A contact force stable long-stroke arc striking device

Abstract

The application discloses a kind of touch force stable large-stroke arc striking devices, including arc striking needle, lengthening rod, arc striking rod, fixed sleeve, guide rod cylinder, cylinder fixed seat, target material, the guide rod cylinder is installed on cylinder fixed seat, fixed sleeve is fixedly installed on fixed seat, the fixed sleeve is installed in straight column type oilless bushing, and sliding pair is formed with arc striking rod, the guide rod cylinder is connected with arc striking rod by insulating connecting block, the arc striking rod passes through fixed sleeve, and arc striking rod terminal string connects lengthening rod and arc striking needle.Arc striking needle is driven by composite power source, and arc striking needle is driven by spring compression force to contact target material, impact force is small, can greatly improve the service life of arc striking needle, to effectively improve equipment use efficiency and reduce maintenance cost, simultaneously, guide rod cylinder drives arc striking needle to make target material separate, can reduce the occurrence of sticking needle phenomenon when arc striking, avoid causing short circuit.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of ion plating equipment, in particular to a touch force stable long-stroke arc starting device. BACKGROUND

[0002] Ion plating technology is a new vacuum plating technology developed in recent decades, including two-stage ion plating, hollow cathode ion plating, hot wire arc ion plating, cathodic arc ion plating, multi-arc ion plating, etc. Among the many ion plating technologies, multi-arc ion plating is the most widely used.

[0003] Multi-arc ion plating is a process in which the target material is evaporated by controlling the movement of the electric arc on the surface of the target material under vacuum conditions, and a high bias voltage is applied to the substrate to make the target material particles evaporated by the electric arc hit the substrate at high speed to form a thin film. Since the electric arc on the surface of the target material is a low-voltage, high-current direct current power supply, it cannot maintain the arc by itself and needs to rely on a special arc starting device to generate the arc. When starting the arc, the anode is applied by the arc starting needle, the cathode is applied by the target material, the anode and cathode are temporarily short-circuited by the arc starting needle briefly contacting the target material, and then when the arc starting needle leaves the surface of the target material, the anode and cathode circuit is broken and an arc is generated, and a stable low-voltage, high-current output is provided by the arc power supply to realize self-maintenance of the arc.

[0004] Currently, there are mainly two kinds of arc starting devices. One is an electric arc starting device, which drives the arc starting needle to move by generating a magnetic field through the coil. After the arc is successfully started, the coil is de-energized and the arc starting needle is reset by a spring to realize the reciprocating motion of the arc starting needle. This scheme can ensure the sealing, but the magnetic force of the magnetic field generated by the coil energization is small, and the corresponding spring force is also small. This not only makes the movement stroke of the arc starting needle short, but also easily causes the arc starting needle to stick due to heat generated during arc starting, which makes the arc starting needle unable to rebound and causes short circuit. The other is a pneumatic arc starting device, which drives the arc starting needle to move reciprocally by controlling the action of the gas cylinder. Although this scheme has large power when the arc starting needle is separated from the target material and is not prone to sticking, the impact force is large when the arc starting needle contacts the target material, the service life of the arc starting needle is short and needs to be frequently replaced, and especially in the large-stroke arc starting range, the touch force is not stable, which is either too large or too small.

[0005] In view of the problems existing in the current electric arc starting device and pneumatic arc starting device, the present application aims to solve the problems of small spring force and short stroke of the arc starting needle of the electric arc starting device, the problem of easy sticking of the arc starting needle, the problem of large impact force when the arc starting needle contacts the target material of the pneumatic arc starting device, and the problem of short service life of the arc starting needle. SUMMARY

[0006] In view of the above problems, the present application provides a touch force stable long-stroke arc starting device driven by a composite power source.

[0007] To solve the above technical problems, the technical scheme adopted by the present application is: a touch force stable large stroke arc striking device, comprising an arc striking needle, an extension rod, an arc striking rod, a fixed sleeve, a guide rod cylinder, a cylinder fixing seat, and a target material, the guide rod cylinder is installed on the cylinder fixing seat, the fixed sleeve is fixedly installed on the fixing seat, a straight column type oil-free bushing is installed in the fixed sleeve, and an elastic check ring is used for limiting to prevent it from moving, forming a sliding pair with the arc striking rod, an adjusting washer and a compression spring are installed between the fixed sleeve and the arc striking rod on the side close to the atmosphere, and a baffle is used to press against the shaft shoulder of the arc striking rod, so that the arc striking rod is under a small spring compression force in a free state and is not ejected, a skeleton oil seal and a U-shaped sealing ring combined sealing element are installed between the fixed sleeve and the arc striking rod on the side close to the vacuum, and a sealing gland is used to press and fix, a shoulder type oil-free bushing is further installed on the fixed sleeve, and a baffle is used to press tightly to prevent it from moving on the shaft, the guide rod cylinder is connected with the arc striking rod through an insulating connecting block, two guide shafts are fixedly installed on the insulating connecting block and cooperate with the oil-free bushing to form a sliding pair, a flat groove is milled on the end of the arc striking rod, and a groove is milled on the insulating connecting block to form an integral whole, the arc striking rod passes through the fixed sleeve, and the extension rod and the arc striking needle are connected in series at the end of the arc striking rod.

[0008] Further, the arc striking needle is selected from tungsten.

[0009] Further, a plating prevention shield two is designed at the place where the arc striking rod passes through the fixed sleeve.

[0010] Further, a plating prevention shield one is designed at the place where the extension rod and the arc striking needle are connected and fixed.

[0011] Further, the fixed sleeve is locked on the fixing seat through a pin, insulating washers are arranged between the fixed sleeve and the fixing seat, sealing ring one and sealing ring two are respectively arranged on the upper and lower parts of the insulating washers, and an insulating sleeve is directly arranged between the pin and the fixed sleeve.

[0012] Further, a positive electrode wiring end for grounding is further arranged above the fixed sleeve.

[0013] From the above description of the structure of the present application, compared with the prior art, the present application has the following advantages:

[0014] The arc striking needle of the present application is driven by a composite power source, the contact movement of the arc striking needle and the target material is driven by the compression spring force to make the arc striking needle retract, and the separation movement of the arc striking needle and the target material is driven by the guide rod cylinder to make the arc striking needle extend. The arc striking needle is driven by the spring compression force to contact the target material, the impact force is small, the service life of the arc striking needle can be greatly improved, the use efficiency of the equipment is effectively improved, and the maintenance cost is reduced, meanwhile, the arc striking needle is driven by the guide rod cylinder to separate from the target material, the occurrence of needle sticking during arc striking can be reduced, and short circuit can be avoided. BRIEF DESCRIPTION OF DRAWINGS

[0015] The accompanying drawings, which form a part of this application, are intended to provide further understanding of the application and are incorporated herein in their entirety, and they illustrate one exemplary embodiment of the present application and are used for explaining the present application, and do not constitute improper limitations on the present application. In the drawings:

[0016] Figure 1 A structure schematic diagram of the arc striking device with stable touch force and large stroke according to the present application;

[0017] Figure 2 An A-A sectional view of the arc striking device with stable touch force and large stroke according to the present application. DETAILED DESCRIPTION

[0018] In order to make the objects, technical solutions and advantages of the present application clearer, the present application is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application, and do not constitute improper limitations on the present application.

[0019] EMBODIMENT

[0020] REFERENCE Figure 1 , Figure 2The application relates to a touch force stable long-stroke arc striking device, which comprises an arc striking needle 1, an elongated rod 3, an arc striking rod 4, a fixed sleeve 7, a guide rod cylinder 24, a cylinder fixing base 25 and target material 26, the guide rod cylinder 24 is installed on the cylinder fixing base 25, the fixed sleeve 7 is fixedly installed on the fixing base 15, a straight column type oil-free bushing 11 is installed in the fixed sleeve 7, and the straight column type oil-free bushing 11 is limited by an elastic baffle 10 to prevent movement and forms a sliding pair with the arc striking rod 4, so that the arc striking rod 4 can smoothly move along the axial direction, an adjusting washer 12 and a compression spring 13 are installed between the fixed sleeve 7 and the arc striking rod 4 on the side close to the atmosphere, and a baffle 21 is used to press against the shaft shoulder of the arc striking rod 4, so that the arc striking rod 4 is subjected to a small spring compression force in a free state and is not ejected, the adjusting washer 12 and the compression spring 13 facilitate adjustment of the maximum rebound force of the arc striking rod 4, the adjusting washer 12 can be adjusted by being reduced or increased in quantity, and the compression spring 13 can be adjusted by being replaced by a spring with different spring constants or spring wire diameters, a skeleton oil seal 8 and a U-shaped sealing ring 9 combined sealing element are installed between the fixed sleeve 7 and the arc striking rod 4 on the side close to the vacuum, and the combined sealing element is pressed and fixed by a sealing gland 6, so as to effectively isolate the vacuum and the atmospheric environment during the movement of the arc striking rod 4, and the service life is effectively ensured by selecting a high-temperature-resistant sealing ring material, a shoulder type oil-free bushing 20 is further installed on the fixed sleeve 7 and is pressed tightly by the baffle 21 to prevent axial movement, the guide rod cylinder 24 is connected with the arc striking rod 4 through an insulating connecting block 23, two guide shafts 16 are fixedly installed on the insulating connecting block 23 and form a sliding pair with the oil-free bushing 20, a flat groove is milled on the head end of the arc striking rod 4, a recess is milled on the insulating connecting block 23 and matched with the flat groove to form an integral whole, so that the arc striking needle 1 of the arc striking device is prevented from rotating randomly during the working process, the arc striking rod 4 penetrates through the fixed sleeve 7, the elongated rod 3 and the arc striking needle 1 are connected with the tail end of the arc striking rod 4, and the arc striking needle 1 is selected to be a tungsten electrode to ensure stable arc striking.

[0021] A plating prevention mask two 5 is designed at the position where the arc striking rod 4 penetrates through the fixed sleeve 7, and a plating prevention mask one 2 is designed at the position where the elongated rod 3 and the arc striking needle 1 are connected and fixed, so that the arc striking needle 1 can be disassembled and replaced without being affected by film deposition.

[0022] The fixed sleeve 7 is locked on the fixing base 15 through a pin 27, insulating washers 14 are arranged between the fixed sleeve 7 and the fixing base 15, sealing rings one 17 and sealing rings two 18 are arranged on the upper and lower portions of the insulating washers 14 respectively, the pin 27 is directly provided with an insulating sleeve 19, and a positive electrode wiring end 22 for grounding is further arranged above the fixed sleeve 7.

[0023] When the arc striking device works, the anode terminal 22 is grounded, the guide rod cylinder 24 is in the initial state of extension, the cylinder end face pushes against the insulating connecting block 23 to drive the arc striking rod 4 to extend the arc striking needle 1 away from the target material and the target material is not in contact, at this time the compression spring between the guide shaft and the cylinder seat is in the compressed state. When the arc striking signal is received, the guide rod cylinder 24 acts to retract, at this time the arc striking rod 4 is also retracted under the driving of the spring compression force, driving the arc striking needle 1 to touch the target material. The tungsten electrode is driven to touch the target material 26 by the spring compression force, which can prevent the impact force from being too large to cause damage when striking the arc, and the cylinder retracts faster than the tungsten electrode touches the target material 26, which can quickly push out to make the tungsten electrode and the target material 26 instantaneously separate, thereby achieving better arc striking effect. When the ignition arc discharge is generated, the arc striking device is automatically cut off (the arc striking device is repeatedly operated when the ignition arc discharge is not generated), and the arc power source maintains the stable discharge between the cathode arc source and the coating chamber.

[0024] The arc striking needle is driven by a composite power source, the contact movement of the arc striking needle and the target material is generated by the compression force of the compression spring to drive the arc striking needle to retract, and the separation movement of the arc striking needle and the target material is generated by the extension of the guide rod cylinder to drive the arc striking needle to extend. The arc striking needle is driven to touch the target material by the spring compression force, the impact force is small, the service life of the arc striking needle can be greatly improved, thereby effectively improving the use efficiency of the equipment and reducing the maintenance cost, and the arc striking needle is driven to separate from the target material by the guide rod cylinder, which can reduce the occurrence of the sticking phenomenon of the arc striking needle and avoid causing short circuit.

[0025] The above only describes the preferred embodiments of the present application and is not used to limit the present application, any modification, equivalent replacement and improvement made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A force-stabilized long-stroke arc initiation device, characterized in that: The arc striking needle, the lengthening rod, the arc striking rod, the fixed sleeve, the guide rod cylinder, the cylinder fixed seat, and the target material are included.

2. The arc striking device of claim 1, wherein: The fixed sleeve is fixedly installed on the fixed seat, the straight column type oil-free bushing is installed in the fixed sleeve, and the elastic stopper is used for limiting to prevent the straight column type oil-free bushing from moving, and the straight column type oil-free bushing forms a sliding pair with the arc striking rod, the adjusting washer and the compression spring are installed between the fixed sleeve close to the atmosphere side and the arc striking rod, and the shaft shoulder of the arc striking rod is pressed against the baffle, the skeleton oil seal and the U-shaped sealing ring combined sealing element are installed between the fixed sleeve close to the vacuum side and the arc striking rod, and the sealing gland is used for pressing and fixing, the shoulder type oil-free bushing is installed on the fixed sleeve, and the baffle is used for pressing to prevent the shoulder type oil-free bushing from moving on the shaft, the guide rod cylinder is connected with the arc striking rod through the insulating connecting block, two guide shafts are fixedly installed on the insulating connecting block, and the insulating connecting block cooperates with the oil-free bushing to form a sliding pair, the flat groove is milled on the head end of the arc striking rod, the recess is milled on the insulating connecting block, and the arc striking rod passes through the fixed sleeve, and the arc striking rod is connected with the lengthening rod and the arc striking needle.

3. The arc striking device of claim 1, wherein: The arc striking needle is made of tungsten.

4. The arc striking device of claim 1, wherein: The fixed sleeve is provided with the anti-plating shield two at the position where the arc striking rod 4 passes through the fixed sleeve.

5. The arc striking device of claim 1, wherein: The fixed sleeve is provided with the anti-plating shield one at the position where the lengthening rod 3 and the arc striking needle are connected and fixed.

6. The arc striking device of claim 1, wherein: The fixed sleeve is locked on the fixed seat through the pin, the insulating washer is arranged between the fixed sleeve and the fixed seat, the sealing ring one and the sealing ring two are arranged on the insulating washer in a top-to-bottom mode, and the insulating sleeve is arranged between the pin and the fixed sleeve. The fixed sleeve is provided with the anode wiring end for grounding.

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