide 21 by converting circular motion into linear motion, which is a conventional method and is not elaborated in detail here, but is also clear and feasible), wherein the center line of the focusing lens 23 in the thickness direction remains parallel to the Z-axis direction and moves synchronously with the mirror seat 22. The reflector adjustment module 3 reflects the light path along the Z-axis direction and forms a light path along the axis direction to the corresponding co-rotating reflector module 4, and the reflector adjustment module 3 includes an adjustment mold seat 30 and a reflector 31 mounted on the adjustment mold seat 30 and capable of adjusting the tilt angle around the X-axis. The co-rotating reflector module 4 includes a first flip reflector unit 41 and a second flip reflector unit 42, wherein the first flip reflector unit 41 and the second flip reflector unit 42 flip back and forth around the Z-axis and the Y-axis directions respectively and reflect the laser downward from the laser output channel 11, and at the same time, the processing welding surface formed in the motion coordinate system composed of the X-axis and the Y-axis covers the product surface.

[0046] Specifically, the first flip reflector unit 41 includes a first power member 410 whose driving shaft extends along the Z-axis direction, and a first flip mirror 412 fixedly connected to the driving shaft through a first clamp 411, wherein the first power member 410 is a commonly used motor, and the inner side surface of the first flip mirror 412 is a plane reflective mirror surface, and faces the reflector of the reflector adjustment module 3, and the second flip reflector unit 42 includes a second power member 420 whose flip axis extends along the Y-axis direction, and a second flip mirror 422 fixedly connected to the flip axis through a second clamp 421, wherein the reflective mirror surface of the second flip mirror 422 faces the reflective mirror surface of the first flip mirror 412, and the reflective mirror surfaces of the two are in an intersecting arrangement, and when the first flip mirror 412 and the second flip mirror 422 are flipped synchronously and at the same speed, the distance between the centers of the reflective mirror surfaces of the two remains unchanged on the X-axis. In this example, the reflective mirror surface of the second flip mirror 322 is a plane, and at the same time, the second clamp 421 and the first clamp 411 have the same structure and are conventional clamps.

[0047] In some specific embodiments, the first flip reflector unit 41 and the second flip reflector unit 42 of the two co-rotating reflector modules 4 are diagonally mirrored on the left and right sides of the positioning seat B. The optical lens 5 is located between the focusing lens 23 and the reflector 31, wherein the centers of the focusing lens 23, the optical lens 5, and the reflector 31 are arranged to overlap on the Z axis. In some specific embodiments, the focusing lens 23 is a concave lens with upper and lower concave surfaces, the optical lens 5 is a convex lens with upper and lower convex surfaces, and the reflector 31 is a plane reflector.

[0048] The multi-beam partition dynamic allocation unit is mainly the control part of the system and is connected to each laser working group. The allocation process formed at the same time includes the following steps: 1) Pre-reading the scanning graphic data of the entire working surface, and performing regional decomposition in real time according to the number of laser working groups in the activated working state; 2) After decomposition, each area is pre-calculated according to the single-beam scanning and the processing cycle required to complete the current scanning path; 3) According to the above processing cycle, combined with the laser beam in the currently activated working state of each area, the scanning motion task is subdivided to the co-rotating reflector module of the corresponding laser working group, and then each co-rotating reflector module performs multi-beam laser scanning processing without splicing and comprehensively in each corresponding partition according to the partition dynamic instructions.

[0049] In some specific embodiments, a beam sensor is formed on each laser working group, wherein the beam sensor is used to monitor whether the optical path is normal, and the beam sensor is connected to the multi-beam partition dynamic allocation unit. Each scanning laser beam is provided with a state feedback whether it can work normally. If it can work normally, it is in an activated state in the entire control system (the system can normally assign processing instructions), and if it cannot work normally, it is in an inactive state (the system will not assign processing instructions). At the same time, during the execution of the processing task by the entire system, if the state of one or more scanning laser beams changes from an activated working state to an inactive working state, the instruction position of the state transition point is immediately stored, and when other laser beams are idle in the area, they continue to complete the remaining work of the laser beam with the above-mentioned state change. Moreover, the above-mentioned partition dynamic instructions are corrected and adjusted based on the parameters of the airflow, the plasma generated by the laser processing, the uniform distribution of the laser energy obtained by the block, and the completion of the processing of the entire system at the same or nearly the same time point.

[0050] In addition, the laser beams passing through each laser input channel 10 are parallel to each other, and the laser beams reflected to the right and left by the left-right symmetrical and mirrored laser working groups through the corresponding reflector adjustment modules remain concentric. At the same time, the dual-number laser beam galvanometer system also includes a heat exchange flow channel interconnected inside the device seat 1 and the positioning seat B, and a QBH collimator 6 connected to the laser input channel 10. Specifically, the heat exchange flow channel mainly dissipates heat (heat exchange) for optical components, drive components, and control chips, etc. after the inflow of cooling fluid, thereby improving the optical thermal stability and the drive accuracy of the driver.

[0051] Example 2

[0052] Combination Figure 6 and Figure 7As shown, the even-numbered laser beam galvanometer system of this embodiment forms four corresponding optical paths, which is referred to as a four-laser beam galvanometer system. Its structure is basically the same as that of Example 1, except that the cross-section of the base 1 of this embodiment is square, and there are four corresponding laser working groups, which are distributed on the left and right sides of the positioning base B in pairs, among which the four laser output channels 11 are distributed in a parallelogram shape in the orthographic projection in the up and down directions, and the center of the orthographic projection of the positioning base B coincides with the intersection of the diagonals of the parallelogram; the four co-rotating reflector modules 4 are arranged corresponding to the laser output channels 11, or, for ease of understanding, the layout of the two laser working groups in Example 1 is used as a reference. In this example, the two laser working groups constitute two references, and the two references are arranged at intervals in the front and back directions.

[0053] As can be seen from the above, the system firstly arranges the laser beam galvanometer units reasonably by taking the positioning seat as the installation reference, and then, under the control of the partition dynamic instruction of the multi-beam partition dynamic allocation unit, each co-rotating reflector module performs multi-beam laser scanning processing without splicing and comprehensively in each corresponding partition. At the same time, the partition dynamic instruction can also be adjusted in real time according to the number of laser working groups in the activated working state. Therefore, compared with the existing structure, the present invention, on the one hand, in the same partition, each laser beam cooperates to perform the current scanning task, and the forming efficiency is greatly improved. When a laser beam fails, the scanning path can be automatically switched and re-planned without stopping. Only one laser beam can be relied on to complete all scanning processing work, which is great. It greatly increases the reliability of the scanning process; on the other hand, it implements a multi-beam partition intelligent dynamic redistribution strategy, and arranges multiple laser beams in each partition without splicing, so that the splicing boundaries between partitions are greatly reduced, which is conducive to improving the welding forming accuracy and efficiency; thirdly, in the partition dynamic instruction, based on the airflow, the plasma generated by the laser processing, the uniform distribution of the laser energy obtained by the block, and the parameters for the entire system to complete the processing at the same or nearly the same time point, it corrects and adjusts the parameters, which more effectively improves the accuracy of the scanning path and improves the processing accuracy; fourthly, the laser beams passing through each laser input channel are parallel to each other, and the left-right symmetrical and mirrored laser working group adjusts the laser beams reflected to the right and left by the corresponding reflector adjustment module Maintain concentricity, that is, before the light beam reflected by the reflector reaches the vibrating lens, the corresponding two laser beams are concentric. Therefore, this setting can make the two laser beams have better focus spot consistency and improve the positioning accuracy of the initial zero point. At the same time, the concentric relationship can also be used to perform bidirectional verification of the optical path during beam adjustment; fifthly, through the top-down lens design, the light beam can be effectively converged, so that the light beam output from the laser output channel is relatively concentrated for welding, so as to improve welding efficiency and effect; sixthly, in the synchronous and same-speed flipping of the first flip reflector unit and the second flip reflector unit, the centers of the mirrors are aligned and the distance remains unchanged, which not only realizes the motion coverage of the processing surface formed by the X-axis and the Y-axis , and more accurately scan the light beam to the processing surface, so as to continue to complete the high-precision focusing and welding processing of the product; seventhly, after the cooling fluid flows in, the optical components, drive components, and control chips, etc., are cooled (heat exchanged) to improve the optical thermal stability and the driving accuracy of the driver; eighthly, the application completes the integration of multiple laser beams in the cavity, DFM (dynamic focusing module), motor, lens, cooling water pipe and cable - the innovation of modular multi-beam scanning head (referred to as multi-beam scanning head), which not only has a smaller vertical projection area than the scanning processing area, but also can easily arrange more laser beams, which is conducive to the development of multi-beam 3D printing system, and is also convenient for equipment design layout, adjustment, installation and later maintenance;Ninthly, the zero point precision adjustment of the multi-laser beams integrated in the cavity of the present application is performed offline at one time, realizing factory-based, batch-based, high-precision and high-stability adjustment, greatly reducing the workload of on-machine adjustment, and greatly improving the efficiency of adjustment as the number of laser beams in the module increases; tenthly, the present application abandons the traditional mode of on-line thermal management of one partition and one scanning head, and performs precise thermal management before installation on the multi-beam laser system with the same structure and component arrangement in a module cavity, so as to obtain a unified and optimized cooling effect, reduce the system deviation caused by heat accumulation, and improve the accuracy and consistency of laser processing; at the same time, it also has excellent scalability (each multi-beam scanning head module is integrated in the cavity, and the zero point adjustment and thermal management are completed offline and independently. Therefore, the number of assembled modules has little effect on the entire scanning process. For example, there is no engineering obstacle for a system with 20 modules to develop into a system with 50 or even 100 modules). ;

[0054] The above detailed description of the present invention is intended to enable persons familiar with the art to understand the contents of the present invention and implement them. It does not limit the protection scope of the present invention. Any equivalent changes or modifications made according to the spirit of the present invention should be included in the protection scope of the present invention.

Claims

1. A double-number laser beam galvanometer system with a cold and hot exchange flow channel, comprising a base having a laser input channel and a laser output channel, and a plurality of laser beam galvanometer units installed in the base, wherein the laser input channel, the laser beam galvanometer unit, and the laser output channel form a laser working group, characterized in that: Each of the laser beam galvanometer units includes a dynamic focusing module that is adjusted along the Z-axis direction; a reflector adjustment module; and a co-rotating reflector module that forms X- and Y-axis scanning, wherein each of the dynamic focusing modules includes a focusing seat, a mirror seat slidably mounted on the focusing seat via a slide rail extending along the Z-axis direction, a focusing lens horizontally mounted on the mirror seat, and a power device that drives the mirror seat to reciprocate along the Z-axis direction, and the center line of the focusing lens in the thickness direction remains parallel to the Z-axis direction and moves synchronously with the mirror seat; the co-rotating reflector module includes a first flip reflector unit and a second flip reflector unit, the first flip reflector unit and the second flip reflector unit are flipped synchronously and at the same speed, and the centers of the mirrors of the first flip reflector unit and the reflector adjustment module are kept aligned and the distance remains unchanged on the Y-axis; and keeping the centers of the reflectors of the first flip reflector unit and the second flip reflector unit aligned and the distance between them unchanged on the X-axis; The reflector adjustment module reflects the light path along the Z-axis direction and forms a light path along the Y-axis direction to the corresponding first flip reflector unit; a positioning seat is installed at the center of the inner wall at the bottom of the base, the number of the laser working groups is even and they are distributed in two groups on the left and right or four groups separated by two on the left and right, wherein the left and right groups of laser working groups are partially symmetrical and partially mirrored with the center of the positioning seat as the reference on the left and right sides of the positioning seat and are staggered in the length and width directions of the base; the dynamic focusing module of each laser working group reciprocates along the Z-axis direction, and the co-rotating reflector module can emit the laser from the laser output channel and form a welding surface coverage of the coordinate system formed by the X-axis and the Y-axis, thereby forming a 3D motion in the three-dimensional coordinate system formed by X, Y, and Z for welding. The optical path of the group is adjusted to complete the 3D welding in parallel with the injection and emission of the light beam; an optical lens is also provided between the focusing lens and the reflector of the reflector adjustment module, wherein the centers of the focusing lens, the optical lens and the reflector are arranged to overlap on the Z axis; the first flip reflector unit comprises a first power member whose driving shaft extends along the Z axis direction, and a first flip mirror fixedly connected to the driving shaft through a first clamp; the second flip reflector unit comprises a second power member whose flip shaft extends along the Y axis direction, and a second flip mirror fixedly connected to the flip shaft through a second clamp, wherein the reflective mirror surface of the second flip mirror faces the reflective mirror surface of the first flip mirror; the reflector adjustment module comprises an adjustment mold base, and a plane reflector mounted on the adjustment mold base and capable of adjusting the tilt angle around the X axis; The scanning area formed by the laser output channel of each laser working group can cover the entire working surface, and the vertical projection area formed is smaller than the scanning processing area; the even-number laser beam galvanometer system also includes a heat exchange flow channel interconnected with the device seat and the positioning seat, a QBH collimator connected to each laser input channel, and a multi-beam partition dynamic allocation unit connected to each laser working group, wherein the multi-beam partition dynamic allocation unit can be based on pre-reading of the scanning graphic data of the entire working surface, and real-time regional decomposition according to the number of laser working groups in the activated working state to form a processing cycle required to complete the current scanning path, and according to the above processing cycle combined with the laser beam in the currently activated working state of each area, the scanning motion task is subdivided into the same rotation of the laser beam galvanometer unit of the corresponding laser working group. A reflector module is provided, and then each co-rotating reflector module performs multi-beam laser scanning processing without splicing and comprehensively in each partition according to the partition dynamic instruction, that is, the laser beam in the activated working state performs multi-beam laser scanning processing without splicing and comprehensively in each partition according to the partition dynamic instruction, and during the execution of the processing task by the entire system, the state of one or more scanning laser beams is changed from the activated working state to the inactivated working state, and the instruction position of the state transition point is immediately stored, and after other laser beams are idle in the area, they continue to complete the remaining work of the laser beam with the above-mentioned state change; the partition dynamic instruction is based on the correction and adjustment of the parameters of the airflow, the plasma generated by the laser processing, the uniform distribution of the laser energy obtained by the block, and the completion of the processing of the entire system at the same or nearly the same time point.

2. The double-number laser beam galvanometer system with a cold and hot exchange channel according to claim 1, characterized in that: A beam sensor is formed on each laser working group, wherein the beam sensor is used to monitor whether the optical path is normal, and the beam sensor is connected to the multi-beam partition dynamic allocation unit.

3. The double-number laser beam galvanometer system with a cold and hot exchange channel according to claim 1, characterized in that: The laser beams passing through the laser input channels are parallel to each other, and the laser beams reflected to the right and left by the left-right symmetrical laser working group through the corresponding reflector adjustment module remain concentric.

4. The double-number laser beam galvanometer system with built-in cold and hot exchange channels according to claim 1, characterized in that: The laser working group has two groups, and the laser input channel, dynamic focusing module, and reflector adjustment module are symmetrically arranged on the left and right. The two laser output channels are obliquely mirrored about the center of the orthographic projection of the positioning seat in the vertical direction, and are staggered in the length and width directions of the device seat. The two co-rotating reflector modules are arranged corresponding to the laser output channels.

5. The double-number laser beam galvanometer system with built-in cold and hot exchange channels according to claim 1, characterized in that: There are four laser working groups, which are distributed on the left and right sides of the positioning seat in pairs, wherein the four laser output channels are distributed in a parallelogram in the orthographic projection in the up and down directions, and the center of the orthographic projection of the positioning seat coincides with the intersection of the diagonal lines of the parallelogram; The four co-rotating reflector modules are arranged corresponding to the laser output channels.

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