Chip frame removing structure

Abstract

The application discloses a chip frame-removing structure, which comprises an X-axis module, an auxiliary slide rail arranged in parallel with the X-axis module, a Y-axis module arranged between the X-axis module and the auxiliary slide rail, a Z-axis module arranged vertically on the Y-axis module, and a frame-removing unit arranged on the Z-axis module. The chip frame-removing structure can effectively replace manual work with mechanical equipment, greatly reduces consumption of human resources, effectively improves the efficiency and effect of frame removal of the chip, and promotes the development and progress of enterprises and industries.

Description

Technical Field

[0001] This application relates to the field of semiconductor manufacturing equipment, and more specifically to a chip borderless structure. Background Technology

[0002] During chip manufacturing, a border surrounds the chip, which needs to be removed before chip stripping. Currently, chip border removal mainly relies on ordinary workers, who use flat-bladed scrapers to remove the border. However, manual removal has the following problems: (1) Manual removal is inefficient and requires a lot of manpower and time; (2) Because the chip border is removed manually, it is inevitable that the chip will be scratched or damaged by the operator during the operation; (3) The border fragments are messy. Summary of the Invention

[0003] To address the shortcomings of existing technologies, this application provides a chip bezel removal structure that effectively utilizes mechanical equipment to replace manual labor. This not only significantly reduces the consumption of human resources but also effectively improves the efficiency and effectiveness of chip bezel removal, thus greatly promoting the development and progress of enterprises and industries.

[0004] A chip bezel removal structure includes an X-axis module, an auxiliary slide rail arranged parallel to the X-axis module, a Y-axis module mounted between the X-axis module and the auxiliary slide rail, a Z-axis module vertically mounted on the Y-axis module, and a bezel removal unit mounted on the Z-axis module.

[0005] Preferably, the Z-axis module is also equipped with a camera and a light source, both of which face downwards.

[0006] Furthermore, the frame removal unit consists of a fixing member, a slotted photoelectric sensor mounted on the fixing member, an air extraction pipe mounted in the slotted photoelectric sensor, an air-gathering hood mounted at the bottom of the air extraction pipe, a rotation control unit mounted on the air extraction pipe, and a frame removal head mounted on the fixing member.

[0007] Preferably, an air pump is connected to the top end of the air extraction pipe.

[0008] Furthermore, the rotation control unit consists of an angle steering motor mounted on a fixed component, a synchronous pulley mounted on the output shaft of the angle steering motor, and a synchronous belt fitted onto both the synchronous pulley and the air extraction pipe.

[0009] Furthermore, the frame removal head consists of a rotary motor that is tilted and fixed on the air extraction pipe, a coupling mounted on the output shaft of the rotary motor, and an umbrella-shaped scraper mounted on the coupling.

[0010] Preferably, the umbrella-shaped blade penetrates the wind-gathering shroud from the side, and the lowest plane of the umbrella-shaped blade is parallel to the lowest plane of the wind-gathering shroud, and the lowest plane of the umbrella-shaped blade is lower than the lowest plane of the wind-gathering shroud.

[0011] Compared with the prior art, the embodiments of this application have the following beneficial effects:

[0012] This invention effectively utilizes mechanical equipment to replace manual labor, which not only greatly reduces the consumption of human resources, but also effectively improves the efficiency and effect of chip edge removal, thus greatly promoting the development and progress of enterprises and industries.

[0013] Some of the additional features of this application will be described in the following description. These additional features will become apparent to those skilled in the art upon examination of the following description and the accompanying drawings, or upon understanding the production or operation of the embodiments. The features disclosed in this application can be implemented and achieved through the practice or use of various methods, means, and combinations thereof with respect to the specific embodiments described below. Attached Figure Description

[0014] The accompanying drawings, which are provided to further illustrate this application and constitute a part of this application, illustrate exemplary embodiments of this application and are used to explain this application, but do not constitute a limitation thereof. In the drawings, the same reference numerals denote the same components.

[0015] Figure 1 This is a schematic diagram of the structure of the present invention.

[0016] Figure 2 This is a schematic diagram of the border removal unit of the present invention.

[0017] Explanation of reference numerals in the attached diagram: 1. X-axis module; 2. Y-axis module; 3. Z-axis module; 4. Auxiliary slide rail; 5. Camera; 6. Light source; 7. Frame removal unit; 7-1. Fixing component; 7-2. Angle steering motor; 7-3. Groove photoelectric sensor; 7-4. Synchronous belt; 7-5. Synchronous pulley; 7-6. Air extraction pipe; 7-7. Rotary motor; 7-8. Coupling; 7-9. Umbrella-shaped blade; 7-10. Air shroud. Detailed Implementation

[0018] To enable those skilled in the art to better understand the present application, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present application, and not all embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative effort should fall within the scope of protection of the present application.

[0019] It should be noted that if the terms "first," "second," etc., are used in the specification, claims, and accompanying drawings of this application, they are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate for the embodiments of this application described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0020] In this application, when terms such as "upper," "lower," "left," "right," "front," "rear," "top," "bottom," "inner," "outer," "middle," "vertical," "horizontal," "lateral," and "longitudinal" are used, they indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. These terms are mainly for better describing this application and its embodiments, and are not intended to limit the indicated device, element, or component to having a specific orientation, or to be constructed and operated in a specific orientation.

[0021] Furthermore, in addition to indicating location or positional relationship, some of the aforementioned terms may also have other meanings. For example, the term "above" may also be used in some cases to indicate a certain dependency or connection relationship. Those skilled in the art can understand the specific meaning of these terms in this application based on the specific circumstances.

[0022] Furthermore, in this application, the terms "installation," "setup," "equipped with," "connection," "linking," and "socketing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral structure; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium, or an internal connection between two devices, components, or parts. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0023] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. This application will now be described in detail with reference to the accompanying drawings and embodiments.

[0024] Example 1

[0025] like Figure 1As shown, a chip bezel removal structure includes an X-axis module 1, an auxiliary slide rail 4 arranged parallel to the X-axis module 1, a Y-axis module 2 mounted between the X-axis module 1 and the auxiliary slide rail 4, a Z-axis module 3 vertically mounted on the Y-axis module 2, and a bezel removal unit 7 mounted on the Z-axis module 3.

[0026] X-axis, Y-axis, and Z-axis modules are standard technologies in the industry. By setting the X-axis, Y-axis, and Z-axis modules, the position of the border removal unit can be adjusted arbitrarily within a limited range, so that the border removal unit can reach any chip position that needs border removal within the limited range.

[0027] The Z-axis module 3 is also equipped with a camera 5 and a light source 6, both of which face downwards.

[0028] The camera can effectively photograph the chip that needs to have its borders removed. Operators can adjust the equipment's operating parameters based on the photos taken, or the equipment can be configured to adjust its operating parameters automatically by setting the controller. This greatly improves the intelligence and automation of production, and can effectively increase production efficiency.

[0029] The light source illuminates the processed chip, preventing parameter adjustment errors caused by insufficient lighting, further improving image clarity, and thus making the equipment operate more stably and accurately.

[0030] like Figure 2 As shown, the frame removal unit 7 consists of a fixing member 7-1, a slotted photoelectric sensor 7-3 mounted on the fixing member 7-1, an exhaust pipe 7-6 mounted in the slotted photoelectric sensor 7-3, a wind-gathering hood 7-10 mounted at the bottom of the exhaust pipe 7-6, a rotation control unit mounted on the exhaust pipe 7-6, and a frame removal head mounted on the fixing member 7-1.

[0031] An air pump is connected to the top of the air extraction pipe 7-6.

[0032] The air pump keeps the air extraction pipe and the air shroud under negative pressure, so that when the chip frame is removed, the chip itself and the debris can be quickly discharged, which ensures the cleanliness of the working area of ​​the equipment, effectively avoids impurities remaining on the chip, reduces the difficulty of subsequent processing steps, and further improves the product's performance.

[0033] The rotation control unit consists of an angle steering motor 7-2 mounted on a fixed component 7-1, a synchronous pulley 7-5 mounted on the output shaft of the angle steering motor 7-2, and a synchronous belt 7-4 fitted onto both the synchronous pulley 7-5 and the air extraction pipe 7-6.

[0034] The angle steering motor controls the forward and reverse rotation of the synchronous pulley, and the synchronous belt controls the rotation of the air extraction pipe angle. This allows the edge removal head to adjust the angle parameters according to actual production needs, enabling it to remove the chip edge from different angles and further improving the equipment's performance.

[0035] The frame removal head consists of a rotary motor 7-7 that is tilted and fixed on the air extraction pipe 7-6, a coupling 7-8 that is set on the output shaft of the rotary motor 7-7, and an umbrella-shaped scraper 7-9 that is set on the coupling 7-8.

[0036] The umbrella-shaped scraper 7-9 penetrates the wind-gathering cover 7-10 from the side. The lowest plane of the umbrella-shaped scraper 7-9 is parallel to the lowest plane of the wind-gathering cover 7-10, and the lowest plane of the umbrella-shaped scraper 7-9 is lower than the lowest plane of the wind-gathering cover 7-10.

[0037] When the rotary motor is running, it can drive the umbrella-shaped scraper to rotate through the coupling. The rotation of the umbrella-shaped scraper can scrape off the chip frame. Through the X-axis module, Y-axis module, Z-axis module and angle steering motor, the umbrella-shaped scraper can be controlled to work at any position, any height and any angle within the working range, thereby meeting the production needs and effectively removing the chip frame at different angles.

[0038] It should be noted that all features disclosed in this specification, or all steps in all methods or processes disclosed, may be combined in any way, except for mutually exclusive features and / or steps.

[0039] Furthermore, the specific embodiments described above are exemplary. Those skilled in the art can devise various solutions inspired by the disclosure of this invention, and these solutions all fall within the scope of this invention and its protection. Those skilled in the art should understand that this specification and its accompanying drawings are illustrative and not intended to limit the scope of the claims. The scope of protection of this invention is defined by the claims and their equivalents.

Claims

1. A chip bezel-less structure, characterized in that, It includes an X-axis module (1), an auxiliary slide rail (4) arranged parallel to the X-axis module (1), a Y-axis module (2) mounted between the X-axis module (1) and the auxiliary slide rail (4), a Z-axis module (3) vertically mounted on the Y-axis module (2), and a frame removal unit (7) mounted on the Z-axis module (3). The frame removal unit (7) consists of a fixing member (7-1), a slotted photoelectric sensor (7-3) mounted on the fixing member (7-1), an exhaust pipe (7-6) mounted in the slotted photoelectric sensor (7-3), a wind-gathering hood (7-10) mounted at the bottom of the exhaust pipe (7-6), a rotation control unit mounted on the exhaust pipe (7-6), and a frame removal head mounted on the fixing member (7-1). The frame removal head consists of a rotary motor (7-7) that is tilted and fixed on the air extraction pipe (7-6), a coupling (7-8) set on the output shaft of the rotary motor (7-7), and an umbrella-shaped scraper (7-9) set on the coupling (7-8).

2. The chip bezel-less structure according to claim 1, characterized in that, The Z-axis module (3) is also equipped with a camera (5) and a light source (6), and both the camera (5) and the light source (6) are positioned facing downwards.

3. The chip bezel-less structure according to claim 2, characterized in that, An air pump is connected to the top of the air extraction pipe (7-6).

4. The chip bezel-less structure according to claim 3, characterized in that, The rotation control unit consists of an angle steering motor (7-2) mounted on a fixed component (7-1), a synchronous pulley (7-5) mounted on the output shaft of the angle steering motor (7-2), and a synchronous belt (7-4) fitted onto both the synchronous pulley (7-5) and the air extraction pipe (7-6).

5. A chip bezel-less structure according to claim 4, characterized in that, The umbrella-shaped shovel (7-9) penetrates the wind-gathering cover (7-10) from the side. The lowest plane of the umbrella-shaped shovel (7-9) is parallel to the lowest plane of the wind-gathering cover (7-10), and the lowest plane of the umbrella-shaped shovel (7-9) is lower than the lowest plane of the wind-gathering cover (7-10).

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